CN104079204A - Cross-stroke precision positioning operating desk - Google Patents
Cross-stroke precision positioning operating desk Download PDFInfo
- Publication number
- CN104079204A CN104079204A CN201410276572.2A CN201410276572A CN104079204A CN 104079204 A CN104079204 A CN 104079204A CN 201410276572 A CN201410276572 A CN 201410276572A CN 104079204 A CN104079204 A CN 104079204A
- Authority
- CN
- China
- Prior art keywords
- cam
- piezoelectric ceramic
- inertial mass
- precision positioning
- operating desk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a cross-stroke precision positioning operating desk. The cross-stroke precision positioning operating desk comprises piezoelectric ceramics used for driving, and is characterized by further comprising a fixing base and a sliding platform, the piezoelectric ceramics and an inertia mass block is arranged on the fixing base, the piezoelectric ceramics are connected with the inertia mass block and can push the inertia mass block to move horizontally, a cam is arranged above the inertia mass block, the inertia mass block can drive the cam to rotate in an adhesive sliding mode, and the top surface of the inertia mass block is coated with friction ceramics correspondingly; a shape sealing groove is formed in the sliding platform, and the cam is located in the shape sealing groove and can drive the sliding platform to slide relative to the fixing base.
Description
Technical field
The present invention relates to a kind of inter-bank journey precision positioning operating desk.
Background technology
In traditional precision positioning technology, most location and operation are all to realize by Piezoelectric Ceramic.Yet the displacement that piezoelectric effect produces is very little, and length is that the piezoelectric ceramic of tens millimeters can only be realized the range of movement of tens microns conventionally.This needs to be again subject to larger restriction compared with the scientific research of large moving range with regard to making much to depend on precision positioning technology simultaneously.
In maximally related prior art, denomination of invention is for the flexible hinge radial rigidity that " one-dimensional micro-displacement unit " patent (publication number CN101702329A) has solved existing micro-displacement apparatus is little, radially bearing capacity is little, and the problem that is difficult to accurately control output.Denomination of invention is " high-precision adjustable-speed linear micro-displacement work table " patent (publication number CN101860256A), by piezoelectric actuator and plane three compliant mechanism compound motions realized that precision is high, stroke large (range is unrestricted in theory), load are large, step pitch and response frequency can be in harmonious proportion the high Micro-displacement Technique of electromechanical conversion efficiency, can meet different instructions for use in accurate manufacture, detection and microoperation field.But the weak point that aforementioned two patents all exist is, delivery stroke is short, complex structure, and kinematic accuracy is not high.
Summary of the invention
Goal of the invention of the present invention is to provide a kind of inter-bank journey precision positioning operating desk, and delivery stroke is long, simple in structure, and kinematic accuracy is high.
Realize the technical scheme of the object of the invention:
A kind of inter-bank journey precision positioning operating desk, comprise the piezoelectric ceramic for driving, it is characterized in that: also comprise fixed pedestal, slide unit, piezoelectric ceramic, inertial mass are arranged on fixed pedestal, piezoelectric ceramic is connected with inertial mass, and piezoelectric ceramic can promote inertial mass and move horizontally; Inertial mass top is provided with cam, and inertial mass can rotate by stick-slip driving cam, the corresponding friction pottery that scribbles of inertial mass end face; In slide unit, have shape enclosed slot, cam is positioned at shape enclosed slot, and cam can drive the relative fixed pedestal of slide unit to slide.
Slide unit both sides are provided with shape rail closure, and corresponding being provided with in retainer, retainer of fixed pedestal is provided with roller, and aforementioned shape rail closure, retainer, roller form rolling guide-rail pairs.
Cam adopts constant breadth cam; Cam is arranged on rotary middle spindle by pre-load nut, butterfly spring, and butterfly spring is positioned at the below of cam, and rotary middle spindle and fixed pedestal are fixed.
The side of slide unit is provided with the grating for real-time displacement feedback.
Piezoelectric ceramic adopts and stacks type piezoelectric ceramic.
The beneficial effect that the present invention has:
The present invention proposes a kind of inter-bank journey precision positioning operating desk based on stick-slip principle and cam drive of Piezoelectric Ceramic, piezoelectric ceramic of the present invention can promote inertial mass and move horizontally, inertial mass can rotate by stick-slip driving cam, cam can drive the relative fixed pedestal of slide unit to slide, stick-slip drives large with its driving scope, resolution is high, simple in structure, volume is little, the high outstanding advantages that waits of integrated level, be highly suitable for micro-nano field operation, in conjunction with cam mechanism compact conformation, the reliable feature of moving, can fully meet the requirement of precisely locating platform to transmission.Delivery stroke of the present invention is long, simple in structure, and kinematic accuracy is high.
Accompanying drawing explanation
Fig. 1 is motion principle figure of the present invention;
Fig. 2 is structural representation of the present invention.
Embodiment
As shown in Fig. 2, Fig. 1, piezoelectric ceramic 4, inertial mass 5 are arranged on fixed pedestal 9, and fixed pedestal 9 bottoms are provided with mounting groove, and during enforcement, piezoelectric ceramic adopts and stacks type piezoelectric ceramic.Piezoelectric ceramic 4 is connected with inertial mass 5, and piezoelectric ceramic 4 can promote inertial mass 5 and move horizontally, and the quality of inertial mass 5 is determined according to the mechanical property of piezoelectric ceramic 4.Inertial mass 5 tops are provided with cam 3, and inertial mass 5 can rotate by stick-slip driving cam 3, the corresponding friction pottery that scribbles of inertial mass 5 end faces.In slide unit 1, have shape enclosed slot 7, cam 3 is positioned at shape enclosed slot 7, and the concrete size of shape enclosed slot 7 determines by designed constant breadth cam 3 sizes, and cam can drive the relative fixed pedestal of slide unit 1 to slide.The both sides of slide unit 1 are provided with shape rail closure 6, and corresponding being provided with in retainer 2, retainer 2 of fixed pedestal is provided with roller 10, and aforementioned shape rail closure 6, retainer 2, roller 10 form rolling guide-rail pairs.
Cam is arranged on rotary middle spindle 12 by pre-load nut 8, butterfly spring 11, and butterfly spring 11 is positioned at the below of cam 3, and rotary middle spindle 12 is fixing with fixed pedestal 9.Butterfly spring 11 and pre-load nut 8 are standard component, according to the size of rotary middle spindle and constant breadth cam 3, determine its size, can be used to regulate the size of inertial mass 5 and the contact force of constant breadth cam 3 contact-making surfaces; Cam 3 adopts constant breadth cam; Can determine concrete size according to concrete movement travel, adopt three pairs of circular arcs to form cam outline in the present embodiment, the centre bore of constant breadth cam 3 and rotary middle spindle 12 are little matched in clearance.The side of slide unit 1 is provided with the grating for real-time displacement feedback.
During work, power supply signal is sawtooth voltage, and its concrete voltage magnitude and frequency can be according to selected piezoelectric ceramic values.Under the driving of power supply signal, piezoelectric ceramic 4 has produced corresponding displacement, and the inertial mass 5 that promotes to be attached thereto moves, and inertial mass 5 is by ceramic constant breadth cam 3 frictional force to contacting with it that rub, actuating cam 3 rotates around rotary middle spindle, drives slide unit 1 to move.
According to above-mentioned drive form, according to type of drive difference, be divided into two kinds of step-by-step system and scan modes:
Step-by-step system can realize across yardstick, high-speed motion.Under power drives, constantly there is replacing of " gluing ", " cunning " with constant breadth cam 3 surfaces in inertial mass 5, thereby driving cam 3 constantly rotates, owing to conventionally adopting the less piezoelectric ceramic of range of movement in stick-slip drives, be generally the range of movement that hundreds of nanometer arrives several microns, therefore the resolution of step-by-step system is higher, can reach submicron order;
Scan mode to move compared with jogging speed, is with movable slider by piezoelectric ceramic 4, thereby driving cam 3 rotates, realize accurately location, common sweep limits is exactly the maximum deformation quantity of piezoelectric ceramic 4, and its scanning resolution is the resolution of piezoelectric ceramic 4, is generally nanoscale.
Claims (5)
1. an inter-bank journey precision positioning operating desk, comprise the piezoelectric ceramic for driving, it is characterized in that: also comprise fixed pedestal, slide unit, piezoelectric ceramic, inertial mass are arranged on fixed pedestal, piezoelectric ceramic is connected with inertial mass, and piezoelectric ceramic can promote inertial mass and move horizontally; Inertial mass top is provided with cam, and inertial mass can rotate by stick-slip driving cam, the corresponding friction pottery that scribbles of inertial mass end face; In slide unit, have shape enclosed slot, cam is positioned at shape enclosed slot, and cam can drive the relative fixed pedestal of slide unit to slide.
2. inter-bank journey precision positioning operating desk according to claim 1, it is characterized in that: slide unit both sides are provided with shape rail closure, corresponding being provided with in retainer, retainer of fixed pedestal is provided with roller, and aforementioned shape rail closure, retainer, roller form rolling guide-rail pairs.
3. inter-bank journey precision positioning operating desk according to claim 2, is characterized in that: cam adopts constant breadth cam; Cam is arranged on rotary middle spindle by pre-load nut, butterfly spring, and butterfly spring is positioned at the below of cam, and rotary middle spindle and fixed pedestal are fixed.
4. inter-bank journey precision positioning operating desk according to claim 3, is characterized in that: the side of slide unit is provided with the grating for real-time displacement feedback.
5. inter-bank journey precision positioning operating desk according to claim 4, is characterized in that: piezoelectric ceramic adopts and stacks type piezoelectric ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410276572.2A CN104079204B (en) | 2014-06-19 | 2014-06-19 | Inter-bank journey precision positioning operating desk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410276572.2A CN104079204B (en) | 2014-06-19 | 2014-06-19 | Inter-bank journey precision positioning operating desk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104079204A true CN104079204A (en) | 2014-10-01 |
| CN104079204B CN104079204B (en) | 2016-05-04 |
Family
ID=51600289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410276572.2A Active CN104079204B (en) | 2014-06-19 | 2014-06-19 | Inter-bank journey precision positioning operating desk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104079204B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN109347364A (en) * | 2018-12-21 | 2019-02-15 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of across scale precisely locating platform of macro and micro servo |
| CN110601591A (en) * | 2019-09-27 | 2019-12-20 | 长春工业大学 | Linkage adjustable precise piezoelectric stick-slip driving device and control method thereof |
| CN110868099A (en) * | 2019-12-26 | 2020-03-06 | 长春工业大学 | Cross beam resonant type hinge stator orthogonal driving type precise piezoelectric stick-slip linear platform |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080148589A1 (en) * | 2005-06-09 | 2008-06-26 | Attocube Systems Ag. | Positioning device with a solid-body joint |
| EP2216837A1 (en) * | 2009-02-07 | 2010-08-11 | Physik Instrumente (PI) GmbH & Co. KG | Piezoelectric motor |
| CN102519610A (en) * | 2011-12-26 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | High-precision phase shift device of lateral shear interferometer |
| CN102882421A (en) * | 2011-07-13 | 2013-01-16 | 中央研究院 | Friction-driven actuator |
| CN103278411A (en) * | 2013-05-14 | 2013-09-04 | 吉林大学 | Spherical contact type friction characteristic testing device under ultrasonic vibration |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
| CN103391023A (en) * | 2013-07-25 | 2013-11-13 | 苏州大学 | Stick-slip driving cross-scale precise motion platform |
| CN103580532A (en) * | 2013-11-27 | 2014-02-12 | 苏州大学 | Bottom pre-tensioning type stick-slip driving cross-scale precision motion platform |
| CN203457072U (en) * | 2013-07-25 | 2014-02-26 | 苏州大学 | Stick slip driving cross-dimension precision motion platform |
| CN103872943A (en) * | 2012-12-14 | 2014-06-18 | 中国科学技术大学 | Double-slider high-precision inertial piezoelectric motor, control method and scanning probe microscope |
| CN203896218U (en) * | 2014-06-19 | 2014-10-22 | 哈尔滨工程大学 | Cross-stroke precision positioning operation platform |
-
2014
- 2014-06-19 CN CN201410276572.2A patent/CN104079204B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080148589A1 (en) * | 2005-06-09 | 2008-06-26 | Attocube Systems Ag. | Positioning device with a solid-body joint |
| EP2216837A1 (en) * | 2009-02-07 | 2010-08-11 | Physik Instrumente (PI) GmbH & Co. KG | Piezoelectric motor |
| CN102882421A (en) * | 2011-07-13 | 2013-01-16 | 中央研究院 | Friction-driven actuator |
| CN102519610A (en) * | 2011-12-26 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | High-precision phase shift device of lateral shear interferometer |
| CN103872943A (en) * | 2012-12-14 | 2014-06-18 | 中国科学技术大学 | Double-slider high-precision inertial piezoelectric motor, control method and scanning probe microscope |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
| CN103278411A (en) * | 2013-05-14 | 2013-09-04 | 吉林大学 | Spherical contact type friction characteristic testing device under ultrasonic vibration |
| CN103391023A (en) * | 2013-07-25 | 2013-11-13 | 苏州大学 | Stick-slip driving cross-scale precise motion platform |
| CN203457072U (en) * | 2013-07-25 | 2014-02-26 | 苏州大学 | Stick slip driving cross-dimension precision motion platform |
| CN103580532A (en) * | 2013-11-27 | 2014-02-12 | 苏州大学 | Bottom pre-tensioning type stick-slip driving cross-scale precision motion platform |
| CN203896218U (en) * | 2014-06-19 | 2014-10-22 | 哈尔滨工程大学 | Cross-stroke precision positioning operation platform |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN109347364A (en) * | 2018-12-21 | 2019-02-15 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | A kind of across scale precisely locating platform of macro and micro servo |
| CN110601591A (en) * | 2019-09-27 | 2019-12-20 | 长春工业大学 | Linkage adjustable precise piezoelectric stick-slip driving device and control method thereof |
| CN110868099A (en) * | 2019-12-26 | 2020-03-06 | 长春工业大学 | Cross beam resonant type hinge stator orthogonal driving type precise piezoelectric stick-slip linear platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104079204B (en) | 2016-05-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103580532B (en) | A kind of bottom prefastening stick-slip drives across yardstick precision movement platform | |
| CN203251240U (en) | Positive pressure adjustable micro nano stick slip inertia drive platform | |
| CN104079204B (en) | Inter-bank journey precision positioning operating desk | |
| CN104467526B (en) | Inertia stick-slip cross-scale motion platform capable of achieving unidirectional movement | |
| CN101369155A (en) | Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench | |
| CN206559258U (en) | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force | |
| CN102969030B (en) | Plane type precise two-dimensional micrometric displacement platform | |
| CN103557412A (en) | Bipolar two-dimensional fully flexible high-precision servo platform | |
| CN103472679B (en) | Double-workpiece table long travel measurement mechanism and using method thereof | |
| CN103295651A (en) | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle | |
| CN103391023A (en) | Stick-slip driving cross-scale precise motion platform | |
| CN104362890B (en) | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement | |
| CN203965952U (en) | Based on the precision stage of piezoelectric ceramics | |
| CN203896218U (en) | Cross-stroke precision positioning operation platform | |
| CN103618473B (en) | A kind of prefastening stick-slip up and down drives across yardstick precision movement platform | |
| CN204349758U (en) | A kind of grand micro-positioning table | |
| CN102830711B (en) | Large-stroke and high-precision micro-motion platform | |
| CN104269191A (en) | Parallel mechanism driven by hydraulic servo system and piezoelectric ceramic actuators | |
| US11290030B2 (en) | Drive device and method for linear or rotary positioning | |
| CN108453676B (en) | Two-dimensional precision motion platform and motion method thereof | |
| CN204231226U (en) | A kind of inertia stick-slip formula realizing one-way movement is across yardstick motion platform | |
| CN203632575U (en) | Bottom pretightening stick-slip driving cross-scale precise movement platform | |
| CN202771265U (en) | Large stroke and high precision microchecker | |
| CN203632576U (en) | Up and down pretightening stick-slip driving cross-scale precise movement platform | |
| CN204481717U (en) | A kind of inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |