CN109510430A - A kind of Precision Linear Moving platform - Google Patents
A kind of Precision Linear Moving platform Download PDFInfo
- Publication number
- CN109510430A CN109510430A CN201811422549.4A CN201811422549A CN109510430A CN 109510430 A CN109510430 A CN 109510430A CN 201811422549 A CN201811422549 A CN 201811422549A CN 109510430 A CN109510430 A CN 109510430A
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- CN
- China
- Prior art keywords
- guide rail
- magnet array
- permanent magnet
- objective table
- moving platform
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
The present invention provides a kind of Precision Linear Moving platform, including pedestal, it is provided with guide rail on pedestal, objective table is set on guide rail, guide rail is air-flotation type structure, forms gas membrane between the lower end surface of objective table and the upper surface of guide rail, objective table can be slided along guide rail air bearing；The objective table lower end is connected with mover by interference fit, guide rail is opening up U-shaped structure, two groups of permanent magnet array modules are respectively arranged on the opposite medial surface of guide rail, permanent magnet array module and guide rail are isometric, and mover is folded among two groups of permanent magnet array modules；Permanent magnet array module includes back iron and sticks in the trapezoidal magnet array in back iron.The Precision Linear Moving platform is compared with conventional motion platform, and thrust performance is more preferable, and internal friction is almost equal to zero, and can achieve very high positioning accuracy.
Description
Technical field
The invention belongs to electromechanical engineering technical fields, are related to a kind of Precision Linear Moving platform.
Background technique
Precision positioning technology is semiconductors manufacture, precise numerical control machine, precision optical instrument, nano topography measurement etc.
The basic technology in field, it is the important symbol for measuring a National modern industrial production and scientific research development level.Essence
Traditional driving mechanism uses the kind of drive of " stepper motor+ball-screw " in close straight line positioning system, due to this driving
Mode must be by Mechanical Contact (screw thread, ball, the contact between nut) transmitting thrust, it is difficult to avoid friction, abrasion,
Gap, deformation bring a series of problems.Although transmission performance can be made to be mentioned by different improved methods in these problems
Height, but problem is difficult fundamentally to solve.It is this to solve the problems, such as, the concept of " direct-drive " is proposed, electric energy is directly turned
Change linear motion mechanical energy into, eliminate motor to the various intermediate links between workpiece, i.e., using linear motor into
The Precision Linear Moving platform of row driving.But using the Precision Linear Moving platform of ironless linear motors driving, due to driving motor
The shortcomings that self structure, lacks the magnet accumulating cap of iron core, causes the thrust of sports platform smaller.And lead in Precision Linear Moving platform
Ball bearing type curtain rail need to be often configured to be oriented to, ball bearing type curtain rail and linear motor needed in Precision Linear Moving platform independently into
Row installation, installation process is very high to required precision, and ball bearing type curtain rail is also difficult to avoid that there are frictional force after installation, is rubbed
Wiping power, there are adverse effects for the positioning performance of Precision Linear Moving platform.Therefore use the precise direct of ironless linear motors driving
Still there is the shortcomings that thrust is insufficient, there are bad frictional force in line sports platform.It is insufficient for Precision Linear Moving platform thrust to lack
Point, the prior art can solve in such a way that mover winding coil is in parallel, but can reduce the effective position row of sports platform in this way
Journey.Therefore the thrust for improving precise motion platform, reduces or even eliminates bad frictional force, at current problem to be solved.
Summary of the invention
The present invention provides the Precision Linear Moving platform under a kind of novel array, to solve existing Precision Linear Moving platform thrust
Insufficient disadvantage, while solving the disadvantage that there are bad frictional force in existing Precision Linear Moving platform.
It is of the existing technology to overcome the problems, such as, the technical scheme is that
A kind of Precision Linear Moving platform, including pedestal are provided with guide rail on the pedestal, objective table are arranged on guide rail, described to lead
Rail is air-flotation type structure, gas membrane is formed between the lower end surface of objective table and the upper surface of guide rail, objective table can be along guide rail gas
It is slick and frivolous dynamic；The objective table lower end is connected with mover by interference fit, and the guide rail is opening up U-shaped structure, guide rail
Two groups of permanent magnet array modules are respectively arranged on opposite medial surface, the permanent magnet array module and guide rail are isometric, described
Mover is folded among two groups of permanent magnet array modules；
The permanent magnet array module includes back iron and sticks in the trapezoidal magnet array in back iron, and back iron is fixed in guide rail
Side, the trapezoidal magnet array are connected in order by multiple magnet units arranged along rail length direction and are constituted, and magnet unit is
Isosceles trapezoid, bottom is located next to the bottom of neighboring magnet units in adjacent magnet unit, and the angle that magnetizes of magnet unit successively changes
Become 90 degree；
Magnet unit in two groups of permanent magnet array modules is symmetrical arranged relatively, the magnet unit water symmetrical along center line
Flat magnetizing direction is on the contrary, identical along the vertical magnetizing direction of the symmetrical magnet unit of center line.
The isosceles trapezoid inferior horn angle change is in 45 degree of -53 degree range.
It is provided with end cap outside the guide rail both ends, inner wall is provided with anticollison block at the guide rail both ends；On the pedestal
Grating scale is set, is provided with grating ruler reading head on objective table, the grating scale is connected with grating ruler reading head by cable, line
Cable is constrained by drag chain.
The magnet unit is made of Nd-Fe-B permanent magnet.
Beneficial effects of the present invention are as follows:
The present invention provides a kind of novel magnetic pole arrays, the Precision Linear Moving platform supported using air bearing, pass through the novel magnetic pole
Array manner and pneumatically supported cooperation, not only can solve the disadvantage of existing Precision Linear Moving platform thrust deficiency, but also can eliminate rolling
Pearl guide rail generates the influence of bad frictional force.For the Precision Linear Moving platform compared with conventional motion platform, thrust performance is more preferable, and interior
Portion's frictional force is almost equal to zero, and can achieve very high positioning accuracy.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2-Fig. 4 is differentiation schematic diagram of the rectangular configuration to structure of the invention；
Fig. 5 is permanent magnet array module diagram；
Fig. 6 is magnetic field strength figure.
In figure, 1- pedestal, 2- guide rail, 3- objective table, 4- mover, 5- permanent magnet array module, 6- back iron, 7- isosceles trapezoid
Magnet unit, 8- end cap, 9- anticollison block, 10- grating scale, 11- grating ruler reading head.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and detailed description.
Referring to Fig. 1, the present invention provides a kind of Precision Linear Moving platform, and air-flotation type guide rail 2, air bearing are provided on pedestal 1
It is provided with objective table on guide rail, gas membrane is set between objective table and guide rail 2, under linear motor driving force, objective table can
It is slided along guide rail.It is provided with end cap 8 outside described 2 both ends of guide rail, is provided with anticollison block 9 in 2 both ends inner wall of guide rail；Described pedestal
It is provided with grating scale 10 on 1, grating ruler reading head 11, the grating scale 10 and grating ruler reading head 11 are provided on objective table 3
It is connected by cable, cable is constrained by drag chain 12.
3 lower end of objective table is connected with mover 4 by interference fit, and the guide rail 2 is opening up U-shaped structure,
Two groups of permanent magnet array modules 5, the permanent magnet array module 5 and guide rail 2 etc. are respectively arranged on the opposite medial surface of guide rail 2
Long, the mover 4 is folded among two groups of permanent magnet array modules 5；
The permanent magnet array module 5 includes back iron 6 and sticks in the trapezoidal magnet array in back iron 6, and back iron 6 is fixed on guide rail
2 insides, the trapezoidal magnet array are connected in order by multiple magnet units 7 arranged along rail length direction and are constituted, magnet list
Member 7 is isosceles trapezoid, and bottom is closely on 45-53 degree, adjacent magnet unit 7 for isosceles trapezoid inferior horn angle change in the present embodiment
The bottom of neighboring magnet units 7.The angle that magnetizes of described magnet unit 7 successively changes 90 degree, and adjacent in this way two groups trapezoidal
The magnetic direction of magnet unit is vertical, the magnetic direction phase of two groups of alternate trapezoidal magnet units in same trapezoidal magnet array
Instead.
Magnet unit 7 in two groups of described permanent magnet array modules 5 is symmetrical arranged relatively, symmetrical along center line
The horizontal magnetizing direction of magnet unit 7 on the contrary, identical along the symmetrical vertical magnetizing direction of magnet unit 7 of center line.
The mover 4 is poured by phenolic resin.
The material of the pedestal 1 is marble.
When the invention works, it is moved between winding coil and permanent magnet array module 5 because faraday electromagnetic induction phenomenon generates
Power moves along a straight line under the guiding of guide rail 2, motor fed back by high-precision magnetic grid, it can be achieved that workbench it is high-precision
Degree positioning.
- Fig. 4 referring to fig. 2, the permanent magnet in this Precision Linear Moving platform no longer use traditional rectangular shape, 180 degree angle
The mode that magnetizes of variation, but use the mode that magnetizes of 90 degree of direction changes as shown in Figure 2, using the magnet of such shape,
Each piece of isosceles trapezoid permanent magnet is equivalent to the superposition of three pieces of rectangular shapes, 45 degree of magnetizing direction magnets；
There are the magnetic that the permanent magnet of 45 degree of magnetizing directions, this direction magnetize in the array of 45 degree of magnetizing directions of rectangular permanent magnet variation
Body can regard being superimposed for the following direction x and the direction y direction as；
Rectangular permanent magnet array may be partitioned into many fritters, repartition, the rectangular permanent magnet fritters of 45 degree of magnetizing directions according to
Its direction is transformed into being superimposed for the corresponding direction x magnetizing direction triangle fritter and the direction y magnetizing direction triangle fritter, will fill
The identical fritter of magnetic direction is considered as same permanent magnet, i.e. two pieces of triangle fritters and one piece of rectangular tiles are considered as one, so may be used
Generate array of magnetic dipoles structure proposed in the present invention, this trapezoidal array structure air-gap field amplitude compared with conventional radial array
It is improved with sine, reduces technique again and assemble compared with the permanent magnet array of 45 degree of magnetizing directions of rectangular shape
Difficulty, one piece of trapezoidal magnet are equivalent to the superposition of three pieces of rectangular shapes, 45 degree of magnetizing direction arrays.
It referring to Fig. 6, can be obtained by calculated result, array manner provided by the invention improves air gap compared with traditional array
Magnetic flux density waveforms amplitude and sine can achieve the level close to 45 degree of magnetizing direction variation arrays of rectangular shape.The two knot
It closes, air bearing supporting way friction free advantage is combined with this array of magnetic dipoles advantage, to the thrust for improving precise motion platform
Can have very great help.
Claims (4)
1. a kind of Precision Linear Moving platform, including pedestal (1), it is provided with guide rail (2) on the pedestal (1), guide rail is arranged on (2)
Objective table (3), it is characterised in that: the guide rail (2) is air-flotation type structure, the lower end surface of objective table (3) and the upper end of guide rail (2)
Gas membrane is formed between face, objective table (3) can be slided along guide rail (2) air bearing；Objective table (3) lower end passes through interference fit
It is connected with mover (4), the guide rail (2) is opening up U-shaped structure, is respectively arranged on the opposite medial surface of guide rail (2)
Two groups of permanent magnet array modules (5), the permanent magnet array module (5) and guide rail (2) are isometric, and the mover (4) is folded in two
Group permanent magnet array module (5) is intermediate；
The permanent magnet array module (5) includes back iron (6) and sticks in the trapezoidal magnet array in back iron (6), and back iron (6) is solid
On the inside of guide rail (2), the trapezoidal magnet array is connected in order by multiple magnet units (7) arranged along rail length direction
It constituting, magnet unit (7) is isosceles trapezoid, and bottom is located next to the bottom of neighboring magnet units (7) in adjacent magnet unit (7),
The angle that magnetizes of magnet unit (7) successively changes 90 degree；
Magnet unit (7) on two groups of permanent magnet array modules (5) is symmetrical arranged relatively, the magnet symmetrical along center line
Unit (7) horizontal magnetizing direction is on the contrary, identical along the vertical magnetizing direction of the symmetrical magnet unit of center line (7).
2. Precision Linear Moving platform according to claim 1, it is characterised in that: the isosceles trapezoid inferior horn angle change is 45
In -53 degree range of degree.
3. Precision Linear Moving platform according to claim 1 or claim 2, it is characterised in that: be provided with end outside guide rail (2) both ends
It covers (8), at the guide rail (2) both ends, inner wall is provided with anticollison block (9)；Grating scale (10) are set on the pedestal (1), loading
It is provided on platform (3) grating ruler reading head (11), the grating scale (10) is connected with grating ruler reading head (11) by cable, line
Cable is constrained by drag chain (12).
4. Precision Linear Moving platform according to claim 3, it is characterised in that: the magnet unit (7) is by Nd-Fe-B permanent magnetic
System at.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811422549.4A CN109510430A (en) | 2018-11-27 | 2018-11-27 | A kind of Precision Linear Moving platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811422549.4A CN109510430A (en) | 2018-11-27 | 2018-11-27 | A kind of Precision Linear Moving platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109510430A true CN109510430A (en) | 2019-03-22 |
Family
ID=65750698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811422549.4A Pending CN109510430A (en) | 2018-11-27 | 2018-11-27 | A kind of Precision Linear Moving platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109510430A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115173667A (en) * | 2022-07-26 | 2022-10-11 | 河北工业大学 | Double-side modular short primary permanent magnet transverse flux linear motor |
| CN115930763A (en) * | 2022-12-08 | 2023-04-07 | 楚瑞智能科技(苏州)有限公司 | Displacement measurement method and device based on magnetic grid ruler |
| CN117124097A (en) * | 2023-10-26 | 2023-11-28 | 无锡星微科技有限公司杭州分公司 | Vertical moving platform with high-precision positioning function |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008167636A (en) * | 2007-01-05 | 2008-07-17 | Toshiba Elevator Co Ltd | Magnetic levitation device |
| CN102307031A (en) * | 2011-09-08 | 2012-01-04 | 中南大学 | Magnetic suspension linear motion platform based on combination of permanent magnets and electromagnets |
| CN104218771A (en) * | 2014-09-28 | 2014-12-17 | 浙江理工大学 | Magnetic-suspension permanent-magnet synchronous planar motor with multiple degrees of freedom |
| CN207732607U (en) * | 2017-09-29 | 2018-08-14 | 深圳市克洛诺斯科技有限公司 | Linear motor moves module |
-
2018
- 2018-11-27 CN CN201811422549.4A patent/CN109510430A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008167636A (en) * | 2007-01-05 | 2008-07-17 | Toshiba Elevator Co Ltd | Magnetic levitation device |
| CN102307031A (en) * | 2011-09-08 | 2012-01-04 | 中南大学 | Magnetic suspension linear motion platform based on combination of permanent magnets and electromagnets |
| CN104218771A (en) * | 2014-09-28 | 2014-12-17 | 浙江理工大学 | Magnetic-suspension permanent-magnet synchronous planar motor with multiple degrees of freedom |
| CN207732607U (en) * | 2017-09-29 | 2018-08-14 | 深圳市克洛诺斯科技有限公司 | Linear motor moves module |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115173667A (en) * | 2022-07-26 | 2022-10-11 | 河北工业大学 | Double-side modular short primary permanent magnet transverse flux linear motor |
| CN115930763A (en) * | 2022-12-08 | 2023-04-07 | 楚瑞智能科技(苏州)有限公司 | Displacement measurement method and device based on magnetic grid ruler |
| CN115930763B (en) * | 2022-12-08 | 2023-12-05 | 楚瑞智能科技(苏州)有限公司 | Displacement measurement method and device based on magnetic grating ruler |
| CN117124097A (en) * | 2023-10-26 | 2023-11-28 | 无锡星微科技有限公司杭州分公司 | Vertical moving platform with high-precision positioning function |
| CN117124097B (en) * | 2023-10-26 | 2024-02-06 | 无锡星微科技有限公司杭州分公司 | Vertical moving platform with high-precision positioning function |
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Application publication date: 20190322 |