CN101820203B - Combined drive semi-closed loop precision positioning system - Google Patents
Combined drive semi-closed loop precision positioning system Download PDFInfo
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- CN101820203B CN101820203B CN2010101133835A CN201010113383A CN101820203B CN 101820203 B CN101820203 B CN 101820203B CN 2010101133835 A CN2010101133835 A CN 2010101133835A CN 201010113383 A CN201010113383 A CN 201010113383A CN 101820203 B CN101820203 B CN 101820203B
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Abstract
The invention discloses a combined drive semi-closed loop precision positioning system, comprising a sliding table base, wherein a linear slide rail is mounted on the sliding table base and is provided with a sliding table, the left side and the right side of the linear slide rail are respectively provided with an ultrasound wave motor driving the sliding table to move on the slide rail and a stepping motor, and the ultrasound wave motor is connected with a corner measurement device. The invention has reasonable structure, overcomes the disadvantage of short service life of the ultrasound wave motor and can realize double-motor undisturbed switchover during precision positioning process.
Description
Technical field:
The present invention relates to a kind of semiclosed loop Precision Position Location System, specifically, relate to the semiclosed loop Precision Position Location System of a kind of hybrid drive and a kind of novel displacement detector.
Background technology:
Precision Position Location System is one of key technology of Precision Machining and ultraprecise processing.For satisfying application demand, Precision Position Location System must possess high frequency sound, big stroke, high-precision performance.In commercial production, realize that the accurate mobile normal stepping motor that uses of straight line drives through screw mandrel.But the micro-stepping driving of stepping motor precision depends on factors such as segmentation Current Control precision, and the segmentation number is big more, the more difficult control of precision, and the driver cost is high; Exist very serious high-frequency electromagnetic to disturb like the high frequency starting the arc under the welding operating mode and stabilising arc to sub-driver circuit under the abominable operating mode.
Supersonic motor (ultrasonic motor; Abbreviation USM) principle and structure are different from traditional electromagnetic motor fully, do not have winding and magnetic field components, and it is not to transmit energy through electromagnetic interaction; But the direct New-type electric machine of realizing energy converting between mechanical by piezoceramic material; It is simple in structure, has characteristics such as unit volume is exerted oneself greatly, excellent response performance, and can reach the high position precision that the traditional electrical magneto can't be equal to.But USM is the direct friction couple transmission actuating force through stator and rotor; Under alternate stress and frictional force effect; Motor produces fatigue damage, makes condensed layer local shedding, temperature rise between stator and piezoelectric ceramic cause thermal mismatching etc. soon easily, influences motor output torque and positioning accuracy.And, reduced in the life-span of USM greatly because piezoelectric ceramic crack initiation, expansion and unstability cause sudden destruction.Adopt supersonic motor more and more in recent years, but adopt single supersonic motor can't overcome the short shortcoming of lifetime of system as the system of precision positioning driving element.
Chinese scholars adopts the electromagnetic servo motor as navigation system coarse positioning driving element in recent years; Adopt supersonic motor or piezo-activator as navigation system precision positioning driving element; Fully combine supersonic motor and electromagnetic machine advantage separately, obtained effect preferably.But existing hybrid drive system complex structure, the connector processing difficulties can't realize not having disturbance and switch.And the precision positioning displacement detector in the closed-loop system often uses high accuracy grating chi, encoder, laser sensor etc., cost height, complex equipments, poor anti jamming capability.The present invention proposes a kind of Precision Position Location System that does not have disturbance switching hybrid drive and a kind of novel displacement detector based on bi-motor; This system configuration is simple, be easy to processing; Can realize the no disturbance switching between electromagnetic machine and supersonic motor, and can realize that the semi-closed loop system high precision displacement detects.
Summary of the invention:
The object of the present invention is to provide a kind of rational in infrastructurely, overcome the semiclosed loop Precision Position Location System of short shortcoming in supersonic motor useful life.
Technical solution of the present invention is:
A kind of combination drive semiclosed loop Precision Position Location System; It is characterized in that: comprise the slide unit base; Adorn linear motion guide on the slide unit base; Adorn slide unit on the linear motion guide, be provided with respectively in the left and right sides of linear motion guide and drive supersonic motor and the stepping motor that slide unit moves on rail plate, supersonic motor is connected with the angle displacement measurement device.
Supersonic motor connects with the ball screw that is connected with slide unit through the first flexible sheet shaft coupling, adorns ball nut on the ball screw; Stepping motor is connected with the shaft coupling that relies on bearings through the second flexible sheet shaft coupling, and shaft coupling is connected with ball nut, and ball nut is fixedly connected with the nut seat through angular contact bearing, and nut seat is fixedly connected with slide unit.
The supersonic motor and first electric machine support are fastenedly connected by screw, and first electric machine support is fixedly connected with the bearing pedestal of screw mandrel spring bearing, and the bearing pedestal of screw mandrel spring bearing is fixedly connected with the slide unit base; Stepping motor is fixedly connected with second electric machine support, and second electric machine support is fixedly connected with slide unit.
The angle displacement measurement device comprises first rotating disk, second rotating disk; First rotating disk is connected with the supersonic motor output shaft is concentric; Second rotating disk is connected with small synchronous motor is concentric; Second rotating disk rotates with small synchronous motor, and the axial line of small synchronous motor and supersonic motor is on same horizontal line, and first rotating disk, second rotating disk are concentric form; Infrared transmitting tube is fixedly mounted on first rotating disk; The projection of infrared transmitting tube infrared beam axis on first rotating disk is through the center of circle of first rotating disk, and infrared receiving tube is fixedly mounted on second rotating disk, and the projection of infrared receiving tube axis on second rotating disk is through the center of circle of second rotating disk; The distance in the infrared receiving tube and the second rotating disk center of circle is greater than the distance in the infrared transmitting tube and the first rotating disk center of circle, and the angle of the axis of infrared transmitting tube and first rotating disk equals the angle of the infrared receiving tube axis and second rotating disk.
Electric machine control system adopts the form of FPGA assistant SCM; PWM ripple through FPGA sends is controlled supersonic motor and stepper motor driver; PWM wave period is by relatively control module control, the PWM duty ratio by control module relatively, count control module and put the numerical control control module and confirm jointly.
Angular Displacement Detecting device interface circuit adopts the form of FPGA assistant SCM; Is pulse by comparator with the output conversion of signals of infrared receiving tube; Accomplish the differentiation of adjacent output pulse by the parity check module; Accomplished the calculating in the adjacent pulse time interval and latched by counter and latch, accomplished the calculating of difference in the time interval of two adjacent pulses by subtracter, result of calculation is sent single-chip microcomputer to handle and is obtained the angular displacement size.
The present invention is rational in infrastructure, overcomes supersonic motor short shortcoming in useful life, and beneficial effect mainly shows:
1. make full use of electromagnetic machine and supersonic motor advantage separately, overcome short shortcoming of supersonic motor life-span, realize system's long-life, big stroke precision positioning.
2. the new hybrid driving mechanism that provides can realize that bi-motor does not have disturbance and switches, and bi-motor can simultaneously or work independently, and when bi-motor moves simultaneously, can realize the rapid movement of slide unit and adjustment at a slow speed, and controllable precision is high.
3. because the transmission hinge is short, simple in structure, so slide unit positioning accuracy and repetitive positioning accuracy are high.
4. the hybrid drive that provides is simple in structure, and is easy to process.
5. a kind of novel Angular Displacement Detecting device is provided, micro angular displacement is detected has converted displacement of the lines into and detect, this device precision is high, resolution is high, cost is low, easy for installation, and has the advantage that need not return to zero before measuring.Supersonic motor closed-loop control in the time of can realizing the little feeding of navigation system.
Description of drawings:
Below in conjunction with accompanying drawing and embodiment the present invention is described further.
Fig. 1 is the configuration diagram of one embodiment of the invention.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is an angle displacement measurement apparatus structure diagrammatic sketch of the present invention.
Fig. 4 is an angular displacement measurement device schematic diagram of the present invention.
Fig. 5 is an Angular Displacement Detecting sequential chart of the present invention.
Fig. 6 is Precision Position Location System Drive and Control Circuit figure of the present invention.
Embodiment:
A kind of combination drive semiclosed loop Precision Position Location System; Comprise slide unit base 1; Dress linear motion guide 2 on the slide unit base; Dress slide unit 3 on the linear motion guide is provided with supersonic motor 4 and stepping motor 5 that the driving slide unit moves respectively on rail plate in the left and right sides of linear motion guide, supersonic motor is connected with angle displacement measurement device 6.
Supersonic motor connects with the ball screw that is connected with slide unit 8 through the first flexible sheet shaft coupling 7, dress ball nut 11 on the ball screw; Stepping motor is connected with the shaft coupling 10 that relies on bearing 9 to support through the second flexible sheet shaft coupling; Shaft coupling is connected with ball nut 11; Ball nut is fixedly connected with the nut seat through two high angular contact bearings 12 such as Internal and external cycle, and nut seat is fixedly connected with slide unit 3, and is located by alignment pin.
The supersonic motor 4 and first electric machine support 13 are fastenedly connected by screw, and first electric machine support is fixedly connected with the bearing pedestal 15 of screw mandrel spring bearing (angular contact bearing) 14, and the bearing pedestal of screw mandrel spring bearing is fixedly connected with slide unit base 1; Stepping motor 5 is fixedly connected with second electric machine support 16, and second electric machine support is fixedly connected with slide unit 3.
Angle displacement measurement device 6 comprises first rotating disk 17, second rotating disk 18; First rotating disk is connected with the supersonic motor output shaft is concentric; Second rotating disk and 19 concentric connections of small synchronous motor; Second rotating disk rotates with small synchronous motor, and the axial line of small synchronous motor and supersonic motor is on same horizontal line, and first rotating disk, second rotating disk are concentric form; Infrared transmitting tube 20 is fixedly mounted on first rotating disk; The projection of infrared transmitting tube infrared beam axis on first rotating disk is through the center of circle of first rotating disk, and infrared receiving tube 21 is fixedly mounted on second rotating disk, and the projection of infrared receiving tube axis on second rotating disk is through the center of circle of second rotating disk; The distance in the infrared receiving tube and the second rotating disk center of circle is greater than the distance in the infrared transmitting tube and the first rotating disk center of circle, and the angle (acute angle) of the axis of infrared transmitting tube and first rotating disk equals the angle (acute angle) of the infrared receiving tube axis and second rotating disk.
Electric machine control system adopts the form of FPGA assistant SCM; PWM ripple through FPGA sends is controlled supersonic motor and stepper motor driver; PWM wave period is by relatively control module control, the PWM duty ratio by control module relatively, count control module and put the numerical control control module and confirm jointly.
Angular Displacement Detecting device interface circuit adopts the form of FPGA assistant SCM; Is pulse by comparator with the output conversion of signals of infrared receiving tube; Accomplish the differentiation of adjacent output pulse by the parity check module; Accomplished the calculating in the adjacent pulse time interval and latched by counter and latch, accomplished the calculating of difference in the time interval of two adjacent pulses by subtracter, result of calculation is sent single-chip microcomputer to handle and is obtained the angular displacement size.
Slide unit can be realized supersonic motor list motor-driven and stepping motor individual drive, can realize that also bi-motor drives simultaneously.When bi-motor moves simultaneously, can realize the rapid movement of slide unit and at a slow speed the adjustment, rapid movement with at a slow speed the adjustment only depend on the change motor direction of rotation get final product.
The precision positioning mechanism that proposes can further be expanded and be cross slid platform, realizes plane two free precision positionings.In the specific implementation, the mechanism of the mechanism of another degree of freedom and the present invention proposition can be in full accord.
Angle displacement measurement principle analysis and performance evaluation
Principle analysis
Adopt Traveling Ultrasonic Motor as platform precision positioning drive motors among the embodiment, supersonic motor output shaft one end is connected to spring coupling, the other end and the concentric (see figure 3) that is connected of first rotating disk.The projection of infrared beam axis on first rotating disk is through the center of circle of first rotating disk.Second rotating disk connects with small synchronous motor is concentric, rotates with synchronous motor.The axial line that keeps synchronous machine and supersonic motor keeps two rotating disks concentric on a horizontal line.Infrared receiving tube is fixedly mounted on second rotating disk, and with the motion of synchronous motor synchronous, projection on the rotating disk is being fallen through the center of circle of second rotating disk in the infrared receiving tube axis.The distance in the infrared receiving tube and the center of circle is greater than the distance in the infrared transmitting tube and the center of circle, and the angle (acute angle) of the axis of infrared transmitting tube and first rotating disk equals the angle (acute angle) of the infrared receiving tube axis and second rotating disk.
During measurement, keep the permanent rotating speed rotation of small synchronous motor (establishing rotating speed is Nr/min), keep small synchronous motor to turn to and turn to identical with supersonic motor.When infrared receiving tube received the infrared light that transmitting tube sends, interface circuit was exported a high level pulse signal, and synchronous machine whenever rotates a circle with respect to supersonic motor, exports a pulse signal.When the supersonic motor transfixion, suppose infrared transmitting tube in the position A place, receiving tube shown in the A among Fig. 5, is the synchronous machine used time t1 that circles through the pulse signal of interface circuit and output interpulse period.Judge that like the interface circuit controller each two adjacent pulses that occur are always t1 at interval, then can think the supersonic motor transfixion.
Like supersonic motor generation micrometric displacement, establish direction of displacement and synchronous machine rotation direction homophase (being clockwise), convenient that this displacement amplification back is as shown in Figure 4 for illustrating, photoemission cell is followed rotation and is gone to B place, position by initial position A at this moment.Receiving circuit output signal is shown in the B among Fig. 5.Judge that like the interface circuit controller each two adjacent pulses that occur become t2 by t1 at interval, think that then supersonic motor has clockwise rotated certain angle θ
1, θ
1Size and (t
2-t
1) be directly proportional.Can get:
When being still in B place, position like photoemission cell, receiving circuit output signal is shown in the C among Fig. 5.In like manner, when supersonic motor continuation rotation, when going to C place, position by position B, receiving circuit output signal is shown in the D among Fig. 5.Judge that like the interface circuit controller each two adjacent pulses that occur become t3 by t1 at interval, think that then supersonic motor has clockwise rotated certain angle θ
2, θ
2Size and (t
3-t
1) be directly proportional.Can get:
Then the supersonic motor accumulation anglec of rotation is θ
1+ θ
2
2.2 performance evaluation
During practical implementation, can make supersonic motor work in continuous running status or stepping state.When supersonic motor works in continuous running status; After angular displacement produces; Checkout gear can not make an immediate response, but could respond will wait infrared receiving tube to go to the infrared transmitting tube relative position time, then has bigger position error like the supersonic motor rapid speed.When supersonic motor works in the stepping state, every operation one micro-stepping of motor is stopped, next micro-stepping of reruning after the band Angular Displacement Detecting is accomplished.Because the micro-stepping elongation during the Traveling Ultrasonic Motor step run is very little, therefore can reach very high positioning accuracy.
This novel Angular Displacement Detecting device advantage is following:
(1) small angular displacement is enlarged into the considerable line of surveying (arc length) displacement, adopts the method for controller timing to accomplish detection.
(2) simple in structure, easy for installation, cost is low.
(3) certainty of measurement and resolution are high.
(4) need not return to zero before the measurement.
Also there is certain error in this transducer:
(1) digitial controller adopts the method for counting to realize timing, and the resolution of counting influences precision as a result.
(2) pulsation of synchronous machine rotating speed causes the inhomogeneous of rotating speed, thereby causes random error.
(3) processing and two rotating disk decentraction, motor shaft and rotating disk decentraction constantly are installed, the inaccuracy of infrared reception and reflector setting angle all can cause random error and systematic error.
Precision Position Location System Dual-motors Driving Circuit Design
Among the embodiment, with the Traveling Ultrasonic Motor USR60 and the TAMAGAWASEIKI CO of Shinsei company, the TSS103N173 four phase step motor of .LTD company is the system drive motor.The Precision Position Location System Drive and Control Circuit is as shown in Figure 6.
The present invention adopts the form of FPGA assistant SCM, and in bi-motor semiclosed loop precise Positioning Control process, single-chip microcomputer is intervened less, has significantly reduced the main controller burden.And but FPGA has function and be prone to revise online programming, has very strong versatility; Interface is simple, response speed is fast, is suitable for full-digital control, can improve systematic function greatly.
In Fig. 6, Traveling Ultrasonic Motor works in the stepping state, thereby realizes the micro-stepping feeding of supersonic motor through the PWM ripple control motor driver D6060 that FPGA sends.Presort frequency module and be used for the generation of motor start and stop control and FPGA global clock signal; Put the numerical control control module and be used to adjust motor micro-stepping ON time; The counting control module is confirmed the PWM cycle according to the output valve of putting the numerical control control module; Relatively control module has been confirmed the micro-stepping ON time and dwell time between the step; Interlock circuit is used to prevent the triggering competition of D6060 interface and is used for motor positive and inverse control select.Relatively control module 2 is used to offer the rotating of stepping motor pwm pulse and control step motor, and the loop pulse generator is used for the output pulse of comparing control module 2 is become the spike train with certain sequential, and through power amplification rear drive stepping motor.
Presort frequency module
This module with external clock (in the present embodiment adopt 25M active crystal oscillator) as the global clock pulse and as the triggering signal of comparison control module and the clock signal of counter.
Put the numerical control control module
Put the counting initial value of the output of numerical control control module, be used to adjust the stepping ON time as follow-up counting control module.Wherein clk1 links to each other with the I/O mouth of single-chip microcomputer with the updown signal, and updown is the add-subtract control end, and when updown was low level, single-chip microcomputer whenever sent a pulse from clk1, and the value of delivery outlet INIOUT subtracts one; When updown was high level, single-chip microcomputer whenever sent a pulse from clk1, and the value of INIOUT adds one.Adopt single-chip microcomputer to change supersonic motor micro-stepping ON time, thereby can regulate the motor positioning accuracy easily and carry out speed governing through the output valve that changes module.CLK1 can be produced by the PCA module of single-chip microcomputer.
The counting control module
The counting control module is adjusted the micro-stepping ON time according to the output of putting the numerical control control module, and produces dwell time between the fixing step.INIOUT is for putting numerical control control module dateout, and module is radix with INIOUT, adds counting with the clock pulse of presorting frequency module and providing on this basis, and the meter spill-over goes out the back automatic clear.
Compare control module 1
Relatively control module 1 goes out to have the pwm pulse of dwell time between variable micro-stepping ON time and fixing going on foot.Trigger relatively calculating at the clk3 rising edge of a pulse.DATAA is the input data of counter controller module, and built-in pulse upset comparison value countq_temp compares in these data and the Compare module, with the upset of decision output level.CWC is the motor steering control signal, and the CW signal was effective when CWC was high level, and motor just changes, on the contrary counter-rotating.
The rotating interlocking module
This module is used to solve driver D6060 rotating control end and high level occurs simultaneously and cause the indefinite problem of motor steering.
Compare control module 2
Relatively control module 2 goes out the pwm pulse of EDM Generator of Adjustable Duty Ratio, and this pulse is used for the control step motor.Relatively control module 1 is held by Single-chip Controlling with the ON/OFF that compares control module 2, makes two motor time-sharing works.CW/CCW end is used to control spike train that annular pulse generator exports different phase sequences with the control step motor drive direction.Owing to adopted four phase step motor in an embodiment, therefore realized the driving of stepping motor through the integrated driver module of L298H bridge.
The angular displacement sensor interface circuit design
When photoemission cell was relative with photoelectric receiving tube, photoelectric current was converted into voltage and through behind the comparator, is exported the high level arteries and veins by resistance.The parity check module is sent in pulse, and the pulse number that adds up like module is an odd number, then ODD end output one high level pulse.Otherwise if the pulse number of module accumulation is an even number, then the EVEN end is exported a high level pulse.The rising edge of the pulse of ODD port output makes counter 1 module begin counting, makes several device 2 modules stop counting.Initial value when having guaranteed rolling counters forward is zero, through the delayed action of time delay module, and the time that the time that the CLR signal is arrived arrives early than the ON signal that begins counting end.
The rising edge of the pulse of EVEN port output makes counter 2 modules begin counting simultaneously, makes several device 2 modules stop counting.Through the delayed action of time delay module, the CLR signal is arrived prior to beginning counting end ON signal, the initial value when having guaranteed rolling counters forward is zero.
The output signal of counter 1 sum counter 2 is by latches; Latch signal is provided by odd even pulse discrimination module module; The pulse of ODD port output provides latch signal for counter 2 corresponding latchs, and the EVEN port provides latch signal for counter 1 corresponding latch.Accomplish the subtraction that two latchs are exported signal by subtracter, the computing enabling signal is provided by single-chip microcomputer, and the time interval that starts computing, the large interval I was regulated according to the transducer response speed by the monolithic joint by Single-chip Controlling.Also can the pulse signal that ODD end sends directly be sent into monolithic IO interface, after the umber of pulse that single-chip microcomputer is differentiated adjacent time interval representative has been latching to dual latch, send the subtraction enabled instruction.Because this transducer response speed is slower, could respond in the time of waiting infrared receiving tube to go to the infrared transmitting tube relative position, do not respond the situation that counter overflows as yet for avoiding transducer occurring, must give counter with enough capacity.Adopt among the embodiment 25M by the source crystal oscillator as external clock; Adopt 32 digit counters, then the full used time of meter is:
this time interval can guarantee that synchronous machine drives photoelectric receiving tube and accomplishes response.By the peek of FPGA notice single-chip microcomputer, single-chip microcomputer through port line reads in 32 binary result after subtraction is accomplished.Single-chip microcomputer obtains the adjacent pulse difference of blanking time with the CLK pulse period that the subtracter output variable of reading in multiply by counter 1 (counter 2), and calculates angular displacement by formula 1.
Claims (5)
1. combination drive semiclosed loop Precision Position Location System; It is characterized in that: comprise the slide unit base; Adorn linear motion guide on the slide unit base; Adorn slide unit on the linear motion guide, be provided with respectively in the left and right sides of linear motion guide and drive Traveling Ultrasonic Motor and the four phase step motor that slide unit moves on rail plate, supersonic motor is connected with the Angular Displacement Detecting device; Supersonic motor connects with the ball screw that is connected with slide unit through the first flexible sheet shaft coupling, adorns ball nut on the ball screw; Stepping motor is connected with the shaft coupling that relies on bearings through the second flexible sheet shaft coupling, and shaft coupling is connected with ball nut, and ball nut is fixedly connected with nut seat through angular contact bearing, and nut seat is fixedly connected with slide unit.
2. combination drive semiclosed loop Precision Position Location System according to claim 1; It is characterized in that: the supersonic motor and first electric machine support are fastenedly connected by screw; First electric machine support is fixedly connected with the bearing pedestal of screw mandrel spring bearing, and the bearing pedestal of screw mandrel spring bearing is fixedly connected with the slide unit base; Stepping motor is fixedly connected with second electric machine support, and second electric machine support is fixedly connected with slide unit.
3. combination drive semiclosed loop Precision Position Location System according to claim 1 and 2; It is characterized in that: the Angular Displacement Detecting device comprises first rotating disk, second rotating disk; First rotating disk is connected with the supersonic motor output shaft is concentric, and second rotating disk is connected with small synchronous motor is concentric, and second rotating disk rotates with small synchronous motor; The axial line of small synchronous motor and supersonic motor is on same horizontal line; First rotating disk, second rotating disk are concentric form, and infrared transmitting tube is fixedly mounted on first rotating disk, and the projection of infrared transmitting tube infrared beam axis on first rotating disk is through the center of circle of first rotating disk; Infrared receiving tube is fixedly mounted on second rotating disk; The projection of infrared receiving tube axis on second rotating disk is through the center of circle of second rotating disk, and the distance in the infrared receiving tube and the second rotating disk center of circle is greater than the distance in the infrared transmitting tube and the first rotating disk center of circle, and the angle of the axis of infrared transmitting tube and first rotating disk equals the angle of the infrared receiving tube axis and second rotating disk.
4. combination drive semiclosed loop Precision Position Location System according to claim 1 and 2; It is characterized in that: electric machine control system adopts the form of FPGA assistant SCM; PWM ripple through FPGA sends is controlled supersonic motor and stepper motor driver; PWM wave period is by relatively control module control, the PWM duty ratio by control module relatively, count control module and put the numerical control control module and confirm jointly.
5. combination drive semiclosed loop Precision Position Location System according to claim 1 and 2; It is characterized in that: Angular Displacement Detecting device interface circuit adopts the form of FPGA assistant SCM; Is pulse by comparator with the output conversion of signals of infrared receiving tube; Accomplish the differentiation of adjacent output pulse by the parity check module; Accomplished the calculating in the adjacent pulse time interval and latched by counter and latch, accomplished the calculating of difference in the time interval of two adjacent pulses by subtracter, result of calculation is sent single-chip microcomputer to handle and is obtained the angular displacement size.
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| CN2010101133835A CN101820203B (en) | 2010-01-26 | 2010-01-26 | Combined drive semi-closed loop precision positioning system |
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| CN101976933B (en) * | 2010-10-29 | 2012-11-14 | 嘉兴学院 | Electromagnetic ultrasonic compound motor and control method thereof |
| CN103699054B (en) * | 2014-01-03 | 2016-01-20 | 哈尔滨工业大学 | The quick accurately predicting localization method of industry straight-line motion mechanism and positioning system |
| CN106788130A (en) * | 2017-01-10 | 2017-05-31 | 四川埃姆克伺服科技有限公司 | A kind of electric machine control system |
| CN111200349B (en) * | 2020-02-11 | 2021-04-23 | 南通大学 | Combined type motor of high accuracy location |
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| CN1066526A (en) * | 1991-05-06 | 1992-11-25 | 华中理工大学 | Closed loop localizing device |
| CN1359189A (en) * | 2001-12-14 | 2002-07-17 | 清华大学 | Three-dimension self-support swing type high-precision step piezoelectric ultrasonic motor and driving system |
| CN1420616A (en) * | 2002-12-17 | 2003-05-28 | 浙江大学 | Ultrasonic motor precision locating device |
| CN1731081A (en) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
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