CN107705822B - Large-bearing flexible hinge guide mechanism - Google Patents
Large-bearing flexible hinge guide mechanism Download PDFInfo
- Publication number
- CN107705822B CN107705822B CN201710883865.0A CN201710883865A CN107705822B CN 107705822 B CN107705822 B CN 107705822B CN 201710883865 A CN201710883865 A CN 201710883865A CN 107705822 B CN107705822 B CN 107705822B
- Authority
- CN
- China
- Prior art keywords
- flexible hinge
- group
- guide mechanism
- platform
- rigid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B3/00—Details of movements not otherwise provided for
Landscapes
- Machine Tool Units (AREA)
- Electric Cable Arrangement Between Relatively Moving Parts (AREA)
Abstract
The invention discloses a large-bearing flexible hinge guide mechanism, which comprises: the flexible hinge assembly comprises a core motion platform (3), a rigid support platform (1), a main flexible hinge assembly (2) and a secondary flexible hinge assembly (401) which are respectively arranged in different directions. Through the cooperation of the main flexible hinge group (2) and the secondary flexible hinge group (401), the technical problem that the core motion platform cannot realize expected positioning accuracy when the core motion platform is subjected to overlarge moment of action of a driver is effectively solved.
Description
Technical Field
The invention relates to the technical field of precision motion platforms, in particular to a large-bearing flexible hinge guide mechanism.
Background
The flexible hinge has the characteristics of no friction, no lubrication and the like, and is widely applied to the design of a precision motion platform. In precision motion platform design, flexible hinges are mainly used for guide mechanism design.
Fig. 1 illustrates a typical flexible hinge guide mechanism of the prior art. As shown in fig. 1, the core motion platform 3 is connected to the rigid support platform 1 by a flexible hinge array 2. The flexible hinge array 2 shown in fig. 1 employs a straight beam type flexible hinge, and particularly, the flexible hinge array 2 may also be a flexible hinge array 2a formed by a notch type flexible hinge shown in fig. 2.
The working principle of the flexible hinge guide shown in fig. 1 is shown in fig. 3. The rigid support platform 1 is fixed on the base or the primary motion platform, and the core motion platform 3 is rigidly connected with the driver. The flexible hinge array 2 deforms as shown in fig. 3 (II) under the action of the driver, and the core motion platform 3 deforms according to the rigidity characteristic rule of the flexible hinge array 2 to generate specified displacement.
The conventional flexible hinge guide mechanism shown in fig. 1 or 2 has the following problems: when the moment applied by the driver to the core motion platform 3 is too large, the flexible hinge array 2 may generate a non-working direction deformation as shown in fig. 4 (I), so that the core motion platform 3 generates a deflection displacement as shown in fig. 4 (I), and the core motion platform 3 cannot achieve a desired positioning accuracy; when the external load borne by the core motion platform 3 is large, the flexible hinge array 2 may generate a non-working direction deformation as shown in fig. 4 (II), which also results in that the core motion platform 3 cannot achieve the desired positioning accuracy.
The method for enhancing the rigidity of the flexible hinge guide mechanism by adopting a general air floatation or magnetic suspension support mode can better improve the capability of the flexible hinge guide mechanism for resisting the deformation in the non-working direction, but the method has the main defects of higher manufacturing and using cost and limitation of the application range.
Patent cn201610508540.x proposes to use low friction linear bearings and local magnetic supports to enhance the ability of the flexible hinge guide to resist deformation in the non-working direction. The main disadvantages of the above-mentioned method are: (1) The bearing rigidity and the capability of resisting deformation in the non-working direction can be only slightly enhanced, and the rigidity enhancing effect is limited; (2) The need to use certain standard components increases manufacturing costs and limits the freedom of structural design.
Disclosure of Invention
The invention provides a large-bearing flexible hinge guide mechanism, which aims to solve the technical problem that when a moment of a core motion platform is too large under the action of a driver, a flexible hinge array generates non-working direction deformation, so that the core motion platform generates deflection displacement, and the core motion platform cannot realize expected positioning precision.
The technical scheme adopted by the invention is as follows: a high load bearing flexible hinge guide mechanism comprising: the device comprises a core motion platform (3), a main flexible hinge group (2), a rigid support platform (1) and a secondary flexible hinge group (401);
the core motion platform (3) is connected with the rigid support platform (1) through a main flexible hinge group (2) and a secondary flexible hinge group (401) respectively;
the main flexible hinge group (2) is arranged on the side of the core motion platform (3) in the motion direction;
the secondary flexible hinge group (401) is arranged in the movement direction of the core movement platform (3);
the layout directions of the flexible hinges of the main flexible hinge group (2) and the secondary flexible hinge group (401) are mutually perpendicular in a direction plane of the movement direction of the core movement platform (3), and the main flexible hinge group and the secondary flexible hinge group are symmetrically arranged relative to the core movement platform (3).
Preferably, the core motion platform (3) is connected to the secondary flexible hinge set (401) by a rigid connection (402).
Preferably, the flexible hinges in the primary flexible hinge group (2) and the secondary flexible hinge group (401) and the rigid support platform (1) are integrally machined and manufactured.
Preferably, the guide mechanism further comprises a rigid block (403), wherein the rigid block (403) is embedded in the rigid support platform (1) and is rigidly connected with the rigid support platform (1) so as to increase the rigidity of a weak part generated by the rigid support platform (3) due to the processing of the secondary flexible hinge group (401).
Preferably, the rigid block (403) is rigidly connected to the rigid support platform (1) by a set of bolts a (404).
Preferably, the secondary flexible hinge group comprises a leaf spring (401 a), said leaf spring (401 a) being rigidly connected to the rigid support platform (1).
Preferably, the spring plate (401 a) is rigidly connected to the rigid support platform (1) by a set of bolts B (405).
Preferably, the secondary flexible hinge group further comprises a connecting block B (408), and the core motion platform (3) is rigidly connected with the spring plate (401 a) through the connecting block B (408).
Preferably, the secondary flexible hinge group further comprises a connecting block A (407), the spring pieces (401 a) are multiple pieces, and the middle parts of the multiple pieces of spring pieces (401 a) are rigidly connected through the connecting block A (407).
Preferably, the spring pieces (401 a), the connecting blocks B (408) and the connecting blocks A (407) are rigidly connected through bolt groups C (406).
Compared with the prior art, the invention has the beneficial effects that:
1. a group of secondary flexible hinge groups vertical to the arrangement direction of the flexible hinge arrays in the main flexible hinge group are arranged in the bearing rigidity reinforcing structure, and the flexible hinge arrays in the secondary flexible hinge groups are utilized to increase the capacity of bearing large load and resisting deformation in the non-working direction of the guide mechanism;
2. the bearing rigidity increasing structure is flexible in processing form and is suitable for the design of motion platforms with different structure sizes;
3. the provided large-bearing flexible hinge guide mechanism is low in processing and manufacturing cost and wide in application range.
Drawings
Fig. 1 is a schematic diagram of a guide mechanism of a straight beam type flexible hinge in the prior art.
Fig. 2 is a schematic view of a prior art notch-type flexible hinge guide mechanism.
Fig. 3 is a schematic view of the operation principle of the flexible hinge in the prior art.
Fig. 4 is a schematic diagram of a problem with a prior art flexible hinge guide mechanism.
Fig. 5 is a schematic view of the flexible hinge guide mechanism including the rigidity enhancing structure of embodiment 1.
Fig. 6 is a sectional axial view and a partially enlarged view of the guide mechanism of embodiment 1.
Fig. 7 is a front sectional view and a partially enlarged view of embodiment 1.
Fig. 8 is a sectional view of an assembly shaft of a guide mechanism of embodiment 1.
Fig. 9 is a front sectional view and a partially enlarged view of an assembly of a guide mechanism in example 1.
FIG. 10 is a schematic view of the entire embodiment 2.
Fig. 11 is a sectional view of an assembly shaft side of a guide mechanism of embodiment 2 and a partially enlarged view.
Fig. 12 is a front sectional view and a partially enlarged view of a guide mechanism assembly according to embodiment 2.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent; for the purpose of better illustrating the present embodiments, certain elements of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and should not be construed as limiting the present patent.
Example 1.
One embodiment 1 of the high load flexible hinge guide mechanism of the present invention is shown in fig. 5. The main difference between the guide mechanism of example 1 and the existing flexible hinge guide mechanism is the addition of a secondary flexible hinge (401) for carrying large loads and resisting deformation in the non-working direction. Embodiment 1 the operating principle of the guiding mechanism is as follows: as shown in fig. 6 and 7, the core motion platform (3) is connected to the rigid support platform (1) by a primary flexible hinge set (2) and a secondary flexible hinge set (401), respectively. The flexible hinges in the main flexible hinge group (2) and the secondary flexible hinge group (401) and the rigid support platform (1) are integrally processed and manufactured, and the secondary flexible hinge group (401) is connected with the core motion platform (3) through a rigid connecting part (402). The main working directions of the flexible hinges in the main flexible hinge group (2) and the secondary flexible hinge group (401) are the displacement directions of the core motion platform (3). The layout directions of the flexible hinges of the main flexible hinge group (2) and the secondary flexible hinge group (401) are mutually perpendicular in the direction plane of the movement direction of the core movement platform (3), and are symmetrically arranged relative to the core movement platform (3), as shown in fig. 7. The flexible hinges in the primary flexible hinge group (2) and the secondary flexible hinge group (401) which are vertically arranged in the three-dimensional space can mutually strengthen the capacity of bearing large load and resisting deformation in the non-working direction.
The application of the flexible hinge guide structure described in embodiment 1 to a moving platform is shown in fig. 8 and 9. The core motion platform (3) is driven by the linear driver (5), and the working displacement of the core motion platform (3) is measured and obtained by the grating displacement sensor (6). The deflection displacement caused by the action of the linear driver (5) and the moment on the core motion platform (3) is counteracted by a secondary flexible hinge group which is symmetrically arranged with the core motion platform (3). When the core motion platform (3) bears a large load, the sinking displacement of the motion platform (3) caused by the lower rigidity of the main flexible hinge group (2) in the vertical load direction is counteracted by the flexible hinges symmetrically arranged in the secondary flexible hinge groups (401) relative to the horizontal central plane of the core motion platform (3). Through the working principle, the core motion platform (3) can greatly improve the capacity of bearing large load and resisting deformation in the non-working direction by using the rigidity enhancing mode of the secondary flexible hinge group.
In particular, the weak part of the rigid support platform (3) caused by processing the secondary flexible hinge group (401) in the embodiment 1 of the invention can increase the rigidity of the rigid support platform (3) by embedding a rigid block (403) and using a bolt group A (404) for rigid connection.
Example 2.
One embodiment 2 of the flexible hinge guide mechanism of the present invention is shown in fig. 10 to 12. The main differences between the guide mechanism of the embodiment 2 and the guide mechanism of the embodiment 1 are as follows: the secondary flexible hinge group (401) of the embodiment 1 is manufactured in a mode of integrally processing with the rigid supporting platform, and the secondary flexible hinge group of the embodiment 2 is manufactured in a mode of assembling parts.
As shown in fig. 11 and 12, the secondary flexible hinge group includes a spring plate (401 a), a bolt group B (405), a bolt group C (406), a connection block a (407), a connection block B (408), and the like. The spring piece (401 a) is rigidly connected with the rigid supporting platform (1) through a bolt group B (405), and the core motion platform (3) is rigidly connected with the middle part of the spring piece (401 a) through a connecting block B (408), a connecting block A (407), a bolt group C (406) and the like. By the rigid connection assembly, the spring plate (401 a) can achieve the same function as the secondary flexible hinge set (401) in embodiment 1. The sub-flexible hinge assembly formed by the spring piece (401 a) assembly can be used for increasing the capacity of the core motion platform (3) for bearing large load and resisting deformation in a non-working direction.
The remaining operating principle of example 2 is the same as that of example 1. All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (9)
1. A big flexible hinge guiding mechanism that bears, its characterized in that includes: the device comprises a core motion platform (3), a main flexible hinge group (2), a rigid support platform (1), a secondary flexible hinge group (401) and a rigid block (403);
the core motion platform (3) is connected with the rigid support platform (1) through a main flexible hinge group (2) and a secondary flexible hinge group (401) respectively;
the main flexible hinge group (2) is arranged on the side of the core motion platform (3) in the motion direction;
the secondary flexible hinge group (401) is arranged in the movement direction of the core motion platform (3);
the layout directions of the flexible hinges of the main flexible hinge group (2) and the secondary flexible hinge group (401) are mutually vertical in a direction plane of the motion direction of the core motion platform (3), and the main flexible hinge group and the secondary flexible hinge group are symmetrically arranged relative to the core motion platform (3);
the rigid block (403) is embedded in the rigid support platform (1) and is rigidly connected with the rigid support platform (1) so as to increase the rigidity of a weak part generated by the rigid support platform (1) due to the processing of the secondary flexible hinge group (401).
2. The high load bearing flexible hinge guide mechanism of claim 1, wherein: the rigid block (403) is rigidly connected with the rigid supporting platform (1) through a bolt group A (404).
3. The high load bearing flexible hinge guide mechanism of claim 1 or 2, wherein: the guide mechanism further comprises a rigid connecting part (402), and the core motion platform (3) is connected with the secondary flexible hinge group (401) through the rigid connecting part (402).
4. The high load bearing flexible hinge guide mechanism of claim 1 or 2, wherein: the flexible hinges in the main flexible hinge group (2) and the secondary flexible hinge group (401) and the rigid supporting platform (1) are integrally processed and manufactured.
5. The high load bearing flexible hinge guide mechanism of claim 1 or 2, wherein: the secondary flexible hinge group comprises a spring plate (401 a), and the spring plate (401 a) is rigidly connected with the rigid support platform (1).
6. The high load bearing flexible hinge guide mechanism of claim 5, wherein: the spring piece (401 a) is rigidly connected with the rigid supporting platform (1) through a bolt group B (405).
7. The high load bearing flexible hinge guide mechanism of claim 5, wherein: the secondary flexible hinge group further comprises a connecting block B (408), and the core motion platform (3) is rigidly connected with the spring piece (401 a) through the connecting block B (408).
8. The high load bearing flexible hinge guide mechanism of claim 7, wherein: the secondary flexible hinge group further comprises a connecting block A (407), the spring pieces (401 a) are multiple, and the middle parts of the spring pieces (401 a) are rigidly connected through the connecting block A (407).
9. The high load bearing flexible hinge guide mechanism of claim 8, wherein: the spring pieces (401 a), the connecting blocks B (408) and the connecting blocks A (407) are rigidly connected through bolt groups C (406).
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710883865.0A CN107705822B (en) | 2017-09-26 | 2017-09-26 | Large-bearing flexible hinge guide mechanism |
| US15/853,847 US10564553B2 (en) | 2017-09-26 | 2017-12-24 | Large load-bearing guide mechanism and multi-DOF large-stroke high-precision motion platform system |
| JP2018000624A JP6860869B2 (en) | 2017-09-26 | 2018-01-05 | High load-bearing guidance mechanism and multi-degree-of-freedom, large stroke, high-precision moving stage system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710883865.0A CN107705822B (en) | 2017-09-26 | 2017-09-26 | Large-bearing flexible hinge guide mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107705822A CN107705822A (en) | 2018-02-16 |
| CN107705822B true CN107705822B (en) | 2022-11-22 |
Family
ID=61174946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710883865.0A Active CN107705822B (en) | 2017-09-26 | 2017-09-26 | Large-bearing flexible hinge guide mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107705822B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108494285A (en) * | 2018-05-14 | 2018-09-04 | 西安科技大学 | A kind of accurate amplification flexible micro system |
| CN108418464B (en) * | 2018-05-14 | 2024-01-19 | 西安科技大学 | Flexible micro-motion system capable of precisely shrinking |
| CN109531184B (en) * | 2018-12-13 | 2023-10-03 | 广东工业大学 | Rigid-flexible coupling platform with rigidity adjusted on two sides and motion platform |
| CN110345157A (en) * | 2019-06-14 | 2019-10-18 | 广东工业大学 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
| CN111102442B (en) * | 2019-12-12 | 2021-12-10 | 广东工业大学 | Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6440088U (en) * | 1987-09-03 | 1989-03-09 | ||
| JPH05316757A (en) * | 1991-03-20 | 1993-11-26 | Nec Corp | Moving mechanism |
| EP1048924A2 (en) * | 1999-04-28 | 2000-11-02 | Juri F. Jourtchenko | High-precision work table for a projector |
| CN101770182A (en) * | 2010-01-22 | 2010-07-07 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN103809515A (en) * | 2013-11-25 | 2014-05-21 | 深圳科瑞技术股份有限公司 | XYU three-degree of freedom adjusting device and adjusting method thereof |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN106975961A (en) * | 2017-05-19 | 2017-07-25 | 广东工业大学 | A kind of long stroke fast tool servo |
| CN207474079U (en) * | 2017-09-26 | 2018-06-08 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
-
2017
- 2017-09-26 CN CN201710883865.0A patent/CN107705822B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6440088U (en) * | 1987-09-03 | 1989-03-09 | ||
| JPH05316757A (en) * | 1991-03-20 | 1993-11-26 | Nec Corp | Moving mechanism |
| EP1048924A2 (en) * | 1999-04-28 | 2000-11-02 | Juri F. Jourtchenko | High-precision work table for a projector |
| CN101770182A (en) * | 2010-01-22 | 2010-07-07 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN103809515A (en) * | 2013-11-25 | 2014-05-21 | 深圳科瑞技术股份有限公司 | XYU three-degree of freedom adjusting device and adjusting method thereof |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN106975961A (en) * | 2017-05-19 | 2017-07-25 | 广东工业大学 | A kind of long stroke fast tool servo |
| CN207474079U (en) * | 2017-09-26 | 2018-06-08 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107705822A (en) | 2018-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107705822B (en) | Large-bearing flexible hinge guide mechanism | |
| CN107627292B (en) | Multi-degree-of-freedom large-stroke high-precision motion platform | |
| US10564553B2 (en) | Large load-bearing guide mechanism and multi-DOF large-stroke high-precision motion platform system | |
| CN110281033B (en) | Multi-axis rigid-flexible coupling motion platform | |
| JPWO2013140788A1 (en) | Single axis actuator | |
| KR101726890B1 (en) | suspension structures | |
| CN111102442B (en) | Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same | |
| CN100553107C (en) | Permanent magnet suspending plane electromotor | |
| CN113464780B (en) | Spatial three-translation-degree-of-freedom flexible positioning platform | |
| CN110281034B (en) | Rigid-flexible coupling platform with enhanced flexible hinge group and motion platform | |
| CN109093571B (en) | Compact two-dimensional nanometer servo platform | |
| CN207474079U (en) | A kind of big carrying flexible hinge guiding mechanism | |
| US20140270602A1 (en) | Disc and Spring Isolation Bearing | |
| US6955467B2 (en) | Seismic isolation bearing assembly with a frame unit for supporting a machine body thereon | |
| CN111037313A (en) | Five-axis movable beam type portal frame and mounting method | |
| CN111412237B (en) | Suspension spring | |
| CN1950682A (en) | Weighing system that operates according to the principle of electromagnetic force compensation | |
| CN100587850C (en) | Incorporated ultra-precision workbench moving mechanism | |
| CN101561013B (en) | Gas bearing posture active control device | |
| US7595944B2 (en) | Optical actuator | |
| CN209578822U (en) | Coupled Rigid-flexible platform and motion platform with frictional rigidity switching device | |
| CN201069687Y (en) | Shake reduction machine for dual push electromagnetic icon | |
| CN108593059B (en) | Multi-beam structure elastic element | |
| CN106122276B (en) | A kind of bearing | |
| CN212502451U (en) | Linear bearing sliding platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |