CN102722089B - Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device - Google Patents
Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device Download PDFInfo
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Abstract
A non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device relates to an ultraprecise SDOF motion positioning device. The positioning device comprises a micromotion platform, and two coarse-motion platforms which are symmetrically distributed on the two sides of the micromotion platform, wherein each coarse-motion platform is independently driven by a linear motor to move along a Y axis; the micromotion platform is driven by 10 voice coil motors to do the SDOF motion; a measuring system comprises a laser ruler, two grating scales and seven eddy current sensors; and the measuring system can measure an absolute position of each coarse-motion platform in a Y-axis direction, an SDOF absolute position of the micromotion platform, and relative positions between the coarse-motion platforms and the micromotion platform in the Y-axis direction. The two linear motors in the coarse-motion platforms move independently, and when the voice coil motors are electrified, the micromotion platform is suspended above the coarse-motion platform, so that a non-contact cascading motion is realized between the coarse-motion platforms and between the coarse-motion platforms and the micromotion platform, and the problems of motional coupling and motional interference caused by mechanical contact in the existing structure and the like are avoided.
Description
Technical field
The present invention relates to a kind of six degree of freedom positioning equipment, relate in particular to the thick smart fold layer six degree of freedom positioning equipment of a kind of non-contact type, be mainly used in semiconductor lithography equipment, belong to ultraprecise processing and checkout equipment technical field.
Background technology
The ultra-precise micro displacement platform with nanoscale motion positions precision is one of semiconductor equipment critical component, as silicon wafer stage, mask platform etc. in litho machine.For realizing ultraprecise positioning requirements, be widely used as a kind of ultraprecise sports platform using air supporting and the floating performance element that is constrained to supporting way of magnetic.Air supporting constraint is as supporting and when guide effect, reduced the effects such as friction force that physical construction transmission causes, improved system motion positioning precision.During taking linear electric motors as driver element, the Lorentz force being produced in permanent magnet array air-gap field by hot-wire coil provides driving force, changes the thrust of performance element by size of current in control coil, has advantages of simple structure and simple.
The mask platform structure of the thick smart fold layer of employing conventionally in litho machine, comprises two coarse motion platforms that move along Y direction at present, and the micromotion platform of a six-freedom motion.Between two coarse motion platforms, link together by tie-beam, wherein tie-beam is fixedly connected with a coarse motion platform, is connected by flexible hinge with opposite side coarse motion platform, and micromotion platform is arranged on tie-beam, realizes locating device mass motion.Tie-beam has increased the complicacy of structural design on the one hand, increase system architecture quality, larger quality will affect system motion response performance, on the other hand, in the time of structure motion, if two coarse motion platforms are along Y direction location deviation, owing to connecting beam action, make the coupling that produces acting force and reacting force between two coarse motion platforms, the performance of two coarse motion platforms is influenced each other, will affect the motion positions precision of system.
Summary of the invention
The object of this invention is to provide a kind of locating device that is applied to semiconductor equipment, not only meet six-freedom motion positioning requirements, solve the problems such as the complex structure, the exercise performance that are caused by physical construction coupling in the moving rhythmo structure of the thick essence of current mask platform influence each other simultaneously.
Technical scheme of the present invention is as follows:
The thick smart fold layer six-degree-of-freedom locating device of a kind of non-contact type, described locating device comprises pedestal, micromotion platform, two coarse motion platforms and measuring system, and described measuring system comprises optical grating measuring system, electric vortex sensor measuring system and laser ruler measuring system; Micromotion platform is suspended on two coarse motion platforms, and two coarse motion platforms are arranged symmetrically in micromotion platform both sides, and two coarse motion platform suspensions are on pedestal;
Coarse motion platform comprises linear electric motors, a Connection Element, a support component and a director element; Coarse motion platform moves along Y-axis under linear electric motors drive; The upper surface vis-a-vis of the lower surface of support component and pedestal, support component lower surface has pore, and pore axis, along Z-direction, forms along the air supporting of Z-direction and supports between support component and pedestal; The side vis-a-vis of director element side and pedestal, there is pore the side of director element, and the axis of pore, along X-direction, forms air supporting guiding between director element and pedestal, and guide direction is along Y direction;
Optical grating measuring system comprises two grating measuring devices, and each grating measuring device comprises a grating scale, grating scale erecting frame, read head and grating scale adjusting gear; Grating scale adjusting gear is fixed on pedestal, and grating scale erecting frame is fixedly connected with grating scale adjusting gear, makes the long side direction of grating scale erecting frame along Y direction by adjusting grating scale adjustment rack; Grating scale is pasted and is fixed on grating scale erecting frame surface, and grating fringe is along Y direction, and grating reading head is connected with linear electric motors;
Electric vortex sensor measuring system comprises and is arranged on seven current vortex sensors on coarse motion platform, measures metallic conductor and is arranged on micromotion platform, the first current vortex sensor and the second current vortex sensor are arranged on the first coarse motion platform, and be positioned at along on the straight line of Y-axis, the 3rd current vortex sensor and the 4th current vortex sensor are arranged on respectively on the first coarse motion platform and the second coarse motion platform, and be positioned at one along on the straight line of X-direction, the 5th current vortex sensor and the 6th current vortex sensor are arranged on the Connection Element of the first coarse motion platform, and be positioned at one along on the straight line of Y direction, the 7th current vortex sensor is arranged on the second coarse motion platform, and be positioned at one article along on the straight line of X-direction with the 5th current vortex sensor,
Laser ruler measuring system is arranged on pedestal, measures the displacement of micromotion platform in Y-direction.
Micromotion platform comprises four the first voice coil motors that drive along Y direction, two the second voice coil motors that drive along X-direction and four the 3rd voice coil motors that drive along Z-direction; The first voice coil motor comprises upper and lower permanent magnet assembly and the coil block between permanent magnet assembly; Each coil block winds the line plane at same plane, and between two permanent magnet assemblies, and retention gap; Each permanent magnet assembly comprises iron yoke, main permanent magnet, attached permanent magnet, and main permanent magnet and each attached permanent magnet are adhesively fixed on the surface of iron yoke with Halbach array format; Each attached permanent magnet is mutually vertical with the magnetic direction of each main permanent magnet, in the twoth permanent magnet assembly, forms closed magnetic path; Coil block in four the first voice coil motors is fixed on coarse motion platform, and permanent magnet assembly is fixed on micromotion platform; The second voice coil motor comprises a coil block and is arranged symmetrically in two permanent magnet assemblies of coil block both sides; Each permanent magnet assembly comprises main permanent magnet and iron yoke; Each main permanent magnet is adhesively fixed on iron yoke surface with the form of conventional arrays; Between each permanent magnet assembly, form closed magnetic path; Coil block in the second voice coil motor is fixed on coarse motion platform, and the permanent magnet assembly in the second voice coil motor is fixed on micromotion platform; The 3rd voice coil motor comprises outer magnetic ring, internal magnetic ring, cylindrical coil assembly, gravitational equilibrium magnetic post; The axis of outer magnetic ring and internal magnetic ring is along Z-direction, and outer magnetic ring is identical with internal magnetic ring magnetizing direction, radially and by annulus outside surface points to the center of circle; Cylindrical coil is between internal magnetic ring and outer magnetic ring, and coiling axis is along Z-direction; The axis of magnetic post is along Z-direction, and magnetizing direction is along Z axis positive dirction; The cylindrical coil assembly of the 3rd voice coil motor is fixed on coarse motion platform.
Brief description of the drawings
Fig. 1 is positioning device structure principle schematic of the present invention (axonometric drawing).
Fig. 2 is coarse motion platform axonometric drawing of the present invention.
Fig. 3 is coarse motion platform side view of the present invention.
Fig. 4 is micromotion platform structural representation of the present invention (axonometric drawing).
Fig. 5 is the present invention's the first voice coil motor cut-open view.
Fig. 6 is the present invention's the second voice coil motor structural representation (axonometric drawing).
Fig. 7 is the second voice coil motor cut-open view.
Fig. 8 is voice coil motor coil position view of the present invention.
Fig. 9 is the present invention's the 3rd voice coil motor structural representation (axonometric drawing).
Figure 10 is the present invention the 3rd voice coil motor outer magnetic ring figure.
Figure 11 is the present invention the 3rd voice coil motor internal magnetic ring figure.
Figure 12 is the present invention the 3rd voice coil motor magnetic post figure.
Figure 13 is horizontal direction current vortex sensor position view of the present invention.
Figure 14 is vertical direction current vortex sensor position view of the present invention.
Figure 15 is grating scale schematic diagram of the present invention (axonometric drawing).
Figure 16 is grating scale front view of the present invention.
Figure 17 is laser ruler position view of the present invention.
In figure:
001-pedestal;
100-coarse motion platform
101-linear electric motors, 102-support component, 103-director element, 104-Connection Element
200-micromotion platform
210-the first voice coil motor
211-First Line coil assembly, 212-the first permanent magnet assembly, 213-the second permanent magnet assembly
The main permanent magnet of 2121-first, the main permanent magnet of 2123-second, 2125-the 3rd main permanent magnet, 2131-the 4th main permanent magnet, 2133-the 5th main permanent magnet, 2135-the 6th main permanent magnet, the attached permanent magnet of 2122-first, the attached permanent magnet of 2124-second, 2132-the 3rd attached permanent magnet, 2134-the 4th attached permanent magnet, 2142-the first iron yoke
220-the second voice coil motor
221-the second coil block, 222-the 3rd permanent magnet assembly, 223-the 4th permanent magnet assembly, 2221-the 7th main permanent magnet, 2222-the 8th main permanent magnet, 2231-the 9th main permanent magnet, 2232-the tenth main permanent magnet, 2241-three-iron yoke, 2242-the 4th iron yoke
230-the 3rd voice coil motor
231-cylindrical coil assembly, 232-outer magnetic ring, 233-internal magnetic ring, 234-magnetic post
401-the first current vortex sensor, 402-the second current vortex sensor, 403-the 3rd current vortex sensor, 404-the 4th current vortex sensor, 405-the 5th current vortex sensor, 406-the 6th current vortex sensor, 407-the 7th current vortex sensor
300-grating measuring device
301-grating scale erecting frame, 302-grating scale adjusting gear, 303-grating scale, 304-read head
900-laser ruler
Embodiment
Below in conjunction with accompanying drawing, principle of the present invention, structure and the course of work are further illustrated to the present invention.
Fig. 1 is the structural representation (axonometric drawing) of locating device of the present invention.Locating device of the present invention comprises pedestal 001, micromotion platform 200, two coarse motion platforms 100 that are arranged symmetrically in micromotion platform both sides.
Fig. 2 is coarse motion platform axis of no-feathering mapping, and Fig. 3 is coarse motion platform side view.Each coarse motion platform 100 comprises linear electric motors 101, Connection Element 104, air supporting support component 102 and an air supporting director element 103.Connection Element 104 is affixed with linear electric motors, and air supporting support component 102 is connected with linear electric motors, and air supporting director element 103 is connected with air supporting support component 102.
The upper surface vis-a-vis of the lower surface of air supporting support component 102 and pedestal 001, support component 102 lower surfaces have pore, pore axis, along Z-direction, forms between air supporting support component 102 and pedestal 001 along the air supporting of Z-direction and supports, and air supporting supporting way adopts the mode of vacuum preload; The side vis-a-vis of the side of air supporting director element 103 and pedestal 001, there is pore the side of air supporting director element 103, and the axis of pore, along X-direction, forms air supporting guiding between air supporting director element 103 and pedestal 001, guide direction is along Y direction, the mode that air supporting mode is vacuum preload.
Fig. 4 is micromotion platform axis of no-feathering mapping, micromotion platform 200, by four the first voice coil motors 210 that drive along Y direction, two the second voice coil motors 220 that drive along X-direction and four the 3rd voice coil motors 230 that drive along Z-direction, is realized the six-freedom motion of micromotion platform 200 by these ten voice coil motors.
Fig. 5 is the first voice coil motor 210 structure cut-open views.The second voice coil motor 210 comprises the first permanent magnet assembly 212, the second permanent magnet assembly 213, First Line coil assembly 211.First Line coil assembly 211 is between the first permanent magnet assembly 212 and the second permanent magnet assembly 213, and retention gap.
The first permanent magnet assembly 212 comprises the first iron yoke 2142 and main permanent magnet, attached permanent magnet, along X-direction be followed successively by the first main permanent magnet 2121, the first attached permanent magnet 2122, the second main permanent magnet 2123, the second attached permanent magnet 2124,, the 3rd main permanent magnet 2125, each main permanent magnet and each attached permanent magnet are adhesively fixed on the surface of the first iron yoke 2142.The second permanent magnet assembly 213 comprises the first iron yoke 2142 and main permanent magnet, attached permanent magnet, be followed successively by the 4th main permanent magnet 2131, the 3rd attached permanent magnet 2132, the 5th main permanent magnet 2133, the 4th attached permanent magnet 2134, the 6th main permanent magnet 2135 along X-direction, each main permanent magnet and each attached permanent magnet are adhesively fixed on the surface of the first iron yoke 2142.The magnetizing direction of the first main permanent magnet 2121, the 3rd main permanent magnet 2125, the 4th main permanent magnet 2131, the 6th main permanent magnet 2135 is Z axis negative direction, and the magnetizing direction of the second main permanent magnet 2123, the 5th main permanent magnet 2133 is Z axis positive dirction.The N pole-face of the first main permanent magnet 2121 is the S pole-face to the 4th main permanent magnet 2131 just, and the S pole-face of the second main permanent magnet 2123 is the N pole-face to the 5th main permanent magnet 2133 just, and the N pole-face of the 3rd main permanent magnet 2125 is the S pole-face to the 6th main permanent magnet 2135 just.The magnetizing direction of the first attached permanent magnet 2123, the 4th attached permanent magnet 2134 is Y negative direction, and the magnetizing direction of the 3rd attached permanent magnet 2124, the 3rd attached permanent magnet 2132 is Y positive dirction.Each attached permanent magnet is mutually vertical with the magnetic direction of each main permanent magnet, in the first permanent magnet assembly 212 and the second permanent magnet assembly 213, has formed respectively Halbach array format, and forms closed magnetic path.
As shown in figure 12, the First Line coil assembly 211 in four the first voice coil motors 210 is separately fixed on two coarse motion platforms 100, and the first permanent magnet assembly 212 and the second permanent magnet assembly 213 are separately fixed on micromotion platform 200.When coil electricity, direction of current is vertical with magnetic direction, therefore will produce Lorentz force.Lorentz force direction, hot-wire coil direction of current are mutually vertical with magnetic induction density direction, and the first permanent magnet assembly 212 and the second permanent magnet assembly 213 are moved along Y direction under Lorentz force action.In the time that four the first voice coil motors 210 are identical along Y direction driving force, realize micromotion platform 200 and move along Y-axis, in the time that these four the first voice coil motors 210 are not identical along Y direction driving force, realize the rotation of micromotion platform 200 around Z axis.
Fig. 6 is the second voice coil motor 220 axonometric drawings, and Fig. 7 is the second voice coil motor 220 cut-open views.The second voice coil motor 220 comprises the 3rd permanent magnet assembly 222, the 4th permanent magnet assembly 223 and the second coil block 221.The 3rd permanent magnet assembly 222 comprises the 7th main permanent magnet 2221, the 8th main permanent magnet 2222, three-iron yoke 2241.The 4th permanent magnet assembly 223 comprises the 9th main permanent magnet 2231, the tenth main permanent magnet 2232, the 4th iron yoke 2242.The 7th main permanent magnet 2221, the 8th main permanent magnet 2222 are fixed on three-iron yoke 2241, and the 9th main permanent magnet 2231, the tenth main permanent magnet 2232 are fixed on the 4th iron yoke 2242.The magnetizing direction of the 8th main permanent magnet 2222 and the tenth main permanent magnet 2231 is along Z axis positive dirction, and the magnetizing direction of the 7th main permanent magnet 2221 and the 9th main permanent magnet 2231 is along Z axis negative direction.The N of the 7th main permanent magnet 2221 is surface and the extremely surperficial vis-a-vis of S of the 9th main permanent magnet 2231 extremely, and the S of the 8th main permanent magnet 2222 is the extremely surperficial vis-a-vis of N of surface and the tenth main permanent magnet 2232 extremely, between each permanent magnet assembly, forms closed magnetic path.
The second coil block 221, between the 3rd permanent magnet assembly 222 and the 4th permanent magnet assembly 223, and leaves gap.Coil block 221 in the second voice coil motor 220 is separately fixed on two coarse motion platforms 100, and the each permanent magnet assembly in the second voice coil motor 220 is fixed on micromotion platform 200.When coil electricity, direction of current is vertical with the magnetic direction of embedded part of coil region, therefore will produce Lorentz force.Lorentz force direction, hot-wire coil direction of current are mutually vertical with magnetic induction density direction, make the 3rd permanent magnet assembly 222 and the 4th permanent magnet assembly 223 realize and moving in the X-axis direction under Lorentz force action, therefore drive micromotion platform 200 to move in the X-axis direction.
Fig. 8 is the 3rd voice coil motor 230 axis of no-feathering mappings.The 3rd voice coil motor 230 comprises outer magnetic ring 232, internal magnetic ring 233, cylindrical coil assembly 231, gravitational equilibrium magnetic post 234.
Fig. 9 is outer magnetic ring 232 front views in the 3rd voice coil motor 230.Figure 10 is internal magnetic ring 233 front views in the 3rd voice coil motor 230.Figure 11 is magnetic post 234 front views in the 3rd voice coil motor 230.Outer magnetic ring 232 is with the axis of internal magnetic ring 233 along Z-direction, and outer magnetic ring 232 is identical with internal magnetic ring 233 magnetizing directions, radially and by annulus outside surface points to the center of circle.Cylindrical coil assembly 231 is between internal magnetic ring 233 and outer magnetic ring 232, and coiling axis is along Z-direction.The axis of magnetic post 234 is along Z-direction, and magnetizing direction is along Z axis positive dirction.The cylindrical coil assembly 231 of four the 3rd voice coil motors 230 is separately fixed on 100 two linear electric motors of coarse motion platform, and outer magnetic ring 232, internal magnetic ring 233 and the magnetic post 234 of the 3rd voice coil motor 230 are fixed on micromotion platform 200.When cylindrical coil assembly 231 is switched on, between cylindrical coil assembly 231 and internal magnetic ring 233, outer magnetic ring 232, produce Lorentz force, when the Lorentz force size that produces when four the 3rd voice coil motors 230 is identical, realizing micromotion platform 200 moves along Z-direction, when the Lorentz force producing when four the 3rd voice coil motors 230 varies in size, realize micromotion platform 200 and rotate and rotate around Y-axis around X-axis.When coil electricity, between cylindrical coil assembly 231 and magnetic post 234, produce Lorentz force, the size that changes electric current makes the Lorentz force producing equate with the gravity of micromotion platform 200, reaches the object of micromotion platform 200 gravitational equilibriums.
Figure 13 is horizontal direction current vortex sensor position view, and Figure 14 is vertical direction current vortex sensor position view.Micromotion platform 200 comprises seven current vortex sensors with the relative position measurement system of coarse motion platform 100, and each current vortex sensor is arranged on coarse motion platform 100, measures metallic conductor and is arranged on micromotion platform 200.The first current vortex sensor 401, the second current vortex sensor 402 are arranged on the first coarse motion platform 100, and be positioned at along on the straight line of Y-axis, measure between micromotion platform 200 and coarse motion platform 100 along x direction of principal axis relative distance, the first current vortex sensor 401 and the second current vortex sensor 402 signals differential measured the relative rotation around Z axis between micromotion platform 200 and two coarse motion platforms 100.The 3rd current vortex sensor 403, the 4th current vortex sensor 404 are arranged on respectively on the first coarse motion platform 100 and the second coarse motion platform 100, and be positioned at one along on the straight line of X-direction, measure respectively micromotion platform 200 with respect to the first coarse motion platform 100, the second coarse motion platform 100 distance along Y direction.The 5th current vortex sensor 405, the 6th current vortex sensor 406 are arranged on the Connection Element 104 of the first coarse motion platform 100, and be positioned at one along on the straight line of Y direction, these two current vortex sensors are used for measuring between micromotion platform 200 and the first coarse motion platform 100 along Z-direction distance, the differential corner around X-axis of measuring relative the first coarse motion platform 100 of micromotion platform 200 of these two current vortex sensor signals.The 7th current vortex sensor 407 is arranged on the second coarse motion platform 100, and be positioned at one article along on the straight line of X-direction with the 5th current vortex sensor 405, the 7th current vortex sensor 407 is measured micromotion platform 200 and the second coarse motion platform 100 distance along Z-direction, and the variate micromotion platform 200 of the 7th current vortex sensor 407 and the 5th current vortex sensor 405 signals is with respect to the corner around Y-axis of the first coarse motion platform 100, the second coarse motion platform 100.
Figure 15 is optical grating ruler measurement axonometric drawing in apparatus of the present invention, and Figure 16 is optical grating ruler measurement device front view.Coarse motion platform 100 comprises two grating measuring devices 300, and these two grating measuring devices 300 are arranged symmetrically in the both sides of coarse motion platform 100 along X-direction.Each grating measuring device 300 comprises a grating scale 303, grating scale erecting frame 301, read head 304 and a grating scale adjusting gear 302.Grating scale adjusting gear 302 is fixed on pedestal 001, and grating scale erecting frame 301 is fixedly connected with grating scale adjusting gear 302, makes the long side direction of grating scale erecting frame 301 along Y direction by adjusting grating scale adjustment rack 302.Grating scale 303 is pasted and is fixed on grating scale erecting frame 301 surfaces above, and grating fringe is along Y direction.Grating reading head 304 is connected with linear electric motors 101, and in the time that linear electric motors 101 move along Y-axis, grating measuring device 300 is used for detecting the position of coarse motion platform 100 linear electric motors 101 along Y direction.
Figure 17 is laser measuring device for measuring schematic diagram, and laser ruler 900 is measured micromotion platform 200 along Y direction absolute position.
Claims (2)
1. the thick smart fold layer six-degree-of-freedom locating device of non-contact type, it is characterized in that: described locating device comprises pedestal (001), a micromotion platform (200), two coarse motion platforms (100) and measuring system, described measuring system comprises optical grating measuring system, electric vortex sensor measuring system and laser ruler measuring system (900); It is upper that micromotion platform (200) is suspended in two coarse motion platforms (100), and two coarse motion platforms (100) are arranged symmetrically in micromotion platform (200) both sides, and two coarse motion platforms (100) are suspended on pedestal (001);
Described coarse motion platform (100) comprises linear electric motors, a Connection Element, a support component and a director element; Coarse motion platform (100) moves along Y-axis under linear electric motors drive; Connection Element and linear electric motors are affixed; The upper surface vis-a-vis of the lower surface of support component and pedestal, support component lower surface has pore, and pore axis, along Z-direction, forms along the air supporting of Z-direction and supports between support component and pedestal; The side vis-a-vis of director element side and pedestal, there is pore the side of director element, and the axis of pore, along X-direction, forms air supporting guiding between director element and pedestal, and guide direction is along Y direction;
Described optical grating measuring system comprises two grating measuring devices (300), and each grating measuring device comprises a grating scale, grating scale erecting frame, read head and grating scale adjusting gear; Grating scale adjusting gear is fixed on pedestal, and grating scale erecting frame is fixedly connected with grating scale adjusting gear, makes the long side direction of grating scale erecting frame along Y direction by adjusting grating scale adjustment rack; Grating scale is pasted and is fixed on grating scale erecting frame surface, and grating fringe is along Y direction, and grating reading head is connected with linear electric motors;
Described electric vortex sensor measuring system comprises and is arranged on seven current vortex sensors on coarse motion platform, measures metallic conductor and is arranged on micromotion platform, the first current vortex sensor and the second current vortex sensor are arranged on the first coarse motion platform, and be positioned at along on the straight line of Y-axis, the 3rd current vortex sensor and the 4th current vortex sensor are arranged on respectively on the first coarse motion platform and the second coarse motion platform, and be positioned at one along on the straight line of X-direction, the 5th current vortex sensor and the 6th current vortex sensor are arranged on the Connection Element of the first coarse motion platform, and be positioned at one along on the straight line of Y direction, the 7th current vortex sensor is arranged on the second coarse motion platform, and be positioned at one article along on the straight line of X-direction with the 5th current vortex sensor,
It is upper that described laser ruler measuring system (900) is arranged on pedestal (001), measures the displacement of micromotion platform in Y-direction.
2. the thick smart fold layer six-degree-of-freedom locating device of a kind of non-contact type as described in claim 1, is characterized in that: micromotion platform (200) comprises four the first voice coil motors that drive along Y direction, two the second voice coil motors that drive along X-direction and four the 3rd voice coil motors that drive along Z-direction;
The first voice coil motor comprises upper and lower permanent magnet assembly and the coil block between permanent magnet assembly; Each coil block winds the line plane at same plane, and between two permanent magnet assemblies, and retention gap; Each permanent magnet assembly comprises iron yoke, main permanent magnet, attached permanent magnet, and main permanent magnet and each attached permanent magnet are adhesively fixed on the surface of iron yoke with Halbach array format; Each attached permanent magnet is mutually vertical with the magnetic direction of each main permanent magnet, in the twoth permanent magnet assembly, forms closed magnetic path; Coil block in four the first voice coil motors is fixed on coarse motion platform, and permanent magnet assembly is fixed on micromotion platform;
The second voice coil motor comprises a coil block and is arranged symmetrically in two permanent magnet assemblies of coil block both sides; Each permanent magnet assembly comprises main permanent magnet and iron yoke; Each main permanent magnet is adhesively fixed on iron yoke surface with the form of conventional arrays; Between each permanent magnet assembly, form closed magnetic path; Coil block in the second voice coil motor is fixed on coarse motion platform, and the permanent magnet assembly in the second voice coil motor is fixed on micromotion platform;
The 3rd voice coil motor comprises outer magnetic ring, internal magnetic ring, cylindrical coil assembly, gravitational equilibrium magnetic post; The axis of outer magnetic ring and internal magnetic ring is along Z-direction, and outer magnetic ring is identical with internal magnetic ring magnetizing direction, radially and by annulus outside surface points to the center of circle; Cylindrical coil is between internal magnetic ring and outer magnetic ring, and coiling axis is along Z-direction; The axis of magnetic post is along Z-direction, and magnetizing direction is along Z axis positive dirction; The cylindrical coil assembly of the 3rd voice coil motor is fixed on coarse motion platform.
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|---|---|---|---|
| CN201210180346.5A CN102722089B (en) | 2011-06-28 | 2012-06-01 | Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device |
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| CN201110177038.2 | 2011-06-28 | ||
| CN201110177038 | 2011-06-28 | ||
| CN201210180346.5A CN102722089B (en) | 2011-06-28 | 2012-06-01 | Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device |
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| CN102722089A CN102722089A (en) | 2012-10-10 |
| CN102722089B true CN102722089B (en) | 2014-06-18 |
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