CN201680123U - Two-freedom-degree large-stroke high-speed high-precision positioning platform - Google Patents
Two-freedom-degree large-stroke high-speed high-precision positioning platform Download PDFInfo
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- CN201680123U CN201680123U CN2010201637226U CN201020163722U CN201680123U CN 201680123 U CN201680123 U CN 201680123U CN 2010201637226 U CN2010201637226 U CN 2010201637226U CN 201020163722 U CN201020163722 U CN 201020163722U CN 201680123 U CN201680123 U CN 201680123U
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- flexible hinge
- wedge
- piezoelectric stack
- shaped blocks
- mass block
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Abstract
The utility model relates to a two-freedom-degree large-stroke high-speed high-precision positioning platform, which belongs to mechanical and electric fields. The positioning platform structurally comprises mutually matching guide tracks and a worktable driven by the guide tracks, the worktable is connected with a mass block via a flexible hinge, a piezoelectric stack is prestressed and positioned in the flexible hinge via a wedge block, the guide tracks are connected with the mass block via the flexible hinge, and the piezoelectric stack is prestressed in the flexible hinge via the wedge block. The two-freedom-degree large-stroke high-speed high-precision positioning platform has the advantages of greatly increasing drive precision of a common driver, reducing complexity and dimension of the structure, having low cost, less investment, fast efficacy, high benefit and the like.
Description
Technical field
The utility model relates to electrical category, particularly a kind of two-degree-of-freedom large-stroke high-peed and high-precision positioning platform that is applied to the fields such as detection, MEMS, precision optics, Aero-Space and robot of precision finishing machine, material test specimen nanometer dynamic performance.
Technical background
In recent years, along with the fast development of microelectronics, life science, medical and health, biochemistry, semiconductor, optics, data storage, ultraprecise machinery and subjects such as manufacturing and precision measuremnt thereof, people have increasing demand to the precision positioning technology of micro/nano level and the accurate actuation techniques of micro/nano level.Therefore various have precision positioning or have the accurate driver that drives be developed and develop.Traditional driver generally adopts stepper motor to drive ball screw and realizes precision positioning or accurate the driving, perhaps adopt manual fine thread sight line location or driving, in recent years, along with the development of Piezoelectric Driving technology, be that the precision positioning of power-converting element or the impact type driver of accurate driving are shown one's talent with the piezoelectric constant.
Traditional driver exists that physical dimension is big, stepping accuracy is low and shortcoming such as low, the high-precision ball screw processing difficulties of round repetitive positioning accuracy; Have also wherein in addition that the output of some drivers is stable, precision is high, but stroke is little, has only tens microns, has seriously limited the scope of its application.Therefore be necessary to design a kind of Location accuracy and repetitive positioning accuracy is all higher, have the driver of big stroke simultaneously.
Summary of the invention
The utility model provides a kind of two-degree-of-freedom large-stroke high-peed and high-precision positioning platform, has solved the problems referred to above.The utility model is simple in structure, realizes easily, by to the control of piezoelectrics with applying excitation pulse, can realize functions such as the highi degree of accuracy of driver, big stroke.
The technological scheme that the utility model technical solution problem is adopted is:
The method of upper, middle and lower-ranking guide rail that adopts two-degree-of-freedom large-stroke high-peed and high-precision positioning platform realizes the straight line motion along x axle and y axle, adopts wear-resisting slide guide, to improve system's transmission accuracy; Reduce deadweight in order to improve load capacity, middle one deck guide rail should be realized straight line motion, does the support rails of upper strata guide rail again.Top one deck guide rail is realized the straight line motion of another direction.Middle one deck guide rail and top one deck guide rail can move simultaneously, can realize the straight line motion of any direction in x, the y plane by the control of clock signal.Its drive part is designed to bilateral thin-walled hinge, makes compact structure and response rapidly.In order to realize any direction motion, the utility model adopts two groups of piezoelectric stack actings in conjunction, so that realize the back and forth movement of x, y direction simultaneously.The upper strata slideway can be fixed a worktable or the platform of directly working uses.
Structure of the present utility model comprises guide rail I5, guide rail II6 that cooperatively interacts and the worktable 2 that is driven by guide rail 5, and wherein, worktable 2 links to each other with mass block I1, mass block II4 by flexible hinge I21, flexible hinge II13 respectively; Piezoelectric stack I14, piezoelectric stack II22 carry out pretension and location by wedge-shaped blocks I, wedge-shaped blocks II, wedge-shaped blocks III, wedge-shaped blocks IV15,16,23,24 in flexible hinge I21, flexible hinge II13; Guide rail I5 links to each other with mass block III8, mass block IV3 by flexible hinge III12, flexible hinge IV17 respectively; Piezoelectric stack III11, piezoelectric stack IV18 carry out pretension by wedge-shaped blocks V, wedge-shaped blocks VI, wedge-shaped blocks VIII, wedge-shaped blocks VIII9,10,19,20 in flexible hinge III12, flexible hinge IV17.Movable member is realized by the inertia impact of piezoelectric stack under the control action of clock signal.Can realize big stroke, at a high speed, high-precision accurate displacement output.
The beneficial effects of the utility model are: improve the driving precision of generic drive greatly, reduce the complexity and the size of structure, and have that cost is low, little investment, instant effect, benefit advantages of higher.
Description of drawings
Fig. 1 is a perspective view of the present utility model;
Fig. 2 is that master of the present utility model looks schematic representation;
Fig. 3 is a schematic top plan view of the present utility model;
Fig. 4 is that schematic representation is looked on a left side of the present utility model.
Embodiment:
Referring to Fig. 1 to Fig. 4, the utility model two-degree-of-freedom large-stroke high-peed and high-precision positioning platform comprises: the guide rail I5 that cooperatively interacts, guide rail II6 and the worktable 2 that is driven by guide rail I5, wherein, worktable 2 links to each other with mass block I1, mass block II4 by flexible hinge I21, flexible hinge II13 respectively; Piezoelectric stack I14, piezoelectric stack II22 carry out pretension and location by wedge-shaped blocks I, wedge-shaped blocks II, wedge-shaped blocks III, wedge-shaped blocks IV15,16,23,24 in flexible hinge I21, flexible hinge II13; Guide rail I5 links to each other with mass block III8, mass block IV3 by flexible hinge III12, flexible hinge IV17 respectively; Piezoelectric stack III11, piezoelectric stack IV18 carry out pretension by wedge-shaped blocks V, wedge-shaped blocks VI, wedge-shaped blocks VII, wedge-shaped blocks VIII9,10,19,20 in flexible hinge III12, flexible hinge IV17.Movable member is realized by the inertia impact of piezoelectric stack under the control action of clock signal.Can realize big stroke, at a high speed, high-precision accurate displacement output.
Referring to Fig. 2, wedge-shaped blocks V, wedge-shaped blocks VI9,10 position and pretension piezoelectric stack III11 by flexible hinge III12.Flexible hinge III12 one end is by the screw 7 mass block III8 that ins succession, the momentum when increasing inertia impact, thus increase driving force.The other end guide rail I5 that ins succession, the driving guide rail motion.With the sensitivity that flexible hinge links to each other and can improve system, guarantee to drive precision.Equally, wedge-shaped blocks I, wedge-shaped blocks II15,16 position and pretension piezoelectric stack I14 by flexible hinge II13.The flexible hinge one end mass block II4 that ins succession, the other end worktable 2 of ining succession.
If, piezoelectric stack III11, piezoelectric stack IV18 are not charged, and piezoelectric stack I14 or piezoelectric stack II22 extend under the effect of clock signal, shorten, thereby drive mass block I1 or mass block II4 motion generation inertia impact, because momentum conservation makes worktable 2 along the straight line side-to-side movement.In like manner, if piezoelectric stack I14, piezoelectric stack II22 are not charged, piezoelectric stack III11 or piezoelectric stack IV18 extend under the effect of clock signal, shorten, drive mass block III8 or mass block IV3 motion and produce inertia impact, because momentum conservation makes guide rail I 5 seesaw along straight line, seesaw thereby drive worktable 2.So just realized the two-freedom motion.If according to the certain time sequence model piezoelectric stack I14, piezoelectric stack II22, piezoelectric stack III11, piezoelectric stack IV18 are switched on, worktable 2 can be realized any direction motion in the plane so.
Claims (1)
1. two-degree-of-freedom large-stroke high-peed and high-precision positioning platform, it is characterized in that: comprise guide rail I (5), guide rail II (6) that cooperatively interacts and the worktable (2) that drives by guide rail (5), wherein, worktable (2) links to each other with mass block I (1), mass block II (4) by flexible hinge I (21), flexible hinge II (13) respectively; Piezoelectric stack I (14), piezoelectric stack II (22) carry out pretension and location at flexible hinge I (21), flexible hinge II in (13) by wedge-shaped blocks I, wedge-shaped blocks II, wedge-shaped blocks III, wedge-shaped blocks IV (15,16,23,24); Guide rail I (5) links to each other with mass block III (8), mass block IV (3) by flexible hinge III (12), flexible hinge IV (17) respectively; Piezoelectric stack III (11), piezoelectric stack IV (18) carry out pretension at flexible hinge III (12), flexible hinge IV in (17) by wedge-shaped blocks V, wedge-shaped blocks VI, wedge-shaped blocks VII, wedge-shaped blocks VIII (9,10,19,20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201637226U CN201680123U (en) | 2010-04-20 | 2010-04-20 | Two-freedom-degree large-stroke high-speed high-precision positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201637226U CN201680123U (en) | 2010-04-20 | 2010-04-20 | Two-freedom-degree large-stroke high-speed high-precision positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201680123U true CN201680123U (en) | 2010-12-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201637226U Expired - Lifetime CN201680123U (en) | 2010-04-20 | 2010-04-20 | Two-freedom-degree large-stroke high-speed high-precision positioning platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101858477A (en) * | 2010-04-20 | 2010-10-13 | 郑福胜 | Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform |
| CN103697301A (en) * | 2013-12-31 | 2014-04-02 | 深圳翠涛自动化设备股份有限公司 | High-precision positioning control platform |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
-
2010
- 2010-04-20 CN CN2010201637226U patent/CN201680123U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101858477A (en) * | 2010-04-20 | 2010-10-13 | 郑福胜 | Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform |
| CN103697301A (en) * | 2013-12-31 | 2014-04-02 | 深圳翠涛自动化设备股份有限公司 | High-precision positioning control platform |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN104110561B (en) * | 2014-06-25 | 2016-06-29 | 华南理工大学 | A kind of large-range plane three-freedom degree precision locating platform based on compliant mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20101222 Effective date of abandoning: 20110914 |