CN110421553A - A kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device and control method - Google Patents
A kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device and control method Download PDFInfo
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- CN110421553A CN110421553A CN201910807905.2A CN201910807905A CN110421553A CN 110421553 A CN110421553 A CN 110421553A CN 201910807905 A CN201910807905 A CN 201910807905A CN 110421553 A CN110421553 A CN 110421553A
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- voice coil
- micromotion
- fine motion
- platform
- coil motor
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
- B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
Abstract
The invention discloses a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device and control methods, including basic machine part, detection part and control section；Basic machine part includes air floating platform, the quiet pedestal of platform, micromotion platform, the macro dynamic branch for driving the macro dynamic movement of micromotion platform, the fine motion branch for driving micromotion platform precision micromotion, detection part includes grating displacement sensor, Spectral Confocal formula displacement sensor and short range laser range sensor, and control section includes voice coil motor servo amplifier, straight line precision unit servo amplifier, motion control card, data collecting card and computer.The macro dynamic movement of voice coil motor of the present invention guarantees track following and motion range, the jogging motion of straight line precision actuation unit driving realizes high accuracy positioning control, macro dynamic and fine motion is integrated to solve big stroke and high-precision contradiction, and high accuracy positioning control is realized in larger working space.
Description
Technical field
The present invention relates to precision positioning fields, and in particular to a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device and control
Method.
Background technique
With the development of science and technology, precision manufactureing, accurate measurement and precision positioning technology are raw in scientific research forward position and industry
Increasingly consequence is occupied in production.The big of higher speed, higher precision processing and high-velocity scanning detection is needed in ic manufacturing
Stroke precision locating platform.In biologic medical field, carrying for biological cell and the operational stroke of transfer ratio are injected, cut,
Fusion etc. a series of microoperation requires the precisely locating platform of micromation.Serial mechanism precision is low, accumulated error is big, just
It spends low, is unsatisfactory for the requirement of high-accuracy operation.To reach high-precision positioning requirements, the concept of parallel institution is proposed.It is in parallel
Mode, which drives, has the characteristics that high rigidity, high load and quick response.
For this contradiction for solving large stroke and high precision, it is badly in need of a kind of with grade stroke, nano grade positioning precision
Platform, the macro micro- combination driving platform of parallel-connection structure is a kind of feasible program that researcher obtains, but the program needs to guarantee
For the Motion Resolution rate of macro-moving stage in the range of micromotion platform positioning accuracy, this proposes more the properties of macro-moving stage
High requirement.
Summary of the invention
In order to overcome shortcoming and deficiency of the existing technology, the present invention provides a kind of Three Degree Of Freedom macro/micromotion and is coupled
Structure device and control method.
In order to achieve the above object, the present invention adopts the following technical scheme:
A kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device, including basic machine part, detection part and control section；
The basic machine part includes air floating platform, and the quiet pedestal of platform, micromotion platform, driving micromotion platform are macro dynamic macro
Dynamic branch and the fine motion branch for driving micromotion platform precision micromotion；
The macro dynamic branch is made of the voice coil motor of three same sizes, and three voice coil motors are quiet in platform
It is circumferentially arranged on pedestal, is mutually 120 degree；
The fine motion branch includes fine motion transmission shaft；Fine motion transmission shaft one end is connect with micromotion platform, the other end
It is connect with voice coil motor；
The detection part includes that the grating displacement sensor that macro dynamic branch is arranged in, the spectrum for being arranged in fine motion branch are total
Burnt formula displacement sensor and the short range laser range sensor that the quiet pedestal of platform is set；
The control section respectively with detection part, macro dynamic branch and fine motion branch chain link.
The control section includes data collecting card, computer, motion control card, voice coil motor servo amplifier and straight line
Accurate unit servo amplifier；
Grating displacement sensor, Spectral Confocal formula displacement sensor and the acquisition signal input of short range laser range sensor
Data collecting card, the data collecting card are connect with computer, and computer and motion control card are connected with each other, and motion control card is defeated
Control signal is to voice coil motor servo amplifier and straight line precision unit servo amplifier out, further drives macro dynamic branch and micro-
Dynamic branch chain movement.
The fine motion transmission shaft includes fine motion transmission shaft matrix, flexible hinge and fine motion transmission shaft movable block, the fine motion
Transmission shaft matrix is connect by flexible hinge with fine motion transmission shaft movable block, and one end of the fine motion transmission shaft matrix passes through fixation
Axis is connect with voice coil motor, the movement of voice coil motor is transferred to fine motion transmission shaft, the fine motion transmission shaft is mobile
Block is connect by multi-diameter shaft with micromotion platform.
The voice coil motor includes guide rail, voice coil motor sliding block, voice coil motor push plate, voice coil linear electricity
Machine coil, voice coil motor sleeve, voice coil motor supporting plate and voice coil motor bottom plate, voice coil motor bottom plate are solid
Due on the quiet pedestal of platform, voice coil motor sliding block is under voice coil motor push plate and the promotion of voice coil motor coil
Relative to the movement of voice coil motor bottom plate, voice coil motor sliding block and fixed axis connection on guide rail.
The fine motion transmission shaft matrix is equipped with piezoelectric ceramic actuator, driver adjustment block and driver fixed block, institute
The tail end for stating piezoelectric ceramic actuator is connect with driver adjustment block, and head end is connect with driver fixed block, the driver
Adjustment block is fixed on fine motion transmission shaft matrix, and the driver adjustment block is fixed on fine motion transmission shaft movable block.
The fine motion transmission shaft matrix is equipped with clump weight.
Motor-grating scale link block is additionally provided on the voice coil motor sliding block.
The fine motion shifting axle movable block is fixed with fine motion detection block, when fine motion shifting axle movable block is mobile, detection block quilt
Drive the displacement for generating relative spectral confocal displacement sensor.
The fine motion transmission shaft is processed by a metal plate through line cutting technology.
A kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device control process is as follows, comprising:
Respective sensor is carried out initial reset operation by the first step；
Second step, the macro dynamic positioning of micromotion platform, specifically: planning the motion profile of micromotion platform, utilize pattern displacement
Sensor detects the location information of macro dynamic branch, is sent to data collecting card, and be sent to computer, is calculated and is moved by computer
Track, the D/A conversion circuit for being then transported on trajectory signal to motion control card are exported to voice coil motor servo amplifier, control
Voice coil motor processed generates corresponding movement；
Third step, the precision positioning of micromotion platform, specifically: for detecting the Spectral Confocal formula displacement sensing of fine motion branch
Location information is sent to data collecting card by device, then passes to computer, is calculated motion profile by computer, is then transported on rail
The D/A conversion circuit of mark signal to motion control card is exported to straight line precision unit servo amplifier, controls Piezoelectric Ceramic
Device generates corresponding movement；
4th step, under the driving positioning by second, third step, due to the influence of the factors such as temperature, deformation, friction,
Micromotion platform only moves near target anchor point, detects micromotion platform by the short range laser range sensor in three directions
Three sides range information, controlled after being sent to computer by the position that related algorithm calculates current micromotion platform
Control information is finally sent to motion control card by amount, continues the compensation control of micromotion platform, and final realization is accurate fixed
Position.
The present invention has the following beneficial effects with respect to the prior art:
(1) the macro micro- integrated motion parallel connection mechanism device present invention of Three Degree Of Freedom is done macro using voice coil motor driving platform
Dynamic movement, the shortcomings that effectively avoiding traditional servo motor driving ball screw or decelerating through motor driver, reduce because
The influence of the factors such as inter-agency additional friction, flexible deformation, gap is, it can be achieved that high rigidity, gapless, high response speed, height
The positioning of precision；
(2) present invention uses macro/micro- integrated double drive mode, and big stroke, the high operation that can have both taken into account macro dynamic part are fast
Degree feature, and have the characteristics of high-precision adjustment positioning of fine motion part, it solves operation stroke and controls the contradiction between precision.
(3) the fine motion branch of the straight line precision micromotion of the present invention uses Piezoelectric Ceramic and flexible hinge cooperation has
Have the characteristics that small in size, high without mechanical friction, gapless, autokinesis, rigging error and scale error can be eliminated, be suitable for
Precision positioning operating environment.
(4) parallel-connection structure platform of the invention uses high-precision angular contact ball bearing in revolute pair, can be by adjusting
Clearance is eliminated, achievees the purpose that eliminate rotary joint gap；Using the high-accuracy linear guide of preload, it can eliminate and be translatable between joint
Gap.
Detailed description of the invention
Fig. 1 is general structure schematic diagram of the invention；
Fig. 2 is front view of the invention；
Fig. 3 is top view of the invention；
Fig. 4 is macro dynamic drive part structural schematic diagram of the invention；
Fig. 5 is fine motion transmission shaft and correlated parts schematic diagram of the invention.
Specific embodiment
Below with reference to examples and drawings, the present invention is described in further detail, but embodiments of the present invention are not
It is limited to this.
Embodiment
As Figure 1-Figure 4, a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device, including basic machine part, detection
Part and control section；
The basic machine part includes air floating platform 1, the quiet pedestal 2 of platform and micromotion platform 3, and the quiet pedestal of platform is set
It sets on air floating platform, the micromotion platform is arranged on the quiet pedestal of platform, and micromotion platform and the quiet pedestal of platform are triangle,
Three sides of the quiet pedestal of platform can be used for the location and installation of macro dynamic branch, and micromotion platform is diagonally there are three axis pilot hole, and three
A axis pilot hole is connect with multi-diameter shaft 14 respectively, realizes three-degree-of-freedom motion, macro dynamic branch and fine motion branch chain link, the fine motion
Branch is connect by axis pilot hole with micromotion platform, uses high-precision angular contact ball between the micromotion platform and driving branch
Bearing connection.
The driving macro dynamic macro dynamic branch of micromotion platform is made of three identical audio linear motors, and three voice coils are straight
Line motor is mutually 120 °, the direction of motion of three voice coil motor sliding blocks is triangular in shape at circumferential arrangement.
As shown in figure 4, voice coil motor 8 is by boss 8-1, guide rail 8-2, voice coil motor sliding block 8-3, voice coil linear
Motor push plate 8-4, voice coil motor coil 8-5, voice coil motor sleeve 8-6, voice coil motor supporting plate 8-7 and voice coil
Linear motor bottom plate 8-8 is constituted, and voice coil motor bottom plate is fixed on the quiet pedestal of platform, and voice coil motor sliding block is in voice coil
Relative to the movement of voice coil motor bottom plate, voice coil on guide rail under linear motor push plate and the promotion of voice coil motor coil
There is one motor-grating scale link block 9 on linear motor sliding block, grating scale 10-1 is fixed on the quiet pedestal of platform, Grating examinations head
10-2 is connect with motor-grating scale, by voice coil motor sliding block, the Grating examinations head of grating displacement sensor and fixing axle 20
It connects integral.
As shown in figure 5, fine motion transmission shaft 6 is processed into fine motion transmission shaft matrix 6-1, soft through line cutting technology by a metal plate
Property hinge 6-2, fine motion transmission shaft movable block 6-3, be respectively machined with single order on fine motion transmission shaft matrix and fine motion transmission shaft movable block
Terraced hole, for the transition fit with 16 outer ring of bearing, bearing is fastened by bearing (ball) cover 15, the bearing inner race of transmission shaft body terminal with
Fixing axle 20 is interference fitted, and the movement of voice coil motor can be transferred to fine motion transmission shaft, fine motion transmission shaft movable block end
Bearing inner race and 14 one end of multi-diameter shaft are interference fitted, and the matching hole of the multi-diameter shaft other end and micromotion platform is interference fitted.
There are piezoelectric ceramic actuator 12, driver adjustment block 11, driver to fix on fine motion transmission shaft matrix shown in fig. 5
Block 13, piezoelectric ceramic actuator tail end are connect with driver adjustment block, and piezoelectric ceramic actuator head end and driver fixed block connect
It connects, the piezoelectric ceramic actuator is connect with straight line precision unit servo amplifier, and driver adjustment block is fixed on fine motion transmission
Axis matrix, driver fixed block are fixed on fine motion transmission shaft movable block, and driver adjustment block preload adjustable can eliminate gap pair
Piezoelectric ceramic actuator precision influences.
There is clump weight 7 on fine motion transmission shaft matrix shown in fig. 5, clump weight is for keeping fine motion transmission shaft horizontal and reducing
Prolong the service life to the abrasion of bearing side.
The detection part includes grating displacement sensor 10, Spectral Confocal formula displacement sensor 19 and short range Laser Measuring
Away from sensor 4, grating displacement sensor is synchronous with voice coil motor slide block movement, for detecting the displacement of macro dynamic part branch
Amount, Spectral Confocal formula displacement sensor is connected with fine motion transmission shaft, for detecting the displacement of fine motion branch, short range Laser Measuring
It away from there are three sensors, is fixed on the quiet pedestal of platform in triangle circumferential arrangement respectively, the position for detecting micromotion platform is believed
Breath, the information of each sensor are received by data collecting card 25；
The Spectral Confocal formula displacement sensor of the detection part is clamped at sensor fixed block 18, sensor fixed block
It is fixed on fine motion transmission shaft matrix, a fine motion detection block 17 is fixed on fine motion transmission shaft movable block, when fine motion transmission shaft is mobile
When block moves under piezoelectric ceramic actuator driving, detection block is also driven the position for generating relative spectral confocal displacement sensor
It moves.
The control section control section includes voice coil motor servo amplifier 21, the amplification of straight line precision unit servo
Device 22, data collecting card 25, motion control card 23 and computer 24.
The voice coil motor servo amplifier driving voice coil motor movement, the straight line precision unit servo are put
Big device driving piezoelectric ceramic actuator movement.
The information of computer receiving data capture card obtains control signal after carrying out calculation processing, by motion control card,
It is sent respectively to voice coil motor servo amplifier and straight line precision unit servo amplifier, further drives voice coil linear electricity
The movement of machine servo amplifier and piezoelectric ceramic actuator.
A kind of control process of the macro micro- integrated motion parallel connection mechanism device of Three Degree Of Freedom is as follows:
The first step, by grating displacement sensor for detecting linear motor slide block movement straight-line displacement, for detecting
The Spectral Confocal formula displacement sensor that straight line precision actuation unit fine motion is displaced and the short range laser for detecting micromotion platform
Distance measuring sensor reference zero detects the zero-bit of moving platform, carries out initial reset operation；
Second step, the macro dynamic positioning of micromotion platform, specifically: the motion profile for planning moving platform is passed using pattern displacement
Sensor detects the location information of linear motor sliding block, is sent to data collecting card and is next transferred to computer, by computer meter
Motion profile is calculated, the D/A conversion circuit for being then transported on trajectory signal to motion control card, which is exported to voice coil motor servo, to be put
Big device, control voice coil motor generate corresponding movement；
Third step, the precision positioning of micromotion platform, specifically: the Spectral Confocal formula for detecting precision actuation unit is displaced
Location information is sent to data collecting card and is next transferred to computer by sensor, calculates motion profile by computer, then
The D/A conversion circuit of transmission trajectory signal to motion control card is exported to straight line precision unit servo amplifier, controls piezoelectricity pottery
Porcelain driver generates corresponding movement；
4th step, under the driving positioning by second, third step, due to the influence of the factors such as temperature, deformation, friction,
Micromotion platform only moves near target anchor point, detects micromotion platform by the short range laser range sensor in three directions
Three sides range information, controlled after being sent to computer by the position that related algorithm calculates current micromotion platform
Control information is finally sent to motion control card by amount, continues the compensation control of micromotion platform, and final realization is accurate fixed
Position.
Dotted line in Fig. 1 indicates the line relationship between each equipment, and direction arrow, which is shown, detects and controls signal
The direction of transfer of stream.
In the present embodiment, using SPFO-B type automatic inflating balance vibration-isolating platform, specification 750mm × 750mm ×
500mm, vibration isolating effect is strong, and intrinsic isolation frequency is 1Hz, and platform plane degree is less than 0.05mm/m2, and amplitude is less than 1.2um.
Voice coil motor is transported using the horizontal river company's T-VC85-L30 motor of Japan, the motor suitable for high-frequency short stroke
Dynamic system, the model motor range are 30mm, and Motion Resolution rate is less than 0.5um, meets the performance requirement of the macro dynamic transmission of the present apparatus,
The motor direct-drive, the anodontia effect of grooves, height response, mover is contactless with stator, effectively reduces total friction between device.It should
Motor use horizontal II -03 serial motors driver of river VC, have self-setting function, can Auto-matching rotary inertia and parameter,
The compatibility of ready-made network can be achieved.
Piezoelectric ceramic actuator uses PI Corp.'s model P-840.3 piezoelectric ceramic actuator, range 45um, and peak value pushes away
Power 1000N, resonance frequency 10KHz, Subnano-class are differentiated；The piezoelectric ceramics actuator is full porcelain insulating, without lubrication when use,
Abrasion is not will cause；Driver geometric dimension is 12mm × 68mm.Electronic control unit is PI Corp. E-503 piezoelectric ceramics controller.
For the present embodiment using German rice iridium IFS-2405-0.3 spectral confocal sensor, which is exclusively for high-precision
It is required that measurement task and design, which possesses high susceptibility, biggish mounted angle and mounting distance, makes it can
For various application occasions；The sensor detects linearity measuring range 0.3mm, resolution ratio 10nm；Grating displacement sensor is big using meaning
2320 grating sensor of sharp GIVI MISUER company ISA effectively detects stroke 120mm, resolution ratio 0.5um.
Short range laser displacement sensor is differentiated using the western gram OD5-25T01 measuring head of Germany, 25 ± 1mm of measurement range
Rate 20nm, the measuring head use advanced Measurement Algorithm and multiple diameter hot spot, have high reliability and high measurement accuracy.
NSK company, Japan precision angular contact ball bearing, model 7900-A5-NSK precision corner can be selected in high-precision rotary bearing
Contact ball bearing.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by the embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (10)
1. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device, which is characterized in that including basic machine part, detection part and
Control section；
The basic machine part includes air floating platform, the quiet pedestal of platform, micromotion platform, the driving macro dynamic macro dynamic branch of micromotion platform
Chain and the fine motion branch for driving micromotion platform precision micromotion；
The macro dynamic branch is made of the voice coil motor of three same sizes, and three voice coil motors are in the quiet pedestal of platform
On circumferentially arrange, be mutually 120 degree；
The fine motion branch includes fine motion transmission shaft；Fine motion transmission shaft one end is connect with micromotion platform, the other end and sound
Enclose linear motor connection；
The detection part includes the grating displacement sensor that macro dynamic branch is arranged in, the Spectral Confocal formula that fine motion branch is arranged in
Displacement sensor and the short range laser range sensor that the quiet pedestal of platform is set；
The control section respectively with detection part, macro dynamic branch and fine motion branch chain link.
2. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 1, which is characterized in that the control
Part includes data collecting card, computer, motion control card, voice coil motor servo amplifier and the amplification of straight line precision unit servo
Device；
Grating displacement sensor, Spectral Confocal formula displacement sensor and short range laser range sensor acquire signal input data
Capture card, the data collecting card are connect with computer, and computer and motion control card are connected with each other, motion control card output control
Signal processed further drives macro dynamic branch and fine motion branch to voice coil motor servo amplifier and straight line precision unit servo amplifier
Chain movement.
3. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 1, which is characterized in that the fine motion
Transmission shaft includes fine motion transmission shaft matrix, flexible hinge and fine motion transmission shaft movable block, and the fine motion transmission shaft matrix passes through soft
Property hinge connect with fine motion transmission shaft movable block, one end of the fine motion transmission shaft matrix passes through fixing axle and voice coil motor
The movement of voice coil motor is transferred to fine motion transmission shaft by connection, the fine motion transmission shaft movable block by multi-diameter shaft with it is micro-
Moving platform connection.
4. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 3, which is characterized in that the voice coil
Linear motor includes guide rail, voice coil motor sliding block, voice coil motor push plate, voice coil motor coil, voice coil linear
Motor sleeve, voice coil motor supporting plate and voice coil motor bottom plate, voice coil motor bottom plate are fixed on the quiet pedestal of platform
On, voice coil motor sliding block opposite sound on guide rail under voice coil motor push plate and the promotion of voice coil motor coil
Enclose the movement of linear motor bottom plate, voice coil motor sliding block and fixed axis connection.
5. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 3, which is characterized in that the fine motion
Transmission shaft matrix is equipped with piezoelectric ceramic actuator, driver adjustment block and driver fixed block, the piezoelectric ceramic actuator
Tail end connect with driver adjustment block, head end is connect with driver fixed block, and the driver adjustment block is fixed on fine motion
On transmission shaft matrix, the driver adjustment block is fixed on fine motion transmission shaft movable block.
6. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 3, which is characterized in that the fine motion
Transmission shaft matrix is equipped with clump weight.
7. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 4, which is characterized in that the voice coil
Motor-grating scale link block is additionally provided on linear motor sliding block.
8. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 3, which is characterized in that the fine motion
Shifting axle movable block is fixed with fine motion detection block, and when fine motion shifting axle movable block is mobile, detection block is driven generation relative spectral
The displacement of confocal displacement sensor.
9. a kind of Three Degree Of Freedom macro/micromotion parallel-connection structure device according to claim 1, which is characterized in that the fine motion
Transmission shaft is processed by a metal plate through line cutting technology.
10. a kind of control method of such as described in any item Three Degree Of Freedom macro/micromotion parallel-connection structure devices of claim 1-9,
It is characterized in that, comprising:
Respective sensor is carried out initial reset operation by the first step；
Second step, the macro dynamic positioning of micromotion platform, specifically: planning the motion profile of micromotion platform, sensed using pattern displacement
Device detects the location information of macro dynamic branch, is sent to data collecting card, and be sent to computer, calculates movement rail by computer
Mark, the D/A conversion circuit for being then transported on trajectory signal to motion control card are exported to voice coil motor servo amplifier, control
Voice coil motor generates corresponding movement；
Third step, the precision positioning of micromotion platform, specifically: the Spectral Confocal formula displacement sensor for detecting fine motion branch will
Location information is sent to data collecting card, then passes to computer, calculates motion profile by computer, is then transported on track letter
It number exports to the D/A conversion circuit of motion control card to straight line precision unit servo amplifier, controls piezoelectric ceramic actuator and produce
Raw corresponding movement；
4th step, under the driving positioning by second, third step, due to the influence of the factors such as temperature, deformation, friction, fine motion
Platform only moves near target anchor point, detects the three of micromotion platform by the short range laser range sensor in three directions
The range information on side, is sent to after computer and obtains control amount by the position that related algorithm calculates current micromotion platform, most
Control information is sent to motion control card afterwards, continues the compensation control of micromotion platform, final realize is accurately positioned.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111421526A (en) * | 2020-04-27 | 2020-07-17 | 无锡富瑞德测控仪器股份有限公司 | Large-stroke multi-degree-of-freedom nanoscale positioning device and control method |
| CN116092571A (en) * | 2022-12-15 | 2023-05-09 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003207719A (en) * | 2002-01-16 | 2003-07-25 | Yamato Tekkosho:Kk | Automatic stage tracking device for microscope with image processing function |
| CN101221273A (en) * | 2008-01-30 | 2008-07-16 | 哈尔滨工业大学 | Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device |
| US20080309276A1 (en) * | 2007-06-18 | 2008-12-18 | Xradia, Inc. | Five Axis Compensated Rotating Stage |
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104760039A (en) * | 2015-03-16 | 2015-07-08 | 华南理工大学 | Laser displacement sensor based parallel platform vibration detection control device and method |
| CN106313013A (en) * | 2016-10-25 | 2017-01-11 | 华南理工大学 | Macro-micro integrated motion high-precision parallel mechanism device and control method |
| CN108106547A (en) * | 2018-01-17 | 2018-06-01 | 华南理工大学 | The grand micro- compound alignment system of planar three freedom and method based on laser sensor |
| CN211103963U (en) * | 2019-08-29 | 2020-07-28 | 华南理工大学 | Three-degree-of-freedom macro and micro motion parallel structure device |
-
2019
- 2019-08-29 CN CN201910807905.2A patent/CN110421553B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003207719A (en) * | 2002-01-16 | 2003-07-25 | Yamato Tekkosho:Kk | Automatic stage tracking device for microscope with image processing function |
| US20080309276A1 (en) * | 2007-06-18 | 2008-12-18 | Xradia, Inc. | Five Axis Compensated Rotating Stage |
| CN101221273A (en) * | 2008-01-30 | 2008-07-16 | 哈尔滨工业大学 | Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device |
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN104110561A (en) * | 2014-06-25 | 2014-10-22 | 华南理工大学 | Large-stroke planar three-degree-of-freedom precision positioning platform based on compliant mechanism |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104760039A (en) * | 2015-03-16 | 2015-07-08 | 华南理工大学 | Laser displacement sensor based parallel platform vibration detection control device and method |
| CN106313013A (en) * | 2016-10-25 | 2017-01-11 | 华南理工大学 | Macro-micro integrated motion high-precision parallel mechanism device and control method |
| CN108106547A (en) * | 2018-01-17 | 2018-06-01 | 华南理工大学 | The grand micro- compound alignment system of planar three freedom and method based on laser sensor |
| CN211103963U (en) * | 2019-08-29 | 2020-07-28 | 华南理工大学 | Three-degree-of-freedom macro and micro motion parallel structure device |
Non-Patent Citations (1)
| Title |
|---|
| 徐祥和: "激光检测技术及应用", 国防工业出版社, pages: 1 - 9 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111421526A (en) * | 2020-04-27 | 2020-07-17 | 无锡富瑞德测控仪器股份有限公司 | Large-stroke multi-degree-of-freedom nanoscale positioning device and control method |
| CN111421526B (en) * | 2020-04-27 | 2023-10-20 | 无锡富瑞德测控仪器股份有限公司 | Large-stroke multi-degree-of-freedom nanoscale positioning device and control method |
| CN116092571A (en) * | 2022-12-15 | 2023-05-09 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
| CN116092571B (en) * | 2022-12-15 | 2024-03-26 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
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