CN110281033B - Multi-axis rigid-flexible coupling motion platform - Google Patents
Multi-axis rigid-flexible coupling motion platform Download PDFInfo
- Publication number
- CN110281033B CN110281033B CN201910452440.3A CN201910452440A CN110281033B CN 110281033 B CN110281033 B CN 110281033B CN 201910452440 A CN201910452440 A CN 201910452440A CN 110281033 B CN110281033 B CN 110281033B
- Authority
- CN
- China
- Prior art keywords
- motion platform
- rigid
- flexible
- flexible coupling
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
The invention relates to a multi-axis rigid-flexible coupling motion platform, which comprises: three unipolar rigid-flexible coupling motion platform, every the unipolar rigid-flexible coupling motion platform all includes: the device comprises a linear guide rail, a base, a core motion platform, a bearing rigidity enhanced flexible hinge group, a motion platform rigid frame, a linear guide rail sliding block and a linear driver; the one end of first unipolar rigid-flexible coupling motion platform's base with the core motion platform of the rigid-flexible coupling motion platform of second connects, the other end of first unipolar rigid-flexible coupling motion platform's base with the core motion platform of the rigid-flexible coupling motion platform of third unipolar connects. The multi-axis rigid-flexible coupling motion platform is large in working area and strong in bearing capacity, and various large-stroke high-precision multi-axis motion platforms with required axes can be flexibly constructed according to specific requirements.
Description
Technical Field
The invention relates to the technical field of high-precision motion, in particular to a multi-axis rigid-flexible coupling motion platform.
Background
The flexible hinge has the characteristics of no friction, no lubrication and the like, and is widely applied to the design of a precision motion platform. In precision motion platforms, the flexible hinges are primarily designed as guide mechanisms. In a precise motion platform, when the motion platform is started and stopped and micro-displacement is fed, the flexible hinge is used as a friction-free motion pair, and the flexible hinge mainly realizes motion through self elastic deformation. The working principle of the flexible hinge leads the motion platform based on the typical flexible hinge guide mechanism to be mainly suitable for light load occasions, and limits the application of the motion platform in heavy load occasions. In addition, the flexible hinge is repeatedly deformed for a long time in the movement process, so that cracks and even breakage of the guide mechanism are easily caused. How to improve the bearing rigidity and fatigue life of the flexible hinge guide mechanism becomes a key problem for expanding the application range of the typical guide mechanism.
Disclosure of Invention
In order to overcome at least one defect in the prior art, the invention provides a multi-axis rigid-flexible coupling motion platform.
A multi-axis rigid-flexible coupled motion platform, comprising: the three single-shaft rigid-flexible coupling motion platforms are respectively a first single-shaft rigid-flexible coupling motion platform, a second single-shaft rigid-flexible coupling motion platform and a third single-shaft rigid-flexible coupling motion platform; each one unipolar rigid-flexible coupling motion platform all includes: the device comprises a linear guide rail, a base, a core motion platform, a bearing rigidity enhanced flexible hinge group, a motion platform rigid frame, a linear guide rail sliding block and a linear driver; the core motion platform, the bearing rigidity enhanced flexible hinge group and the motion platform rigid frame form a rigid-flexible coupling platform, and the motion platform rigid frame is connected with the core motion platform through the bearing rigidity enhanced flexible hinge group; the linear guide rail is arranged on the base; the linear guide rail sliding block is fixed on the rigid frame of the moving platform and can slide on the linear guide rail; the linear driver is connected with the core motion platform and drives the core motion platform to move, so that the whole rigid-flexible coupling platform is driven to slide on the linear guide rail; the one end of first unipolar rigid-flexible coupling motion platform's base with the core motion platform of the rigid-flexible coupling motion platform of second connects, the other end of first unipolar rigid-flexible coupling motion platform's base with the core motion platform of the rigid-flexible coupling motion platform of third unipolar connects.
Further, the rigid-flexible coupling motion platform of third unipolar with the rigid-flexible coupling motion platform of second is parallel to each other, the rigid-flexible coupling motion platform of third unipolar with the rigid-flexible coupling motion platform of second all with the rigid-flexible coupling motion platform mutually perpendicular of first unipolar.
Further, the load-bearing stiffness-enhanced flexible hinge set includes: a plurality of spring pieces and a plurality of gasket sets; and a group of gasket groups are arranged between every two adjacent spring pieces for separation.
Further, the bearing rigidity enhanced flexible hinge group is arranged in the moving platform rigid frame in a direction orthogonal to the moving direction of the core moving platform in the moving platform rigid frame.
Furthermore, the bearing rigidity enhanced flexible hinge groups are two groups, and the two groups of flexible hinge groups are symmetrically arranged at two ends of the core motion platform.
A multi-axis rigid-flexible coupled motion platform, comprising: the three single-shaft rigid-flexible coupling motion platforms are respectively a first single-shaft rigid-flexible coupling motion platform and a second single-shaft rigid-flexible coupling motion platform; each one unipolar rigid-flexible coupling motion platform all includes: the device comprises a linear guide rail, a base, a core motion platform, a bearing rigidity enhanced flexible hinge group, a motion platform rigid frame, a linear guide rail sliding block and a linear driver; the core motion platform, the bearing rigidity enhanced flexible hinge group and the motion platform rigid frame form a rigid-flexible coupling platform, and the motion platform rigid frame is connected with the core motion platform through the bearing rigidity enhanced flexible hinge group; the linear guide rail is arranged on the base; the linear guide rail sliding block is fixed on the rigid frame of the moving platform and can slide on the linear guide rail; the linear driver is connected with the core motion platform and drives the core motion platform to move, so that the whole rigid-flexible coupling platform is driven to slide on the linear guide rail; the middle part of the base of the first single-shaft rigid-flexible coupling motion platform is connected with the core motion platform of the second rigid-flexible coupling motion platform.
Further, first unipolar rigid-flexible coupling motion platform with the rigid-flexible coupling motion platform mutually perpendicular of second unipolar.
Further, the load-bearing stiffness-enhanced flexible hinge set includes: a plurality of spring pieces and a plurality of gasket sets; and a group of gasket groups are arranged between every two adjacent spring pieces for separation.
Further, the bearing rigidity enhanced flexible hinge group is arranged in the moving platform rigid frame in a direction orthogonal to the moving direction of the core moving platform in the moving platform rigid frame.
Furthermore, the bearing rigidity enhanced flexible hinge groups are two groups, and the two groups of flexible hinge groups are symmetrically arranged at two ends of the core motion platform.
Compared with the prior art, the beneficial effects are:
1. the novel multi-axis rigid-flexible coupling motion platform has large working area and strong bearing capacity, and can flexibly construct various large-stroke high-precision multi-axis motion platforms with required number of axes according to specific requirements.
2. The bearing rigidity enhanced flexible hinge group is separately processed and detachable, consists of N groups of long fatigue life spring pieces, greatly improves the capability of bearing large load of the guide mechanism, and is suitable for the design of motion platforms with different structural sizes.
3. The novel large-bearing flexible hinge guide mechanism is compact in design, simple in structure, low in processing and manufacturing cost and wide in application range.
4. Each single-shaft motion platform assembly of the novel multi-shaft rigid-flexible coupling motion platform is machined and manufactured in a universal machining mode, special parts such as air floatation and magnetic suspension are not adopted, the cost is low, and the application range is wide.
Drawings
Fig. 1 is an overall schematic view of the first embodiment.
Fig. 2 is a front sectional view of the overall structure of the first embodiment.
Fig. 3 is a partially enlarged view of fig. 2.
Fig. 4 is a partial cutaway view of a rigid-flexible coupling platform of the present invention.
Fig. 5 is a partially enlarged view of fig. 3.
Figure 6 is an isometric view of the flexible hinge assembly of the present invention.
FIG. 7 is an exploded view of the flexible hinge assembly of the present invention.
FIG. 8 is a full sectional view of the flexible hinge assembly of the present invention.
Fig. 9 is a working schematic diagram (at rest) of the rigid-flexible coupling platform of the present invention.
Fig. 10 is an operation principle diagram (motion state) of the rigid-flexible coupling platform of the present invention.
Fig. 11 is an overall schematic view of the second embodiment.
Fig. 12 is an overall exploded view of the second embodiment.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the present patent.
Example one
As shown in fig. 1 to 3, a multi-axis rigid-flexible coupling motion platform includes: three unipolar rigid-flexible coupling motion platform is first unipolar rigid-flexible coupling motion platform 1, the rigid-flexible coupling motion platform 2 of second unipolar and the rigid-flexible coupling motion platform 3 of third unipolar respectively, and every unipolar rigid-flexible coupling motion platform all includes: the linear guide rail comprises a linear guide rail 101, a base 102, a core motion platform 103, a bearing rigidity enhanced flexible hinge group 104, a motion platform rigid frame 105, a linear guide rail sliding block 106, a first driver 107 (namely a linear motor rotor) and a linear motor stator 108 (a magnetic block). Wherein, the core motion platform 103, the bearing rigidity enhanced flexible hinge group 104 and the motion platform rigid frame 105 form a rigid-flexible coupling platform; the first driver 107 (i.e. linear motor mover) and the linear motor stator 108 (magnetic block) constitute a linear driver. The linear guide 101 is provided on a base 102. The linear guide slider 106 is fixed to the moving platform rigid frame 105 and can slide on the linear guide 101. The first driver 107 of the linear driver is connected with the core motion platform 103 to drive the core motion platform 103 to move, so as to drive the whole rigid-flexible coupling platform to slide on the linear guide rail 101. The one end of the base 102 of the first single-shaft rigid-flexible coupling motion platform 1 and the core motion platform of the second rigid-flexible coupling motion platform 2 are in rigid connection through bolts, and the other end of the base 102 of the first single-shaft rigid-flexible coupling motion platform 1 and the core motion platform of the third single-shaft rigid-flexible coupling motion platform 3 are in rigid connection through bolts. And the third single-shaft rigid-flexible coupling motion platform 3 is parallel to the second rigid-flexible coupling motion platform 2. The rigid-flexible coupling motion platform of third unipolar 3 with the rigid-flexible coupling motion platform of second 2 all with 1 mutually perpendicular of the rigid-flexible coupling motion platform of first unipolar.
In one embodiment, the precision motion platform further comprises a displacement sensor connected to the core motion platform 103 for measuring a displacement of the core motion platform 103 in a motion direction.
As shown in fig. 4 and 5, the rigid-flexible coupling platform includes: a moving platform rigid frame 105, a core moving platform 103 and a bearing rigidity enhanced flexible hinge group 104, wherein the moving platform rigid frame 105 is connected with the core moving platform 103 through the bearing rigidity enhanced flexible hinge group 104. As shown in fig. 6-8, the load bearing stiffness enhanced flexible hinge set 104 includes: the spring piece comprises a plurality of spring pieces 1 and a plurality of groups of gasket groups 2, wherein a group of gasket groups is arranged between every two adjacent spring pieces for separation. The plurality of spring pieces 1 and the plurality of groups of gasket groups 2 can be fixedly connected together by matching with connection modes such as bolts, gluing and the like. The bearing rigidity enhanced flexible hinge group 104 is in rigid assembly connection with the core motion platform 103 and the motion platform rigid frame 105. The direction of the bearing rigidity enhanced flexible hinge group 104 arranged in the moving platform rigid frame 105 is orthogonal to the moving direction of the core moving platform 103 in the moving platform rigid frame, so the working deformation direction of a plurality of groups of spring pieces in the bearing rigidity enhanced flexible hinge group 104 is the same as the working direction of the core moving platform 103. It is understood that the orthogonal arrangement is only one preferred arrangement, and those skilled in the art can adopt other arrangements according to the actual elastic deformation requirement. As shown in fig. 4 and 5, the load-bearing rigidity-enhanced flexible hinge sets 104 are two sets, and the two sets of load-bearing rigidity-enhanced flexible hinge sets 104 are symmetrically arranged at two ends of the core motion platform 103. Of course, those skilled in the art can also set the number of the groups of the load-bearing rigidity-enhanced flexible hinge groups 104 reasonably according to actual needs, and the groups are symmetrically arranged at two ends of the core motion platform 103. In addition, the person skilled in the art can also adopt an asymmetrical arrangement according to the actual needs. The bearing rigidity enhanced flexible hinge group 104 is in rigid assembly connection with the core motion platform 103 and the motion platform rigid frame 105 in a connection mode of matching threads, gluing and the like.
The working principle of the rigid-flexible coupling motion platform is shown in fig. 9 and 10, and the bearing rigidity enhanced flexible hinge group 104 is in rigid assembly connection with the core motion platform 103 and the motion platform rigid frame 105 through connection modes such as threads, gluing and the like. Fig. 8 shows that when the moving platform is started, due to the existence of static friction between the linear guide rail sliding block 106 and the linear guide rail 101, the moving platform rigid frame 105 has a friction "dead zone", and the core moving platform 103 drives the bearing rigidity-enhanced flexible hinge group 104 to elastically deform under the action of a driving force, so as to realize directional displacement of the core moving platform 103. As the driving force continues to increase until it exceeds the static friction force, the motion platform rigid frame 105 cannot begin to move.
The bearing rigidity enhanced flexible hinge group effectively improves the bearing capacity of a high-speed precision motion platform by utilizing the characteristic that the working rigidity of the flexible hinge is in a cubic relation with the thickness of the spring piece and the bearing rigidity is in direct proportion to the cross section of the spring piece and by adopting the rigidity superposition effect of N groups of thin spring pieces with long fatigue life.
Example two
Second embodiment as shown in fig. 11 to 12, is also a multi-axis rigid-flexible coupled motion platform, including: two single-shaft rigid-flexible coupling motion platforms: first unipolar rigid-flexible coupling motion platform and the rigid-flexible coupling motion platform of second unipolar. The structure of every unipolar rigid-flexible coupling motion platform is the same with the unipolar rigid-flexible coupling motion platform in embodiment one, includes respectively: the first core motion platform B1, the first motion platform rigid frame B2, the first bearing rigidity enhanced flexible hinge group B3, the first linear guide rail B4, the first linear guide rail slider B5, the first base B6, the first linear motor stator (magnetic block) B13, the second bearing rigidity enhanced flexible hinge group B7, the second core motion platform B8, the second motion platform rigid frame B9, the second base B10, the second linear guide rail slider B11, the second linear guide rail B12 and the second linear motor stator (magnetic block) B14.
The middle part of the first base B6 of the first single-shaft rigid-flexible coupling motion platform is rigidly connected with the second core motion platform B8 of the second single-shaft rigid-flexible coupling motion platform through bolts. First unipolar rigid-flexible coupling motion platform and the rigid-flexible coupling motion platform mutually perpendicular of second unipolar become the cross.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (8)
1. A multi-axis rigid-flexible coupled motion platform, comprising: the three single-shaft rigid-flexible coupling motion platforms are respectively a first single-shaft rigid-flexible coupling motion platform, a second single-shaft rigid-flexible coupling motion platform and a third single-shaft rigid-flexible coupling motion platform;
each one unipolar rigid-flexible coupling motion platform all includes: the device comprises a linear guide rail, a base, a core motion platform, a bearing rigidity enhanced flexible hinge group, a motion platform rigid frame, a linear guide rail sliding block and a linear driver;
the core motion platform, the bearing rigidity enhanced flexible hinge group and the motion platform rigid frame form a rigid-flexible coupling platform, and the motion platform rigid frame is connected with the core motion platform through the bearing rigidity enhanced flexible hinge group;
the linear guide rail is arranged on the base;
the linear guide rail sliding block is fixed on the rigid frame of the moving platform and can slide on the linear guide rail;
the linear driver is connected with the core motion platform and drives the core motion platform to move, so that the whole rigid-flexible coupling platform is driven to slide on the linear guide rail;
one end of a base of the first single-shaft rigid-flexible coupling motion platform is connected with a core motion platform of the second single-shaft rigid-flexible coupling motion platform, and the other end of the base of the first single-shaft rigid-flexible coupling motion platform is connected with a core motion platform of the third single-shaft rigid-flexible coupling motion platform;
the load bearing stiffness enhanced flexible hinge set comprises: a plurality of spring pieces and a plurality of gasket sets;
one group of gasket groups comprises a plurality of gaskets connected in parallel;
a group of gasket groups is arranged between every two adjacent spring pieces for separation;
wherein, the length of the plurality of spring pieces is equal, and the ends are aligned.
2. The multi-axis rigid-flexible coupled motion platform of claim 1, wherein the third single-axis rigid-flexible coupled motion platform and the second single-axis rigid-flexible coupled motion platform are parallel to each other, and the third single-axis rigid-flexible coupled motion platform and the second single-axis rigid-flexible coupled motion platform are perpendicular to the first single-axis rigid-flexible coupled motion platform.
3. A multi-axis rigid-flexible coupled motion platform according to claim 1 or 2, wherein the load-bearing stiffness-enhancing flexible hinge set is disposed in the motion platform rigid frame in a direction orthogonal to the direction of motion of the core motion platform in the motion platform rigid frame.
4. A multi-axis rigid-flexible coupled motion platform according to claim 1 or 2, wherein the load-bearing rigid-enhancing flexible hinge sets are two sets, and the two sets of flexible hinge sets are symmetrically arranged at two ends of the core motion platform.
5. A multi-axis rigid-flexible coupled motion platform, comprising: the two single-shaft rigid-flexible coupling motion platforms are respectively a first single-shaft rigid-flexible coupling motion platform and a second single-shaft rigid-flexible coupling motion platform;
each one unipolar rigid-flexible coupling motion platform all includes: the device comprises a linear guide rail, a base, a core motion platform, a bearing rigidity enhanced flexible hinge group, a motion platform rigid frame, a linear guide rail sliding block and a linear driver;
the core motion platform, the bearing rigidity enhanced flexible hinge group and the motion platform rigid frame form a rigid-flexible coupling platform, and the motion platform rigid frame is connected with the core motion platform through the bearing rigidity enhanced flexible hinge group;
the linear guide rail is arranged on the base;
the linear guide rail sliding block is fixed on the rigid frame of the moving platform and can slide on the linear guide rail;
the linear driver is connected with the core motion platform and drives the core motion platform to move, so that the whole rigid-flexible coupling platform is driven to slide on the linear guide rail;
the middle part of the base of the first single-shaft rigid-flexible coupling motion platform is connected with the core motion platform of the second single-shaft rigid-flexible coupling motion platform;
the load bearing stiffness enhanced flexible hinge set comprises: a plurality of spring pieces and a plurality of gasket sets;
a group of gasket groups is arranged between every two adjacent spring pieces for separation;
wherein, the length of the plurality of spring pieces is equal, and the ends are aligned.
6. A multi-axis rigid-flexible coupled motion platform according to claim 5, wherein the first single-axis rigid-flexible coupled motion platform and the second single-axis rigid-flexible coupled motion platform are orthogonal to each other.
7. A multi-axis rigid-flexible coupled motion platform according to claim 5 or 6, wherein the load bearing rigid-enhanced flexible hinge sets are arranged in the motion platform rigid frame in a direction orthogonal to the direction of motion of the core motion platform in the motion platform rigid frame.
8. A multi-axis rigid-flexible coupled motion platform according to claim 5 or 6, wherein the load-bearing rigid-enhancing flexible hinge sets are two sets, and the two sets of flexible hinge sets are symmetrically arranged at two ends of the core motion platform.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910452440.3A CN110281033B (en) | 2019-05-28 | 2019-05-28 | Multi-axis rigid-flexible coupling motion platform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910452440.3A CN110281033B (en) | 2019-05-28 | 2019-05-28 | Multi-axis rigid-flexible coupling motion platform |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110281033A CN110281033A (en) | 2019-09-27 |
CN110281033B true CN110281033B (en) | 2022-02-25 |
Family
ID=68002665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910452440.3A Active CN110281033B (en) | 2019-05-28 | 2019-05-28 | Multi-axis rigid-flexible coupling motion platform |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110281033B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111102442B (en) * | 2019-12-12 | 2021-12-10 | 广东工业大学 | Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same |
CN111251260B (en) * | 2019-12-12 | 2023-05-16 | 广东工业大学 | Easily-maintained rigid-flexible coupling platform structure and multi-degree-of-freedom motion platform formed by same |
CN111085970B (en) * | 2019-12-12 | 2023-06-16 | 广东工业大学 | Rigid-flexible coupling platform driven by ball screw and capable of externally adjusting rigidity |
CN111075831B (en) * | 2019-12-12 | 2022-10-04 | 广东工业大学 | Ball screw driven integrated multi-degree-of-freedom rigid-flexible coupling motion platform |
CN113059537B (en) * | 2021-02-26 | 2022-07-15 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004230521A (en) * | 2003-01-31 | 2004-08-19 | Topcon Corp | Minute displacement supporting device |
CN101424879A (en) * | 2008-12-12 | 2009-05-06 | 厦门大学 | Resistance straining reaction type closed-loop two-dimension flexible hinge work bench |
CN101858477A (en) * | 2010-04-20 | 2010-10-13 | 郑福胜 | Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform |
CN102490021A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Macro/micro two-dimensional displacement platform |
CN204248537U (en) * | 2014-11-26 | 2015-04-08 | 广东工业大学 | Isomery motor is the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether |
CN108015561A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of motion platform for expanding single driving Coupled Rigid-flexible work area |
CN108747426A (en) * | 2018-07-16 | 2018-11-06 | 广东工业大学 | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether |
CN208593262U (en) * | 2018-08-03 | 2019-03-12 | 四川航天职业技术学院 | Light bus steel plate spring assembly |
CN109676403A (en) * | 2019-02-01 | 2019-04-26 | 广东工业大学 | A kind of macro micro- composite motion platform of large travel high-speed high-precision |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1492788A (en) * | 1965-07-20 | 1967-08-25 | Soudure Elec Languepin | Mechanical erosion machining method and device |
CN207474079U (en) * | 2017-09-26 | 2018-06-08 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
CN108962336B (en) * | 2018-05-22 | 2021-01-05 | 郑州轻工业学院 | Two-dimensional parallel flexible micro-motion platform based on piezoelectric drive |
-
2019
- 2019-05-28 CN CN201910452440.3A patent/CN110281033B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004230521A (en) * | 2003-01-31 | 2004-08-19 | Topcon Corp | Minute displacement supporting device |
CN101424879A (en) * | 2008-12-12 | 2009-05-06 | 厦门大学 | Resistance straining reaction type closed-loop two-dimension flexible hinge work bench |
CN101858477A (en) * | 2010-04-20 | 2010-10-13 | 郑福胜 | Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform |
CN102490021A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Macro/micro two-dimensional displacement platform |
CN204248537U (en) * | 2014-11-26 | 2015-04-08 | 广东工业大学 | Isomery motor is the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether |
CN108015561A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of motion platform for expanding single driving Coupled Rigid-flexible work area |
CN108747426A (en) * | 2018-07-16 | 2018-11-06 | 广东工业大学 | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether |
CN208593262U (en) * | 2018-08-03 | 2019-03-12 | 四川航天职业技术学院 | Light bus steel plate spring assembly |
CN109676403A (en) * | 2019-02-01 | 2019-04-26 | 广东工业大学 | A kind of macro micro- composite motion platform of large travel high-speed high-precision |
Also Published As
Publication number | Publication date |
---|---|
CN110281033A (en) | 2019-09-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110281033B (en) | Multi-axis rigid-flexible coupling motion platform | |
US10564553B2 (en) | Large load-bearing guide mechanism and multi-DOF large-stroke high-precision motion platform system | |
CN110281034B (en) | Rigid-flexible coupling platform with enhanced flexible hinge group and motion platform | |
CN108015561B (en) | Motion platform capable of enlarging single-drive rigid-flexible coupling working area | |
CN107627292B (en) | Multi-degree-of-freedom large-stroke high-precision motion platform | |
CN100548591C (en) | A kind of two translationa movement and jogging platform with redundancy branched chain | |
CN111075831B (en) | Ball screw driven integrated multi-degree-of-freedom rigid-flexible coupling motion platform | |
CN107705822B (en) | Large-bearing flexible hinge guide mechanism | |
CN103225728A (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
CN108747426B (en) | Co-stator large-stroke trans-scale three-degree-of-freedom parallel motion platform | |
CN113464780B (en) | Spatial three-translation-degree-of-freedom flexible positioning platform | |
CN111102442B (en) | Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same | |
US6150740A (en) | Linear motion carriage system and method with bearings preloaded by inclined linear motor with high attractive force | |
US20150122058A1 (en) | Macro-micro actuated distended guide rail precision rotation apparatus | |
CN106272354A (en) | A kind of plane two one-movement-freedom-degree compliant parallel mechanism of large stroke and high precision | |
CN106272353A (en) | A kind of planar three freedom meek parallel institution of large stroke and high precision | |
US10704598B1 (en) | Hydrostatic linear guideway | |
CN101871549B (en) | Three-degree-of-freedom precision-positioning workbench | |
CN100355536C (en) | 3-PPTTRS six freedom degree parallel precise jiggle robot | |
CN113246100A (en) | Novel 3-PSS three-dimensional translational flexible parallel micro-motion platform | |
CN109872767B (en) | Multi-source driven flexible parallel micromanipulator | |
CN101417423A (en) | 3-2-1 structure three-dimensional mobile industrial robot | |
US20090056158A1 (en) | Positive Load Alignment Mechanism | |
CN207968350U (en) | A kind of double-driving foot type linear piezoelectric motor | |
CN207968349U (en) | A kind of double-driving foot type linear piezoelectric motor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |