CN104079204B - Inter-bank journey precision positioning operating desk - Google Patents
Inter-bank journey precision positioning operating desk Download PDFInfo
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- CN104079204B CN104079204B CN201410276572.2A CN201410276572A CN104079204B CN 104079204 B CN104079204 B CN 104079204B CN 201410276572 A CN201410276572 A CN 201410276572A CN 104079204 B CN104079204 B CN 104079204B
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Abstract
The present invention relates to a kind of inter-bank journey precision positioning operating desk, comprise the piezoelectric ceramics for driving, it is characterized in that: also comprise fixed pedestal, slide unit, piezoelectric ceramics, inertial mass are arranged on fixed pedestal, piezoelectric ceramics is connected with inertial mass, and piezoelectric ceramics can promote inertial mass and move horizontally; Inertial mass top is provided with cam, and inertial mass can rotate by stick-slip driving cam, the corresponding friction pottery that scribbles of inertial mass end face; In slide unit, have shape enclosed slot, cam is positioned at shape enclosed slot, and cam can drive the relative fixed pedestal of slide unit to slide.
Description
Technical field
The present invention relates to a kind of inter-bank journey precision positioning operating desk.
Background technology
In traditional precision positioning technology, most location and operation are all real by Piezoelectric CeramicExisting. But the displacement that piezo-electric effect produces is very little, length is that the piezoelectric ceramics of tens millimeters can only be realized conventionallyThe range of movement of tens microns. This just makes much to depend on precision positioning technology needs again compared with large moving range simultaneouslyScientific research be subject to larger restriction.
In maximally related prior art, denomination of invention is " one-dimensional micro-displacement unit " patent (publication numberCN101702329A) solved that the flexible hinge radial rigidity of existing micro-displacement apparatus is little, radially bearing capacity is little,And the problem that is difficult to accurately control output. Denomination of invention is " high-precision adjustable-speed linear micro-displacement work table "Patent (publication number CN101860256A), real by piezoelectric actuator and plane three compliant mechanism compound motionsShowed that precision is high, stroke large (range is unrestricted in theory), load are large, step pitch and response frequency can be in harmonious proportionThe Micro-displacement Technique that electromechanical conversion efficiency is high, can meet in accurate manufacture, detection and microoperation field differentInstructions for use. But the weak point that aforementioned two patents all exist is, delivery stroke is short, and structure is multipleAssorted, kinematic accuracy is not high.
Summary of the invention
Goal of the invention of the present invention is to provide a kind of inter-bank journey precision positioning operating desk, and delivery stroke is long, structureSimply, kinematic accuracy is high.
Realize the technical scheme of the object of the invention:
A kind of inter-bank journey precision positioning operating desk, comprises the piezoelectric ceramics for driving, and it is characterized in that: also bagDraw together fixed pedestal, slide unit, piezoelectric ceramics, inertial mass are arranged on fixed pedestal, piezoelectric ceramics and inertiaMass is connected, and piezoelectric ceramics can promote inertial mass and move horizontally; Inertial mass top is provided with cam,Inertial mass can rotate by stick-slip driving cam, the corresponding friction pottery that scribbles of inertial mass end face; In slide unit, openTangible enclosed slot, cam is positioned at shape enclosed slot, and cam can drive the relative fixed pedestal of slide unit to slide.
Slide unit both sides are provided with shape rail closure, and corresponding being provided with in retainer, retainer of fixed pedestal is provided with roller,Aforementioned shape rail closure, retainer, roller form rolling guide-rail pairs.
Cam adopts constant breadth cam; Cam is arranged on rotary middle spindle by pre-load nut, butterfly spring, butterflyShape spring is positioned at the below of cam, and rotary middle spindle and fixed pedestal are fixed.
The side of slide unit is provided with the grating for real-time displacement feedback.
Piezoelectric ceramics adopts and stacks type piezoelectric ceramics.
The beneficial effect that the present invention has:
The present invention proposes a kind of Piezoelectric Ceramic based on stick-slip principle and cam drive across stroke precisionPositioning action platform, piezoelectric ceramics of the present invention can promote inertial mass and move horizontally, and inertial mass can stick-slip driveMoving cam rotates, and cam can drive the relative fixed pedestal of slide unit to slide, and stick-slip drives large with its driving scope, pointThe rate of distinguishing is high, simple in structure, and volume is little, and the high outstanding advantages that waits of integrated level, is highly suitable for micro-nano field operation,In conjunction with cam mechanism compact conformation, the reliable feature of moving, can fully meet precisely locating platform to transmissionRequirement. Delivery stroke of the present invention is long, simple in structure, and kinematic accuracy is high.
Brief description of the drawings
Fig. 1 is motion principle figure of the present invention;
Fig. 2 is structural representation of the present invention.
Detailed description of the invention
As shown in Fig. 2, Fig. 1, piezoelectric ceramics 4, inertial mass 5 are arranged on fixed pedestal 9, fixed pedestal 9Bottom is provided with mounting groove, and when enforcement, piezoelectric ceramics adopts and stacks type piezoelectric ceramics. Piezoelectric ceramics 4 and inertia matterGauge block 5 is connected, and piezoelectric ceramics 4 can promote inertial mass 5 and move horizontally, and the quality of inertial mass 5 is according to pressureThe mechanical property of electroceramics 4 is determined. Inertial mass 5 tops are provided with cam 3, and inertial mass 5 can stick-slip driveCam 3 rotates, the corresponding friction pottery that scribbles of inertial mass 5 end faces. In slide unit 1, have shape enclosed slot 7, cam3 are positioned at shape enclosed slot 7, and the concrete size of shape enclosed slot 7 is determined by designed constant breadth cam 3 sizes, camCan drive the relative fixed pedestal of slide unit 1 to slide. The both sides of slide unit 1 are provided with shape rail closure 6, and fixed pedestal is correspondingBe provided with in retainer 2, retainer 2 and be provided with roller 10, aforementioned shape rail closure 6, retainer 2, roller 10 formRolling guide-rail pairs.
Cam is arranged on rotary middle spindle 12 by pre-load nut 8, butterfly spring 11, and butterfly spring 11 is positioned atThe below of cam 3, rotary middle spindle 12 is fixing with fixed pedestal 9. Butterfly spring 11 and pre-load nut 8 are standardPart, determines its size according to the size of rotary middle spindle and constant breadth cam 3, can be used to regulate inertial mass 5Size with the contact force of constant breadth cam 3 contact-making surfaces; Cam 3 adopts constant breadth cam; Can be according to concrete motionStroke is determined concrete size, adopts three pairs of circular arcs to form cam outline in the present embodiment, constant breadth cam 3Centre bore and rotary middle spindle 12 are little matched in clearance. The side of slide unit 1 is provided with the light for real-time displacement feedbackGrid.
When work, power supply signal is sawtooth voltage, and its concrete voltage magnitude and frequency can be according to selected pressuresElectroceramics value. Under the driving of power supply signal, piezoelectric ceramics 4 has produced corresponding displacement, promotes phase with itThe inertial mass 5 connecting moves, and inertial mass 5 rubs to the constant breadth cam 3 contacting with it by the pottery that rubsWiping power, actuating cam 3 rotates around rotary middle spindle, drives slide unit 1 to move.
According to above-mentioned drive form, be divided into two kinds of step-by-step system and scan modes according to type of drive difference:
Step-by-step system can realize across yardstick, high-speed motion. Under power drives, inertial mass 5 is notThere is replacing of " gluing ", " cunning " in disconnected and constant breadth cam 3 surfaces, thereby driving cam 3 constantly rotates,Owing to conventionally adopting the less piezoelectric ceramics of range of movement in stick-slip drives, be generally hundreds of nanometer to several micronsRange of movement, therefore the resolution ratio of step-by-step system is higher, can reach submicron order;
Scan mode to move compared with jogging speed, be with movable slider, thereby driving cam 3 rotates by piezoelectric ceramics 4,Realize accurately location, common sweep limits is exactly the maximum deformation quantity of piezoelectric ceramics 4, and its scanning resolutionFor the resolution ratio of piezoelectric ceramics 4, be generally nanoscale.
Claims (5)
1. an inter-bank journey precision positioning operating desk, comprise the piezoelectric ceramics for driving, it is characterized in that: also comprise fixed pedestal, slide unit, piezoelectric ceramics, inertial mass are arranged on fixed pedestal, piezoelectric ceramics is connected with inertial mass, and piezoelectric ceramics can promote inertial mass and move horizontally; Inertial mass top is provided with cam, and inertial mass can rotate by stick-slip driving cam, the corresponding friction pottery that scribbles of inertial mass end face; In slide unit, have shape enclosed slot, cam is positioned at shape enclosed slot, and cam can drive the relative fixed pedestal of slide unit to slide.
2. inter-bank journey precision positioning operating desk according to claim 1, it is characterized in that: slide unit both sides are provided with shape rail closure, the corresponding retainer that is provided with of fixed pedestal, is provided with roller in retainer, aforementioned shape rail closure, retainer, roller form rolling guide-rail pairs.
3. inter-bank journey precision positioning operating desk according to claim 2, is characterized in that: cam adopts constant breadth cam; Cam is arranged on rotary middle spindle by pre-load nut, disk spring, and disk spring is positioned at the below of cam, and rotary middle spindle and fixed pedestal are fixed.
4. inter-bank journey precision positioning operating desk according to claim 3, is characterized in that: the side of slide unit is provided with the grating for real-time displacement feedback.
5. inter-bank journey precision positioning operating desk according to claim 4, is characterized in that: piezoelectric ceramics adopts and stacks type piezoelectric ceramics.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410276572.2A CN104079204B (en) | 2014-06-19 | 2014-06-19 | Inter-bank journey precision positioning operating desk |
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| CN201410276572.2A CN104079204B (en) | 2014-06-19 | 2014-06-19 | Inter-bank journey precision positioning operating desk |
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| CN104079204B true CN104079204B (en) | 2016-05-04 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107786120B (en) * | 2017-11-21 | 2023-05-19 | 吉林大学 | Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method |
| CN109347364A (en) * | 2018-12-21 | 2019-02-15 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of across scale precisely locating platform of macro and micro servo |
| CN110601591A (en) * | 2019-09-27 | 2019-12-20 | 长春工业大学 | Linkage adjustable precise piezoelectric stick-slip driving device and control method thereof |
| CN110868099A (en) * | 2019-12-26 | 2020-03-06 | 长春工业大学 | Cross beam resonant type hinge stator orthogonal driving type precise piezoelectric stick-slip linear platform |
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| CN102519610A (en) * | 2011-12-26 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | High-precision phase shift device of lateral shear interferometer |
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| CN203457072U (en) * | 2013-07-25 | 2014-02-26 | 苏州大学 | Stick slip driving cross-dimension precision motion platform |
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| DE102005026708B4 (en) * | 2005-06-09 | 2007-05-03 | Attocube Systems Ag | Positioner with solid-body joint |
| EP2216837A1 (en) * | 2009-02-07 | 2010-08-11 | Physik Instrumente (PI) GmbH & Co. KG | Piezoelectric motor |
| US8912707B2 (en) * | 2011-07-13 | 2014-12-16 | Academia Sinica | Friction-driven actuator |
| CN103872943B (en) * | 2012-12-14 | 2016-01-06 | 中国科学技术大学 | Double-slider high accuracy inertia piezoelectric motor and control methods and scanning probe microscopy |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
| CN103391023A (en) * | 2013-07-25 | 2013-11-13 | 苏州大学 | Stick-slip driving cross-scale precise motion platform |
| CN103580532B (en) * | 2013-11-27 | 2016-05-25 | 苏州大学 | A kind of bottom prefastening stick-slip drives across yardstick precision movement platform |
| CN203896218U (en) * | 2014-06-19 | 2014-10-22 | 哈尔滨工程大学 | Cross-stroke precision positioning operation platform |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519610A (en) * | 2011-12-26 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | High-precision phase shift device of lateral shear interferometer |
| CN103278411A (en) * | 2013-05-14 | 2013-09-04 | 吉林大学 | Spherical contact type friction characteristic testing device under ultrasonic vibration |
| CN203457072U (en) * | 2013-07-25 | 2014-02-26 | 苏州大学 | Stick slip driving cross-dimension precision motion platform |
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