CN110281033A - A kind of multiaxis Rigid-flexible Coupled Motion platform - Google Patents

A kind of multiaxis Rigid-flexible Coupled Motion platform Download PDF

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Publication number
CN110281033A
CN110281033A CN201910452440.3A CN201910452440A CN110281033A CN 110281033 A CN110281033 A CN 110281033A CN 201910452440 A CN201910452440 A CN 201910452440A CN 110281033 A CN110281033 A CN 110281033A
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China
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rigid
platform
flexible
motion platform
coupled motion
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CN201910452440.3A
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CN110281033B (en
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杨志军
袁伟涛
苏丽云
白有盾
陈新
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Guangdong University of Technology
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Guangdong University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25HWORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby

Abstract

The present invention relates to a kind of multiaxis Rigid-flexible Coupled Motion platforms, the multiaxis Rigid-flexible Coupled Motion platform includes: three uniaxial Rigid-flexible Coupled Motion platforms, and each uniaxial Rigid-flexible Coupled Motion platform includes: linear guide, pedestal, nucleus movement platform, load-bearing rigidity enhancing flexible hinge chain group, motion platform rigid frame, straight-line guide rail slide block, linear actuator;One end of the pedestal of described first uniaxial Rigid-flexible Coupled Motion platform is connect with the nucleus movement platform of the second Rigid-flexible Coupled Motion platform, and the other end of the pedestal of the described first uniaxial Rigid-flexible Coupled Motion platform is connect with the nucleus movement platform of the third single shaft Rigid-flexible Coupled Motion platform.The multiaxis Rigid-flexible Coupled Motion working platform area is big, and bearing capacity is strong, the various large stroke and high precision multiaxial motion platforms of the number of axle needed for can neatly being constructed according to specific requirement.

Description

A kind of multiaxis Rigid-flexible Coupled Motion platform
Technical field
The present invention relates to high-accuracy Motion Technology fields, more particularly relate to a kind of multiaxis Rigid-flexible Coupled Motion platform.
Background technique
Due to having the characteristics that flexible hinge has obtained answering extensively in precision movement platform design without rubbing, exempting from lubrication With.In precision movement platform, flexible hinge is primarily designed as guiding mechanism.In precision movement platform, work as motion platform Starting stops and when micro-displacement is fed, as a kind of frictionless motion pair, flexible hinge mainly by the flexible deformation of itself come Realize movement.The working principle of above-mentioned flexible hinge causes the motion platform based on exemplary flexible hinge guiding mechanism to be mainly applicable in In underloading occasion, its application in big load occasion is limited.Further, since in motion process flexible hinge for a long time repeatedly Deformation, tending to, which causes guiding mechanism to crack, is even broken.How the carrying of above-mentioned flexible hinge guiding mechanism is improved Rigidity and fatigue life become the critical issue for extending the typical guiding mechanism application range.
Summary of the invention
The present invention in order to overcome at least one of the drawbacks of the prior art described above, proposes that a kind of multiaxis Rigid-flexible Coupled Motion is flat Platform, the technical solution adopted by the present invention is that as follows.
A kind of multiaxis Rigid-flexible Coupled Motion platform, the multiaxis Rigid-flexible Coupled Motion platform include: three hard and soft couplings of single shaft Resultant motion platform, described three uniaxial Rigid-flexible Coupled Motion platforms are the first uniaxial Rigid-flexible Coupled Motion platform, the second list respectively Axis Rigid-flexible Coupled Motion platform and third single shaft Rigid-flexible Coupled Motion platform;Each uniaxial Rigid-flexible Coupled Motion platform wraps Include: linear guide, pedestal, nucleus movement platform, load-bearing rigidity enhancing flexible hinge chain group, motion platform rigid frame, straight line are led Rail sliding block, linear actuator;Wherein, the nucleus movement platform, load-bearing rigidity enhancing flexible hinge chain group and motion platform rigidity Frame form Coupled Rigid-flexible platform, the motion platform rigid frame by the load-bearing rigidity enhancing flexible hinge chain group with it is described The connection of nucleus movement platform;The linear guide is arranged on the pedestal;The straight-line guide rail slide block is fixed on the movement On platform rigid frame, and it can be slided in the linear guide;The linear actuator and the nucleus movement platform connect It connects, drives the nucleus movement platform to move, so that entire Coupled Rigid-flexible platform be driven to slide in linear guide;Described first One end of the pedestal of uniaxial Rigid-flexible Coupled Motion platform is connect with the nucleus movement platform of the second Rigid-flexible Coupled Motion platform, The other end of the pedestal of described first uniaxial Rigid-flexible Coupled Motion platform and the core of the third single shaft Rigid-flexible Coupled Motion platform The connection of heart motion platform.
Further, the third single shaft Rigid-flexible Coupled Motion platform and the second Rigid-flexible Coupled Motion platform are mutually flat Row, the third single shaft Rigid-flexible Coupled Motion platform and the second Rigid-flexible Coupled Motion platform with the uniaxial hard and soft coupling of institute first Resultant motion platform is mutually perpendicular to.
Further, the load-bearing rigidity enhancing flexible hinge chain group includes: multi-disc spring leaf, multiple groups gasket group;Adjacent two panels Gasket set isolation described in having one group between the spring leaf.
Further, the load-bearing rigidity enhances flexible hinge chain group setting direction and institute in the motion platform rigid frame It is orthogonal to state the direction of motion of the nucleus movement platform in the motion platform rigid frame.
Further, the load-bearing rigidity enhancing flexible hinge chain group is two groups, and flexible hinge chain group described in two groups is arranged symmetrically in Nucleus movement platform both ends.
A kind of multiaxis Rigid-flexible Coupled Motion platform, the multiaxis Rigid-flexible Coupled Motion platform include: that two single shafts are hard and soft Coupled motions platform, described three uniaxial Rigid-flexible Coupled Motion platforms are the first uniaxial Rigid-flexible Coupled Motion platform and second respectively Uniaxial Rigid-flexible Coupled Motion platform;Each uniaxial Rigid-flexible Coupled Motion platform includes: linear guide, pedestal, core fortune Moving platform, load-bearing rigidity enhance flexible hinge chain group, motion platform rigid frame, straight-line guide rail slide block, linear actuator;Wherein, The nucleus movement platform, load-bearing rigidity enhancing flexible hinge chain group and motion platform rigid frame form Coupled Rigid-flexible platform, institute It states motion platform rigid frame and is connect by load-bearing rigidity enhancing flexible hinge chain group with the nucleus movement platform;It is described straight Line guide rail is arranged on the pedestal;The straight-line guide rail slide block is fixed on the motion platform rigid frame, and can be It is slided in the linear guide;The linear actuator is connect with the nucleus movement platform, drives the nucleus movement platform Movement, so that entire Coupled Rigid-flexible platform be driven to slide in linear guide;Described first uniaxial Rigid-flexible Coupled Motion platform The middle part of pedestal is connect with the nucleus movement platform of the second Rigid-flexible Coupled Motion platform.
Further, the described first uniaxial Rigid-flexible Coupled Motion platform and the described second uniaxial Rigid-flexible Coupled Motion platform are mutual Vertically.
Further, the load-bearing rigidity enhancing flexible hinge chain group includes: multi-disc spring leaf, multiple groups gasket group;Adjacent two panels Gasket set isolation described in having one group between the spring leaf.
Further, the load-bearing rigidity enhances flexible hinge chain group setting direction and institute in the motion platform rigid frame It is orthogonal to state the direction of motion of the nucleus movement platform in the motion platform rigid frame.
Further, the load-bearing rigidity enhancing flexible hinge chain group is two groups, and flexible hinge chain group described in two groups is arranged symmetrically in Nucleus movement platform both ends.
Compared with prior art, beneficial effect is:
1. novel multi-shaft Rigid-flexible Coupled Motion working platform area of the invention is big, bearing capacity is strong, can be according to specific It is required that the various large stroke and high precision multiaxial motion platforms of the number of axle needed for neatly constructing.
2. load-bearing rigidity of the invention enhances flexible hinge chain group, individually process, be it is detachable, by N group long-fatigue life Spring plate group at, greatly improve guiding mechanism bear big load ability, be suitable for the motion platform of different structure size Design.
3. the design of novel big carrying flexible hinge guiding mechanism of the invention is more compact, structure is simple, processing and manufacturing Cost is relatively low, applied widely.
4. each single axial movement platform assembly of novel multi-shaft Rigid-flexible Coupled Motion platform of the invention is all made of universal machine Processing method is fabricated, and does not use the particular components such as air bearing, magnetic suspension, and cost is relatively low, applied widely.
Detailed description of the invention
Fig. 1 is the overall schematic of embodiment one.
Fig. 2 is the integrally-built front cross sectional view of embodiment one.
Fig. 3 is the partial enlarged view in Fig. 2.
Fig. 4 is the partial cross sectional views of Coupled Rigid-flexible platform of the invention.
Fig. 5 is the partial enlarged view in Fig. 3.
Fig. 6 is flexible hinge chain group axonometric drawing of the invention.
Fig. 7 is flexible hinge group exploded view of the invention.
Fig. 8 is flexible hinge chain group view in full section of the invention.
Fig. 9 is the working principle diagram (stationary state) of Coupled Rigid-flexible platform of the invention.
Figure 10 is the working principle diagram (motion state) of Coupled Rigid-flexible platform of the invention.
Figure 11 is the overall schematic of embodiment two.
Figure 12 is the whole exploded view of embodiment two.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent;In order to better illustrate this embodiment, attached Scheme certain components to have omission, zoom in or out, does not represent the size of actual product;To those skilled in the art, The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing Illustrate, should not be understood as the limitation to this patent.
Embodiment one
As shown in Figure 1-3, a kind of multiaxis Rigid-flexible Coupled Motion platform, which includes: three Uniaxial Rigid-flexible Coupled Motion platform is the first uniaxial Rigid-flexible Coupled Motion platform of uniaxial Rigid-flexible Coupled Motion platform 1, second respectively 2 and third single shaft Rigid-flexible Coupled Motion platform 3, each single shaft Rigid-flexible Coupled Motion platform includes: linear guide 101, pedestal 102, nucleus movement platform 103, load-bearing rigidity enhancing flexible hinge chain group 104, motion platform rigid frame 105, linear guide are sliding Block 106, the first driver 107 (i.e. linear motor rotor), linear motor stator electric 108 (magnetic block).Wherein, nucleus movement platform 103, load-bearing rigidity enhancing flexible hinge chain group 104 and motion platform rigid frame 105 form Coupled Rigid-flexible platform;First driver 107 (i.e. linear motor rotors) and linear motor stator electric 108 (magnetic block) form linear actuator.The setting of linear guide 101 exists On pedestal 102.Straight-line guide rail slide block 106 is fixed on motion platform rigid frame 105, and can be slided in linear guide 101 It is dynamic.The first driver 107 in linear actuator is connect with nucleus movement platform 103, and nucleus movement platform 103 is driven to move, To drive entire Coupled Rigid-flexible platform to slide in linear guide 101.The pedestal of first uniaxial Rigid-flexible Coupled Motion platform 1 The nucleus movement platform of 102 one end and the second Rigid-flexible Coupled Motion platform 2 is rigidly connected by bolt, the first uniaxial hard and soft coupling The other end of the pedestal 102 of resultant motion platform 1 and the nucleus movement platform of third single shaft Rigid-flexible Coupled Motion platform 3 pass through bolt Rigid connection.Third single shaft Rigid-flexible Coupled Motion platform 3 is parallel to each other with the second Rigid-flexible Coupled Motion platform 2.Third list Axis Rigid-flexible Coupled Motion platform 3 and the second Rigid-flexible Coupled Motion platform 2 with the first uniaxial 1 phase of Rigid-flexible Coupled Motion platform It is mutually vertical.
In one embodiment, the precision movement platform further includes displacement sensor, institute's displacement sensors with it is described Nucleus movement platform 103 connects, for measuring the displacement of the nucleus movement platform 103 in the movement direction.
As shown in Figure 4,5, the Coupled Rigid-flexible platform includes: motion platform rigid frame 105, nucleus movement platform 103 Enhance flexible hinge chain group 104 with load-bearing rigidity, motion platform rigid frame 105 enhances flexible hinge chain group by the load-bearing rigidity 104 connect with heart motion platform 103.As shown in figs 6-8, the load-bearing rigidity enhancing flexible hinge chain group 104 includes: multi-disc spring Piece 1 and multiple groups gasket group 2, have one group between spring leaf described in adjacent two panels described in gasket set isolation.Multi-disc spring leaf 1 and more Group gasket group 2 can be fixed together with connection types such as fitted bolt, gluings.Load-bearing rigidity enhances flexible hinge chain group 104 Rigid assembly connection is carried out with the nucleus movement platform 103 and motion platform rigid frame 105.The load-bearing rigidity enhancing is soft Property hinge set 104 in the motion platform rigid frame 105 setting direction and the nucleus movement platform 103 in the movement The direction of motion in platform rigid frame is orthogonal, so load-bearing rigidity enhances the multiple groups spring leaf in 104 groups of flexible hinge chain group Working deformation direction is identical as the operative orientation of the nucleus movement platform 103.It is understood that the orthogonal setting in direction is One kind is preferable to provide, and those skilled in the art can take other set-up modes according to actual elastic deformation demand.Such as Fig. 4, shown in 5, the load-bearing rigidity enhancing flexible hinge chain group 104 is two groups, and load-bearing rigidity described in two groups enhances flexible hinge chain group 104 are arranged symmetrically in 103 both ends of nucleus movement platform.Certainly, those skilled in the art can also close according to actual needs Reason setting load-bearing rigidity enhances the group number of flexible hinge chain group 104, and is arranged symmetrically in 103 both ends of nucleus movement platform.Separately Outside, those skilled in the art can also use asymmetric arrangement according to actual needs.Load-bearing rigidity enhances flexible hinge chain group 104 The connection types such as matching thread, gluing and the nucleus movement platform 103 and the motion platform rigid frame 105 carry out rigidity Assembly connection.
As shown in Figures 9 and 10, load-bearing rigidity enhances flexible hinge chain group to the working principle of Rigid-flexible Coupled Motion platform of the present invention 104 carry out rigidity by the connection types such as screw thread, gluing and the nucleus movement platform 103 and motion platform rigid frame 105 Assembly connection.Fig. 8 is when the starting of motion platform, due between the straight-line guide rail slide block 106 and the linear guide 101 The presence of stiction, the motion platform rigid frame 105 have in friction " dead zone ", and the nucleus movement platform 103 is driving Under the action of power, drives load-bearing rigidity enhancing flexible hinge chain group 104 that flexible deformation occurs, realize the nucleus movement platform 103 Orientation displacement.As driving force continues to increase, until being greater than stiction, the motion platform rigid frame 105 can just be opened Begin to move.
The load-bearing rigidity enhances flexible hinge chain group using flexible hinge work rigidity and spring leaf thickness into cube relationship, Load-bearing rigidity characteristic directly proportional to spring leaf cross section, using the rigidity superposition of the thin spring leaf of N group long-fatigue life, effectively The bearing capacity of ground promotion high speed and precision motion platform.
Embodiment two
Embodiment two is as depicted in figs. 11-12 and a kind of multiaxis Rigid-flexible Coupled Motion platform, comprising: two single shafts are rigid Soft coupled motions platform: the first uniaxial Rigid-flexible Coupled Motion platform and the second uniaxial Rigid-flexible Coupled Motion platform.It is each uniaxial rigid The structure of soft coupled motions platform is identical as the uniaxial Rigid-flexible Coupled Motion platform in embodiment one, respectively include: the first core Motion platform B1, the first motion platform rigid frame B2, the first load-bearing rigidity enhance flexible hinge chain group B3, first straight line guide rail B4, first straight line guide rail slide block B5, the first pedestal B6, first straight line motor stator (magnetic block) B13, the enhancing of the second load-bearing rigidity Flexible hinge chain group B7, the second nucleus movement platform B8, the second motion platform rigid frame B9, the second pedestal B10, second straight line are led Rail slide block B 11, second straight line guide rail B12, second straight line motor stator (magnetic block) B14.
The middle part of first pedestal B6 of the first uniaxial Rigid-flexible Coupled Motion platform and the second uniaxial Rigid-flexible Coupled Motion platform The second nucleus movement platform B8 pass through bolt be rigidly connected.First uniaxial Rigid-flexible Coupled Motion platform and the second uniaxial hard and soft coupling Resultant motion platform is mutually perpendicular to, across.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, all should be considered as described in this specification.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention Protection scope within.

Claims (10)

1. a kind of multiaxis Rigid-flexible Coupled Motion platform, which is characterized in that the multiaxis Rigid-flexible Coupled Motion platform includes: three lists Axis Rigid-flexible Coupled Motion platform, described three uniaxial Rigid-flexible Coupled Motion platforms are that the first uniaxial Rigid-flexible Coupled Motion is flat respectively Platform, the second uniaxial Rigid-flexible Coupled Motion platform and third single shaft Rigid-flexible Coupled Motion platform;
Each uniaxial Rigid-flexible Coupled Motion platform includes: linear guide, pedestal, nucleus movement platform, load-bearing rigidity increasing Strong flexible hinge chain group, motion platform rigid frame, straight-line guide rail slide block, linear actuator;
Wherein, the nucleus movement platform, load-bearing rigidity enhancing flexible hinge chain group and motion platform rigid frame form hard and soft coupling Platform is closed, the motion platform rigid frame enhances flexible hinge chain group by the load-bearing rigidity and the nucleus movement platform connects It connects;
The linear guide is arranged on the pedestal;
The straight-line guide rail slide block is fixed on the motion platform rigid frame, and can be slided in the linear guide;
The linear actuator is connect with the nucleus movement platform, drives the nucleus movement platform to move, to drive whole A Coupled Rigid-flexible platform slides in linear guide;
One end of the pedestal of described first uniaxial Rigid-flexible Coupled Motion platform and the core of the second Rigid-flexible Coupled Motion platform Motion platform connection, the other end and the third single shaft Coupled Rigid-flexible of the pedestal of the described first uniaxial Rigid-flexible Coupled Motion platform The nucleus movement platform of motion platform connects.
2. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 1, which is characterized in that the third single shaft is hard and soft Coupled motions platform is parallel to each other with the second Rigid-flexible Coupled Motion platform, the third single shaft Rigid-flexible Coupled Motion platform and The second Rigid-flexible Coupled Motion platform is mutually perpendicular to a first uniaxial Rigid-flexible Coupled Motion platform.
3. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 1 or 2, which is characterized in that the load-bearing rigidity Enhancing flexible hinge chain group includes: multi-disc spring leaf, multiple groups gasket group;
Gasket set isolation described in having one group between spring leaf described in adjacent two panels.
4. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 1 or 2, which is characterized in that the load-bearing rigidity It is flat in the movement to enhance flexible hinge chain group setting direction and nucleus movement platform in the motion platform rigid frame The direction of motion in platform rigid frame is orthogonal.
5. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 1 or 2, which is characterized in that the load-bearing rigidity Enhancing flexible hinge chain group is two groups, and flexible hinge chain group described in two groups is arranged symmetrically in nucleus movement platform both ends.
6. a kind of multiaxis Rigid-flexible Coupled Motion platform, which is characterized in that the multiaxis Rigid-flexible Coupled Motion platform includes: two Uniaxial Rigid-flexible Coupled Motion platform, described three uniaxial Rigid-flexible Coupled Motion platforms are that the first uniaxial Rigid-flexible Coupled Motion is flat respectively Platform and the second uniaxial Rigid-flexible Coupled Motion platform;
Each uniaxial Rigid-flexible Coupled Motion platform includes: linear guide, pedestal, nucleus movement platform, load-bearing rigidity increasing Strong flexible hinge chain group, motion platform rigid frame, straight-line guide rail slide block, linear actuator;
Wherein, the nucleus movement platform, load-bearing rigidity enhancing flexible hinge chain group and motion platform rigid frame form hard and soft coupling Platform is closed, the motion platform rigid frame enhances flexible hinge chain group by the load-bearing rigidity and the nucleus movement platform connects It connects;
The linear guide is arranged on the pedestal;
The straight-line guide rail slide block is fixed on the motion platform rigid frame, and can be slided in the linear guide;
The linear actuator is connect with the nucleus movement platform, drives the nucleus movement platform to move, to drive whole A Coupled Rigid-flexible platform slides in linear guide;
The middle part of the pedestal of described first uniaxial Rigid-flexible Coupled Motion platform and the core of the second Rigid-flexible Coupled Motion platform Motion platform connection.
7. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 6, which is characterized in that described first is uniaxial hard and soft Coupled motions platform is mutually perpendicular to the described second uniaxial Rigid-flexible Coupled Motion platform.
8. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 6 or 7, which is characterized in that the load-bearing rigidity Enhancing flexible hinge chain group includes: multi-disc spring leaf, multiple groups gasket group;
Gasket set isolation described in having one group between spring leaf described in adjacent two panels.
9. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 6 or 7, which is characterized in that the load-bearing rigidity It is flat in the movement to enhance flexible hinge chain group setting direction and nucleus movement platform in the motion platform rigid frame The direction of motion in platform rigid frame is orthogonal.
10. a kind of multiaxis Rigid-flexible Coupled Motion platform according to claim 6 or 7, which is characterized in that the load-bearing rigidity Enhancing flexible hinge chain group is two groups, and flexible hinge chain group described in two groups is arranged symmetrically in nucleus movement platform both ends.
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CN111075831A (en) * 2019-12-12 2020-04-28 广东工业大学 Integrated multi-degree-of-freedom rigid-flexible coupling motion platform driven by ball screw
CN111085970A (en) * 2019-12-12 2020-05-01 广东工业大学 Rigidity-flexibility coupling platform driven by ball screw and used for adjusting rigidity externally
CN111102442A (en) * 2019-12-12 2020-05-05 广东工业大学 Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same
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CN111085970A (en) * 2019-12-12 2020-05-01 广东工业大学 Rigidity-flexibility coupling platform driven by ball screw and used for adjusting rigidity externally
CN111102442A (en) * 2019-12-12 2020-05-05 广东工业大学 Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same
CN111251260A (en) * 2019-12-12 2020-06-09 广东工业大学 Easy-maintenance rigid-flexible coupling platform structure and multi-degree-of-freedom motion platform formed by same
CN113059537A (en) * 2021-02-26 2021-07-02 佛山市华道超精科技有限公司 Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench
CN113059537B (en) * 2021-02-26 2022-07-15 佛山市华道超精科技有限公司 Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench

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