CN202394545U - Single-shaft floating linear platform - Google Patents
Single-shaft floating linear platform Download PDFInfo
- Publication number
- CN202394545U CN202394545U CN2011205275943U CN201120527594U CN202394545U CN 202394545 U CN202394545 U CN 202394545U CN 2011205275943 U CN2011205275943 U CN 2011205275943U CN 201120527594 U CN201120527594 U CN 201120527594U CN 202394545 U CN202394545 U CN 202394545U
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- stator
- drive motor
- pedestal
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Abstract
The utility model discloses a single-shaft floating linear platform comprising a base, wherein a driving device and a slidable work table are fixed on the base; the driving device comprises a stator base, a damping device and a flexible device are fixed on the two ends of the stator base, and a drive motor is fixed between the damping device and the flexible device in a sliding manner; the rotor of the drive motor is connected with the work table through a connecting arm; and a position feedback device used for recording the displacement of the work table is further fixed on the work table. According to the utility model, the drive motor is installed on the base in a sliding manner through a passive vibration isolation method to float the stator, and the damping device and the flexible device are arranged between the stator of the drive motor and the base to greatly weaken the counterforce generated by the platform in the case of startup or emergent stop, effectively reduce the base vibration caused by the counterforce of the movement to minimum and improve the locating precision of the platform.
Description
Technical field
The utility model relates to machining, field of measurement, is a kind of high-speed, high precision locating device.
Background technology
The precision micro-displacement work system of high-speed, high precision occupied very consequence in modern age in semicon industry and the scientific research field.The bearing accuracy of precision micro-displacement work system and travel range directly have influence on the precision and the working ability of production and processing.Simultaneously, then have influence on the efficient of equipment the stabilization time of the speed of worktable, acceleration and shutdown process, becomes the important indicator of system.
Traditional linear motion platform normally becomes rectilinear motion by electric rotating machine through screw mandrel and drives worktable, because the intermediate link screw mandrel has maximum (top) speed restriction and backlass, is difficult to realize the high-speed, high precision location.The linear motion platform of linear motor driving is used widely in recent years; The platform that this platform drives than traditional screw mandrel has very significantly advantage: factors such as the elastic deformation of elimination intermediate transmission mechanism link, gap, inertia realize directly driving worktable to the influence of system accuracy; Big, the high-speed high precision of system stiffness.
No matter be that traditional rotating motor drives the screw body drives platform, the platform for driving straight line motor that still is widely used is recently done linear movement, all exists the problem that the impulsive force that acts on pedestal causes system vibration; Platform quickened or the anxious stopping time in moment, instead was used for pedestal as masterpiece, caused the vibration of pedestal, and then influenced bearing accuracy.
The utility model content
Based on the problems referred to above, the utility model provides a kind of single shaft linear stage of floating, and this platform can effectively weaken the anti-seat vibration that causes as power of motion, improves the bearing accuracy of platform.The unsteady linear stage of described single shaft comprises pedestal 1, is fixed with drive unit and the worktable 3 that can on said pedestal 1, slide on the pedestal 1; Said drive unit comprises stator base 21, and stator base 21 two ends are fixed with damping unit 22 and flexible apparatus 24, are fixed with drive motor 23 slidably between said damping unit 22 and the flexible apparatus 24; The mover 231 of said drive motor 23 is connected through linking arm 4 with worktable 3; Be fixed with the position feedback device 31 of said worktable 3 displacements of record on the said worktable 3.
When the said worktable 3 of said mover 231 promotions moves; Can produce the acting force identical, in the opposite direction to the stator 232 of drive motor 23 with the expulsive force size; Stator 232 under the effect of this reacting force to the directions motion opposite with worktable 3, thereby depart from original origin position.The motion that the damping unit 22 at stator base 21 two ends will slow down stator 232, simultaneously said flexible apparatus 24 is with stator 232 initial point that rebounds again.So in the process of a direction motion, stator 232 will be done reciprocal vibratory movement at origin position under the effect of damping unit 22 and flexible apparatus 24 at worktable 3.
Traditional linear stage, stator are fixed on the pedestal, and stator receives instead acts directly on the pedestal as power, causes the vibration of pedestal.Acceleration is big more, and the reacting force that stator receives is big more, and is also big more to the impact of pedestal, and the vibration of pedestal is just big more, and this vibrates the direct bearing accuracy that influences system; And be not allow to occur this vibration that influences precision on high precision machines such as semiconductor XY locating platform, high-speed, high precision machining tool; So traditional linear stage receives very big restriction on acceleration and bearing accuracy; In order to promote the bearing accuracy of acceleration and platform, must solve the vibration problem of pedestal.
The unsteady linear stage of the single shaft of this paper utility model has solved this problem effectively; Adopted the method for passive vibration isolation; Stator 232 is adopted unsteady the connection with stator base 21, realize that stator 232 slides on stator base 21, stator 232 does not directly link to each other with pedestal 1.Add flexible apparatus 24 and damping unit 22 simultaneously at stator 232 two ends; Because flexible apparatus 24 is compliant member with damping unit 22; Have damping and endergonic function; The reacting force that stator 232 receives will have been reduced the influence of reacting force to pedestal 1 by flexible apparatus 24 and damping unit 22 decay.
Through the stiffness coefficient of rational flexible apparatus 24 and damping unit 22, can find out the rigidity of optimum flexible apparatus 24 and the ratio of damping of damping unit 22, the power that is delivered on the pedestal 1 will be very little, and this acting force even can not cause the vibration of pedestal 1.Under the method for this passive vibration isolation, the vibration problem of pedestal 1 obtains very significantly weakening, and the bearing accuracy of platform has obtained very big lifting, can realize micron-sized bearing accuracy.
Description of drawings
Accompanying drawing 1 is the one-piece construction synoptic diagram of the utility model preferred embodiment;
Accompanying drawing 2 is the partial structurtes synoptic diagram of the utility model preferred embodiment;
Embodiment
Preferred embodiment as shown in Figure 1; The unsteady linear stage of the single shaft of the utility model comprises pedestal 1; At the worktable 3 that is fixed with drive unit on the pedestal 1 and is driven, can on pedestal 1, slide, need the workpiece of processing or measurement and positioning just to be arranged on this worktable 3 by this drive unit.The drive unit of the utility model comprises stator base 21; Be fixed with damping unit 22 and flexible apparatus 24 at stator base 21 two ends; Between damping unit 22 and flexible apparatus 24, be fixed with drive motor 23; The stator 232 of drive motor 22 can slide on stator base 21, and with damping unit at two ends 22 and flexible apparatus 24 collisions.The mover 231 of drive motor 23 is connected through linking arm 4 with worktable 3, with push work platform 3 motions.
When 3 motions of drive motor 22 push work platform; Can produce the reacting force identical, in the opposite direction to the stator 232 of drive motor 23 with the expulsive force size; This reacting force makes stator 232 to the directions motion opposite with worktable 3, thereby departs from original origin position.
As depicted in figs. 1 and 2, in this preferred embodiment, the two ends of stator base 21 also are fixed with end cap 25, between end cap 25, are fixed with rail plate 26, and drive motor 23 is fixed on this rail plate 26 through chute, and can slide along this rail plate 26.Middle inside at two end caps 25 is fixed with damping unit 22; When stator 232 rushes at the end cap 25 of stator base 21 1 ends owing to reacting force; The impulse force to stator base 21 of damping unit 22 available buffer stators 232, thus impact slowed down to pedestal 1 to pedestal 1.Simultaneously, also be provided with flexible apparatus 24, in damping unit 22 bufferings and damping, absorb and store the impulse force of stator 232, again it is discharged, so that stator 232 is oppositely released in the both sides of damping unit 22.
So the platform of the utility model is in location process, when drive motor 23 push work platform 3 during to the motion of direction, its reacting force can directly not impact pedestal 1, but make stator 232 on stator base 21 to motion in the other direction.Because the buffering and the bounce-back of damping unit 22 and flexible apparatus 24 make stator 232 on stator base 21, do reciprocal vibratory movement, thereby the reacting force of drive motor 23 can not exerted an influence to pedestal 1, improved the bearing accuracy of platform again.
As shown in Figure 2, the worktable 3 in the utility model can be fixed on the Workbench base 33 through intersection guide rail 32, and can on Workbench base 33, slide, and Workbench base 33 is fixed on the pedestal 1.An also fixing position feedback device 31 with 3 displacements of writing task platform, reaches the purpose of measuring and locating on worktable 3.This position feedback device 31 can be sensor or grating chi, because the measuring speed of grating chi is fast, precision is high, so preferably adopt the grating chi, the concrete parameter of grating chi can be chosen according to real needs.
Last institute should be noted that; Above embodiment is only in order to the technical scheme of explanation the utility model but not to the restriction of the utility model protection domain; Although the utility model has been done detailed description with reference to preferred embodiment; Those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement the technical scheme of the utility model, and do not break away from the essence and the scope of the utility model technical scheme.
Claims (9)
1. the single shaft linear stage of floating, said platform comprises pedestal (1), is fixed with drive unit on the pedestal (1) and can goes up the worktable (3) that slides at said pedestal (1); It is characterized in that: said drive unit comprises stator base (21), and stator base (21) two ends are fixed with damping unit (22) and flexible apparatus (24), is fixed with drive motor (23) slidably between said damping unit (22) and the flexible apparatus (24); The mover (231) of said drive motor (23) is connected through linking arm (4) with worktable (3); Be fixed with the position feedback device (31) of record said worktable (3) displacement on the said worktable (3).
2. the single shaft as claimed in claim 1 linear stage of floating; It is characterized in that: the two ends of said stator base (21) are fixed with end cap (25); Be fixed with rail plate (26) between the said end cap (25), said drive motor (23) can slide along said rail plate (26); The middle inside of said end cap (25) is fixed with said damping unit (22), and the both sides of this damping unit (22) are fixed with said flexible apparatus (24) respectively.
3. the single shaft as claimed in claim 1 linear stage of floating, it is characterized in that: said flexible apparatus (24) is spring or rubber.
4. the single shaft as claimed in claim 1 linear stage of floating, it is characterized in that: said damping unit (22) is damper or impact damper.
5. the single shaft as claimed in claim 4 linear stage of floating, it is characterized in that: said damping unit (22) is a hydraulic damper.
6. the single shaft as claimed in claim 1 linear stage of floating, it is characterized in that: said position feedback device (31) is the grating chi.
7. the single shaft as claimed in claim 1 linear stage of floating, it is characterized in that: said drive motor is a linear electric machine.
8. the single shaft as claimed in claim 7 linear stage of floating, it is characterized in that: said linear electric machine is a voice coil motor.
9. like the unsteady linear stage of the arbitrary described single shaft of claim 1-8, it is characterized in that: said worktable (3) is fixed on the Workbench base (33) through intersection guide rail (32) slidably, and said Workbench base (33) is fixed on the said pedestal (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205275943U CN202394545U (en) | 2011-12-15 | 2011-12-15 | Single-shaft floating linear platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205275943U CN202394545U (en) | 2011-12-15 | 2011-12-15 | Single-shaft floating linear platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202394545U true CN202394545U (en) | 2012-08-22 |
Family
ID=46669452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205275943U Expired - Fee Related CN202394545U (en) | 2011-12-15 | 2011-12-15 | Single-shaft floating linear platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202394545U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107387959A (en) * | 2017-08-30 | 2017-11-24 | 河南工业大学 | Integral type high speed Ultra-precision positioning two-dimensional stage |
| CN109465650A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Air-cylinder type rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it |
| CN115208124A (en) * | 2022-09-16 | 2022-10-18 | 中国科学院宁波材料技术与工程研究所 | Precise motion platform integrated with active damping and control framework thereof |
-
2011
- 2011-12-15 CN CN2011205275943U patent/CN202394545U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107387959A (en) * | 2017-08-30 | 2017-11-24 | 河南工业大学 | Integral type high speed Ultra-precision positioning two-dimensional stage |
| CN109465650A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Air-cylinder type rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it |
| CN109465650B (en) * | 2018-11-30 | 2023-07-25 | 广东工业大学 | Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method |
| CN115208124A (en) * | 2022-09-16 | 2022-10-18 | 中国科学院宁波材料技术与工程研究所 | Precise motion platform integrated with active damping and control framework thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: DG-HUST Manufacturing Engineering Institute Document name: Notification to Pay the Fees |
|
| DD01 | Delivery of document by public notice |
Addressee: DG-HUST Manufacturing Engineering Institute Document name: Notification of Termination of Patent Right |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120822 Termination date: 20151215 |