CN103809515A - XYU three-degree of freedom adjusting device and adjusting method thereof - Google Patents
XYU three-degree of freedom adjusting device and adjusting method thereof Download PDFInfo
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- CN103809515A CN103809515A CN201310600942.9A CN201310600942A CN103809515A CN 103809515 A CN103809515 A CN 103809515A CN 201310600942 A CN201310600942 A CN 201310600942A CN 103809515 A CN103809515 A CN 103809515A
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Abstract
The invention discloses an XYU three-degree of freedom adjusting device and an adjusting method thereof. The XYU three-degree of freedom adjusting device comprises a bottom board, an adjusting board which is arranged on the bottom board and used for loading products to be processed, a plurality of driving units which are fixedly arranged on the bottom board and movably connected with the adjusting board, and a control unit which is electrically connected with the driving units and used for controlling the driving quantity of the driving unit, wherein the driving units are used for adjusting the position of the adjusting board in the X direction and the Y direction and controlling the rotating angle of the adjusting board in the U direction. By arranging the plurality of driving units which are provided with a linear driving function on the bottom board, the integral structure of the XYU three-degree of freedom adjusting device can achieve XYU three-degree of freedom adjustment simply through two layers; meanwhile, the XYU three-degree of freedom adjusting device is simple in structure, small in space occupation, low in cost, convenient and stable to operate and capable of greatly improving the precision.
Description
Technical field
The present invention relates to precision positioning field, relate in particular to a kind of regulating device and control method thereof with the Three Degree Of Freedom regulatory function in XYU direction.
Background technology
Often to need a kind of XYU Three Degree Of Freedom worktable at automation equipment back warp, realize the precision positioning of establishing XYU direction, such as in integrated circuit manufacturing equipment, precision measurement industry, camera production test, wherein x axle and the y axle in the corresponding enlightening card of X/Y coordinate system, U is a corner, and its vertical axes along the geometric center of adjustment plate is at XY direction rotation certain angle.Such workbench, can realize in XY plane, by any one position (X of object localization, Y), with corner U, for example, but there are many problems in existing this adjusting platform: in the production run of camera itself and be installed in the process of final electronic product, need to carry out various functional tests to camera.Wherein have an important test be by camera or be equipped with the product of camera fixing after, by the test reading graph card of standard (test target) alignment camera or the product of camera is housed.Therefore the test target of standard is to adjust object here, and camera or the product that camera is housed are destination objects.The adjusted object of wish realization is aimed at destination object, must make adjusted object adjust in X, Y, tri-directions of U.At present, the method that realizes this adjustment is on degree plate, two groups of straight line adjusting modules and one group of angular setting module to be gathered into folds layer by layer, to be adjusted again plate and be placed in the superiors, the structure of totally four layers including base plate, be that the relative ground floor of the second layer does X rectilinear motion, the 3rd layer of relative second layer does Y rectilinear motion, the 4th layer relative the 3rd layer is U and rotatablely moves, when this design excessive and space at adjusted board size height-limited, be not easy to arrange, and there will be stability and the inadequate problem of precision.
Therefore, prior art has yet to be improved and developed.
Summary of the invention
In view of above-mentioned the deficiencies in the prior art, the object of the present invention is to provide one simple in structure, easy to operate, and measuring accuracy is high, stability is good regulating device and the control method thereof with XYU Three Degree Of Freedom regulatory function.
Technical scheme of the present invention is as follows:
A kind of XYU three degree of freedom regulating device, it comprises a base plate, wherein, it also comprises that one is arranged on described base plate for loading the adjustment plate of pending product, severally be fixedly installed on the drive unit being flexibly connected on described base plate and with described adjustment plate, and one be electrically connected with described drive unit for controlling the control device of described drive unit drive volume; Described drive unit is for regulating described adjustment plate in the position of directions X and Y-direction and for adjusting the anglec of rotation of plate along U direction described in regulating and controlling, described directions X is the length direction of described adjustment plate, described Y-direction is the Width of described adjustment plate, and described U direction is described adjustment plate around the vertical central shaft of adjusting plate geometric center sense of rotation in the horizontal direction.
Described drive unit comprise be arranged on described base plate for drive the main drive of described adjustment plate and for coordinate with described main drive regulate described adjustment plate from drive unit.。
Described main drive comprises and is separately positioned on the first main drive, the second main drive, the 3rd main drive that on described base plate and with described adjustment plate, are flexibly connected;
Described from drive unit comprise be separately positioned on described base plate and with described adjustment plate, be flexibly connected first from drive unit, second from drive unit, the 3rd from drive unit;
Described the first main drive, first from drive unit the position on described floor corresponding with the centre position on limit, the described adjustment plate left and right sides respectively, it is jointly for regulating the position of described adjustment plate at directions X;
Described the second main drive, the 3rd main drive are symmetricly set on the lower side of described adjustment plate, described second is symmetricly set on the upper side edge of described adjustment plate from drive unit, the 3rd from drive unit, and it is jointly for regulating described adjustment plate in the position of directions X and for adjusting the anglec of rotation of plate along U direction described in regulating and controlling.
Described main drive comprises: one is fixedly installed on the holder on described base plate, one is arranged on the first regulating spring being flexibly connected on described holder and with described adjustment plate, and one is arranged in described holder for driving described regulating spring along continuous straight runs to do straight-line linear drive apparatus;
Describedly comprise from drive unit: one is fixedly installed on the pedestal described floor, and one is arranged on the second regulating spring being flexibly connected on described holder and with described adjustment plate.
As a control method for above-mentioned XYU three degree of freedom regulating device, wherein, its regulating step comprises:
A: the drive unit that is arranged on the described adjustment plate left and right sides receives the driving instruction of described control device, adjusts the position of plate on described directions X described in regulating and controlling;
B: the drive unit that is arranged on the upper and lower both sides of described adjustment plate receives the driving instruction of described control device, adjusts described in regulating and controlling described in the position of plate in described Y-direction and regulating and controlling and adjusts the anglec of rotation of plate along U direction.
Described drive unit comprises: be separately positioned on the first main drive, the second main drive, the 3rd main drive that on described base plate and with described adjustment plate, are flexibly connected, be separately positioned on described base plate and with described adjustment plate, be flexibly connected first from drive unit, second from drive unit, the 3rd from drive unit;
Described the first main drive, first from drive unit the position on described floor corresponding with the centre position on limit, the described adjustment plate left and right sides respectively;
Described the second main drive, the 3rd main drive are symmetricly set on the lower side of described adjustment plate, and described second is symmetricly set on the upper side edge of described adjustment plate from drive unit, the 3rd from drive unit;
Described A step comprises: described the first main drive receives the driving instruction of described control device, and in the time reaching default drive volume, described the first main drive stops driving described adjustment plate, realizes the adjusting of the position of described adjustment plate on described directions X.
Described B step comprises: described the second main drive, the 3rd main drive receive respectively the driving instruction of described control device, described the second main drive, the described adjustment plate of the synchronous driving of the 3rd main drive, in the time reaching the drive volume of default drive volume and described the second main drive, the 3rd main drive and equate, described the first main drive stops driving described adjustment plate, realizes the adjusting of the position of described adjustment plate in described Y-direction.
Described B step also comprises: described the second main drive, the 3rd main drive receive respectively the driving instruction of described control device, when reaching the drive volume of default drive volume and described the second main drive, the 3rd main drive when unequal, described the first main drive stops driving described adjustment plate, realizes the adjusting of the position of described adjustment plate in described U direction.
Described drive unit is linear motor driver.
XYU three degree of freedom regulating device provided by the present invention and control method thereof, owing to being provided with multiple driver modules with linear drives function at base plate, its one-piece construction only needs the two-layer X-Y-U that can realize to adjust function, it is simple in structure, it is little to take up room, cost is low, easy to operate, stable, and precision improves greatly.
Accompanying drawing explanation
Fig. 1 is the structural representation one of the embodiment of XYU three degree of freedom regulating device of the present invention.
Fig. 2 is the structural representation two of the embodiment of XYU three degree of freedom regulating device of the present invention.
Fig. 3 is the structural representation three of the embodiment of XYU three degree of freedom regulating device of the present invention.
Fig. 4 is the process flow diagram of the control method of XYU three degree of freedom regulating device of the present invention.
Embodiment
The invention provides a kind of XYU three degree of freedom regulating device and control method thereof, for making object of the present invention, technical scheme and effect clearer, clear and definite, referring to accompanying drawing examples, the present invention is described in more detail.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
The invention provides a kind of XYU three degree of freedom regulating device, as shown in Figure 1, a kind of XYU three degree of freedom regulating device, it comprises a base plate 10, wherein, it also comprises that one is arranged on described base plate 10 for loading the adjustment plate 20 of pending product, is severally fixedly installed on the drive unit 30 being flexibly connected on described base plate 10 and with described adjustment plate 20, and one be electrically connected with described drive unit 30 for controlling the control device (not shown) of described drive unit drive volume; Described drive unit 30 is for regulating described adjustment plate 20 in the position of directions X and Y-direction and for adjusting the anglec of rotation of plate 20 along U direction described in regulating and controlling, described directions X is the length direction of described adjustment plate 20, described Y-direction is the Width of described adjustment plate 20, and described U direction is described adjustment plate 20 around the vertical central shaft of adjusting plate 20 geometric centers (the O point in Fig. 1) sense of rotation in the horizontal direction.Produce and detection platform at camera, described adjustment plate 20 is traditionally arranged to be the rectangular flat of flat board, plectane or the hollow of rectangle, adopts aluminium section, is provided with the locking device of being convenient to fixing test figure on it.This regulating device only has double-layer structure, and entirety takes up room very little, and than existing three-decker, it is simple in structure, and accuracy of detection is high, and easy to operate, and the space that operation regulates promotes greatly.
Concrete, the structure of this drive unit 30 can be set to: one is fixedly installed on the holder on described base plate 10, one is arranged in described holder and the regulating spring being flexibly connected with described adjustment plate 20, and one is arranged in described holder for driving described regulating spring along continuous straight runs to do straight-line linear drive apparatus.
Concrete, described drive unit comprises main drive and from drive unit, described main drive comprises: one is fixedly installed on the holder 310 on described base plate 10, one is arranged on the first regulating spring 37 being flexibly connected on described holder 310 and with described adjustment plate 20, and one is arranged in described holder for driving described regulating spring along continuous straight runs to do straight-line linear drive apparatus (not shown); Describedly comprise from drive unit: one is fixedly installed on the pedestal described floor, one is arranged on the second regulating spring 38 being flexibly connected on described holder and with described adjustment plate 20, and the regulating spring from drive unit is all for impaction state in the time not operating.This linear drives module can be set to screw mechanism, pinion and rack, cam mechanism and other controlled straight-line mechanism, this linear drive apparatus can be set to manual or electronic, preferably being set to linear electric motors drives, it is connected with described control device, realizes the full-automation of producing, testing.
Concrete, described main drive comprises and is separately positioned on the first main drive 31, the second main drive 33, the 3rd main drive 34 that on described base plate 10 and with described adjustment plate 20, are flexibly connected; Described from drive unit comprise be separately positioned on described base plate 10 and with described adjustment plate 20, be flexibly connected first from drive unit 32, second from drive unit 35, the 3rd from drive unit 36; Described the first main drive 31, first from drive unit 32 position on described floor corresponding with the centre position on described adjustment plate 20 limits, the left and right sides respectively, it is jointly for regulating the position of described adjustment plate 20 at directions X; Described the second main drive 33, the 3rd main drive 34 are symmetricly set on the lower side of described adjustment plate 20, described second is symmetricly set on the upper side edge of described adjustment plate 20 from drive unit 35, the 3rd from drive unit 36, and it is jointly for regulating described adjustment plate 20 in the position of Y-direction and for adjusting the anglec of rotation of plate 20 along U direction described in regulating and controlling.
Preferably, as shown in Figure 1, described the second main drive 33, second is set up in parallel from drive unit 35, and both lines are with parallel with Y-direction, and described the 3rd main drive 34, the 3rd is also set up in parallel from drive unit 36; Certainly, more or less main drive also can be set, from drive unit, for example, only in the upper side edge centre position correspondence of adjusting plate 20, a driven drive unit be set, as shown in Figure 3; Or, being symmetrical arranged two main drives on adjustment plate 20 limits, left side, right edge is also symmetrical arranged two from drive unit, and other situation of setting up repeats no more.Simultaneously, the second main drive 33, the 3rd main drive 34, second are not limited to shown in figure from the position of drive unit 36 from drive unit 35, the 3rd, can also both sides will be moved to, now described the first main drive 31, the second main drive 33, second from drive unit 35 and described the 3rd main drive 34, first from drive unit 32, the 3rd from drive unit 36 respectively on the same line, as shown in Figure 2.
The present invention also provides the control method of above-mentioned regulating device, as shown in Figure 4, its step comprises A: the drive unit that is arranged on described adjustment plate 20 left and right sides receives the driving instruction of described control device, described in regulating and controlling, adjust the position of plate 20 on described directions X, concrete, described control device sends a default drive volume △ X who pre-sets to described the first main drive 31, adjust plate 20 right sides first from the second regulating spring 38 of drive unit 32 in compressive state, the first regulating spring 37 of upper and lower both sides is in extended state, while reaching drive volume △ X, stop driving, move the position of having realized on directions X.
Step B comprises step B1 and B2, wherein step B1: the drive unit that is arranged on described adjustment plate both sides Shang Xia 20 receives the driving instruction of described control device, described in regulating and controlling, adjust described in the position of plate 20 in described Y-direction and regulating and controlling and adjust the anglec of rotation of plate 20 along U direction, concrete, described control device is to described the second main drive 33, the 3rd main drive 34 sends a same default drive volume △ Y, adjust the regulating spring of plate 20 left and right sides in extended state, the second regulating spring 38 of upside is in compressive state, while reaching drive volume △ X, stop driving, having realized position in the Y direction moves, step B2: control device sends a different default drive volume △ Y who has calculated to described the second main drive 33, the 3rd main drive 34, realizes the adjusting of adjusting the anglec of rotation of plate 20 in U direction.
In the XYU three degree of freedom regulating device of traditional four-layer structure, motor often turns around needs fixing umber of pulse, it drives sledge displacement certain distance mm to measure by leading screw, so there is a linear scale-up factor relation between the umber of pulse of motor and sledge displacement certain distance, relative displacement (△ X, △ Y, △ U) can simply be expressed as:
△X=X_MOTOR_PLUS X Kx （1）
△Y=Y_MOTOR_PLUS X Ky （2）
△U=U_MOTOR_PLUS X Ku （3）
In formula:
X_MOTOR_PLUS is the umber of pulse of x spindle motor;
Y_MOTOR_PLUS is the umber of pulse of y spindle motor;
U_MOTOR_PLUS is the umber of pulse of u spindle motor;
Kx is X-axis scale-up factor;
Ky is Y-axis scale-up factor;
Ku is U axis scale coefficient;
Its control relation is very simple, as needs do relative motion (△ X, △ Y, △ U), software is by formula (1), (2), (3) calculate (X_MOTOR_PLUS, Y_MOTOR_PLUS, U_MOTOR_PLUS) umber of pulse of motor, pulse is issued to control system, workbench just can obtain corresponding displacement, its precision is lower, be difficult to adapt to the demand of high precision operation, and its cumulative errors is large.
And X direction is still constant in this double-layer structure of the present invention, X-axis motorized feed amount can be directly associated with the amount of exercise of x axle, and X-axis motorized feed amount △ x is:
△ X=X (target pulse value)-X (actual pulse value) (formula 4)
Correspond in the Y-direction left and right sides: Y1, Y2, its relative displacement is respectively △ Y1, △ Y2, Y1, Y2 advances together or retreats the amount of formed objects, can play the effect of the translation △ Y of Y direction; Y1, Y2 amount of exercise difference, can play the effect of the adjustment of angle △ U;
Its circular is, Y1, and the relation of Y2 and angle U and Y, can be expressed as:
Wherein: L is the distance of motor Y1 to Y2;
Tan(U) being the factor of influence at U angle, is U tangent of an angle value;
△ Y is the synchronous upper and lower translation factors of 2 Y-axis, on value, is:
△ Y=Y12 mid point desired value-Y12 mid point actual value (formula 6)
Wherein, Y12 mid point desired value=(Y1 target pulse value+Y2 target pulse value)/2;
Y12 mid point actual value=(Y1 actual pulse value+Y2 actual pulse value)/2;
By Tan(U), △ Y brings formula 5 into, obtains Y1 target pulse value and Y2 target pulse value, then they and physical location pulse value have more just been obtained to Y1, Y2 axle will arrive the actual amount of feeding that target location will occur.That is:
△ Y1=Y1 target pulse value-Y1 actual pulse value (formula 7)
△ Y2=Y2 target pulse value-Y2 actual pulse value (formula 8)
By (formula 4), (formula 7) and (formula 8), and conversion associated from direction vector (△ X, △ Y, △ U) to (△ X, △ Y1, △ Y2) vector are realized.
Should be understood that, application of the present invention is not limited to above-mentioned giving an example, and for those of ordinary skills, can be improved according to the above description or convert, and all these improvement and conversion all should belong to the protection domain of claims of the present invention.
Claims (10)
1. an XYU three degree of freedom regulating device, it comprises a base plate, it is characterized in that, it also comprises that one is arranged on described base plate for loading the adjustment plate of pending product, severally be fixedly installed on the drive unit being flexibly connected on described base plate and with described adjustment plate, and one be electrically connected with described drive unit for controlling the control device of described drive unit drive volume; Described drive unit is for regulating described adjustment plate in the position of directions X and Y-direction and for adjusting the anglec of rotation of plate along U direction described in regulating and controlling, described directions X is the length direction of described adjustment plate, described Y-direction is the Width of described adjustment plate, and described U direction is described adjustment plate around the vertical central shaft of adjusting plate geometric center sense of rotation in the horizontal direction.
2. XYU three degree of freedom regulating device according to claim 1, it is characterized in that, described drive unit comprise be arranged on described base plate for drive the main drive of described adjustment plate and for coordinate with described main drive regulate described adjustment plate from drive unit.
3. XYU three degree of freedom regulating device according to claim 2, it is characterized in that, described main drive comprises and is separately positioned on the first main drive, the second main drive, the 3rd main drive that on described base plate and with described adjustment plate, are flexibly connected;
Described from drive unit comprise be separately positioned on described base plate and with described adjustment plate, be flexibly connected first from drive unit, second from drive unit, the 3rd from drive unit;
Described the first main drive, first from drive unit the position on described floor corresponding with the centre position on limit, the described adjustment plate left and right sides respectively, it is jointly for regulating the position of described adjustment plate at directions X;
Described the second main drive, the 3rd main drive are symmetricly set on the lower side of described adjustment plate, described second is symmetricly set on the upper side edge of described adjustment plate from drive unit, the 3rd from drive unit, and it is jointly for regulating described adjustment plate in the position of Y-direction and for adjusting the anglec of rotation of plate along U direction described in regulating and controlling.
4. XYU three degree of freedom regulating device according to claim 2, it is characterized in that, described main drive comprises: one is fixedly installed on the holder on described base plate, one is arranged on the first regulating spring being flexibly connected on described holder and with described adjustment plate, and one is arranged in described holder for driving described regulating spring along continuous straight runs to do straight-line linear drive apparatus;
Describedly comprise from drive unit: one is fixedly installed on the pedestal described floor, and one is arranged on the second regulating spring being flexibly connected on described holder and with described adjustment plate.
5. the control method of XYU three degree of freedom regulating device according to claim 1, is characterized in that, its regulating step comprises:
A: the drive unit that is arranged on the described adjustment plate left and right sides receives the driving instruction of described control device, adjusts the position of plate on described directions X described in regulating and controlling;
B: the drive unit that is arranged on the upper and lower both sides of described adjustment plate receives the driving instruction of described control device, adjusts described in regulating and controlling described in the position of plate in described Y-direction and regulating and controlling and adjusts the anglec of rotation of plate along U direction.
6. the control method of XYU three degree of freedom regulating device according to claim 5, it is characterized in that, described drive unit comprises: be separately positioned on the first main drive, the second main drive, the 3rd main drive that on described base plate and with described adjustment plate, are flexibly connected, be separately positioned on described base plate and with described adjustment plate, be flexibly connected first from drive unit, second from drive unit, the 3rd from drive unit;
Described the first main drive, first from drive unit the position on described floor corresponding with the centre position on limit, the described adjustment plate left and right sides respectively;
Described the second main drive, the 3rd main drive are symmetricly set on the lower side of described adjustment plate, and described second is symmetricly set on the upper side edge of described adjustment plate from drive unit, the 3rd from drive unit.
7. the control method of XYU three degree of freedom regulating device according to claim 6, it is characterized in that, described A step comprises: described the first main drive receives the driving instruction of described control device, in the time reaching default drive volume, described the first main drive stops driving described adjustment plate, realizes the adjusting of the position of described adjustment plate on described directions X.
8. the control method of XYU three degree of freedom regulating device according to claim 6, it is characterized in that, described B step comprises: described the second main drive, the 3rd main drive receive respectively the driving instruction of described control device, described the second main drive, the described adjustment plate of the synchronous driving of the 3rd main drive, in the time reaching the drive volume of default drive volume and described the second main drive, the 3rd main drive and equate, described the first main drive stops driving described adjustment plate, realizes the adjusting of the position of described adjustment plate in described Y-direction.
9. the control method of XYU three degree of freedom regulating device according to claim 6, it is characterized in that, described B step also comprises: described the second main drive, the 3rd main drive receive respectively the driving instruction of described control device, when reaching the drive volume of default drive volume and described the second main drive, the 3rd main drive when unequal, described the first main drive stops driving described adjustment plate, realizes the adjusting of the position of described adjustment plate in described U direction.
10. according to the control method of the arbitrary described XYU three degree of freedom regulating device of claim 5 to 9, it is characterized in that, described drive unit is linear motor driver.
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| CN107705822A (en) * | 2017-09-26 | 2018-02-16 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
| CN111571272A (en) * | 2020-06-02 | 2020-08-25 | 大连理工大学 | Accurate alignment method for rotary parts |
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Application publication date: 20140521 |