CN109465652B - Contact type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method - Google Patents
Contact type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method Download PDFInfo
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- CN109465652B CN109465652B CN201811452523.4A CN201811452523A CN109465652B CN 109465652 B CN109465652 B CN 109465652B CN 201811452523 A CN201811452523 A CN 201811452523A CN 109465652 B CN109465652 B CN 109465652B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
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Abstract
The invention discloses a rigid-flexible coupling platform with a rigidity switching device, which comprises: a hollow rigid frame, a core motion platform, and a flexible hinge; the hollow rigid frame is connected with the core motion platform through the flexible hinge; the rigid-flexible coupling motion platform further comprises a rigidity switching device; the rigidity switching device is fixed in a gap between the hollow rigid frame and the core motion platform; the rigidity switching device comprises an actuating mechanism and a wedge block; the actuation mechanism controls movement of the wedge block in the void to vary the size of the void between the core motion platform and the rigid frame, thereby varying the stiffness of the flexible hinge. The invention can solve the vibration problem of the rigid-flexible coupling platform in the high-speed movement process, realize high-low rigidity switching, and avoid the contradiction of poor compensation effects of vibration and high-rigidity flexible hinge when the low-rigidity flexible hinge is in high speed.
Description
Technical Field
The invention relates to a motor driving technology, in particular to a rigid-flexible coupling platform with a rigidity switching device and a motion platform.
Background
High-speed precision motion platforms are widely used in the field of semiconductor packaging and the like. Uncertainty in the surface roughness between kinematic pairs in high-speed precision motion platforms can lead to uncertainty in the magnitude of the frictional resistance. In the processes of starting, stopping and micro-feeding of the moving platform, the speed of the moving platform is relatively low, and the fluctuation of the amplitude of the friction resistance easily causes the phenomenon of creeping of the moving platform. Under the action of the closed-loop control system, the driver overcomes friction resistance in a mode of increasing driving force to compensate positioning errors of the moving platform. In the above compensation process, the moving platform will undergo frequent "stationary→moving" state switching. In the process of 'static- & gt movement', the friction resistance between the kinematic pairs can undergo state switching of 'static friction force- & gt dynamic friction force', and the difference between the static friction coefficient and the dynamic friction coefficient can cause acceleration abrupt change at the moment of state switching, so that the 'shake' of the moving platform near the final positioning position is caused, and the positioning precision is influenced.
In order to reduce the influence of positioning errors caused by friction state switching in the processes of starting, stopping and micro-feeding, a very effective scheme is provided, namely a rigid-flexible coupling motion platform based on a flexible hinge, and continuous high-precision motion is realized by means of elastic deformation of the flexible hinge. The working principle of the flexible hinge kinematic pair limits the motion of the flexible hinge kinematic pair which is mainly suitable for micro-stroke. Therefore, in the process of large-stroke movement, the flexible hinge is often matched with a friction kinematic pair to form a macro-micro composite movement platform to realize large-stroke high-precision movement and compensate large-range movement.
However, during this wide range of motion, the stiffness of the flexible hinge itself is very low, so that the flexible hinge can continuously vibrate reciprocally along with the motion of the platform, which can affect the stiffness and motion accuracy of the precision platform during the wide range of motion.
Disclosure of Invention
The invention aims to provide a rigid-flexible coupling platform with a rigidity switching device, which is used for locking a micro-motion platform in the process of large-range movement of a macro-motion platform so as to inhibit the vibration of a flexible hinge, namely, in the process, the precision motion platform can be regarded as a rigid platform; when the precise motion platform starts, stops and micro-feeds, the device automatically unlocks, and releases the flexible hinge, so that the micro-motion platform performs micro-stroke motion, and large-range motion can be compensated. Therefore, the influence of vibration of the flexible hinge on the rigidity and the movement precision of the precision movement platform in the large-range movement process can be reduced, and the influence of creeping on the movement and the positioning precision caused by friction force change of the precision movement platform in the starting, stopping and micro-feeding processes can be reduced. The specific technical scheme is as follows.
A rigid-flexible coupled platform with a stiffness switching device, the rigid-flexible coupled platform comprising: a hollow rigid frame, a core motion platform, and a flexible hinge; the hollow rigid frame is connected with the core motion platform through the flexible hinge; the rigid-flexible coupling motion platform further comprises a rigidity switching device; the rigidity switching device is fixed in a gap between the hollow rigid frame and the core motion platform; the rigidity switching device comprises an actuating mechanism and a wedge block; the actuation mechanism controls movement of the wedge block in the void to vary the size of the void between the core motion platform and the rigid frame, thereby varying the stiffness of the flexible hinge.
Further, the wedge blocks comprise an upper end wedge block and a lower end wedge block; the actuating mechanism comprises a shaft, a spring, an electromagnet and a push-pull electromagnet; the upper end wedge blocks are fixed at the upper end of the shaft, springs are arranged between the two wedge blocks, an electromagnet is arranged below the lower end wedge blocks, and the lower end of the shaft is connected with the push-pull electromagnet.
Further, through holes are reserved on the rigid frame and/or the core motion platform; the shaft penetrates through the through hole and is connected with the rigid frame and/or the core motion platform; the springs comprise an upper spring and a lower spring; the upper spring is arranged between the through hole and the upper wedge block; the lower spring is arranged between the through hole and the lower wedge block.
Further, the through hole should reserve a certain margin, and a transverse movement space is reserved for the shaft.
Further, the actuating mechanism further comprises an upper end fixed stop block and a lower end fixed stop block; the upper wedge block is fixed at the upper end of the shaft through the upper end fixing stop block; the electromagnet is arranged between the lower end wedge block and the lower end fixed stop block.
Further, a limiting device and/or a damper are arranged between the rigid frame and the core motion platform, and the limiting device and/or the damper are used for relieving rigid impact of the core motion platform in contact with the rigid frame.
Further, the inner side of the hollow rigid frame and/or the outer side of the core motion platform are provided with a slope matched with the wedge-shaped block, the slope is smaller than the friction angle of the platform, and the hollow rigid frame and/or the outer side of the core motion platform can be self-locked when contacted with the wedge-shaped block.
Further, the inclination between the core motion platform and the rigid frame is symmetrically arranged.
Further, the core motion platform and the rigid frame are also provided with a supporting rigidity reinforcing structure.
Further, the flexible hinge is a straight beam type or a notch type flexible hinge.
Further, the flexible hinges between the core motion platform and the rigid frame of the rigid-flexible coupled platform are symmetrically arranged.
Further, the rigid-flexible coupling motion platform is manufactured in an integrated mode.
The precise motion platform comprises a machine base, a linear guide rail, a guide rail sliding block, the rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the linear guide rail and the guide rail sliding block are fixed on the machine base; the rigid-flexible coupled moving platform is characterized in that a core moving platform in the rigid-flexible coupled moving platform is connected with the linear driver, and the rigid frame is connected with the linear guide rail through the guide rail sliding block; the displacement sensor is connected with the core motion platform and is used for measuring the displacement of the core motion platform in the motion direction.
Furthermore, the linear driver is a voice coil motor or a linear motor, is directly driven and has high response speed.
A method of controlling the precision motion platform described above, the method comprising the steps of:
s1, the linear driver directly drives the core motion platform, when the driving force fails to overcome the static friction of the rigid frame, the rigidity switching device does not work, and the core motion platform generates micro displacement through the elastic deformation of the flexible hinge to realize precise micro feeding;
s2, when the driving force is increased, the friction force is overcome, the rigid frame is driven to move, the elastic deformation is increased to a certain degree, the rigid frame enters a limiting state, all the driving force is transmitted to the rigid frame to move at a high speed, at the moment, the rigidity switching device enters a working state, and the rigidity switching device locks the flexible hinge and cannot elastically deform;
s3, when the device is stopped, the core platform is braked firstly, the rigid frame is driven to brake through the flexible hinge, and when the rigid frame is braked completely, the rigidity switching device finishes working, and at the moment, the rigidity switching device 'unlocks' the flexible hinge, and elastic deformation occurs to attenuate vibration energy.
Compared with the prior art, the beneficial effects are that:
1. the friction-free flexible hinge kinematic pair is adopted to realize high-precision continuous variable displacement, so that displacement 'shake' caused by acceleration mutation due to friction state switching of the kinematic pair under a low-speed working condition is avoided.
2. The rigid-flexible coupled motion platform design is adopted, the flexible hinge used can actively adapt to the friction force change of the guide rail kinematic pair by means of self elastic deformation, the influence of creeping caused by friction state switching of the kinematic pair on continuous displacement positioning is avoided, and higher positioning precision is facilitated.
3. The automatic rigidity switching device is adopted, and the flexible hinge is locked when the platform moves in a large range, so that the rigid-flexible coupling platform is switched into the rigid platform, and the vibration of the flexible hinge in the process is avoided; in the processes of platform starting, stopping and micro feeding, the stiffness switching device is used for unlocking the flexible hinge, and the flexible hinge is elastically deformed to compensate.
Drawings
Fig. 1 is a schematic diagram of the present invention.
Fig. 2 is a front cross-sectional view of the present invention.
Fig. 3 is a partial enlarged view of fig. 2.
Fig. 4 is a schematic diagram of the working principle of the stiffness switching device of the rigid-flexible coupling platform.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the present patent; for the purpose of better illustrating the embodiments, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the actual product dimensions; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationship depicted in the drawings is for illustrative purposes only and is not to be construed as limiting the present patent.
As shown in fig. 1, the motion platform mainly comprises a machine base (a 05), a linear guide rail (a 04), a linear guide rail sliding block (a 06), a rigid-flexible coupling motion platform, a linear motor driver and the like. The rigid-flexible coupling motion platform comprises a rigid frame (A03), a core motion platform (A02), a flexible hinge (A01) and a rigidity switching device. The rigid frame (A03) is connected with the core motion platform (A02) through a flexible hinge (A01) motion pair, and the rigid frame (A03) is connected with the base (A05) through a linear guide rail motion pair; the rigidity switching device comprises a shaft, a fixed stop block (A07), a wedge block (A08), a spring (A09), an electromagnet (A10) and a push-pull electromagnet (A11). Wedge blocks (A08) are respectively connected to the two ends of the shaft of the rigidity switching device, the upper end wedge blocks (A08) are fixed at the upper end of the shaft through fixed stop blocks (A07), and the shaft is connected with the rigid frame through a through hole reserved through the rigid frame. Springs (A09) are arranged between the two wedge blocks (A08) and the rigid frame. An electromagnet (A10) is arranged between the lower wedge block and the lower fixed stop block. The lower end of the shaft is connected with a push-pull electromagnet (A11). The rigidity switching device is arranged between the rigid frame (A03) and the core motion platform (A02).
Of course, a through hole may be provided in the core motion platform (a 02), and a shaft may be provided in the through hole of the core motion platform (a 02) to fix the rigidity switching device. Or both of them are provided with through holes.
A linear motor driver applies a driving force to the core motion platform (A02). The driving force can enable the flexible hinge (A01) to elastically deform, and further enable the core motion platform (A02) to linearly displace along the length direction of the guide rail. The elastic deformation reaction force of the flexible hinge (A01) can be used for overcoming the friction force between the linear guide rail kinematic pair connected with the rigid frame (A03). The operation of the stiffness switching device can be divided into two cases: a. when the elastic deformation force of the flexible hinge (A01) is smaller than the resistance such as static friction force of the kinematic pair, the grating ruler displacement sensor detects that the rigid frame (A03) does not move, the electromagnet (A10) and the push-pull electromagnet (A11) are not powered, the spring (A09) rebounds, and the wedge block (A08) is loosened; b. when the elastic deformation attack force of the flexible hinge (A01) is larger than the resistance such as static friction force between the linear guide rail kinematic pairs, the rigid frame (A03) is changed from a static state to a motion state, the electromagnet (A10) and the push-pull electromagnet (A11) are powered, the electromagnet (A10) is opened, the push-pull electromagnet (A11) is pulled down, and the wedge block (A08) is locked.
When the motion state of the linear guide rail kinematic pair is switched between the conditions a and b, the difference between the static friction coefficient and the dynamic friction coefficient of the linear guide rail kinematic pair causes abrupt resistance, generates rigid impact on a motion platform and causes friction 'creeping' of the kinematic pair. In the processes of starting, stopping and micro-feeding of the rigid-flexible coupling platform, the flexible hinge (A01) can actively adapt to the abrupt change of friction resistance caused by the switching of friction states of the kinematic pair by means of self elastic deformation, and the rigid impact of the abrupt change of friction resistance on the core motion platform (A02) is relieved; in the large-stroke movement of the rigid-flexible coupling platform, the rigidity switching device is used for 'locking' the flexible hinge and switching the flexible hinge into the rigid platform for movement.
The rigidity switching device of the rigid-flexible coupling platform has the working principle that:
1. as shown in fig. 4 (I), when the elastic deformation acting force of the flexible hinge fails to overcome the static friction of the rigid frame (a 03), the rigid frame (a 03) will keep a static state, the displacement sensor detects that the rigid frame (a 03) does not move, the stiffness switching device does not work, the spring (a 09) rebounds, the wedge block (a 08) is loosened, the flexible hinge works, and the rigid-flexible coupling platform realizes accurate continuous movement through the elastic deformation of the flexible hinge;
2. as shown in fig. 4 (II), when the elastic deformation acting force of the flexible hinge is enough to overcome the static friction of the rigid frame (a 03), the rigid frame (a 03) starts to move, at the moment, the displacement sensor detects that the rigid frame moves, the push-pull electromagnet (a 11) at the lowest end pulls down the shaft, and the upper wedge block (a 08) is locked; simultaneously, the electromagnet (A10) below opens, the wedge block (A08) below is also locked, and the rigidity switching device works. At this time, the inclination is smaller than the friction angle of the platform, the inclined plane is self-locking, the flexible hinge is locked, elastic deformation cannot occur, and the rigid-flexible coupling platform is switched into the rigid platform to move at a high speed.
3. As shown in fig. 4 (I), when the core moving platform (a 02) moves in place to be stopped, the core moving platform (a 02) brakes, the rigid frame (a 03) is driven to brake through the flexible hinge, when the displacement sensor detects that the rigid frame (a 03) brakes to stop, the push-pull electromagnet (a 11) pushes the shaft back, the upper spring (a 09) rebounds, and the wedge block (a 08) is released; simultaneously, the lower electromagnet (A10) is closed, the spring (A09) rebounds, the wedge block (A08) is loosened, and the rigidity switching device finishes working. At this point the flexible hinge "unlocks" and elastic deformation occurs to attenuate the vibrational energy.
It is to be understood that the above examples of the present invention are provided by way of illustration only and not by way of limitation of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (9)
1. A rigid-flexible coupled platform with a stiffness switching device, the rigid-flexible coupled platform comprising: a hollow rigid frame, a core motion platform, and a flexible hinge;
the hollow rigid frame is connected with the core motion platform through the flexible hinge;
the rigid-flexible coupling platform is characterized by further comprising a rigidity switching device;
the rigidity switching device is fixed in a gap between the hollow rigid frame and the core motion platform;
the rigidity switching device comprises an actuating mechanism and a wedge block;
the actuation mechanism controls movement of the wedge block in the void to vary the size of the void between the core motion platform and the rigid frame, thereby varying the stiffness of the flexible hinge;
the wedge blocks comprise an upper end wedge block and a lower end wedge block;
the actuating mechanism comprises a shaft, a spring, an electromagnet and a push-pull electromagnet;
the upper end wedge blocks are fixed at the upper end of the shaft, springs are arranged between the two wedge blocks, an electromagnet is arranged below the lower end wedge blocks, and the lower end of the shaft is connected with the push-pull electromagnet.
2. The rigid-flexible coupled platform with stiffness switching device of claim 1,
the rigid frame and/or the core motion platform are/is provided with through holes;
the shaft penetrates through the through hole and is connected with the rigid frame and/or the core motion platform;
the springs comprise an upper spring and a lower spring;
the upper spring is arranged between the through hole and the upper wedge block;
the lower spring is arranged between the through hole and the lower wedge block.
3. The rigid-flexible coupling platform with the stiffness switching device according to claim 2, wherein the through hole is reserved with a certain margin, so as to provide a transverse movement space for the shaft.
4. A rigid-flexible coupling platform with stiffness switching device according to any of claims 1-3, wherein the actuation mechanism further comprises an upper fixed stop and a lower fixed stop;
the upper wedge block is fixed at the upper end of the shaft through the upper end fixing stop block;
the electromagnet is arranged between the lower end wedge block and the lower end fixed stop block.
5. A rigid-flexible coupled platform with stiffness switching means according to any of claims 1-3, wherein a stop means and/or a damper is provided between the rigid frame and the core motion platform.
6. A rigid-flexible coupling platform with stiffness switching means according to any of claims 1-3, wherein the inside of the hollow rigid frame and/or the outside of the core motion platform has a slope that mates with the wedge.
7. A rigid-flexible coupling platform with stiffness switching means according to any of claims 1-3, wherein the flexible hinge is a straight beam or a notched flexible hinge.
8. The precision motion platform is characterized by comprising a machine base, a linear guide rail fixed on the machine base, a guide rail sliding block, the rigid-flexible coupling platform with the rigidity switching device, a linear driver and a displacement sensor, wherein the rigid-flexible coupling platform with the rigidity switching device is disclosed in any one of claims 1-7;
the rigid-flexible coupling platform is characterized in that a core motion platform in the rigid-flexible coupling platform is connected with the linear driver, and the rigid frame is connected with the linear guide rail through the guide rail sliding block;
the displacement sensor is connected with the core motion platform and is used for measuring the displacement of the core motion platform in the motion direction.
9. A method of controlling the precision motion platform of claim 8, the method comprising the steps of:
s1, the linear driver directly drives the core motion platform, when the driving force fails to overcome the static friction of the rigid frame, the rigidity switching device does not work, and the core motion platform generates micro displacement through the elastic deformation of the flexible hinge to realize precise micro feeding;
s2, when the driving force is increased, the friction force is overcome, the rigid frame is driven to move, the elastic deformation is increased to a certain degree, the rigid frame enters a limiting state, all the driving force is transmitted to the rigid frame to move at a high speed, at the moment, the rigidity switching device enters a working state, and the rigidity switching device locks the flexible hinge and cannot elastically deform;
s3, when the platform stops, the core motion platform brakes firstly, the rigid frame is driven to brake through the flexible hinge, and when the rigid frame brakes completely, the rigidity switching device finishes working, and at the moment, the rigidity switching device unlocks the flexible hinge, and elastic deformation occurs to attenuate vibration energy.
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| CN201811452523.4A CN109465652B (en) | 2018-11-30 | 2018-11-30 | Contact type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
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