TWI572542B - Workpiece cable assembly - Google Patents

Description

Workpiece table cable device

The present invention relates to the field of semiconductor lithography apparatus, and more particularly to a workpiece stage cable device.

In the semiconductor lithography equipment, the precision cymbal stage motion system such as the cymbal stage and the mask table is an extremely important key component. The positioning accuracy directly affects the performance of the lithographic apparatus, and its operating speed directly affects the production efficiency of the lithographic apparatus. . With the continuous improvement of the integration of ultra-large integrated circuit devices, the lithography resolution is continuously enhanced, and the requirements for the characteristic line width index of the lithography machine are also constantly improved, and the corresponding slab table operation speed, acceleration and accuracy requirements are required. It is also constantly improving.

The typical structure of the lithography machine slab system is a combination of coarse and micro-motion. Because the plane motor has the characteristics of high output density, high speed, high reliability, and easy to integrate it into the controlled object, it has a response speed. Fast, high control sensitivity, simple mechanical structure, etc., has been used in semiconductor lithography equipment to achieve long stroke coarse motion of the cymbal stage. However, since the flat motor is used to realize the long-stroke and coarse-moving cymbal table without X- and Y-direction guide rails, various communication cables, power cables, and pipeline facilities such as air pipes and water pipes for supporting the cymbal table need to follow the cymbal. The table moves in the XY plane, so it is necessary to provide a cable support guide. The common cymbal station cable facility is passively following the cymbal stage in XY flat In-plane motion, when the cymbal stage is performing high-speed motion and nano-level precise positioning, the disturbance caused by the dragged pipeline facility on the cymbal stage will not be negligible.

At present, there is a stencil stage system which uses a flat motor to drive a cymbal table to realize long stroke and coarse motion. The cable support guiding device mainly comprises a set of V-shaped connecting rod elements connected by a rotating couple, one end of the connecting rod element It is mounted on the slide table by rotating the coupler, and the other end is mounted on the cymbal table by the rotary couple. The cymbal table cable assembly is transferred from the slide table along the link member to the cymbal table, and together with the link assembly in the Y direction Passively follow the movement of the cymbal stage. The pipeline facility of this scheme has support in the vertical direction to avoid friction with the work surface when drooping, but passively follows the movement of the rafter in the Y direction, which still affects the positioning accuracy of the rafter.

There is also a cable table of a lithography machine cymbal stage using a multi-joint robot, the cable station comprising a control device and at least one multi-joint robot, and the slab stage facility is accessed by a multi-joint robot. On the stage, by controlling the rotation angle of each joint driver, the pipeline facility actively follows the movement of the cymbal stage in the XY plane, which avoids the influence of the pipeline facility on the positioning accuracy of the rafter movement. However, the cable table has a complicated structure, and the number of bending times of the cable during the high-speed movement is too large, which affects the service life of the cable; the number of the joints of the manipulator leads to a large number of drives, and the redundant degree of freedom robot control The system design is complex and the development cost is relatively high.

The invention provides a workpiece table cable device to solve the problem that the cable passively follows the movement of the cymbal table in the prior art.

In order to solve the above technical problem, the present invention provides a workpiece table cable device, comprising: a workpiece table; a cymbal table mounted on an upper side of the workpiece table; a cable connection station, Mounted on the lower side of the workpiece table; the cable device has two ends connected to the cymbal table and the cable connection table respectively; the X-direction motion device is connected to the cable connection table, and drives the cable connection table to follow The cymbal stage moves in the X direction; and the Y-direction motion device is connected to the cable connection station, and drives the cable connection station to follow the cymbal stage to move in the Y direction, wherein the X direction and the Y direction are mutually in a horizontal plane Orthogonal two directions.

Preferably, a differential sensor is mounted between the cable device and the cymbal stage.

Preferably, the Y-direction moving device comprises: a sliding table fixed to one side of the bottom of the workpiece table in the Y direction; a slider slidable along the sliding table; and a guiding device, the guiding device is disposed along the X direction, One end is mounted on the slider, and the other end is mounted on the cable connecting platform, so that the Y-direction relative position of the slider and the cable connecting station remains unchanged; the X-direction moving device includes: a moving mechanism, one end of which is installed On the slider, the other end is mounted on the cable connecting table; and, the motor is controlled to control the movement of the moving mechanism in the X direction.

Preferably, the guiding device is a guiding rod, one end of the guiding rod is fixedly connected to the cable connecting table, and the other end of the guiding rod is inserted into the sliding rod and can slide in the X direction in the sliding rod .

Preferably, the guiding rod is a linear guiding device, and a mechanical bearing, or an air bearing, or a magnetic bearing is disposed between the guiding rod and the sliding rod.

Preferably, the moving mechanism is a mechanical arm, the mechanical arm includes a first link and a second link, the first end of the first link is connected to the control motor, and the second end of the first link The first end of the second link is connected by a rotating joint, and the second end of the second link is hinged with the cable connecting station.

Preferably, the control motor is a rotary electric machine that controls the rotation of the first end of the first link.

Preferably, the rotary electric machine is further provided with a rotary encoder.

Preferably, the moving mechanism is a linear slide rail, and the linear slide rail comprises an X-direction rail and a fixed block sliding along the rail, and one end of the rail is fixedly connected to the slider, and the cable connecting platform is fixed to the slider On the fixed block.

Preferably, the control motor is a linear motor, and the linear motor controls the fixed block to perform linear motion along the track.

Preferably, the linear motor is further provided with a linear encoder.

Preferably, the bottom of the workpiece table is provided with a first magnetic steel array, and the cable connecting table is provided with a second magnetic steel array corresponding to the first magnetic steel array.

Preferably, the bottom of the workpiece stage is provided with a first coil array, and the cable connection table is provided with a second coil array corresponding to the first coil array.

Preferably, the cymbal stage is internally provided with an array of Hall sensors, and a follower sensor is disposed between the cable device and the cymbal stage.

Preferably, the cable device comprises a cable and a cable sleeve sleeved on the outside of the cable, and the cable sleeve is provided with a spacer.

Preferably, the cable uses a flexible cable.

Preferably, the cable jacket is made of a material having a high modulus of elasticity, a high stiffness, and a low density, such as carbon fiber, ceramic, or tantalum carbide.

Compared with the prior art, the invention has the following advantages: the workpiece table cable device provided by the invention has the following advantages: 1. The invention can effectively support and drive the cable device to synchronously follow the movement of the cymbal table. The cable is packaged with high rigidity, high elastic modulus and low density structural components, and the cable and the cymbal table are relatively stationary during movement, and the cable structure is rigid. And the high mode, the disturbance caused by the slab stage during the movement of the cable equipment is minimized, thereby improving the motion positioning accuracy of the cymbal stage; The mechanical structure and control algorithm are relatively simple. For different lithography machine workpiece tables, the length of the X-direction motion device can be flexibly designed according to the limit stroke of the cymbal table in the X direction, and the structure is simple.

110‧‧‧Workpiece table

120‧‧‧矽片台

130‧‧‧Cable equipment

131‧‧‧ Cable

132‧‧‧ Cable sleeve

133‧‧‧ compartment

140‧‧‧Cable connection

151‧‧‧ slide table

152‧‧‧ Slider

153‧‧‧guides; guide bars

161‧‧‧ Robotic arm

162‧‧‧Rotating motor

210‧‧‧Workpiece table

220‧‧‧矽片台

230‧‧‧Cable equipment

240‧‧‧Cable connection

251‧‧‧ slide table

252‧‧‧ Slider

261‧‧‧ Track

262‧‧‧Fixed block

310‧‧‧Workpiece table

320‧‧‧矽片台

330‧‧‧Cable equipment

340‧‧‧Cable connection

350‧‧‧ (first) magnetic steel array; (first) coil array

1611‧‧‧ Connecting rod

1611a‧‧ (first) connecting rod

1611b‧‧‧(second) connecting rod

1612‧‧‧Rotary joints

X‧‧‧X direction

Y‧‧‧Y

1 is a schematic structural view of a workpiece table cable device according to Embodiment 1 of the present invention.

Figure 2 is a plan view of Figure 1.

3 and 4 are layout views of the cable connecting table in the first embodiment of the present invention at the maximum stroke and the minimum stroke, respectively.

Fig. 5 is a schematic structural view of a cable device of a workpiece table cable device of the present invention.

Figure 6 is a cross-sectional view of Figure 5.

Fig. 7 is a schematic structural view of a workpiece table cable device according to a second embodiment of the present invention.

FIG. 8 is a schematic structural view of a workpiece table cable device according to Embodiment 3 of the present invention.

Figure 9 is a plan view of Figure 8.

The above described objects, features and advantages of the present invention will become more apparent from the aspects of the appended claims. Need to explain The drawings of the present invention are in a simplified form and both use non-precision ratios, and are merely for convenience and clarity of the purpose of the embodiments of the present invention.

The workpiece table cable device provided by the present invention, as shown in FIGS. 1 to 4, includes a workpiece table 110, a cymbal stage 120, a cable device 130, a cable connection station 140, and an X-direction motion device and a Y-direction movement. The device, the cymbal stage 120 and the cable connection table 140 are respectively mounted on the upper side and the lower side of the workpiece stage 110, and both ends of the cable device 130 are connected to the cymbal stage 120 and the cable connection stage 140, respectively. Specifically, the cable device 130 and the cymbal stage 120 are flexibly connected to ensure flexible decoupling between the cable device 130 and the cymbal stage 120, and the cable device 130 is rigidly connected with the cable connection station 140 to make the cable The connecting station 140 drives the cable device 130 to move synchronously during the movement, and there is no need to follow the control between the cable device 130 and the cymbal table 120. The X-direction motion device is coupled to the cable connection station 140 and moves in the X direction, the Y-direction motion device being coupled to the cable connection station 140 and moving in the Y-direction. The cymbal stage 120 is suspended on the workpiece table 110 by the force between the moving and the stator of the plane motor (not shown), and the cymbal stage 120 realizes the movement and positioning of the six degrees of freedom in the space by the plane motor. The X-direction motion device and the Y-direction motion device drive the cable connection station 140 to follow the movement of the cymbal stage 120 to reduce the disturbance caused by the cable device 130 to the movement of the cymbal stage 120, and reduce the cable device 130 in the cymbal. The number of bendings in the movement of the table 120 increases the service life of the cable device 130. At the same time, the invention has a simple structure and a low cost.

Example 1:

Referring to FIG. 1 to FIG. 4, the Y-direction moving device includes a slide table 151 fixed to the bottom edge of the workpiece stage 110, a slider 152 capable of sliding along the slide table 151, and a guide arranged along the X direction. To the device 153, one end of the guide 153 is attached to the slider 152, and the other end is attached to the cable connecting table 140. The X-direction motion device includes a motion mechanism and a control motor. One end of the motion mechanism is connected to the control motor, and the other end is mounted on the cable connection station 140. The control motor controls the X-direction movement of the motion mechanism. Preferably, the guiding device is a guiding rod 153. Preferably, the guiding rod 153 is a linear guiding device, and a mechanical bearing, or an air bearing, or a magnetic bearing is disposed between the guiding rod 153 and the sliding rod 152. One end of the guiding rod 153 is fixedly connected to the cable connecting table 140, and the other end of the guiding rod 153 is inserted into the slider 152 and can slide in the X direction with respect to the slider 152, and is synchronized with the slider 152 in the Y direction. Therefore, when the slider 152 moves in the Y direction along the sliding table 151, the guiding rod 153 drives the cable connecting station 140 to follow the slider 152 to perform synchronous movement in the Y direction; preferably, the moving mechanism is the mechanical arm 161, the mechanism The arm 161 includes two links respectively being a first link 1611a and a second link 1611b, and a rotating contact 1612 connecting the two links 1611a and 1611b, the first end of the first link 1611a and the control The motor is connected, the second end of the first link 1611a is connected to the first end of the second link 1611b through the rotating contact 1612, and the second end of the second link 1611b is hinged to the cable connecting station 140 to connect the cable. The stage 140 is decoupled in the Rz direction; preferably, the control motor is a rotating electric machine 162, and the rotating electric machine 162 controls the rotation of the first end of the first connecting rod 1611a, thereby driving the second connecting rod 1611b and the cable connecting station 140. Move in the X direction accordingly. Preferably, the rotary electric machine 162 is further provided with a rotary encoder (not shown) for measuring the movement state of the mechanical arm 161. During the movement, only the rotary motor 162 is driven to drive the mechanical arm 161 and cooperate with the movement of the slide table 151 in the Y direction, so that the cable connection station 140 can be driven to follow the cymbal stage 120 to perform an active following movement in the XY plane, since the cymbal stage When the 120 is in motion, the rotating electric machine 162 drives the two connecting rods 1611a and 1611b to move, the mechanical arm 161 drives the cable connecting station 140 to move, the cable device 130 ends and the cable connection The docking station 140 is a rigid connection. Therefore, the cable connecting station 140 and the cable device 130 together realize active following in the X and Y directions, and can ensure the movement track, speed and acceleration of the cable device 130 and the cymbal stage 120. The consistency of the cymbal stage 120, the cable device 130, and the cable connection station 140 remains relatively stationary during exercise.

Preferably, referring to FIG. 1 to FIG. 4, a differential sensor (not shown) is installed between the cable device 130 and the cymbal stage 120, when the cymbal stage 120 moves in the X and Y directions. Through the differential sensor, the cable device 130 follows the cymbal stage 120 and always maintains the relative position of the two, and when the cymbal stage 120 is initialized, the differential sensor at its position can be The cymbal stage 120 provides zero measurement.

Specifically, referring to FIG. 1 to FIG. 4, the initialization process of the cymbal stage 120 is: after the power is turned on, the slide table 151 measures the positional relationship with the workpiece stage 110 through a Y-direction grating scale (not shown). Since the cable connection station 140 is connected to the slide table 151, the cable device 130, the cable connection table 140, and the slide table 151 can be regarded as one body during the initialization process. Therefore, the position of the three is the slide table 151. a position sensor; a differential sensor is disposed between the cable device 130 and the cymbal stage 120. At the initialization time, the cymbal stage 120 measures the relative position with the cable device 130 through the differential sensor, thereby determining the cymbal stage. The positional relationship between the 120 and the slide table 151 is such that, by relative measurement, the positional relationship of the cymbal stage 120 with respect to the table 110 can be determined to complete the initialization.

Referring to FIG. 3 and FIG. 4, when the cymbal stage 120 is in the transfer position, the cymbal stage 120 will move to a distance far from the edge of the workpiece stage 110 (as shown in FIG. 3), at this time, through the mechanical arm. Driven by 161, the cable connecting station 140 can drive the cable device 130 to follow the cymbal stage 120 to reach the handover position, and keep the relative positions of the two ends of the cable device 130 unchanged (double handover) In the case of the chip unit, it is not necessary to consider such a condition; when the cymbal stage 120 is in the swap position, the two cymbal stages 120 are moved to the extreme edge limit of the workpiece stage 110 (as shown in FIG. 4). After the mechanical arm 161 is bent, the cable connecting table 140 is moved to the X-direction edge position of the workpiece table 110, following the movement of the cymbal stage 120, and the cable device 130 can be realized by the redundant degree of freedom of the mechanical arm 161. A linear motion between long and short distances.

It should be noted that, since the mechanical arm 161 has a cantilever structure, a magnet and an air floating pad can be pre-installed in the cable connecting station 140, and a steel plate can be installed on the bottom of the workpiece table 110 to provide a vertical preload of the cable connecting station 140. The force, thereby increasing the rigidity of the mechanical arm 161 and the cable connecting table 140 in the vertical direction.

For example, referring to FIG. 5 and FIG. 6 , the cable device 130 includes a cable 131 and a cable sleeve 132 sleeved on the outside of the cable 131 . The cable sleeve 132 is provided with a spacer 133 . Specifically, the cable 131 is a flexible cable; the cable sleeve 132 is made of one of carbon fiber, ceramic, or tantalum carbide. In the cymbal stage 120, the cable 131 to be used includes: a signal line, a power line, a gas pipe, and a water pipe. In this embodiment, a flexible cable having a lighter material and a smaller line width is used instead of the conventional cable. The line width of the flexible cable is generally 0.2~1mm, which is much smaller than the ordinary cable width, and the quality is lighter after packaging, which can effectively reduce the interference of the cable 131 on the movement of the cymbal stage 120. The cable sleeve 132 is made of a material with low density, high rigidity and high elastic modulus, such as carbon fiber, ceramics, tantalum carbide, etc., to support and guide the cable 131, and at the same time, improve the height and structural mode of the cable 131. And eliminates the phenomenon that the cable 131 may sway and sag at one end of the U-bend, which may affect the movement of the guide rail. A spacer 133 is disposed in the cable cover 132 to separately place different types of cables 131 to prevent mutual interference between the layers.

Please continue to refer to FIG. 5 and FIG. 6, when the cable 131 is laid out, water pipes, air pipes, etc. The tube with a larger line width is used as a single layer (as shown in the right half of Figure 6), and the line with a small line width is overlapped by two to three layers, and is arranged side by side with a tube having a large line width such as a water pipe or a gas pipe. Place it (as in the left half of Figure 6). The layers of the layers are separated by a partition 133 in the cable sleeve 132 to reduce mutual interference between the lines. The cable device 130 adopts the horizontal and side-by-side layout of the cable to reduce the overall thickness of the cable device 130, and the vertical U-bend mode (see FIG. 5) can further reduce the cable volume.

In this embodiment, the motion of the cable device 130 relative to the cymbal stage 120 is adopted. This solution can minimize the disturbance caused by the cable device 130 to the cymbal stage 120 during the movement, and improve the motion positioning accuracy of the cymbal stage 120. Moreover, since the cable device 130 does not generate stretching, pulling, and the like during the movement, the service life of the cable device 130 can be effectively extended.

Example 2:

As shown in FIG. 7, the difference between the embodiment and the embodiment 1 is that the moving mechanism is a linear slide, and the linear slide includes an X-direction track 261 and a fixed block 262 sliding along the track 261. One end of the track 261 Fixedly connected to the slider 252, the cable connection station 240 is fixed on the fixing block 262; the control motor is a linear motor (not shown), and the linear motor control fixing block 262 linearly moves along the track 261, preferably The linear motor is further provided with a linear encoder (not shown). That is, the Y-direction moving device is the same as that of Embodiment 1, and includes a slide table 251 fixed to the bottom edge of the workpiece stage 210, and a slider 252 capable of sliding along the slide table 251; and a moving mechanism in the X-direction moving device Then it is a linear slide rail, such as a linear motor, a screw rod, a rotary motor, etc.; the control motor is a linear motor, and the guiding device is a track 261, so that the drive The device (not shown) drives the slider 252 to move along the sliding table 251 to drive the cable connecting station 240 to move in the Y direction. The linear motor controls the fixing block 262 in the linear sliding rail to slide along the track 261 to drive the cable. The connecting station 240 moves in the X direction to achieve the relative rest of the cable device 230 and the cymbal stage 220, so as to reduce the disturbance caused by the cable device 230 to the cymbal stage 220 during the movement, and improve the motion positioning accuracy of the cymbal stage 220. At the same time, the service life of the cable device 230 is effectively extended.

Example 3:

This embodiment differs from Embodiments 1 and 2 in that both its X-direction motion device and Y-direction motion device are provided by a magnetic steel array or a coil array.

Preferably, referring to FIG. 8 and FIG. 9, the bottom of the workpiece table 310 is provided with a first magnetic steel array (or first coil array) 350, and the cable connecting platform 340 is provided with a first magnetic steel array (or first The coil array 350 corresponds to a second magnetic steel array (or second coil array). The first magnetic steel array (or first coil array) 350 and the second magnetic steel array (or second coil array) constitute a planar motor, thereby controlling the relative movement of the cable connecting table 340 in the X, Y directions.

Preferably, referring to FIG. 8 and FIG. 9 , the slab stage 320 is internally provided with a Hall sensor array (not shown), and the following is provided between the cable device 330 and the cymbal stage 320 . A device (not shown) is used to measure the relative position between the cable device 330 and the cymbal stage 320.

Specifically, referring to FIG. 8 and FIG. 9 , the initialization process of the film stage 320 is: the array of the Hall sensor is disposed inside the film stage 320, and the cable device 330 and the film stage 320 are provided. A follower sensor is disposed between the position of the workpiece stage 310 and the position of the cable connecting table 340 relative to the workpiece stage 310 through the Hall sensor array; the cable device One end of the 330 connected to the cymbal stage 320 is equipped with a follower sensor, such as a differential sensor for follow-up. At this time, the differential sensor is used to measure the positional relationship between the cymbal stage 320 and the cable device 330. And complete the initialization.

In this embodiment, when the cymbal stage 320 is moved in the X and Y directions, the planar cable motor composed of the magnetic steel array or the coil array is controlled, and the bottom cable connecting table 340 follows the trajectory of the cymbal stage 320. The cable device 330 is driven to move together to implement active follow-up of the cable device 330 in the X and Y directions.

In summary, the workpiece station cable device provided by the present invention comprises: a workpiece table, a cymbal table, a cable device, a cable connection station, and an X-direction motion device and a Y-direction motion device, and the cymbal table and Cable connecting stations are respectively mounted on the upper side and the lower side of the workpiece table, and two ends of the cable device are respectively connected to the cymbal stage and the cable connecting station, and the X-direction moving device is connected to the cable connecting station and along X-direction movement, the Y-direction motion device is connected to the cable connection station and moves in the Y direction. The invention utilizes an X-direction moving device that moves in the X direction and a Y-direction moving device that moves in the Y direction, and drives the cable connecting station to follow the cymbal stage in synchronous movement in the XY direction, so that the cable device follows the cymbal The movement of the platform reduces the disturbance caused by the cable equipment to the movement of the cymbal stage, reduces the number of bending of the cable equipment in the motion of the cymbal stage, and increases the service life of the cable equipment. At the same time, the invention has a simple structure and is convenient. achieve.

It will be apparent to those skilled in the art that various modifications and changes can be made in the invention without departing from the spirit and scope of the invention. Thus, if the modifications and variations of the present invention fall within the scope of the claims and the equivalents thereof, the present invention Intentions include these changes and variations.

110‧‧‧Workpiece table

120‧‧‧矽片台

130‧‧‧Cable equipment

140‧‧‧Cable connection

151‧‧‧ slide table

152‧‧‧ Slider

153‧‧‧guides; guide bars

161‧‧‧ Robotic arm

162‧‧‧Rotating motor

1611a‧‧ (first) connecting rod

1611b‧‧‧(second) connecting rod

1612‧‧‧Rotary joints

X‧‧‧X direction

Y‧‧‧Y

Claims (17)

A workpiece table cable device, comprising: a workpiece table; a cymbal table mounted on an upper side of the workpiece table; a cable connection station mounted on a lower side of the workpiece table; and a cable device, the two ends of which are respectively connected To the cymbal stage and the cable connection table; the X-direction motion device is connected to the cable connection station, and drives the cable connection station to follow the cymbal stage to move in the X direction; and the Y-direction motion device is connected to the line The cable connecting table drives the cable connecting table to follow the cymbal table in the Y direction, wherein the X direction and the Y direction are two directions orthogonal to each other in the horizontal plane, and the X-direction moving device and the Y-direction moving device drive The cable connection station moves synchronously following the cymbal stage and always maintains the relative position of the two. The workpiece stage cable device of claim 1, wherein a differential sensor is further installed between the cable device and the cymbal stage. The workpiece stage cable device of claim 1, wherein the Y-direction moving device comprises: a sliding table fixed to a side of the bottom of the workpiece stage in a Y direction; a slider capable of sliding along the sliding table; a guiding device, the guiding device is disposed along the X direction, one end of which is mounted on the slider, and the other end is mounted on the cable connecting platform, so that the Y-direction relative position of the slider and the cable connecting station remains unchanged; The X-direction moving device includes: a moving mechanism, one end of which is mounted on the slider and the other end is mounted on the cable connecting table; and a control motor for controlling the movement of the moving mechanism in the X direction. The workpiece table cable device of claim 3, wherein the guiding device is a guiding rod, one end of the guiding rod is fixedly connected to the cable connecting platform, and the other end of the guiding rod is disposed in the sliding rod And can slide in the X direction inside the slider. The workpiece table cable device of claim 4, wherein the guide bar is a linear guide device, and a mechanical bearing, or an air bearing, or a magnetic bearing is disposed between the guide bar and the slider. The workpiece table cable device of claim 3, wherein the motion mechanism is a mechanical arm, the mechanical arm includes a first link and a second link, and the first end of the first link and the control motor Connected, the second end of the first link is connected to the first end of the second link through a rotary joint, and the second end of the second link is hinged to the cable connection. The workpiece stage cable device of claim 6, wherein the control motor is a rotary electric machine that controls rotation of the first end of the first link. The workpiece table cable device of claim 7, wherein the rotary motor is further provided with a rotary encoder. The workpiece table cable device of claim 3, wherein the moving mechanism is a linear slide rail, and the linear slide rail comprises an X-direction rail and a fixed block sliding along the rail, and one end of the rail is fixedly connected to The slider, the cable connection station is fixed to the solid On the block. The workpiece table cable device of claim 9, wherein the control motor is a linear motor, and the linear motor controls the fixed block to perform linear motion along the track. The workpiece table cable device of claim 10, wherein the linear motor is further provided with a linear encoder. The workpiece table cable device of claim 1, wherein the bottom of the workpiece table is provided with a first magnetic steel array, and the cable connecting table is provided with a second magnetic steel corresponding to the first magnetic steel array. Array. The workpiece stage cable device of claim 1, wherein the bottom of the workpiece stage is provided with a first coil array, and the cable connection stage is provided with a second coil array corresponding to the first coil array. The workpiece stage cable device of claim 12 or 13, wherein the cymbal stage is internally provided with a Hall sensor array, and a follower sensor is disposed between the cable device and the cymbal stage. The workpiece station cable device of claim 1, wherein the cable device comprises a cable and a cable sleeve sleeved on the outside of the cable, and the cable sleeve is provided with a compartment. The workpiece stage cable device of claim 15, wherein the cable is a flexible cable. The workpiece stage cable device of claim 15, wherein the cable sleeve is made of one of carbon fiber, ceramic, or tantalum carbide.