CN113687489A - Flexible displacement actuator for large optical infrared telescope splicing mirror surface - Google Patents
Flexible displacement actuator for large optical infrared telescope splicing mirror surface Download PDFInfo
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- CN113687489A CN113687489A CN202111087294.2A CN202111087294A CN113687489A CN 113687489 A CN113687489 A CN 113687489A CN 202111087294 A CN202111087294 A CN 202111087294A CN 113687489 A CN113687489 A CN 113687489A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 31
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 29
- 230000007704 transition Effects 0.000 claims abstract description 21
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 13
- 239000010935 stainless steel Substances 0.000 claims abstract description 13
- 230000006835 compression Effects 0.000 claims abstract description 11
- 238000007906 compression Methods 0.000 claims abstract description 11
- 230000003014 reinforcing effect Effects 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 1
- 235000017491 Bambusa tulda Nutrition 0.000 claims 1
- 241001330002 Bambuseae Species 0.000 claims 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 1
- 239000011425 bamboo Substances 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 7
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 235000005749 Anthriscus sylvestris Nutrition 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 241000256247 Spodoptera exigua Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000010835 comparative analysis Methods 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The invention provides a flexible displacement actuator of a splicing mirror surface of a large-scale optical infrared telescope, which comprises a guide pin, a lifting output cylinder, a voice coil motor, a folding plate spring, a sliding bearing, a compression spring, a deep groove ball bearing, an encoder reading head, a scale plate, a nut rotating type ball screw, a transition sleeve, an inner side fixing cylinder, a meshed straight tooth cylindrical gear, a stainless steel clearance eliminating spur gear, a direct current motor and an outer side fixing cylinder, wherein the nut rotating type ball screw, the transition sleeve, the inner side fixing cylinder, the meshed straight tooth cylindrical gear, the stainless steel clearance eliminating spur gear and the direct current motor form a coarse control part, and the guide pin, the lifting output cylinder and the voice coil motor form a fine control part. The invention adopts a two-stage design concept, and can meet the requirements of precision and positioning.
Description
Technical Field
The invention relates to a large optical telescope, in particular to a flexible displacement actuator for a splicing mirror surface of a large optical infrared telescope.
Background
The micro-displacement actuator is a key component of a splicing mirror surface supporting system of a large-scale optical telescope, and plays a role in supporting and adjusting the pose of a sub-mirror. Each sub-mirror is associated with three actuators to achieve adjustment of three out-of-plane degrees of freedom (tip, tilt and piston). The actuator controls each sub-mirror to be arranged at a specified position according to design requirements through high-precision extension or shortening, so that confocal and common phase of each sub-mirror are realized.
Splicing the primary mirror also presents a significant challenge in achieving larger apertures. In order to make the spliced main mirror meet the optical design requirement, the pose of each sub-mirror needs to be kept with extremely high precision. The position control of the sub-mirror requires a certain stroke, load and resolution of the actuator due to the interference of gravity, wind load, thermal deformation and the like. Actuators of the spliced mirror optical infrared telescope need to reach millimeter-scale stroke, dozens of kilograms of loads and nanometer-scale resolution. Along with the increasing of the aperture of the telescope, the interference on the telescope is increased, so that the deformation of the structure is larger, and the requirement on the capacity of the actuator is higher. And the large stroke and the high precision are difficult to realize simultaneously in practical application. And the increased number of sub-mirrors results in more actuators being required to control the arrangement of the spliced sub-mirrors. The increase in the number of actuators means higher power consumption, greater weight and higher cost, which all place a great burden on the establishment of the telescope.
The aperture of the optical splicing primary mirror telescope which is built at present reaches 10m level, and the position and pose control of the secondary mirror meets the imaging quality requirement under the support of the existing actuator technology. For the telescope with larger caliber, the requirement on the performance of the actuator is improved, so that the actuator applied to the built telescope with 10m grade cannot be directly applied to the future telescope with 30m grade or larger caliber. The splicing main mirror micro-displacement actuator can be roughly divided into a macro-micro combination, a displacement scaling and a movable type (inchworm type and the like) according to the structural form. Keck is used as a precursor of a splicing primary mirror telescope, and the precision required by the telescope is realized by a hydraulic speed reducer carried by a precision nut screw rod. Due to the difference of the geographical position, the caliber size, the observation requirement, the budget and the like of each telescope, the requirements of the required actuators are different. Therefore, for different telescopes, the actuator mostly adopts different structures, but the basic principle is mainly displacement scaling mechanisms such as a precision lead screw and a lever, and the like, so as to achieve the required precision. But the device suffers from the inherent defects of friction, hysteresis, crawling and the like, so that the contradiction between large stroke and high precision is difficult to solve.
Foreign attempts have been made to adopt flexible actuators based on voice coil motors, and detailed comparative analysis has been made on both flexible actuators and solutions for adding active damping to conventional rigid actuators with respect to the noise immunity of the actuators. The built 30 m-grade telescopes TMT and ELT initially adopt flexible actuators with new structural forms, and the requirements are basically met through tests. In China, micro-displacement actuators and the like applied to the spliced mirror telescope are designed and tested to achieve certain effects, but the corresponding use requirements of the telescope with the extremely large caliber cannot be met.
The micro-displacement actuator meeting the conditions in the aspects of stroke, precision, rigidity, load capacity, power consumption and the like is designed, the performance of the current splicing primary mirror micro-displacement actuator is improved to meet project application, and meanwhile, the micro-displacement actuator is also used for meeting the development requirement of future larger-caliber telescopes and making technical support for the improvement of domestic large-caliber telescopes.
Disclosure of Invention
The invention aims to provide a flexible displacement actuator for a splicing mirror surface of a large optical infrared telescope.
The technical solution for realizing the purpose of the invention is as follows: the utility model provides a flexible displacement actuator of large-scale optical infrared telescope concatenation mirror surface, includes uide pin, a lift output tube, voice coil motor, folding leaf spring, slide bearing, compression spring, deep groove ball bearing, encoder reading head, scale plate, nut rotation type ball screw, transition sleeve, inboard solid fixed cylinder, meshing straight-tooth spur gear, stainless steel gap spur gear, direct current motor and the solid fixed cylinder in the outside, wherein:
the nut rotating type ball screw, the transition sleeve, the inner side fixing barrel, the meshed straight-tooth cylindrical gear, the stainless steel clearance-eliminating spur gear and the direct current motor form a coarse control part, wherein the direct current motor is arranged between the inner side fixing barrel and the outer side fixing barrel and drives the stainless steel clearance-eliminating spur gear to rotate, the clearance-eliminating spur gear drives the meshed straight-tooth cylindrical gear to rotate, the straight-tooth cylindrical gear is connected with the transition sleeve, and the transition sleeve is connected with the nut rotating type ball screw through the fixing pin;
the voice coil motor consists of a VCA magnet and a coil, wherein the lifting output cylinder and the voice coil motor are provided with center holes, the upper end of the lifting output cylinder is connected with a nut rotating type ball screw, the lower end of the lifting output cylinder is connected with the VCA magnet of the voice coil motor, the guide pin penetrates through the center holes of the lifting output cylinder and the voice coil motor, the three folding plate springs at the top and a sliding bearing at the bottom of the guide pin provide transverse support, the folding plate springs are assembled by thin plates, the end parts of the thin plates are clamped together through a central fastening nut, the outer sides of the thin plates are fixed to an upper cover plate of an outer side fixing cylinder through screws, and the coil of the voice coil motor is arranged at the tail end of the guide pin and matched with the VCA magnet;
during coarse-level adjustment, the direct current motor drives the nut rotary ball screw to axially move in a gear transmission mode, so that the lifting connecting cylinder is pushed to move up and down, and micron-level adjustment is realized; during fine adjustment, the voice coil motor drives the guide pin to move up and down through the center holes of the lifting output cylinder and the VCA magnet, and therefore nanoscale adjustment is achieved.
Furthermore, a compression spring is arranged in the middle of the laminated plate spring to compensate the weight so as to unload the weight of the mirror on the top.
Furthermore, when the pitch axis of the telescope changes, the weight carried by the flexible displacement actuator changes, and the load changes can cause the compression spring to rotate around the center line.
Furthermore, a reinforcing rib plate is arranged between the inner side fixed cylinder and the outer side fixed cylinder, the reinforcing rib plate can be connected with the inner side fixed cylinder and the outer side fixed cylinder in a welding mode and then connected with the lower bottom plate, and the direct current motor is fixed on the reinforcing rib plate. The sandwich design mode can obviously increase the vertical rigidity and the transverse rigidity of the whole structure and transmit the counter torque of the motor to the telescope truss. And the reinforcing rib plate is provided with an adjusting groove which can adjust the matching position of the direct current motor, so that the generation of additional installation stress is avoided.
To further increase the reduction ratio, a commercial planetary gear box may be installed inside the dc motor, and further, a rotary encoder may be applied to the dc motor to achieve speed control (e.g., to suppress backlash).
Furthermore, the upper end and the lower end of the transition sleeve are supported by angular contact bearings, the outer sides of the bearings at the upper end and the lower end are positioned on the shaft shoulder of the inner side fixing cylinder, one side of the upper end bearing inner ring abuts against the shaft shoulder of the transition sleeve, and one side of the lower end bearing inner ring is pre-tightened by a Belleville spring. The upper end and the lower end of the transition sleeve are provided with angular contact bearing supports, so that the transition sleeve can be restrained from moving axially and transversely relative to the inner fixed cylinder. Whereas angular contact bearings are preloaded by Belleville springs, which is a cost-effective spring arrangement.
And further, the linear optical encoder is further included, an encoder reading head is fixed on the base, the scale plate is stuck in the processing groove at the tail end of the stainless steel guide pin, and the actual compensation quantity of the flexible actuator is fed back by an optical encoder system, namely closed-loop control is realized. The linear optical encoder is fixed at the bottom of the whole device, and the arrangement mode increases the operability and adjustability of the reading head. In addition, the encoder is outside the structural rigidity design chain, and can be prevented from being influenced by structural deformation.
A flexible displacement actuating method of a splicing mirror surface of a large optical infrared telescope is based on a flexible displacement actuator of the splicing mirror surface of the large optical infrared telescope, and flexible displacement actuation of the splicing mirror surface of the large optical infrared telescope is achieved.
Compared with the prior art, the invention has the following remarkable advantages: 1) the voice coil motor is adopted in the fine control, is a direct drive motor in a special form, and has the characteristics of simple structure, small volume, high speed, high acceleration response speed and the like. 2) The two-stage design concept is adopted, the precision and positioning requirements can be met, the millimeter and mm stroke required by micron and micrometer precision processing is adjusted in a coarse stage, and the gap is reduced to a nanometer and nm range by fine stage adjustment. 3) Linear guide pins based on folded reeds are used to minimize hysteresis and friction, and are dimensioned to have a long service life (30 years or more).
Drawings
FIG. 1 is a three-dimensional view of the flexible displacement actuator of the splicing mirror surface of the large optical infrared telescope of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In order to achieve the nanometer positioning accuracy under the condition of interference, the flexible displacement actuator of the splicing mirror surface of the large-scale optical infrared telescope adopts a two-stage design of rotational symmetry and serial stacking, and combines a coarse adjustment function (long stroke) and a fine adjustment function (short stroke).
As shown in fig. 1, the flexible displacement actuator includes a guide pin 1, a lifting output cylinder 2, a voice coil motor 3, a folding plate spring 4, a sliding bearing 5, a compression spring 6, a deep groove ball bearing 7, an encoder reading head 8, a scale plate 9, a nut rotating ball screw 10, a transition sleeve 11, an angular contact bearing 12, an inner fixed cylinder 13, a Belleville spring 14, a meshing spur gear 15, a stainless steel anti-backlash spur gear 16, a direct current motor 17, a reinforcing rib plate 18 and an outer fixed cylinder.
The direct current motor 17 is fixed on the reinforcing rib plate 18 between the inner side fixed barrel 13 and the outer side fixed barrel, and the matching position of the direct current motor can be adjusted by the adjusting groove in the reinforcing rib plate 18, so that additional installation stress is avoided. The direct current motor 17 drives the stainless steel clearance elimination spur gear 16 to rotate, and the clearance elimination spur gear 16 drives the meshing straight spur gear 15 to rotate. The spur gear 15 is connected with the transition sleeve 11. The transition sleeve 11 is connected by a fixed pin and nut rotary ball screw 10. Nut rotation type ball 10 is connected to lift output cylinder 2, and lift output cylinder 2 is connected to guide pin 1 through the centre bore, and lift output cylinder 2 lower extreme is connected the VCA magnet of voice coil motor 3, has been restricted in the rotation moreover, and guide pin 1 passes VCA magnet, and the coil of voice coil motor 3 is fixed on guide pin 1. With regard to the transition sleeve 11, the upper and lower ends thereof are supported by angular contact bearings 12, the outer sides of the bearings at the upper and lower ends are positioned at the shoulder of the inner fixed cylinder 13, the side of the inner ring of the upper end bearing abuts against the shoulder of the transition sleeve 11, and the side of the inner ring of the lower end bearing is pre-tightened by a Belleville spring 14, which is a cost-effective spring device.
The lateral support of the guide pin 1 consists of the top three folded leaf springs 4 and the sliding bearing 5 at the bottom of the guide pin 1, wherein the folded leaf springs 4 carry the majority of the lateral loads. The folded leaf spring 4 can be assembled from sheets cut and bent by laser, clamped together at the ends by a central fastening nut, and the outside of the folded leaf spring 4 is fixed to the upper cover plate of the outside fixed cylinder by screws (the upper cover plate is identical to the lower base plate in structure, and the upper cover plate is not shown in order to show the internal structure). The middle part of the folded leaf spring 4 is provided with a compression spring 6 for weight compensation. Between the top of the compression spring 6 and the folding leaf spring 4 a deep groove ball bearing 7 is arranged, the rotation around the centre line of the compression spring 6 due to load changes being solved by the deep groove ball bearing 7 (self-centering).
The linear optical encoder is positioned at the bottom, the reading head 8 of the encoder is fixed on the base, and the scale plate 9 is stuck in the processing groove of the stainless steel guide pin 1. The actual compensation amount of the flexible actuator is fed back by the optical encoder system, namely closed-loop control.
In the invention, the coarse control is driven by the brushless direct current motor 17 and the nut rotating type ball screw 10, and micron-level adjustment is realized through the vertical movement of the nut rotating type ball screw 10 and the lifting output cylinder 2. The fine adjustment is driven by the voice coil motor 3, and the guide pin 1 is driven to move up and down through the center holes of the lifting output cylinder 2 and the VCA magnet 3, so that the nano-scale adjustment is realized.
Based on the inventive device, the position of the splice mirror can be maintained in the 1.7nm RMS range with a stroke of 15mm in the presence of interference.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (7)
1. The utility model provides a flexible displacement actuator of large-scale optical infrared telescope concatenation mirror surface, a serial communication port, including uide pin (1), a lift output section of thick bamboo (2), voice coil motor (3), folding leaf spring (4), slide bearing (5), compression spring (6), deep groove ball bearing (7), encoder reading head (8), scale plate (9), nut rotation type ball (10), transition sleeve (11), inboard fixed cylinder (13), meshing straight-tooth cylindrical gear (15), stainless steel crack spur gear (16), direct current motor (17) and outside fixed cylinder, wherein:
the nut rotating type ball screw (10), the transition sleeve (11), the inner side fixing barrel (13), the meshed straight toothed cylindrical gear (15), the stainless steel clearance eliminating spur gear (16) and the direct current motor (17) form a coarse control part, wherein the direct current motor (17) is arranged between the inner side fixing barrel (13) and the outer side fixing barrel and drives the stainless steel clearance eliminating spur gear (16) to rotate, the clearance eliminating spur gear (16) drives the meshed straight toothed cylindrical gear (15) to rotate, the straight toothed cylindrical gear (15) is connected with the transition sleeve (11), and the transition sleeve (11) is connected with the nut rotating type ball screw (10) through a fixing pin;
the guide pin (1), the lifting output cylinder (2) and the voice coil motor (3) form a fine control part, the voice coil motor (3) consists of a VCA magnet and a coil, wherein center holes are formed in a lifting output cylinder (2) and the voice coil motor (3), the upper end of the lifting output cylinder (2) is connected with a nut rotating type ball screw (10), the lower end of the lifting output cylinder is connected with the VCA magnet of the voice coil motor (3), a guide pin (1) penetrates through the center holes of the lifting output cylinder (2) and the voice coil motor (3), transverse support is provided by three folding plate springs (4) at the top and a sliding bearing (5) at the bottom of the guide pin (1), the folding plate springs (4) are assembled by thin plates, the end parts of the thin plates are clamped together through a central fastening nut, the outer sides of the thin plates are fixed to an upper cover plate of an outer side fixing cylinder through screws, and the coil of the voice coil motor (3) is arranged at the tail end of the guide pin (1) and matched with the VCA magnet;
during coarse adjustment, the direct current motor (17) drives the nut rotating type ball screw (10) to axially move in a gear transmission mode, so that the lifting connecting cylinder (2) is pushed to vertically move, and micron-level adjustment is realized; during fine adjustment, the voice coil motor (3) drives the guide pin (1) to move up and down through the center holes of the lifting output cylinder (2) and the VCA magnet (3), so that the nano-scale adjustment is realized.
2. Flexible displacement actuator for a large optical infrared telescope split mirror according to claim 1, characterized by the fact that the folded leaf spring (4) is loaded with a compression spring (6) in the middle as weight compensation to unload the top mirror weight.
3. The flexible displacement actuator for a large optical infrared telescope split mirror surface as claimed in claim 2, characterized in that the top of the compression spring (6) is mounted with a deep groove ball self-aligning bearing (7) for self-centering the spring.
4. The actuator for the flexible displacement of the splicing mirror surface of the large-scale optical infrared telescope according to claim 1, characterized in that a reinforcing rib plate (18) is arranged between the inner fixed cylinder (13) and the outer fixed cylinder, the direct current motor (17) is fixed on the reinforcing rib plate (18), and the reinforcing rib plate (18) is provided with an adjusting groove for adjusting the matching position of the direct current motor to avoid generating additional installation stress.
5. The actuator for the flexible displacement of the splicing mirror surface of the large-scale optical infrared telescope according to claim 1, wherein the upper end and the lower end of the transition sleeve (11) are supported by angular contact bearings (12), the outer sides of the bearings at the upper end and the lower end are positioned on the shaft shoulder of the inner fixed cylinder (13), one side of the inner ring of the upper end bearing abuts against the shaft shoulder of the transition sleeve (11), and one side of the inner ring of the lower end bearing is pre-tightened by a Belleville spring (14).
6. The flexible actuator for splicing mirror surface of large optical infrared telescope according to claim 1, further comprising linear optical encoder, wherein the reading head (8) of the encoder is fixed on the base, and the scale plate (9) is stuck in the processing groove at the tail end of the stainless steel guide pin (1).
7. A flexible displacement actuating method for a splicing mirror surface of a large-scale optical infrared telescope is characterized in that the flexible displacement actuating of the splicing mirror surface of the large-scale optical infrared telescope is realized based on the flexible displacement actuator for the splicing mirror surface of the large-scale optical infrared telescope of any one of claims 1 to 6.
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CN202111087294.2A CN113687489A (en) | 2021-09-16 | 2021-09-16 | Flexible displacement actuator for large optical infrared telescope splicing mirror surface |
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Cited By (2)
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CN114393279A (en) * | 2022-01-19 | 2022-04-26 | 湘潭大学 | Magnetic control arc welding seam tracking sensing device adopting double MEMS magnetic field intensity sensors |
CN116509625A (en) * | 2023-06-06 | 2023-08-01 | 广东麦特维逊医学研究发展有限公司 | Displacement actuating device and working method thereof |
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CN106371192A (en) * | 2016-09-21 | 2017-02-01 | 南京航空航天大学 | Large-size astronomical telescope panel actuator and control method thereof |
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