CN107132635B - High-precision reflecting mirror switching device - Google Patents

High-precision reflecting mirror switching device Download PDF

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Publication number
CN107132635B
CN107132635B CN201710315677.8A CN201710315677A CN107132635B CN 107132635 B CN107132635 B CN 107132635B CN 201710315677 A CN201710315677 A CN 201710315677A CN 107132635 B CN107132635 B CN 107132635B
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CN
China
Prior art keywords
mirror
reflecting mirror
ball
switching device
precision
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Expired - Fee Related
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CN201710315677.8A
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Chinese (zh)
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CN107132635A (en
Inventor
张志永
顾伯忠
姜翔
田源
乐中宇
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Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
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Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
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Priority to CN201710315677.8A priority Critical patent/CN107132635B/en
Publication of CN107132635A publication Critical patent/CN107132635A/en
Application granted granted Critical
Publication of CN107132635B publication Critical patent/CN107132635B/en
Expired - Fee Related legal-status Critical Current
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Abstract

High-precision reflecting mirror switching device, is co-axially mounted with the primary mirror of telescopic system, is arranged between primary mirror and secondary mirror, is characterized in that this switching device includes follow-up type supporting mechanism, spatial redundancy parallel drive mechanism and rotating mechanism;Spatial redundancy parallel drive therein mechanism realizes 90 degree or 45 degree of reflecting mirror of overturning.Realize that the light for being reflected into secondary mirror through primary mirror is pooled to Cassegrain focus through secondary mirror reflection when reflecting mirror being turned to 90 degree using spatial redundancy parallel drive mechanism;When reflecting mirror is turned to 45 degree, secondary mirror light is reflected into Nasmyth focus by reflecting mirror, and the switching between Nai Shi focus is realized in the rotation of rotating mechanism.The present invention solves mirror surface adjustment and the focus switching problem of reflecting mirror, and bearing capacity is by force, leap steric configuration, the focus of mechanism are switched fast, real-time dynamic compensatory reflex mirror error, mirror surface are adjusted without additional stress, light is unobstructed.

Description

High-precision reflecting mirror switching device
Technical field
The invention belongs to Machine Design manufacturing technology fields, and in particular to a kind of heavy caliber astronomical telescope three-mirror system Mirror surface adjustment and focus switching mechanism.Critical component one of of three mirrors as heavy caliber astronomical telescope, switching precision are direct The image quality of telescope is influenced, therefore, three-mirror system is needed using high-precision switching device, which is equally applicable for change side The microscope base design of position reflecting mirror.
Background technique
With the raising that astronomical observation requires, the bore of telescope is increasing, and heavy caliber astronomical telescope usually has Cassegrain focus and Nasmyth focus, in order to improve the service efficiency of telescope, need to focus to telescopic system into Row adequately utilizes.When telescope tracks astronomical target, three-mirror system needs are correspondingly rotated and are tilted to guarantee through three mirrors The light beam of reflection, which can be stablized, to be incident in corresponding focus scientific instrument, so that it may one of terminal device be made to be in work shape State.Currently, there are mainly two types of forms for the positioning mechanism of three-mirror system: 1) altazimuth telescope structure, the structure include trunnion axis The pitching shafting of line rotation and the azimuth axle rotated around vertical axis, have high kinematic accuracy and good stability. The structure can be switched to telescope optical path four Nasmyth focuses, but three mirrors can not avoid Cassegrain optical path;2) Stewart six-bar mechanism and rotary axis composite structure, six-bar mechanism is compact-sized, and the rigidity of structure is high, and positioning accuracy is high, flexibly Property it is high, but there are problems that interfering between each bar, be easy to appear the stuck of system, control system required very tight Lattice.Due to the structure feature of six-bar mechanism, so that the lateral load very little of six-bar mechanism, only the three of its xial feed/ One.In addition, six-bar mechanism rotational angle limits, Cassegrain optical path can not be also avoided.Existing three-mirror system uses It when Cassegrain focus, then needs to remove three-mirror system, not only wastes valuable observation time, also not can guarantee its repetition Installation accuracy.
Summary of the invention
It is an object of the invention to provide a kind of high-precision reflecting mirror switching device, realize three-mirror system mirror surface adjustment and Focus switching, can make the imaging device being mounted at different focal point position work respectively, can solve existing three mirror system Not the problems such as system is not available Cassegrain focus, six-bar mechanism lateral load is small.
The present invention reaches above-mentioned purpose by the following technical programs: high-precision reflecting mirror switching device, with telescope system The primary mirror of system is co-axially mounted, be arranged between primary mirror and secondary mirror, which is characterized in that this switching device by follow-up type supporting mechanism, Spatial redundancy parallel drive mechanism and rotating mechanism composition;Spatial redundancy parallel drive therein mechanism realize 90 degree of reflecting mirror or 45 degree of overturning.
In telescope work, light enters primary mirror from infinite point, and before then converging to secondary mirror, secondary mirror reflects light It is pooled to Cassegrain focus, or is converged in Nasmyth focus using reflecting mirror, focal point installs imaging device. Error can be generated due to processing and assembling, it is difficult to ensure that the pose of reflecting mirror after mounting is exactly theoretically correct pose, benefit The posture of reflecting mirror can be accurately adjusted with follow-up type supporting mechanism, is locked after the completion of adjustment, guarantee that telescope has in each focus There is good image quality.When reflecting mirror being turned to 90 degree using spatial redundancy parallel drive mechanism, realizes and be reflected into pair through primary mirror The light of mirror is pooled to Cassegrain focus through secondary mirror reflection, and does not shut out the light;When reflecting mirror is turned to 45 degree, reflection Secondary mirror light is reflected into Nasmyth focus by mirror, and the switching between Nai Shi focus is realized in the rotation of rotating mechanism.
The follow-up type supporting mechanism includes 3 groups of bottom supports, collateral support, mirror cell and reflecting mirror;Bottom support therein is cross The gap rotary axis that disappears is arranged in bumper structure, the whippletree center, which is coupled using flexible hinge with reflecting mirror; The splined shaft of first ball spline pair couples with the whippletree and accurate push-and-pull screw group respectively.The structure passes through flexible link and generates Moderate finite deformation absorb strain energy with the variation of adaptive temperature, the thermal stress for generating temperature change is not delivered to mirror surface.
Lateral support structure: the lateral support structure is located at the center of reflecting mirror;Invar ring passes through epoxy glue and reflection Mirror is connected, and the gravity plane for passing through reflecting mirror;Self-aligning ball bearing with cylindrical bore Internal and external cycle installs the second ball spline pair respectively Splined shaft and the invar ring, the self-aligning ball bearing with cylindrical bore use split bearing, the bearing utilize split bearing end cap Apply pretightning force, eliminates bearing clearance;Bearing inner race locking nut is installed in the splined shaft end of second ball spline pair, the The spline housing of two ball spline pairs is connected firmly with mirror cell.
Pre-profiling ball spline pair, the appearance of ball spline pair is respectively adopted in first ball spline pair and the second ball spline pair Perhaps rotation statical moment is greater than the moment of friction that screw thread pair and end-surface friction pair generate;Because follow-up type supporting mechanism is based on three point branch Principle is supportted, when accurate push-and-pull screw group adjusts the identical height of 3 groups of bottoms support simultaneously, the splined shaft meeting of the second ball spline pair Servo-actuated axial displacement is generated, realizes the adjustment of reflecting mirror one-dimensional translation;When precision push-and-pull screw group adjustment wherein one group of bottom support Height when, the splined shaft and self-aligning ball bearing with cylindrical bore of the second ball spline pair can generate servo-actuated axial displacement and corner, real The adjustment of existing reflecting mirror two dimension corner, by precision push-and-pull screw group locking after the completion of adjustment, therefore reflector alignment process has The advantage that supporting point position is stable, mirror surface is high without additional stress and Adjustment precision.
Two groups of spring-loaded plungers are symmetrically distributed in the two sides of reflecting mirror, and contact form is bulb and plane contact, bullet Spring plunger applies certain pretightning force to reflecting mirror, this pre-tightens dynamic balance and is rotated by the reflecting mirror that processing and installation error generate Power, and the pose adjustment of reflecting mirror is not influenced.
Spatial redundancy parallel drive mechanism is by two symmetrically arranged straight-line motion mechanisms, turnover bracket, compression bullet The compositions such as spring, third ball spline pair, support shafting, which is turned over the space circumference that rectilinear motion mode realizes reflecting mirror Transhipment is dynamic.
The straight-line motion mechanism is made of ball screw, grating scale, guide rail, servo motor etc..Guide rail is tiltedly mounted on On turnover bracket;The ball screw, grating scale and guide rail are arranged in parallel;The mirror cell upper end is coupled by mirror cell's support component Two guide rails;The mirror cell lower end is joined by compressed spring, third ball spline pair, rotary shaft, support shafting and turnover bracket It connects;Servo motor driving mirror cell upper end linear motion, mirror cell can generate the servo rotary and compressed spring around rotary shaft Follow-up telescoping, and using grating scale as the position feedback of movement mechanism, form closed loop moving mechanism.Reflecting mirror switching process In, need the straight-line motion mechanism of two groups of completely isotropics to drive jointly, which has the advantage that the machine of effectively improving The overall stiffness and dynamic performance of structure, implementation mechanism across steric configuration and improve the positioning accuracy of structure.
The support shafting of the ball screw is by the way of the fixed one end travelling in one end: motor side is using a pair of back-to-back The angular contact ball bearing of installation, and eliminate bearing clearance;The other end uses deep groove ball bearing, only plays radial support;The axis It is that support stiffness is big, thermal adaptability is good.
Mirror cell's support component is made of the angular contact ball bearing that a pair is installed face-to-face, two angular contact ball bearings Load position is met at a bit, forms two fulcrums of mirror cell;The third ball spline pair forms another fulcrum, constitutes The supported at three point of mirror cell ensure that the stability of mirror cell.
The compressed spring and third ball spline pair are compensated as the mechanical spring of spatial redundancy parallel drive mechanism to be filled Mirror cell upper end linear motion and the progressive error around rotary shaft circular motion can be compensated automatically by setting;The compressed spring needs to apply Certain precompressed, prefabricating load are greater than the gravity of follow-up type supporting mechanism, which increases the rigidity of structure and also ensure Stabilization in reflecting mirror motion process.Mandrel guide rod of the splined shaft of the third ball spline pair as compressed spring, it is ensured that It is not in stress bias and bending deformation in compressed spring work.
The ball screw is pre-profiling ball screw;Guide rail is pre-profiling guide rail;The third ball spline pair is pre- Die mould ball spline pair.
Each kinematic pair of spatial redundancy parallel drive mechanism eliminates gap, ensure that the overturning positioning of reflecting mirror The stability of power inside precision and kinematic pair.
The rotating mechanism includes rotary axis, bidentate wheel drive mechanism, Circular gratings etc.: utilizing high-precision four-point contact ball Bearing forms a set of rotary axis, and the closed-loop control of reflecting mirror rotation is realized using Dual-motors Driving technology and Circular gratings, should Structure is to have the dynamic characteristic that positioning accuracy is high, stability is high, and adapt to resistance to burnt frequent switching, braking.
Beneficial effects of the present invention: present invention would apply to changing for 2.4 meters of optical telescope three-mirror systems of Yunnan Observatory It makes.The present invention solves mirror surface adjustment and the focus switching problem of reflecting mirror, mainly has the advantage that compact-sized, mechanism Across steric configuration, bearing capacity it is strong, it is focus be switched fast, dynamic compensation in real time carries since wind square, vibration, temperature etc. are outer and draws Play reflecting mirror error, mirror surface is adjusted without additional stress, light is unobstructed.
Detailed description of the invention
Fig. 1 reflecting mirror switching device schematic diagram;
Fig. 2 follow-up type supporting mechanism schematic diagram;
The bottom Fig. 3 support concept figure;
The collateral support schematic diagram of Fig. 4;
Fig. 5 spatial redundancy parallel drive mechanism principle figure (contains Fig. 5-1, Fig. 5-2);
Fig. 6 rotating mechanism schematic diagram.
Specific embodiment
Embodiment 1, high-precision reflecting mirror switching device are as shown in Figure 1.It is characterized by: the mechanism is supported by follow-up type Mechanism 1, spatial redundancy parallel drive mechanism 2 and rotating mechanism 3 form.
Referring to Fig. 2~4: the follow-up type supporting mechanism 1 is by groups such as 3 groups of bottom supports 4, collateral support 5, mirror cell 6, reflecting mirrors 7 At.Bottom support 4 is transverse bar structure, and the gap rotary axis that disappears is arranged in 11 center of whippletree, and 11 both ends of whippletree use flexible hinge Chain 10 couples with reflecting mirror 7, and the splined shaft of the first ball spline pair 13 couples with whippletree 11 and accurate push-and-pull screw group 12 respectively, The fixing seat of precision push-and-pull screw group 12 is mounted in mirror cell 6, which is absorbed by the moderate finite deformation that flexible link generates For strain energy with the variation of adaptive temperature, the thermal stress for generating temperature change is not delivered to mirror surface.
The invar ring 14 is connected by epoxy glue with reflecting mirror 7, and passes through the gravity plane of reflecting mirror 7;The circle 15 Internal and external cycle of post holes self-aligning ball bearing installs the splined shaft and invar ring 14 of the second ball spline pair 16, cylindrical hole spherical ball respectively Bearing 15 uses split bearing, which applies pretightning force using split bearing end cap 17, eliminates bearing clearance;Second rolling Bearing inner race locking nut is installed in the splined shaft end of spline pair 16, and the spline housing of the second ball spline pair 16 and mirror cell 6 are solid Connection, this just forms collateral support 5, which is located at the center of reflecting mirror 7.
First ball spline pair 13 and the second ball spline pair 16 use pre-profiling ball spline pair, ball spline pair Allow rotate statical moment and be greater than the moment of friction that screw thread pair and end-surface friction pair generate;Because follow-up type supporting mechanism 1 is based on Supported at three point principle, when accurate push-and-pull screw group 12 adjusts the identical height of 3 groups of bottom supports 4 simultaneously, the second ball spline pair 16 splined shaft can generate servo-actuated axial displacement, realize the adjustment of 7 one-dimensional translation of reflecting mirror;When precision push-and-pull screw group 12 adjusts Wherein when the height of one group of bottom support 4, the splined shaft and self-aligning ball bearing with cylindrical bore 15 of the second ball spline pair 16 can generate with Dynamic axial displacement and corner realize the adjustment of the two-dimentional corner of reflecting mirror 7, are locked after the completion of adjustment by precision push-and-pull screw group 12, Therefore reflector alignment process has the advantages that supporting point position is stable, mirror surface is high without additional stress and Adjustment precision.
The spring-loaded plunger 8 is mounted in mirror cell 6 by support 9, and two groups of spring-loaded plungers 8 are symmetrically distributed in reflecting mirror 7 two sides, contact form are bulb and plane contact, and spring-loaded plunger 8 applies certain pretightning force to reflecting mirror 7, this preload 7 rotary force of reflecting mirror that dynamic balance is generated by processing and installation error, and the adjustment of reflecting mirror 7 is not influenced.
Referring to Fig. 5 (containing Fig. 5-1, Fig. 5-2): spatial redundancy parallel drive mechanism 2 includes two symmetrically arranged straight The composition such as line movement mechanism, turnover bracket 18, compressed spring 31, third ball spline pair 32, the mechanism is with rectilinear motion mode Realize 7 space circumference flip-flop movement of reflecting mirror.
The straight-line motion mechanism is made of ball screw 20, grating scale 23, guide rail 24, servo motor 28 etc..Guide rail 24 It is tiltedly mounted on turnover bracket 18;20 nut of ball screw, reading head 22 and 24 sliding block of guide rail pass through transition plates 21 It is connected together;The transition plates 21 is coupled by mirror cell's support component 34 with mirror cell 6;The ball screw 20 passes through end support Bearing block assembly 19 and front support bearing block assembly 26 connect firmly on turnover bracket 18, and are arranged in parallel with the guide rail 24; Planetary reducer 29 is mounted on retarder support 30, and is coupled by shaft coupling 27 with ball screw 20;The deceleration Device support 30 connects firmly on turnover bracket 18;The servo motor 28 is mounted on planetary reducer 29, this is just constituted directly The driving mechanism of line movement.Grating scale 23 is mounted on grating scale support 25, and the grating scale support 25 is parallel with guide rail 24 solid It is associated on turnover bracket 18, this just constitutes the feedback device of linear motion.
The spline housing of third ball spline pair 32 is mounted in mirror cell 6, and splined shaft and 33 right angle setting of rotary shaft use pin It connects firmly;The compressed spring 31 is mounted on splined shaft, mandrel guide rod of the splined shaft as compressed spring 31, it is ensured that compressed spring It is not in stress bias and bending deformation in 31 work;The rotary shaft 33 is by supporting shafting 35 to connect firmly in turnover bracket 18 On.
The servo motor 28 drives 6 upper end of mirror cell linear motion, mirror cell 6 can generate around rotary shaft 33 servo rotary and The follow-up telescoping of compressed spring 31, and using grating scale 23 as the position feedback of movement mechanism, form closed loop moving structure.Instead It penetrates in mirror switching process, the straight-line motion mechanism of two groups of completely isotropics is needed to drive jointly, which has the advantage that Effectively improve the overall stiffness of mechanism and the positioning accurate across steric configuration and raising structure of dynamic performance, implementation mechanism Degree.
The ball screw 20 supports shafting by the way of the fixed one end travelling in one end: the end support bearing block group The bearing of part 19 is deep groove ball bearing, only plays radial support;Front support bearing block assembly 26 is by a pair of back-to-back installation Angular contact ball bearing composition, and eliminate shafting gap;The shafting support stiffness is big, and thermal adaptability is good.
Mirror cell's support component 34 is a pair of combination bearing form installed face-to-face, which makees It is met at a bit with center line, forms two fulcrums of mirror cell 6;Another fulcrum formed with third ball spline pair 32, structure At the supported at three point of mirror cell 6, mirror cell's stability ensure that.
Compressed spring 31 and third ball spline pair 32 are compensated as the mechanical spring of spatial redundancy parallel drive mechanism 2 to be filled 6 upper end of mirror cell linear motion and the progressive error around 33 circular motion of rotary shaft can be compensated automatically by setting;The compressed spring 31 needs Apply certain precompressed, prefabricating load is greater than the gravity of follow-up type supporting mechanism 1, and this spring compensator ensures to reflect Stabilization in 7 motion process of mirror.
The ball screw 20 uses pre-profiling ball screw;The guide rail 24 uses pre-profiling guide rail;The third rolling Spline pair 32 uses pre-profiling ball spline pair.
Each kinematic pair of spatial redundancy parallel drive mechanism 2 eliminates gap, ensure that the overturning of reflecting mirror 7 is fixed The stability of power inside position precision and kinematic pair.
The rotating mechanism 3 referring to described in Fig. 6 is made of rotary axis, bidentate wheel drive mechanism, Circular gratings etc..The bearing Seat 36, rotary shaft 37 and high-precision four-point contact ball 38 form the rotary axis of rotating mechanism 3;The rotary shaft 37 with turn over Turn bracket 18 to connect firmly.The feature of the bidentate wheel drive mechanism are as follows: the first pinion gear 40 is mounted in first servo motor 41, institute It states first servo motor 41 to be mounted on bearing block 36 by first motor seat 39, forms gear driving pair with gear wheel 42;The Two pinion 47 is mounted on the second servo motor 48, and the second servo motor 48 is mounted on bearing block 36 by the second motor cabinet 49 On, gear driving pair is formed with gear wheel 42;Reading head 45 is mounted on bearing block 36 by reading head support 44;Circular gratings 46 It is mounted on gear wheel 42 by Circular gratings support 43;The gear wheel 42 is connected firmly with rotary shaft 37.When rotary shaft 37 need it is inverse When hour hands rotate, the first pinion gear 40 generates the driving moment rotated clockwise, and the second pinion gear 47 generates a rotation counterclockwise The torque turned, and torque eliminates gear clearance less than the torque of the first pinion gear 40, conversely, it is contrary to the above, and utilize circle light Grid 46 provide the exact position signal of reflecting mirror 7 for control system, realize the closed-loop control that reflecting mirror 7 rotates.
When reflecting mirror 7 is in 45 degree, optical path switching between resistance to burnt instrument is realized in the rotation of the rotating mechanism 3;It is described When reflecting mirror 7 is turned to 90 degree by spatial redundancy parallel drive mechanism 2, the optical path for realizing resistance to burnt instrument and Ka Jiao instrument is cut It changes.

Claims (8)

1. a kind of high-precision reflecting mirror switching device, is co-axially mounted with the primary mirror of telescopic system, it is arranged in primary mirror and secondary mirror Between, which is characterized in that this switching device is by follow-up type supporting mechanism, spatial redundancy parallel drive mechanism and rotating mechanism group At;Spatial redundancy parallel drive therein mechanism realizes 90 degree or 45 degree of reflecting mirror of overturning;
The follow-up type supporting mechanism includes 3 groups of bottom supports, collateral support, mirror cell, reflecting mirror and spring-loaded plunger;Bottom support therein For transverse bar structure, which is arranged the gap rotary axis that disappears, which uses flexible hinge and reflecting mirror Connection;The splined shaft of first ball spline pair couples with the whippletree and accurate push-and-pull screw group respectively;
The collateral support is located at the center of reflecting mirror;Invar ring is connected by epoxy glue and reflecting mirror, and passes through reflection The gravity plane of mirror;Self-aligning ball bearing with cylindrical bore Internal and external cycle installs the splined shaft and the invar of the second ball spline pair respectively Ring, the self-aligning ball bearing with cylindrical bore use split bearing, which applies pretightning force using split bearing end cap, eliminate bearing Gap;The splined shaft end of second ball spline pair is installed by bearing inner race locking nut, the spline housing of second ball spline pair It is connected firmly with mirror cell.
2. high-precision reflecting mirror switching device according to claim 1, which is characterized in that the first ball spline pair and Pre-profiling ball spline pair is respectively adopted in two ball spline pairs, and the statical moment of allowing to rotate of ball spline pair is greater than screw thread pair and end Face rubs by-produced moment of friction;The follow-up type supporting mechanism realizes the accurate tune of reflecting mirror one-dimensional translation and two-dimentional corner It is whole, by precision push-and-pull screw group locking after the completion of adjustment.
3. high-precision reflecting mirror switching device according to claim 1, which is characterized in that two groups of spring-loaded plungers symmetrically divide For cloth in the two sides of reflecting mirror, contact form is bulb and plane contact, and spring-loaded plunger applies pretightning force to reflecting mirror.
4. high-precision reflecting mirror switching device described in one of -3 according to claim 1, which is characterized in that the spatial redundancy Parallel drive mechanism is by two symmetrically arranged straight-line motion mechanisms, turnover bracket, compressed spring, third ball spline pair, rotation Shaft, support shafting composition, the mechanism realize the space circumference flip-flop movement of reflecting mirror with rectilinear motion mode.
5. high-precision reflecting mirror switching device according to claim 4, which is characterized in that the straight-line motion mechanism by Ball screw, grating scale, guide rail, servo motor composition;Guide rail is tiltedly mounted on turnover bracket;Ball screw, grating scale with Guide rail parallel arrangement;The mirror cell upper end couples two guide rails by mirror cell's support component;The mirror cell lower end passes through compression bullet Spring, third ball spline pair, rotary shaft, support shafting couple with turnover bracket;Servo motor drives mirror cell upper end linear motion, Mirror cell can generate the follow-up telescoping of servo rotary and compressed spring around rotary shaft, and using grating scale as the position of movement mechanism Feedback is set, closed loop moving mechanism is formed;In reflecting mirror switching process, need the straight-line motion mechanism of two groups of completely isotropics total With driving.
6. high-precision reflecting mirror switching device according to claim 5, which is characterized in that the support shafting of ball screw By the way of the fixed one end travelling in one end: motor side uses the angular contact ball bearing of a pair of back-to-back installation, and eliminates bearing Gap;The other end uses deep groove ball bearing, only plays radial support.
7. high-precision reflecting mirror switching device according to claim 5, which is characterized in that mirror cell's support component by The angular contact ball bearing composition that a pair is installed face-to-face, two angular contact ball bearing load positions are met at a bit, form mirror Two fulcrums of room;The third ball spline pair forms another fulcrum, constitutes the supported at three point of mirror cell.
8. high-precision reflecting mirror switching device according to claim 5, which is characterized in that the ball screw is precompressed Type ball screw;Guide rail is pre-profiling guide rail;The third ball spline pair is pre-profiling ball spline pair;The rotating mechanism Include rotary axis, bidentate wheel drive mechanism, Circular gratings: forming a set of rotary axis using high-precision four-point contact ball, And the closed-loop control of reflecting mirror rotation is realized using Dual-motors Driving technology and Circular gratings.
CN201710315677.8A 2017-05-08 2017-05-08 High-precision reflecting mirror switching device Expired - Fee Related CN107132635B (en)

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