CN107834895A - The XY θ of piezoelectricity electromagnetism combination drivezThree-degree of freedom flexible actuator and method - Google Patents
The XY θ of piezoelectricity electromagnetism combination drivezThree-degree of freedom flexible actuator and method Download PDFInfo
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- CN107834895A CN107834895A CN201711086589.1A CN201711086589A CN107834895A CN 107834895 A CN107834895 A CN 107834895A CN 201711086589 A CN201711086589 A CN 201711086589A CN 107834895 A CN107834895 A CN 107834895A
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- 238000013461 design Methods 0.000 claims abstract description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
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Abstract
A kind of XY θ of piezoelectricity electromagnetism combination drive of the present inventionZThree-degree of freedom flexible actuator and method, the actuator include upper mounting plate, base, voice coil motor and piezoelectric pile；The upper mounting plate include U-shaped movable block, respectively the inside and outside moving platform being connected by H-shaped flexible hinge and double flat andante flexible hinge with movable block, set up non-uniform beam in the fixed body in four corners and with moving platform Nested design separately；The non-uniform beam includes the deflection beam that middle output mass is connected with both ends therewith；Moving platform is driven by voice coil motor, non-uniform beam Piezoelectric Ceramic, so as to realize that mass carries out the XY translations of larger stroke and a range of deflected about the z axis at lower voltages；The flexible member of double flat andante flexible hinge and H-shaped flexible hinge designs the prismatic pair for providing the corresponding free degree so that mobile decoupling；Therefore actuator displacement resolution of the present invention is high, fast, the low in energy consumption and drive member of response integrated can be processed, and the XY θ of object can be achievedZThree Degree Of Freedom is separately adjustable in high precision.
Description
Technical field
The present invention relates to XY θzA kind of Three Degree Of Freedom start technical field, and in particular to the XY θ of piezoelectricity-electromagnetism combination driveZ
Three-degree of freedom flexible actuator and its start method.
Background technology
In recent years, with high-new skills such as micro-nano location technology, micro electro mechanical system (MEMS) technology (MEMS) and space flight mechanicss of communication
Art develops rapidly, and multiple degrees of freedom micro-displacement locating platform is in sides such as astronomical telescope, image stabilization control and satellite imageries
Face turns into indispensable part.Under present circumstances, existing XY θZThree Degree Of Freedom piezo-electric type drive mechanism is although in light weight, rings
Answer fast and start precision high, but because displacement of the lines actuating travel is small, driving voltage is high, limits its application.And due to it
The particularity of application environment, require that actuation mechanism has larger translation displacements and certain limit under low driving voltage toward contact
Angular displacement.
There is voice coil motor simple in construction, small volume, high accuracy, power to control accurate, rapidly response, long lifespan and driving
The excellent properties such as stroke is big.Therefore voice coil motor is also widely used in accurate start field.
The content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, it is an object of the invention to provide a kind of piezoelectricity-electromagnetism combination drive
XY θZThree-degree of freedom flexible actuator and method, the actuator are based on piezoelectricity and electromagnetism combination drive, combine piezoelectricity and sound
The advantages of enclosing motor each, while there is small volume, respond fast, high displacement resolution, moreover it is possible in low-voltage
The lower angular displacement about the z axis realized larger XY translation displacements and meet application demand；And drive member can integration processing and
Into avoiding the uncompensable errors that the installation of multiple drive members is brought, XY θ can be achievedZThree Degree Of Freedom is separately adjustable in high precision.
To achieve these goals, the technical solution adopted by the present invention is as follows：
A kind of XY θ of piezoelectricity-electromagnetism combination driveZThree-degree of freedom flexible actuator, including upper mounting plate 1 and base 2；It is described
Upper mounting plate 1 includes four U-shaped movable blocks 3 for being open two-by-two relative, connected with the inside of U-shaped movable block 3 by H-shaped flexible hinge 12
The moving platform 4 that connects, the non-uniform beam 5 being centrally located being connected between moving platform 4 by flexible hinge and with U-shaped movable block
The fixed body 11 set up separately in four corners that 3 outside is connected by double flat andante flexible hinge 13, positioned at the both ends of non-uniform beam 5
Groove is provided with the moving platform 4 of heteropleural, the first piezoelectric pile 9 and the second piezoelectric pile 10 with precompression are provided with groove；It is described
The corner of base 2 is provided with four supporter 2-1, and adjacent edge is provided with fixed pedestal 2-2；The non-uniform beam 5 includes being located at
The output mass 5-1 at center and the first deflection being connected respectively with output mass 5-1 both ends by right circular flexure hinge
Beam 5-2 and the second deflection beam 5-3；Also include fixed base of the contiguous block 7 with base 2 for being arranged in the adjacent side of upper mounting plate 1
The first voice coil motor 6 and the second voice coil motor 8 between seat 2-2；First voice coil motor 6 includes the first magnetic cylinder 6-2 and put
First coil 6-1 in the first magnetic cylinder 6-2；Second voice coil motor 8 is formed with the first voice coil motor 6 and specification is homogeneous
Together；Described output mass 5-1 upper surface bonding control targe, for realizing the XY θ of objectZThree Degree Of Freedom start is adjusted
Section.
The first described voice coil motor 6 and the coil displacements output end of the second voice coil motor 8 and magnetic cylinder bottom portion pass through spiral shell
The fixed pedestal 2-2 respectively with contiguous block 7 and on base 2 is followed closely to be fixedly connected；The He of the first piezoelectric pile 9 with precompression
Second piezoelectric pile (10) is arranged in upper mounting plate 1, and in the groove of one end insertion moving platform 4, the other end is separately mounted to by soft
In the groove that property hinge is connected with the first deflection beam 5-2 and the second deflection beam 5-3；It is described to set up separately in 1 four corners of upper mounting plate
Fixed body 11 is fixedly connected respectively at four supporter 2-1 that base 2 is set by screw.
Described upper mounting plate 1 and base 2 are respectively processed using accurate low-speed WEDM process integration.
A kind of XY θ of piezoelectricity-electromagnetism combination drive described aboveZThe start method of three-degree of freedom flexible actuator：
When inputting control electric signal to the first voice coil motor 6, the first coil 6-1 in the first voice coil motor 6 along X-axis just
Direction is moved, while produces a thrust to U-shaped movable block 3；By overcoming corresponding double flat andante flexible hinge 13 and H-shaped flexible
The elastic force of hinge 12, realize moving platform 4 along X-axis positive direction output displacement；So as to drive output mass 5-1 square along X-axis
To one displacement of the lines of generation；Conversely, when inputting opposite control electric signal to the first voice coil motor 6, in the first voice coil motor 6
First coil 6-1 moved along X-axis negative direction, while to U-shaped movable block 3 produce a pulling force；So as to realize output mass
5-1 produces a displacement of the lines along X-axis negative direction；
Based on X-direction identical start method, by the second voice coil motor 8 output mass 5-1 can be realized along Y
Direction of principal axis produces bidirectional output displacement；
When the first piezoelectric pile 9 with precompression in upper mounting plate 1 and the second piezoelectric pile 10 are equal in magnitude at a pair
Under the effect of direction identical voltage, the inverse piezoelectric effect based on piezoelectric, piezoelectric pile produces equal in magnitude in opposite direction one
To power output and displacement, the first connected deflection beam 5-2 and the second deflection beam 5-3 are promoted along elongation side by flexible hinge respectively
Deflected to producing, and then angular displacement about the z axis is produced positioned at middle output mass 5-1 by flexible hinge driving.
Displacement of the lines start regulation in the X-axis and Y direction, and the angular displacement start regulation about the z axis on direction are equal
For independent driving；The design of double flat andante flexible hinge 13 and H-shaped flexible hinge 12 serves not only as elastic restraint element and provided
The prismatic pair of the corresponding free degree, moving platform 4 is also caused along the mobile decoupling in X-axis and Y direction, to avoid the production of additional displacement
It is raw；And due to the Nested design of moving platform 4 and non-uniform beam 5 so that output mass 5-1 along X, the output of Y-axis displacement of the lines with
Angular displacement output is independent about the z axis；Whole actuator can realize the XY θ of object without mechanical frictionZThree Degree Of Freedom is only in high precision
Vertical regulation.
The present invention compared with prior art, has the following advantages that：
1) present invention uses piezoelectricity and electromagnetism mixing start, has the characteristics that fast, the high displacement resolution of small volume, response
While, moreover it is possible to larger XY translation displacements are realized at lower voltages and meet the angular displacement about the z axis of application demand, so as to have
The features such as small power consumption, big stroke.
2) upper mounting plate drive member of the invention can integration be process, avoid what multiple drive members installations were brought
Uncompensable errors, XY θ can be achievedZThree Degree Of Freedom is separately adjustable in high precision.
3) flexible hinge that the present invention uses eliminates transmission using elastomeric material micro-strain and its from the characteristic replied
During idle running and mechanical friction；And the design of double flat andante flexible hinge and H-shaped flexible hinge serves not only as elastic restraint
Element provides the prismatic pair of the corresponding free degree, also causes mobile decoupling, mechanism is had the spies such as high displacement resolution, high accuracy
Point.
Brief description of the drawings
Fig. 1 is dimensional structure diagram of the present invention.
Fig. 2 is upper mounting plate structure top view.
Fig. 3 is part-structure component schematic diagram, and wherein Fig. 3 A are understructure schematic diagram, and Fig. 3 B show for variable-section beam structure
It is intended to, Fig. 3 C are voice coil motor structural representation.
Fig. 4 is to be of the invention along X-axis straight-line displacement driving principle schematic diagram.
Fig. 5 is angular displacement driving principle schematic diagram about the z axis of the invention.
Embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.
As shown in Fig. 1, Fig. 2 and Fig. 3, a kind of XY θ of piezoelectricity-electromagnetism combination drive of the present inventionZThree-degree of freedom flexible start
Device, including upper mounting plate 1, base 2, the first voice coil motor 6 between the contiguous block 7 and base 2 of the adjacent side of upper mounting plate 1 and
Second voice coil motor 8 and the first piezoelectric pile 9 and the second piezoelectric pile 10 with precompression in the interior grooves of upper mounting plate 1；
The upper mounting plate 1 include U-shaped movable block 3, be connected with the inside of U-shaped movable block 3 by H-shaped flexible hinge 12 moving platform 4, and
The non-uniform beam 5 being centrally located that is connected between moving platform 4 by flexible hinge and pass through with the outside of U-shaped movable block 3 double
The fixed body 11 set up separately in four corners that parallel-plate flexible hinge 13 connects, positioned at the moving platform 4 of the both ends heteropleural of non-uniform beam 5
On be provided with groove, the first piezoelectric pile 9 and the second piezoelectric pile 10 with precompression are provided with groove；The corner of the base 2 is set
Four supporter 2-1 are equipped with, adjacent edge is provided with fixed pedestal 2-2；The non-uniform beam 5 includes the output quality positioned at center
Block 5-1 and the deflections of the first deflection beam 5-2 and second being connected respectively with output mass 5-1 both ends by right circular flexure hinge
Beam 5-3；First voice coil motor 6 includes the first magnetic cylinder 6-2 and the first coil 6-1 being placed in the first magnetic cylinder 6-2；Described
Two voice coil motors 8 and the first voice coil motor 6 composition and specification all same.Described output mass 5-1 upper surface can be bonded
Control targe, for realizing the XY θ of objectZThree Degree Of Freedom start is adjusted.
As the preferred embodiment of the present invention, the coil displacements of the first described voice coil motor 6 and the second voice coil motor 8
Output end and magnetic cylinder bottom portion are fixedly connected by fixed pedestal 2-2 of the screw respectively with contiguous block 7 and on base 2；Institute
State the first piezoelectric pile 9 with precompression and the second piezoelectric pile (10) is arranged in upper mounting plate 1, one end is embedded in the groove of moving platform 4
Interior, the other end is separately mounted in the groove that is connected by flexible hinge with the first deflection beam 5-2 and the second deflection beam 5-3；Institute
State the fixed body 11 set up separately in 1 four corners of upper mounting plate and fixed respectively at four supporter 2-1 that base 2 is set by screw and connected
Connect.
As the preferred embodiment of the present invention, described upper mounting plate 1 and base 2 can be respectively adopted precision and be careful silk thread
Cutting technique integration is process.
A kind of XY θ of piezoelectricity-electromagnetism combination drive described aboveZThe start method of three-degree of freedom flexible actuator：
When inputting control electric signal to the first voice coil motor 6, the first coil 6-1 in the first voice coil motor 6 along X-axis just
Direction is moved, while produces a thrust to U-shaped movable block 3；By overcoming corresponding double flat andante flexible hinge 13 and H-shaped flexible
The elastic force of hinge 12, realize moving platform 4 along X-axis positive direction output displacement；So as to drive output mass 5-1 square along X-axis
To one displacement of the lines of generation；Conversely, when inputting opposite control electric signal to the first voice coil motor 6, in the first voice coil motor 6
First coil 6-1 moved along X-axis negative direction, while to U-shaped movable block 3 produce a pulling force；So as to which output quality can be realized
Block 5-1 produces a displacement of the lines along X-axis negative direction；
Y direction displacement of the lines start adjusting method and identical with X-direction start start regulation；
When the first piezoelectric pile 9 with precompression in upper mounting plate 1 and the second piezoelectric pile 10 are equal in magnitude at a pair
Under the effect of direction identical voltage, the inverse piezoelectric effect based on piezoelectric, piezoelectric pile produces equal in magnitude in opposite direction one
To power output and displacement, the first connected deflection beam 5-2 and the second deflection beam 5-3 are promoted along elongation side by flexible hinge respectively
Deflected to producing, and then angular displacement about the z axis is produced positioned at middle output mass 5-1 by flexible hinge driving.
Fig. 4 show X-axis straight-line displacement start principle schematic, when the first voice coil motor 6 produces one to U-shaped movable block 3
During individual thrust F, by the elastic deformation of corresponding double flat andante flexible hinge 13 and H-shaped flexible hinge 12, moving platform 4 can drive defeated
Pledge gauge block 5-1 produces a displacement of the lines Δ x along X-axis positive direction；Y direction straight-line displacement start principle and with X-direction make
Dynamic principle is identical.
Fig. 5 show angular displacement start principle schematic about the z axis, LaFor on the outside of deflection beam on the inside of flexible hinge centre-to-centre spacing with
Export the distance at mass connects hinge center, LOTo export cross-sectional width of the mass in XOY plane, if rigid deflection beam
In piezoelectric pile driving force F1Lower generation α deflection angle, then angular displacement is approximately middle output mass about the z axis：
In the X-axis and Y direction displacement of the lines start regulation, and about the z axis angular displacement start regulation be independence
Driving；The design of double flat andante flexible hinge 13 and H-shaped flexible hinge 12 serve not only as elastic restraint element provide it is corresponding from
By the prismatic pair spent, moving platform 4 is also caused along the mobile decoupling in X-axis and Y direction, to avoid the generation of additional displacement；And
Due to moving platform 4 and the Nested design of non-uniform beam 5 so that displacements of the lines of the output mass 5-1 along X, Y-axis exports and around Z
Axis angular displacement output is independent；Whole actuator is without mechanical friction, so as to realize the XY θ of object under low-power consumptionZThree certainly
It is separately adjustable by degree high accuracy.
Claims (5)
- A kind of 1. XY θ of piezoelectricity-electromagnetism combination driveZThree-degree of freedom flexible actuator, it is characterised in that：Including upper mounting plate (1) and Base (2)；It is characterized in that：The upper mounting plate (1) includes four U-shaped movable blocks (3) for being open two-by-two relative, moved with U-shaped Moving platform (4) that the inside of block (3) is connected by H-shaped flexible hinge (12), it is connected between moving platform (4) by flexible hinge The non-uniform beam (5) being centrally located and be connected by double flat andante flexible hinge (13) with the outside of U-shaped movable block (3) Set up the fixed body (11) in four corners separately, groove, groove are provided with the moving platform (4) of non-uniform beam (5) both ends heteropleural Inside it is provided with the first piezoelectric pile (9) and the second piezoelectric pile (10) with precompression；The corner of the base (2) is provided with four branch Support body (2-1), adjacent edge are provided with fixed pedestal (2-2)；The non-uniform beam (5) includes the output mass positioned at center (5-1) and the first deflection beam (5-2) and second being connected respectively with output mass (5-1) both ends by right circular flexure hinge Deflection beam (5-3)；Also include fixed pedestal of the contiguous block (7) with base (2) for being arranged in upper mounting plate (1) adjacent side The first voice coil motor (6) and the second voice coil motor (8) between (2-2)；First voice coil motor (6) includes the first magnetic cylinder (6-2) and the first coil (6-1) being placed in the first magnetic cylinder (6-2)；Second voice coil motor (8) and the first voice coil motor (6) composition and specification all same；The upper surface bonding control targe of described output mass (5-1), for realizing object XY θZThree Degree Of Freedom start is adjusted.
- A kind of 2. XY θ of piezoelectricity-electromagnetism combination drive according to claim 1ZThree-degree of freedom flexible actuator, its feature It is：Described the first voice coil motor (6) and the coil displacements output end of the second voice coil motor (8) and magnetic cylinder bottom portion pass through spiral shell The fixed pedestal (2-2) respectively with contiguous block (7) and on base (2) is followed closely to be fixedly connected；First pressure with precompression Pile (9) and the second piezoelectric pile (10) are arranged in upper mounting plate (1), in the groove of one end insertion moving platform (4), other end difference In the groove being connected by flexible hinge with the first deflection beam (5-2) and the second deflection beam (5-3)；It is described to set up separately upper The fixed body (11) in (1) four corner of platform is fixed respectively at four supporters (2-1) that base (2) is set by screw to be connected Connect.
- A kind of 3. XY θ of piezoelectricity-electromagnetism combination drive according to claim 1ZThree-degree of freedom flexible actuator, its feature It is：Described upper mounting plate (1) and base (2) are respectively process using accurate low-speed WEDM process integration.
- A kind of 4. XY θ of piezoelectricity-electromagnetism combination drive according to any one of claims 1 to 3ZThree-degree of freedom flexible start The start method of device, it is characterised in that：When inputting control electric signal to the first voice coil motor (6), first coil (6-1) in the first voice coil motor (6) is along X-axis Positive direction is moved, while produces a thrust to U-shaped movable block (3)；By overcoming corresponding double flat andante flexible hinge (13) and H The elastic force of shape flexible hinge (12), realize moving platform (4) along X-axis positive direction output displacement；So as to drive output mass (5- 1) a displacement of the lines is produced along X-axis positive direction；Conversely, when inputting opposite control electric signal to the first voice coil motor (6), the First coil (6-1) in one voice coil motor (6) is moved along X-axis negative direction, while produces a pulling force to U-shaped movable block (3)； So as to realize that output mass (5-1) produces a displacement of the lines along X-axis negative direction；Based on X-direction identical start method, by the second voice coil motor (8) output mass (5-1) can be realized along Y Direction of principal axis produces bidirectional output displacement；When the first piezoelectric pile (9) with precompression in upper mounting plate (1) and the second piezoelectric pile (10) are in a pair of size phases Under being acted on Deng direction identical voltage, the inverse piezoelectric effect based on piezoelectric, piezoelectric pile produces equal in magnitude in opposite direction A pair of power outputs and displacement, connected the first deflection beam (5-2) and the second deflection beam (5-3) edge are promoted by flexible hinge respectively Prolonging direction produces deflection, and then produces angle position about the z axis positioned at middle output mass (5-1) by flexible hinge driving Move.
- 5. start method according to claim 4, it is characterised in that：Displacement of the lines start in the X-axis and Y direction is adjusted Section, and the angular displacement start regulation on direction is independent driving about the z axis；Double flat andante flexible hinge (13) and H-shaped are flexible The design of hinge (12) serves not only as the prismatic pair that elastic restraint element provides the corresponding free degree, also causes moving platform (4) along X Mobile decoupling on axle and Y direction, avoid the generation of additional displacement；It is and embedding due to moving platform (4) and non-uniform beam (5) Shell type designs so that output mass (5-1) exports independent along X, the output of Y-axis displacement of the lines with angular displacement about the z axis；Whole actuator Without mechanical friction, the XY θ of object can be realizedZThree Degree Of Freedom is separately adjustable in high precision.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN109176420A (en) * | 2018-07-10 | 2019-01-11 | 天津大学 | Linear joint formula flexibility decoupling precision positioning structure is set in one kind |
| CN109768733A (en) * | 2019-01-30 | 2019-05-17 | 吉林大学 | A kind of rotation piezoelectric rotary driver twice |
| CN110095860A (en) * | 2019-04-29 | 2019-08-06 | 汕头大学 | A kind of compound large stroke and high precision fast mirror of two-stage |
| CN113464780A (en) * | 2021-05-25 | 2021-10-01 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2304691A1 (en) * | 1972-02-14 | 1973-08-23 | Xerox Corp | DIVE PULSE SYSTEM |
| WO1999014842A1 (en) * | 1997-09-17 | 1999-03-25 | Houston John S | Actuator with opposing repulsive magnetic forces |
| JP2001057037A (en) * | 1999-08-11 | 2001-02-27 | Internatl Business Mach Corp <Ibm> | Stator magnet, actuator and disk device |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
-
2017
- 2017-11-07 CN CN201711086589.1A patent/CN107834895B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2304691A1 (en) * | 1972-02-14 | 1973-08-23 | Xerox Corp | DIVE PULSE SYSTEM |
| WO1999014842A1 (en) * | 1997-09-17 | 1999-03-25 | Houston John S | Actuator with opposing repulsive magnetic forces |
| JP2001057037A (en) * | 1999-08-11 | 2001-02-27 | Internatl Business Mach Corp <Ibm> | Stator magnet, actuator and disk device |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
Non-Patent Citations (1)
| Title |
|---|
| 朱鹏举，时运来，赵淳生: ""新型大推动直线压电作动器的研究"", 《微电机》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN108389603B (en) * | 2018-04-03 | 2023-09-01 | 中国科学院宁波材料技术与工程研究所 | Double-composite flexible parallel four-bar mechanism |
| CN109176420A (en) * | 2018-07-10 | 2019-01-11 | 天津大学 | Linear joint formula flexibility decoupling precision positioning structure is set in one kind |
| CN109176420B (en) * | 2018-07-10 | 2021-08-06 | 天津大学 | Middle-mounted movable joint type flexible decoupling precision positioning structure |
| CN109768733A (en) * | 2019-01-30 | 2019-05-17 | 吉林大学 | A kind of rotation piezoelectric rotary driver twice |
| CN109768733B (en) * | 2019-01-30 | 2023-12-22 | 吉林大学 | Twice-rotation piezoelectric rotary driver |
| CN110095860A (en) * | 2019-04-29 | 2019-08-06 | 汕头大学 | A kind of compound large stroke and high precision fast mirror of two-stage |
| CN110095860B (en) * | 2019-04-29 | 2021-05-25 | 汕头大学 | Two-stage composite large-stroke high-precision quick reflector |
| CN113464780A (en) * | 2021-05-25 | 2021-10-01 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
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| CN107834895B (en) | 2019-04-09 |
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