CN110133820B - Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope - Google Patents
Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope Download PDFInfo
- Publication number
- CN110133820B CN110133820B CN201910413873.8A CN201910413873A CN110133820B CN 110133820 B CN110133820 B CN 110133820B CN 201910413873 A CN201910413873 A CN 201910413873A CN 110133820 B CN110133820 B CN 110133820B
- Authority
- CN
- China
- Prior art keywords
- output shaft
- compression spring
- mirror
- ball screw
- voice coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
- F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/2084—Perpendicular arrangement of drive motor to screw axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/209—Arrangements for driving the actuator using worm gears
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Astronomy & Astrophysics (AREA)
- Sustainable Development (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Telescopes (AREA)
- Gears, Cams (AREA)
Abstract
The weight of the sub-mirror and mirror chamber assembly of the nanometer precise displacement actuator of the large-scale spliced mirror surface optical telescope acts on the output shaft of the compression spring mechanism; the voice coil motor is coaxially arranged above the compression spring mechanism and the output shaft; a mechanism consisting of a worm gear pair, a ball screw pair and a spline pair is arranged below the compression spring mechanism and is used as a length telescopic device; the compression spring mechanism, the voice coil motor and the length telescopic device are all arranged coaxially with the output shaft. The invention can avoid the problems of high cost caused by swinging of output shafts, more used joints, more levers, complex processing and the like of the similar lever type nanometer level precision displacement actuator.
Description
Technical Field
The invention relates to a nanoscale precise displacement actuator applied in the field of optics, in particular to a nanoscale precise displacement actuator which is required to be used when a sub-mirror is spliced in a large spliced mirror surface optical telescope. The lever type nanometer precise displacement actuator has the outstanding characteristics that the unloading mechanism, the voice coil motor and the output shaft are coaxial, the problems of high cost caused by swinging of the output shaft, more joints, more levers, complex processing and the like of the lever type nanometer precise displacement actuator can be solved, and compared with the lever type nanometer precise displacement actuator, the lever type nanometer precise displacement actuator has the advantages of simpler structure and lower production cost, and can meet the requirement of using the actuator in a large amount for large-caliber spliced mirror optical telescopes.
Background
The nanometer level precise displacement actuator is one of the essential key parts for large spliced mirror astronomical optical telescope. The large-aperture optical telescope is formed by splicing a plurality of sub-mirrors, the position of each sub-mirror needs to be corrected in real time when the telescope is used for observation, the coplanarity and the common-phase splicing of each sub-mirror are realized, the key part of each correcting sub-mirror is a nanoscale precise displacement actuator, and the displacement resolution of the actuator is required to reach several nanometers. The weight of the sub-mirror and the mirror chamber of the large-caliber optical telescope reaches several hundred kilograms, even thousands of kilograms, the object with large weight can control the displacement resolution to reach several nanometers by the traditional mechanical transmission method, so people put forward the unloading type displacement actuator, the problem is solved by two steps, namely the unloading mechanical part and the voice coil motor part for precise adjustment and compensation, firstly, the weight of the sub-mirror acts on a spring to generate displacement-X, the scalefX is compensated to be submillimeter by the mechanical transmission method, and the scalefX is compensated to be nanoscale by starting the voice coil motor because the precision of the scalefX compensated by the traditional mechanical transmission method is not enough. The voice coil motor has the characteristics of sensitive output force and easiness in control, and provides a small force to change the compression state of the compression spring and participate in the rebalancing of the load and the compression spring, and the small force realizes small displacement. The current is supplied to the voice coil motor through the high-resolution current control card, and the precise adjustment control of a plurality of nanometers of the sub-mirror is realized.
The principle diagram of the prior lever-type nanometer-scale precise displacement actuator is shown in fig. 1, four points of a lever mechanism A, B, C, D are in a trapezoid shape, and the telescopic motion of an electric or hydraulic equal-length telescopic device 2 and a voice coil motor 3 can enable a displacement output shaft 1 to move up and down through a compression spring 4. The scheme is characterized in that output force can be amplified through a lever, displacement resolution can be subdivided according to a lever ratio, gaps of lever joints can be amplified, all 22 joints in the scheme are provided with flexible pivots to eliminate joint backlash, the unit price of the flexible pivots is higher, the processing cost of a plurality of rod pieces is low, the manufacturing cost of the whole scheme is higher naturally, and in addition, the output shaft of the scheme can slightly swing left and right along with lifting.
In order to solve the defects of the existing lever type nanometer-scale precise displacement actuator, the invention provides a length telescopic device which is made of a mechanism consisting of a worm gear pair, a ball screw pair and a spline pair; and the compression spring mechanism, the voice coil motor and the length telescopic device are coaxially arranged with the output shaft. The novel scheme has no lever and joints with complex shapes, no deflection when the output shaft goes up and down, more conventional overall mechanical structure, lower production and manufacturing cost and easy implementation of batch production.
Disclosure of Invention
The invention aims to provide a nanoscale precise displacement actuator of a large spliced mirror optical telescope. The invention has no lever and joint, saves the purchase cost of the flexible pivot and the milling processing cost of the lever piece with a complex shape; and the output shaft does not have deflection when lifting, the overall mechanical structure is more conventional, the production is easy, and the requirements of using a large amount of nanoscale precise displacement actuators in large-scale spliced mirror optical telescopes can be met.
The technical scheme for completing the invention task is as follows: a nanometer precision displacement actuator of a large-scale spliced mirror surface optical telescope is provided, an output shaft of the actuator is connected with a sub-mirror and a mirror chamber assembly, and the weight of the sub-mirror and the mirror chamber assembly acts on the output shaft of a compression spring mechanism; the voice coil motor is coaxially arranged above the compression spring mechanism and the output shaft; a mechanism consisting of a worm gear pair, a ball screw pair and a spline pair is arranged below the compression spring mechanism and is used as a length telescopic device; the compression spring mechanism, the voice coil motor and the length telescopic device are all arranged coaxially with the output shaft.
The working principle of the invention is as follows: the coil connecting hoop is firstly connected with a coil of the voice coil motor and then tightly embraces the output shaft; the mechanical transmission mode formed by the worm gear pair, the ball screw pair and the spline pair is used for pushing the positions of the compensation mirror surfaces of the compression spring mechanism, the voice coil motor, the sub-mirror, the mirror chamber assembly and the like to a submillimeter level, and then the voice coil motor is started to compensate the positions of the mirror surfaces to a nanometer level.
The compression spring mechanism is composed of: the upper compression springs 13A and 13B are positioned at the upper side and the lower side of the piston ring part at the lower end of the output shaft, and then are pre-pressed in the outer cylinder by the upper end cover of the outer cylinder, and the inner side of the lower end of the spring outer cylinder is provided with an inner boss for bearing the compression spring 13B, so that the spring outer cylinder, the compression springs 13A and 13B, the output shaft, the guide piston ring, the rotation stopping block, the rolling bearing and the upper end cover of the outer cylinder are independently assembled into a compression spring mechanism component.
The length telescopic device comprises the following components: the worm is driven by a motor to rotate, the worm drives a worm wheel to rotate, the worm wheel is fixed on a rotating nut of a ball screw pair, the upper end and the lower end of the rotating nut are supported by bearings, a group of radial thrust bearings which are back-to-back are installed at the lower end, one side of an outer ring of the bearing is positioned at a shaft shoulder of a worm wheel and worm box body, the other side of the outer ring of the bearing is positioned and fixed by an outer ring gland nut, one side of an inner ring of the bearing abuts against the shaft shoulder of the rotating nut, an inner ring gland nut is screwed on an external thread at the tail part of the rotating nut and abuts against an inner ring of the bearing, the clearance of rolling bodies of the two bearings is eliminated by adjusting the screwing degree of the inner ring gland nut, the rotating nut is clamped between the two inner rings of the two bearings, the axial backlash of the rotating nut is eliminated, a radial ball bearing is, the outer ring of the worm gear box body is not axially limited and fixed, and the bottom end sealing cover is arranged on the outer side of the lower end of the worm gear box body.
The worm drives the worm wheel to rotate, the worm wheel is fixed on a rotating nut of the ball screw pair, the ball screw can only move up and down due to the axial fixation of the rotating nut, the upper end of the ball screw is coaxially connected with the spline shaft into a whole, the spline shaft is connected with the worm wheel and worm box body, the ball screw is limited to rotate and can only vertically move up and down, a square shaft at the top end of the spline shaft is connected with a square hole of the lifting output cylinder, the lifting output cylinder is also limited to rotate and can only vertically move up and down along with the ball screw, and the lifting output cylinder is connected with the outer.
The position and structure of the voice coil motor are as follows: the magnetic steel connecting plate is firstly connected with the magnetic steel of the voice coil motor and then connected with the upper end cover of the outer barrel, and the coil connecting hoop is firstly connected with the coil of the voice coil motor and then tightly embraces the output shaft.
In other words, the present invention provides a novel coaxial nanoscale precision displacement actuator. The motor rotates to drive the worm to rotate, the worm drives the worm wheel to rotate, the worm wheel and the rotating nut of the ball screw are in the same body, two ends of the rotating nut of the ball screw are supported by bearings, and one end of the rotating nut of the ball screw is provided with a group of back-to-back centripetal thrust bearings, so that the rotating nut of the ball screw is clamped between the inner rings of the two bearings to be axially positioned; the other end of the ball screw rotating nut is provided with a radial ball bearing for centering support, and the two sides of the inner ring and the outer ring are not fixed at the same time. The upper end of the ball screw is coaxially connected with the spline shaft into a whole, the spline shaft and the spline shaft form a spline pair, the spline shaft is fixed with the worm gear box, and the spline shaft is connected with the square hole of the lifting output cylinder through the square shaft at the upper end of the spline shaft. The spring outer cylinder is connected with the lifting output cylinder, the two compression springs are positioned on two sides of the piston ring part of the output shaft and are pre-pressed in the spring outer cylinder by the upper end cover of the outer cylinder, the output shaft can move up and down under the guidance of the rolling bearing, the guide piston ring and the rotation stopping block, the rotation stopping block is fixed with a grating ruler, and the opposite side of the grating ruler is provided with a reading head. The magnetic steel connecting plate is firstly connected with the magnetic steel of the voice coil motor and then connected with the upper end cover of the outer barrel, and the coil connecting hoop is firstly connected with the coil of the voice coil motor and then tightly embraces the output shaft. The upper end of the output shaft is connected with the sub-mirror and the mirror chamber assembly in a certain mode, and the weight of the sub-mirror and the mirror chamber assembly acts on the compression spring.
The working principle of the nanometer-scale precise displacement actuator is that firstly, the requirement of adjusting the mirror surface of the telescope sub-mirror to the mirror surface reference position is described, and assuming the weight Mg of the sub-mirror and the mirror chamber assembly, when the height angle of the telescope changes, the force F = Mg × Sin α acted on the output shaft by the sub-mirror and the mirror chamber assembly, as shown in FIG. 2, causes the compression amount of the spring to change, namely the mirror surface deviates from the mirror surface reference position, and the precise displacement actuator is installed to correct the displacement amount so as to enable the mirror surface to return to the mirror surface reference position. When the stress of the output shaft F = Mg, the lower compression spring is compressed, the mirror surface deviates from the mirror surface reference position and moves downwards to an X, the mirror surface of the secondary mirror is restored to the mirror surface reference position at this time, the motor drives the worm to rotate, the ball screw moves upwards and drives the lifting output barrel, the spring outer barrel, the voice coil motor, the output shaft, the secondary mirror, the mirror chamber assembly and the like to integrally move upwards by an amount X to a submillimeter-level precision, and the voice coil motor is started to compensate the Δ X to a nanometer level due to the fact that the precision of the traditional mechanical transmission mode for compensating the Δ X is not high enough; when the stress F of the output shaft tends to 0, namely the height angle of the telescope is reduced, the compression amount of the lower compression spring is reduced, the mirror surface can run upwards by X, in order to keep the mirror surface of the sub-mirror at the mirror surface reference position, the ball screw system moves downwards to drive the lifting output cylinder, the spring outer cylinder, the voice coil motor, the output shaft, the sub-mirror, the mirror chamber assembly and the like to integrally move downwards, the Δ X is up to the submillimeter-scale precision, and the voice coil motor is started again to compensate the Δ X to the nanometer scale. The adjustment of most load and displacement is carried by the traditional mechanical transmission mechanism and a compression spring, and the balance and the generation of a small part of weight and displacement are realized by a voice coil motor, so that the aim of accurately controlling the mirror surface of the sub-mirror at the mirror surface reference position is fulfilled.
In other words, the nanoscale precise displacement actuator comprises a worm gear pair, a ball screw pair, a spline pair, a compression spring mechanism, a voice coil motor, a grating ruler reading head system and the like, and comprises a worm gear box body, a lifting output cylinder, a sliding bearing, a bottom end sealing cover, an outer ring gland nut, an inner ring gland nut, a radial thrust bearing, a radial ball bearing, a spring outer cylinder, a rolling bearing, an output shaft, a guide piston ring, a rotation stopping block and the like. The worm-gear pair and the ball screw pair form a power transmission and speed reduction part; the spline pair, the sliding bearing, the lifting output cylinder and the like form an axial sliding guide displacement output part; the compression spring mechanism comprises a bearing mechanism of gravity load, wherein the bearing mechanism comprises a spring outer cylinder, an output shaft, a compression spring, a rolling bearing, a guide piston ring, a rotation stopping block, an upper end cover of the outer cylinder and the like, and the compression spring mechanism is coaxial with the lifting output cylinder; an inner boss for bearing a compression spring is arranged on the inner side of the lower end of the spring outer cylinder, so that the spring outer cylinder, the compression spring, the output shaft, the guide piston ring, the anti-rotation block, the rolling bearing and an upper end cover of the outer cylinder can be conveniently and independently assembled into a compression spring mechanism part, and the assembly and the maintenance are convenient; the piston ring part at the lower end of the output shaft is provided with a guide piston ring and can fix a rotation stopping block, the side wall of the spring outer cylinder is provided with an axial guide groove, and the rolling bearing, the guide piston, the rotation stopping block and the guide groove on the side wall of the spring outer cylinder form the up-and-down movement guide of the output shaft; the voice coil motor and the output shaft are coaxially arranged; the worm and the ball screw rotating nut are supported in the worm gear box body through a radial thrust bearing and a radial ball bearing; the upper end of the ball screw is coaxially connected with the spline shaft into a whole; the spline shaft and the spline barrel form a spline pair; the spline shaft is connected with the square hole of the lifting output cylinder through the square shaft at the upper end of the spline shaft.
As another alternative of the present invention, the voice coil motor and the output shaft may be mounted non-coaxially, and the output force of the voice coil motor is coupled to the output shaft through a connection plate.
The invention has the beneficial effects that: the nanoscale precise displacement actuator is characterized in that a power transmission, speed reduction and lifting guide mechanism (namely a length telescopic device) consisting of a worm gear and worm gear pair, a ball screw pair and a spline pair is coaxially arranged with a compression spring mechanism, the compression spring mechanism is coaxially arranged with an output shaft, and a voice coil motor is coaxially arranged with the output shaft.
Drawings
FIG. 1 is a simplified structural schematic diagram of a prior art lever-type nanoscale precision displacement actuator;
FIG. 2 is a schematic diagram showing the force relationship between the sub-mirror and the output shaft of the actuator when the height angle of the telescope changes;
FIG. 3 is a schematic structural view of a nanoscale fine displacement actuator of the present invention.
Detailed Description
The following further description is made in conjunction with the accompanying drawings and examples:
example 1, referring to fig. 3, in a precision displacement actuator, a motor drives a worm 24 to rotate, the worm drives a worm wheel 25 to rotate, the worm wheel is fixed on a rotary nut 23 of a ball screw pair, the upper end and the lower end of the rotary nut 23 are supported by bearings, a group of back-to-back radial thrust bearings 16 are installed at the lower end, one side of an outer ring of the bearing is positioned and fixed on a shaft shoulder of a worm gear box 17, the other side of the outer ring of the bearing is positioned and fixed by an outer ring gland nut 18, one side of an inner ring of the bearing abuts against the shaft shoulder of the rotary nut 23, an inner ring gland nut 19 is screwed on an external thread at the tail part of the rotary nut 23 and abuts against the inner ring of the bearing, by adjusting the screwing degree of the inner ring gland nut 19, the play of rolling bodies of the two bearings is eliminated, the rotary nut 23 is clamped between, the lower side of the inner ring of the radial ball bearing 15 is abutted against the shaft shoulder of the rotating nut 23 for centering support, the upper side of the inner ring is positioned by a shaft retainer ring 36, the outer ring of the inner ring is not axially limited and fixed, and the outer side of the lower end of the worm gear box body 17 is provided with a bottom end sealing cover 20.
The worm 24 drives the worm wheel 25 to rotate, the worm wheel is fixed on a rotating nut 23 of the ball screw pair, because the rotating nut 23 is axially fixed, the ball screw 22 can only move up and down, the upper end of the ball screw is coaxially connected with a spline shaft 27 into a whole, a spline cylinder 26 is connected with a worm wheel and worm box body 17, the ball screw is limited to rotate and can only move up and down vertically, a square shaft at the top end of the spline shaft 27 is connected with a square hole of a lifting output cylinder 28, the lifting output cylinder 28 is also limited to rotate and can only move up and down vertically along with the ball screw 22, the lifting output cylinder 28 is connected with an outer spring cylinder 12, upper compression springs 13A and lower compression springs 13B are positioned at the upper side and the lower side of a piston ring part at the lower end of an output shaft 5 and are pre-pressed in the outer cylinder by an upper end cover 11 of the outer cylinder, an inner, 13B, the output shaft 5, the guide piston ring 29, the rotation stopping block 32, the rolling bearing 10 and the outer cylinder upper end cover 11 are independently assembled into a compression spring mechanism part, so that the integral assembly and maintenance are facilitated; the piston ring part at the lower end of the output shaft 5 is provided with a guide piston ring 29 and can fix a rotation stopping block 32, the side wall of the spring outer cylinder 12 is provided with an axial guide groove, and the rolling bearing 10, the guide piston ring 29, the rotation stopping block 32 and the guide groove on the side wall of the spring outer cylinder 12 form the up-and-down movement guide of the output shaft 5. A grating ruler 31 is fixed on the rotation stopping block 32, and a reading head 30 is arranged on the opposite side of the grating ruler. The magnetic steel connecting plate 9 is firstly connected with the magnetic steel 8 of the voice coil motor and then connected with the upper end cover 11 of the outer barrel, and the coil connecting hoop 6 is firstly connected with the coil 7 of the voice coil motor and then tightly clasps the output shaft 5. The output shaft is connected with a sub-mirror and mirror chamber assembly 33 in a certain mode, the weight of the sub-mirror and mirror chamber assembly 33 acts on compression springs 13A and 13B through an output shaft 5, the position of a mirror surface 34 of the sub-mirror changes along with the change of the weight, a mechanical transmission mode formed by a worm gear pair, a ball screw pair and a spline pair is used for pushing mechanisms such as a spring outer cylinder, the output shaft, the sub-mirror and the mirror chamber assembly to generate displacement, the position of the mirror surface 34 of the sub-mirror is compensated to be in a submillimeter level, and then a voice coil motor is started to compensate the position of the mirror surface 34 of the sub-mirror to be in. The deviation value between the mirror surface of the sub-mirror and the mirror surface reference position 35 is fed back by an external detection device and is provided for control, and the actual compensation quantity of the voice coil motor is fed back by the grating system and is controlled.
Claims (4)
1. A nanometer precision displacement actuator of a large-scale spliced mirror surface optical telescope is provided, an output shaft of the actuator is connected with a sub-mirror and a mirror chamber assembly, and the weight of the sub-mirror and the mirror chamber assembly acts on the output shaft of a compression spring mechanism; the voice coil motor is coaxially arranged above the compression spring mechanism and the output shaft; a mechanism consisting of a worm gear pair, a ball screw pair and a spline pair is arranged below the compression spring mechanism and is used as a length telescopic device; the compression spring mechanism, the voice coil motor and the length telescopic device are all arranged coaxially with the output shaft;
the compression spring mechanism is composed of: the upper compression spring and the lower compression spring (13A, 13B) are positioned at the upper side and the lower side of the piston ring part at the lower end of the output shaft and then are pre-pressed in the outer cylinder by the upper end cover of the outer cylinder, and the inner side of the lower end of the spring outer cylinder is provided with an inner boss for bearing the compression spring (13B), so that the spring outer cylinder, the compression springs (13A, 13B), the output shaft, the guide piston ring, the rotation stopping block, the rolling bearing and the upper end cover of the outer cylinder are independently assembled into a compression spring;
the length telescopic device comprises the following components: the worm is driven by a motor to rotate, the worm drives a worm wheel to rotate, the worm wheel is fixed on a rotary nut of a ball screw pair, the upper end and the lower end of the rotary nut are supported by bearings, a group of back-to-back radial thrust bearings are mounted at the lower end of the rotary nut, a radial ball bearing is mounted at the upper end of the rotary nut, and a bottom end sealing cover is mounted on the outer side of the lower end of a worm wheel and; the worm drives the worm wheel to rotate, the worm wheel is fixed on a rotating nut of the ball screw pair, the rotating nut is axially fixed, the ball screw can only move up and down, the upper end of the ball screw is coaxially integrated with the spline shaft, the spline shaft is connected with the worm wheel and worm box body, the ball screw is limited to rotate and can only vertically move up and down, a square shaft at the top end of the spline shaft is connected with a square hole of the lifting output cylinder, the lifting output cylinder is also limited to rotate and can only vertically move up and down along with the ball screw, and the lifting output cylinder is connected with the outer spring cylinder;
the position and structure of the voice coil motor are as follows: the magnetic steel connecting plate is firstly connected with the magnetic steel of the voice coil motor and then connected with the upper end cover of the outer barrel, and the coil connecting hoop is firstly connected with the coil of the voice coil motor and then tightly embraces the output shaft.
2. The nanoscale precise displacement actuator for large-scale mirror-surface optical telescope according to claim 1, wherein the piston ring at the lower end of the output shaft is provided with a guide piston ring and can fix the stop block, the side wall of the spring outer cylinder is provided with an axial guide groove, and the rolling bearing, the guide piston ring, the stop block and the guide groove on the side wall of the spring outer cylinder form the up-and-down movement guide of the output shaft.
3. The nanoscale precise displacement actuator of a large-scale spliced mirror optical telescope according to claim 1 or 2, wherein the stop-rotation block is fixed with a grating ruler, and the opposite side of the grating ruler is provided with a reading head; the magnetic steel connecting plate is firstly connected with the magnetic steel of the voice coil motor and then connected with the upper end cover of the outer barrel, and the coil connecting hoop is firstly connected with the coil of the voice coil motor and then tightly embraces the output shaft.
4. A nanometer precision displacement actuator of a large-scale spliced mirror surface optical telescope is provided, an output shaft of the actuator is connected with a sub-mirror and a mirror chamber assembly, and the weight of the sub-mirror and the mirror chamber assembly acts on the output shaft of a compression spring mechanism; the voice coil motor is coaxially arranged above the compression spring mechanism and the output shaft; a mechanism consisting of a worm gear pair, a ball screw pair and a spline pair is arranged below the compression spring mechanism and is used as a length telescopic device; the voice coil motor and the output shaft are arranged in a non-coaxial way, and the output force of the voice coil motor is connected to the output shaft in a connecting plate mode;
the compression spring mechanism is composed of: the upper compression spring and the lower compression spring (13A, 13B) are positioned at the upper side and the lower side of the piston ring part at the lower end of the output shaft and then are pre-pressed in the outer cylinder by the upper end cover of the outer cylinder, and the inner side of the lower end of the spring outer cylinder is provided with an inner boss for bearing the compression spring (13B), so that the spring outer cylinder, the compression springs (13A, 13B), the output shaft, the guide piston ring, the rotation stopping block, the rolling bearing and the upper end cover of the outer cylinder are independently assembled into a compression spring;
the length telescopic device comprises the following components: the worm is driven by a motor to rotate, the worm drives a worm wheel to rotate, the worm wheel is fixed on a rotary nut of a ball screw pair, the upper end and the lower end of the rotary nut are supported by bearings, a group of back-to-back radial thrust bearings are mounted at the lower end of the rotary nut, a radial ball bearing is mounted at the upper end of the rotary nut, and a bottom end sealing cover is mounted on the outer side of the lower end of a worm wheel and; the worm drives the worm wheel to rotate, the worm wheel is fixed on a rotating nut of the ball screw pair, the rotating nut is axially fixed, the ball screw can only move up and down, the upper end of the ball screw is coaxially integrated with the spline shaft, the spline shaft is connected with the worm wheel and worm box body, the ball screw is limited to rotate and can only vertically move up and down, a square shaft at the top end of the spline shaft is connected with a square hole of the lifting output cylinder, the lifting output cylinder is also limited to rotate and can only vertically move up and down along with the ball screw, and the lifting output cylinder is connected with the outer spring cylinder;
the position and structure of the voice coil motor are as follows: the magnetic steel connecting plate is firstly connected with the magnetic steel of the voice coil motor and then connected with the upper end cover of the outer barrel, and the coil connecting hoop is firstly connected with the coil of the voice coil motor and then tightly embraces the output shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910413873.8A CN110133820B (en) | 2019-05-17 | 2019-05-17 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910413873.8A CN110133820B (en) | 2019-05-17 | 2019-05-17 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110133820A CN110133820A (en) | 2019-08-16 |
| CN110133820B true CN110133820B (en) | 2021-03-05 |
Family
ID=67575083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910413873.8A Active CN110133820B (en) | 2019-05-17 | 2019-05-17 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110133820B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4189455A1 (en) * | 2020-07-27 | 2023-06-07 | Ohb Digital Connect Gmbh | Electro-mechanical linear drive unit for precise positioning e.g. of a large reflector used in radio astronomy or of a communication antenna |
| CN113050250B (en) * | 2021-03-22 | 2023-03-17 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision micro-displacement actuator utilizing threaded parallel structure |
| CN113687489A (en) * | 2021-09-16 | 2021-11-23 | 中国科学院国家天文台南京天文光学技术研究所 | Flexible displacement actuator for large optical infrared telescope splicing mirror surface |
| CN116509625B (en) * | 2023-06-06 | 2023-11-07 | 广东麦特维逊医学研究发展有限公司 | Displacement actuating device and working method thereof |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1026509C2 (en) * | 2004-06-28 | 2005-12-30 | Janssen Prec Engineering B V | A long-stroke actuator with a high bearing capacity and nanometer resolution which can also be used as a vibration isolator. |
| CN1306247C (en) * | 2005-08-26 | 2007-03-21 | 哈尔滨工业大学 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
| CN201827317U (en) * | 2010-03-09 | 2011-05-11 | 中国科学院国家天文台南京天文光学技术研究所 | Deadlock prevention device for spacing of screw rod pair |
| CN103576283B (en) * | 2013-12-04 | 2016-01-20 | 中国工程物理研究院总体工程研究所 | Based on the quick reflex mirror system of sinking support |
| US9787157B2 (en) * | 2014-07-29 | 2017-10-10 | Hamilton Sundstrand Corporation | Actuator device and method of converting rotational input to axial output with rotary flexure mechanism |
| CN104483743B (en) * | 2015-01-05 | 2016-10-05 | 哈尔滨工业大学 | A kind of direct-drive type precision micro-displacement actuator for polar region environment |
| CN104808309B (en) * | 2015-04-15 | 2017-10-20 | 中国科学院国家天文台南京天文光学技术研究所 | The electromechanical magneto force actuator actively supported for astronomical telescope minute surface |
| CN105375674B (en) * | 2015-11-10 | 2018-03-13 | 中国科学院长春光学精密机械与物理研究所 | Motor-direct-drive type precise displacement actuator |
| CN206115005U (en) * | 2016-09-21 | 2017-04-19 | 南京航空航天大学 | Large -scale astronomical telescope panel actuator |
| CN107104544B (en) * | 2017-07-05 | 2019-07-26 | 北京航空航天大学 | A kind of integrated electromechanical servo acting device of high power to weight ratio |
-
2019
- 2019-05-17 CN CN201910413873.8A patent/CN110133820B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN110133820A (en) | 2019-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110133820B (en) | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope | |
| CN107132635B (en) | High-precision reflecting mirror switching device | |
| CN104656224B (en) | It is applied to the high accuracy focus adjusting mechanism of space optical remote sensor | |
| CN106886227A (en) | A kind of six degree of freedom high accuracy adjustment alignment system based on 6RRRPRR | |
| CN107065113A (en) | High-precision six-freedom degree optical module pose adjusting apparatus | |
| CN102519355B (en) | One-dimensional micro-translation mechanism | |
| CN108169872B (en) | High-precision and high-stability reflector adjusting device based on flexible hinge | |
| CN108073015B (en) | High-precision linear focusing mechanism for space camera | |
| CN102168748B (en) | Backlash-free worm and gear revolving speed reducing mechanism | |
| CN105929516A (en) | Macro-micro combined driving array raster splicing adjusting device | |
| CN102436055A (en) | High-precision light focusing mechanism applied to space optical remote sensor | |
| CN115194737B (en) | Differential six-degree-of-freedom parallel micro-motion platform | |
| CN106949346A (en) | A kind of leveling support leg based on planetary roller screw | |
| CN104483743A (en) | Direct drive type precise micro displacement actuator for polar environment | |
| CN113687489A (en) | Flexible displacement actuator for large optical infrared telescope splicing mirror surface | |
| CN104440836A (en) | Space two-degree-of-freedom adjustment method and device based on dense ball annular bearing and double-axis combined driving | |
| US20230061197A1 (en) | Actuators for converting rotational input to axial output | |
| CN113050250A (en) | High-precision micro-displacement actuator utilizing threaded parallel structure | |
| CN112799208A (en) | High-precision micro-displacement actuator for adjusting mirror surface position of astronomical telescope | |
| US10634870B2 (en) | Actuator devices for converting rotational input to linear output | |
| CN107630998B (en) | Variable-pitch elastic polished rod transmission device | |
| CN102158007B (en) | Electromechanical driver | |
| CN212276072U (en) | High-precision one-dimensional focusing mechanism of space remote sensing camera | |
| CN115877544B (en) | Fine adjustment driving mechanism, linear driving device and driving method of spliced main mirror | |
| US12007679B1 (en) | Macro-to-micro two-stage camera lens focusing device based on direct-drive air floatation platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |