CN102722089B - Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device - Google Patents

Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device Download PDF

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CN102722089B
CN102722089B CN 201210180346 CN201210180346A CN102722089B CN 102722089 B CN102722089 B CN 102722089B CN 201210180346 CN201210180346 CN 201210180346 CN 201210180346 A CN201210180346 A CN 201210180346A CN 102722089 B CN102722089 B CN 102722089B
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permanent magnet
platform
axis direction
coarse movement
grating
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CN 201210180346
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CN102722089A (en
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朱煜
张鸣
杨开明
李鑫
汪劲松
许岩
田丽
尹文生
徐登峰
胡金春
穆海华
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清华大学
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Publication of CN102722089A publication Critical patent/CN102722089A/en
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Abstract

一种无接触式粗精动叠层六自由度定位装置,涉及一种超精密六自由度运动定位装置。 A non-contact type of coarse and fine positioning means movable stack six degrees of freedom, to an ultra-precision positioning apparatus six degrees of freedom motion. 该定位装置包括一个微动平台,和对称布置在微动平台两侧的两个粗动台。 The positioning means comprises a microswitch platform, and two symmetrically arranged on both sides of the coarse movement stage jog internet. 每个粗动台由直线电机独立驱动实现沿Y轴运动,微动平台由十个音圈电机驱动实现六自由度运动。 Each coarse movement stage driven by a linear motor to achieve independent motion along the Y axis, the movable platform is driven by a micro ten voice coil motor to achieve six degrees of freedom. 测量系统包括一个激光尺、两个光栅尺、七个电涡流传感器,测量系统能够测量每个粗动平台沿Y轴方向的绝对位置、微动平台六自由度绝对位置、粗动平台与微动平台之间沿Y轴方向的相对位置。 Foot measuring system includes a laser, two grating, seven eddy current sensor, the measuring system capable of measuring the absolute position of the movable platform in each of the coarse Y-axis direction, the jog six degrees of freedom absolute position of the platform, the platform and the coarse movement jog the relative position of the Y-axis direction between the internet. 粗动台中两个直线电机独立运动,当音圈电机通电时微动平台悬浮在粗动台上方,实现了粗动台之间、粗动台与微动平台之间的无接触式叠层运动,避免了现有结构中机械接触引起的运动耦合与结构干涉等问题。 Coarse movement linear motors station two independent motion, the voice coil motor is energized when the jog platform suspended on the coarse movement stage side, achieved between the coarse movement stage, the movable contact-laminated coarse movement stage and the fine movement between the platform avoided kinematic coupling with constructive interference problems caused by conventional mechanical contact structure.

Description

一种无接触式粗精动叠层六自由度定位装置 A non-contact type of coarse and fine positioning means movable stack DOF

技术领域 FIELD

[0001] 本发明涉及一种六自由度定位设备,尤其涉及一种无接触式粗精动叠层六自由度定位设备,主要应用于半导体光刻设备中,属于超精密加工和检测设备技术领域。 [0001] The present invention relates to a positioning apparatus six degrees of freedom, particularly to a contactless coarse and fine movement positioning apparatus laminate six degrees of freedom, is mainly used in semiconductor lithography apparatus, belonging to the technical field of ultra-precision processing equipment and testing .

背景技术 Background technique

[0002] 具有纳米级运动定位精度的超精密微动平台是半导体装备关键部件之一,如光刻机中的硅片台、掩模台等。 [0002] The nano-scale ultra-precision positioning accuracy of the fine movement table is one of the key components of the semiconductor equipment, such as wafer stage lithography machine, the mask table and the like. 为实现超精密定位要求,以气浮和磁浮约束为支撑方式的执行单元作为一种超精密运动台被广泛应用。 To achieve ultra-precise positioning requirements for flotation and magnetic levitation manner constrained to support execution unit as an ultra-precision motion stage is widely used. 气浮约束作为支撑和导向作用时,减小了机械结构传动引起的摩擦力等作用,提高了系统运动定位精度。 When flotation constraints as supporting and guiding action, reducing the frictional force caused by the mechanical construction of the drive, the system improves positioning accuracy. 以直线电机为驱动单元时,由通电线圈在永磁阵列气隙磁场中产生的洛仑兹力提供驱动力,通过控制线圈中电流大小来改变执行单元的推力,具有结构简单等优点。 When a linear motor drive unit, the Lorentz force generated by the permanent magnet array of air-gap field coil is energized to provide a driving force to change the thrust performed by the control unit, the size of the coil current, the advantages of having a simple structure.

[0003]目前光刻机中掩模台通常采用粗精动叠层的结构,包括两个沿Y轴方向运动的粗动台,和一个六自由度运动的微动平台。 [0003] In the current lithography mask table usually coarse and fine movement laminate structure comprising two Y-axis direction movement of the coarse movement stage and a fine movement table in six degrees of freedom. 两个粗动台之间通过连接梁连接在一起,其中连接梁与一个粗动台固定连接,与另一侧粗动台通过柔性铰链连接,微动平台安装在连接梁上,实现定位装置整体运动。 Coarse movement between two stations connected by connecting beams together, wherein the connecting beam and a coarse movement stage fixedly connected to the other side of the coarse movement stage by a flexible hinge connection, internet micro beam mounted in the connector, to achieve the overall positioning means motion. 一方面连接梁增加了结构设计的复杂性,增加了系统结构质量,较大的质量将影响系统运动响应性能,另一方面,当结构运动时,如果两个粗动台沿Y轴方向存在位置偏差,由于连接梁的作用,使得两个粗动平台之间产生作用力与反作用力的耦合,使得两个粗动平台的性能相互影响,将影响系统的运动定位精度。 Beam connection on the one hand increase the complexity of the design, the structural quality of the system increases, a larger mass will affect system performance in response to the movement, on the other hand, when the movement of the structure, if the two coarse movement stage in the Y-axis direction position of the present deviation, since ligation of the beam, such that two coarse movement a coupling force and reaction between the platform, so that the performance of the two coarse movement platform interaction, will affect the positioning accuracy of the system.

发明内容 SUMMARY

[0004] 本发明的目的是提供一种应用于半导体装备的定位装置,不仅满足六自由度运动定位要求,同时解决目前掩模台粗精动叠层结构中由机械结构耦合作用引起的结构复杂、运动性能相互影响等问题。 [0004] The object of the present invention is to provide a positioning apparatus used in the semiconductor equipment, only six degrees of freedom to meet the positioning requirements, while addressing the current structure of the coarse and fine movement stage a mask laminated structure caused by the mechanical action of the coupling structure is complicated , sports performance and other issues affecting each other.

[0005] 本发明的技术方案如下: [0005] aspect of the present invention is as follows:

[0006] 一种无接触式粗精动叠层六自由度定位装置,所述定位装置包含基架、一个微动平台、两个粗动平台和测量系统,所述测量系统包含光栅测量系统、电涡流传感器测量系统和激光尺测量系统;微动平台悬浮在两个粗动平台上,两个粗动平台对称布置在微动平台两侧,两个粗动平台悬浮在基架上; [0006] A non-contact type of coarse and fine positioning means movable stack six degrees of freedom, the positioning means comprises a base frame, a micro platform, platform and two coarse movement measuring system, the measuring system comprises a grating measuring system, eddy current sensor system and the measuring laser tape measure system; micro platform suspended on two coarse moving platform, two coarse movement are symmetrically disposed at both sides of the fine movement table, two coarse moving platform suspended on the base frame;

[0007] 粗动平台包括一个直线电机、一个连接元件、一个支撑元件和一个导向元件;粗动平台在直线电机驱动下沿Y轴运动;支撑元件的下表面与基架的上表面正面相对,支撑元件下表面有气孔,气孔轴线沿Z轴方向,在支撑元件与基架之间形成沿Z轴方向的气浮支撑;导向元件侧面与基架的侧面正面相对,导向元件的侧面有气孔,气孔的轴线沿X轴方向,导向元件与基架之间形成气浮导向,导向方向沿Y轴方向; [0007] The coarse movement platform comprises a linear motor, a connecting member, a member and a guide member support; coarse movement stage is movable in the Y-axis movement under the linear motor drive; front upper surface of the lower surface of the base frame of the supporting member opposite, lower support member surface of the pores, the pores along the axis Z-axis direction, is formed in the air bearing supporting the Z-axis direction between the support member and the base frame; frontal side guide member side surface opposite to the base frame, the side guide element with an air hole, X-axis direction along the axis of the hole, the guide element and the base frame is formed between the air bearing guide, a guide in the direction of Y-axis direction;

[0008] 光栅测量系统包含两个光栅测量装置,每个光栅测量装置包括一个光栅尺、一个光栅尺安装架、一个读数头和光栅尺调整装置;光栅尺调整装置固定于基架上,光栅尺安装架与光栅尺调整装置固定连接,通过调整光栅尺调整架使光栅尺安装架的长边方向沿Y轴方向;光栅尺粘贴固定于光栅尺安装架表面上,光栅条纹沿Y轴方向,光栅读数头与直线电机连接; [0008] The grating measuring system comprises two measuring devices gratings, each grating measuring means comprises a grating, a grating mount, and a reading head grating adjustment means; grating adjustment means fixed to the base frame, grating mount to the scale adjusting device is fixedly connected, by adjusting the grating adjustment bracket so grating the longitudinal direction of the mounting bracket along the Y-axis direction; grating adhesively affixed to the grating mount surface, the grating strips along the Y-axis direction, the grating reading head is connected with the linear motor;

[0009] 电涡流传感器测量系统包括安装在粗动台上七个电涡流传感器,测量金属导体安装在微动平台上;第一电涡流传感器和第二电涡流传感器安装在第一粗动台上,并位于沿Y轴的一条直线上,第三电涡流传感器和第四电涡流传感器分别安装在第一粗动台与第二粗动台上,并位于一条沿X轴方向的直线上,第五电涡流传感器和第六电涡流传感器安装在第一粗动台的连接元件上,并位于一条沿Y轴方向的直线上,第七电涡流传感器安装在第二粗动台上,并与第五电涡流传感器位于一条沿X轴方向的直线上; [0009] The eddy current sensor measurement system comprises seven eddy current sensor mounted on the coarse movement stage, the measurement of metal conductors mounted on the fine movement table; a first eddy current sensor and the second eddy current sensor is mounted on a first coarse movement stage and on a straight line along the Y axis, the third and fourth eddy current sensor eddy current sensors are mounted on the first and second coarse movement stage coarse movement stage, and is located on a straight line along the X-axis direction, a first five eddy current sensor and a sixth eddy current sensor mounted on a first connection element of the coarse movement stage, and is located on a straight line along the Y-axis direction, a seventh second eddy current sensor is mounted in the coarse movement stage, and the first five eddy current sensor is located on a straight line along the X-axis direction;

[0010] 激光尺测量系统安装在基架上,测量微动平台在Y方向的位移。 [0010] laser tape measure system mounted on the base frame, the platform displacement measuring fine movement in the Y direction.

[0011] 微动平台包括四个沿Y轴方向驱动的第一音圈电机、两个沿X轴方向驱动的第二音圈电机和四个沿Z轴方向驱动的第三音圈电机;第一音圈电机包括上下永磁体组件和位于永磁体组件之间的线圈组件;各线圈组件绕线平面在同一平面,且位于两个永磁体组件之间,并保留间隙;每个永磁体组件包括铁轭、主永磁体、附永磁体,主永磁体与各附永磁体以Halbach阵列形式粘接固定于铁轭的表面上;各附永磁体与各主永磁体的磁场方向相互垂直,在第两个永磁体组件中形成封闭磁路;四个第一音圈电机中的线圈组件固定在粗动平台上,永磁体组件固定在微动平台上;第二音圈电机包括一个线圈组件和对称布置在线圈组件两侧的两个永磁体组件;每个永磁体组件包括主永磁体和铁轭;各主永磁体以常规阵列的形式粘接固定在铁轭表面上;各永磁体组件之间 [0011] jog platform comprising four Y-axis direction of the first voice coil motor driving, two X-axis direction and a voice coil motor drives the second Z-axis direction driving four third voice coil motor; first a voice coil motor includes a coil assembly between the upper and lower permanent magnet assembly and the permanent magnet assembly; winding plane of each coil assembly in the same plane, and located between the two permanent magnet assembly, and a retention gap; each permanent magnet assembly comprising the iron yoke, the main permanent magnet, attached to the permanent magnet, main permanent magnet and the permanent magnets attached to each of the adhesive in the form of Halbach array is fixed to the upper surface of the yoke; attached to each permanent magnet and the direction of the main magnetic field of the permanent magnet perpendicular to each other, the first two permanent magnets form a closed magnetic circuit assembly; first four voice coil motor coil assembly is fixed on the coarse moving platform, the permanent magnet assembly is fixed in the micro movable platform; the second voice coil motor includes a coil assembly and a symmetrical permanent magnet assembly disposed at two sides of the coil assembly; each permanent magnet assembly comprises a permanent magnet and a main yoke; each of the main permanent magnet bonded form of a conventional fixed array on the surface of the yoke; between the permanent magnet assembly 成封闭磁路;第二音圈电机中的线圈组件固定在粗动台上,第二音圈电机中的永磁体组件固定在微动平台上;第三音圈电机包括外磁环、内磁环、圆柱线圈组件、重力平衡磁柱;外磁环与内磁环的轴线沿Z轴方向,外磁环与内磁环充磁方向相同,沿径向方向且由圆环外表面指向圆心;圆柱线圈位于内磁环与外磁环之间,绕线轴线沿Z轴方向;磁柱的轴线沿Z轴方向,充磁方向沿Z轴正方向;第三音圈电机的圆柱线圈组件固定在粗动台上。 A closed magnetic circuit; a second voice coil motor coil assembly is fixed to the coarse movement stage, a second voice coil motor permanent magnet assembly in the micro movable platform; third voice coil motor comprising an outer magnetic ring, the magnetic ring, cylindrical coil assembly, the weight balance cylinders; Z-direction axis of the outer ring and the inner ring, the outer ring and the inner ring the same magnetization direction, and in the radial direction from the center point to the outer surface of the ring; a cylindrical coil between the inner ring and the outer ring, the winding axis in the Z axis direction; the Z-axis direction of the axis of the cylinders, the direction of magnetization along the Z-axis direction; a third cylindrical coil assembly is fixed to the voice coil motor coarse movement stage.

附图说明 BRIEF DESCRIPTION

[0012] 图1为本发明定位装置结构原理示意图(轴测图)。 [0012] FIG schematic structural principle of the device 1 is positioned (isometric view) of the present invention.

[0013] 图2为本发明粗动台轴测图。 [0013] FIG isometric view of the coarse movement stage 2 of the present invention.

[0014] 图3为本发明粗动台侧视图。 [0014] Figure 3 a side view of the present invention, the coarse stage.

[0015] 图4为本发明微动平台结构示意图(轴测图)。 [0015] Fig 4 a schematic view of the structure of the platform (isometric view) jog the present invention.

[0016] 图5为本发明第一音圈电机剖视图。 [0016] Figure 5 a sectional view of the first voice coil motor of the present invention.

[0017] 图6为本发明第二音圈电机结构示意图(轴测图)。 [0017] Fig 6 a schematic view of a second structure of a voice coil motor (isometric view) of the present invention.

[0018] 图7为第二音圈电机剖视图。 [0018] FIG. 7 is a cross-sectional view of a second voice coil motor.

[0019] 图8为本发明音圈电机线圈位置示意图。 [0019] Figure 8 is a schematic view of the position of the voice coil motor coil to the invention.

[0020] 图9为本发明第三音圈电机结构示意图(轴测图)。 [0020] Figure 9 a schematic view of a third structure of a voice coil motor (isometric view) of the present invention.

[0021] 图10为本发明第三音圈电机外磁环图。 [0021] The voice coil motor 10 according to a third invention, the outer ring of FIG.

[0022] 图11为本发明第三音圈电机内磁环图。 [0022] FIG inner ring 11 of the third voice coil motor of the present invention FIG.

[0023] 图12为本发明第三音圈电机磁柱图。 [0023] FIG. 12 is a third voice coil motor cylinders invention FIG.

[0024] 图13为本发明水平方向电涡流传感器位置示意图。 [0024] FIG 13 a schematic view of a horizontal electric eddy current sensor position and direction of the present invention.

[0025] 图14为本发明垂直方向电涡流传感器位置示意图。 [0025] FIG 14 a schematic view of an electrical eddy current sensor position in the vertical direction of the present invention. [0026] 图15为本发明光栅尺示意图(轴测图)。 [0026] FIG. 15 schematic scale (isometric view) of the present invention.

[0027] 图16为本发明光栅尺主视图。 [0027] FIG 16 scale front view of the present disclosure.

[0028] 图17为本发明激光尺位置示意图。 [0028] FIG 17 a schematic view of the position of the laser scale present invention.

[0029] 图中: [0029] FIG:

[0030] 001-基架; [0030] The base frame 001;

[0031] 100-粗动台 [0031] The coarse movement stage 100

[0032] 101-直线电机,102-支撑元件,103-导向元件,104-连接元件 [0032] The linear motor 101, the support member 102-, 103- guide element, the connecting element 104-

[0033] 2OO-微动平台 [0033] 2OO- internet jog

[0034] 210-第一音圈电机 [0034] The first voice coil motor 210-

[0035] 211-第一线圈组件,212-第一永磁体组件,213-第二永磁体组件 [0035] The first coil assembly 211-, 212- first permanent magnet assembly, a second permanent magnet assembly 213-

[0036] 2121-第一主永磁体,2123-第二主永磁体,2125-第三主永磁体,2131-第四主永磁体,2133-第五主永磁体,2135-第六主永磁体,2122-第一附永磁体,2124-第二附永磁体,2132-第三附永磁体,2134-第四附永磁体,2142-第一铁轭 [0036] a first main permanent magnet 2121-, 2123- second main permanent magnet, main permanent magnet third 2125-, 2131- fourth main permanent magnet, main permanent magnet fifth 2133-, 2135- sixth main permanent magnet , 2122- attached to a first permanent magnet, a permanent magnet attached to the second 2124-, 2132- permanent magnet attached to the third, fourth attachment 2134- permanent magnet, a first yoke 2142-

[0037] 220-第二音圈电机 [0037] The second voice coil motor 220

[0038] 221-第二线圈组件,222-第三永磁体组件,223-第四永磁体组件,2221-第七主永磁体,2222-第八主永磁体,2231-第九主永磁体,2232-第十主永磁体,2241-第三铁轭,2242-第四铁轭 [0038] 221- second coil assembly, a third permanent magnet assembly 222-, 223- fourth permanent magnet assembly, the permanent magnets of the seventh main 2221-, 2222- eighth main permanent magnet, main permanent magnet 2231- ninth, 2232- tenth main permanent magnet, third yoke 2241-, 2242- fourth yoke

[0039] 230-第三音圈电机 [0039] The third voice coil motor 230-

[0040] 231-圆柱线圈组件,232-外磁环,233-内磁环,234-磁柱 [0040] Cylindrical coil assembly 231-, 232- outer ring, the inner ring 233-, 234- cylinders

[0041] 401-第一电涡流传感器,402-第二电涡流传感器,403-第三电涡流传感器,404-第四电涡流传感器,405-第五电涡流传感器,406-第六电涡流传感器,407-第七电涡流传感器 [0041] a first eddy current sensor 401, 402- second eddy current sensor, an eddy current sensor 403 of the third, fourth eddy current sensor 404, fifth eddy current sensor 405, the eddy current sensor sixth 406- , 407- seventh eddy current sensor

[0042] 300-光栅测量装置 [0042] The measuring apparatus 300 Grating

[0043] 301-光栅尺安装架,302-光栅尺调整装置,303-光栅尺,304-读数头 [0043] The grating mount 301, the adjustment means grating 302, grating 303, 304- readheads

[0044] 900-激光尺 [0044] Laser 900 feet

具体实施方式 Detailed ways

[0045] 下面结合附图对本发明的原理、结构和工作过程来进一步说明本发明。 [0045] Next, the principles of the present invention, the structure and operation of the present invention will be further described in conjunction with the accompanying drawings.

[0046] 图1为本发明定位装置的结构示意图(轴测图)。 [0046] FIG. 1 is a schematic structural diagram positioning means (isometric view) of the present invention. 本发明定位装置包括基架001、一个微动平台200、两个对称布置在微动平台两侧的粗动平台100。 Positioning means of the present invention includes a base frame 001, a fine movement table 200, two symmetrically arranged on both sides of the coarse movement jog internet platform 100.

[0047] 图2为粗动台结构轴测图,图3为粗动台侧视图。 [0047] Figure 2 is an isometric view of the structure of the coarse movement stage, FIG. 3 is a side view of the coarse stage. 每个粗动平台100包括一个直线电机101、一个连接元件104、一个气浮支撑元件102和一个气浮导向元件103。 Each platform 100 includes a coarse movement linear motor 101, a connecting member 104, a support member 102 and a flotation flotation guide member 103. 连接元件104与直线电机固接,气浮支撑元件102与直线电机固连,气浮导向元件103与气浮支撑元件102固连。 Connecting member 104 fixed to the linear motor, air support member 102 is fixedly connected with the linear motor, air guide member 103 and the support member 102 is secured flotation.

[0048] 气浮支撑元件102的下表面与基架001的上表面正面相对,支撑元件102下表面有气孔,气孔轴线沿Z轴方向,气浮支撑元件102与基架001之间形成沿Z轴方向的气浮支撑,气浮支撑方式采用真空预载的方式;气浮导向元件103的侧面与基架001的侧面正面相对,气浮导向元件103的侧面有气孔,气孔的轴线沿X轴方向,气浮导向元件103与基架001之间形成气浮导向,导向方向沿Y轴方向,气浮方式为真空预载的方式。 On the front surface of [0048] the lower surface of the air bearing supporting member 102 of the base frame 001 relative to the support surface of the lower member 102 has a hole formed along the axis Z between the hole in the Z axis direction, the support member 102 and the flotation base frame 001 flotation support shaft direction, the support flotation embodiment uses a vacuum preload; frontal side side surface of the base frame member 103 of the air bearing guide 001 opposite the side of the air bearing guide member 103 has pores, the pores along the axis of the X-axis direction, is formed between the guide flotation flotation guide member 103 and the base frame 001, guide the direction of the Y-axis direction, the flotation embodiment of a vacuum preload. [0049] 图4为微动平台结构轴测图,微动平台200由四个沿Y轴方向驱动的第一音圈电机210、两个沿X轴方向驱动的第二音圈电机220和四个沿Z轴方向驱动的第三音圈电机230,通过这十个音圈电机实现微动平台200的六自由度运动。 [0049] FIG. 4 is an isometric view of the jog platform structure, platform driven by a jog four Y-axis direction of the voice coil motor 200 of the first 210, the two X-axis direction along the second voice coil motor 220 is driven and tetrakis a Z-axis direction along a third voice coil motor 230 is driven by a voice coil motor to achieve the ten micro six degrees of freedom of movement of the platform 200.

[0050] 图5为第一音圈电机210结构剖视图。 [0050] FIG. 5 is a cross-sectional view of the structure of the first voice coil motor 210. 第二音圈电机210包括第一永磁体组件212、第二永磁体组件213、第一线圈组件211。 A second voice coil motor 210 comprises a first permanent magnet assembly 212, a second permanent magnet assembly 213, the first coil assembly 211. 第一线圈组件211位于第一永磁体组件212与第二永磁体组件213之间,并保留间隙。 A first coil assembly 211 is in the first permanent magnet assembly 212 and between the second permanent magnet assembly 213, and a gap remains.

[0051] 第一永磁体组件212包括第一铁轭2142与主永磁体、附永磁体,沿X轴方向依次为第一主永磁体2121、第一附永磁体2122、第二主永磁体2123、第二附永磁体2124、、第三主永磁体2125,各主永磁体与各附永磁体粘接固定于第一铁轭2142的表面上。 [0051] The first permanent magnet assembly 212 includes a first yoke 2142 and the main permanent magnet, the permanent magnet is attached, followed along the X-axis direction of the first main permanent magnet 2121, a first permanent magnet 2122 attached to the second main permanent magnet 2123 an upper surface, a second permanent magnet attached to the third main permanent magnet 2124 ,, 2125, each of the main permanent magnet and the permanent magnets attached to each of the bonded and fixed to the first yoke 2142. 第二永磁体组件213包括第一铁轭2142与主永磁体、附永磁体,沿X轴方向依次为第四主永磁体2131、第三附永磁体2132、第五主永磁体2133、第四附永磁体2134、第六主永磁体2135,各主永磁体与各附永磁体粘接固定于第一铁轭2142的表面上。 A second permanent magnet assembly 213 includes a first yoke 2142 and the main permanent magnet, the permanent magnet is attached, the X-axis direction followed by the fourth main permanent magnet 2131, permanent magnet 2132 attached to the third, the fifth main permanent magnet 2133, a fourth attaching permanent magnets 2134, 2135 sixth main permanent magnets, each of the main permanent magnet and the permanent magnets attached to each of the bonded and fixed to the first surface 2142 of the yoke. 第一主永磁体2121、第三主永磁体2125、第四主永磁体2131、第六主永磁体2135的充磁方向为Z轴负方向,第二主永磁体2123、第五主永磁体2133的充磁方向为Z轴正方向。 2121 the first main permanent magnet, main permanent magnet 2125 third, fourth main permanent magnet 2131, the sixth main direction of magnetization of the permanent magnet 2135 as a Z-axis negative direction, 2123, the fifth main permanent magnet of the second main permanent magnet 2133 the magnetization direction of the Z-axis positive direction. 第一主永磁体2121的N极面正对第四主永磁体2131的S极面,第二主永磁体2123的S极面正对第五主永磁体2133的N极面,第三主永磁体2125的N极面正对第六主永磁体2135的S极面。 A first main surface of N pole permanent magnet 2121 is on the fourth main surface of S pole permanent magnets 2131, 2123 face the S pole of the permanent magnet facing the second main permanent magnets 2133 of the fifth main surface of N pole, the third main permanent 2125 N pole face of the magnet on the surface of the positive sixth main S pole of the permanent magnet 2135. 第一附永磁体2123、第四附永磁体2134的充磁方向为Y负方向,第三附永磁体2124、第三附永磁体2132的充磁方向为Y正方向。 A first permanent magnet 2123 is attached, the direction of magnetization of the fourth permanent magnet 2134 is attached to the negative Y direction, 2124, the direction of magnetization of the third permanent magnet attached to the third permanent magnet 2132 is attached to the positive Y direction. 各附永磁体与各主永磁体的磁场方向相互垂直,在第一永磁体组件212与第二永磁体组件213中分别构成了Halbach阵列形式,且形成封闭磁路。 Each permanent magnet and attached to the main direction of the magnetic field of the permanent magnets perpendicular to each other, the first permanent magnet assembly 212 and a second permanent magnet assembly 213 constitute a Halbach array form, and form a closed magnetic circuit.

[0052] 如图12所示,四个第一音圈电机210中的第一线圈组件211分别固定在两个粗动台100上,第一永磁体组件212与第二永磁体组件213分别固定在微动平台200上。 [0052] As shown in FIG. 12, four first voice coil motor 210 of the first coil assembly 211 are fixed on the two coarse movement stage 100, the first permanent magnet assembly 212 and the second fixed permanent magnet assembly 213 on the micro-platform 200. 线圈通电时,电流方向与磁场方向垂直,因此将产生洛仑兹力。 When the coil is energized, the current direction perpendicular to the magnetic field direction, thus generating the Lorentz force. 洛仑兹力方向、通电线圈电流方向与磁感应强度方向相互垂直,使得第一永磁体组件212与第二永磁体组件213在洛仑兹力作用下沿Y轴方向运动。 Lorentz force direction, the energization coil current direction and magnetic induction mutually perpendicular directions, such that the first permanent magnet assembly 212 and a second permanent magnet assembly 213 in the Y-axis direction in the Lorentz force. 当四个第一音圈电机210沿Y轴方向驱动力相同时,实现微动平台200沿Y轴运动,当该四个第一音圈电机210沿Y轴方向驱动力不相同时,实现微动平台200绕Z轴的转动。 When four first voice coil motor 210 in the Y-axis direction driving force of the same, to achieve the Y-axis jog motion platform 200, 210 when the four Y-axis direction of the first voice coil motor driving force is not the same, to achieve a micro the movable platform 200 is rotated about the Z axis.

[0053] 图6为第二音圈电机220轴测图,图7为第二音圈电机220剖视图。 [0053] FIG. 6 is an isometric view of a second voice coil motor 220, FIG. 7 is a cross-sectional view of a second voice coil motor 220. 第二音圈电机220包括第三永磁体组件222、第四永磁体组件223和第二线圈组件221。 222 comprises a second voice coil motor 220, a fourth permanent magnet assembly 223 and the second coil assembly 221 of the third permanent magnet assembly. 第三永磁体组件222包括第七主永磁体2221、第八主永磁体2222、第三铁轭2241。 Third permanent magnet assembly 222 includes a permanent magnet of the seventh main 2221, an eighth of the main permanent magnet 2222, a third ferromagnetic yoke 2241. 第四永磁体组件223包括第九主永磁体2231、第十主永磁体2232、第四铁轭2242。 Fourth permanent magnet assembly 223 includes a main permanent magnet 2231 ninth, tenth main permanent magnets 2232, 2242 of the fourth yoke. 第七主永磁体2221、第八主永磁体2222固定于第三铁轭2241上,第九主永磁体2231、第十主永磁体2232固定于第四铁轭2242上。 2221 of the seventh main permanent magnets, eight permanent magnet 2222 is fixed to the main yoke on the third 2241, 2231 ninth main permanent magnet, main permanent magnet 2232 fixed to a tenth to a fourth ferromagnetic yoke 2242. 第八主永磁体2222与第十主永磁体2231的充磁方向沿Z轴正方向,第七主永磁体2221与第九主永磁体2231的充磁方向沿Z轴负方向。 2222 Eighth main permanent magnet magnetization direction X of the main permanent magnet 2231 in the Z-axis positive direction, the magnetization direction of the permanent magnet 2221 of the seventh main ninth main permanent magnet 2231 in the Z-axis negative direction. 第七主永磁体2221的N极表面与第九主永磁体2231的S极表面正面相对,第八主永磁体2222的S极表面与第十主永磁体2232的N极表面正面相对,各永磁体组件之间形成封闭磁路。 S of the seventh main surface of the N-pole of the permanent magnet 2221 and permanent magnet 2231 ninth main pole opposing the front surface, the eighth main electrode S of the permanent magnet 2222 and the surface 2232 of the tenth main N pole of the permanent magnet opposite the front surface, each of the permanent forming a closed magnetic path between the magnet assembly.

[0054] 第二线圈组件221位于第三永磁体组件222与第四永磁体组件223之间,并留有间隙。 [0054] The second assembly 221 is located between the coil 222 and the fourth permanent magnet assembly 223 of the third permanent magnet assembly, and clearance. 第二音圈电机220中的线圈组件221分别固定在两个粗动台100上,第二音圈电机220中的各永磁体组件固定在微动平台200上。 A second voice coil motor 220 in the coil assembly 221 are fixed on the two coarse movement stage 100, the permanent magnet assembly in the second voice coil motor 220 is fixed to the micro movable platform 200. 线圈通电时,电流方向与线圈有效部分所在区域的磁场方向垂直,因此将产生洛仑兹力。 When the coil is energized, the current direction of the magnetic field direction of the effective area of ​​the coil portion is located vertically, thus generating the Lorentz force. 洛仑兹力方向、通电线圈电流方向与磁感应强度方向相互垂直,使得第三永磁体组件222与第四永磁体组件223在洛仑兹力作用下实现沿X轴方向运动,因此驱动微动平台200沿X轴方向运动。 Lorentz force direction, the energization coil current direction and magnetic induction mutually perpendicular directions, so that the third and the fourth permanent magnet assembly 222 to achieve the permanent magnet assembly 223 in the X axis direction in the Lorentz force, so that the drive platform jog 200 movement along the X-axis direction.

[0055] 图8为第三音圈电机230结构轴测图。 [0055] FIG 8 is a third isometric view of the structure of a voice coil motor 230. 第三音圈电机230包括外磁环232、内磁环233、圆柱线圈组件231、重力平衡磁柱234。 The third voice coil motor 230 includes an outer ring 232, inner ring 233, a cylindrical coil assembly 231, the weight balance cylinders 234.

[0056] 图9为第三音圈电机230中外磁环232主视图。 [0056] FIG. 9 is a front view 232 230 foreign third magnetic voice coil motor. 图10为第三音圈电机230中内磁环233主视图。 233 FIG 10 is a front view of the inner ring 230 of the third voice coil motor. 图11为第三音圈电机230中磁柱234主视图。 234 FIG 11 is a front view of the third voice coil motor 230 cylinders. 外磁环232与内磁环233的轴线沿Z轴方向,外磁环232与内磁环233充磁方向相同,沿径向方向且由圆环外表面指向圆心。 The outer ring and the inner ring 232 along the axis 233 of the Z-axis direction, the outer ring 232 and inner ring 233 the same magnetizing direction, in the radial direction and an outer ring surface directed from the center of the circle. 圆柱线圈组件231位于内磁环233与外磁环232之间,绕线轴线沿Z轴方向。 Cylindrical assembly 231 is located within the coil 233 between the magnet ring 232, the winding axis of the Z-axis direction and the outer ring. 磁柱234的轴线沿Z轴方向,充磁方向沿Z轴正方向。 Z-axis direction along the axis of cylinders 234, the magnetization direction of the Z-axis positive direction. 四个第三音圈电机230的圆柱线圈组件231分别固定在粗动台100两个直线电机上,第三音圈电机230的外磁环232、内磁环233和磁柱234固定在微动平台200上。 Four third cylindrical voice coil motor 230 of the coil assembly 231 are fixed to the coarse movement stage 100 two linear motors, voice coil motor 230 of the third outer ring 232, inner ring 233 and the magnetic column 234 is fixed to the jog 200 on the platform. 圆柱线圈组件231通电时,圆柱线圈组件231与内磁环233、外磁环232之间产生洛仑兹力,当四个第三音圈电机230产生的洛仑兹力大小相同时,实现微动平台200沿Z轴方向运动,当四个第三音圈电机230产生的洛仑兹力大小不同时,实现微动平台200绕X轴转动与绕Y轴转动。 Cylindrical assembly 231 when the coil is energized, the coil assembly 231 and the inner cylinder is generated between the magnet ring 233, outer ring 232 Lorentz force, the Lorentz force is the same size as the third voice coil motor 230 generates four achieve micro 200 along the Z-axis direction moving platform, the third four Lorentz force magnitude when the voice coil motor 230 is not generated at the same time, realize fine movement stage 200 rotation about the X axis and rotate about the Y axis. 线圈通电时,圆柱线圈组件231与磁柱234之间产生洛仑兹力,改变电流的大小使得产生的洛仑兹力与微动平台200的重力相等,达到微动平台200重力平衡的目的。 When the coil is energized, the coil assembly 231 and the cylindrical magnetic pin 234 between the Lorentz force, so that changing the magnitude of the current jog Lorentz force equal to the gravity of the platform 200 is generated, the purpose of the jog stage 200 gravitational equilibrium.

[0057] 图13为水平方向电涡流传感器位置示意图,图14为垂直方向电涡流传感器位置示意图。 [0057] FIG. 13 is a schematic horizontal position of the eddy current sensor, FIG. 14 is a schematic vertical direction eddy current sensor position. 微动平台200与粗动台100的相对位置测量系统中包括七个电涡流传感器,每个电涡流传感器安装在粗动台100上,测量金属导体安装在微动平台200上。 200 and the fine movement of the coarse stage platform relative position measuring system 100 includes seven eddy current sensor, each of the eddy current sensor mounted on the coarse movement stage 100, is mounted on a metal conductor measuring jog platform 200. 第一电涡流传感器401、第二电涡流传感器402安装在第一粗动台100上,并位于沿Y轴的一条直线上,测量微动平台200与粗动台100之间沿χ轴方向相对距离,第一电涡流传感器401与第二电涡流传感器402信号的差动可测量微动平台200与两个粗动台100之间绕Z轴的相对转角。 A first eddy current sensor 401, a second eddy current sensor 402 mounted on a first coarse movement stage 100, and on a straight line along the Y axis, the platform 200 and the fine movement measuring coarse movement stage 100 in the opposite direction between the axis χ distance, a first of the differential eddy current sensor 401 may measure a second electrical signal of the eddy current sensor 402 internet 200 and the jog two coarse movement relative rotational angle around the Z axis between the station 100. 第三电涡流传感器403、第四电涡流传感器404分别安装在第一粗动台100与第二粗动台100上,并位于一条沿X轴方向的直线上,分别测量微动平台200相对于第一粗动台100、第二粗动台100沿Y轴方向的距离。 The third eddy current sensor 403, a fourth eddy current sensor 404 are mounted on a first coarse movement stage 100 and the second coarse movement stage 100, and is located on a straight line along the X-axis direction, were measured with respect to the fine movement stage 200 a first coarse movement stage 100, a second coarse movement 100 from Y-axis direction of the stage. 第五电涡流传感器405、第六电涡流传感器406安装在第一粗动台100的连接元件104上,并位于一条沿Y轴方向的直线上,这两个电涡流传感器用于测量微动平台200与第一粗动台100之间沿Z轴方向距离,这两个电涡流传感器信号的差动可测量微动平台200相对第一粗动台100的绕X轴的转角。 Fifth eddy current sensor 405, a sixth eddy current sensor 406 mounted on the connecting member 104 of the first coarse stage 100 and is located on a straight line along the Y-axis direction, the two eddy current sensor for measuring the internet jog coarse movement stage 200 and the first distance 100 between the Z-axis direction, the two differential eddy current sensor may measure a signal relative to the first jog stage 200 about the X-axis coarse movement stage 100 rotation angle. 第七电涡流传感器407安装在第二粗动台100上,并与第五电涡流传感器405位于一条沿X轴方向的直线上,第七电涡流传感器407测量微动平台200与第二粗动台100沿Z轴方向的距离,第七电涡流传感器407与第五电涡流传感器405信号的差动测量微动平台200相对于第一粗动台100、第二粗动台100的绕Y轴的转角。 Seventh eddy current sensor 407 mounted on the coarse movement stage 100 second, and fifth eddy current sensor 405 is located on a straight line along the X-axis direction, the eddy current sensor 407 measuring the seventh movable platform 200 and the second micro-coarse movement distance 100 along the Z-axis direction stage, the eddy current sensor 407 and a seventh differential measuring fifth electrical signal 405 micro eddy current sensor 200 with respect to the platform about a first axis Y coarse movement stage 100, a second coarse movement stage 100 corner.

[0058] 图15为本发明装置中光栅尺测量轴测图,图16为光栅尺测量装置主视图。 [0058] FIG scale measuring device 15 an isometric view of the present invention, the grating 16 is a front view of the measuring device. 粗动台100包括两个光栅测量装置300,该两个光栅测量装置300沿X轴方向对称布置在粗动台100的两侧。 Coarse movement stage 100 includes two gratings measuring means 300, measuring means 300 of the two gratings in the X-axis direction are arranged symmetrically at both sides of the coarse movement stage 100. 每个光栅测量装置300包括一个光栅尺303、一个光栅尺安装架301、一个读数头304和光栅尺调整装置302。 Each grating 300 comprises a measuring means 303, a grating mount 301, a readhead 304 and a scale adjusting means 302 scale. 光栅尺调整装置302固定于基架001上,光栅尺安装架301与光栅尺调整装置302固定连接,通过调整光栅尺调整架302使光栅尺安装架301的长边方向沿Y轴方向。 Scale adjusting means 302 is fixed to the base frame 001, grating 301 and the grating mount 302 is fixedly connected to the adjusting device, by adjusting the adjustment bracket 302 that the grating longitudinal direction of grating mount 301 along the Y-axis direction. 光栅尺303粘贴固定于光栅尺安装架301表面上,光栅条纹沿Y轴方向。 Scale 303 attached to the fixed grating mount surface 301, along the Y-axis direction of the grating strips. 光栅读数头304与直线电机101连接,当直线电机101沿Y轴运动时,光栅测量装置300用来检测粗动台100直线电机101沿Y轴方向的位置。 Readhead grating 304 is connected to the linear motor 101, the motor 101 when the linear motion along the Y axis, means 300 for detecting the grating measuring the position of the coarse movement 100 along the Y-axis direction linear motor 101.

[0059] 图17为激光测量装置示意图,激光尺900测量微动平台200沿Y轴方向绝对位置。 [0059] FIG 17 is a schematic view of a laser measuring device, a laser measurement ruler 900 fine movement direction of the table 200 along the Y-axis absolute position.

Claims (2)

1.一种无接触式粗精动叠层六自由度定位装置,其特征在于:所述定位装置包含基架(001)、一个微动平台(200)、两个粗动平台(100)和测量系统,所述测量系统包含光栅测量系统、电涡流传感器测量系统和激光尺测量系统(900);微动平台(200)悬浮在两个粗动平台(100)上,两个粗动平台(100)对称布置在微动平台(200)两侧,两个粗动平台(100)悬浮在基架(001)上; 所述的粗动平台(100)包括一个直线电机、一个连接元件、一个支撑元件和一个导向元件;粗动平台(100)在直线电机驱动下沿Y轴运动;连接元件与直线电机固接;支撑元件的下表面与基架的上表面正面相对,支撑元件下表面有气孔,气孔轴线沿Z轴方向,在支撑元件与基架之间形成沿Z轴方向的气浮支撑;导向元件侧面与基架的侧面正面相对,导向元件的侧面有气孔,气孔的轴线沿X轴方向,导向元件与基架之间形 A non-contact type of coarse and fine positioning means movable stack six degrees of freedom, characterized in that: said positioning means comprises a base frame (001), a jog platform (200), two coarse movement platform (100) and measurement system, the measurement system comprises a grating measuring system, measuring the eddy current sensor system and a laser tape measure system (900); jog platform (200) suspended on two coarse movement platform (100), two coarse movement platform ( (200) 100 sides) are arranged symmetrically in the micro platform, two coarse moving platform (100) suspended on the base frame (001); the coarse moving platform (100) includes a linear motor, a connecting member, a the support member and a guide member; coarse movement platform (100) in the linear motor driving the Y-axis motion; connecting element linear motor fixed; the front upper surface of the lower surface of the base frame of the support member opposite the support surface of the lower member pores, the pores in the Z axis direction is formed in the air bearing supporting the Z-axis direction between the support member and the base frame; frontal side guide member side surface opposite to the base frame, the side guide element has pores, the pores in the X-axis the axial direction, is formed between the guide member and the base frame 气浮导向,导向方向沿Y轴方向; 所述的光栅测量系统包含两个光栅测量装置(300),每个光栅测量装置包括一个光栅尺、一个光栅尺安装架、一个读数头和光栅尺调整装置;光栅尺调整装置固定于基架上,光栅尺安装架与光栅尺调整装置固定连接,通过调整光栅尺调整架使光栅尺安装架的长边方向沿Y轴方向;光栅尺粘贴固定于光栅尺安装架表面上,光栅条纹沿Y轴方向,光栅读数头与直线电机连接; 所述的电涡流传感器测量系统包括安装在粗动台上七个电涡流传感器,测量金属导体安装在微动平台上;第一电涡流传感器和第二电涡流传感器安装在第一粗动台上,并位于沿Y轴的一条直线上,第三电涡流传感器和第四电涡流传感器分别安装在第一粗动台与第二粗动台上,并位于一条沿X轴方向的直线上,第五电涡流传感器和第六电涡流传感器安装在第 Flotation guide, guide the direction of Y-axis direction; said grating comprising two grating measuring system measuring means (300), each grating comprising a grating measuring device, a grating mount, and a reading head grating adjustment means; scale adjusting device is fixed to the base frame, and the grating scale mounting bracket fixedly connected to the adjusting device, by adjusting the adjustment bracket grating so that the longitudinal direction of the grating mount along the Y-axis direction; fixed grating attached to the grating foot mounting bracket surface, the grating strips along the Y-axis direction, the reading head grating and linear motor; said eddy current sensor measurement system comprises seven eddy current sensor mounted on the coarse movement stage, the measurement jog metal conductor mounted on the platform a; a first eddy current sensor and the second eddy current sensor is mounted on a first coarse movement stage, and on a straight line along the Y axis, the third and fourth eddy current sensor eddy current sensors are mounted on a first coarse movement coarse movement stage and the second stage, and is located on a straight line along the X-axis direction, the sixth and fifth eddy current sensor installed in the first eddy current sensor 粗动台的连接元件上,并位于一条沿Y轴方向的直线上,第七电涡流传感器安装在第二粗动台上,并与第五电涡流传感器位于一条沿X轴方向的直线上; 所述激光尺测量系统(900 )安装在基架(001)上,测量微动平台在Y方向的位移。 The connecting element of the coarse movement stage, and is located on a straight line along the Y-axis direction, a seventh second eddy current sensor is mounted in the coarse movement stage, and fifth eddy current sensor is located on a straight line along the X-axis direction; the laser tape measure system (900) is mounted on the base frame (001), measuring the displacement of the platform in a Y fine movement directions.
2.如权利要求1中所述的一种无接触式粗精动叠层六自由度定位装置,其特征在于:微动平台(200)包括四个沿Y轴方向驱动的第一音圈电机、两个沿X轴方向驱动的第二音圈电机和四个沿Z轴方向驱动的第三音圈电机; 第一音圈电机包括上下永磁体组件和位于永磁体组件之间的线圈组件;各线圈组件绕线平面在同一平面,且位于两个永磁体组件之间,并保留间隙;每个永磁体组件包括铁轭、主永磁体、附永磁体,主永磁体与各附永磁体以Halbach阵列形式粘接固定于铁轭的表面上;各附永磁体与各主永磁体的磁场方向相互垂直,在第两个永磁体组件中形成封闭磁路;四个第一音圈电机中的线圈组件固定在粗动平台上,永磁体组件固定在微动平台上; 第二音圈电机包括一个线圈组件和对称布置在线圈组件两侧的两个永磁体组件;每个永磁体组件包括主永磁体和 1 2. The one non-contact type in the coarse and fine movement in claim laminate six degrees of freedom positioning device, wherein: the fine movement table (200) comprising four Y-axis direction of the first voice coil motor drive , two X-axis direction and a voice coil motor drives the second Z-axis direction driving four third voice coil motor; a first voice coil motor includes a coil assembly between the upper and lower permanent magnet assembly and the permanent magnet assembly; each coil assembly winding plane in the same plane, and located between the two permanent magnet assembly, and a retention gap; each permanent magnet assembly comprises a yoke, the main permanent magnet, attached to the permanent magnet, main permanent magnet and the permanent magnets attached to each Halbach array form adhesively fixed to the upper surface of the yoke; attached to each permanent magnet and the direction of the main magnetic field of the permanent magnet perpendicular to each other, forming a closed magnetic circuit components of the two permanent magnets; a first voice coil motor of four the coil assembly is fixed on the coarse moving platform, the permanent magnet assembly is fixed in the micro movable platform; the second voice coil motor includes a coil assembly and two symmetrically disposed at both sides of the permanent magnet assembly of the coil assembly; each permanent magnet assembly comprises a main permanent magnet and 轭;各主永磁体以常规阵列的形式粘接固定在铁轭表面上;各永磁体组件之间形成封闭磁路;第二音圈电机中的线圈组件固定在粗动台上,第二音圈电机中的永磁体组件固定在微动平台上; 第三音圈电机包括外磁环、内磁环、圆柱线圈组件、重力平衡磁柱;外磁环与内磁环的轴线沿Z轴方向,外磁环与内磁环充磁方向相同,沿径向方向且由圆环外表面指向圆心;圆柱线圈位于内磁环与外磁环之间,绕线轴线沿Z轴方向;磁柱的轴线沿Z轴方向,充磁方向沿Z轴正方向;第三音圈电机的圆柱线圈组件固定在粗动台上。 Yoke; each of the main permanent magnet in the form of a conventional array is bonded and fixed on the surface of the yoke; forms a closed magnetic circuit between the permanent magnet assembly; the second voice coil motor coil assembly is fixed to the coarse movement stage, a second tone the coil motor permanent magnet assembly is fixed to the fine movement table; voice coil motor comprises a third outer ring, the inner ring, cylindrical coil assembly, the weight balance cylinders; Z-axis direction along the axis of the inner ring and the outer ring the outer ring and the inner ring magnetization in the same direction, the radial direction and is directed from the center of the annular outer surface; a cylindrical coil is located between the inner ring and the outer ring, the winding axis in the Z axis direction; of cylinders axis along the Z-axis direction, the magnetization direction of the Z-axis direction; a third cylindrical voice coil motor coil assembly is fixed to coarse movement stage.
CN 201210180346 2011-06-28 2012-06-01 Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device CN102722089B (en)

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