CN107834896B - Device and method for regulating output performance of parasitic principle piezoelectric driver by pre-friction force - Google Patents

Device and method for regulating output performance of parasitic principle piezoelectric driver by pre-friction force Download PDF

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CN107834896B
CN107834896B CN201711417199.8A CN201711417199A CN107834896B CN 107834896 B CN107834896 B CN 107834896B CN 201711417199 A CN201711417199 A CN 201711417199A CN 107834896 B CN107834896 B CN 107834896B
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flexible hinge
friction force
piezoelectric
gripper
rotor
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CN107834896A (en
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黄虎
杨智鑫
周晓勤
赵宏伟
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Jilin University
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Jilin University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification

Abstract

The invention relates to a device and a method for regulating output performance of a piezoelectric driver based on a parasitic principle by pre-friction force, belonging to the field of precision machinery. The device comprises a base, a driving unit and a pre-friction force regulating and controlling unit, wherein the driving unit is connected with the base through a gripper cushion block, and the pre-friction force regulating and controlling unit is connected with the base through a friction cushion block. The friction force of the mover during movement is changed by adjusting the pre-tightening screw, so that the output performance of the piezoelectric driver based on the parasitic principle is regulated and controlled, and the dual effects of improving the self-locking performance of the piezoelectric driver when the driving voltage is zero and inhibiting the rollback phenomenon in the movement process are realized. The advantages are that: the piezoelectric actuator has the advantages of simple structure and convenient control, can enhance the self-locking property of the piezoelectric actuator when the driving voltage is zero through the pre-friction force, and can effectively inhibit the rollback phenomenon in the motion process, thereby improving the output performance of the piezoelectric actuator and enhancing the application of the piezoelectric actuator in the fields of ultra-precise machining, assembly, precise measurement technology, precise optics, biomedical engineering and the like.

Description

Device and method for regulating output performance of parasitic principle piezoelectric driver by pre-friction force
Technical Field
The invention relates to the field of precision machinery, in particular to a device and a method for regulating output performance of a piezoelectric driver based on a parasitic principle by pre-friction force. The output performance of the piezoelectric driver which is widely applied in the fields of precision positioning, precision machining, precision clamping, micromanipulation and the like is effectively regulated and controlled in a mode of applying pre-friction force, the rollback movement of the piezoelectric driver is reduced or even eliminated, and the self-locking property of the piezoelectric driver is enhanced, so that the application field and the application occasion of the piezoelectric driver are expanded.
Background
The piezoelectric driver has the advantages of high positioning precision, quick frequency response, low energy consumption, light weight, small volume and the like, plays an increasingly important role in the fields of precision machinery, nanotechnology and the like, and is widely applied to the fields of ultra-precision machining, assembly, precision measurement technology, precision optics, biomedical engineering and the like.
At present, several typical driving principles of inchworm bionic driving, stick-slip driving, inertial driving, parasitic movement driving and the like are applied to develop a piezoelectric driver with large-stroke output capability. Compared with inchworm piezoelectric drivers, the inchworm piezoelectric driver has the advantages of simple structure, easiness in processing and assembly, simplicity in control system, high stepping speed and the like, and therefore has very wide application prospects, but the displacement output curve of the inchworm piezoelectric driver often has the problems of nonlinearity, rollback and the like, poor self-locking property when the driving voltage is zero and the like, influences the output performance and application occasions of the inchworm piezoelectric driver, and brings difficulty to precise positioning and control of the inchworm piezoelectric driver. For example, a new structure of a stick-slip inertial piezoelectric precision driver is proposed in a 'stick-slip inertial piezoelectric precision driver design analysis and test study', a closed-loop control system is designed, and experiments prove that the driver can complete higher-precision positioning, but a displacement graph can find that serious rollback motion can be generated in the driving process, the driver has no special design in the aspect of self-locking property, and the motion stability when external force is applied in the driving process is difficult to ensure, and the two aspects can negatively influence the use and control of the high-precision driver. The document Modeling of piezoelectric-drive stick-slip actuators designs a linear driver based on the stick-slip principle, the design can be driven more accurately, but the design is in the aspect of lacking self-locking, and the back-off motion of the stick-slip piezoelectric driver is obvious from experimental results. Document A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator shows a novel piezoelectric actuator with parasitic motion principle, which realizes higher positioning resolution, however, the displacement output curve of the piezoelectric actuator with parasitic motion principle also shows that the piezoelectric actuator with parasitic motion principle has more obvious rollback and nonlinearity phenomena and has poor self-locking property. In summary, although the driving modes such as stick-slip, inertia, parasitic movement have various advantages over inchworm type, there are problems in terms of self-locking, and rollback and nonlinearity phenomena on the displacement output curve are commonly found in piezoelectric drivers of various principles. Therefore, how to reduce or even eliminate the rollback phenomenon in the motion process of the piezoelectric driver and improve the self-locking property of the piezoelectric driver when the driving voltage is zero is still a difficult point and is also a difficult problem to be solved urgently.
Disclosure of Invention
The invention aims to provide a device and a method for regulating and controlling the output performance of a piezoelectric driver based on a parasitic principle by pre-friction force, which solve the problems in the prior art, effectively regulate and control the output performance of the piezoelectric driver widely applied in the fields of precision positioning, precision machining, precision clamping, micromanipulation and the like by applying the pre-friction force, reduce or even eliminate the rollback motion and enhance the self-locking property of the piezoelectric driver so as to expand the application range and the field of the piezoelectric driver.
The above object of the present invention is achieved by the following technical solutions:
the device for regulating the output performance of the piezoelectric driver based on the parasitic principle through the pre-friction force comprises a base, a driving unit and a pre-friction force regulating unit, wherein the driving unit is connected with the base 1 through a gripper cushion block 9 and a screw, and the pre-friction force regulating unit is connected with the base 1 through a friction cushion block 2.
The driving unit comprises a flexible hinge gripper 7, a piezoelectric stack 8, a gripper cushion block 9, a guide rail 10, a sliding block 11 and a rotor 12, wherein the flexible hinge gripper 7 is connected with the base 1 through the gripper cushion block 9, the gripper cushion block 9 is arranged on the base 1 through a screw, the piezoelectric stack 8 is arranged in a groove of the flexible hinge gripper 7 in a tight fit manner, the guide rail 10 is connected on the base 1 through a countersunk screw, the rotor 12 is connected at the upper end of the sliding block 11 through a screw, and the rotor is arranged on the guide rail 10 through the sliding block 11xMovement in the axial direction.
The pre-friction force regulating and controlling unit is composed of a left part and a right part, the two parts are completely identical in structure and comprise a friction cushion block 2, a flexible hinge pressure lever 3, a positioning rod 4, a pre-tightening screw 5, a strain gauge group 6, a left strain gauge signal conditioning module 13, a right strain gauge signal conditioning module 14, a data acquisition card 15, an industrial personal computer and a display 16, the flexible hinge pressure lever 3 and the positioning rod 4 are arranged on the friction cushion block 2 through screws and are connected with a base 1, and the gap between the flexible hinge pressure lever 3 and the positioning rod 4 is 3mm; the pre-tightening screw 5 is arranged on the positioning rod 4, the tail part of the pre-tightening screw is contacted with the flexible hinge pressing rod 3, and the pressure of the flexible hinge pressing rod 3 to the rotor 12 of the driving unit is changed by screwing the pre-tightening screw 5, so that the friction force of the rotor 12 during movement is changed; the strain gauge group 6 is stuck at the weak link of the front end groove of the flexible hinge compression bar 3, and the data acquisition card 15 is connected with the left strain gauge signal conditioning module 13 and the right strain gauge signal conditioning module 14 through wires, so that the output analog signals are converted into digital signals to be acquired to the industrial personal computer and the display 16.
Another object of the present invention is to provide a method for pre-friction control of spurious principle piezoelectric actuator output performance, comprising the steps of:
a) The piezoelectric stack 8 is arranged in a groove of the flexible hinge gripper 7 in a tight fit mode, after the flexible hinge gripper 7 is matched with the rotor 12, the flexible hinge gripper 7 is arranged at the upper end of the gripper cushion block 9 through a screw, and the data acquisition card 15 is connected with the left strain gauge signal conditioning module 13, the right strain gauge signal conditioning module 14, the industrial personal computer and the display 16 through leads;
b) The pre-tightening screw 5 is adjusted, and the indication of the industrial personal computer and the display 16 is observed, so that the flexible hinge pressing rods 3 at the left side and the right side apply pressure to the mover 12, and when the flexible hinge grippers 7 pull the mover 12 to move, friction force for preventing the movement of the mover 12 is generated between the flexible hinge pressing rods 3 at the left side and the right side and the mover 12;
c) Applying a driving voltage to the piezoelectric stack 8, and driving the flexible hinge grippers 7 to deform due to the extension of the piezoelectric stack 8 due to the inverse piezoelectric effect, so that the jaws of the flexible hinge grippers 7 are in contact with the clamping heads of the mover 12, and pulling the mover 12 to move along the guide rail 10 under the parasitic motion principle; in the pulling process, due to the existence of friction force, the self-locking property of the mover 12 when the driving voltage of the piezoelectric stack 8 is zero is greatly enhanced, and the inherent rollback movement of the parasitic principle piezoelectric driver is greatly inhibited, so that the double effects of improving the self-locking property and the movement precision of the parasitic principle piezoelectric driver are realized;
d) The pre-tightening screw 5 is adjusted to change the pressure exerted by the flexible hinge compression rods 3 on the left side and the right side on the rotor 12, namely the friction force when the rotor moves is changed, so that the output performance of the parasitic principle piezoelectric driver is regulated and controlled through the friction force.
The invention has the beneficial effects that: the pre-friction loading, regulating and controlling device and method provided by the invention can enhance the self-locking property of the piezoelectric driver when the driving voltage is zero, greatly reduce or even eliminate the inherent rollback motion of the piezoelectric driver based on the parasitic principle, realize the dual effects of improving the self-locking property and the motion precision of the piezoelectric driver, and further expand the application of the piezoelectric driver in the fields of leading edge science such as ultra-precise machining, assembly, precise measurement technology, precise optics, biomedical engineering and the like. The device and the method provided by the invention can be applied to piezoelectric drivers of other principles in an expanded way, and are wide in application range and high in practicability.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate and explain the invention and together with the description serve to explain the invention.
FIG. 1 is a schematic diagram of the device structure for pre-friction control spurious principle piezoelectric driver output performance of the present invention;
FIG. 2 is a schematic top view of the flexible hinge gripper of the present invention;
FIG. 3 is a schematic diagram of the flexible hinge gripper deformation of the present invention;
FIG. 4 is a schematic diagram of the operation of the pre-friction control unit of the present invention;
FIG. 5 is a schematic diagram of data acquisition, processing and display according to the present invention.
In the figure: 1. a base; 2. friction cushion blocks; 3. a flexible hinge strut; 4. a positioning rod; 5. pre-tightening a screw; 6. a strain gauge set; 7. a flexible hinge gripper; 8. a piezoelectric stack; 9. a gripper cushion block; 10. a guide rail; 11. a slide block; 12. a mover; 13. a left strain gauge signal conditioning module; 14. a right strain gauge signal conditioning module; 15. a data acquisition card; 16. the industrial personal computer and the display.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 5, the device and the method for regulating the output performance of the spurious principle piezoelectric driver by the pre-friction force solve the problems of rollback and self-locking performance of the spurious principle piezoelectric driver by the pre-friction force so as to improve the output performance of the spurious principle piezoelectric driver and expand the application range and the field of the spurious principle piezoelectric driver. The piezoelectric actuator has the advantages of simple structure and convenient control, can enhance the self-locking property of the piezoelectric actuator when the driving voltage is zero through the pre-friction force, and can effectively inhibit the rollback phenomenon in the motion process, thereby improving the output performance of the piezoelectric actuator and enhancing the application of the piezoelectric actuator in the fields of ultra-precise machining, assembly, precise measurement technology, precise optics, biomedical engineering and the like. The device for regulating the output performance of the piezoelectric driver based on the parasitic principle through the pre-friction force comprises a base, a driving unit and a pre-friction force regulating unit, wherein the driving unit is connected with the base 1 through a gripper cushion block 9 and a screw, and the pre-friction force regulating unit is connected with the base 1 through a friction cushion block 2.
The driving unit mainly comprises a flexible hinge gripper 7, a piezoelectric stack 8, a gripper cushion block 9, a guide rail 10, a sliding block 11 and a rotor 12, wherein the flexible hinge gripper 7 is connected with the base 1 through the gripper cushion block 9, the gripper cushion block 9 is arranged on the base 1 through a screw, the piezoelectric stack 8 is arranged in a groove of the flexible hinge gripper 7 in a tight fit manner, the guide rail 10 is connected on the base 1 through a countersunk screw, the rotor 12 is connected at the upper end of the sliding block 11 through a screw, and the rotor 12 can be arranged on the guide rail 10 through the sliding block 11xMovement in the axial direction.
The pre-friction force regulating unit is composed of a left part and a right part, the two parts are completely identical, the pre-friction force regulating unit mainly comprises a friction cushion block 2, a flexible hinge pressure lever 3, a positioning rod 4, a pre-tightening screw 5, a strain gauge group 6, a left strain gauge signal regulating module 13, a right strain gauge signal regulating module 14, a data acquisition card 15, an industrial personal computer and a display 16, the flexible hinge pressure lever 3 and the positioning rod 4 are installed on the friction cushion block 2 through screws and are connected with the base 1, the gap between the flexible hinge pressure lever 3 and the positioning rod 4 is 3mm, the pre-tightening screw 5 is installed on the positioning rod 4, and the tail part of the pre-tightening screw is in contact with the flexible hinge pressure lever 3, so that the pressure of the flexible hinge pressure lever 3 to the mover 12 can be changed through screwing the pre-tightening screw 5, the friction force during movement of the mover 12 is further changed, the strain gauge group 6 is adhered to the weak link of the front end groove of the flexible hinge pressure lever 3 through 502, the data acquisition card 15 is connected with the left strain gauge signal regulating module 13 and the right strain gauge signal regulating module 14 through wires, and the analog signals output by the data acquisition card are converted into digital signals to the industrial personal computer and the display 16.
Referring to fig. 3 to 5, the method for regulating the output performance of the spurious principle piezoelectric driver by using the pre-friction force changes the pressure applied by the left flexible hinge pressing rod and the right flexible hinge pressing rod to the rotor by adjusting the pre-tightening screw, namely, changes the friction force when the rotor moves, so that the output performance of the spurious principle piezoelectric driver is regulated and controlled by the friction force, and the dual effects of improving the self-locking performance of the piezoelectric driver when the driving voltage is zero and inhibiting the rollback phenomenon in the moving process are realized. The method comprises the following specific steps:
a) The piezoelectric stack 8 is arranged in a groove of the flexible hinge gripper 7 in a tight fit mode, after the flexible hinge gripper 7 is matched with the rotor 12, the flexible hinge gripper 7 is arranged at the upper end of the gripper cushion block 9 through a screw, and the data acquisition card 15 is connected with the left strain gauge signal conditioning module 13, the right strain gauge signal conditioning module 14, the industrial personal computer and the display 16 through leads;
b) The pre-tightening screw 5 is adjusted to enable the flexible hinge pressing rods 3 at the left side and the right side to bear the pressure F LD The indication of the industrial personal computer and the display 16 is observed, so that the flexible hinge pressing rods 3 at the left side and the right side apply proper pressure F to the rotor 12 N (e.g., 2N), so that when the flexible hinge grippers 7 pull the mover 12 to move, friction force for preventing the movement of the mover 12 is generated between the flexible hinge compression bars 3 on the left and right sides and the mover 12f N
c) Applying a driving voltage to the piezoelectric stack 8, the piezoelectric stack 8 is elongated to displace due to the inverse piezoelectric effectx pzt The flexible hinge gripper 7 is driven to deform, and the claw A of the flexible hinge gripper 7 is amplified by a two-stage structure to generatexDirection displacementx a Andydirection displacementy a So that the jaws of the flexible hinge gripper 7 are in contact with the jaws of the mover 12, pulling the mover 12 to move along the guide rail 10 under the parasitic motion principle. During the pulling process, the self-locking property of the mover 12 when the driving voltage of the piezoelectric stack 8 is zero is greatly enhanced due to the existence of friction force, and the inherent rollback movement of the parasitic principle piezoelectric driver is greatly inhibited, thereby improving the parasiticThe principle is that the piezoelectric actuator has double effects of self-locking property and motion precision.
d) The pre-tightening screw 5 is adjusted to change the pressure exerted by the flexible hinge compression rods 3 on the left side and the right side on the rotor 12, namely the friction force when the rotor moves is changed, so that the output performance of the parasitic principle piezoelectric driver is regulated and controlled through the friction force.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present invention should be included in the protection scope of the present invention.

Claims (2)

1. The utility model provides a device of parasitic principle piezoelectric actuator output performance is regulated and control to pre-friction force which characterized in that: the device comprises a base, a driving unit and a pre-friction force regulating unit, wherein the driving unit is connected with the base (1) through a gripper cushion block (9) and a screw, and the pre-friction force regulating unit is connected with the base (1) through a friction cushion block (2);
the driving unit comprises a flexible hinge gripper (7), a piezoelectric stack (8), a gripper cushion block (9), a guide rail (10), a sliding block (11) and a rotor (12), wherein the flexible hinge gripper (7) is connected with a base (1) through the gripper cushion block (9), the gripper cushion block (9) is arranged on the base (1) through a screw, the piezoelectric stack (8) is arranged in a groove of the flexible hinge gripper (7) in a tight fit manner, the guide rail (10) is connected on the base (1) through a countersunk head screw, the rotor (12) is connected at the upper end of the sliding block (11) through a screw, and the slider (11) is arranged on the guide rail (10)xMovement in the axial direction;
the pre-friction force regulating and controlling unit is composed of a left part and a right part, the two parts are completely identical in structure and comprise a friction cushion block (2), a flexible hinge pressing rod (3), a positioning rod (4), a pre-tightening screw (5), a strain gauge group (6), a left strain gauge signal regulating module (13), a right strain gauge signal regulating module (14), a data acquisition card (15), an industrial personal computer and a display (16), the flexible hinge pressing rod (3) and the positioning rod (4) are installed on the friction cushion block (2) through screws and are connected with a base (1), and the gap between the flexible hinge pressing rod (3) and the positioning rod (4) is 3mm; the pre-tightening screw (5) is arranged on the positioning rod (4), the tail part of the pre-tightening screw is in contact with the flexible hinge pressing rod (3), the pressure of the flexible hinge pressing rod (3) on the mover (12) of the driving unit is changed by screwing the pre-tightening screw (5), so that the friction force of the mover (12) during movement is changed, and when the flexible hinge grippers (7) pull the mover (12) to move, the friction force which can prevent the movement of the mover (12) is generated between the flexible hinge pressing rods (3) at the left side and the right side and the mover (12); the strain gauge group (6) is stuck at the weak link of the front end groove of the flexible hinge compression bar (3), and the data acquisition card (15) is connected with the left strain gauge signal conditioning module (13) and the right strain gauge signal conditioning module (14) through wires, so that the analog signals output by the strain gauge group are converted into digital signals to be acquired to the industrial personal computer and the display (16).
2. A method for regulating output performance of a spurious principles piezoelectric actuator by using a device for regulating output performance of a spurious principles piezoelectric actuator by using a pre-friction force as defined in claim 1, wherein the method comprises the steps of: the method comprises the following steps:
a) The piezoelectric stack (8) is arranged in a groove of the flexible hinge gripper (7) in a tight fit mode, after the flexible hinge gripper (7) is matched with the clamping head of the rotor (12), the flexible hinge gripper (7) is arranged at the upper end of the gripper cushion block (9) through a screw, and the data acquisition card (15) is connected with the left strain gauge signal conditioning module (13), the right strain gauge signal conditioning module (14) and the industrial personal computer and the display (16) through leads;
b) The pre-tightening screw (5) is adjusted, the indication of the industrial personal computer and the display (16) is observed, so that the flexible hinge pressing rods (3) at the left side and the right side apply pressure to the rotor (12), and when the flexible hinge grippers (7) pull the rotor (12) to move, friction force for preventing the rotor (12) from moving is generated between the flexible hinge pressing rods (3) at the left side and the right side and the rotor (12);
c) Applying a driving voltage to the piezoelectric stack (8), and driving the flexible hinge grippers (7) to deform due to the extension of the piezoelectric stack (8) due to the inverse piezoelectric effect, so that the jaws of the flexible hinge grippers (7) are in contact with the clamping heads of the movers (12), and pulling the movers (12) to move along the guide rail (10) under the parasitic motion principle; in the pulling process, due to the existence of friction force, the self-locking property of the rotor (12) when the driving voltage of the piezoelectric stack (8) is zero is greatly enhanced, and the inherent rollback movement of the parasitic principle piezoelectric driver is greatly inhibited, so that the double effects of improving the self-locking property and the movement precision of the parasitic principle piezoelectric driver are realized;
d) The pre-tightening screw (5) is adjusted to change the pressure exerted by the flexible hinge compression rods (3) on the left side and the right side on the rotor (12), namely the friction force when the rotor moves is changed, so that the output performance of the parasitic principle piezoelectric driver is regulated and controlled through the friction force.
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CN108418465B (en) * 2018-05-14 2024-02-27 西安科技大学 Submicron-level precise flexible micro-motion system
CN109217717B (en) * 2018-09-26 2023-08-29 吉林大学 Device and method for restraining rollback movement of parasitic piezoelectric driver by arc-shaped structure hinge
CN111614284B (en) * 2020-06-19 2024-04-02 吉林大学 Force control device and method for inhibiting rollback movement of stick-slip piezoelectric driver

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CN203632576U (en) * 2013-11-27 2014-06-04 苏州大学 Up and down pretightening stick-slip driving cross-scale precise movement platform
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