CN102722088B - Non-contact coarse-fine motion layer positioning system and motion control method thereof - Google Patents

Abstract

The invention relates to a non-contact coarse-fine motion layer positioning system and a motion control method thereof. The positioning device comprises a micropositioner and two coarse positioning stages which are symmetrically arranged on the both sides of the micropositioner. The micropositioner is suspended above the two coarse positioning stages by a voice coil motor; the coarse positioning stages are non-mechanically connected and each coarse positioning stage is non-mechanically connected with the micropositioner; the SDOF (Six Degree of Free) motion of the micropositioner can be implemented; and the two coarse positioning stages move along the Y-axis direction. In the control method for controlling the motion along the Y-axis direction, a laser ruler signal is used as position feedback of the micropositioner along the Y-axis direction; the voice coil motor is utilized to drive so as to implement the motion of the micropositioner along the Y-axis direction; eddy current sensor signals are used as positional deviation between the coarse positioning stages and the micropositioner along the Y-axis direction; and the deviation is used as controller feedback to implement the synchronous movement of the coarse positioning stages and the micropositioner along the Y-axis direction.

Description

A kind of thick smart fold layer positioning system of non-contact type and motion control method thereof

Technical field

The present invention relates to the thick smart fold layer locating device kinetic control system of a kind of non-contact type, belong to semiconductor lithography apparatus field.

Background technology

The ultra-precision stage with nanoscale motion positions precision is one of semiconductor equipment critical component, as silicon wafer stage, mask platform etc. in litho machine.For realizing ultraprecise positioning requirements, be widely used as a kind of ultraprecise sports platform using air supporting and the floating performance element that is constrained to supporting way of magnetic.Air supporting constraint is as supporting and when guide effect, reduced the effects such as friction force that physical construction transmission causes, improved system motion positioning precision.During take linear electric motors as driver element, the Lorentz force being produced in permanent magnet array air-gap field by hot-wire coil provides driving force, changes the thrust of performance element by size of current in control coil, has advantages of simple structure and simple.

Conventionally the structure that adopts at present thick smart fold layer in lithographic equipment, comprises two coarse motion platforms and a micropositioner, between two coarse motion platforms, connects by a crossbeam, and micropositioner is arranged on crossbeam, realizes being synchronized with the movement of two coarse motion platforms and micropositioner by crossbeam.Connecting cross beam has increased the complicacy of structural design on the one hand, increase system architecture quality, larger quality will affect system motion response performance, on the other hand, in the time of structure motion, if two coarse motion platforms are along Y direction location deviation, owing to connecting beam action, make the coupling that produces acting force and reacting force between two coarse motion platforms, the performance of two coarse motion platforms is influenced each other, will affect the motion positions precision of system.Therefore design the thick smart fold layer locating device of machinery-free connection and design for the control method of this locating device significant.

Summary of the invention

The object of this invention is to provide a kind of locating device and position measurement and motion control arithmetic that is applied to semiconductor equipment, not only meet six-freedom motion positioning requirements, solve the problems such as the complex structure, the exercise performance that are caused by physical construction coupling in the moving rhythmo structure of the thick essence of current mask platform influence each other simultaneously.

Technical scheme of the present invention is as follows:

The thick smart fold layer positioning system of a kind of non-contact type, this control system comprises locating device, position-measurement device, drive unit and control module;

Locating device comprises that pedestal, micropositioner and two are arranged symmetrically in the coarse motion platform of micropositioner both sides, between two coarse motion platforms, between coarse motion platform and micropositioner, machinery-free is connected;

Position-measurement device comprises:

1) laser ruler, for measuring the absolute position of micropositioner barycenter along Y-axis;

2) two grating measuring devices, each grating measuring device comprises a grating scale and a read head, for measuring the displacement of coarse motion platform along Y direction;

3) seven current vortex sensors, for measuring the relative displacement between micropositioner and coarse motion platform, wherein:

The first current vortex sensor and the second current vortex sensor are arranged on the first coarse motion platform, be arranged in one along on the straight line of Y-axis, for measuring the relative position of micropositioner along X-axis and coarse motion platform, the first and second electric vortex sensor measuring values differential be the corner around Z axis as micropositioner;

The 3rd current vortex sensor is arranged on the first coarse motion platform, measures the relative position along Y direction between the first coarse motion platform and micropositioner; The 4th current vortex sensor is arranged on the second coarse motion platform, measures the relative position along Y direction between the second coarse motion platform and micropositioner;

The 5th current vortex sensor and the 6th current vortex sensor are arranged on the first coarse motion platform, and are positioned at one along on the straight line of Y-axis, and the 7th current vortex sensor is arranged on the second coarse motion platform, and are positioned at one article along on the straight line of X-axis with the 5th current vortex sensor; These three current vortex sensors are for measuring the absolute position of micropositioner along Z axis, the 5th current vortex sensor and the 6th electric vortex sensor measuring value differential be the corner around X-axis as micropositioner, and the 5th current vortex sensor and the 7th electric vortex sensor measuring value differential be the corner around Y-axis as micropositioner;

Drive unit comprises:

1) ten voice coil motors

Micropositioner comprises four voice coil motors that drive along Y direction, two voice coil motors that drive along X-direction and four voice coil motors that drive along Z-direction; The coil block of the first voice coil motor, the second voice coil motor, the 5th voice coil motor is fixed on the first coarse motion platform, permanent magnet assembly is fixed on micropositioner, the coil block of the 3rd voice coil motor, the 4th voice coil motor, the 6th voice coil motor is fixed on the second coarse motion platform, and permanent magnet assembly is fixed on micropositioner;

Subtonic circle motor, the 8th voice coil motor, the 9th voice coil motor, the tenth voice coil motor structure are identical, comprise outer magnetic ring, internal magnetic ring, cylindrical coil assembly, gravitational equilibrium magnetic post; The axis of outer magnetic ring and internal magnetic ring is along Z-direction, and outer magnetic ring is identical with internal magnetic ring magnetizing direction, radially and by annulus outside surface points to the center of circle; Cylindrical coil is between internal magnetic ring and outer magnetic ring, and coiling axis is along Z-direction; The axis of magnetic post is along Z-direction, and magnetizing direction is along Z axis positive dirction; The cylindrical coil assembly of subtonic circle motor, the 8th voice coil motor is fixed on the first coarse motion platform, and the cylindrical coil assembly of the 9th voice coil motor, the tenth voice coil motor is fixed on the second coarse motion platform;

2) two linear electric motors

Two linear electric motors are respectively for driving the first coarse motion platform and the second coarse motion platform;

Described control module comprises the industrial computer, numbered card, A/D card, D/A card and the driver that contain control program, numbered card gathers the increment signal of grating scale and laser ruler, A/D card gathers the signal of current vortex sensor, the signal collecting is inputed to industrial computer by numbered card and A/D card, industrial computer is controlled micropositioner and coarse motion platform using described signal as position feed back signal, steering order exports driver to by D/A card, driver output current, to motor, is realized the motion of micropositioner and coarse motion platform.

Based on described thick smart fold layer positioning system, adopt a kind of motion control method, this control method comprises the steps:

1) start at servo period, set the six-degree of freedom displacement amount of micropositioner, wherein x _dfor the displacement along X-axis, y _dfor the displacement along Y-axis, z _dfor the displacement along Z axis, θ _xdfor the corner displacement amount around X-axis, θ _ydfor the corner displacement amount around Y-axis, θ _zdfor the corner displacement amount around Z axis, the X-axis displacement signal of the first electric vortex sensor measuring that the Y-axis displacement signal that the laser ruler then numbered card being gathered is measured and A/D card gather, the Z axis angular signal that the first and second electric vortex sensor measuring value differences are moving, the moving X-axis angular signal of the 5th and the 6th electric vortex sensor measuring value difference, the Y-axis angular signal and the 5th that the 5th and the 7th electric vortex sensor measuring value difference is moving, the Z axis displacement signal of the 6th and the 7th electric vortex sensor measuring is as the feedback signal of micropositioner control loop, the first coarse motion platform Y-axis displacement signal of the 3rd electric vortex sensor measuring that A/D card is gathered and the second coarse motion platform Y-axis displacement signal of the 4th electric vortex sensor measuring are as the feedback signal of coarse motion platform control loop,

2) solve according to the micropositioner six-degree of freedom displacement amount of setting and feedback signal that each voice coil motor is corresponding exerts oneself, wherein the first voice coil motor, the second voice coil motor, the degree of freedom that the 3rd voice coil motor and the 4th voice coil motor control micropositioner move and rotate around Z axis along Y-direction, the degree of freedom that the 5th voice coil motor and the 6th voice coil motor control micropositioner move along directions X, subtonic circle motor, the 8th voice coil motor, the 9th voice coil motor and the tenth voice coil motor control micropositioner move along Z direction, the degree of freedom of rotating and rotating around Y-axis around X-axis, motor power output is calculated as follows:

${\mathrm{<figure-callout\; id="301"\; label="F"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">F</figure-callout>}}_{301}={\mathrm{<figure-callout\; id="302"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{302}=k_{p301}{e}_y+k_{d301}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="301"\; label="c"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">c</figure-callout>}}_{301}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{301}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+{\mathrm{<figure-callout\; id="301"\; label="b"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">b</figure-callout>}}_{301}}+k_{301}{e}_{{\mathrm{\&theta;}}_z}+k_{301}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="303"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{303}={\mathrm{<figure-callout\; id="304"\; label="F"\; filenames="HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{304}=k_{p303}{e}_y+k_{d303}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="303"\; label="c"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">c</figure-callout>}}_{303}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{303}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{303}}-k_{303}{e}_{{\mathrm{\&theta;}}_z}-k_{303}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="305"\; label="F"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">F</figure-callout>}}_{305}=F_{306}=k_{p305}{e}_x+k_{d305}{\stackrel{\&CenterDot;}{e}}_x+{\mathrm{<figure-callout\; id="305"\; label="c"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">c</figure-callout>}}_{305}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x}{|{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x|+{\mathrm{<figure-callout\; id="305"\; label="b"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">b</figure-callout>}}_{305}}$

$F_{307}=k_{p307}{e}_z+k_{d307}{\stackrel{\&CenterDot;}{e}}_z+c_{307}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z|+b_{307}}+k_{307}{e_{\mathrm{\&theta;}}}_x+k_{307}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x+k_{307}{e_{\mathrm{\&theta;}}}_y+k_{307}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{308}=k_{p308}{e}_z+k_{d308}{\stackrel{\&CenterDot;}{e}}_z+c_{308}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z|+b_{308}}+k_{308}{e_{\mathrm{\&theta;}}}_x+k_{308}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x-k_{308}{e_{\mathrm{\&theta;}}}_y-k_{308}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{309}=k_{p309}{e}_z+k_{d309}{\stackrel{\&CenterDot;}{e}}_z+c_{309}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z|+b_{309}}-k_{309}{e_{\mathrm{\&theta;}}}_x-k_{309}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x+k_{309}{e_{\mathrm{\&theta;}}}_y+k_{309}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{3010}=k_{p3010}{e}_z+k_{d3010}{\stackrel{\&CenterDot;}{e}}_z+c_{3010}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z|+b_{3010}}-k_{3010}{e_{\mathrm{\&theta;}}}_x-k_{3010}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x-k_{3010}{e_{\mathrm{\&theta;}}}_y+k_{3010}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

Wherein: F ₃₀₁be the first voice coil motor power output, F ₃₀₂be the second voice coil motor output, F ₃₀₃be the 3rd voice coil motor power output, F ₃₀₄be the 4th voice coil motor power output, F ₃₀₅be the 5th voice coil motor power output, F ₃₀₆be the 6th voice coil motor output, F ₃₀₇for subtonic circle motor power output, F ₃₀₈be the 8th voice coil motor power output, F ₃₀₉be the 9th voice coil motor power output, F ₃₀₁₀it is the tenth voice coil motor power output;

K _p301, k _p303, k _p305,k _p307, k _p308, k _p309, k _p3010, k _d301, k _d303, k _d305, k _d307, k _d308, k _d309, k _d3010, c ₃₀₁, c ₃₀₃, c ₃₀₅, c ₃₀₇, c ₃₀₈, c ₃₀₉, c ₃₀₁₀, a ₃₀₁, a ₃₀₃, a ₃₀₅, a ₃₀₇, a ₃₀₈, a ₃₀₉, a ₃₀₁₀, b ₃₀₁, b ₃₀₃, b ₃₀₅, b ₃₀₇, b ₃₀₈, b ₃₀₉, b ₃₀₁₀, k ₃₀₁, k ₃₀₃, k ₃₀₅, k ₃₀₇, k ₃₀₈, k ₃₀₉, k ₃₀₁₀for controlling parameter;

E _y=y _d-y, y _dfor micropositioner is along Y direction target location, y is laser ruler feedback signal,

for e _yto the first order derivative of time; e _x=x _d-x, x _dfor micropositioner is along the target location of X-axis, x is feedback signal,

for e _xto the first order derivative of time; e _z=z _d-z, z _dfor micropositioner is along the target location of Z axis, z is feedback signal,

for e _zto the first order derivative of time;

θ _xdfor micropositioner is around the target location of X-axis, θ _xfor feedback signal, for

to the first order derivative of time;

θ _ydfor micropositioner is around the target location of Y-axis, θ _yfor feedback signal,

for

to the first order derivative of time;

θ _zdfor micropositioner is around the target rotation angle of Z axis, θ _zfor feedback signal,

for

to the first order derivative of time;

Coarse motion platform only has the degree of freedom of y direction, its control system to keep coarse motion platform and micropositioner constant at the relative position of y direction, establish the first coarse motion platform and micropositioner relative position and keep y _cd1constant, the second coarse motion platform and micropositioner relative position keep y _cd2constant.In the motion control method of two coarse motion platforms, the first coarse motion platform is using the power output of the first voice coil motor and the second voice coil motor as feedforward, the 3rd current vortex sensor signal is the position deviation between micropositioner and the first coarse motion platform, realizes the first coarse motion platform moving along Y-axis take this deviation as feedback; The second coarse motion platform is using the power output of the 3rd voice coil motor and the 4th voice coil motor as feedforward, the 4th current vortex sensor signal is the position deviation between micropositioner and the second coarse motion platform, realize the second coarse motion platform along the moving of Y-axis take this deviation as feedback, coarse motion platform linear electric motors power output is calculated according to following formula:

$F_{1001}=F_{302}+F_{301}+k_{p1001}{e}_{y1001}+k_{d1001}{\stackrel{\&CenterDot;}{e}}_{y1001}+{\mathrm{<figure-callout\; id="1001"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1001}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}}{|{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}|+b_{1001}}$

$F_{1002}=F_{304}+F_{303}+k_{p1002}{e}_{y1002}+k_{d1002}{\stackrel{\&CenterDot;}{e}}_{y1002}+{\mathrm{<figure-callout\; id="1002"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1002}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}}{|{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}|+{\mathrm{<figure-callout\; id="1002"\; label="b"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">b</figure-callout>}}_{1002}}$

Wherein: F ₁₀₀₁be the first coarse motion platform linear electric motors power output, F ₁₀₀₂it is the second coarse motion platform linear electric motors power output;

K _p1001, k _p1002, k _d1001, k _d1002, c ₁₀₀₁, c ₁₀₀₂, a ₁₀₀₁, a ₁₀₀₂, b ₁₀₀₁, b ₁₀₀₂for controlling parameter;

E _y1001=y _cd1-y _c1, y _cd1be the first coarse motion platform and micropositioner target relative position, y _c1the 3rd current vortex sensor feedback signal;

for e _y100the derivative of 1 the 3rd current vortex sensor signal to the time;

E _y1002=y _cd2-y _c2, y _cd2be the second coarse motion platform and micropositioner target relative position, y _c2the 4th current vortex sensor feedback signal; for e _y1002to the derivative of time;

3) power output of each drive motor that basis solves obtains the steering order of each motor, this steering order is undertaken inputing to driver after digital-to-analog conversion by D/A card, driver pro rata output current drives corresponding motor, and then realizes the motion of micropositioner and coarse motion platform.

The present invention has the following advantages and the technique effect of high-lighting: the invention solves the problems such as the complex structure, the exercise performance that have mechanical structure Coupling effect to cause in the moving rhythmo structure of thick essence at present influence each other, designed lamination positioning device structure is simple, contactlessly eliminate friction, the invention provides six degree of freedom settlement method simultaneously, and a kind of control method, there is good control effect.

Accompanying drawing explanation

Fig. 1 is positioning device structure principle schematic of the present invention (axonometric drawing).

Fig. 2 is coarse motion platform axonometric drawing of the present invention.

Fig. 3 is coarse motion platform side view of the present invention.

Fig. 4 is micropositioner structural representation of the present invention (axonometric drawing).

Fig. 5 is the present invention's the first voice coil motor cut-open view.

Fig. 6 is the present invention's five notes of traditional Chinese music circle electric machine structure schematic diagram (axonometric drawing).

Fig. 7 is the 5th voice coil motor cut-open view.

Fig. 8 is subtonic circle electric machine structure schematic diagram of the present invention (axonometric drawing).

Fig. 9 is subtonic circle motor outer magnetic ring figure of the present invention.

Figure 10 is subtonic circle motor internal magnetic ring figure of the present invention.

Figure 11 is subtonic circle motor magnetic post figure of the present invention.

Figure 12 is voice coil motor coil position view of the present invention.

Figure 13 is grating scale schematic diagram of the present invention (axonometric drawing).

Figure 14 is grating scale front view of the present invention.

Figure 15 is the present invention the first current vortex sensor-tetra-current vortex sensor position views.

Figure 16 is the present invention five current vortex sensor-seven current vortex sensor position views.

Figure 17 is laser ruler position view of the present invention.

Figure 18 is laser ruler instrumentation plan of the present invention.

Figure 19 is laser ruler instrumentation plan of the present invention.

Figure 20 is control principle process flow diagram of the present invention.

In figure:

001-pedestal;

1001-the first coarse motion platform, 1002-the second coarse motion platform

101-linear electric motors, 102-support component, 103-director element, 104-Connection Element

200-micropositioner

201-the first voice coil motor, 202-the second voice coil motor, 203-the 3rd voice coil motor, 204-the 4th voice coil motor

211-First Line coil assembly, 212-the first permanent magnet assembly, 213-the second permanent magnet assembly

The main permanent magnet of 2121-first, the main permanent magnet of 2142-second, 2125-the 3rd main permanent magnet, 2131-the 4th main permanent magnet, 2133-the 5th main permanent magnet, 2135-the 6th main permanent magnet, the attached permanent magnet of 2122-first, the attached permanent magnet of 2124-second, 2132-the 3rd attached permanent magnet, 2134-the 4th attached permanent magnet, 2142-the first iron yoke

205-the 5th voice coil motor, 206-the 6th voice coil motor

221-the second coil block, 222-the 3rd permanent magnet assembly, 223-the 4th permanent magnet assembly, 2221-the 7th main permanent magnet, 2222-the 8th main permanent magnet, 2231-the 9th main permanent magnet, 2232-the tenth main permanent magnet, 2241-three-iron yoke, 2242-the 4th iron yoke

207-subtonic circle motor, 208-the 8th voice coil motor, 209-the 9th voice coil motor, 2010-the tenth voice coil motor

231-tertiary coil assembly, 232-outer magnetic ring, 233-internal magnetic ring, 234-magnetic post

401-the first current vortex sensor, 402-the second current vortex sensor, 403-the 3rd current vortex sensor, 404-the 4th current vortex sensor, 405-the 5th current vortex sensor, 406-the 6th current vortex sensor, 407-the 7th current vortex sensor

300-optical grating ruler measurement system

301-grating scale, 301-grating scale erecting frame, 302-grating scale adjusting gear, 303-grating scale, 304-read head, 305-grating scale zero mark

900-laser ruler, 901-catoptron

Embodiment

Below in conjunction with accompanying drawing, principle of the present invention, structure and the course of work are further illustrated to the present invention.

Fig. 1 is the structural representation (axonometric drawing) of locating device of the present invention.Locating device of the present invention comprises pedestal 001, micromotion platform 200, the first coarse motion platform 1001, the second coarse motion platform 1002, and these two coarse motion platforms are arranged symmetrically in micromotion platform 200 both sides.

The first coarse motion platform 1001 is identical with the second coarse motion platform 1002 structures, and Fig. 2 is the second coarse motion platform 1002 axis of no-feathering mappings, and Fig. 3 is the second coarse motion platform 1002 side views.The second coarse motion 1002 comprises linear electric motors 101, Connection Element 104, air supporting support component 102 and an air supporting director element 103.Connection Element 104 is affixed with linear electric motors, and air supporting support component 102 is connected with linear electric motors, and air supporting director element 103 is connected with air supporting support component 102.

The upper surface vis-a-vis of the lower surface of air supporting support component 102 and pedestal 001, support component 102 lower surfaces have pore, pore axis, along Z-direction, forms between air supporting support component 102 and pedestal 001 along the air supporting of Z-direction and supports, and air supporting supporting way adopts the mode of vacuum preload; The side vis-a-vis of the side of air supporting director element 103 and pedestal 001, there is pore the side of air supporting director element 103, and the axis of pore, along X-direction, forms air supporting guiding between air supporting director element 103 and pedestal 001, guide direction is along Y direction, the mode that air supporting mode is vacuum preload.

Fig. 4 is micropositioner 200 axis of no-feathering mappings, micropositioner 200 by the first voice coil motor 201, the second voice coil motor 202, the 3rd voice coil motor 203, the 4th voice coil motor 204 that drive along Y direction realize along Y direction move and around the rotation of Z axis.Realize moving along X-axis by the 5th voice coil motor 205, the 6th voice coil motor 206 that drive along X-direction.By the subtonic circle motor 207, the 8th voice coil motor 208, the 9th voice coil motor 209, the tenth voice coil motor 2010 that drive along Z axis realize micropositioner 200 along Z axis move and around the rotation of X-axis, Y-axis.Therefore realize the six-freedom motion of micromotion platform 200 by these ten voice coil motors.

The first voice coil motor 201, the second voice coil motor 202, the 3rd voice coil motor 203, the 4th voice coil motor 204 structures are identical, and Fig. 5 is the first voice coil motor 201 structure cut-open views.The first voice coil motor 201 comprises the first permanent magnet assembly 212, the second permanent magnet assembly 213, First Line coil assembly 211.First Line coil assembly 211 is between the first permanent magnet assembly 212 and the second permanent magnet assembly 213, and retention gap.

As shown in figure 12, the coil block of the first voice coil motor 201 and the second voice coil motor 202 is fixed on the first coarse motion platform 1001, and the permanent magnet assembly of the first voice coil motor 201 and the second voice coil motor 202 is fixed on micromotion platform 200.The coil block of the 3rd voice coil motor 203 and the 4th voice coil motor 204 is fixed on the second coarse motion platform 1002, and the permanent magnet assembly of the 3rd voice coil motor 203 and the 4th voice coil motor 204 is fixed on micromotion platform 200.In the time that the first voice coil motor 201, the second voice coil motor 202, the 3rd voice coil motor 203, the 4th voice coil motor 204 are identical along Y direction driving force, realizing micromotion platform 200 moves along Y-axis, in the time that these four voice coil motors are not identical along Y direction driving force, realize the rotation of micromotion platform 200 around Z axis.

As shown in Figure 4, the 5th voice coil motor 205 is identical with the 6th voice coil motor 206 structures, and is positioned at along on the same straight line of X-axis.Fig. 6 is the 5th voice coil motor 220 axonometric drawings, and Fig. 7 is the 5th voice coil motor 220 cut-open views.As shown in figure 12, the coil block of the 5th voice coil motor 205 is fixed on the first coarse motion platform 1001, its permanent magnet assembly is fixed on micropositioner 200, and the coil block of the 6th voice coil motor 206 is fixed on the second coarse motion platform 1002, and its permanent magnet assembly is fixed on micropositioner 200.When coil electricity, the 5th voice coil motor 205 and the 6th voice coil motor 206 drive micropositioner 200 to move in the X-axis direction.

The structure of subtonic circle motor 207, the 8th voice coil motor 208, the 9th voice coil motor 209, the tenth voice coil motor 2010 is identical.Fig. 8 is subtonic circle motor 207 axis of no-feathering mappings.Subtonic circle motor 207 comprises outer magnetic ring 232, internal magnetic ring 233, cylindrical coil assembly 231, gravitational equilibrium magnetic post 234.

Fig. 9 is outer magnetic ring 232 front views in subtonic circle motor 207.Figure 10 is internal magnetic ring 233 front views in subtonic circle motor 207.Figure 11 is magnetic post 234 front views in subtonic circle motor 207.Outer magnetic ring 232 is with the axis of internal magnetic ring 233 along Z-direction, and outer magnetic ring 232 is identical with internal magnetic ring 233 magnetizing directions, radially and by annulus outside surface points to the center of circle.Cylindrical coil 231 is between internal magnetic ring 233 and outer magnetic ring 232, and coiling axis is along Z-direction.The axis of magnetic post 234 is along Z-direction, and magnetizing direction is along Z axis positive dirction.As shown in Figure 4, the coil block of subtonic circle motor 207 and the 8th voice coil motor 208 is fixed on the first coarse motion platform 1001, and be positioned at same along on the straight line of Y-axis, the coil block of the 9th voice coil motor 209 and the tenth voice coil motor 2010 is fixed on the second coarse motion platform 1002, and is positioned at same along on the straight line of Y-axis.Outer magnetic ring 232, internal magnetic ring 233 and the magnetic post 234 of these four voice coil motors are fixed on micromotion platform 200.When cylindrical coil 231 is switched on, between hot-wire coil 231 and internal magnetic ring 233, outer magnetic ring 232, produce Lorentz force, when these four voice coil motors produce identical along Z axis Lorentz force size time, realizing micromotion platform 200 moves along Z-direction, in the time that the Lorentz force of these four voice coil motors generations varies in size, realize micromotion platform 200 and rotate and rotate around Y-axis around X-axis.When coil electricity, between hot-wire coil 231 and magnetic post 234, produce Lorentz force, the size that changes electric current makes the Lorentz force producing equate with the gravity of micropositioner 200, reaches the object of micropositioner 200 gravitational equilibriums.

The position measurement scheme of the first coarse motion platform 1001, the second coarse motion platform 1002, micropositioner 200 is as follows:

Optical grating ruler measurement device comprises the first grating scale 3001 measurement mechanisms and the second optical grating ruler measurement device 3002 that structure is identical, and Figure 13 is the first optical grating ruler measurement device 3001 axonometric drawings, and Figure 14 is the first optical grating ruler measurement device 3001 front views.These two grating measuring devices are arranged symmetrically in the both sides of two coarse motion platforms along X-direction.Each grating measuring device comprises a grating scale 303, grating scale erecting frame 301, read head 304 and a grating scale adjusting gear 302.Grating scale adjusting gear 302 is fixed on pedestal 001, and grating scale erecting frame 301 is fixedly connected with grating scale adjusting gear 302, makes the long side direction of grating scale erecting frame 301 along Y direction by adjusting grating scale adjustment rack 302.Grating scale 303 is pasted and is fixed on grating scale erecting frame 301 surfaces above, and grating fringe is along Y direction.Grating reading head 304 is connected with linear electric motors 101, and in the time that linear electric motors 101 move along Y-axis, optical grating ruler measurement device is used for detecting the first coarse motion platform 1001 and the second coarse motion platform 1002 position along Y direction.

As shown in Figure 15, Figure 16, the relative position measurement system of micropositioner 200 and the first coarse motion platform 1001, the second coarse motion platform 1002 comprises seven current vortex sensors, each current vortex sensor is arranged on the first coarse motion platform 1001, the second coarse motion platform 1002, measures metallic conductor and is arranged on micropositioner 200.The first current vortex sensor 401, the second current vortex sensor 402 are arranged on the first coarse motion platform 1001, and be positioned at along on the straight line of Y-axis, measure between micropositioner 200 and coarse motion platform 100 along x direction of principal axis relative distance, the first current vortex sensor 401 and the second current vortex sensor 402 signals differential measured the relative rotation around Z axis between micropositioner 200 and two coarse motion platforms.The 3rd current vortex sensor 403, the 4th current vortex sensor 404 are arranged on respectively on the first coarse motion platform 1001 and the second coarse motion platform 1002, and be positioned at one along on the straight line of X-direction, measure respectively micropositioner 200 with respect to the first coarse motion platform 1001, the second coarse motion platform 1002 distance along Y direction.The 5th current vortex sensor 405, the 6th current vortex sensor 406 are arranged on the first coarse motion platform 1001, and be positioned at one along on the straight line of Y direction, the 7th current vortex sensor 407 is arranged on the second coarse motion platform 1002, and is positioned at one article along on the straight line of X-axis with the 5th current vortex sensor 405.The 5th current vortex sensor 405, the 6th current vortex sensor 406, the 7th current vortex sensor 407 are for measuring between micropositioner 200 and the first coarse motion platform 1001, the second coarse motion platform 1002 along Z-direction distance, the variate micropositioner 200 of the 5th current vortex sensor 405 and the 6th current vortex sensor 406 is around X-axis corner, and the variate micropositioner 200 of the 5th current vortex sensor 405, the 7th current vortex sensor 407 is around the corner of Y-axis.

Figure 17 is laser measuring device for measuring schematic diagram, and laser ruler 900 is measured micropositioner 200 along Y direction absolute position.

Two coarse motion platforms, take optical grating ruler measurement device as survey sensor, move to grating scale zero mark 305 places by integrated locating device, as shown in figure 18, and take the barycenter of micropositioner 200 now as coordinate system recording laser chi reading A.

Micropositioner 200 six-degree of freedom position are calculated as follows:

Y direction position: micropositioner 200 adopts laser ruler to measure along Y-axis position, as shown in figure 19, in the time that micropositioner moves to a certain position by initial point, laser ruler reading is B, and micropositioner 200 along Y direction position is under global coordinate system

y=B-A

X-direction position: micropositioner 200 is recorded by the first current vortex sensor 401, the second current vortex sensor 402 along X-direction position, and the first current vortex sensor 401 signals are x ₄₀₁, the second current vortex sensor 402 signals are x ₄₀₂, micropositioner 200 along X-direction position is:

X=(x ₄₀₁+x ₄₀₂)/2

Z-direction position: micropositioner 200 is recorded by the 5th current vortex sensor 405, the 6th current vortex sensor 406 and the 7th current vortex sensor 407 along Z-direction position, and the 5th current vortex sensor 405 signals are x ₄₀₅, the 6th current vortex sensor 406 signals are x ₄₀₆, the 7th current vortex sensor 407 signals are x ₄₀₇, micropositioner 200 along Z-direction position is:

Z=(x ₄₀₅+x ₄₀₆+x ₄₀₇)/3

Around X-axis corner: with counterclockwise, for just, micropositioner 200 is recorded by the 5th current vortex sensor 405, the 6th current vortex sensor 406 around X-axis corner, that is:

θ _X=(x ₄₀₆-x ₄₀₅)/L ₂

Around Y-axis corner: with counterclockwise, for just, micropositioner 200 is recorded by the 5th current vortex sensor 405, the 7th current vortex sensor 407 around Y-axis corner, that is:

θ _Y=(x ₄₀₇-x ₄₀₅)/L ₃

Around Z axis corner: with counterclockwise, for just, micropositioner 200 is recorded by the first current vortex sensor 401, the second current vortex sensor 402 around Z axis corner, that is:

θ _Z=(x ₄₀₂-x ₄₀₁)/L ₁

Between the first coarse motion platform 1001 and micropositioner 200, recorded by the 3rd current vortex sensor 403 along Y-axis relative position, that is:

X _{phase 1}=x ₄₀₃

Between the second coarse motion platform 1002 and micropositioner 200, recorded by the 4th current vortex sensor 404 along Y-axis relative position, that is:

X _{phase 2}=x ₄₀₄

The control block diagram of each coarse motion platform and micropositioner 200 as shown in the figure.The signal that measurement mechanism measures is transformed digital quantity is input in computing machine by A/D, utilize the control method of design to process these digital signals, and by the digital output calculating to D/A card, analog input after D/A transforms is in the driver of each voice coil motor and linear electric motors, driver is given the coil input current of each voice coil motor according to these analog values, drive micropositioner and the motion of each coarse motion platform according to the each voice coil motor of Lorentz force rule and linear electric motors, the position of micropositioner and each coarse motion platform is measured by measurement mechanism.

In the motion control of micropositioner and coarse motion platform, adopt a kind of motion control method, this control method comprises the steps:

1) start at servo period, set the six-degree of freedom displacement amount of micropositioner, wherein x _dfor the displacement along X-axis, y _dfor the displacement along Y-axis, z _dfor the displacement along Z axis, θ _xdfor the corner displacement amount around X-axis, θ _ydfor the corner displacement amount around Y-axis, θ _zdfor the corner displacement amount around Z axis; Then the current vortex sensor signal that laser ruler signal numbered card being gathered and A/D card gather is as the feedback signal of micropositioner control loop, and the current vortex sensor signal that A/D card is gathered is as the feedback signal of coarse motion platform control loop;

2) solve according to the micropositioner six-degree of freedom displacement amount of setting and feedback signal that each voice coil motor is corresponding exerts oneself, wherein the first voice coil motor, the second voice coil motor, the degree of freedom that the 3rd voice coil motor and the 4th voice coil motor control micropositioner move and rotate around Z axis along Y-direction, the degree of freedom that the 5th voice coil motor and the 6th voice coil motor control micropositioner move along directions X, subtonic circle motor, the 8th voice coil motor, the 9th voice coil motor and the tenth voice coil motor control micropositioner move along Z direction, the degree of freedom of rotating and rotating around Y-axis around X-axis, motor power output is calculated as follows:

${\mathrm{<figure-callout\; id="301"\; label="F"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">F</figure-callout>}}_{301}={\mathrm{<figure-callout\; id="302"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{302}=k_{p301}{e}_y+k_{d301}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="301"\; label="c"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">c</figure-callout>}}_{301}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{301}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+{\mathrm{<figure-callout\; id="301"\; label="b"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">b</figure-callout>}}_{301}}+k_{301}{e}_{{\mathrm{\&theta;}}_z}+k_{301}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="303"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{303}={\mathrm{<figure-callout\; id="304"\; label="F"\; filenames="HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{304}=k_{p303}{e}_y+k_{d303}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="303"\; label="c"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">c</figure-callout>}}_{303}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{303}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{303}}-k_{303}{e}_{{\mathrm{\&theta;}}_z}-k_{303}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="305"\; label="F"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">F</figure-callout>}}_{305}=F_{306}=k_{p305}{e}_x+k_{d305}{\stackrel{\&CenterDot;}{e}}_x+{\mathrm{<figure-callout\; id="305"\; label="c"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">c</figure-callout>}}_{305}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x}{|{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x|+{\mathrm{<figure-callout\; id="305"\; label="b"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">b</figure-callout>}}_{305}}$

$F_{307}=k_{p307}{e}_z+k_{d307}{\stackrel{\&CenterDot;}{e}}_z+c_{307}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z|+b_{307}}+k_{307}{e_{\mathrm{\&theta;}}}_x+k_{307}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x+k_{307}{e_{\mathrm{\&theta;}}}_y+k_{307}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{308}=k_{p308}{e}_z+k_{d308}{\stackrel{\&CenterDot;}{e}}_z+c_{308}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z|+b_{308}}+k_{308}{e_{\mathrm{\&theta;}}}_x+k_{308}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x-k_{308}{e_{\mathrm{\&theta;}}}_y-k_{308}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{309}=k_{p309}{e}_z+k_{d309}{\stackrel{\&CenterDot;}{e}}_z+c_{309}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z|+b_{309}}-k_{309}{e_{\mathrm{\&theta;}}}_x-k_{309}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x+k_{309}{e_{\mathrm{\&theta;}}}_y+k_{309}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{3010}=k_{p3010}{e}_z+k_{d3010}{\stackrel{\&CenterDot;}{e}}_z+c_{3010}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z|+b_{3010}}-k_{3010}{e_{\mathrm{\&theta;}}}_x-k_{3010}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x-k_{3010}{e_{\mathrm{\&theta;}}}_y-k_{3010}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

Wherein: F ₃₀₁be the first voice coil motor power output, F ₃₀₂be the second voice coil motor output, F ₃₀₃be the 3rd voice coil motor power output, F ₃₀₄be the 4th voice coil motor power output, F ₃₀₅be the 5th voice coil motor power output, F ₃₀₆be the 6th voice coil motor output, F ₃₀₇for subtonic circle motor power output, F ₃₀₈be the 8th voice coil motor power output, F ₃₀₉be the 9th voice coil motor power output, F ₃₀₁₀it is the tenth voice coil motor power output;

K _p301, k _p303, k _p305, k _p307, k _p308, k _p309, k _p3010, k _d301, k _d303,k _d305, k _d307, k _d308, k _d309, k _d3010, c ₃₀₁, c ₃₀₃, c ₃₀₅, c ₃₀₇, c ₃₀₈, c ₃₀₉, c ₃₀₁₀, a ₃₀₁, a ₃₀₃, a ₃₀₅, a ₃₀₇, a ₃₀₈, a ₃₀₉, a ₃₀₁₀, b ₃₀₁, b ₃₀₃, b ₃₀₅, b ₃₀₇, b ₃₀₈, b ₃₀₉, b ₃₀₁₀, k ₃₀₁, k ₃₀₃, k ₃₀₅, k ₃₀₇, k ₃₀₈, k ₃₀₉, k ₃₀₁₀for controlling parameter;

E _y=y _d-y, y _dfor micropositioner is along Y direction target location, y is laser ruler feedback signal, for e _yto the first order derivative of time; e _x=x _d-x, x _dfor micropositioner is along the target location of X-axis, x is feedback signal,

for e _xto the first order derivative of time; e _z=z _d-z, z _dfor micropositioner is along the target location of Z axis, z is feedback signal,

for e _zto the first order derivative of time;

θ _xdfor micropositioner is around the target location of X-axis, θ _xfor feedback signal,

for

to the first order derivative of time; θ _ydfor micropositioner is around the target location of Y-axis, θ _yfor feedback signal,

for to the first order derivative of time;

θ _zdfor micropositioner is around the target rotation angle of Z axis, θ _zfor feedback signal,

for

to the first order derivative of time;

Coarse motion platform only has the degree of freedom of y direction, its control system to keep coarse motion platform and micropositioner constant at the relative position of y direction, establish the first coarse motion platform and micropositioner relative position and keep y _cd1constant, the second coarse motion platform and micropositioner relative position keep y _cd2constant.In the motion control method of two coarse motion platforms, the first coarse motion platform is using the power output of the first voice coil motor and the second voice coil motor as feedforward, the 3rd current vortex sensor signal is the position deviation between micropositioner and the first coarse motion platform, realizes the first coarse motion platform moving along Y-axis take this deviation as feedback; The second coarse motion platform is using the power output of the 3rd voice coil motor and the 4th voice coil motor as feedforward, the 4th current vortex sensor signal is the position deviation between micropositioner and the second coarse motion platform, realize the second coarse motion platform along the moving of Y-axis take this deviation as feedback, coarse motion platform linear electric motors power output is calculated according to following formula:

${\mathrm{<figure-callout\; id="1001"\; label="F"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">F</figure-callout>}}_{1001}={\mathrm{<figure-callout\; id="302"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{302}+{\mathrm{<figure-callout\; id="301"\; label="F"\; filenames="HDA00001716162300012.png,HDA00001716162300062.png"\; state="\{\{state\}\}">F</figure-callout>}}_{301}+k_{p1001}{e}_{y1001}+k_{d1001}{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1001"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1001}+{\mathrm{<figure-callout\; id="1001"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1001}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1001"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1001}+a_{1001}{e}_{y1001}}{|{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1001"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1001}+a_{1001}{e}_{y1001}|+{\mathrm{<figure-callout\; id="1001"\; label="b"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">b</figure-callout>}}_{1001}}$

${\mathrm{<figure-callout\; id="1002"\; label="F"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">F</figure-callout>}}_{1002}={\mathrm{<figure-callout\; id="304"\; label="F"\; filenames="HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{304}+{\mathrm{<figure-callout\; id="303"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{303}+k_{p1002}{e}_{y1002}+k_{d1002}{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1002"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">y</figure-callout>}1002}+{\mathrm{<figure-callout\; id="1002"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1002}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1002"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">y</figure-callout>}1002}+a_{1002}{e}_{y1002}}{|{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1002"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">y</figure-callout>}1002}+a_{1002}{e}_{y1002}|+{\mathrm{<figure-callout\; id="1002"\; label="b"\; filenames="HDA00001716162300011.png,HDA00001716162300012.png"\; state="\{\{state\}\}">b</figure-callout>}}_{1002}}$

Wherein: F ₁₀₀₁be the first coarse motion platform linear electric motors power output, F ₁₀₀₂it is the second coarse motion platform linear electric motors power output;

K _p1001, k _p1002, k _d1001, k _d1002, c ₁₀₀₁, c ₁₀₀₂, a ₁₀₀₁, a ₁₀₀₂, b ₁₀₀₁, b ₁₀₀₂for controlling parameter;

E _y1001=y _cd1-y _c1, y _cd1be the first coarse motion platform and micropositioner target relative position, y _c1the 3rd current vortex sensor feedback signal; for e _y1001the derivative of the 3rd current vortex sensor signal to the time;

E _y1002=y _cd2-y _c2, y _cd2be the second coarse motion platform and micropositioner target relative position, y _c2the 4th current vortex sensor feedback signal;

for e _y1002to the derivative of time;

3) power output of each drive motor that basis solves obtains the steering order of each motor, this steering order is undertaken inputing to driver after digital-to-analog conversion by D/A card, driver pro rata output current drives corresponding motor, and then realizes the motion of micropositioner and coarse motion platform.

Claims (2)

1. the thick smart fold layer positioning system of non-contact type, is characterized in that: this control system comprises locating device, position-measurement device, drive unit and control module;

Described locating device comprises that pedestal, micropositioner and two are arranged symmetrically in the coarse motion platform of micropositioner both sides, between two coarse motion platforms, between coarse motion platform and micropositioner, machinery-free is connected;

Described position-measurement device comprises:

1) laser ruler, for measuring the absolute position of micropositioner barycenter along Y-axis;

2) two grating measuring devices, each grating measuring device comprises a grating scale and a read head, for measuring the displacement of coarse motion platform along Y direction;

3) seven current vortex sensors, for measuring the relative displacement between micropositioner and coarse motion platform, wherein:

The first current vortex sensor and the second current vortex sensor are arranged on the first coarse motion platform, be arranged in one along on the straight line of Y-axis, for measuring the relative position of micropositioner along X-axis and coarse motion platform, the first and second electric vortex sensor measuring values differential be the corner around Z axis as micropositioner;

The 3rd current vortex sensor is arranged on the first coarse motion platform, measures the relative position along Y direction between the first coarse motion platform and micropositioner; The 4th current vortex sensor is arranged on the second coarse motion platform, measures the relative position along Y direction between the second coarse motion platform and micropositioner;

The 5th current vortex sensor and the 6th current vortex sensor are arranged on the first coarse motion platform, and are positioned at one along on the straight line of Y-axis, and the 7th current vortex sensor is arranged on the second coarse motion platform, and are positioned at one article along on the straight line of X-axis with the 5th current vortex sensor; These three current vortex sensors are for measuring the absolute position of micropositioner along Z axis, the 5th current vortex sensor and the 6th electric vortex sensor measuring value differential be the corner around X-axis as micropositioner, and the 5th current vortex sensor and the 7th electric vortex sensor measuring value differential be the corner around Y-axis as micropositioner;

Described drive unit comprises:

1) ten voice coil motors

Micropositioner comprises four voice coil motors that drive along Y direction, two voice coil motors that drive along X-direction and four voice coil motors that drive along Z-direction; The coil block of the first voice coil motor, the second voice coil motor, the 5th voice coil motor is fixed on the first coarse motion platform, permanent magnet assembly is fixed on micropositioner, the coil block of the 3rd voice coil motor, the 4th voice coil motor, the 6th voice coil motor is fixed on the second coarse motion platform, and permanent magnet assembly is fixed on micropositioner;

Subtonic circle motor, the 8th voice coil motor, the 9th voice coil motor, the tenth voice coil motor structure are identical, comprise outer magnetic ring, internal magnetic ring, cylindrical coil assembly, gravitational equilibrium magnetic post; The axis of outer magnetic ring and internal magnetic ring is along Z-direction, and outer magnetic ring is identical with internal magnetic ring magnetizing direction, radially and by annulus outside surface points to the center of circle; Cylindrical coil is between internal magnetic ring and outer magnetic ring, and coiling axis is along Z-direction; The axis of magnetic post is along Z-direction, and magnetizing direction is along Z axis positive dirction; The cylindrical coil assembly of subtonic circle motor, the 8th voice coil motor is fixed on the first coarse motion platform, and the cylindrical coil assembly of the 9th voice coil motor, the tenth voice coil motor is fixed on the second coarse motion platform;

2) two linear electric motors

Two linear electric motors are respectively for driving the first coarse motion platform and the second coarse motion platform;

Described control module comprises the industrial computer, numbered card, A/D card, D/A card and the driver that contain control program, numbered card gathers the increment signal of grating scale and laser ruler, A/D card gathers the signal of current vortex sensor, the signal collecting is inputed to industrial computer by numbered card and A/D card, industrial computer is controlled micropositioner and coarse motion platform using described signal as position feed back signal, steering order exports driver to by D/A card, driver output current, to motor, is realized the motion of micropositioner and coarse motion platform.

2. a motion control method for the thick smart fold layer positioning system of non-contact type as claimed in claim 1, is characterized in that described control method comprises the steps:

1) start at servo period, set the six-degree of freedom displacement amount of micropositioner, wherein x _dfor the displacement along X-axis, y _dfor the displacement along Y-axis, z _dfor the displacement along Z axis, θ _xdfor the corner displacement amount around X-axis, θ _ydfor the corner displacement amount around Y-axis, θ _zdfor the corner displacement amount around Z axis, the X-axis displacement signal of the first electric vortex sensor measuring that the Y-axis displacement signal that the laser ruler then numbered card being gathered is measured and A/D card gather, the Z axis angular signal that the first and second electric vortex sensor measuring value differences are moving, the moving X-axis angular signal of the 5th and the 6th electric vortex sensor measuring value difference, the Y-axis angular signal and the 5th that the 5th and the 7th electric vortex sensor measuring value difference is moving, the Z axis displacement signal of the 6th and the 7th electric vortex sensor measuring is as the feedback signal of micropositioner control loop, the first coarse motion platform Y-axis displacement signal of the 3rd electric vortex sensor measuring that A/D card is gathered and the second coarse motion platform Y-axis displacement signal of the 4th electric vortex sensor measuring are as the feedback signal of coarse motion platform control loop,

2) solve according to the micropositioner six-degree of freedom displacement amount of setting and feedback signal that each voice coil motor is corresponding exerts oneself, wherein the first voice coil motor, the second voice coil motor, the degree of freedom that the 3rd voice coil motor and the 4th voice coil motor control micropositioner move and rotate around Z axis along Y-direction, the degree of freedom that the 5th voice coil motor and the 6th voice coil motor control micropositioner move along directions X, subtonic circle motor, the 8th voice coil motor, the 9th voice coil motor and the tenth voice coil motor control micropositioner move along Z direction, the degree of freedom of rotating and rotating around Y-axis around X-axis, motor power output is calculated as follows:

$F_{301}=F_{302}=k_{p301}{e}_y+k_{d301}{\stackrel{\&CenterDot;}{e}}_y+c_{301}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{301}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{301}}+k_{301}{e}_{{\mathrm{\&theta;}}_z}+k_{301}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

$F_{303}=F_{3004}=k_{p303}{e}_y+k_{d303}{\stackrel{\&CenterDot;}{e}}_y+c_{303}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{303}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{303}}-k_{303}{e}_{{\mathrm{\&theta;}}_z}-k_{303}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

$F_{305}=F_{306}=k_{p305}{e}_x+k_{d305}{\stackrel{\&CenterDot;}{e}}_x+c_{305}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x}{|{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x|+b_{305}}$

$F_{307}=k_{p307}{e}_z+k_{d307}{\stackrel{\&CenterDot;}{e}}_z+c_{307}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z|+b_{307}}+k_{307}{e_{\mathrm{\&theta;}}}_x+k_{307}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x+k_{307}{e_{\mathrm{\&theta;}}}_y+k_{307}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{308}=k_{p308}{e}_z+k_{d308}{\stackrel{\&CenterDot;}{e}}_z+c_{308}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z|+b_{308}}+k_{308}{e_{\mathrm{\&theta;}}}_x+k_{308}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x-k_{308}{e_{\mathrm{\&theta;}}}_y-k_{308}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{309}=k_{p309}{e}_z+k_{d309}{\stackrel{\&CenterDot;}{e}}_z+c_{309}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z|+b_{309}}-k_{309}{e_{\mathrm{\&theta;}}}_x-k_{309}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x+k_{309}{e_{\mathrm{\&theta;}}}_y+k_{309}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

$F_{3010}=k_{p3010}{e}_z+k_{d3010}{\stackrel{\&CenterDot;}{e}}_z+c_{3010}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z|+b_{3010}}-k_{3010}{e_{\mathrm{\&theta;}}}_x-k_{3010}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_x-k_{3010}{e_{\mathrm{\&theta;}}}_y-k_{3010}{{\stackrel{\&CenterDot;}{e}}_{\mathrm{\&theta;}}}_y$

Wherein: F ₃₀₁be the first voice coil motor power output, F ₃₀₂be the second voice coil motor output, F ₃₀₃be the 3rd voice coil motor power output, F ₃₀₄be the 4th voice coil motor power output, F ₃₀₅be the 5th voice coil motor power output, F ₃₀₆be the 6th voice coil motor output, F ₃₀₇for subtonic circle motor power output, F ₃₀₈be the 8th voice coil motor power output, F ₃₀₉be the 9th voice coil motor power output, F ₃₀₁₀it is the tenth voice coil motor power output;

K _p301, k _p303, k _p305, k _p307, k _p308, k _p309, k _p3010, k _d301, k _d303, k _d305, k _d307, k _d308, k _d309, k _d3010, c ₃₀₁, c ₃₀₃, c ₃₀₅, c ₃₀₇, c ₃₀₈, c ₃₀₉, c ₃₀₁₀, a ₃₀₁, a ₃₀₃, a ₃₀₅, a ₃₀₇, a ₃₀₈, a ₃₀₉, a ₃₀₁₀, b ₃₀₁, b ₃₀₃, b ₃₀₅, b ₃₀₇, b ₃₀₈, b ₃₀₉, b ₃₀₁₀, k ₃₀₁, k ₃₀₃, k ₃₀₅, k ₃₀₇, k ₃₀₈, k ₃₀₉, k ₃₀₁₀for controlling parameter;

E _y=y _d-y, y _dfor micropositioner is along Y direction target location, y is laser ruler feedback signal,

for e _yto the first order derivative of time; e _x=x _d-x, x _dfor micropositioner is along the target location of X-axis, x is feedback signal, for e _xto the first order derivative of time; e _z=z _d-z, z _dfor micropositioner is along the target location of Z axis, z is feedback signal,

for e _zto the first order derivative of time;

θ _xdfor micropositioner is around the target location of X-axis, θ _xfor feedback signal,

for

to the first order derivative of time;

θ _ydfor micropositioner is around the target location of Y-axis, θ _yfor feedback signal,

for

to the first order derivative of time;

θ _zdfor micropositioner is around the target rotation angle of Z axis, θ _zfor feedback signal,

for

to the first order derivative of time;

Coarse motion platform only has the degree of freedom of y direction, its control system to keep coarse motion platform and micropositioner constant at the relative position of y direction, establish the first coarse motion platform and micropositioner relative position and keep y _cd1constant, the second coarse motion platform and micropositioner relative position keep y _cd2constant.In the motion control method of two coarse motion platforms, the first coarse motion platform is using the power output of the first voice coil motor and the second voice coil motor as feedforward, the 3rd current vortex sensor signal is the position deviation between micropositioner and the first coarse motion platform, realizes the first coarse motion platform moving along Y-axis take this deviation as feedback; The second coarse motion platform is using the power output of the 3rd voice coil motor and the 4th voice coil motor as feedforward, the 4th current vortex sensor signal is the position deviation between micropositioner and the second coarse motion platform, realize the second coarse motion platform along the moving of Y-axis take this deviation as feedback, coarse motion platform linear electric motors power output is calculated according to following formula:

$F_{1001}=F_{302}+F_{301}+k_{p1001}{e}_{y1001}+k_{d1001}{\stackrel{\&CenterDot;}{e}}_{y1001}+c_{1001}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}}{|{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}|+b_{1001}}$

$F_{1002}=F_{304}+F_{303}+k_{p1002}{e}_{y1002}+k_{d1002}{\stackrel{\&CenterDot;}{e}}_{y1002}+c_{1002}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}}{|{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}|+b_{1002}}$

Wherein: F ₁₀₀₁be the first coarse motion platform linear electric motors power output, F ₁₀₀₂it is the second coarse motion platform linear electric motors power output;

K _p1001, k _p1002, k _d1001, k _d1002, c ₁₀₀₁, c ₁₀₀₂, a ₁₀₀₁, a ₁₀₀₂, b ₁₀₀₁, b ₁₀₀₂for controlling parameter;

E _y1001=y _cd1-y _c1, y _cd1be the first coarse motion platform and micropositioner target relative position, y _c1the 3rd current vortex sensor feedback signal;

for e _y1001the derivative of the 3rd current vortex sensor signal to the time;

E _y1002=y _cd2-y _c2, y _cd2be the second coarse motion platform and micropositioner target relative position, y _c2the 4th current vortex sensor feedback signal;

for e _y1002to the derivative of time;

3) power output of each drive motor that basis solves obtains the steering order of each motor, this steering order is undertaken inputing to driver after digital-to-analog conversion by D/A card, driver pro rata output current drives corresponding motor, and then realizes the motion of micropositioner and coarse motion platform.

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