CN108561700A - A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform - Google Patents
A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform Download PDFInfo
- Publication number
- CN108561700A CN108561700A CN201810588285.3A CN201810588285A CN108561700A CN 108561700 A CN108561700 A CN 108561700A CN 201810588285 A CN201810588285 A CN 201810588285A CN 108561700 A CN108561700 A CN 108561700A
- Authority
- CN
- China
- Prior art keywords
- piezoelectric ceramic
- enlarger
- bridge
- platform
- movable beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000000919 ceramic Substances 0.000 claims abstract description 77
- 230000007246 mechanism Effects 0.000 claims abstract description 39
- 230000014509 gene expression Effects 0.000 claims description 25
- 239000011159 matrix material Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 241000282376 Panthera tigris Species 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000005520 cutting process Methods 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/046—Allowing translations adapted to upward-downward translation movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/048—Allowing translations adapted to forward-backward translation movement
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platforms, are processed using Electric Discharge Wire-cutting Technology, reduce assembly mechanically；It is in parallel using four symmetrical flexible differential enlargers, to realize that the translation of Z-direction is realized in moving platform high-precision translation in X/Y plane, series bridge enlarger；Large platform one chain-wales of series connection, use high-frequency piezoelectric ceramic piece to provide the ultrasonic vibration in plane；Precisely locating platform is compact-sized, and platform can be made to have higher intrinsic frequency；It being capable of the caused coupling error of eliminating machine transmission using symmetrical compliant mechanism；There is bigger displacement equations ratio using differential enlarger and bridge-type enlarger so that moving platform has larger stroke in X to, Y-direction, Z-direction translation；Four groups of parallel sheet flexure hinge mechanisms being connected with bridge type mechanism can realize the decoupling that precisely locating platform is translatable to moving platform X to translation and Y-direction, improve the kinematic accuracy of moving platform.
Description
Technical field
The present invention relates to field of micro-Na manufacture, more particularly to a kind of Three Degree Of Freedom ultrasonic vibration secondary process precision positioning is flat
Platform.
Background technology
With the development of science and technology, micro ＆ nano technology is rapidly developed, and carries the complicated micro-nano structure of nano-precision
Demand is more and more extensive, in order to obtain higher process velocity and machining accuracy, and ultrasonic vibration is applied to micro-nano technology mistake
Cheng Zhong, ultrasonic vibration auxiliary tooling platform is less at present, and the ultrasonic vibration fine motion for especially having three-degree-of-freedom motion performance is flat
Platform.Currently, most of ultrasonic vibration auxiliary tooling platform strokes are smaller and cannot achieve three-dimension process, it cannot be satisfied processing and want
It asks.
Invention content
The purpose of the present invention is overcoming deficiency in the prior art, provide a kind of flat to translation, Y-direction translation and Z-direction with X
Dynamic Three Degree Of Freedom, high-precision, the Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform with ultrasonic vibration function.
The technical solution adopted in the present invention is：A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform is X
Axis, Y-axis axially symmetric structure, including large platform and chain-wales, the center series connection chain-wales of the large platform, the chain-wales
Bottom connect with bridge-type enlarger；
The peripheral side of the bridge-type enlarger is symmetrically connected with 4 differential enlargers of symmetrical expression along X to, Y-direction, along X
The front end of one of 2 differential enlargers of symmetrical expression to arrangement differential enlarger of symmetrical expression is provided with
Realize that the bridge-type enlarger drives first piezoelectric ceramic actuators of the chain-wales X to translation, along 2 of Y-direction arrangement
The front end of one of the differential enlarger of the symmetrical expression differential enlarger of symmetrical expression, which is provided with, realizes the bridge
Formula enlarger drives the second piezoelectric ceramic actuator of the chain-wales Y-direction translation；The inside of the bridge-type enlarger is along Z
To the third piezoelectric ceramic actuator for being provided with the realization chain-wales Z-direction translation；
The chain-wales include moving platform, and four side X of the moving platform are symmetrically arranged with 4 flexible hinge machines to, Y-direction
Structure is provided with to the front end of one of 2 flexure hinge mechanisms of arrangement flexure hinge mechanism along X and realizes institute
First high-frequency piezoelectric ceramic pieces of the moving platform X to high-frequency vibration is stated, 2 flexure hinge mechanisms arranged along Y-direction are wherein
The front end of one flexure hinge mechanism is provided with the second high frequency piezoelectric ceramic for realizing the moving platform Y-direction high-frequency vibration
Piece.
Further, the differential enlarger of symmetrical expression includes the first movable beam, the second movable beam, the first power transmission
Connecting rod, third movable beam, parallel sheet flexure hinge mechanism, the 4th movable beam and the second force transmitting link；Described first can
The piezoelectric ceramics contact surface of dynamic crossbeam and first piezoelectric ceramic actuator or second piezoelectric ceramic actuator is movable
Semicircle, first piezoelectric ceramic actuator or second piezoelectric ceramic actuator side pre-tightened by pretension bolt,
And with the substrate contact of the large platform, the output of first piezoelectric ceramic actuator or second piezoelectric ceramic actuator
End is contacted with the first movable beam；First movable beam respectively with second movable beam and second force transmitting link
Connection；Second movable beam is connect with the matrix of the large platform, the output end of second movable beam and described the
One force transmitting link connects；The other end of first force transmitting link is connect with the third movable beam；Second power transmission connects
The end of bar is connect with the 4th movable beam, and the 4th movable beam is connect with the third movable beam, and described
The output end of three movable beams is connect by the parallel sheet flexure hinge mechanism with the bridge-type enlarger.
Wherein, the parallel sheet flexure hinge mechanism includes two parallel sheet-like flexible hinges, parallel described
The side of shape flexible hinge is connect with the bridge-type enlarger, the other side and the output end of the third movable beam connect
It connects, realizes the decoupling that precisely locating platform is translatable to chain-wales X to translation and Y-direction.
Further, the bridge-type enlarger includes 2 vertical beams, 2 crossbeams, output tables；A piece vertical beam and institute
The contact surface for stating third piezoelectric ceramic actuator is movable semicircle, and another vertical beam is pre-tightened, simultaneously by pretension bolt
It is contacted with the third piezoelectric ceramic actuator；2 vertical beam other ends are connect with 2 crossbeams respectively；2 cross
The other end of beam is connect with the output table.
Further, the angle of the bottom of the bridge-type enlarger four is respectively connected with supporting mechanism, each support machine
Structure is made of two concatenated hook hinges.
The beneficial effects of the invention are as follows：Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform of the present invention uses electrical fire
Yarn cutting technique is processed, and reduces assembly mechanically；It is in parallel using four symmetrical flexible differential enlargers, from
And realize moving platform high-precision translation in X/Y plane, a kind of translation of novel bridge type enlarger realization Z-direction of connecting；Greatly
Platform one chain-wales of series connection, use high-frequency piezoelectric ceramic piece to provide the ultrasonic vibration in plane；X is flat to, Y-direction, Z-direction precision positioning
Platform is compact-sized, and platform can be made to have higher intrinsic frequency；It being capable of eliminating machine transmission institute using symmetrical compliant mechanism
Caused by coupling error；There is bigger displacement equations ratio using differential enlarger and bridge-type enlarger so that dynamic flat
Platform X to, Y-direction, Z-direction translation have larger stroke；Piezoelectric ceramics is designed to that semicircle connects with flexible amplification mechanism contact surface
Contacting surface bears moment of flexure and torque to avoid piezoelectric ceramics, prevents the destruction of piezoelectric ceramics；With bridge type mechanism be connected four groups it is parallel
Sheet-like flexible linkage can realize the decoupling that precisely locating platform is translatable to moving platform X to translation and Y-direction, improve dynamic flat
The kinematic accuracy of platform；With supporting mechanism, gravity can be weakened to a certain extent to the influence caused by platform.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the differential enlarger enlarged diagram of symmetrical expression of the present invention；
Fig. 3 is the bridge-type enlarger enlarged diagram of the present invention；
Fig. 4 is the chain-wales enlarged diagram of the present invention；
Fig. 5 is the supporting mechanism enlarged diagram of the present invention.
Attached drawing marks：1, matrix；2, the first piezoelectric ceramic actuator；3, pretension bolt；4, symmetrical differential enlarger；
41, the first movable beam；42, the second movable beam；43, the first force transmitting link；44, third movable beam；45, parallel sheet is soft
Property linkage；46, the 4th movable beam；47, the second force transmitting link；5, bridge-type enlarger；51, vertical beam；52, crossbeam；53、
Output table；6, third piezoelectric ceramic actuator；7, the second high-frequency piezoelectric ceramic piece；8, the first high-frequency piezoelectric ceramic piece；9, small flat
Platform；91, chain-wales matrix；92, flexure hinge mechanism；93, moving platform；10, the second piezoelectric ceramic actuator；11, supporting mechanism；
Specific implementation mode
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and coordinate attached drawing
Detailed description are as follows：
If attached drawing 1 is to shown in Fig. 5, a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform is X-axis, Y-axis axis
The center series connection of symmetrical structure, including the integrally formed large platform of plank wire cutting and chain-wales 9, the large platform is described small flat
It connects with bridge-type enlarger 5 bottom of platform 9, the chain-wales 9.
The peripheral side of the bridge-type enlarger 5 passes through 4 groups of parallel sheet flexible hinges pair in parallel to, Y-direction respectively along X
Title is connected with the differential enlarger of 4 symmetrical expressions 4.Along wherein the one of the differential enlarger of 2 of X to the arrangement symmetrical expressions 4
The front end of the differential enlarger of a symmetrical expression 4 is provided with piezoelectric ceramic actuator (that is, first piezoelectric ceramic actuator 2),
The front of the differential enlarger of another symmetrical expression 4 is not provided with piezoelectric ceramic actuator, and the symmetrical expression along X to arrangement is poor
Dynamic enlarger 4 is by the first piezoelectric ceramic actuator 2；First piezoelectric ceramic actuator 2 by it is coupled along X to setting
The differential enlarger of the symmetrical expression set 4 drives the bridge-type enlarger 5 along X to translation, then drives and the bridge-type
The chain-wales 9 that enlarger 5 is connected are along X to translation.Along the differential enlarger of 2 symmetrical expressions of Y-direction arrangement 4
The front end of the differential enlarger of one of them described symmetrical expression 4 is provided with piezoelectric ceramic actuator (that is, the second Piezoelectric Ceramic
Device 10), the front of the differential enlarger of another symmetrical expression 4 is not provided with piezoelectric ceramic actuator, along the described right of Y-direction arrangement
The differential enlarger of title formula 4 is by the second piezoelectric ceramic actuator 10；Second piezoelectric ceramic actuator 10 is by coupled
The differential enlarger of symmetrical expression 4 along Y-direction setting drive the bridge-type enlarger 5 to be translatable along Y-direction, then drive and
The chain-wales 9 that the bridge-type enlarger 5 is connected are translatable along Y-direction.The top of the bridge-type enlarger 5 is along Z-direction string
Join the chain-wales 9, the inside of the bridge-type enlarger 5 is provided with piezoelectric ceramic actuator (that is, third piezoelectricity is made pottery along Z-direction
Porcelain driver 6)；The bridge-type enlarger 5 is driven by third piezoelectric ceramic actuator 6；The third piezoelectric ceramic actuator 6
The chain-wales 9 are driven to be translatable along Z-direction by the coupled bridge-type enlarger 5 along Z-direction setting.
The chain-wales 9 include moving platform 93, and four side X of the moving platform 93 are symmetrically arranged with 4 flexibilities to, Y-direction
Linkage 92.Along X to the front end of one of 2 flexure hinge mechanisms 92 of arrangement flexure hinge mechanism 92
It is provided with high-frequency piezoelectric ceramic piece (that is, first high-frequency piezoelectric ceramic piece 8), the high-frequency piezoelectric ceramic piece other end and chain-wales matrix
91 connections, the front end of another flexure hinge mechanism 92 is not provided with high-frequency piezoelectric ceramic piece；The moving platform 93 passes through
First high-frequency piezoelectric ceramic piece 8 is realized along X to high-frequency vibration.Along wherein the one of 2 flexure hinge mechanisms 92 of Y-direction arrangement
The front end of a flexure hinge mechanism 92 is provided with high-frequency piezoelectric ceramic piece (that is, second high-frequency piezoelectric ceramic piece 7), high frequency pressure
The electroceramics piece other end is connect with chain-wales matrix 91, and the front end of another flexure hinge mechanism 92 is not provided with high frequency pressure
Electroceramics piece；The moving platform 93 is realized by the second high-frequency piezoelectric ceramic piece 7 along Y-direction high-frequency vibration.
Wherein, the differential enlarger 4 of the symmetrical expression includes the first movable beam 41, the second movable beam 42, first biography
Power connecting rod 43, third movable beam 44, parallel sheet flexure hinge mechanism 45, the 4th movable beam 46 and the second force transmitting link
47；The pressure of first movable beam 41 and first piezoelectric ceramic actuator 2 or second piezoelectric ceramic actuator 10
Electroceramics contact surface is movable semicircle, first piezoelectric ceramic actuator 2 or second piezoelectric ceramic actuator 10
Side is pre-tightened and is contacted with the matrix of the large platform 1, first piezoelectric ceramic actuator 2 or described by pretension bolt 3
The output end of second piezoelectric ceramic actuator 10 is contacted with the first movable beam 41；First movable beam 41 respectively with it is described
Second movable beam 42 and second force transmitting link 47 connection；The matrix 1 of second movable beam 42 and the large platform
Connection, the output end of second movable beam 42 are connect with first force transmitting link 43；First force transmitting link 43
The other end is connect with the third movable beam 44；The end of second force transmitting link 47 connects with the 4th movable beam 46
It connects, the 4th movable beam 46 is connect with the third movable beam 44, and the output end of the third movable beam 44 is logical
The parallel sheet flexure hinge mechanism 45 is crossed to connect with the bridge-type enlarger 5.
The parallel sheet flexure hinge mechanism 45 includes two parallel sheet-like flexible hinges, and the parallel sheet is soft
The side of property hinge is connect with the bridge-type enlarger 5, the other side is connect with the output end of the third movable beam 44,
Realize the decoupling that precisely locating platform is translatable to chain-wales 9X to translation and Y-direction.
The bridge-type enlarger 5 includes 2 vertical beams 51,2 crossbeams 52, output tables 53；A piece vertical beam 51 and institute
The contact surface for stating third piezoelectric ceramic actuator 6 is movable semicircle, and another vertical beam 51 is pre- by pretension bolt 3
Tightly and with the third piezoelectric ceramic actuator 6 contact；2 51 other ends of the vertical beam connect with 2 crossbeams 52 respectively
It connects；The other end of 2 crossbeams 52 is connect with the output table 53.
The angle of bottom four of the bridge-type enlarger 5 is respectively connected with supporting mechanism 11, and each supporting mechanism 11 is
It is made of two concatenated hook hinges.
The operation principle of the present invention：
By changing the voltage on the first piezoelectric ceramic actuator 2, make the first piezoelectric ceramic actuator 2 by coupled
Drive bridge-type enlarger 5 and chain-wales 9 thereon along X to translation to the differential enlarger 4 of symmetrical expression of arrangement along X.
By change the second piezoelectric ceramic actuator 10 on voltage, make the second piezoelectric ceramic actuator 10 by with its phase
The differential enlarger 4 of symmetrical expression along Y-direction arrangement even drives bridge-type enlarger 5 and chain-wales 9 thereon flat along Y-direction
It is dynamic.
By changing the voltage on third piezoelectric ceramic actuator 6, make third piezoelectric ceramic actuator 6 by coupled
The bridge-type enlarger 5 along Z-direction arrangement drive chain-wales 9 to be thereon translatable along Z-direction.
By changing the voltage in the first high-frequency piezoelectric ceramic piece 8, the first high-frequency piezoelectric ceramic piece 8 is made to drive chain-wales 9
Moving platform 93 along X to high-frequency vibration.
By changing the voltage in the second high-frequency piezoelectric ceramic piece 7, the second high-frequency piezoelectric ceramic piece 7 is made to drive chain-wales 9
Moving platform 93 along Y-direction high-frequency vibration.
In conclusion the moving platform 93 of the present invention is not only able to realize X to translation, Y-direction translation and Z-direction translation, moreover it is possible to real
Now ultrasonic high-frequency vibration is done to, Y-direction along X.
Although the preferred embodiment of the present invention is described above in conjunction with attached drawing, the invention is not limited in upper
The specific implementation mode stated, the above mentioned embodiment is only schematical, be not it is restrictive, this field it is common
Technical staff under the inspiration of the present invention, without breaking away from the scope protected by the purposes and claims of the present invention, may be used also
By make it is many in the form of, within these are all belonged to the scope of protection of the present invention.
Claims (5)
1. a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform, which is characterized in that for X-axis, Y-axis axial symmetry knot
Structure, including large platform and chain-wales, the center series connection chain-wales of the large platform, bottom and the bridge-type of the chain-wales are put
Great institutions are connected；
The peripheral side of the bridge-type enlarger is symmetrically connected with 4 differential enlargers of symmetrical expression along X to, Y-direction, along X to cloth
The front end of one of the 2 differential enlargers of symmetrical expression the set differential enlarger of symmetrical expression is provided with realization
The bridge-type enlarger drives first piezoelectric ceramic actuators of the chain-wales X to translation, described in 2 of Y-direction arrangement
The front end of one of the symmetrical differential enlarger differential enlarger of symmetrical expression, which is provided with, realizes that the bridge-type is put
Great institutions drive the second piezoelectric ceramic actuator of the chain-wales Y-direction translation；The inside of the bridge-type enlarger is set along Z-direction
It is equipped with the third piezoelectric ceramic actuator for realizing the chain-wales Z-direction translation；
The chain-wales include moving platform, and four side X of the moving platform are symmetrically arranged with 4 flexure hinge mechanisms to, Y-direction,
It is provided with described in realization to the front end of one of 2 flexure hinge mechanisms of arrangement flexure hinge mechanism along X
Moving platform X is to the first high-frequency piezoelectric ceramic piece of high-frequency vibration, and wherein the one of 2 flexure hinge mechanisms arranged along Y-direction
The front end of a flexure hinge mechanism is provided with the second high-frequency piezoelectric ceramic piece for realizing the moving platform Y-direction high-frequency vibration.
2. a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform according to claim 1, which is characterized in that
The differential enlarger of symmetrical expression is movably horizontal including the first movable beam, the second movable beam, the first force transmitting link, third
Beam, parallel sheet flexure hinge mechanism, the 4th movable beam and the second force transmitting link；First movable beam and described first
The piezoelectric ceramics contact surface of piezoelectric ceramic actuator or second piezoelectric ceramic actuator be movable semicircle, described first
Piezoelectric ceramic actuator or second piezoelectric ceramic actuator side pre-tightened by pretension bolt and with the base of the large platform
Body contacts, and the output end of first piezoelectric ceramic actuator or second piezoelectric ceramic actuator connects with the first movable beam
It touches；First movable beam is connect with second movable beam and second force transmitting link respectively；Described second is movable
Crossbeam is connect with the matrix of the large platform, and the output end of second movable beam is connect with first force transmitting link；Institute
The other end for stating the first force transmitting link is connect with the third movable beam；The end of second force transmitting link and the described 4th
Movable beam connects, and the 4th movable beam is connect with the third movable beam, the output end of the third movable beam
End is connect by the parallel sheet flexure hinge mechanism with the bridge-type enlarger.
3. a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform according to claim 2, which is characterized in that
The parallel sheet flexure hinge mechanism includes two parallel sheet-like flexible hinges, and the one of the parallel sheet-like flexible hinge
Side is connect with the bridge-type enlarger, the other side is connect with the output end of the third movable beam, realizes precision positioning
The decoupling that platform is translatable to chain-wales X to translation and Y-direction.
4. a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform according to claim 1, which is characterized in that
The bridge-type enlarger includes 2 vertical beams, 2 crossbeams, output tables；A piece vertical beam and the third Piezoelectric Ceramic
The contact surface of device be movable semicircle, another vertical beam by pretension bolt pre-tighten and with the third piezoelectric ceramics
Driver contacts；2 vertical beam other ends are connect with 2 crossbeams respectively；The other end of 2 crossbeams with it is described
Output table connects.
5. a kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform according to claim 1, which is characterized in that
The angle of bottom four of the bridge-type enlarger is respectively connected with supporting mechanism, and each supporting mechanism is by two concatenated tigers
Gram hinge composition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810588285.3A CN108561700B (en) | 2018-06-08 | 2018-06-08 | Three-degree-of-freedom ultrasonic vibration auxiliary machining precision positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810588285.3A CN108561700B (en) | 2018-06-08 | 2018-06-08 | Three-degree-of-freedom ultrasonic vibration auxiliary machining precision positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108561700A true CN108561700A (en) | 2018-09-21 |
| CN108561700B CN108561700B (en) | 2020-03-06 |
Family
ID=63553083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810588285.3A Expired - Fee Related CN108561700B (en) | 2018-06-08 | 2018-06-08 | Three-degree-of-freedom ultrasonic vibration auxiliary machining precision positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108561700B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109531546A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of normal direction two degrees of freedom micromotion platform |
| CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
| CN109622349A (en) * | 2019-01-31 | 2019-04-16 | 天津大学 | A kind of two dimensional ultrasonic vibration platform for micro-nano technology |
| CN109622348A (en) * | 2019-01-31 | 2019-04-16 | 天津大学 | A kind of three-dimensional decoupling ultrasonic nano shake table |
| CN110310696A (en) * | 2019-06-12 | 2019-10-08 | 天津大学 | Three-level displacement equations two degrees of freedom meek precisively positioning platform |
| CN110310695A (en) * | 2019-06-11 | 2019-10-08 | 天津大学 | A kind of change frictional force series parallel type two-freedom stick-slip driving precisely locating platform |
| CN110369248A (en) * | 2019-07-16 | 2019-10-25 | 东北大学 | A kind of varied angle two dimensional ultrasonic vibration auxiliary tooling platform based on flexible hinge |
| CN112447262A (en) * | 2019-08-27 | 2021-03-05 | 天津大学 | Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier |
| CN114198481A (en) * | 2021-12-16 | 2022-03-18 | 北京航空航天大学 | Parallel two-degree-of-freedom precision motion executing mechanism based on flexible hinge |
| CN114337363A (en) * | 2021-01-11 | 2022-04-12 | 西安交通大学 | Bridge type differential flexible displacement reducing mechanism |
| CN109531546B (en) * | 2018-12-25 | 2024-05-31 | 西交利物浦大学 | Micro-motion platform with normal two degrees of freedom |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000075927A (en) * | 1998-08-31 | 2000-03-14 | Olympus Optical Co Ltd | Table mechanism |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN104624463A (en) * | 2015-01-09 | 2015-05-20 | 天津大学 | Two-dimensional ultrasound vibration platform |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
-
2018
- 2018-06-08 CN CN201810588285.3A patent/CN108561700B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000075927A (en) * | 1998-08-31 | 2000-03-14 | Olympus Optical Co Ltd | Table mechanism |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN104624463A (en) * | 2015-01-09 | 2015-05-20 | 天津大学 | Two-dimensional ultrasound vibration platform |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
| CN109584947B (en) * | 2018-09-28 | 2020-11-24 | 天津大学 | Three-degree-of-freedom large-stroke high-precision micro-positioning platform based on bridge type amplification mechanism |
| CN109531546A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of normal direction two degrees of freedom micromotion platform |
| CN109531546B (en) * | 2018-12-25 | 2024-05-31 | 西交利物浦大学 | Micro-motion platform with normal two degrees of freedom |
| CN109622349A (en) * | 2019-01-31 | 2019-04-16 | 天津大学 | A kind of two dimensional ultrasonic vibration platform for micro-nano technology |
| CN109622348A (en) * | 2019-01-31 | 2019-04-16 | 天津大学 | A kind of three-dimensional decoupling ultrasonic nano shake table |
| CN110310695A (en) * | 2019-06-11 | 2019-10-08 | 天津大学 | A kind of change frictional force series parallel type two-freedom stick-slip driving precisely locating platform |
| CN110310695B (en) * | 2019-06-11 | 2021-07-06 | 天津大学 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
| CN110310696B (en) * | 2019-06-12 | 2021-04-27 | 天津大学 | Three-stage displacement amplification two-degree-of-freedom flexible precision positioning platform |
| CN110310696A (en) * | 2019-06-12 | 2019-10-08 | 天津大学 | Three-level displacement equations two degrees of freedom meek precisively positioning platform |
| CN110369248A (en) * | 2019-07-16 | 2019-10-25 | 东北大学 | A kind of varied angle two dimensional ultrasonic vibration auxiliary tooling platform based on flexible hinge |
| CN112447262A (en) * | 2019-08-27 | 2021-03-05 | 天津大学 | Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier |
| CN114337363A (en) * | 2021-01-11 | 2022-04-12 | 西安交通大学 | Bridge type differential flexible displacement reducing mechanism |
| CN114198481A (en) * | 2021-12-16 | 2022-03-18 | 北京航空航天大学 | Parallel two-degree-of-freedom precision motion executing mechanism based on flexible hinge |
| CN114198481B (en) * | 2021-12-16 | 2023-11-10 | 北京航空航天大学 | Parallel two-degree-of-freedom precise motion executing mechanism based on flexible hinge |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108561700B (en) | 2020-03-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108561700A (en) | A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform | |
| CN104595642B (en) | A kind of two degrees of freedom Piezoelectric Driving nanopositioning stage | |
| CN106251909B (en) | A kind of high-precision, big stroke freedom degree parallel connection mini positioning platform | |
| CN101862966B (en) | Two freedom-degree translational parallel decoupling micromotion platform | |
| CN106224713B (en) | A kind of five freedom degree precision positioning platform based on bridge shape compliant mechanism | |
| CN109909976B (en) | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism | |
| CN111546312B (en) | Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism | |
| CN100376361C (en) | Small two-dimensional de-coupling platforms | |
| CN103104793A (en) | Integrated type six degrees of freedom precision positioning platform | |
| CN108615548A (en) | Novel three freedom meek parallel precise locating platform | |
| CN109176420B (en) | Middle-mounted movable joint type flexible decoupling precision positioning structure | |
| CN107378527A (en) | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling | |
| CN109650327A (en) | A kind of plate type three-dimensional large-stroke nanometer operating platform | |
| CN108461109A (en) | Three parallel guide type flexibility of one kind decoupling precision positioning structure | |
| CN102446563A (en) | Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location | |
| CN1669744A (en) | Precision positioning table with six degrees of freedom | |
| CN101837586B (en) | Two-dimensional micromotion stage | |
| CN105904443A (en) | Two-degree-of-freedom flexible parallel mechanism for motion decoupling | |
| CN108527413B (en) | Piezoelectric driving flexible and flexible hand | |
| CN105643592B (en) | A kind of symmetrical decoupling single-freedom and flexible operating mechanism | |
| CN101786269B (en) | Micrometer-nanometer transmission platform | |
| CN106965133B (en) | A kind of Three Degree Of Freedom locating platform of stiffness variable | |
| CN109654333A (en) | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform | |
| CN215815203U (en) | Piezoelectric actuator driven novel three-degree-of-freedom positioning platform based on flexible hinge | |
| CN2782326Y (en) | Six freedom precision positioning working table |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200306 Termination date: 20210608 |