CN2758935Y

CN2758935Y - Plane three-freedom precision positioning platform

Info

Publication number: CN2758935Y
Application number: CN 200420103170
Authority: CN
Inventors: 张宪民; 王�华; 欧阳高飞; 邓俊广; 卢盛林
Original assignee: South China University of Technology SCUT
Current assignee: South China University of Technology SCUT
Priority date: 2004-12-28
Filing date: 2004-12-28
Publication date: 2006-02-15
Anticipated expiration: 2014-12-28

Abstract

The utility model relates to a plane three-freedom accrately positioning platform which comprises an output platform, a base, three comforting mechanisms, three piezoelectric drivers, three driver positioning devices, three displacement sensors and a controller. The utility model has the advantage that the three comforting mechanisms and the three displacement sensors are outward distributed in 120 degree angles along the center of the output platform. Thus, gap prevention, no friction, lubrication saving, high precision and high stability of the movement transmission are ensured. Furthermore, the moving linearity of the output platform is enhanced. As the comforting mechanisms are used, the output platform can simultaneously provide X and Y direction translations, and Z direction rotation. Furthermore, the output platform and the base are both enabled to be in the same gradation. Piezoelectric ceramic drivers are used as the piezoelectric drivers. Thus, high-precision movement output and high response speed of the driving sources are ensured, and the utility model has nanometer level resolution and submicron level positioning precision. The utility model can be used for the field of accurate positioning.

Description

A kind of plane three-freedom degree precision locating platform

Technical field

The utility model belongs to precisely locating platform, relates in particular to a kind of plane three-freedom degree precision locating platform.

Background technology

At present, the more employing of transmission of precisely locating platform be traditional physical construction, therefore, exist gap, friction inevitably, bearing accuracy is difficult to rise to submicron order; In recent years, the high-precision Three Degree Of Freedom locating platform two-layer platforms up and down that adopt can be realized the submicron order location more, but its processed complex, the stability of platform is also bad.

The utility model content

In order to reach high precision and the characteristic that is easy to process simultaneously, the utility model provides a kind of plane three-freedom degree precision locating platform, this locating platform can not only reach the bearing accuracy of nanometer resolution, submicron order, and whole locating platform body is the individual layer integral type, can be processed by a block of material.

The technical solution adopted in the utility model is: plane three-freedom degree precision locating platform of the present utility model comprises output stage, pedestal, three compliant mechanisms, three piezoelectric actuators, three driver locating devices, three displacement transducers and controller, described output stage is connected by three compliant mechanisms with pedestal, each piezoelectric actuator links to each other with pedestal by a driver locating device, gapped or nestle up between the front end of each piezoelectric actuator and the compliant mechanism, can regulate gap and acting force between piezoelectric actuator and the compliant mechanism by the adjusting bolt of regulating piezoelectric actuator; Each displacement transducer links to each other the probe of each displacement transducer and the edge contact of output stage by a sensor locator with pedestal; Three compliant mechanisms and three displacement transducers outwards are hexagonal angle and distribute along the output stage center; Described controller links to each other with three piezoelectric actuators and three displacement transducers.

Described compliant mechanism is the compliant mechanism with one-level displacement enlarging function.

Described piezoelectric actuator is a piezoelectric ceramic actuator.

Three compliant mechanism and three displacement transducers with one-level displacement enlarging function outwards are the hexagonal angle distribution along the output stage center, the output of three piezoelectric actuators is delivered to output stage after through the compliant mechanism with one-level displacement enlarging function displacement being amplified, three displacement transducers feed back to controller with the positional information of output stage, form close-loop feedback, by controlling the output of three piezoelectric actuators, just can adjust the position and the motion of output stage, to reach location and the precision that needs.

The utility model compared with prior art has following advantage and beneficial effect:

The utility model is because three compliant mechanisms and three displacement transducers outwards are the hexagonal angle distribution along the output stage center, having guaranteed no gap that motion transmits, do not had friction, exempt to lubricate, high precision and high stability, and improved the linearity that output stage moves; Owing to adopted compliant mechanism, not only make output stage that X, the translation of Y direction can be provided simultaneously, the rotation of Z direction, and make output stage and pedestal all on same level; Adopt piezoelectric ceramic actuator as piezoelectric actuator, guaranteed the high-precision motion output and the fast response speed of drive source.

Description of drawings

Fig. 1 is the structural representation of plane three-freedom degree precision locating platform of the present utility model except that controller.

Among the figure: the adjusting

bolt

17,18 of 1-

pedestal

2,3,4-

piezoelectric actuator

5,6,7-

compliant mechanism

8,9,10-

displacement transducer

11,12,13-driver locating

device

14,15,16-piezoelectric actuator, 19-sensor locator 20-output stage

Embodiment

In order to understand the utility model better, the utility model is done to describe further below in conjunction with accompanying drawing.

Fig. 1 is the structural representation of plane three-freedom degree precision locating platform of the present utility model except that controller.As shown in Figure 1, plane three-freedom degree precision locating platform of the present utility model comprises output stage 20, pedestal 1, three

compliant mechanisms

5,6 and 7,11,12 and 13, three

displacement transducers

8,9 and 10 of 2,3 and 4, three driver locating devices of three piezoelectric actuators also comprise controller.

Output stage 20 is connected by three

compliant mechanisms

5,6,7 with pedestal 1; Piezoelectric actuator 2 links to each other with pedestal 1 by driver locating device 11, and is gapped or nestle up between its front end and the compliant mechanism 5; Piezoelectric actuator 3 links to each other with pedestal 1 by driver locating device 12, and is gapped or nestle up between its front end and the compliant mechanism 6; Piezoelectric actuator 4 links to each other with pedestal 1 by driver locating device 13, and is gapped or nestle up between its front end and the compliant mechanism 7; Can regulate gap and acting force between

piezoelectric actuator

2,3,4 and the

compliant mechanism

5,6,7 by the adjusting

bolt

14,15,16 of regulating

piezoelectric actuator

2,3,4; Displacement transducer 8 links to each other the edge contact of the probe of displacement transducer 8 and output stage 20 by sensor locator 17 with pedestal 1; Displacement transducer 9 links to each other the edge contact of the probe of displacement transducer 9 and output stage 20 by sensor locator 18 with pedestal 1; Displacement transducer 10 links to each other the edge contact of the probe of displacement transducer 10 and output stage 20 by sensor locator 19 with pedestal 1; 5,6,7 and three

displacement transducers

8,9,10 of three compliant mechanisms outwards are hexagonal angle and distribute along output stage 20 centers; 2,3,4 and three

displacement transducers

8,9,10 of described controller and three piezoelectric actuators link to each other.

Above-mentioned compliant mechanism the 5,6, the 7th has the compliant mechanism of one-level displacement enlarging function.

Above-mentioned piezoelectric actuator the 2,3, the 4th, piezoelectric ceramic actuator.

The output of three

piezoelectric actuators

2,3,4 is delivered to output stage 20 after through the compliant mechanism with one-level displacement enlarging function displacement being amplified, three

displacement transducer

8,9,10 positional informations with output stage 20 feed back to controller, form close-loop feedback, by controlling the output of three

piezoelectric actuators

2,3,4, just can adjust the position and the motion of output stage 20, to reach location and the precision that needs.

The utility model has guaranteed no gap that motion transmits, has not had friction, exempts to lubricate, high precision and high stability, improved the linearity that output stage 20 moves, make output stage 20 that X, the translation of Y direction can be provided simultaneously, the rotation of Z direction, and make output stage 20 and pedestal 1 all on same level, guarantee the high-precision motion output and the fast response speed of drive source, had the bearing accuracy of nano level resolution and submicron order.

The utility model can be widely used in the precision positioning field.

Claims

1. plane three-freedom degree precision locating platform, comprise output stage, pedestal, it is characterized in that also comprising three compliant mechanisms, three piezoelectric actuators, three driver locating devices, three displacement transducers and controller, described output stage is connected by three compliant mechanisms with pedestal, each piezoelectric actuator links to each other with pedestal by a driver locating device, gapped or nestle up between the front end of each piezoelectric actuator and the compliant mechanism, can regulate gap and acting force between piezoelectric actuator and the compliant mechanism by the adjusting bolt of regulating piezoelectric actuator; Each displacement transducer links to each other the probe of each displacement transducer and the edge contact of output stage by a sensor locator with pedestal; Three compliant mechanisms and three displacement transducers outwards are hexagonal angle and distribute along the output stage center; Described controller links to each other with three piezoelectric actuators and three displacement transducers.

2. plane three-freedom degree precision locating platform according to claim 1 is characterized in that described compliant mechanism is the compliant mechanism with one-level displacement enlarging function.

3. plane three-freedom degree precision locating platform according to claim 1 is characterized in that described piezoelectric actuator is a piezoelectric ceramic actuator.