CN101858477A - Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform - Google Patents
Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform Download PDFInfo
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- CN101858477A CN101858477A CN 201010150708 CN201010150708A CN101858477A CN 101858477 A CN101858477 A CN 101858477A CN 201010150708 CN201010150708 CN 201010150708 CN 201010150708 A CN201010150708 A CN 201010150708A CN 101858477 A CN101858477 A CN 101858477A
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Abstract
The invention relates to a two-degree-of-freedom large-stroke high-peed and high-precision positioning platform, belonging to an electromechanical type. The structure of the platform comprises a guide rail and a worktable which are matched with each other, and the worktable is driven by the guide rail and is connected with a mass block through a flexible hinge; a piezoelectric stack is pre-tightened and located in the flexible hinge through a wedge-shaped block; the guide rail is connected with the mass block through the flexible hinge; and the piezoelectric stack is pre-tightened in the flexible hinge through the wedge-shaped block. The positioning platform has the advantages of greatly improving the drive accuracy of the common drivers, reducing the complexity and the size of the structure, and having low cost, less investment, quick returns, high benefit and the like.
Description
Technical field
The present invention relates to electrical category, particularly a kind of two-degree-of-freedom large-stroke high-peed and high-precision positioning platform that is applied to the fields such as detection, MEMS, precision optics, Aero-Space and robot of precision finishing machine, material test specimen nanometer dynamic performance.
Technical background
In recent years, along with the fast development of microelectronics, life science, medical and health, biochemistry, semiconductor, optics, data storage, ultraprecise machinery and subjects such as manufacturing and precision measuremnt thereof, people have increasing demand to the precision positioning technology of micro/nano level and the accurate actuation techniques of micro/nano level.Therefore various have precision positioning or have the accurate driver that drives be developed and develop.Traditional driver generally adopts stepper motor to drive ball screw and realizes precision positioning or accurate the driving, perhaps adopt manual fine thread sight line location or driving, in recent years, along with the development of Piezoelectric Driving technology, be that the precision positioning of power-converting element or the impact type driver of accurate driving are shown one's talent with the piezoelectric constant.
Traditional driver exists that physical dimension is big, stepping accuracy is low and shortcoming such as low, the high-precision ball screw processing difficulties of round repetitive positioning accuracy; Have also wherein in addition that the output of some drivers is stable, precision is high, but stroke is little, has only tens microns, has seriously limited the scope of its application.Therefore be necessary to design a kind of Location accuracy and repetitive positioning accuracy is all higher, have the driver of big stroke simultaneously.
Summary of the invention
The invention provides a kind of two-degree-of-freedom large-stroke high-peed and high-precision positioning platform, solved the problems referred to above.The present invention is simple in structure, realizes easily, by to the control of piezoelectrics with applying excitation pulse, can realize functions such as the highi degree of accuracy of driver, big stroke.
The technological scheme that technical solution problem of the present invention is adopted is:
The method of upper, middle and lower-ranking guide rail that adopts two-degree-of-freedom large-stroke high-peed and high-precision positioning platform realizes the straight line motion along x axle and y axle, adopts wear-resisting slide guide, to improve system's transmission accuracy; Reduce deadweight in order to improve load capacity, middle one deck guide rail should be realized straight line motion, does the support rails of upper strata guide rail again.Top one deck guide rail is realized the straight line motion of another direction.Middle one deck guide rail and top one deck guide rail can move simultaneously, can realize the straight line motion of any direction in x, the y plane by the control of clock signal.Its drive part is designed to bilateral thin-walled hinge, makes compact structure and response rapidly.In order to realize any direction motion, the present invention adopts two groups of piezoelectric stack actings in conjunction, so that realize the back and forth movement of x, y direction simultaneously.The upper strata slideway can be fixed a worktable or the platform of directly working uses.
Structure of the present invention comprises guide rail I5, guide rail II6 that cooperatively interacts and the worktable 2 that is driven by guide rail 5, and wherein, worktable 2 links to each other with mass block I1, mass block II4 by flexible hinge I21, flexible hinge II13 respectively; Piezoelectric stack I14, piezoelectric stack II22 carry out pretension and location by wedge-shaped blocks I, wedge-shaped blocks II, wedge-shaped blocks III, wedge-shaped blocks IV15,16,23,24 in flexible hinge I21, flexible hinge II13; Guide rail I5 links to each other with mass block III8, mass block IV3 by flexible hinge III12, flexible hinge IV17 respectively; Piezoelectric stack III11, piezoelectric stack IV18 carry out pretension by wedge-shaped blocks V, wedge-shaped blocks VI, wedge-shaped blocks VII, wedge-shaped blocks VIII9,10,19,20 in flexible hinge III12, flexible hinge IV17.Movable member is realized by the inertia impact of piezoelectric stack under the control action of clock signal.Can realize big stroke, at a high speed, high-precision accurate displacement output.
Beneficial effect of the present invention is: improve the driving precision of generic drive greatly, reduce the complexity and the size of structure, and have that cost is low, little investment, instant effect, benefit advantages of higher.
Description of drawings
Fig. 1 is a perspective view of the present invention;
Fig. 2 is that master of the present invention looks schematic representation;
Fig. 3 is a schematic top plan view of the present invention;
Fig. 4 is that schematic representation is looked on a left side of the present invention.
Embodiment:
Referring to Fig. 1 to Fig. 4, two-degree-of-freedom large-stroke high-peed and high-precision positioning platform of the present invention comprises: the guide rail I5 that cooperatively interacts, guide rail II6 and the worktable 2 that is driven by guide rail I5, wherein, worktable 2 links to each other with mass block I1, mass block II4 by flexible hinge I21, flexible hinge II13 respectively; Piezoelectric stack I14, piezoelectric stack II22 carry out pretension and location by wedge-shaped blocks I, wedge-shaped blocks II, wedge-shaped blocks III, wedge-shaped blocks IV15,16,23,24 in flexible hinge I21, flexible hinge II13; Guide rail I5 links to each other with mass block III8, mass block IV3 by flexible hinge III12, flexible hinge IV17 respectively; Piezoelectric stack III11, piezoelectric stack IV18 carry out pretension by wedge-shaped blocks V, wedge-shaped blocks VI, wedge-shaped blocks VII, wedge-shaped blocks VIII9,10,19,20 in flexible hinge III12, flexible hinge IV17.Movable member is realized by the inertia impact of piezoelectric stack under the control action of clock signal.Can realize big stroke, at a high speed, high-precision accurate displacement output.
Referring to Fig. 2, wedge-shaped blocks V, wedge-shaped blocks VI9,10 position and pretension piezoelectric stack III11 by flexible hinge III12.Flexible hinge III12 one end is by the screw 7 mass block III8 that ins succession, the momentum when increasing inertia impact, thus increase driving force.The other end guide rail I5 that ins succession, the driving guide rail motion.With the sensitivity that flexible hinge links to each other and can improve system, guarantee to drive precision.Equally, wedge-shaped blocks I, wedge-shaped blocks II15,16 position and pretension piezoelectric stack I14 by flexible hinge II13.The flexible hinge one end mass block II4 that ins succession, the other end worktable 2 of ining succession.
If, piezoelectric stack III11, piezoelectric stack IV18 are not charged, and piezoelectric stack I14 or piezoelectric stack II22 extend under the effect of clock signal, shorten, thereby drive mass block I1 or mass block II4 motion generation inertia impact, because momentum conservation makes worktable 2 along the straight line side-to-side movement.In like manner, if piezoelectric stack I14, piezoelectric stack II22 are not charged, piezoelectric stack III11 or piezoelectric stack IV18 extend under the effect of clock signal, shorten, drive mass block III8 or mass block IV3 motion and produce inertia impact, because momentum conservation makes guide rail I5 seesaw along straight line, seesaw thereby drive worktable 2.So just realized the two-freedom motion.If according to the certain time sequence model piezoelectric stack I14, piezoelectric stack II22, piezoelectric stack III11, piezoelectric stack IV18 are switched on, worktable 2 can be realized any direction motion in the plane so.
Claims (1)
1. two-degree-of-freedom large-stroke high-peed and high-precision positioning platform, it is characterized in that: comprise guide rail I (5), guide rail II (6) that cooperatively interacts and the worktable (2) that drives by guide rail (5), wherein, worktable (2) links to each other with mass block I (1), mass block II (4) by flexible hinge I (21), flexible hinge II (13) respectively; Piezoelectric stack I (14), piezoelectric stack II (22) carry out pretension and location at flexible hinge I (21), flexible hinge II in (13) by wedge-shaped blocks I, wedge-shaped blocks II, wedge-shaped blocks III, wedge-shaped blocks IV (15,16,23,24); Guide rail I (5) links to each other with mass block III (8), mass block IV (3) by flexible hinge III (12), flexible hinge IV (17) respectively; Piezoelectric stack III (11), piezoelectric stack IV (18) carry out pretension at flexible hinge III (12), flexible hinge IV in (17) by wedge-shaped blocks V, wedge-shaped blocks VI, wedge-shaped blocks VII, wedge-shaped blocks VIII (9,10,19,20).
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101507087A CN101858477B (en) | 2010-04-20 | 2010-04-20 | Two-degree-of-freedom high-precision positioning platform |
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| CN2010101507087A CN101858477B (en) | 2010-04-20 | 2010-04-20 | Two-degree-of-freedom high-precision positioning platform |
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| CN101858477A true CN101858477A (en) | 2010-10-13 |
| CN101858477B CN101858477B (en) | 2011-09-14 |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102029408A (en) * | 2010-10-27 | 2011-04-27 | 东南大学 | Rare-earth ultra-magnetostrictive actuator-based two-dimensional micro-feeding cutter frame |
| CN103292127A (en) * | 2013-05-20 | 2013-09-11 | 哈尔滨工业大学 | Measurement control system of multi-shaft support air floatation platform |
| CN103343867A (en) * | 2013-06-17 | 2013-10-09 | 北京航空航天大学 | Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams |
| CN103912766A (en) * | 2014-03-28 | 2014-07-09 | 南京航空航天大学 | Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move |
| CN104019332A (en) * | 2014-05-30 | 2014-09-03 | 西安交通大学 | Super-long-stroke high-acceleration high-precision-positioning one-dimensional platform |
| CN104362890A (en) * | 2014-12-01 | 2015-02-18 | 苏州大学 | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN104753391A (en) * | 2015-03-06 | 2015-07-01 | 吉林大学 | Piezoelectric driving/locking reciprocating step driving platform and method |
| CN105252528A (en) * | 2015-11-02 | 2016-01-20 | 西安电子科技大学 | Rope-driven parallel translational micro movement platform |
| CN107134945A (en) * | 2017-06-16 | 2017-09-05 | 吉林大学 | A kind of single Ω shapes piezoelectricity straight line driver |
| CN109296895A (en) * | 2018-11-06 | 2019-02-01 | 广东工业大学 | A kind of X-Z long stroke high-speed scanning device |
| CN110281033A (en) * | 2019-05-28 | 2019-09-27 | 广东工业大学 | A kind of multiaxis Rigid-flexible Coupled Motion platform |
| CN111273418A (en) * | 2020-03-12 | 2020-06-12 | 中国科学院长春光学精密机械与物理研究所 | Optical element multi-degree-of-freedom precision positioning device under vacuum condition |
| CN113258825A (en) * | 2021-05-31 | 2021-08-13 | 吉林大学 | Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof |
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| US5377950A (en) * | 1992-09-10 | 1995-01-03 | The University Of British Columbia | Platform mountings |
| CN1434563A (en) * | 2003-02-25 | 2003-08-06 | 吉林大学 | Piezo electric inertia impact type multi-freedom degree precision driver |
| KR20040012296A (en) * | 2002-08-02 | 2004-02-11 | 한국과학기술원 | Long range stage of 6 degrees freedom using double h-frame |
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2010
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| US5377950A (en) * | 1992-09-10 | 1995-01-03 | The University Of British Columbia | Platform mountings |
| KR20040012296A (en) * | 2002-08-02 | 2004-02-11 | 한국과학기술원 | Long range stage of 6 degrees freedom using double h-frame |
| CN1434563A (en) * | 2003-02-25 | 2003-08-06 | 吉林大学 | Piezo electric inertia impact type multi-freedom degree precision driver |
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Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102029408A (en) * | 2010-10-27 | 2011-04-27 | 东南大学 | Rare-earth ultra-magnetostrictive actuator-based two-dimensional micro-feeding cutter frame |
| CN103292127B (en) * | 2013-05-20 | 2014-12-10 | 哈尔滨工业大学 | Measurement control system of multi-shaft support air floatation platform |
| CN103292127A (en) * | 2013-05-20 | 2013-09-11 | 哈尔滨工业大学 | Measurement control system of multi-shaft support air floatation platform |
| CN103343867A (en) * | 2013-06-17 | 2013-10-09 | 北京航空航天大学 | Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams |
| CN103912766B (en) * | 2014-03-28 | 2015-10-28 | 南京航空航天大学 | Planar three freedom piezoelectric drive platform and motion driving method thereof |
| CN103912766A (en) * | 2014-03-28 | 2014-07-09 | 南京航空航天大学 | Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move |
| CN104019332A (en) * | 2014-05-30 | 2014-09-03 | 西安交通大学 | Super-long-stroke high-acceleration high-precision-positioning one-dimensional platform |
| CN104019332B (en) * | 2014-05-30 | 2015-12-02 | 西安交通大学 | A kind of ultralong-stroke height accelerates high-accuracy location one-dimensional platform |
| CN104362890B (en) * | 2014-12-01 | 2017-01-18 | 苏州大学 | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement |
| CN104362890A (en) * | 2014-12-01 | 2015-02-18 | 苏州大学 | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN104753391A (en) * | 2015-03-06 | 2015-07-01 | 吉林大学 | Piezoelectric driving/locking reciprocating step driving platform and method |
| CN105252528A (en) * | 2015-11-02 | 2016-01-20 | 西安电子科技大学 | Rope-driven parallel translational micro movement platform |
| CN105252528B (en) * | 2015-11-02 | 2017-03-01 | 西安电子科技大学 | A kind of wire saws parallel translational jogging motion platform |
| CN107134945A (en) * | 2017-06-16 | 2017-09-05 | 吉林大学 | A kind of single Ω shapes piezoelectricity straight line driver |
| CN107134945B (en) * | 2017-06-16 | 2023-09-12 | 吉林大学 | Single omega-shaped piezoelectric linear driver |
| CN109296895A (en) * | 2018-11-06 | 2019-02-01 | 广东工业大学 | A kind of X-Z long stroke high-speed scanning device |
| CN109296895B (en) * | 2018-11-06 | 2023-09-12 | 广东工业大学 | X-Z long-stroke high-speed scanning device |
| CN110281033A (en) * | 2019-05-28 | 2019-09-27 | 广东工业大学 | A kind of multiaxis Rigid-flexible Coupled Motion platform |
| CN110281033B (en) * | 2019-05-28 | 2022-02-25 | 广东工业大学 | Multi-axis rigid-flexible coupling motion platform |
| CN111273418A (en) * | 2020-03-12 | 2020-06-12 | 中国科学院长春光学精密机械与物理研究所 | Optical element multi-degree-of-freedom precision positioning device under vacuum condition |
| CN113258825A (en) * | 2021-05-31 | 2021-08-13 | 吉林大学 | Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof |
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