CN103795297B - A kind of levitation planar motor - Google Patents
A kind of levitation planar motor Download PDFInfo
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- CN103795297B CN103795297B CN201210435172.2A CN201210435172A CN103795297B CN 103795297 B CN103795297 B CN 103795297B CN 201210435172 A CN201210435172 A CN 201210435172A CN 103795297 B CN103795297 B CN 103795297B
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Abstract
Include coil windings unit and magnetic steel array the invention provides a kind of levitation planar motor, the magnetic steel array is spaced with second direction is formed in the first direction by first kind magnet steel group and Equations of The Second Kind magnet steel group, the first kind magnetic steel ingot with oblique magnetizing direction square by four cross sections is rearranged around the third direction perpendicular to first direction and second direction respectively for the first kind magnet steel group and Equations of The Second Kind magnet steel group, the cross section difference of the first kind magnet steel group and Equations of The Second Kind magnet steel group is square, the Equations of The Second Kind magnetic steel ingot that a cross section is rectangle is respectively equipped between each adjacent first kind magnet steel group and Equations of The Second Kind magnet steel group, the magnetizing direction of the Equations of The Second Kind magnetic steel ingot is sensing first kind magnet steel group or Equations of The Second Kind magnet steel group.The magnetic steel ingot of different magnetizing directions is combined into magnetic steel array, forms a well distributed alternating magnetic field, substantially increase thrust constant by the present invention by using the magnetic steel ingot with oblique magnetizing direction.
Description
Technical field
The present invention relates to a kind of electric machine, more particularly to a kind of levitation planar motor.
Background technology
In the work stage and mask platform of litho machine, the voice coil loudspeaker voice coil generally using the linear electric motors combination short stroke of long stroke is electric
Machine, and select air-bearing to realize high speed, high-accuracy positioning.However, in this organization plan, in order to obtain multiple motions
The free degree, generally requires multiple linear electric motors and is realized by the way of stacking.This organization plan is not only increased entirely
The complexity of system, reduces mode, and increases the load of bottom linear electric motors, causes positioning precision, the control of sports platform
Bandwidth and movement velocity processed decline to a great extent.In addition, when movement travel needs increase, the manufacturing cost of air supporting line slideway is not only
Geometry rises, and more and more difficult, has become the development bottleneck of large scale wafer manufacture.
In order to solve the above problems, a kind of motor of new structure is occurred in that --- levitation planar motor.It is based on long-range navigation
Hereby power principle, the electromagnetic force of generation is applied directly in work stage, and multiaxial motion can be provided simultaneously.Levitation planar motor one
As include magnetic steel array and coil group two large divisions, the magnetic steel ingot in the magnetic steel array is arranged alternately mode, is highly convenient for
Expand, efficiently solve the technical bottleneck in big stroke design.Moreover, by electromagnetic suspension technology, reducing the pact to moving surface type
Beam, the course of work contactless abrasion is especially suitable for needing big stroke, vacuum, ultra-clean, Ultra-precision positioning in microelectronics equipment
Demand.
In levitation planar motor, thrust constant is a very important design objective.Higher thrust constant is provided
The operating current that magnetic floats motor can be effectively reduced, so as to alleviate the influence that the motor feels hot to Ultra-precision positioning significantly.In order to carry
High thrust Changshu, the magnetic steel array that levitation planar motor of the prior art is used is made up of the NS arrays being alternately arranged, and it is watched
The free degree for taking motion is relatively low, and the precision of control is relatively low.
The content of the invention
The technical problem to be solved in the present invention be to provide it is a kind of can improve the levitation planar motor of thrust constant, and then
Improve the free degree and control accuracy of its servo motion.
To solve above technical problem, the invention provides a kind of levitation planar motor, including coil windings unit and magnetic
Steel array, relative to magnetic steel array along parallel to plane where the magnetic steel array and mutually after the coil windings unit energization
Vertical first direction and second direction motion, the magnetic steel array is by first kind magnet steel group and Equations of The Second Kind magnet steel group respectively along the
One direction and second direction, which are spaced, to be formed, and the first kind magnet steel group is with Equations of The Second Kind magnet steel group respectively by four identical sizes
The square first kind magnetic steel ingot with oblique magnetizing direction in the cross section of specification is around perpendicular to first direction and second party
To third direction rearrange, square, each phase is distinguished in the cross section of the first kind magnet steel group and Equations of The Second Kind magnet steel group
The Equations of The Second Kind magnetic steel ingot that a cross section is rectangle is respectively equipped between adjacent first kind magnet steel group and Equations of The Second Kind magnet steel group, it is described
The magnetizing direction of Equations of The Second Kind magnetic steel ingot is sensing first kind magnet steel group or Equations of The Second Kind magnet steel group.
The first kind magnetic steel ingot and Equations of The Second Kind magnetic steel ingot are contour, and Equations of The Second Kind magnetic steel ingot and the first kind magnet steel group,
The length on the connection side of Equations of The Second Kind magnet steel group is identical with the length of side of the first kind magnet steel group and Equations of The Second Kind magnet steel group.
The first kind magnet steel group is by the first magnetic steel ingot with the first magnetizing direction, second with the second magnetizing direction
Magnetic steel ingot, the 3rd magnetic steel ingot with the 3rd magnetizing direction and the 4th magnetic steel ingot with the 4th magnetizing direction are around third direction
Arranged counterclockwise is constituted, and first magnetizing direction is cornerwise right parallel to place magnetic steel ingot and two end faces of magnet steel group
Junction and it is more than 0 degree with the angle of third direction and is less than 90 degree, second magnetizing direction, the 3rd magnetizing direction and the 4th fills
Magnetic direction is rotated by first magnetizing direction around third direction to be obtained, and first to fourth magnetizing direction is equal around third direction
Even distribution.
The Equations of The Second Kind magnet steel group is by the 5th magnetic steel ingot with the 5th magnetizing direction, the with the 6th magnetizing direction the 6th
Magnetic steel ingot, the 7th magnetic steel ingot with the 7th magnetizing direction and the 8th magnetic steel ingot with the 8th magnetizing direction are around third direction
Arranged counterclockwise is constituted, and the 5th to the 8th magnetizing direction is opposite with first to fourth magnetizing direction respectively.
The magnetizing direction of four pieces of Equations of The Second Kind magnetic steel ingots on the outside of described four sides of first kind magnet steel group is parallel to
One direction or parallel to second direction, and point to first kind magnet steel group.
The coil windings unit include with 2*2 matrix arrays form arrange four bodies of having an effect, if each have an effect body by
The coil composition of dry parallel arrangement in the same direction, wherein the coil of two neighboring body of having an effect correspond to respectively in the first direction,
Second direction is arranged.
Optionally, the magnetic steel array is the stationary part of levitation planar motor, and the coil windings array is that magnetic is floating flat
The subpart of face motor.
Optionally, some coil windings units are expanded with second direction to form magnetic-floating plane electricity respectively in the first direction
The stationary part of machine, the magnetic steel array is the subpart of levitation planar motor.
The present invention is by using the magnetic steel ingot with oblique magnetizing direction, by the magnetic steel ingot fixed Combination of different magnetizing directions
Turn into the magnet steel in magnetic steel array, magnetic steel array as different magnet steel groups, and then by each magnet steel group and magnetic steel ingot fixed Combination
Block provides 12 kinds of magnetizing directions, and the servo motion free degree of motor is risen into 6, and foring one has good Sine distribution
Alternating magnetic field, substantially increase thrust constant, so as to effectively reduce the operating current of levitation planar motor, alleviate hair
The influence that heat is brought to Ultra-precision positioning, meanwhile, the levitation planar motor that the present invention is provided instead of biography using quadrangular structure
The triangular prism structure of system equally realizes the level of exerting oneself that triangular prism structure is reached, and processing technology is simpler, is more convenient for
Commercialization is realized, is more convenient for realizing quality control to product.
Brief description of the drawings
Fig. 1 is the structural representation of the levitation planar motor of the embodiment of the present invention 1；
Fig. 2 is the distribution schematic diagram of the magnet steel group of the levitation planar motor of the embodiment of the present invention 1；
Fig. 3 is the distribution schematic diagram of the magnetic steel ingot of the levitation planar motor of the embodiment of the present invention 1；
Fig. 4 is the structural representation of the levitation planar motor of the embodiment of the present invention 2；
In figure, 100-coil windings unit；101-the first has an effect body；102-the second has an effect body；
200-magnetic steel array；
300-first kind magnet steel group；400-Equations of The Second Kind magnet steel group；
301-the first magnetic steel ingot, the 302-the second magnetic steel ingot；303-the three magnetic steel ingot；304-the four magnetic steel ingot；401—
5th magnetic steel ingot；402-the six magnetic steel ingot；403-the seven magnetic steel ingot；404-the eight magnetic steel ingot；501-the nine magnetic steel ingot；
502-the ten magnetic steel ingot；503-the ten one magnetic steel ingot；504-the ten two magnetic steel ingot；
The cornerwise interface of 600-end face；
701-long side；702-short side.
Embodiment
Accompanying drawing 1 and accompanying drawing 2 are refer to below, and the levitation planar motor provided with reference to 3 couples of present invention of accompanying drawing is carried out in detail
Description, following is described as the preferred embodiments of the present invention.
Embodiment 1
A kind of levitation planar motor, including coil windings unit 100 and magnetic steel array 200 are present embodiments provided, it is described
Coil windings unit 100 be powered after relative to magnetic steel array 200 along parallel to the place plane of magnetic steel array 200 and mutually hang down
Straight first direction and second direction motion, the coil windings unit 100 include four arranged in 2*2 matrix arrays form
Have an effect body, body of each having an effect is made up of the coil of several parallel arrangements in the same direction, wherein the line of two neighboring body of having an effect
Circle respectively correspond in the first direction, second direction arrangement.
In the present embodiment, the coil windings unit 100 is made up of four bodies of having an effect, and body of each having an effect is by three coils
Composition, the body of having an effect is had an effect body 102 including the mutually perpendicular hair first of coil distribution arrangement body 101 and second of having an effect.
The magnetic steel array 200 by first kind magnet steel group 300 and Equations of The Second Kind magnet steel group 400 in the first direction and second direction
It is spaced and forms, the first kind magnet steel group 300 and Equations of The Second Kind magnet steel group 400 is respectively by the transversal of four identical dimensions
The square first kind magnetic steel ingot with oblique magnetizing direction in face is around the third party perpendicular to first direction and second direction
To rearranging, the cross section difference of the first kind magnet steel group 300 and Equations of The Second Kind magnet steel group 400 is square, and each adjacent the
The Equations of The Second Kind magnetic steel ingot that a cross section is rectangle, institute are respectively equipped between one class magnet steel group 300 and Equations of The Second Kind magnet steel group 400
The magnetizing direction of Equations of The Second Kind magnetic steel ingot is stated to point to first kind magnet steel group 300 or Equations of The Second Kind magnet steel group 400.Fig. 1 be refer to figure
3, two mutually perpendicular sides of the square cross section of the first direction and second direction along first kind magnetic steel ingot are set, the
Plane of three directions perpendicular to first direction and second direction where common.
The levitation planar motor that the present embodiment is provided magnetizes difference by using the magnetic steel ingot with oblique magnetizing direction
The magnetic steel ingot fixed Combination in direction turns into different magnet steel groups, and then each magnet steel group and magnetic steel ingot fixed Combination are turned into magnet steel battle array
Magnetic steel ingot in row 200, magnetic steel array 200 provides magnetizing direction not of the same race, and foring one has good Sine distribution
Alternating magnetic field, substantially increases thrust constant, so as to effectively reduce the operating current of levitation planar motor, alleviates heating
The influence brought to Ultra-precision positioning.
The first kind magnetic steel ingot and Equations of The Second Kind magnetic steel ingot are contour（Along for third direction）, and Equations of The Second Kind magnetic steel ingot and institute
State first kind magnet steel group, Equations of The Second Kind magnet steel group connection while length and the first kind magnet steel group and Equations of The Second Kind magnet steel group while
Length is identical.In the present embodiment, the long edge lengths of the rectangular cross section of Equations of The Second Kind magnetic steel ingot（For in a second direction）It is first
Twice of the length of side of the square cross section of class magnetic steel ingot, the long side of the rectangular cross section of Equations of The Second Kind magnetic steel ingot and magnet steel group are just
The side connection of square cross section.
Fig. 2 and Fig. 3 are refer to, in the present embodiment, the first magnetic steel ingot 301, the second magnet steel in first kind magnet steel group 300
Block 302, the 3rd magnetic steel ingot 303, the 4th magnetic steel ingot 304 is cross section for the cuboid of square, as first kind magnetic steel ingot,
It is distributed in the way of 2*2, and around third direction arrangement.9th magnetic steel ingot 501, the tenth magnetic steel ingot 502, the 11st magnetic steel ingot
503rd, the 12nd magnetic steel ingot 504 is that cross section is rectangular cuboid, as Equations of The Second Kind magnetic steel ingot, and the rectangle includes
Long side 701 and short side 702, four Equations of The Second Kind magnetic steel ingots its be respectively provided at first kind magnet steel group 300 four sides outside, institute
The long side 701 for stating rectangular cross section is twice of the square cross section length of side of first kind magnetic steel ingot, long side 701 and the first kind
The side of the square cross section of magnet steel group 300 is isometric, and interconnects.
As shown in Fig. 2 in the present embodiment, Equations of The Second Kind magnet steel group 400 and the first kind magnet steel group 300 on periphery share the 9th
Magnetic steel ingot 501, the tenth magnetic steel ingot 502, the 11st magnetic steel ingot 503 and the 12nd magnetic steel ingot 504.
Fig. 3 is refer to, in the present embodiment, the first kind magnet steel group 300 is by the first magnetic with the first magnetizing direction
Bloom 301, the second magnetic steel ingot 302 with the second magnetizing direction, the 3rd magnetic steel ingot 303 with the 3rd magnetizing direction and tool
Be made up of the 4th magnetic steel ingot 304 of the 4th magnetizing direction around third direction arranged counterclockwise, first magnetizing direction parallel to
The cornerwise interface 600 of two end faces of place magnetic steel ingot and magnet steel group and it is more than 0 degree less than 90 with the angle of third direction
Degree, second magnetizing direction, the 3rd magnetizing direction and the 4th magnetizing direction are revolved by first magnetizing direction around third direction
Turn to obtain, first to fourth magnetizing direction is uniformly distributed around third direction.
The Equations of The Second Kind magnet steel group 400 is by the 5th magnetic steel ingot 401 with the 5th magnetizing direction, with the 6th magnetizing direction
The 6th magnetic steel ingot 402, the 7th magnetic steel ingot 403 with the 7th magnetizing direction and the 8th magnet steel with the 8th magnetizing direction
Block 404 is constituted around third direction arranged counterclockwise, and the 5th to the 8th magnetizing direction magnetizes with described first to fourth respectively
In the opposite direction.
The magnetizing direction of four pieces of Equations of The Second Kind magnetic steel ingots on the outside of described 300 4 sides of first kind magnet steel group parallel to
First direction or parallel to second direction, points to first kind magnet steel group 300
The magnetizing direction of four pieces of Equations of The Second Kind magnetic steel ingots on the outside of described 400 4 sides of Equations of The Second Kind magnet steel group parallel to
First direction or parallel to second direction, points to the first kind magnet steel group 300 adjacent with the Equations of The Second Kind magnetic steel ingot.
Fig. 3 is refer to, in the present embodiment, four pieces be located on the outside of described 300 4 sides of first kind magnet steel group
Equations of The Second Kind magnetic steel ingot, is the 9th magnetic steel ingot 501, the tenth magnetic steel ingot 502, the 11st magnetic steel ingot 503, the 12nd magnetic steel ingot respectively
504.Four pieces of Equations of The Second Kind magnetic steel ingots on the outside of described 400 4 sides of Equations of The Second Kind magnet steel group, are also the 9th magnetic steel ingot respectively
501st, the tenth magnetic steel ingot 502, the 11st magnetic steel ingot 503, the 12nd magnetic steel ingot 504.Wherein the 9th magnetic steel ingot 501, the tenth magnet steel
Block 502, the 11st magnetic steel ingot 503, the magnetizing direction of the 12nd magnetic steel ingot 504 are directed to the center of first kind magnet steel group 300, i.e.,
Respectively along the forward direction of first direction as shown in Figure 3, the forward direction of second direction, the negative sense of first direction and second direction
Negative sense.And for relative Equations of The Second Kind magnet steel group 400, Equations of The Second Kind magnetic steel ingot on the outside of 400 4 sides of Equations of The Second Kind magnet steel group fills
Magnetic direction is respectively further from the center of Equations of The Second Kind magnet steel group 400, that is to say, that on the outside of 400 4 sides of Equations of The Second Kind magnet steel group
The magnetizing direction of two class magnetic steel ingots is respectively directed to the center of adjacent first kind magnet steel group 300, first kind magnet steel as shown in Figure 3
Group 300 shares the 11st magnetic steel ingot 503 with Equations of The Second Kind magnet steel group 400, i.e. the adjacent magnet steel group of the 11st magnetic steel ingot 503 is only wrapped
First kind magnet steel group 300 as depicted and Equations of The Second Kind magnet steel group 400 are included, its magnetizing direction points to the phase of the 11st magnetic steel ingot 503
The center of adjacent first kind magnet steel group 300, the i.e. unique first kind magnet steel adjacent with the 11st magnetic steel ingot 503 as shown in Figure 3
The center of group 300.
In the present embodiment, the magnetic steel array 200 is the stationary part of levitation planar motor, the coil windings unit
100 be the subpart of levitation planar motor.In the course of the work, the transfixion of magnetic steel array 200, coil windings unit 100
It is overall to be rotated because Ampere force is acted on.Fig. 1 is refer to, in the present embodiment, subpart is only by a coil windings
Unit 110 is constituted, and it is only a preferred embodiment of the invention, and it can also be made up of multiple coil windings units.
Embodiment 2
The difference of the present embodiment and embodiment is only in that：As shown in figure 4, some coil windings units 100 are distinguished
Body 101 is had an effect along first and the second coil distribution arrangement for having an effect body 102, i.e. first direction and second direction are expanded and be formed as magnetic
The stationary part of floating planar motor, the magnetic steel array 200 is the subpart of levitation planar motor.In the course of the work, line
The transfixion of winding element 100 is enclosed, magnetic steel array 200 is overall because the effect of Ampere force rotates.
In summary, the present invention is by using the magnetic steel ingot with oblique magnetizing direction, by the magnet steel of different magnetizing directions
Block fixed Combination turns into different magnet steel groups, and then each magnet steel group and magnetic steel ingot fixed Combination are turned into magnetic steel array, magnet steel battle array
Magnetic steel ingot in row provides 12 kinds of magnetizing directions, and the servo motion free degree of motor is risen into 6, forms one with good
The alternating magnetic field of good Sine distribution, substantially increases thrust constant, so as to effectively reduce the work electricity of levitation planar motor
Stream, alleviates the influence that heating is brought to Ultra-precision positioning.
Claims (4)
1. a kind of levitation planar motor, including coil windings unit and magnetic steel array, the coil windings unit are relative after being powered
Moved in magnetic steel array along parallel to plane where the magnetic steel array and orthogonal first direction and second direction, it is special
Levy and be：The magnetic steel array is arranged with second direction interval in the first direction respectively by first kind magnet steel group and Equations of The Second Kind magnet steel group
Row are formed, and cross section of the first kind magnet steel group with Equations of The Second Kind magnet steel group respectively by four identical dimensions is square
First kind magnetic steel ingot with oblique magnetizing direction is rearranged around the third direction perpendicular to first direction and second direction, institute
Distinguish square, each adjacent first kind magnet steel group and Equations of The Second Kind magnetic in the cross section for stating first kind magnet steel group and Equations of The Second Kind magnet steel group
The Equations of The Second Kind magnetic steel ingot that a cross section is rectangle is respectively equipped between steel group, the magnetizing direction of the Equations of The Second Kind magnetic steel ingot is
Point to first kind magnet steel group or Equations of The Second Kind magnet steel group；
The first kind magnetic steel ingot and Equations of The Second Kind magnetic steel ingot are contour, and Equations of The Second Kind magnetic steel ingot and the first kind magnet steel group, second
The length on the connection side of class magnet steel group is identical with the length of side of the first kind magnet steel group and Equations of The Second Kind magnet steel group；
The first kind magnet steel group is by the first magnetic steel ingot with the first magnetizing direction, the second magnet steel with the second magnetizing direction
Block, the 3rd magnetic steel ingot with the 3rd magnetizing direction and the 4th magnetic steel ingot with the 4th magnetizing direction are around the third direction inverse time
Pin is rearranged, and first magnetizing direction is parallel to place magnetic steel ingot and cornerwise interface of two end faces of magnet steel group
And it is more than 0 degree and less than 90 degree with the angle of third direction, second magnetizing direction, the 3rd magnetizing direction and the 4th side of magnetizing
Obtained to being rotated by first magnetizing direction around third direction, first to fourth magnetizing direction uniformly divides around third direction
Cloth；
The Equations of The Second Kind magnet steel group is by the 5th magnetic steel ingot, the 6th magnet steel with the 6th magnetizing direction with the 5th magnetizing direction
Block, the 7th magnetic steel ingot with the 7th magnetizing direction and the 8th magnetic steel ingot with the 8th magnetizing direction are around the third direction inverse time
Pin is rearranged, and the 5th to the 8th magnetizing direction is opposite with first to fourth magnetizing direction respectively；
The magnetizing direction of four pieces of Equations of The Second Kind magnetic steel ingots on the outside of described four sides of first kind magnet steel group is parallel to first party
To or parallel to second direction, and point to first kind magnet steel group.
2. levitation planar motor as claimed in claim 1, it is characterised in that：The coil windings unit is included with 2*2 matrixes
Four bodies of having an effect of array format arrangement, body of each having an effect is made up of the coil of several parallel arrangements in the same direction, wherein
The coil of two neighboring body of having an effect respectively correspond in the first direction, second direction arrangement.
3. the levitation planar motor as described in any one in claim 1-2, it is characterised in that：The magnetic steel array is floating for magnetic
The stationary part of planar motor, the coil windings unit is the subpart of levitation planar motor.
4. the levitation planar motor as described in any one in claim 1-2, it is characterised in that：Some coil windings lists
Member expands the stationary part to form levitation planar motor with second direction in the first direction respectively, and the magnetic steel array is that magnetic is floating flat
The subpart of face motor.
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| CN201210435172.2A CN103795297B (en) | 2012-11-02 | 2012-11-02 | A kind of levitation planar motor |
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| CN201210435172.2A CN103795297B (en) | 2012-11-02 | 2012-11-02 | A kind of levitation planar motor |
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| CN105871257B (en) * | 2016-05-05 | 2017-11-17 | 江苏大学 | A kind of torque current distribution method of moving-coil type magnetic suspension permanent magnet planar motor |
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| CN101610054A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Adopt the planar motor of three-dimensional permanent magnet array |
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| CN102681364A (en) * | 2012-05-16 | 2012-09-19 | 华中科技大学 | Six-degree-of-freedom magnetic suspension micro-positioner |
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| CN101800460B (en) * | 2009-12-23 | 2012-07-11 | 哈尔滨工业大学 | Short-stroke direct current planar motor integrating winding structure |
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|---|---|---|---|---|
| CN101694560A (en) * | 2009-04-03 | 2010-04-14 | 清华大学 | Silicon wafer stage double-stage exchange system by adopting air-floatation planar motor |
| CN101610054A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Adopt the planar motor of three-dimensional permanent magnet array |
| CN101707472A (en) * | 2009-11-27 | 2010-05-12 | 清华大学 | Power driving distribution method of moving iron type planar motor coil array |
| CN102097982A (en) * | 2011-02-24 | 2011-06-15 | 华中科技大学 | Permanent-magnet synchronous magnetic suspension planar motor |
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