CN104483743A - Direct drive type precise micro displacement actuator for polar environment - Google Patents
Direct drive type precise micro displacement actuator for polar environment Download PDFInfo
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- CN104483743A CN104483743A CN201510003074.5A CN201510003074A CN104483743A CN 104483743 A CN104483743 A CN 104483743A CN 201510003074 A CN201510003074 A CN 201510003074A CN 104483743 A CN104483743 A CN 104483743A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
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Abstract
The invention provides a direct drive type precise micro displacement actuator for a polar environment, and relates to the precise micro displacement actuator. The precise micro displacement actuator aims to solve the problem that no supporting and adjusting mechanism exists for a large spliced mirror surface telescope panel under the polar low-temperature environment. The precise micro displacement actuator comprises a movement supporting mechanism, a drive mechanism and an anti-backlash screw transmission mechanism. The movement supporting mechanism comprises a flexible shaft, an end cover, a shell and a bottom cover. The shell is open at the two ends, and the end cover and the bottom cover are arranged at the two ends of the shell in a covering mode. The drive mechanism comprises an elastic coupling, a motor connection plate and a stepping motor. The anti-backlash screw transmission mechanism comprises a guidance key, a drive rod, a transmission nut, a spring sleeve, a screw rod, pretightening springs, an anti-backlash nut and anti-rotation bolts. The direct drive type precise micro displacement actuator is used for multi-point supporting and adjusting a sub mirror panel of a spliced mirror surface astronomical telescope.
Description
Technical field
The present invention relates to a kind of precision micro-displacement actuator, be specifically related to a kind of direct-drive type precision micro-displacement actuator for arctic regions split minute surface astronomical telescope, this mechanical micro-displacement actuator works in groups, be mainly used in the sub-mirror board of multi-point support and adjustment split minute surface astronomical telescope, belong to segmented mirror active optics technical field.Meanwhile, also can be applicable to the occasions such as the precision micro-displacement mechanism under cryogenic conditions.
Background technology
Along with astronomical development, astronomer needs more bigbore astronomical telescope detecting dark matter, dark energy even extraterrestrial life etc.But there is many bottlenecks in the bigbore evolution of increasing in the astronomical telescope of single minute surface, be therefore born active optics technology, and segmented mirror active optics technology, as the branch of in active optics technology, can address this problem effectively.Segmented mirror active optics technology can correct the mirror shape error that telescope primary mirror produces in manufacture, installation, gravity field, temperature field, numerous sub-mirror board is made to piece together the primary mirror with certain surface figure accuracy, need in this process to carry out Precision measurement to the main mirror face of astronomical telescope, then accurate pose adjustment is carried out to the sub-mirror board of primary mirror, mechanical micro-displacement actuator is support and the governor motion of sub-mirror board, can carry out the pose adjustment of multiple degree of freedom by counter plate, it plays accuracy compensation effect in segmented mirror active optics technology.
Astronomical telescope is in operational process, the effects such as primary mirror can be subject to gravity field, wind carries, temperature loading, the surface figure accuracy of primary mirror is affected, for making primary mirror have certain surface figure accuracy all the time in operational process, mechanical micro-displacement actuator must have the features such as grade stroke, micro/nano level high resolving power, heavy load ability, high rigidity, high repetitive positioning accuracy, high stability.
At present, mechanical micro-displacement actuator many employings precision stepper motor, piezoelectric ceramic actuator, supersonic motor, magnetic telescopic driver etc. of domestic and international research are as driving element, often there is the problems such as output displacement is non-linear, sluggish, load capacity is little in piezoelectric ceramics, supersonic motor and magnetostriction materials, its application is restricted.And stepper motor economy is commonly used, there is no cumulative errors, and A wide selection of colours and designs, technology maturation, adopts electric micro-stepping control can export less step angle, coordinates accurate mechanical drive can stablize, export minimum displacement linearly.
Meanwhile, along with the mankind are to the exploration in the South Pole, high altitude localities, Antarctica is proved to be astronomical sight place best on the earth, has numerous advantage in astronomical sight: can carry out long Continuous Observation; Moisture content is low, and air is very thin; Low light scattering and atmospheric transmittance high; Very cold drying; Low infrared background; Atmospheric scinillation is low; Wide dizzy angle such as grade and coherence time long.These all advantages make the South Pole become the most attracting optical/infrared uranology observation place on the earth.Countries in the world proposed the telescope plan of multiple South Pole in succession in recent years.Consider arctic regions bad environments, the lowest temperature can reach subzero 80 degree to 90 degree, and can avenge with high wind, and this makes the design for the mechanical micro-displacement actuator of arctic regions split minute surface astronomical telescope be different from mechanical micro-displacement actuator in other environment.Consider that polar region environment temperature is low, mechanical micro-displacement actuator will have compact conformation, and volume is little, and profile is comparatively regular, effectively can avoid accumulated snow, low temperature resistant, has certain sealing, the features such as anti-wind and snow erosion; Consider the shortcomings such as arctic regions transport difficulty is large, expense is high, it is light that actuator also will have quality, is convenient to the feature of transporting; Actuator also must have driving effectively simultaneously, and output accuracy advantages of higher, does not exist the shortcomings such as low speed jerking motion, sluggishness, backlash.
Along with going deep into gradually of South Pole uranology research, the whole world will at arctic regions construction more bigbore segmented mirror active optics telescope.When the time comes, due to increasing of sub-minute surface plate number, the demand of low temperature mechanical micro-displacement actuator will sharply increase.At present, domestic also not relevant commercially produced product, thus China is needed to accelerate the development of low temperature mechanical micro-displacement actuator, grasp its independent intellectual property right as early as possible, improve the large-scale segmented mirror active optics telescope manufacturing capacity of self, take the good opportunity in the telescopical tide of the construction large-scale segmented mirror in arctic regions, and then promote the astronomical development in the South Pole.
Summary of the invention
The present invention is not applicable at present the large-scale support of segmented mirror telescope panel under polar low-temperature environment and the problem of governor motion for solving, and then provides a kind of direct-drive type precision micro-displacement actuator for polar region environment.
The present invention is the technical scheme taked that solves the problem: a kind of direct-drive type precision micro-displacement actuator for polar region environment comprises movement support device, driving mechanism and the gap screw-drive mechanism that disappears;
Movement support device comprises flexible shaft, end cap, housing and bottom, and housing is the housing of open at both ends, and end cap and bottom mount cover the two ends at housing respectively;
Driving mechanism comprises spring coupling, connecting plate for electric motor and stepper motor, and connecting plate for electric motor is arranged in housing, and stepper motor is arranged on connecting plate for electric motor, and the output shaft of stepper motor is horizontally disposed, and the output shaft of stepper motor is provided with spring coupling;
The gap that disappears screw-drive mechanism comprises feather key, driving stem, transmission nut, spring spool, screw rod, preloading spring, the gap that disappears nut and anti-turn screw, driving stem is through end cap and the two clearance fit, and feather key to be arranged on driving stem and to coordinate with the keyway on end cap, and one end of driving stem is connected with flexible shaft, and the other end of driving stem is connected with transmission nut, and screw rod is connected with spring coupling, transmission nut is primarily of all-in-one-piece driving flange processed and drive socket composition, the gap that disappears nut primarily of all-in-one-piece processed disappear gap flange and disappear gap sleeve composition, the threaded hole matched with screw flight is processed with in drive socket, the threaded hole matched with screw flight is processed with in the gap that disappears sleeve, drive socket and disappear gap sleeve just to layout, transmission nut and the gap nut that disappears are screwed on screw rod respectively, preloading spring is compressed in driving flange and disappears between gap flange, spring spool is set on preloading spring, spring spool is connected with transmission nut, anti-turn screw is through the counterbore that the gap flange that disappears is processed and be fixed on spring spool.
The invention has the beneficial effects as follows:
1, the present invention adopts and to disappear gap screw-drive mechanism, have compact conformation, output displacement control accuracy high, without backhaul gap, cut off self-lock, advantage that stability is strong, the high precision position and posture that can realize the sub-mirror board of large-scale segmented mirror telescope adjusts.
2, the pretightning force that preloading spring of the present invention provides effectively can eliminate the drive gap of worm drive, improve the output accuracy of the gap screw-drive mechanism that disappears, coordinate the high pulling torque stepper motor of electric micro-stepping control, its unidirectional output displacement precision is less than 1 micron, namely can ensure that the straight-line displacement being better than 1 micron of stepping accuracy exports, its load force is greater than 70N simultaneously, and stroke is greater than ± 1.5mm, meets segmented mirror face shape and reaches optical imagery requirement.
3, flexible operation of the present invention, be convenient to manufacture, simultaneously its volume is little, lightweight, is convenient to the installation under the specific condition of polar region and long-distance transport.
4, the actuator airtight cavity of end cap of the present invention, housing and bottom composition is cylindric, effectively can prevent accumulated snow, internal mechanical driving parts is avoided to suffer the erosion of arctic regions high wind snow, make actuator can realize very high kinematic accuracy and system stability under the rugged surroundings of polar region, use under being particularly useful for polar region particular surroundings.
5, movement support device of the present invention is convenient to be connected with sub-mirror board, realizes large-scale segmented mirror to look in the distance the adjustment of mirror mirror board attitude by the gap screw-drive mechanism that disappears.
6, the present invention adopts low temperature extreme boundary lubrication grease lubrication, can ensure that actuator abrasively runs polar region extremely frigid zones is stable, low.
Accompanying drawing explanation
Fig. 1 is main TV structure schematic diagram of the present invention, and Fig. 2 is the cut-open view of spatial structure of the present invention, and Fig. 3 is the gap screw-drive mechanism schematic diagram that disappears of the present invention.
Embodiment
Embodiment one: composition graphs 1, Fig. 2 and Fig. 3 illustrate, a kind of direct-drive type precision micro-displacement actuator for polar region environment of present embodiment comprises movement support device, driving mechanism and the gap screw-drive mechanism that disappears;
Movement support device comprises flexible shaft 1, end cap 10, housing 18 and bottom 19, and housing 18 is the housing of open at both ends, and end cap 10 and bottom 19 mount cover at the two ends of housing 18 respectively;
Driving mechanism comprises spring coupling 17, connecting plate for electric motor 8 and stepper motor 9, connecting plate for electric motor 8 is arranged in housing 18, stepper motor 9 is arranged on connecting plate for electric motor 8, and the output shaft of stepper motor 9 is horizontally disposed, the output shaft of stepper motor 9 is provided with spring coupling 17;
The gap that disappears screw-drive mechanism comprises feather key 2, driving stem 3, transmission nut 4, spring spool 5, screw rod 11, preloading spring 12, the gap that disappears nut 13 and anti-turn screw 14; Driving stem 3 passes end cap 10 and the two clearance fit, feather key 2 to be arranged on driving stem 3 and to coordinate with the keyway on end cap 10, one end of driving stem 3 is connected with flexible shaft 1, and the other end of driving stem 3 is connected with transmission nut 4, and screw rod 11 is connected with spring coupling 17;
Transmission nut 4 forms primarily of all-in-one-piece driving flange 4-1 processed and drive socket 4-2, the gap that disappears nut 13 forms primarily of the all-in-one-piece processed gap flange 13-1 and the gap sleeve 13-2 that disappears that disappears, the threaded hole matched with the screw thread of screw rod 11 is processed with in drive socket 4-2, the threaded hole matched with screw rod 11 screw thread is processed with in the gap that disappears sleeve 13-2, drive socket 4-2 and disappear gap sleeve 13-2 just to layout, transmission nut 4 and the gap nut 13 that disappears are screwed on screw rod 11 respectively, preloading spring 12 is compressed in driving flange 4-1 and disappears between gap flange 13-1, spring spool 5 is set on preloading spring 12, spring spool 5 is connected with transmission nut 4, anti-turn screw 14 through on the gap flange 13-1 that disappears processing counterbore and be fixed on spring spool 5.
The feather key 2 of present embodiment is installed on driving stem 3, and coordinates with the keyway on end cap 10, and flexible shaft 1, driving stem 3, transmission nut 4, the gap that disappears nut 13 and spring spool 5 connect into an entirety simultaneously.Setting like this, can stop flexible shaft 1, driving stem 3, transmission nut 4, spring spool 5 and the gap nut 13 that disappears to rotate around own axes, and can ensure that driving stem 3 can axially move.One end of the screw rod 11 of present embodiment is stretched in driving stem 3, and the other end of screw rod 11 is connected with spring coupling 17.
The stepper motor 9 of present embodiment adopts low temperature resistant stepper motor, and stepper motor 9 is arranged on connecting plate for electric motor 8, and connecting plate for electric motor 8 is arranged on housing 18.Setting like this, can fix stepper motor 9, and prevents its stator from rotating around own axes.
The flexible shaft 1 of present embodiment is installed on driving stem 3, and the other end of flexible shaft 1 is connected with sub-mirror board, produces the rotary freedom of small scale when can realize the single sub-mirror board of many actuators common support like this.
Embodiment two: composition graphs 1-Fig. 2 illustrates, the screw thread of the transmission nut 4 of present embodiment, the screw thread of the gap that disappears nut 13 and the screw thread of screw rod 11 are accurate acme thread, have small pitch, and pitch is 0.1mm-0.2mm.
Screw rod 11, transmission nut 4 and the gap nut 13 that disappears of present embodiment all adopt accurate acme thread, it has small pitch, can ensure that stepper motor 9 transmission nut 4 that often turns around exports small displacement, coordinate the stepper motor of electric micro-stepping control, its unidirectional output displacement precision is less than 1 micron.Other is identical with embodiment one.
Embodiment three: composition graphs 1-Fig. 2 illustrates, all scribbles low temperature extreme boundary lubrication lipid layer between transmission nut 4 and screw rod 11, between the gap that disappears nut 13 and screw rod 11 and between driving stem 3 and end cap 10.
In present embodiment, low temperature extreme pressure grease is all scribbled between transmission nut 4 and screw rod 11, between the gap that disappears nut 13 and screw rod 11 and between driving stem 3 and end cap 10, the wearing and tearing of driving stem 3, end cap 10, screw rod 11, transmission nut 4 and the gap nut 13 that disappears can be reduced, and ensure that actuator still has good lubricant effect under output is compared with heavy load power, polar low-temperature specific condition, actuator can stablely at polar region extremely frigid zones, low abrasively run.Other is identical with embodiment one or two.
Embodiment four: composition graphs 3 illustrates, end play L between the inner face of the gap flange 13-1 that disappears of present embodiment and spring spool 5 outer face adjacent with this inner face is 0.4mm-0.6mm, and the end play H between the counterbore anchor ring of the gap that disappears flange 13-1 and anti-turn screw 14 head inner ring surface is 0.4mm-0.6mm.Namely the anti-turn screw 14 of present embodiment only limits the rotation of gap nut 13 around own axes that disappear, use preloading spring 12 by transmission nut 4 and gap nut 13 push-tight vertically that disappears simultaneously, preloading of preloading spring 12 is made to be greater than 70N, the carrying tooth side of transmission nut 4 so can be made to be always left tooth side, the carrying tooth side of screw rod 11 is always right tooth side, thus eliminate the drive gap of worm drive, and reach the effect of backlash compensation.Other is identical with embodiment one.
Embodiment five: composition graphs 1 and Fig. 2 illustrate, the movement support device of present embodiment also comprises bearing seat 6, bearing (ball) cover 7, deep groove ball bearing 15 and circlip for shaft 16; Bearing seat 6 is arranged on the middle part in housing 18, and bearing (ball) cover 7 is arranged on bearing seat 6, and deep groove ball bearing 15 is arranged between bearing seat 6 and bearing (ball) cover 7, and the inner ring of deep groove ball bearing 15 is fixed on screw rod 11 by circlip for shaft 16.The deep groove ball bearing 15 of present embodiment adopts low temperature resistant bearing, and deep groove ball bearing 15 at radial and axial studdle 11, and can ensure that screw rod 11 can rotate around own axes under the drive of stepper motor 9.
Embodiment six: composition graphs 1 and Fig. 2 illustrate, the gap between the driving stem 3 of present embodiment and end cap 10 is 1-35 μm.Be clearance fit between the driving stem 3 of present embodiment and end cap 10, adopt the clearance fit of accurate sliding bearing, ensure that maximal clearance is 35 μm, setting like this, can play a supporting role to driving stem 3, and be convenient to the smooth and easy motion realizing driving stem 3, ensure integrally-built sealing.Other composition is identical with embodiment one with annexation.
Embodiment seven: composition graphs 1-Fig. 2 illustrates, described in present embodiment, housing 18 is cylindrical housings.The housing 18 of present embodiment is designed to cylindrical.Setting like this, is convenient to coordinate with whole telescope, reduces windage to the full extent simultaneously.End cap 10 and bottom 19 mount cover in housing 18 both sides, make housing have certain sealing, can prevent high wind from avenging and corrode.Other is identical with embodiment one.
Embodiment eight: composition graphs 1-Fig. 2 illustrates, the stepper motor 9 of present embodiment adopts low temperature resistant stepper motor, and deep groove ball bearing 15 adopts low temperature resistant stainless steel bearing, and other parts all adopt stainless steel homogeneous material.Setting like this, under can ensureing cryogenic conditions, most of parts have identical temperature deformation, and can keep the mechanical property of parts under the long-time low temperature environment in polar region, realize kinematic accuracy very high under cryogenic and system stability.Other is identical with embodiment one.
Principle of work
Start stepper motor 9, power is directly passed to screw rod 11 by spring coupling 17 by stepper motor 9, and drive screw rod 11 to rotate, when screw rod 11 rotates, transmission nut 4 produces micro-displacement, and transmission nut 4, when producing displacement, promotes driving stem 3 to moving vertically, driving stem 3 drives again flexible shaft 1 to move linearly, and realizes Micro-displacement Driving.
Claims (5)
1. for a direct-drive type precision micro-displacement actuator for polar region environment, it is characterized in that: it comprises movement support device, driving mechanism and the gap screw-drive mechanism that disappears;
Movement support device comprises flexible shaft (1), end cap (10), housing (18) and bottom (19), the housing that housing (18) is open at both ends, end cap (10) and bottom (19) mount cover the two ends in housing (18) respectively;
Driving mechanism comprises spring coupling (17), connecting plate for electric motor (8) and stepper motor (9), connecting plate for electric motor (8) is arranged in housing (18), stepper motor (9) is arranged on connecting plate for electric motor (8), the output shaft of stepper motor (9) is horizontally disposed, the output shaft of stepper motor (9) is provided with spring coupling (17);
The gap that disappears screw-drive mechanism comprises feather key (2), driving stem (3), transmission nut (4), spring spool (5), screw rod (11), preloading spring (12), the gap that disappears nut (13) and anti-turn screw (14); Driving stem (3) is through end cap (10) and the two clearance fit, feather key (2) is arranged on driving stem (3) and goes up and coordinate with the keyway on end cap (10), one end of driving stem (3) is connected with flexible shaft (1), the other end of driving stem (3) is connected with transmission nut (4), and screw rod (11) is connected with spring coupling (17);
Transmission nut (4) is primarily of all-in-one-piece driving flange (4-1) processed and drive socket (4-2) composition, the gap that disappears nut (13) primarily of all-in-one-piece processed disappear gap flange (13-1) and the gap sleeve (13-2) that disappears composition, the threaded hole matched with the screw thread of screw rod (11) is processed with in drive socket (4-2), the threaded hole matched with screw rod (11) screw thread is processed with in the gap that disappears sleeve (13-2), drive socket (4-2) and the gap sleeve (13-2) that disappears are just to layout, transmission nut (4) and the gap nut (13) that disappears are screwed on screw rod (11) respectively, preloading spring (12) is compressed in driving flange (4-1) and disappears between gap flange (13-1), spring spool (5) is set on preloading spring (12), spring spool (5) is connected with transmission nut (4), anti-turn screw (14) is gone up the counterbore of processing through the gap flange (13-1) that disappears and is fixed on spring spool (5).
2. a kind of direct-drive type precision micro-displacement actuator for polar region environment according to claim 1, it is characterized in that: the screw thread of the screw thread of transmission nut (4), the gap that disappears nut (13) and the screw thread of screw rod (11) are accurate acme thread, have small pitch, pitch is 0.1mm-0.2mm.
3. a kind of direct-drive type precision micro-displacement actuator for polar region environment according to claim 1 and 2, is characterized in that: all scribble low temperature extreme boundary lubrication lipid layer between transmission nut (4) and screw rod (11), between the gap that disappears nut (13) and screw rod (11) and between driving stem (3) and end cap (10).
4. a kind of direct-drive type precision micro-displacement actuator for polar region environment according to claim 1, it is characterized in that: the end play (L) between the inner face of the gap that disappears flange (13-1) and spring spool (5) outer face adjacent with this inner face is 0.4mm-0.6mm, the end play (H) between the counterbore anchor ring of the gap that disappears flange (13-1) and anti-turn screw (14) head inner ring surface is 0.4mm-0.6mm.
5. a kind of direct-drive type precision micro-displacement actuator for polar region environment according to claim 1,2 or 4, is characterized in that: movement support device also comprises bearing seat (6), bearing (ball) cover (7), deep groove ball bearing (15) and circlip for shaft (16); Bearing seat (6) is arranged on the middle part in housing (18), bearing (ball) cover (7) is arranged on bearing seat (6), deep groove ball bearing (15) is arranged between bearing seat (6) and bearing (ball) cover (7), and the inner ring of deep groove ball bearing (15) is fixed on screw rod (11) by circlip for shaft (16).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510003074.5A CN104483743B (en) | 2015-01-05 | 2015-01-05 | A kind of direct-drive type precision micro-displacement actuator for polar region environment |
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| CN201510003074.5A CN104483743B (en) | 2015-01-05 | 2015-01-05 | A kind of direct-drive type precision micro-displacement actuator for polar region environment |
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| CN104483743B CN104483743B (en) | 2016-10-05 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991901A (en) * | 2017-12-04 | 2018-05-04 | 中国科学院国家天文台南京天文光学技术研究所 | Voice coil motor displacement actuator emulation platform and its method of work |
| CN110133820A (en) * | 2019-05-17 | 2019-08-16 | 中国科学院国家天文台南京天文光学技术研究所 | The nanoscale precise displacement actuator of large-scale segmented mirror optical telescope |
| CN111061031A (en) * | 2019-11-26 | 2020-04-24 | 北京空间机电研究所 | Space closed type flexible precision adjusting device and assembling method thereof |
| CN111380092A (en) * | 2018-12-28 | 2020-07-07 | 宁波方太厨具有限公司 | Side-draft range hood and gap adjusting method thereof |
| CN111426391A (en) * | 2020-04-02 | 2020-07-17 | 济南和普威视光电技术有限公司 | Double-view-field infrared thermal imaging lens and view field switching method |
| CN117741904A (en) * | 2024-02-19 | 2024-03-22 | 中国科学院长春光学精密机械与物理研究所 | Bolt pre-tightening device for reflecting mirror assembly |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991901A (en) * | 2017-12-04 | 2018-05-04 | 中国科学院国家天文台南京天文光学技术研究所 | Voice coil motor displacement actuator emulation platform and its method of work |
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| CN111380092A (en) * | 2018-12-28 | 2020-07-07 | 宁波方太厨具有限公司 | Side-draft range hood and gap adjusting method thereof |
| CN111380092B (en) * | 2018-12-28 | 2022-05-17 | 宁波方太厨具有限公司 | Side-draft range hood and gap adjusting method thereof |
| CN110133820A (en) * | 2019-05-17 | 2019-08-16 | 中国科学院国家天文台南京天文光学技术研究所 | The nanoscale precise displacement actuator of large-scale segmented mirror optical telescope |
| CN111061031A (en) * | 2019-11-26 | 2020-04-24 | 北京空间机电研究所 | Space closed type flexible precision adjusting device and assembling method thereof |
| CN111426391A (en) * | 2020-04-02 | 2020-07-17 | 济南和普威视光电技术有限公司 | Double-view-field infrared thermal imaging lens and view field switching method |
| CN117741904A (en) * | 2024-02-19 | 2024-03-22 | 中国科学院长春光学精密机械与物理研究所 | Bolt pre-tightening device for reflecting mirror assembly |
| CN117741904B (en) * | 2024-02-19 | 2024-04-16 | 中国科学院长春光学精密机械与物理研究所 | Bolt pre-tightening device for reflecting mirror assembly |
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| CN104483743B (en) | 2016-10-05 |
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