CN209919324U - Rigid-flexible coupling platform with cylinder type rigidity switching device and motion platform - Google Patents
Rigid-flexible coupling platform with cylinder type rigidity switching device and motion platform Download PDFInfo
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- CN209919324U CN209919324U CN201821996914.8U CN201821996914U CN209919324U CN 209919324 U CN209919324 U CN 209919324U CN 201821996914 U CN201821996914 U CN 201821996914U CN 209919324 U CN209919324 U CN 209919324U
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Abstract
The utility model discloses a take cylinder formula rigidity auto-change over device's rigid-flexible coupling platform and motion platform, wherein, rigid-flexible coupling motion platform includes: the core motion platform comprises a rigid frame, a core motion platform and a flexible hinge; the core motion platform is connected with the rigid frame through the flexible hinge; the rigid-flexible coupling motion platform further comprises a pushing device; the pushing device pushes the core motion platform to move so as to change the relative position between the core motion platform and the rigid frame, and therefore the rigidity of the flexible hinge is changed. The utility model discloses can realize the high accuracy continuous variation displacement, avoid vice friction state of motion under the low-speed operating mode to switch the displacement "shake" that leads to the acceleration sudden change to lead to.
Description
Technical Field
The utility model relates to a motor drive technique, more specifically relate to a just gentle coupling motion platform and use this just gentle coupling motion platform's motion platform.
Background
High-speed precision motion platforms are widely used in the field of semiconductor packaging and the like. In the structural design of the traditional high-speed precise motion platform, uncertain change of surface roughness between kinematic pairs in the motion platform can cause uncertain change of the amplitude of the frictional resistance. Also, vibration damping during positioning causes the platform to move and rest frequently, resulting in friction switching between "static friction" and "kinetic friction". Therefore, in closed-loop control, the driver continuously adjusts the driving force to overcome different frictional resistances, which eventually causes "vibration" of the motion platform near the final positioning position, affecting the positioning accuracy.
In order to reduce the positioning error influence caused by friction state switching in the starting, stopping and micro-feeding processes, an effective scheme is provided, namely a rigid-flexible coupling motion platform based on a flexible hinge realizes continuous high-precision motion by means of elastic deformation of the flexible hinge. The working principle of the flexible hinge kinematic pair limits the application of the flexible hinge kinematic pair to the movement with small stroke. Therefore, in the process of large-stroke movement, the flexible hinge is often used in cooperation with a friction kinematic pair to form a macro-micro composite movement platform to realize large-stroke high-precision movement and compensate for small displacement in the positioning process.
However, during the long-stroke positioning compensation process, the flexible hinge is low in rigidity and easy to deform, and relative reciprocating motion can be generated between the two platforms. The platform generates a hysteresis phenomenon due to inertia, so that a vibration phenomenon is generated, and the positioning precision and the positioning time of the moving platform are influenced.
Disclosure of Invention
The structure of the rigid-flexible coupling macro-micro motion platform in most of the prior art is as follows: the macro-motion outer frame is connected with the micro-motion platform through a flexible hinge, the macro-motion outer frame realizes macro-motion with large stroke, and the micro-motion platform dynamically compensates the motion deviation of the macro-motion in the positioning process. The macro-micro compound motion can realize large-stroke high-precision motion. However, the current rigid-flexible coupling platform has a great disadvantage that: in the macro-motion process, the flexible hinge generates vibration due to low ground rigidity, so that the fluctuation of a feedback signal is caused, and the precision and the speed of the high-precision motion platform in the positioning process are influenced.
The utility model discloses a main objective is providing a just gentle coupling motion platform and is using this just gentle coupling motion platform's motion platform. In the motion process of accelerating, uniform speed and decelerating of the motion platform, the device pushes the micro-motion platform through the air cylinder, so that the deformation of the flexible hinge reaches the maximum degree, and the rigidity of the flexible hinge is greatly improved. That is, in this process, the precision motion platform may be considered a rigid platform, thereby preventing vibrations from low stiffness during start-up or rest. After the moving platform enters a positioning process, the device reduces or unloads the original thrust, and increases the damping of the micro-moving platform, so that the elastic hinge is in a low-rigidity state and is used for compensating micro displacement. The utility model adopts the technical proposal as follows.
A rigid-flexible coupled motion platform, comprising: the core motion platform comprises a rigid frame, a core motion platform and a flexible hinge; the core motion platform is connected with the rigid frame through the flexible hinge; the rigid-flexible coupling motion platform further comprises a pushing device; the pushing device pushes the core motion platform to move so as to change the relative position between the core motion platform and the rigid frame, and therefore the rigidity of the flexible hinge is changed.
Further, the pushing device is a cylinder damping device, and the cylinder damping device comprises: a cylinder, a piston, and a cylinder push rod; one end of the piston is arranged in the cylinder, and the other end of the piston is connected with the cylinder push rod; when the cylinder is inflated, the piston drives the cylinder push rod to apply thrust to the core motion platform, and the rigidity of the flexible hinge is increased; when the air cylinder unloads air pressure, the piston drives the air cylinder push rod to recover, and the rigidity of the flexible hinge returns to a low-rigidity state.
Further, the rigid frame is provided with a processing hole, and the processing hole is used for placing the cylinder damping device.
Further, the cylinder damping device also comprises a fixing flange, and the fixing flange is used for fixing the cylinder damping device in the machining hole.
Furthermore, a certain margin is required to be reserved on the rigid frame and the machining hole matched with the air cylinder, so that the movement of the air cylinder push rod is ensured.
Furthermore, a limiting device and/or a damper is arranged between the rigid frame and the core motion platform. For mitigating a rigid impact of the core motion platform in contact with the rigid frame.
Further, the flexible hinges between the core motion platform and the rigid frame are symmetrically arranged.
Further, a supporting rigidity strengthening structure is arranged between the core motion platform and the rigid frame.
Further, the flexible hinge is a straight beam type or a notch type flexible hinge.
Further, the rigid-flexible coupling motion platform is manufactured in an integrated mode.
A precision motion platform comprises a base, a linear guide rail fixed on the base, a guide rail sliding block, the rigid-flexible coupling motion platform and a linear driver; and a core motion platform in the rigid-flexible coupling platform is connected with the linear driver, and the rigid frame is connected with the linear guide rail through the guide rail sliding block.
Furthermore, the precision motion platform also comprises a displacement sensor, and the displacement sensor is connected with the core motion platform and is used for measuring the displacement of the core motion platform in the motion direction.
Furthermore, the linear driver is a voice coil motor or a linear motor, is directly driven and has high response speed.
A method of controlling the aforementioned precision motion stage, the propulsion device being a cylinder damper device, the method comprising the steps of:
s1, the linear driver directly drives the core motion platform, when the linear driver starts to work, the cylinder damping device is synchronously started to push the core motion platform, so that the flexible hinge generates elastic deformation, when the elastic deformation reaches the maximum value, the rigidity of the flexible hinge is maximum, and at the moment, the linear driver pushes the core motion platform to move at a high speed;
s2, in the motion process of the core motion platform, the cylinder damping device keeps pressure, so that the flexible hinge still keeps the maximum rigidity in the motion process, and the requirement of high-speed motion is met;
and S3, when the core motion platform stops entering a positioning stage, the air cylinder damping device unloads pressure, so that the flexible hinge is restored to a flexible state, and the elastic deformation of the flexible hinge is utilized to perform micro-motion compensation, so that high-precision positioning is realized.
Compared with the prior art, the beneficial effects are:
1. the friction-free flexible hinge kinematic pair is adopted to realize high-precision continuous variable displacement, and displacement 'shaking' caused by acceleration sudden change due to the friction state switching of the kinematic pair under a low-speed working condition is avoided.
2. The rigid-flexible coupling motion platform is adopted, the used flexible hinge can actively adapt to the friction force change of the guide rail motion pair by means of self elastic deformation, the influence of 'crawling' caused by the friction state switching of the motion pair on continuous displacement positioning is avoided, and the realization of higher positioning precision is facilitated.
3. The cylinder damping device is adopted, and the flexible hinge is placed in a high-rigidity state when the platform moves in a large range, so that the rigid-flexible coupling platform is switched into a rigid platform, and the vibration of the flexible hinge in the process is avoided; in the micro-feeding process of the platform, the air cylinder damping device restores the flexible hinge to a low-rigidity state, damping is increased to reduce elastic shake, and the flexible hinge is elastically deformed to compensate.
Drawings
Fig. 1 is a schematic diagram of the present invention.
Fig. 2 is a front sectional view of the present invention.
Fig. 3 is a partially enlarged view of fig. 2.
Fig. 4 is a schematic view of the working principle of the present invention.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the present patent.
As shown in fig. 1-3, the motion platform mainly comprises a base (a06), a linear guide rail (a04), a linear guide rail slider (a05), a rigid-flexible coupling motion platform, a linear motor driver, and the like. The rigid-flexible coupling motion platform comprises a rigid frame (A03), a core motion platform (A02), a flexible hinge (A01) and a cylinder damping device. The rigid frame (A03) is connected with the core motion platform (A02) through a flexible hinge (A01) kinematic pair, and the rigid frame (A03) is connected with the base (A06) through a linear guide rail kinematic pair; the cylinder damping device comprises a cylinder (A08), a piston (A07) and a cylinder push rod (A10). One end of the piston (A07) is arranged in the cylinder (A08), and the other end is connected with the cylinder push rod (A10). The piston (A07) can be pushed to move by inflating or deflating the air cylinder (A08), and the movement of the piston (A07) drives the air cylinder push rod (A10) to move, so that the relative position between the core moving platform (A02) and the rigid frame (A03) is changed, and the rigidity of the flexible hinge is changed.
In one embodiment, the rigid frame (a03) has a machined hole for placement of a cylinder damping device; the cylinder damping device further comprises a fixing flange (A09), and the fixing flange (A09) is used for fixing the cylinder damping device in the machining hole. The machining hole matched with the air cylinder (A08) on the rigid frame (A03) needs to be provided with a certain allowance, and the movement of the air cylinder push rod (A10) is guaranteed. Of course, the cylinder damping device does not need to be arranged in a processing hole of the rigid frame, and can also be arranged in other places, such as a gap between the core motion platform and the rigid frame, as long as the relative position of the rigid frame and the core motion platform can be changed, so that the rigidity of the flexible hinge can be changed. In addition, the cylinder damping device is not required to be used, and other pushing devices can be used.
Preferably, a limiting device and/or a damper is/are arranged between the rigid frame of the rigid-flexible coupling platform and the core motion platform, and are/is used for relieving rigid impact of the core motion platform contacting with the rigid frame.
Preferably, a limiting device and a damper are arranged between the rigid frame of the rigid-flexible coupling platform and the core motion platform and used for relieving rigid impact of the core motion platform contacting with the rigid frame.
Preferably, the flexible hinges between the core motion platform and the rigid frame of the rigid-flexible coupling platform are symmetrically arranged.
Preferably, the rigid-flexible coupling motion platform is manufactured in an integrated mode.
Preferably, the flexible hinge is a straight beam type or a notch type flexible hinge.
Preferably, a linear bearing, a magnetic force and other support rigidity reinforcing structures are arranged between the core motion platform and the rigid frame in the rigid-flexible coupled motion platform.
Preferably, the linear driver is a voice coil motor or a linear motor, is directly driven and has high response speed.
Preferably, the precision motion platform further comprises a displacement sensor, and the displacement sensor is connected with the core motion platform and used for measuring the displacement of the core motion platform in the motion direction.
The linear motor drive applies a driving force to the core motion stage (a 02). The driving force can make the flexible hinge (A01) generate elastic deformation, and further make the core motion platform (A02) generate linear displacement along the length direction of the guide rail. The elastic deformation reaction force of the flexible hinge (A01) can be used to overcome the friction force between the linear guide kinematic pair connected with the rigid frame (A03). The operation of the cylinder damping device can be divided into two cases: a. in the starting stage and the moving stage, the linear motor applies driving force to the core moving platform (A02), at the moment, the piston (A07) is inflated to push the cylinder push rod (A10) to apply pushing force to the core moving platform (A02), and the rigidity of the flexible hinge (A01) is maximum at the moment; b. in the positioning stage, the piston (A07) unloads the air pressure, the cylinder push rod (A10) is recovered, the damping of the core motion platform (A02) is improved, and the flexible hinge (A01) restores to a low rigidity state.
When the motion state of the linear guide motion pair is switched between the conditions a and b, the difference between the static friction coefficient and the dynamic friction coefficient of the linear guide motion pair causes sudden change of resistance, rigid impact on the motion platform is generated, and friction of the motion pair is caused to creep. Meanwhile, the flexible hinge (A01) has lower rigidity and generates elastic deformation, so that the core motion platform (A02) is continuously shaken when entering a positioning stage. During the starting and large-stroke movement of the rigid-flexible coupling platform, the flexible hinge (A01) is in a high-rigidity state due to the thrust action of the air cylinder push rod (A10), so that the core moving platform (A02) obtains enough driving force. In the positioning stage after the rigid-flexible coupling platform stops, the thrust of the air cylinder push rod (A10) is reduced to restore the rigidity of the flexible hinge (A01), and the damping of the core motion platform (A02) is improved, so that the core motion platform (A02) is subjected to positioning compensation through the elastic deformation of the flexible hinge (A01).
Rigid-flexible coupling platform's rigidity auto-change over device's theory of operation do:
1. as shown in fig. 4, in the activated state, the elastic deformation force of the flexible hinge (a01) fails to overcome the static friction of the rigid frame (a03), the rigid frame (a03) will remain in the static state, and the displacement sensor detects that the rigid frame (a03) is not moving. At the moment, the cylinder damping device starts to work, the single-acting cylinder (2) applies thrust to a cylinder push rod (A10), the core motion platform (A02) generates displacement, the flexible hinge (A01) is promoted to generate maximum elastic deformation, and the state of maximum rigidity is achieved, so that the rigid frame (A03) and the core motion platform (A02) can be regarded as rigid connection;
2. as shown in fig. 4, after the activation state is completed, the rigid frame (a03) and the core motion platform (a02) can be regarded as a rigid body. Then the platform enters a motion stage, the linear driver drives the core motion platform (A02) to transmit all driving forces to the rigid frame (A03) so as to meet the requirement of high-speed motion of the platform;
3. as shown in figure 4, when the core motion platform (A02) enters the positioning stage after being in place, the pressure of the single-acting air cylinder (2) is reduced, the pushing force of the air cylinder push rod (A10) is reduced, and the flexible hinge (5) is restored to the low rigidity state. The core motion platform (A02) generates tiny displacement through the elastic deformation of the flexible hinge (A01), thereby compensating the error of the rigid frame (A03) caused by friction and the like. Meanwhile, the single-acting cylinder (2) under low pressure has the function of a damper, and the shake generated by elastic deformation of the flexible hinge during positioning can be reduced.
It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not limitations to the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (9)
1. A take cylinder type rigidity auto-change over device's rigid-flexible coupling platform, rigid-flexible coupling platform includes: the core motion platform comprises a rigid frame, a core motion platform and a flexible hinge;
the core motion platform is connected with the rigid frame through the flexible hinge;
the rigid-flexible coupling platform is characterized by further comprising a pushing device;
the pushing device pushes the core motion platform to move so as to change the relative position between the core motion platform and the rigid frame, and therefore the rigidity of the flexible hinge is changed.
2. The rigid-flexible coupling platform with cylinder-type stiffness switching device according to claim 1, wherein the pushing device is a cylinder damping device, the cylinder damping device comprising: a cylinder, a piston, and a cylinder push rod;
one end of the piston is arranged in the cylinder, and the other end of the piston is connected with the cylinder push rod;
when the cylinder is inflated, the piston drives the cylinder push rod to apply thrust to the core motion platform, and the rigidity of the flexible hinge is increased;
when the air cylinder is unloaded, the piston drives the air cylinder push rod to be recovered, and the rigidity of the flexible hinge returns to a low-rigidity state.
3. The rigid-flexible coupling platform with cylinder type rigidity switching device according to claim 2, wherein the rigid frame is provided with a processing hole for placing a cylinder damping device;
the cylinder damping device further comprises a fixing flange, and the fixing flange is used for fixing the cylinder damping device in the machining hole.
4. The rigid-flexible coupling platform with cylinder type rigidity switching device according to claim 3, wherein a certain margin is required to be left on the rigid frame and the matching processing hole of the cylinder to ensure the movement of the cylinder push rod.
5. Rigid-flexible coupled platform with cylinder stiffness switching device according to any of claims 1 to 4, characterized in that between the rigid frame and the core motion platform there are provided limit stops and/or dampers.
6. Rigid-flexible coupled platform with cylinder-type stiffness switching device according to any of claims 1-4, wherein the flexible hinges between the core motion platform and the rigid frame are symmetrically arranged.
7. The rigid-flexible coupled platform with cylinder-type stiffness switching device according to any one of claims 1 to 4, wherein the flexible hinge is a straight beam-type or notch-type flexible hinge.
8. A motion platform, which is characterized in that the motion platform comprises a base, a linear guide rail fixed on the base, a guide rail slide block, a rigid-flexible coupling platform with a cylinder type rigidity switching device, and a linear driver, wherein the rigid-flexible coupling platform is as claimed in any one of claims 1 to 7;
the core motion platform in the rigid-flexible coupling platform with the cylinder type rigidity switching device is connected with the linear driver, and the rigid frame of the rigid-flexible coupling platform with the cylinder type rigidity switching device is connected with the linear guide rail through the guide rail sliding block.
9. The motion platform of claim 8, further comprising a displacement sensor coupled to the core motion platform for measuring displacement of the core motion platform in a direction of motion.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465650A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Air-cylinder type rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it |
| CN114905298A (en) * | 2022-06-28 | 2022-08-16 | 洛阳市锐创电气设备有限公司 | Full-pneumatic exchange workbench assembly for numerical control equipment |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465650A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Air-cylinder type rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it |
| CN114905298A (en) * | 2022-06-28 | 2022-08-16 | 洛阳市锐创电气设备有限公司 | Full-pneumatic exchange workbench assembly for numerical control equipment |
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