CN102097982B - Permanent-magnet synchronous magnetic suspension planar motor - Google Patents
Permanent-magnet synchronous magnetic suspension planar motor Download PDFInfo
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- CN102097982B CN102097982B CN 201110045692 CN201110045692A CN102097982B CN 102097982 B CN102097982 B CN 102097982B CN 201110045692 CN201110045692 CN 201110045692 CN 201110045692 A CN201110045692 A CN 201110045692A CN 102097982 B CN102097982 B CN 102097982B
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Abstract
The invention provides a permanent-magnet synchronous magnetic suspension planar motor, which comprises a rotor and a stator, wherein the stator employs a specific two-dimensional permanent magnet array; a first main permanent magnet and a second main permanent magnet in the two-dimensional permanent magnet array are staggered along an X direction and an Y direction to form a planar array; four second secondary permanent magnets are arranged at the periphery of the first main permanent magnet; four third secondary permanent magnets are arranged at the periphery of the second main permanent magnet; a first secondary permanent magnet is arranged between the second secondary permanent magnets and the third secondary permanent magnets; and the side surfaces of each permanent magnet and the side surfaces of adjacent permanent magnets thereof are jointed with each other; all the included angles between the magnetization directions of any two adjacent permanent magnets in the two-dimensional permanent magnet array are 45 DEG. By the specific two-dimensional permanent magnet array, the magnetic field intensity of the motor is high, the sinusoidal characteristic is good, and the deficiency of the existing permanent-magnet synchronous magnetic suspension planar motor that high precision, high response and high efficiency cannot be taken into account together is compensated. The permanent-magnet synchronous magnetic suspension planar motor provided by the invention is a planar motor with better performance.
Description
Technical field
The invention belongs to the precise motion apparatus field, be specifically related to a kind of permanent-magnet synchronous magnetic suspension planar motor that adopts specific two-dimentional permanent magnet array.
Background technology
Along with science and technology and industrial development, can realize that plane motion and pinpoint device just more and more are applied in industrial equipment.Traditional plane motion device is realized plane motion by interlock structurally by two covers or overlap the linear drives unit more and vertically superpose on controlling.Plane motion device for this form, the driving on predetermined direction not only will be born in the linear drives unit that is positioned at bottom, but also the quality that needs to carry linear drives unit, upper strata, so caused telecontrol equipment (as directions X and the Y-direction of traditional X-ray Y workbench) movement inertia seriously unbalanced on multiple directions, thereby affected the raising of the performance index such as stroke, speed, acceleration and precision; And connect with bearing by mechanical guide rail due between the stator of motor and mover, friction, wearing and tearing, vibration and noise are inevitable, affect kinematic accuracy and speed.Under this background, adopt electromagnetic force directly to drive mover and realize that directly the planar motor of multifreedom motion arises at the historic moment, than traditional multi-degree-of-freedom workbench, it has broad application prospects in the two-dimensional positioning system of precision, the precise motion equipment that particularly needs vacuum environment and can not use air supporting to support is as the EUV lithographic equipment.
According to the plane motion mode of planar motor, it can be divided into the floating mode of mechanical support, air supporting and magnetic.Wherein the mechanical support mode adopts mechanical guide rail guiding, and coefficient of friction is larger, and can only do X, the operation of Y two-freedom, can only realize general precision and ordinary movement speed; Air supporting is supported and is used air-bearing to realize plane floatation, but can not be used for vacuum condition; The floating mode of magnetic is simple in structure, and can use in particular surroundingss such as vacuum environments, thereby becomes the main direction of research.
The magnetic-floating plane motor moving component is suspended, and drive motion components is done plane motion by being arranged in energising winding and the magnetic field generation interaction force in permanent magnet array magnetic field.Mainly contain at present three kinds of magnetic-floating plane motors, respectively induction planes motor, Sawyer planar motor and permanent-magnet synchronous magnetic suspension planar motor, and permanent-magnet synchronous magnetic suspension planar motor be because can realize large stroke motion, and has higher performance, thereby becomes developing direction.
The key of the synchronous maglev planar motor design of high-performance permanent magnet is to design rational electromagnetic structure, makes it reach the requirements such as high accuracy, high response and high efficiency.And high accuracy and high response require accurate magnetic field structure and controllability, namely require magnetic field to have good sine; High efficiency requires can produce high magnetic field intensity in same volume.
Permanent magnet array is the source of the permanent magnetic field of permanent-magnet synchronous magnetic suspension planar motor, and the magnetic field of its generation planar is period profile, and has monolateral property, can produce very strong magnetic field in a plane of array.Therefore, designing rational permanent magnet array structure, make the Distribution of Magnetic Field of its generation have high intensity and good sine, is the key that improves the permanent-magnet synchronous magnetic suspension planar motor performance.Therefore, the difference of permanent-magnet synchronous magnetic suspension planar motor mainly is the difference of permanent magnet array structure.Present permanent-magnet synchronous magnetic suspension planar motor both domestic and external nearly all adopts two-dimentional permanent magnet array, and main several structures as shown in Figure 1.(U.S.Patent 4626749, Dec.1986) the middle proposition in patent " Two dimensional positioning devices " by Asakawa for array format shown in Fig. 1 (a); Array format shown in Fig. 1 (b) is proposed in patent " Two-axis motor with high densitymagnetic platen " (U.S.Patent 5777402, and July 1998) by Chitayat; (U.S.Patent 5,631 618, May1997) the middle proposition in patent " Magnetic arrays " by Trumper for array format shown in Fig. 1 (c); Array format shown in Fig. 1 (d) by people such as Cho at article " Magnetic fieldanalysis of 2-D permanent magnet array for planar motor " (IEEE Transactionson Magnetics, 2001,37 (5): propose 3762-3766.); Array format shown in Fig. 1 (e) by people such as J.W.Jansen at article " Modeling of Magnetically Levitated PlanarActuators With Moving Magnets " (IEEE Transactions on Magnetics, vol.43, no.1, Jan.2007.) the middle proposition; Array format shown in Fig. 1 (f) by people such as Wei Min at article " Analysis and Optimization of a New 2-D Magnet Array for Planar Motor " (IEEE Transactions on Magnetics, vol.46, no.5, May 2010.) the middle proposition.In these structures, shown in Fig. 1 (a), Fig. 1 (b) and Fig. 1 (c), the magnetic packaging density of array format is very low, so magnetic field intensity is very low; The magnetic field intensity of the array format of Fig. 1 (d) is planted than first three and is wanted high, this article at Cho " Magnetic field analysis of 2-D permanent magnet array forplanar motor " (IEEE Transactions on Magnetics, 2001,37 (5): be proven 3762-3766.); Array format shown in Fig. 1 (e) make array produce higher magnetic field intensity, but the sine of its magnetic flux distribution is relatively poor by after optimizing.Array format shown in Fig. 1 (f) can produce sine magnetic field preferably, but its magnetic field intensity is lower than Fig. 1 (e).Therefore along with the requirement to the indexs such as speed, acceleration, load capacity, positioning accuracy and running stability of planar motor improves constantly, designing the permanent magnet array with high strength more and the good Distribution of Magnetic Field of sine, is the target that the researcher makes great efforts to seek.
Summary of the invention
The purpose of this invention is to provide a kind of permanent-magnet synchronous magnetic suspension planar motor that adopts specific two-dimentional permanent magnet array, solve the problem that the high accuracy of permanent-magnet synchronous magnetic suspension planar motor in prior art, high response and high efficiency can not be taken into account.
A kind of permanent-magnet synchronous magnetic suspension planar motor provided by the invention, comprise mover and stator, described stator is comprised of two-dimentional permanent magnet array, and described two-dimentional permanent magnet array is comprised of the first main permanent magnet, the second main permanent magnet, the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet that have equal height and shape and be straight quadrangular;
Wherein the bottom surface of the first main permanent magnet is square, and the direction of magnetization makes progress perpendicular to the bottom surface; The shape and size of the second main permanent magnet are all identical with the first main permanent magnet, and the direction of magnetization is downward perpendicular to the bottom surface; The bottom surface of the first secondary permanent magnet is rectangle, and the direction of magnetization is parallel with broadside; The bottom surface of the second secondary permanent magnet is isosceles trapezoid, the waist of isosceles trapezoid and the angle at 45 ° of going to the bottom, upper base equate with the bottom surface length of side of the first main permanent magnet, goes to the bottom to grow the limit with the bottom surface of the first secondary permanent magnet and equate, the direction of magnetization and upper base with go to the bottom vertical and with angle at 45 °, bottom surface, point to upper base one side; The shape and size of the 3rd secondary permanent magnet are all identical with the second secondary permanent magnet, the direction of magnetization and upper base with go to the bottom vertical and become miter angle with the bottom surface, point to the side of going to the bottom;
In described two-dimentional permanent magnet array, the first main permanent magnet and the second main permanent magnet are staggered to planar array along directions X and Y-direction, and the width sum that is spaced apart the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet between the first main permanent magnet and the second main permanent magnet; The surrounding of the first main permanent magnet is furnished with four the second secondary permanent magnets, and all fits with the side at the upper base place of second a secondary permanent magnet in each side of the first main permanent magnet; The second main permanent magnet surrounding is furnished with four the 3rd secondary permanent magnets, and all fits with the side at the upper base place of the 3rd a secondary permanent magnet in each side of the second main permanent magnet; The first secondary permanent magnet is arranged between the second secondary permanent magnet and the 3rd secondary permanent magnet, and the second secondary permanent magnet go to the bottom the place the side and the side at place, long limit of the first secondary permanent magnet fit, fit in the go to the bottom side at another place, long limit of the side at place and the first secondary permanent magnet of the 3rd secondary permanent magnet, the direction of magnetization of the first secondary permanent magnet is pointed to from its first nearest main permanent magnet.
Permanent-magnet synchronous magnetic suspension planar motor of the present invention is by adopting the specific two-dimentional permanent magnet array of arranged in form as mentioned above, make its magnetic field intensity higher than the highest permanent magnet array of existing magnetic field intensity, and the distribution of its magnetic flux density has good sinuso sine protractor, efficient and precision and the response characteristic of permanent-magnet synchronous magnetic suspension planar motor have greatly been improved, thereby made up deficiency and the shortcoming that existing permanent-magnet synchronous magnetic suspension planar motor high accuracy, high response and high efficiency can not be taken into account, be the better planar motor of a kind of performance.
Description of drawings
Disclosed several two-dimentional permanent magnet arrays in Fig. 1 prior art;
The 3-D view of the planar motor of the specific two-dimentional permanent magnet array of Fig. 2 employing of the present invention;
The specific two-dimentional permanent magnet array schematic diagram that Fig. 3 planar motor of the present invention adopts;
The 3-D view of the first main permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 4 employing of the present invention;
The 3-D view of the second main permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 5 employing of the present invention;
The 3-D view of the first secondary permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 6 employing of the present invention;
The 3-D view of the second secondary permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 7 employing of the present invention;
The 3-D view of the 3rd secondary permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 8 employing of the present invention;
Fig. 9 specific two-dimentional permanent magnet array air gap flux density vertical component of the present invention is about the variation schematic diagram of xy coordinate;
Result schematic diagram after shown in Figure 10 specific two-dimentional permanent magnet array air gap flux density vertical component of the present invention and Fig. 1 (e), the fundametal compoment of array is subtracted each other;
Each label implication in figure, the main permanent magnet of 1-first; The main permanent magnet of 2-second; The secondary permanent magnet of 3-first; The secondary permanent magnet of 4-second; The secondary permanent magnet of 5-the 3rd; The 6-coil.
Embodiment
The present invention will be further described in detail below in conjunction with accompanying drawing.
Permanent-magnet synchronous magnetic suspension planar motor of the present invention comprises mover and stator, its 3-D view as shown in Figure 2, stator is comprised of specific two-dimentional permanent magnet array, mover is comprised of a plurality of orthogonal coil arrays, each coil array is formed by square coil 6 parallel arranged of a plurality of iron-core-frees, the orientation of coil array and the orientation of described specific two-dimentional permanent magnet array angle at 45 °.
Described specific two-dimentional permanent magnet array as shown in Figure 3, comprises the first main permanent magnet 1, the second main permanent magnet 2, the first secondary permanent magnet 3, the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5.
The first main permanent magnet 1, the second main permanent magnet 2, the first secondary permanent magnet 3, the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5 are straight quadrangular, and have identical height.
The structure of the first main permanent magnet 1 and the direction of magnetization as shown in Figure 4, its bottom surface be the square, its direction of magnetization makes progress perpendicular to the bottom surface.
The structure of the second main permanent magnet 2 and the direction of magnetization as shown in Figure 5, its bottom surface is square, the length of side equates with the length of side of the first main permanent magnet 1, its direction of magnetization is downward perpendicular to the bottom surface.
The structure of the first secondary permanent magnet 3 and the direction of magnetization as shown in Figure 6, its bottom surface is rectangle, the limit of longer dimension is called long limit, another side is called broadside, the length of broadside is called the width of this permanent magnet, its direction of magnetization is parallel with broadside.
The structure of the second secondary permanent magnet 4 and the direction of magnetization are as shown in Figure 7, its bottom surface is isosceles trapezoid, the waist of isosceles trapezoid and the angle at 45 ° of going to the bottom, the size of upper base equates with the bottom surface length of side of the first main permanent magnet 1, the size of going to the bottom equates with long limit, the bottom surface size of the first secondary permanent magnet 3, the height of isosceles trapezoid is called the width of this permanent magnet, its direction of magnetization and upper base with go to the bottom vertical and with bottom surface angle at 45 °, point to upper base one side.
The structure of the 3rd secondary permanent magnet 5 and the direction of magnetization as shown in Figure 8, its shape is identical with the second secondary permanent magnet 4, its direction of magnetization and upper base with go to the bottom vertical and with bottom surface angle at 45 °, point to the side of going to the bottom.
The spread pattern of permanent magnet array as shown in Figure 3, the coordinate in figure is three-dimensional Descartes's rectangular coordinate system, all permanent magnets are arranged in the plane parallel with XOY plane.
The first main permanent magnet 1 and the second main permanent magnet 2 are staggered to planar array along directions X and Y-direction, and the width sum that is spaced apart the first secondary permanent magnet 3, the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5 between the first main permanent magnet 1 and the second main permanent magnet 2.
The surrounding of the first main permanent magnet 1 is furnished with four the second identical secondary permanent magnets 4, and each side of the first main permanent magnet 1 all fits together with the side at the upper base place of second a secondary permanent magnet 4.
The surrounding of the second main permanent magnet 2 is furnished with four the 3rd identical secondary permanent magnets 5, and each side of the second main permanent magnet 1 all fits together with the side at the upper base place of the 3rd a secondary permanent magnet 5.
The first secondary permanent magnet 3 is arranged between the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5, and the second secondary permanent magnet 4 go to the bottom the place the side and the side at place, long limit of the first secondary permanent magnet 3 fit together, the go to the bottom side at another place, long limit of the side at place and the first secondary permanent magnet 3 of the 3rd secondary permanent magnet 5 fits together, the sensing parallel with broadside of the direction of magnetization of the first secondary permanent magnet 3 is from its first nearest main permanent magnet 1, dorsad from its second nearest main permanent magnet 2.
For making stator form very strong monolateral magnetic field in the side towards mover, should arrange second secondary permanent magnets 4 perpendicular to the permanent magnet array plane towards all first main permanent magnet 1 surroundings of mover one side in the direction of magnetization, arrange the 3rd secondary permanent magnet 5 in the second main permanent magnet 2 surroundings, and the direction of magnetization of all the first secondary permanent magnets 3 is pointed to all from its first nearest main permanent magnet 1.At this moment, in permanent magnet array, the angle between the direction of magnetization of any two adjacent permanent magnets is 45 degree.
For verifying the magnetic field intensity of described specific two-dimentional permanent magnet array, a packet size of now determining permanent magnet array is as follows: the height of all permanent magnets is 7mm, distance between the center of the adjacent first main permanent magnet 1 and the second main permanent magnet 2 is 25mm, wherein, the bed-plate dimension of the first main permanent magnet 1 and the second main permanent magnet 2 is 9mm * 9mm; The bed-plate dimension of the first secondary permanent magnet 3 is 15mm * 10mm; The bed-plate dimension of the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5 is: the long 9mm of upper base, and the long 15mm that goes to the bottom, the angle of going to the bottom with waist is 45 degree, the height of isosceles trapezoid is 3mm.In array, the direction of magnetization of each permanent magnet as shown in Figure 3.
According to above size, adopt air gap flux density that analytical model calculates described specific two-dimentional permanent magnet array along the component Bz of the z reference axis variation relation about x, y coordinate.Stronger one side in magnetic field, apart from 4mm place, permanent magnet array surface, the magnetic flux distribution in magnetic field as shown in Figure 9.As shown in Figure 9, the magnetic flux density amplitude in magnetic field is about 0.48 tesla, and far above the amplitude of existing two-dimentional permanent magnet array shown in Figure 1, therefore, described specific two-dimentional permanent magnet array has improved the efficient of permanent-magnet synchronous magnetic suspension planar motor.
The intensity of the first-harmonic air gap flux density of array shown in Fig. 1 (e) is the highest in present known two-dimentional permanent magnet array, and has good sine.Result after the first-harmonic air gap flux density that Figure 10 has provided array shown in air gap flux density shown in Figure 9 and Fig. 1 (e) subtracts each other.As shown in Figure 10, worst error between the two is no more than 0.035 tesla, total error is no more than 0.05%, the distribution that shows its magnetic flux density has good sinuso sine protractor, therefore, described specific two-dimentional permanent magnet array has improved precision and the response characteristic of permanent-magnet synchronous magnetic suspension planar motor.
Therefore, having adopted the planar motor of the specific two-dimentional permanent magnet array of described type, made up deficiency and shortcoming that existing permanent-magnet synchronous magnetic suspension planar motor high accuracy, high response and high efficiency can not be taken into account, is the better planar motor of a kind of performance.
The present invention not only is confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; can adopt other multiple embodiment to implement the present invention; therefore; every employing project organization of the present invention and thinking; do some simple designs that change or change, all fall into the scope of protection of the invention.
Claims (2)
1. permanent-magnet synchronous magnetic suspension planar motor, comprise mover and stator, it is characterized in that, described stator is comprised of two-dimentional permanent magnet array, and described two-dimentional permanent magnet array is comprised of the first main permanent magnet, the second main permanent magnet, the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet that have equal height and shape and be straight quadrangular;
Wherein the bottom surface of the first main permanent magnet is square, and the direction of magnetization makes progress perpendicular to the bottom surface; The shape and size of the second main permanent magnet are all identical with the first main permanent magnet, and the direction of magnetization is downward perpendicular to the bottom surface; The bottom surface of the first secondary permanent magnet is rectangle, and the direction of magnetization is parallel with broadside; The bottom surface of the second secondary permanent magnet is isosceles trapezoid, the waist of isosceles trapezoid and the angle at 45 ° of going to the bottom, upper base equate with the bottom surface length of side of the first main permanent magnet, goes to the bottom to grow the limit with the bottom surface of the first secondary permanent magnet and equate, the direction of magnetization and upper base with go to the bottom vertical and with angle at 45 °, bottom surface, point to upper base one side; The shape and size of the 3rd secondary permanent magnet are all identical with the second secondary permanent magnet, the direction of magnetization and upper base with go to the bottom vertical and with angle at 45 °, bottom surface, point to the side of going to the bottom;
In described two-dimentional permanent magnet array, the first main permanent magnet and the second main permanent magnet are staggered to planar array along directions X and Y-direction, and the width sum that is spaced apart the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet between the first main permanent magnet and the second main permanent magnet; The surrounding of the first main permanent magnet is furnished with four the second secondary permanent magnets, and all fits with the side at the upper base place of second a secondary permanent magnet in each side of the first main permanent magnet; The second main permanent magnet surrounding is furnished with four the 3rd secondary permanent magnets, and all fits with the side at the upper base place of the 3rd a secondary permanent magnet in each side of the second main permanent magnet; A part the first secondary permanent magnet is arranged between the second secondary permanent magnet and the 3rd secondary permanent magnet, the secondary permanent magnet of another part first is arranged in the outermost of permanent magnet array, for the first secondary permanent magnet that is arranged between the second secondary permanent magnet and the 3rd secondary permanent magnet, fit in the go to the bottom side at place, long limit of the side at place and the first secondary permanent magnet of the second secondary permanent magnet, the go to the bottom side applying at side with another place, long limit of the first secondary permanent magnet at place of the 3rd secondary permanent magnet; The secondary permanent magnet of another part first for the outermost that is arranged in permanent magnet array, fit in the go to the bottom side at place or the 3rd secondary permanent magnet the go to the bottom side at place of the side at its place, long limit and the second secondary permanent magnet, the direction of magnetization sensing of the first secondary permanent magnet is from its first nearest main permanent magnet.
2. permanent-magnet synchronous magnetic suspension planar motor according to claim 1, it is characterized in that, described mover is comprised of a plurality of orthogonal coil arrays, each coil array is formed by the square coil parallel arranged of a plurality of iron-core-frees, the orientation of coil array and the orientation of described two-dimentional permanent magnet array angle at 45 °.
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| CN104269947B (en) * | 2014-09-24 | 2016-11-30 | 江苏大学 | A kind of method of magnetic suspension permanent magnet planar motor magnetic steel array parameter optimization |
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