CN109465650B - Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method - Google Patents
Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method Download PDFInfo
- Publication number
- CN109465650B CN109465650B CN201811451998.1A CN201811451998A CN109465650B CN 109465650 B CN109465650 B CN 109465650B CN 201811451998 A CN201811451998 A CN 201811451998A CN 109465650 B CN109465650 B CN 109465650B
- Authority
- CN
- China
- Prior art keywords
- motion platform
- rigid
- core
- flexible
- flexible hinge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention discloses a cylinder type rigidity switching device, a rigid-flexible coupling motion platform and a method using the same, wherein the rigid-flexible coupling motion platform comprises: rigid frame, core motion platform and flexible hinge; the core motion platform is connected with the rigid frame through the flexible hinge; the rigid-flexible coupling motion platform further comprises a pushing device; the pushing device pushes the core motion platform to move so as to change the relative position between the core motion platform and the rigid frame, thereby changing the rigidity of the flexible hinge. The invention can realize high-precision continuous variable displacement and avoid displacement shake caused by acceleration mutation due to friction state switching of the kinematic pair under a low-speed working condition.
Description
Technical Field
The invention relates to a motor driving technology, in particular to a rigid-flexible coupling motion platform, a motion platform using the rigid-flexible coupling motion platform and a motion method using the rigid-flexible coupling motion platform.
Background
High-speed precision motion platforms are widely used in the field of semiconductor packaging and the like. In the structural design of the traditional high-speed precise motion platform, the uncertain change of the surface roughness between the motion pairs in the motion platform can cause the uncertain change of the friction resistance amplitude. And vibration damping during positioning causes the platform to frequently move and rest, resulting in frictional forces switching between "static friction" and "dynamic friction". Therefore, in closed-loop control, the drive continuously adjusts the driving force to overcome different frictional resistances, ultimately resulting in "vibration" of the motion platform near the final positioning position, affecting positioning accuracy.
In order to reduce the influence of positioning errors caused by friction state switching in the processes of starting, stopping and micro-feeding, an effective scheme, namely a rigid-flexible coupling motion platform based on a flexible hinge, is provided, and continuous high-precision motion is realized by means of elastic deformation of the flexible hinge. The working principle of the flexible hinge kinematic pair limits the motion of the flexible hinge kinematic pair which is mainly suitable for micro-stroke. Therefore, in the process of large-stroke movement, the flexible hinge is often matched with a friction kinematic pair to form a macro-micro composite movement platform to realize large-stroke high-precision movement, and small displacement in the positioning process is compensated.
However, in the positioning compensation process of a long stroke, the flexible hinge has smaller rigidity and is easy to deform, and relative reciprocating motion can be generated between the two platforms. The platform generates hysteresis due to inertia, so that the phenomenon of vibration is generated, and the positioning accuracy and the positioning time of the moving platform are influenced.
Disclosure of Invention
The structure of most rigid-flexible coupled macro-micro motion platforms in the prior art is as follows: the macro-motion outer frame is connected with the micro-motion platform through a flexible hinge, the macro-motion outer frame realizes macro-motion with large travel, and the micro-motion platform dynamically compensates the motion deviation of the macro-motion in the positioning process. The macro-micro composite motion can realize large-stroke and high-precision motion. However, the current rigid-flexible coupling platform has a relatively large disadvantage in that: in the macro-motion process, the flexible hinge vibrates due to lower rigidity, so that fluctuation of a feedback signal is caused, and accuracy and speed of the high-precision motion platform in the positioning process are affected.
The invention mainly aims at providing a rigid-flexible coupling motion platform and a motion platform using the rigid-flexible coupling motion platform. In the process of accelerating, uniform speed and decelerating the motion platform, the device pushes the micro-motion platform through the air cylinder, so that the deformation of the flexible hinge reaches the maximum extent, and the rigidity of the flexible hinge is greatly improved. That is, during this process, the precision motion platform may be considered a rigid platform, thereby preventing vibration from the low stiffness during start-up or rest. When the motion platform enters the positioning process, the device reduces or unloads the original thrust, increases the damping of the micro-motion platform, enables the elastic hinge to be in a low-rigidity state and is used for compensating micro displacement. The technical scheme adopted by the invention is as follows.
A rigid-flexible coupled motion platform, the rigid-flexible coupled motion platform comprising: rigid frame, core motion platform and flexible hinge; the core motion platform is connected with the rigid frame through the flexible hinge; the rigid-flexible coupling motion platform further comprises a pushing device; the pushing device pushes the core motion platform to move so as to change the relative position between the core motion platform and the rigid frame, thereby changing the rigidity of the flexible hinge.
Further, the thrust device is a cylinder damping device, the cylinder damping device includes: a cylinder, a piston and a cylinder push rod; one end of the piston is arranged in the cylinder, and the other end of the piston is connected with the cylinder push rod; when the air cylinder is inflated, the piston drives the air cylinder push rod to apply thrust to the core motion platform, and the rigidity of the flexible hinge is increased; when the air cylinder is used for unloading air pressure, the piston drives the air cylinder push rod to recycle, and the rigidity of the flexible hinge is recovered to a low rigidity state.
Further, the rigid frame has a machined hole for placement of a cylinder damping device.
Further, the cylinder damping device further comprises a fixing flange, and the fixing flange is used for fixing the cylinder damping device in the machining hole.
Further, the machined holes on the rigid frame, which are matched with the air cylinders, need to be provided with a certain allowance to ensure the movement of the air cylinder push rod.
Further, a limiting device and/or a damper are arranged between the rigid frame and the core motion platform. For relieving the rigid impact of the core motion platform in contact with the rigid frame.
Further, the flexible hinges between the core motion platform and the rigid frame are symmetrically arranged.
Further, the core motion platform and the rigid frame are also provided with a supporting rigidity reinforcing structure.
Further, the flexible hinge is a straight beam type or a notch type flexible hinge.
Further, the rigid-flexible coupling motion platform is manufactured in an integrated mode.
The precise motion platform comprises a machine base, a linear guide rail, a guide rail sliding block, the rigid-flexible coupling motion platform and a linear driver, wherein the linear guide rail, the guide rail sliding block and the linear driver are fixed on the machine base; the core motion platform in the rigid-flexible coupling platform is connected with the linear driver, and the rigid frame is connected with the linear guide rail through the guide rail sliding block.
Further, the precision motion platform further comprises a displacement sensor, and the displacement sensor is connected with the core motion platform and used for measuring the displacement of the core motion platform in the motion direction.
Furthermore, the linear driver is a voice coil motor or a linear motor, is directly driven and has high response speed.
A method for controlling the precision motion platform, wherein the pushing device is a cylinder damping device, and the method comprises the following steps:
s1, the linear driver directly drives the core motion platform, when the linear driver starts to work, the cylinder damping device synchronously starts to push the core motion platform, so that the flexible hinge generates elastic deformation, when the elastic deformation reaches the maximum value, the rigidity of the flexible hinge is maximum, and at the moment, the linear driver pushes the core motion platform to move at a high speed;
s2, in the movement process of the core movement platform, the cylinder damping device keeps pressure, so that the flexible hinge still keeps the maximum rigidity in the movement process, and the requirement of high-speed movement is met;
s3, when the core motion platform stops entering a positioning stage, the cylinder damping device unloads pressure, so that the flexible hinge is restored to a flexible state, and the elastic deformation of the flexible hinge is utilized for micro-motion compensation, so that high-precision positioning is realized.
Compared with the prior art, the beneficial effects are that:
1. the friction-free flexible hinge kinematic pair is adopted to realize high-precision continuous variable displacement, so that displacement 'shake' caused by acceleration mutation due to friction state switching of the kinematic pair under a low-speed working condition is avoided.
2. The rigid-flexible coupled motion platform design is adopted, the flexible hinge used can actively adapt to the friction force change of the guide rail kinematic pair by means of self elastic deformation, the influence of creeping caused by friction state switching of the kinematic pair on continuous displacement positioning is avoided, and higher positioning precision is facilitated.
3. The cylinder damping device is adopted, and the flexible hinge is placed in a high-rigidity state when the platform moves in a large range, so that the rigid-flexible coupling platform is switched into a rigid platform, and the vibration of the flexible hinge in the process is avoided; in the micro-feeding process of the platform, the cylinder damping device restores the flexible hinge to a low-rigidity state, and the flexible hinge is elastically deformed to compensate by increasing damping to reduce elastic shake.
Drawings
Fig. 1 is a schematic diagram of the present invention.
Fig. 2 is a front cross-sectional view of the present invention.
Fig. 3 is a partial enlarged view of fig. 2.
Fig. 4 is a schematic diagram of the working principle of the invention.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the present patent; for the purpose of better illustrating the embodiments, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the actual product dimensions; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationship depicted in the drawings is for illustrative purposes only and is not to be construed as limiting the present patent.
As shown in fig. 1-3, the motion platform mainly comprises a machine base (a 06), a linear guide rail (a 04), a linear guide rail sliding block (a 05), a rigid-flexible coupling motion platform, a linear motor driver and the like. The rigid-flexible coupling motion platform comprises a rigid frame (A03), a core motion platform (A02), a flexible hinge (A01) and an air cylinder damping device. The rigid frame (A03) is connected with the core motion platform (A02) through a flexible hinge (A01) motion pair, and the rigid frame (A03) is connected with the base (A06) through a linear guide rail motion pair; the cylinder damping device comprises a cylinder (A08), a piston (A07) and a cylinder push rod (A10). One end of the piston (A07) is arranged in the cylinder (A08), and the other end is connected with the cylinder push rod (A10). The cylinder (A08) is inflated or deflated, so that the piston (A07) can be pushed to move, and the piston (A07) moves to drive the cylinder push rod (A10) to move, so that the relative position between the core moving platform (A02) and the rigid frame (A03) is changed, and the rigidity of the flexible hinge is changed.
In one embodiment, the rigid frame (a 03) has machined holes for the placement of cylinder damping devices; the cylinder damping device further comprises a fixing flange (A09), and the fixing flange (A09) is used for fixing the cylinder damping device in the machining hole. The processing hole on the rigid frame (A03) matched with the air cylinder (A08) needs to be provided with a certain allowance, so that the movement of the air cylinder push rod (A10) is ensured. Of course, the cylinder damping device is not necessarily disposed in the processing hole of the rigid frame, but may be disposed in other places, such as in a gap between the core motion platform and the rigid frame, so long as the relative position of the rigid frame and the core motion platform can be changed, thereby changing the rigidity of the flexible hinge. In addition, the cylinder damping device is not necessarily used, and other pushing devices are also used.
Preferably, a limiting device and/or a damper is arranged between the rigid frame of the rigid-flexible coupling platform and the core motion platform, and is used for relieving rigid impact of the core motion platform and the rigid frame.
Preferably, a limiting device and a damper are arranged between the rigid frame of the rigid-flexible coupling platform and the core motion platform, and are used for relieving rigid impact of the core motion platform and the rigid frame.
Preferably, the flexible hinges between the core motion platform and the rigid frame of the rigid-flexible coupled platform are symmetrically arranged.
Preferably, the rigid-flexible coupled motion platform is manufactured in an integrated manner.
Preferably, the flexible hinge is a straight beam type or a notch type flexible hinge.
Preferably, the core motion platform and the rigid frame in the rigid-flexible coupling motion platform are also provided with a linear bearing, a magnetic force and other supporting rigidity reinforcing structures.
Preferably, the linear driver is a voice coil motor or a linear motor, and is directly driven, so that the response speed is high.
Preferably, the precision motion platform further comprises a displacement sensor, and the displacement sensor is connected with the core motion platform and is used for measuring the displacement of the core motion platform in the motion direction.
A linear motor driver applies a driving force to the core motion platform (A02). The driving force can enable the flexible hinge (A01) to elastically deform, and further enable the core motion platform (A02) to linearly displace along the length direction of the guide rail. The elastic deformation reaction force of the flexible hinge (A01) can be used for overcoming the friction force between the linear guide rail kinematic pair connected with the rigid frame (A03). The operation of the cylinder damping device can be divided into two cases: a. in the starting stage and the moving stage, the linear motor applies driving force to the core moving platform (A02), at the moment, the piston (A07) is inflated to push the cylinder push rod (A10) to apply pushing force to the core moving platform (A02), and the rigidity of the flexible hinge (A01) is maximum at the moment; b. in the positioning stage, the piston (A07) unloads air pressure, the cylinder push rod (A10) is recovered, damping of the core motion platform (A02) is improved, and the flexible hinge (A01) is restored to a low-rigidity state.
When the motion state of the linear guide rail kinematic pair is switched between the conditions a and b, the difference between the static friction coefficient and the dynamic friction coefficient of the linear guide rail kinematic pair causes abrupt resistance, generates rigid impact on a motion platform and causes friction 'creeping' of the kinematic pair. Meanwhile, as the rigidity of the flexible hinge (A01) is lower, elastic deformation is generated, and the core motion platform (A02) is enabled to continuously shake when entering a positioning stage. During the starting and large-stroke movement of the rigid-flexible coupling platform, the flexible hinge (A01) is in a high-rigidity state due to the thrust action of the cylinder push rod (A10), so that the core movement platform (A02) obtains enough driving force. In the positioning stage after the rigid-flexible coupling platform is stopped, the rigidity of the flexible hinge (A01) is recovered due to the fact that the thrust of the air cylinder push rod (A10) is reduced, and the damping of the core motion platform (A02) is improved, so that the core motion platform (A02) performs positioning compensation through the elastic deformation of the flexible hinge (A01).
The rigidity switching device of the rigid-flexible coupling platform has the working principle that:
1. as shown in fig. 4, in the activated state, the elastic deformation force of the flexible hinge (a 01) fails to overcome the static friction of the rigid frame (a 03), the rigid frame (a 03) will remain in a stationary state, and the displacement sensor detects that the rigid frame (a 03) is not moving. At the moment, the cylinder damping device starts to work, the single-acting cylinder (2) applies thrust to the cylinder push rod (A10), the core motion platform (A02) generates displacement, the flexible hinge (A01) is caused to generate maximum elastic deformation, and the maximum rigidity state is achieved, so that the rigid frame (A03) and the core motion platform (A02) can be regarded as rigid connection;
2. as shown in fig. 4, after the start state is finished, the rigid frame (a 03) and the core motion platform (a 02) can be regarded as a rigid body. Then the platform enters a motion stage, the linear driver drives the core motion platform (A02) to transmit all driving forces to the rigid frame (A03), so that the requirement of high-speed motion of the platform is met;
3. as shown in fig. 4, when the core motion platform (a 02) enters the positioning stage after being in place, the single-acting cylinder (2) reduces the pressure, the pushing force of the cylinder push rod (a 10) reduces, and at the moment, the flexible hinge (5) is restored to the low-rigidity state. The core motion platform (A02) generates tiny displacement under the action of elastic deformation of the flexible hinge (A01), so that errors generated by friction and the like of the rigid frame (A03) are compensated. Meanwhile, the single-acting air cylinder (2) under low pressure has the function of a damper, so that the shake generated by elastic deformation during positioning of the flexible hinge can be reduced.
It is to be understood that the above examples of the present invention are provided by way of illustration only and not by way of limitation of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (7)
1. The precise motion platform is characterized by comprising a machine base, a linear guide rail, a guide rail sliding block, a rigid-flexible coupling motion platform and a linear driver, wherein the linear guide rail, the guide rail sliding block, the rigid-flexible coupling motion platform and the linear driver are fixed on the machine base;
the rigid-flexible coupled motion platform comprises: rigid frame, core motion platform and flexible hinge;
the core motion platform is connected with the rigid frame through the flexible hinge;
the rigid-flexible coupling motion platform further comprises a pushing device;
the pushing device is fixed on the rigid frame;
the pushing device can push the core motion platform to move so as to change the relative position between the core motion platform and the rigid frame, thereby changing the rigidity of the flexible hinge;
the thrust unit is a cylinder damping device, the cylinder damping device includes: a cylinder, a piston and a cylinder push rod;
one end of the piston is arranged in the cylinder, and the other end of the piston is connected with the cylinder push rod;
when the air cylinder is inflated, the piston drives the air cylinder push rod to apply thrust to the core motion platform, and the rigidity of the flexible hinge is increased;
when the air cylinder is used for unloading air pressure, the piston drives the air cylinder push rod to recover, and the rigidity of the flexible hinge is recovered to a low rigidity state;
the rigid-flexible coupled moving platform is characterized in that a core moving platform in the rigid-flexible coupled moving platform is connected with the linear driver, and the rigid frame is connected with the linear guide rail through the guide rail sliding block.
2. The precision motion platform of claim 1, wherein the rigid frame has a machined hole for placement of a cylinder damping device;
the processing holes on the rigid frame matched with the air cylinders need to be provided with a certain allowance so as to ensure the movement of the air cylinder push rods.
3. Precision motion platform according to claim 1 or 2, characterized in that a limiting device and/or a damper is provided between the rigid frame and the core motion platform.
4. The precision motion platform of claim 1 or 2, wherein the flexible hinges between the core motion platform and the rigid frame are symmetrically arranged.
5. The precision motion platform according to claim 1 or 2, wherein the flexible hinge is a straight beam or a notched flexible hinge.
6. The precision motion platform according to claim 1 or 2, further comprising a displacement sensor connected to the core motion platform for measuring the displacement of the core motion platform in the direction of motion.
7. A method of controlling a precision motion platform according to any one of claims 1 to 6, wherein the pushing means is a cylinder damping means, the method comprising the steps of:
s1, the linear driver directly drives the core motion platform, when the linear driver starts to work, the cylinder damping device synchronously starts to push the core motion platform, so that the flexible hinge generates elastic deformation, when the elastic deformation reaches the maximum value, the rigidity of the flexible hinge is maximum, and at the moment, the linear driver pushes the core motion platform to move at a high speed;
s2, in the movement process of the core movement platform, the cylinder damping device keeps pressure, so that the flexible hinge keeps maximum rigidity in the movement process;
s3, when the core motion platform stops entering a positioning stage, the cylinder damping device unloads pressure, so that the flexible hinge is restored to a flexible state, and micro-motion compensation is performed by utilizing elastic deformation of the flexible hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451998.1A CN109465650B (en) | 2018-11-30 | 2018-11-30 | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451998.1A CN109465650B (en) | 2018-11-30 | 2018-11-30 | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109465650A CN109465650A (en) | 2019-03-15 |
| CN109465650B true CN109465650B (en) | 2023-07-25 |
Family
ID=65674606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811451998.1A Active CN109465650B (en) | 2018-11-30 | 2018-11-30 | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109465650B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281036B (en) * | 2019-06-14 | 2021-10-19 | 广东工业大学 | Double-measurement single-drive rigid-flexible coupling motion platform |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11172953A (en) * | 1997-12-15 | 1999-06-29 | Taisei Corp | Flexible and rigid combination structure |
| CN202394545U (en) * | 2011-12-15 | 2012-08-22 | 东莞华中科技大学制造工程研究院 | Single-shaft floating linear platform |
| JP2013202708A (en) * | 2012-03-27 | 2013-10-07 | Hitachi Via Mechanics Ltd | Processing machine |
| CN104772727A (en) * | 2015-04-24 | 2015-07-15 | 严瑾 | Rigid-flexible blended clamp |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105345759B (en) * | 2015-11-23 | 2017-03-29 | 清华大学 | Two-dimensional nano servo platform |
| CN106002312B (en) * | 2016-06-29 | 2018-01-23 | 广东工业大学 | A kind of single driving Coupled Rigid-flexible precision movement platform and its implementation and application |
| CN107103131B (en) * | 2017-04-20 | 2019-07-19 | 华中科技大学 | A kind of Rigid-flexible Coupling Dynamics modeling method based on Simulink platform |
| CN106891306B (en) * | 2017-04-25 | 2019-05-28 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| CN108015561B (en) * | 2017-12-19 | 2023-10-03 | 广东工业大学 | Motion platform capable of enlarging single-drive rigid-flexible coupling working area |
| CN209919324U (en) * | 2018-11-30 | 2020-01-10 | 广东工业大学 | Rigid-flexible coupling platform with cylinder type rigidity switching device and motion platform |
-
2018
- 2018-11-30 CN CN201811451998.1A patent/CN109465650B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11172953A (en) * | 1997-12-15 | 1999-06-29 | Taisei Corp | Flexible and rigid combination structure |
| CN202394545U (en) * | 2011-12-15 | 2012-08-22 | 东莞华中科技大学制造工程研究院 | Single-shaft floating linear platform |
| JP2013202708A (en) * | 2012-03-27 | 2013-10-07 | Hitachi Via Mechanics Ltd | Processing machine |
| CN104772727A (en) * | 2015-04-24 | 2015-07-15 | 严瑾 | Rigid-flexible blended clamp |
| CN106092563A (en) * | 2016-05-31 | 2016-11-09 | 清华大学 | Plane two degrees of freedom high frequency charger and test platform for ball screw assembly, |
Non-Patent Citations (3)
| Title |
|---|
| 微动工作台的研制及特性研究;董申,陈丽霞,刘海龙;航空精密制造技术(第06期);1-3 * |
| 微机电系统二维微动工作台微位移机构特性研究;张庆,王华坤,张世琪;机械与电子(第06期);37-40 * |
| 柔性铰链的微动平台设计;何伟宏等;机械设计与制造(第1期);56-58 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109465650A (en) | 2019-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10661399B2 (en) | Single-drive rigid-flexible coupling precision motion platform and realization method and application thereof | |
| US10239167B2 (en) | Stiffness-frequency adjustable XY micromotion stage based on stress stiffening | |
| WO2016197554A1 (en) | Dynamic characteristic adjustable macro-micro integrated composite platform | |
| JP3754229B2 (en) | Vibration reduction control method and apparatus for variable magnetoresistive linear motor | |
| JPH06183561A (en) | Moving stage device | |
| US6518721B2 (en) | Oscillation isolator | |
| CN112803829B (en) | Friction asymmetric inertia piezoelectric linear driving device and method | |
| CN209919324U (en) | Rigid-flexible coupling platform with cylinder type rigidity switching device and motion platform | |
| CN108386447B (en) | Rigid-flexible coupling sliding block and motion platform | |
| CN109465650B (en) | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method | |
| JP3732355B2 (en) | Press machine | |
| CN109465651B (en) | Friction type rigidity switching device, rigid-flexible coupling motion platform using same and method | |
| JP2001241439A (en) | Moving device provided with hydrostatic bearing | |
| JPH06120105A (en) | Position alignment equipment and piezo actuator driving equipment to be used in same | |
| CN113489381B (en) | Ultra-precise vertical axis gravity compensation device and method based on quasi-zero stiffness magnetic field | |
| JP4927487B2 (en) | Polishing head | |
| CN210589272U (en) | Two-degree-of-freedom macro-micro precision positioning platform device | |
| CN209648131U (en) | Coupled Rigid-flexible platform and motion platform with contact rigidity switching device | |
| US10987834B2 (en) | Apparatus for taking out molded product | |
| CN115847119B (en) | Rigid-flexible coupling micro-feeding system based on ultrasonic vibration | |
| CN109465652A (en) | Contact rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it | |
| CN101661293B (en) | Machine control device | |
| CN116734784A (en) | Macro-micro precise positioning device and control method | |
| KR101259643B1 (en) | Device for compensating straightness of stage for exposurer | |
| CN110270788B (en) | High-speed precise wire welding platform and control method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |