CN109465652A - Contact rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it - Google Patents
Contact rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it Download PDFInfo
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- CN109465652A CN109465652A CN201811452523.4A CN201811452523A CN109465652A CN 109465652 A CN109465652 A CN 109465652A CN 201811452523 A CN201811452523 A CN 201811452523A CN 109465652 A CN109465652 A CN 109465652A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
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Abstract
The invention discloses a kind of Coupled Rigid-flexible platform with rigidity switching device, the Coupled Rigid-flexible platform includes: hollow rigid frame, nucleus movement platform and flexible hinge；The hollow rigid frame is connect by the flexible hinge with the nucleus movement platform；The Rigid-flexible Coupled Motion platform further includes rigidity switching device；The rigidity switching device is fixed on the gap between the hollow rigid frame and the nucleus movement platform；The rigidity switching device includes actuating mechanism and wedge block；The actuating mechanism controls the wedge block and moves in the gap, to change the pore size between the nucleus movement platform and the rigid frame, to change the rigidity of the flexible hinge.The present invention is able to solve the vibration problem of Coupled Rigid-flexible platform during high speed exercise, realizes high Low rigidity switching, vibration and high rigidity flexible hinge compensation effect bad contradiction when avoiding Low rigidity flexible hinge high speed.
Description
Technical field
The present invention relates to motor-drive technique, more particularly relate to a kind of Coupled Rigid-flexible platform with rigidity switching device and
Motion platform.
Background technique
High speed and precision motion platform is widely used in the fields such as semiconductor packages.It is moved in high speed and precision motion platform
The uncertain variation of the uncertain amplitude that will lead to frictional resistance of surface roughness between pair.And in the starting of motion platform, stop
Only and during Fine Feed, motion platform it is relatively lower speed, the amplitude fluctuations of above-mentioned frictional resistance are easy to cause movement flat
There is " creeping " phenomenon in platform.Under closed-loop control system effect, driver will be rubbed by way of increasing driving force to overcome
Wipe resistance, compensation campaign platform position error.In above-mentioned compensation process, motion platform will undergo frequent " static → movement "
State switching.During " static → movement ", the frictional resistance between kinematic pair can undergo " stiction → kinetic force of friction "
State switching, and the acceleration that the difference between confficient of static friction and dynamic friction coefficient will lead to above-mentioned state switching moment is prominent
Become, causes " shake " of the motion platform near final position location, influence positioning accuracy.
It is influenced to reduce the position error as caused by Frotteurism switching during starting, stopping and Fine Feed,
It is proposed a kind of very effective scheme --- the Rigid-flexible Coupled Motion platform based on flexible hinge, by flexible hinge flexible deformation
To realize the movement of continuous precise.The working principle of flexible hinge kinematic pair limits its fortune for being primarily adapted for use in micro-stroke
It is dynamic.Therefore, during big stroke motion, flexible hinge is often used cooperatively with there is fricting movement pair, is formed macro micro- compound
Motion platform realizes the movement of large stroke and high precision, compensates to grand movement.
However, in this large-scale motion process, since the rigidity of flexible hinge itself is very small, flexible hinge
Chain can be constantly of reciprocating vibration with the movement of platform, will affect the rigidity and movement essence of precision surface plate during grand movement
Degree.
Summary of the invention
The present invention is directed to propose a kind of Coupled Rigid-flexible platform with rigidity switching device, is transported on a large scale in macro-moving stage
During dynamic, the device is by micromotion platform " locked ", thus inhibit the vibration of flexible hinge, i.e., in this process, precision fortune
Moving platform can be considered a rigid platfor；When during precision movement platform starting, stopping and Fine Feed, the device is automatic
" unlock " decontrols flexible hinge, so that micromotion platform carries out the movement of micro-stroke, is able to compensate grand movement.
The vibration of precision movement platform flexible hinge during grand movement can so be reduced to platform rigidity and kinematic accuracy
Influence, while can also reduce precision movement platform and " be climbed caused by change in friction force during starting, stopping and Fine Feed
Influence of the row " to movement and positioning accuracy.Specific technical solution is as follows.
A kind of Coupled Rigid-flexible platform with rigidity switching device, the Coupled Rigid-flexible platform include: hollow rigid frame, core
Heart motion platform and flexible hinge；The hollow rigid frame is connect by the flexible hinge with the nucleus movement platform；
The Rigid-flexible Coupled Motion platform further includes rigidity switching device；The rigidity switching device is fixed on the hollow rigid frame
With the gap between the nucleus movement platform；The rigidity switching device includes actuating mechanism and wedge block；The actuator
Structure controls the wedge block and moves in the gap, to change the institute between the nucleus movement platform and the rigid frame
Pore size is stated, to change the rigidity of the flexible hinge.
Further, the wedge block includes upper end wedge block and lower end wedge block；The actuating mechanism include axis, spring,
Electromagnet and sliding electromagnet；The upper end wedge block is fixed on the upper end of the axis, is respectively provided between two wedge blocks
There is spring, the lower section of lower end wedge block is equipped with electromagnet, and the lower end of axis connects sliding electromagnet.
Further, there are through-holes for the rigid frame and/or the nucleus movement platform；The axis pass through the through-hole with
The rigid frame and/or nucleus movement platform connection；The spring includes upper spring and lower spring；The upper spring is set
It sets between the through-hole and the upper wedge block；The lower spring is arranged between the through-hole and the lower end wedge block.
Further, the through-hole should reserve certain surplus, and the space of a transverse direction is reserved to axis.
Further, the actuating mechanism further includes upper end fixed stop and lower end fixed stop；The upper end wedge block is logical
Cross the upper end that the upper end fixed stop is fixed on axis；The electromagnet is set to the lower end wedge block and fixes with the lower end
Between block.
Further, it is provided with limiting device and/or damper between the rigid frame and the nucleus movement platform, uses
In the rigid shock that the alleviation nucleus movement platform is contacted with the rigid frame.
Further, have and the wedge shape on the outside of the inside of the hollow rigid frame and/or the nucleus movement platform
The gradient of block cooperation, the gradient should be less than the angle of friction of platform, can be self-locking when contacting with wedge block.
Further, the gradient between the nucleus movement platform and the rigid frame is to be arranged symmetrically.
Further, there is also support stiffness reinforcement structures for the nucleus movement platform and rigid frame.
Further, the flexible hinge is straight beam type or cut type flexible hinge.
Further, the flexible hinge between the nucleus movement platform and the rigid frame of Coupled Rigid-flexible platform is pair
Claim arrangement.
Further, the Rigid-flexible Coupled Motion platform is integral type processing and manufacturing.
A kind of precision movement platform, the precision movement platform include base, the linear guide being fixed on the base,
The described in any item Rigid-flexible Coupled Motion platforms of guide rail slide block, claim 1-8, linear actuator, displacement sensor；It is described rigid
Nucleus movement platform in soft coupled motions platform is connect with the linear actuator, and the rigid frame is sliding by the guide rail
Block is connect with the linear guide；Institute's displacement sensors are connect with the nucleus movement platform, for measuring the core fortune
The displacement of moving platform in the movement direction.
Further, the linear actuator is voice coil motor or linear motor, is directly driven, fast response time.
A method of above-mentioned precision movement platform is controlled, the described method comprises the following steps:
S1. the linear actuator directly drives the nucleus movement platform, fails to overcome the rigid frame in driving force
When frame static friction, the rigidity switching device does not work, the flexible deformation that the nucleus movement platform passes through the flexible hinge
Micro-displacement is generated, realizes accurate Fine Feed；
S2. when driving force increases, frictional force is overcome, the rigid frame is driven to move, and flexible deformation increases at this time
Greatly to a certain extent, into limit state, all driving forces are transmitted to the rigid frame and carry out high-speed motion, at this time rigidity
Switching device enters working condition, and flexible deformation cannot be occurred for the flexible hinge " locked " by the rigidity switching device；
S3. when stopping, product platform is first braked, and is driven the rigid frame to brake by the flexible hinge, is worked as institute
It states after rigid frame brakes completely, rigidity switching device power cut-off, the rigidity switching device is to the flexible hinge at this time
Flexible deformation decaying vibrational energy occurs for " unlock ".
Compared with prior art, beneficial effect is:
1. using without friction flexible hinge kinematic pair come realize high-precision consecutive variations be displaced, avoid and transported under speed operation
Dynamic frictional transition switching causes to be displaced " shake " caused by sudden change of acceleration.
2. the motion platform for using Coupled Rigid-flexible designs, used flexible hinge can be by natural resiliency deformation master
The dynamic change in friction force for adapting to guide rail kinematic pair avoids " to creep " caused by the switching of friction in pairs state and determine continuous dislocation
The influence of position, is advantageously implemented higher positioning accuracy.
3. using automatic rigidity switching device, when platform carries out grand movement by flexible hinge " locked ", make
It obtains Coupled Rigid-flexible platform and switches to rigid platfor, avoid the vibration of flexible hinge in this process；In platform starting, stop
During Fine Feed, flexible hinge " unlock ", flexible hinge flexible deformation, compensate by rigidity switching device occurs.
Detailed description of the invention
Fig. 1 is schematic diagram of the invention.
Fig. 2 is front cross sectional view of the invention.
Fig. 3 is the partial enlarged view of Fig. 2.
Fig. 4 is the rigidity switching device operation principle schematic diagram of Coupled Rigid-flexible platform.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
As shown in Figure 1, motion platform mainly by base (A05), linear guide (A04), straight-line guide rail slide block (A06), just
The composition such as soft coupled motions platform and linear motor driver.Wherein, Rigid-flexible Coupled Motion platform include rigid frame (A03),
Nucleus movement platform (A02), flexible hinge (A01) and rigidity switching device.Rigid frame (A03) and nucleus movement platform
(A02) it is connected between by flexible hinge (A01) kinematic pair, rigid frame (A03) passes through linear guide kinematic pair and base
(A06) it connects；Rigidity switching device includes axis, fixed stop (A07), wedge block (A08), spring (A09), electromagnet (A10)
With sliding electromagnet (A11).The axis both ends of rigidity switching device are separately connected wedge block (A08), and upper end wedge block (A08) passes through
Fixed stop (A07) is fixed on the upper end of axis, and axis is connect by passing through the through-hole that rigid frame reserves with rigid frame.Two wedges
Spring (A09) is provided between shape block (A08) and rigid frame.Electromagnetism is equipped between lower end wedge block and lower end fixed stop
Iron (A10).The lower end of axis connects sliding electromagnet (A11).Rigidity switching device is arranged in rigid frame (A03) and nucleus movement
Between platform (A02).
It is of course also possible to which through-hole is arranged on nucleus movement platform (A02), axis is set to nucleus movement platform (A02)
Through-hole on, with rigidity of fixation switching device.Or the two is all provided with through-hole.
Linear motor driver applies driving force to nucleus movement platform (A02).The driving force can make flexible hinge
(A01) flexible deformation occurs, and the nucleus movement platform (A02) is made to generate the straight-line displacement along rail length direction in turn.
The straight line that the flexible deformation reaction force of the flexible hinge (A01) can be used for that the rigid frame (A03) is overcome to be connected
Frictional force between guide rail kinematic pair.The work of rigidity switching device can be divided into two kinds of situations: a. works as the elasticity of flexible hinge (A01)
When deformation force is less than the resistances such as the stiction of the kinematic pair, grating rule displacement sensor detects rigid frame (A03) no
Movement, electromagnet (A10) and sliding electromagnet (A11) must not be electric, and spring (A09) rebound, wedge block (A08) unclamps；B. when soft
Property hinge (A01) flexible deformation breaking-out when being firmly greater than the resistances such as stiction between the linear guide kinematic pair, institute
Motion state will be switched to by stationary state by stating rigid frame (A03), and electromagnet (A10) obtains electric, electromagnetism with sliding electromagnet (A11)
Iron (A10) opens, sliding electromagnet (A11) drop-down, wedge block (A08) locking.
When the motion state of the linear guide kinematic pair switches between above situation a and b, the linear guide fortune
Difference between dynamic pair confficient of static friction and dynamic friction coefficient causes resistance to be mutated, and generates the rigid shock to motion platform, and
Lead to the friction " creeping " of kinematic pair.During the starting of Coupled Rigid-flexible platform, stopping and Fine Feed, the flexible hinge
(A01) frictional resistance caused by the above-mentioned switching by friction in pairs state can be actively adapted to by the flexible deformation of itself to dash forward
Become, alleviates frictional resistance mutation to the rigid shock of the nucleus movement platform (A02)；Big stroke is carried out in Coupled Rigid-flexible platform
In movement, flexible hinge " locked " is switched to rigid platfor and is moved by rigidity switching device.
The working principle of the rigidity switching device of Coupled Rigid-flexible platform of the present invention are as follows:
1. as shown in Fig. 4 (I), when the flexible deformation active force of the flexible hinge fails to overcome the rigid frame
(A03) when static friction, then the rigid frame (A03) will remain stationary state, and displacement sensor detects rigid frame (A03)
It does not move, rigidity switching device does not work, and spring (A09) rebound, wedge block (A08) unclamps, flexible hinge work, Coupled Rigid-flexible
Platform realizes accurate continuous movement by the flexible deformation of the flexible hinge；
2. as shown in Fig. 4 (II), when the flexible deformation active force of the flexible hinge overcomes the rigid frame enough
(A03) when static friction, then the rigid frame (A03) is by setting in motion, and displacement sensor detects that rigid frame carries out at this time
Movement, the lowermost sliding electromagnet (A11) pull down axis, top wedge block (A08) locking；Meanwhile the electromagnet of lower section
(A10) it opens, lower section wedge block (A08) is also locked, and rigidity switching device enters work.At this time since its gradient is less than platform
Angle of friction, inclined-plane is self-locking, and flexible deformation cannot occur for flexible hinge, Coupled Rigid-flexible platform switches to rigid platfor by " locked "
Carry out high-speed motion.
3. as shown in Fig. 4 (I), when nucleus movement platform (A02) moves to level for stopping, nucleus movement platform
(A02) it brakes, rigid frame (A03) braking is driven by the flexible hinge, when displacement sensor detects rigid frame
(A03) braking to stopping, sliding electromagnet (A11) pushes back axis, and top spring (A09) rebound, wedge block (A08) unclamps；Together
When, lower section electromagnet (A10) is shared, and spring (A09) rebound, wedge block (A08) unclamps, rigidity switching device power cut-off.This
When flexible hinge " unlock ", occur flexible deformation decay vibrational energy.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (10)
1. a kind of Coupled Rigid-flexible platform with rigidity switching device, the Coupled Rigid-flexible platform include: hollow rigid frame, core
Motion platform and flexible hinge；
The hollow rigid frame is connect by the flexible hinge with the nucleus movement platform；
It is characterized in that, the Rigid-flexible Coupled Motion platform further includes rigidity switching device；
The rigidity switching device is fixed on the gap between the hollow rigid frame and the nucleus movement platform；
The rigidity switching device includes actuating mechanism and wedge block；
The actuating mechanism controls the wedge block and moves in the gap, with change the nucleus movement platform and it is described just
The pore size between property frame, to change the rigidity of the flexible hinge.
2. Coupled Rigid-flexible platform according to claim 1, which is characterized in that the wedge block includes upper end wedge block under
Hold wedge block；
The actuating mechanism includes axis, spring, electromagnet and sliding electromagnet；
The upper end wedge block is fixed on the upper end of the axis, and spring, lower end wedge shape are provided between two wedge blocks
The lower section of block is equipped with electromagnet, and the lower end of axis connects sliding electromagnet.
3. Coupled Rigid-flexible platform according to claim 2, which is characterized in that
There are through-holes for the rigid frame and/or the nucleus movement platform；
The axis passes through the through-hole and connect with the rigid frame and/or the nucleus movement platform；
The spring includes upper spring and lower spring；
The upper spring is arranged between the through-hole and the upper wedge block；
The lower spring is arranged between the through-hole and the lower end wedge block.
4. Coupled Rigid-flexible platform according to claim 3, which is characterized in that the through-hole should reserve certain surplus,
The space of a transverse direction is reserved to axis.
5. the Coupled Rigid-flexible platform according to any one of claim 2-4, which is characterized in that the actuating mechanism further includes
Upper end fixed stop and lower end fixed stop；
The upper end wedge block is fixed on the upper end of axis by the upper end fixed stop；
The electromagnet is set between the lower end wedge block and the lower end fixed stop.
6. Rigid-flexible Coupled Motion platform described in any one of -4 according to claim 1, which is characterized in that in the rigid frame
Limiting device and/or damper are provided between the nucleus movement platform.
7. Rigid-flexible Coupled Motion platform described in any one of -4 according to claim 1, which is characterized in that the hollow rigid frame
There is the gradient with wedge block cooperation on the outside of the inside of frame and/or the nucleus movement platform.
8. Rigid-flexible Coupled Motion platform described in any one of -4 according to claim 1, which is characterized in that the flexible hinge is
Straight beam type or cut type flexible hinge.
9. a kind of precision movement platform, which is characterized in that the precision movement platform includes base, is fixed on the base
The described in any item Rigid-flexible Coupled Motion platforms of linear guide, guide rail slide block, claim 1-8, linear actuator, displacement sensing
Device；
Nucleus movement platform in the Rigid-flexible Coupled Motion platform is connect with the linear actuator, and the rigid frame passes through
The guide rail slide block is connect with the linear guide；
Institute's displacement sensors are connect with the nucleus movement platform, for measuring the nucleus movement platform in the movement direction
Displacement.
10. a kind of method for controlling precision movement platform as claimed in claim 9, which is characterized in that the method includes following
Step:
S1. the linear actuator directly drives the nucleus movement platform, fails to overcome the rigid frame quiet in driving force
When friction, the rigidity switching device does not work, and the nucleus movement platform is generated by the flexible deformation of the flexible hinge
Micro-displacement realizes accurate Fine Feed；
S2. when driving force increases, frictional force is overcome, the rigid frame is driven to move, and flexible deformation increases at this time
To a certain degree, into limit state, all driving forces are transmitted to the rigid frame and carry out high-speed motion, and rigidity switches at this time
Device enters working condition, and flexible deformation cannot be occurred for the flexible hinge " locked " by the rigidity switching device；
S3. when stopping, the nucleus movement platform is first braked, and drives the rigid frame to brake by the flexible hinge,
After the rigid frame is braked completely, rigidity switching device power cut-off, the rigidity switching device is to the flexibility at this time
Flexible deformation decaying vibrational energy occurs for hinge " unlock ".
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811452523.4A CN109465652B (en) | 2018-11-30 | 2018-11-30 | Contact type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811452523.4A CN109465652B (en) | 2018-11-30 | 2018-11-30 | Contact type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
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Cited By (1)
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|---|---|---|---|---|
| CN110345157A (en) * | 2019-06-14 | 2019-10-18 | 广东工业大学 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
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