CN106571731B - A kind of superconductor levitation planar motor - Google Patents
A kind of superconductor levitation planar motor Download PDFInfo
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- CN106571731B CN106571731B CN201510647161.4A CN201510647161A CN106571731B CN 106571731 B CN106571731 B CN 106571731B CN 201510647161 A CN201510647161 A CN 201510647161A CN 106571731 B CN106571731 B CN 106571731B
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Abstract
The invention discloses a kind of superconductor levitation planar motors, including stator and mover, the mover is located at the surface of the stator, the size of the mover is less than the size of the stator, the stator is coil array, the coil array is formed by several coil close-packed arrays, and iron core is equipped in each coil；The mover is superconduction volume array, and the superconduction volume array includes at least three pieces of superconductors.Compared with prior art, the magnetic field strength that electric current generates in coil not only can be enhanced by the way that iron core is arranged in coil in the present invention, but also reduces the eddy current of coil inside, improves the thrust constant and working efficiency of motor；In coil array surface, multiple superconductors are set, or coil array is set in superconductor surface, power output/volume ratio of motor can not only be increased, moreover it is possible to the assembly difficulty of motor and the susceptibility to temperature are reduced, to improve the overall performance of electromagnetism stability and levitation planar motor.
Description
Technical field
The present invention relates to motor fields, and in particular to a kind of superconductor levitation planar motor.
Background technique
With the progress of photoetching technique and the fast development of semi-conductor industry, there are four basic performances to refer to lithographic equipment
Mark: line width uniformity (CD, Critical Dimension Uniformity), depth of focus (Focus), alignment (Overlay) and production
Rate (Throughput).In order to improve line width uniformity, work stage or mask platform must improve the standard to precision positioning ability；For
Raising depth of focus error precision, work stage or mask platform must improve vertical precision positioning ability；In order to improve litho machine alignment
Error precision, work stage or mask platform must improve its internal mode to promote dynamic positioning characteristic.Photoetching locating platform need to be
Six degree of freedom precise flange is carried out in the spatial dimension of one almost plane, comprising: realize in horizontal X axis, Y direction big
Stroke motion, Fast Marching and precision sweep for realizing wafer；Z-direction realize small movements and about the z axis, Y-axis
With the minor rotation of Z axis, for realizing focusing and leveling.
Since levitation planar motor can not only realize six-freedom motion, and with traditional H-type or cross planar motor knot
Structure is compared, and has the advantages that simple and compact for structure, overall stiffness is high, and driving is simple, no mechanical friction and non-recoil, is conducive to realize
Higher accelerating ability and positioning accuracy, therefore be widely used in the high-precision of lithographic equipment.
As shown in Figs. 1-2, traditional levitation planar motor mainly includes two parts: magnets of stator array 1 ' and mover coil
Array 2 ', black arrow represents the magnetizing direction of magnet in Fig. 2, and wherein the vertical paper of the magnetizing direction of N magnet is outside, S magnet
The vertical paper of magnetizing direction inwards.The coil array of traditional levitation planar motor is distributed as shown in figure 3, coil array 2 ' is divided into
Four groups, each group is a body of having an effect, and body of each having an effect contains there are three coil, and three coils are passed through the three-phase current of a phase bit
Afterwards, it can produce horizontal and vertical thrust, wherein coil group A1 ', B1 ', C1 ' and A2 ', B2 ', C2 ' have X to, Z-direction power output, line
Circle group A3 ', B3 ', C3 ' and A4 ', B4 ', C4 ' go out Y-direction, Z-direction power output, and four coil groups as a whole, cooperate, real
The magnetic suspension movement of existing six degree of freedom.However since this kind of motor is by the way of magnet and fitting coils, magnet assembly difficulty
Greatly, and very sensitive to temperature, electromagnetism stability is lower, and there are the risks of loss of excitation；In addition, traditional levitation planar motor thrust constant
Smaller, working efficiency is to be improved.
Summary of the invention
The present invention provides one kind and effectively improves thrust constant, reduces assembly difficulty and mention to overcome the above deficiency
The superconductor levitation planar motor of high electromagnetism stability.
In order to solve the above-mentioned technical problem, the technical scheme is that a kind of superconductor levitation planar motor, including it is fixed
Son and mover, the stator are coil array, and the coil array is the rectangular configuration as made of several coil close-packed arrays, often
Several iron cores are equipped in a coil；The mover is superconduction volume array, and the superconduction volume array is located at the coil array
Surface, and the size of the superconduction volume array is less than the size of the coil array, the superconduction volume array includes at least three pieces
Geometric center is not complete on the same line and spaced superconductor.
Further, the iron core in the form of sheets, and left and right close-packed arrays.
Further, the coil is the square coil as made of enameled wire coiling centered on the iron core.
Further, the horizontal space between two adjacent superconductors is more than or equal to the width of twice of coil
Degree.
Further, the square structure of the superconductor.
Further, the width of the superconductor is more than or equal to the width of coil described in three times.
Further, the coil immediately below the superconductor is passed through three-phase electricity, in the every two adjacent superconductor, one
Coil immediately below a superconductor along longitudinal direction is passed through the three-phase electricity of same-phase, immediately below another described superconductor transversely
Coil be passed through the three-phase electricity of same-phase.
Further, when the phase invariant of the three-phase electricity in the coil immediately below the superconductor, the electric current of three-phase electricity becomes
Make the superconductor vertically forward motion greatly, the electric current of three-phase electricity becomes smaller so that the superconductor vertically negative movement.
Further, the superconductor follows the moving horizontally for three-phase electricity being passed through in the coil and moves, and keeps institute
The position for stating the coil of the relatively described energization of superconductor is constant.
The present invention also provides a kind of superconductor levitation planar motor, including stator and mover, the stator is superconductor, institute
Stating mover includes at least three being alternatively arranged in the coil array of the superconductor surface, and the size of the coil array is less than super
The size of conductor, the geometric center of the coil array is not complete on the same line, and the coil array is close by several coils
It arranges, several iron cores is equipped in each coil.
Further, the iron core in the form of sheets, and left and right close-packed arrays.
Further, the coil is the square coil as made of enameled wire coiling centered on the iron core.
Further, the quantity of coil described in each coil array is 3n, and n is positive integer.
Further, in the every two adjacent coil array, the coil in a coil array along longitudinal direction is logical
Enter the three-phase electricity of same-phase, the coil in another described coil array transversely is passed through the three-phase electricity of same-phase.
Further, the horizontal space between two adjacent coil arrays is more than or equal to the width of twice of coil
Degree.
Further, the coil is the ellipse coil as made of enameled wire coiling centered on the iron core.
Further, the quantity of coil described in each coil array is 3, the every two adjacent coil battle array
Coil in column in a coil array is arranged along first direction, the coil edge and described first in another described coil array
The vertical second direction arrangement in direction.
Superconductor levitation planar motor provided by the invention is stacked by being arranged in coil by sheet permeability magnetic material
Iron core, the magnetic field strength that electric current in coil generates not only can be enhanced, but also reduce the eddy current of coil inside, improves
The thrust constant and working efficiency of motor；Multiple superconductors are set in coil array surface, make superconduction volume array with respect to coil battle array
Column do six-freedom-degree magnetic suspension movement, or coil array is arranged in superconductor surface, and coil array is made to do six freely with respect to superconductor
It is dynamic to spend magnetic transportation by driving, can not only increase power output/volume ratio of motor, moreover it is possible to reduce the assembly difficulty of motor and the sensitivity to temperature
Degree, to improve the overall performance of electromagnetism stability and levitation planar motor.
Detailed description of the invention
Fig. 1 is traditional levitation planar motor three-dimensional structure diagram；
Fig. 2 is traditional levitation planar motor distribution of magnets schematic diagram；
Fig. 3 is the coil array distribution map of traditional levitation planar motor；
Fig. 4 is 1 three-dimensional structure diagram of superconductor levitation planar motor embodiment of the present invention；
Fig. 5 is 1 top view of superconductor levitation planar motor embodiment of the present invention；
Coil power-up sequence when Fig. 6 is 1 superconductor of superconductor levitation planar motor embodiment of the present invention along X to independently moving
Schematic diagram；
Fig. 7 is that 1 superconductor of superconductor levitation planar motor embodiment of the present invention is logical to coil when moving with Y-direction along X simultaneously
Electric sequential schematic；
Fig. 8 is 2 three-dimensional structure diagram of superconductor levitation planar motor embodiment of the present invention；
Fig. 9 is 3 three-dimensional structure diagram of superconductor levitation planar motor embodiment of the present invention；
Figure 10 is 3 coil distribution schematic diagram of superconductor levitation planar motor embodiment of the present invention；
Figure 11 is 4 coil distribution schematic diagram of superconductor levitation planar motor embodiment of the present invention.
Shown in Fig. 1-3: 1 ', magnets of stator array；2 ', mover coil array；A1 '~A4 ', B1 '~B4 ', C1 '~
C4 ', coil；
Shown in Fig. 4-11: 1, coil array；11~14, first~the 4th coil array；101, coil；A1~A4, B2
~B4, C1~C4, D1~D4, coil group；2, iron core；3, superconduction volume array；301, superconductor；3011~3014, the first~the
Four superconductors.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing:
Embodiment 1
As shown in figure 4, the present invention provides a kind of superconductor levitation planar motor, including stator and mover, stator are line
Array 1 is enclosed, coil array 1 is the rectangular configuration as made of several 101 close-packed arrays of coil, is equipped with iron core in each coil 101
2, iron core 2 is stacked by sheet permeability magnetic material；Mover is superconduction volume array 3, and superconduction volume array 3 is located at 1 surface of coil array,
And the size of superconduction volume array 3 is less than the size of coil array 1, superconduction volume array 3 includes at least three pieces of superconductors 301, superconduction
Body 301 is arranged at 1 surface of coil array, the geometric center of all superconductors 301 not on the same line, in the present embodiment
The quantity of superconductor 301 is 4, respectively the first, second, third and fourth superconductor 3011,3012,3013,3014, in symmetrical two-by-two
Distribution, superconduction volume array 3 are the square structure being made of four superconductors, and superconduction volume array 3 does six certainly with respect to coil array 1
It is moved by degree, is rotated including the linear motion along X, Y, Z axis direction and around X, Y, Z axis.By being arranged in coil 101 by piece
Iron core 2 made of shape permeability magnetic material stacks not only can be enhanced the magnetic field strength that electric current generates in coil 101, but also reduce
Eddy current inside coil 101 improves the thrust constant and working efficiency of motor；On 1 surface of coil array, setting is multiple super
Conductor 301 can not only increase motor power output/volume ratio, moreover it is possible to reduce the assembly difficulty of motor and the susceptibility to temperature, improve
Electromagnetism stability, the further overall performance for improving levitation planar motor.
Please continue to refer to Fig. 4, coil 101 is as enameled wire using iron core as square coil made of the coiling of center, superconduction
The square structure of body 301, the width of superconductor 301 are more than or equal to the width of three coils 101, and two adjacent superconductors
Horizontal space between 301 is more than or equal to the width of two coils 101.Specifically, as shown in figure 5, superconductor 301 it is adjacent two
Side is parallel with the corresponding both sides of corresponding coil 101 respectively, if the width of coil 101 is W1, two adjacent superconductors 301 it
Between horizontal space be W2, the width of superconductor 301 is W3, then three need to meet following relationship:
The working principle of superconductor levitation planar motor provided in this embodiment is as follows:
When Fig. 6 is that superconduction volume array 3 is moved along X-axis, the power-up sequence schematic diagram of coil 101.As shown in figure 5, coil
A11, A12, A13 are defined as coil group A1, and coil B11, B12, B13 are defined as coil group B1, and coil C11, C12, C13 are defined as
Coil group C1, coil D11, D12, D13 are defined as coil group D1, the initial position of the first superconductor 3011 be coil group A1, B1,
The surface of C1；Loop A 21, A22, A23, A24 are defined as coil group A2, and coil B21, B22, B23, B24 are defined as coil group
B2, coil C21, C22, C23, C24 are defined as coil group C2, the initial position of the second superconductor 3012 be coil group A21, A22,
The surface of A23, B21, B22, B23, C21, C22, C23；Loop A 31, A32, A33, A34 are defined as coil group A3, coil
B31, B32, B33, B34 are defined as coil group B3, and coil C31, C32, C33, C34 are defined as coil group C3, third superconductor
3013 initial position is the surface of coil group A31, A32, A33, B31, B32, B33, C31, C32, C33；Loop A 41,
A42, A43 are defined as coil group A4, and coil B41, B42, B43 are defined as coil group B4, and coil C41, C42, C43 are defined as coil
Group C4, coil D41, D42, D43 are defined as coil group D4, and the initial position of the first superconductor 3014 is coil group A4, B4, C4
Surface.
In Fig. 6, the three-phase current phase being passed through in original state lower coil group A1, B1, C1 is respectively And it is mutually 120 °.The make and break process of electric current are as follows: original state lower coil group A1, B1, C1 are powered, and coil group A1 is disconnected
The current phase of electricity, coil group B1 becomesThe current phase of coil group C1 becomesCoil group D1 is initially powered up, and electricity
Flowing phase isThe first superconductor 3011 is moved to the surface of coil group B1, C1, D1 at this time；Where 4th superconductor 3014
The power on/off sequence and current phase of electric current are identical as the first superconductor 3011 in coil group A4, B4, C4, D4 of position.Coil
Organizing the current phase that A2, B2, C2 are passed through is respectivelyAnd 120 ° are mutually, current switching process therein
Are as follows: it is powered in original state lower coil A21, A22, A23, B21, B22, B23, C21, C22, C23, loop A 21, B21, C21 are disconnected
Electricity, loop A 24, B24, C24 become energized state from off-position, and phase is respectivelyAnd coil
A22, A23, B22, B23, C22, C23 energized state and current phase remain unchanged, and the second superconductor 3012 is moved to line at this time
Enclose the surface of the position A22, A23, A24, B22, B23, B24, C22, C23, C24；The corresponding line of third superconductor 3013
Current switching process and current phase in circle group A3, B3, C3 is identical as the second superconductor 3012.In superconduction volume array 3 along X-axis
When movement, the first, second, third, fourth superconductor 3011,3012,3013,3014 simultaneously there is X to contribute to Z-direction, meanwhile,
Second, third superconductor 3012,3013 is for limiting moving along Y-axis for superconduction volume array 3.When superconductor 301 is moved along Y-axis
When, class when combination, galvanization and the current phase and superconductor 301 of the corresponding coil 101 in position are moved along X-axis
Seemingly, it therefore is not specifically described herein.
The shifting principle of superconduction volume array 3 are as follows: when the electric current in coil 101 generates above-mentioned variation, will lead on coil
Square magnetic field changes, and the magnetic flux for being now placed in the superconductor 301 right above it will change, and the magnetic flux changed
Induced current is generated inside superconductor 301, according to Lenz's law: faradic magnetic field always prevents to generate faradic
The variation of magnetic flux, and superconductor 301 be then in coil 101 transformation of electric current and mobile prevent magnetic flux quantitative change to reach
The purpose of change.Although 101 position of coil immobilizes, the alternation three-phase current being passed through in it can generate mobile traveling wave magnetic
, and superconductor 301 will follow always this travelling-magnetic-field to move, i.e., superconductor 301 is fixed with respect to the position of travelling-magnetic-field, with
The magnetic flux for keeping it internal is invariable.
When superconductor 301 is moved along X-axis and Y-axis simultaneously, the combination of the corresponding coil 101 in position and energization are suitable
Sequence is as shown in Figure 7.The initial position of first superconductor 3011 is identical with Fig. 6, and what the electric current in coil 101 was converted along X-axis
Meanwhile it will also be converted along Y-axis.Specifically, the initial position of the first superconductor 3011 be located at loop A 11, A12, A13, B11,
The surface of B12, B13, C11, C12, C13.The current phase of coil group A1, B1, C1 is respectivelyAnd
It is mutually 120 °.The make and break process of electric current are as follows: original state lower coil A11, A12, A13, B11, B12, B13, C11, C12, C13 are logical
Electricity, then loop A 11, A12, A13, B11, C11 power-off, coil D12, D13, D14, B14, C14 are powered, and current phase satisfaction
Claimed below: the current phase of coil B12, B13, B14 becomeThe current phase of coil C12, C13, C14 become
The current phase of coil D12, D13, D14 becomeSimultaneously the first superconductor 3011 be moved to coil B12, B13, B14, C12,
The surface of C13, C14, D12, D13, D14.Electric current in coil group A4, B4, C4, D4 of 4th superconductor, 3014 position
Power on/off sequence and current phase are identical as the first superconductor 3011.For the second superconductor 3012, correspond to coil group A2,
The current switching process of B2, C2 are as follows: original state lower coil A21, A22, A23, B21, B22, B23, C21, C22, C23 are powered,
And the corresponding current phase of coil group A2, B2, C2 is respectivelyAnd be mutually 120 °, then loop A 21,
A22, A23, B21, C21 power-off, coil B24, C24, D22, D23, D24 are powered, and the phase change satisfaction of corresponding current is following
Relationship: the current phase of coil B22, B23, B24 becomeThe current phase of coil C22, C23, C24 becomeCoil
The current phase of D22, D23, D24 becomeSimultaneously the second superconductor 3012 be moved to coil B22, B23, B24, C22,
The surface of C23, C24, D22, D23, D24.Current switching mistake in third superconductor 3013 corresponding coil group A3, B3, C3
Journey and corresponding current phase are identical as the second superconductor 3012, therefore the first, second, third, fourth surpass in these cases
Conductor 3011,3012,3013,3014 simultaneously there is X to contribute to Y-direction.
When superconductor 301 does catenary motion along Z axis, by fixed current phase, change the mode of size of current to control
Make its catenary motion.When electric current becomes larger, superconductor 301 is along Z axis forward motion, conversely, then along Z axis negative movement.Work as electric current
Amplitude is fixed, and when phase change, as long as the load weight above motor is constant, the Z-direction position of superconductor 301 is constant.
Embodiment 2
Unlike the first embodiment, the quantity of superconductor 301 is 3 in the present embodiment, and the geometric center of three is not complete
On same straight line, as shown in Figure 8.The wherein pitch requirements between the size of superconductor 301, superconductor 301, corresponding coil
101 step modes are same as Example 1.When the body while when having an effect had an effect being not arranged on the same straight line with 3, just it is able to achieve
The magnetic transportation by driving of six degree of freedom is dynamic.
Embodiment 3
As shown in figure 9, the superconductor levitation planar motor and the distinctive points of embodiment 1 and embodiment 2 of the present embodiment are:
Stator is different with the structure of mover.Specifically, the stator in the present embodiment is superconductor 301, and mover includes at least three coils
The geometric center of array 1, coil array 1 is not arranged on the same straight line, and coil array 1 is arranged at 301 surface of superconductor, and
Its size is less than the size of superconductor 301, and coil array 1 is formed by several 101 close-packed arrays of coil, set in each coil 101
Cored 2, iron core 2 is stacked by sheet permeability magnetic material, and coil array 1 does six-freedom motion with respect to superconductor 301.
Please emphasis referring to Fig. 9, the quantity of each 1 coil 101 of coil array is 3n, and n is positive integer, this implementation
N=3 in example, coil 101 are as enameled wire using iron core as square coil made of the coiling of center, it is preferred that adjacent windings battle array
Horizontal space between column 1 is more than or equal to the width of two coils 101.Specifically, setting the width of coil 101 as W1, two phases
Horizontal space between adjacent coil array 1 is W4, then the relationship that three need to meet is: W4≥2W1。
The working principle of the superconductor levitation planar motor provided in the present embodiment is as follows:
The combination of coil 101 and its internal step mode are as shown in Figure 10.There are four coil array 1 is set, respectively first,
Two, third, the 4th coil array 11,12,13,14, each coil array 1 include three coil groups { Ai, Bi, Ci }, wherein i=
1,2,3,4, there are three coil 101, first coil array 11 and the 4th coil arrays 14 by three lines for each coil group
Circle group is horizontally arranged along the x axis to be formed, and the second coil array 12 and tertiary coil array 13 are by three coil groups along Y
Axis direction is horizontally arranged to be formed, can be passed through in three coil groups in each coil array 1 phase difference each other 120 ° three
Phase current.After first coil array 11 and the 4th coil array 14 are passed through the three-phase current of alternation, produced relative to superconductor 301
Raw X to Z-direction active force, after the second coil array 12 and tertiary coil array 13 are passed through the three-phase current of alternation, relative to
Superconductor 301 generates the active force of Y-direction and Z-direction, and four coil arrays 1 combine, and six degree of freedom can be realized on superconductor
Movement.It certainly can also be by first coil array 11 and the 4th coil array 14 and the second coil array 12 and tertiary coil array 13
Coil combination and step mode exchange, be thus that first coil array 11 and the 4th coil array 14 go out Y-direction power and Z-direction
Power, the second coil array 12 and tertiary coil array 13 go out X to power and Z-direction power.
Embodiment 4
As different from Example 3, each coil array 1 includes 3 coils 101 in the present embodiment, and coil 101 is by painting
Envelope curve is using iron core as ellipse coil made of the coiling of center, and as shown in figure 11, coil array 1 includes the first, second, third and fourth line
Array 11,12,13,14 is enclosed, wherein the first, the 4th coil array 11,14 is horizontally arranged along the x axis by three coils 101
It forming, the second, the 4th coil array 12,13 is formed by three coils 101 are horizontally arranged along the y axis, likewise, first,
The coil combination and step mode interchangeable of four coil arrays 11,14 and second and third coil array 12,13.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as prompting,
It should not limit protection scope of the present invention.It is equal that various omission, substitution, and alteration are carried out without departing from the spirit and scope of the present invention
It should be included within the scope of the present invention.
Claims (17)
1. a kind of superconductor levitation planar motor, including stator and mover, which is characterized in that the stator is coil array, institute
Stating coil array is the rectangular configuration as made of several coil close-packed arrays, is equipped with several iron cores in each coil；It is described
Mover is superconduction volume array, and the superconduction volume array is located at the coil array surface, and the size of the superconduction volume array is small
In the size of the coil array, the superconduction volume array, which includes that at least three pieces of geometric centers are not complete, on the same line and to be spaced
The superconductor of arrangement.
2. superconductor levitation planar motor according to claim 1, which is characterized in that the iron core in the form of sheets, and controls
Close-packed arrays.
3. superconductor levitation planar motor according to claim 1, which is characterized in that the coil is to be with the iron core
Center square coil as made of enameled wire coiling.
4. superconductor levitation planar motor according to claim 3, which is characterized in that two adjacent superconductors it
Between horizontal space be more than or equal to twice of coil width.
5. superconductor levitation planar motor according to claim 3, which is characterized in that the square knot of superconductor
Structure.
6. superconductor levitation planar motor according to claim 5, which is characterized in that the width of the superconductor be greater than etc.
The width of the coil described in three times.
7. superconductor levitation planar motor according to claim 1, which is characterized in that the coil immediately below the superconductor
It is passed through three-phase electricity, in the every two adjacent superconductor, the coil immediately below a superconductor along longitudinal direction is passed through same phase
The three-phase electricity of position, another coil of superconductor underface transversely are passed through the three-phase electricity of same-phase.
8. superconductor levitation planar motor according to claim 7, which is characterized in that the coil immediately below the superconductor
In three-phase electricity phase invariant when, the electric current of three-phase electricity becomes larger so that the superconductor vertically forward motion, three-phase electricity
Electric current becomes smaller so that the superconductor vertically negative movement.
9. superconductor levitation planar motor according to claim 7, which is characterized in that the superconductor follow be passed through it is described
Moving horizontally for three-phase electricity in coil and move, keep the position of the coil of the relatively described energization of the superconductor constant.
10. a kind of superconductor levitation planar motor, including stator and mover, which is characterized in that the stator is superconductor, described
Mover includes at least three being alternatively arranged in the coil array of the superconductor surface, and the size of the coil array is less than superconduction
The size of body, the geometric center of the coil array is not complete on the same line, and the coil array is closely arranged by several coils
It arranges, several iron cores is equipped in each coil.
11. superconductor levitation planar motor according to claim 10, which is characterized in that the iron core is in the form of sheets, and left
Right close-packed arrays.
12. superconductor levitation planar motor according to claim 10, which is characterized in that the coil is with the iron core
Centered on the square coil as made of enameled wire coiling.
13. superconductor levitation planar motor according to claim 12, which is characterized in that institute in each coil array
The quantity for stating coil is 3n, and n is positive integer.
14. superconductor levitation planar motor according to claim 13, which is characterized in that the every two adjacent coil
In array, the coil in a coil array along longitudinal direction is passed through the three-phase electricity of same-phase, in another described coil array
Coil transversely is passed through the three-phase electricity of same-phase.
15. superconductor levitation planar motor according to claim 13, which is characterized in that two adjacent coil battle arrays
Horizontal space between column is more than or equal to the width of twice of coil.
16. superconductor levitation planar motor according to claim 10, which is characterized in that the coil is with the iron core
Centered on the ellipse coil as made of enameled wire coiling.
17. superconductor levitation planar motor according to claim 16, which is characterized in that institute in each coil array
The quantity for stating coil is 3, and the coil in the every two adjacent coil array in a coil array is arranged along first direction
It arranges, the coil in another described coil array is arranged along the second direction vertical with the first direction.
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| CN108964404B (en) * | 2018-07-18 | 2020-06-19 | 中国石油大学(华东) | Permanent magnet planar motor and decoupling algorithm thereof |
| CN111835177A (en) * | 2019-04-17 | 2020-10-27 | 上海微电子装备（集团）股份有限公司 | Magnetic suspension motor and control method thereof |
| CN112762807B (en) * | 2020-12-08 | 2021-11-23 | 清华大学 | Planar motor rotor displacement measuring method and device |
| CN113671801A (en) * | 2021-08-03 | 2021-11-19 | 清华大学 | Photoetching machine workpiece table balance positioning system based on superconducting magnetic suspension |
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| CN203520012U (en) * | 2013-09-27 | 2014-04-02 | 清华大学 | Moving-iron magnetic suspension planar motor with vacuum hood |
| CN104901586A (en) * | 2014-03-03 | 2015-09-09 | 上海微电子装备有限公司 | Magnetic levitation planar motor |
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2015
- 2015-10-08 CN CN201510647161.4A patent/CN106571731B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101286368A (en) * | 2008-04-17 | 2008-10-15 | 上海交通大学 | Multi-magnetic feet drive type great scope magnetic-floating plane workstation |
| CN102594220A (en) * | 2012-01-21 | 2012-07-18 | 哈尔滨工业大学 | Magnetic suspension planar motor with superconductor excitation structure |
| CN203520012U (en) * | 2013-09-27 | 2014-04-02 | 清华大学 | Moving-iron magnetic suspension planar motor with vacuum hood |
| CN104901586A (en) * | 2014-03-03 | 2015-09-09 | 上海微电子装备有限公司 | Magnetic levitation planar motor |
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