CN1275063C - Regulating rack for five free degrees laser focusing lens - Google Patents
Regulating rack for five free degrees laser focusing lens Download PDFInfo
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- CN1275063C CN1275063C CN200410040193.XA CN200410040193A CN1275063C CN 1275063 C CN1275063 C CN 1275063C CN 200410040193 A CN200410040193 A CN 200410040193A CN 1275063 C CN1275063 C CN 1275063C
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Abstract
The present invention discloses a regulating rack for a laser focusing lens with five degrees of freedom. The center of the regulating rack is provided with a lens frame with a lens, a transition frame and an outer frame, and the three frames are symmetrically arranged according to a Y axis as a central axis. The Y axis is taken as an axis center; a Y-direction displacement and angle composite mechanism is arranged at the upper ends of the lens frame and the transition frame, and a displacement and angle modulation auxiliary supporting mechanism is arranged at corresponding lower ends; an X-direction displacement and angle composite mechanism is arranged in the direction of the X axis center and at one end of the transition frame and the outer frame, and an X displacement and angle modulation auxiliary supporting mechanism is arranged at the other corresponding end; a Z-direction displacement modulation track guiding structure is arranged in a Z axis direction and at the lower part of the outer frame. The transition frame and the outer frame as driving bases are used for respectively driving the lens frame to make linear and angular movement corresponding to the transition frame and driving the transition frame to make linear and angular movement corresponding to the outer frame; the transition frame is fixed corresponding to the lens frame; therefore, the lens frame with a lens can be adjusted with five degrees of freedom. All modulation mechanisms have double supports without cantilevers; therefore, not only can modulation with five degrees of freedom desired by laser beam focusing be realized with high stability, but an integral size with the same clear aperture is also smaller.
Description
1. technical field
The invention belongs to five degree of freedom regulating device field, being specifically related to a kind of adjustment structure is the five degree of freedom laser focusing lens adjustment rack of dual-gripper.
2. background technology
For the laser focusing hot spot is accurately dropped on the specified point, used condenser lens need be done to regulate except that all the other five degree of freedom around beam axis rotates.At present, in the known five degree of freedom laser focusing lens adjustment rack, the straight-line displacement that is parallel to beam axis is realized by line slideway; Realize by line slideway perpendicular to one of two straight-line displacement of beam axis, realize by elevating lever for one; Pass through the double-support hole axle perpendicular to one of the two angle degree of freedom of beam axis and cooperate realization, another cooperates by single line sector hole axle or thrust bearing is realized.In existing this five degree of freedom laser focusing lens adjustment rack structure, with the straight-line displacement of elevating lever realization perpendicular to the beam axis direction, and cooperate or thrust bearing is realized angle degree of freedom perpendicular to beam axis by single line sector hole axle, its structure is cantilever position, for guaranteeing to have enough stability, can only be by increasing the supporting surface of hole axle length of fit and thrust bearing, thereby cause the increasing of adjustment rack overall dimensions, the installing space that requires is big, large-caliber laser condenser lens particularly, for avoiding air that light path is impacted, be installed in the vacuum chamber, adjustment rack size senior general directly causes the increasing of whole optical system size.
Utility model patent (patent No. CN 1257770A) discloses a kind of five-freedom five-shaft and has separated lotus root parallel micromotion robot, but because the influence of its structure, can not be used for the adjusting of vacuum chamber inner laser lens focus, and its worktable is too small, can't guarantees the stability of strutting system of big workpiece.
3. summary of the invention
Poor for overcoming in the prior art five degree of freedom laser focusing lens adjustment rack stability, the deficiency that overall dimensions is big, the invention provides a kind of five degree of freedom laser focusing lens adjustment rack, can not only realize that laser beam focuses on required five degree of freedom and regulates, and good stability, overall dimensions is little under the situation of same clear aperture.
The characteristics of five degree of freedom laser focusing lens adjustment rack of the present invention are, described adjustment rack contain X to straight-line displacement and the compound governor motion of angle, Y to straight-line displacement and the compound governor motion of angle, Z to the displacement governor motion.The center of adjustment rack is provided with the rectangle picture frame, is provided with lens in the rectangle picture frame, and the rectangle picture frame is outside equipped with rectangle transition frame, and the transition frame is outside equipped with the rectangle housing, and the three is big clearance fit; Three frames are that central axis is symmetrical arranged with Y-axis and X-axis all; With the Y-axis is the axle center, is provided with Y to displacement and the compound governor motion of angle at rectangle picture frame and transition frame upper end, is provided with Y to displacement and angular adjustment supplemental support mechanism in the corresponding lower end of Y-axis; In X-axis heart direction, transition frame and housing left end be provided with X to displacement and the compound governor motion of angle, be provided with X displacement and angular adjustment supplemental support at the corresponding right-hand member of X-axis; In Z-direction, below the rectangle housing, be provided with Z and regulate guide rail mechanism to displacement.
The Y-axis of five degree of freedom laser focusing lens adjustment rack of the present invention contains the feather key side direction gap-eliminating structure part of Y to displacement, worm structure part, turbine and worm gap-eliminating structure part, bearing seat and axis of guide structure division to displacement and the compound governor motion of angle.Feather key side direction gap-eliminating structure comprises spring base, attachment screw, feather key backlash spring etc.; Worm structure partly comprises worm screw, turbine, bearing, end ring, shaft coupling etc.; Turbine and worm screw gap-eliminating structure partly comprise turbine, pin, turbine and worm backlash spring etc.; Bearing seat, axis of guide structure division comprise the axis of guide, bearing seat, turning axle sliding sleeve, screw mandrel, feather key, lining, driving key, set nut, bearing etc.Y-axis to the annexation of displacement and the compound governor motion each several part of angle is: the spring base of feather key side direction gap-eliminating structure part is fixedly installed on the transition frame, and is connected with picture frame; The axis of guide in bearing seat and the axis of guide structure division is fixedly installed on the Y-axis, and the center of circle of the axis of guide overlaps with the Y-axis heart, and axis of guide outside cylinder lower end and picture frame are connected; Be provided with screw mandrel in the threaded hole on axis of guide top, the top of screw mandrel is connected with stepper motor; Axis of guide cylindrical shell of column middle part splines, and is connected with the endoporus of turning axle sliding sleeve by the feather key that is arranged in the keyway; Bearing seat is connected by bearing with turning axle sliding sleeve cylindrical; And the cylindrical lower end of bearing seat and the stressed joint of transition frame; Turbine in turbine and the worm screw gap-eliminating structure part does not have the hollow endoporus and is connected by key with turning axle sliding sleeve cylindrical in the axis of guide structure division, and also the worm screw with the worm structure part is connected; Motor worm seat in the worm structure part passes housing fixedlys connected with the end face of transition frame.Y-axis to displacement and lower end cylindrical and the transition frame of the compound governor motion of angle by its bearing seat be interference fit and be fixedly connected on the transition frame;
Contain to displacement and angular adjustment supplemental support mechanism to the corresponding Y-axis of the compound governor motion of displacement and angle with Y-axis: mandrel, feather key, sliding sleeve, locking screw piece, bearing and bearing seat.Y-axis to displacement and angular adjustment supplemental support mechanism each several part annexation is: axial displacement is provided with circular mandrel in the axis lower end of picture frame Y direction, the mandrel center of circle overlaps with the Y-axis heart, the face of cylinder, upper end of circular mandrel is provided with Y to the guiding keyway, and be connected with picture frame by being arranged on the feather key of guiding in the keyway, the fixedly connected sliding sleeve in mandrel lower end is outside equipped with bearing, the bearing seat of solid bearing is fixedly installed on the transition frame by interference fit, and bearing seat and housing are big gap.Y to displacement and angular adjustment supplemental support mechanism be connected by feather key in the guiding keyway of picture frame relevant position, picture frame can move and not rotate when mobile making Y along feather key, realizes the adjusting of the two-freedom of Y direction.
Transition frame and housing be provided with Y-axis to the displacement and the compound governor motion of angle of the displacement X axis identical with the structure of the compound adjusting of angle, also be provided with Y-axis to the displacement and the angular adjustment supplemental support mechanism of the displacement X axis identical with the structure of angular adjustment supplemental support, realize the adjusting of the two-freedom of directions X.At the X axis right-hand member, be that the axle center is symmetrically arranged with X to the backhaul backlash spring with the displacement of X axis and the mandrel of angular adjustment supplemental support mechanism, and be separately fixed on transition frame and the housing by pin.
Z is to the straight-line displacement governor motion, is band feed screw nut line slideway auxiliary driven by stepper motors is set in the lower surface of housing, and line slideway auxiliary is arranged on the pedestal, realize adjustment rack of the present invention Z to move significantly.
The transition frame is set outside the rectangle picture frame, be for Y to straight-line displacement and the compound governor motion of angle and supplemental support provide the position be set, realize the dual-support structure of no cantilever, be used to drive picture frame and make Y and rotate to low-angle to little stroke straight-line displacement and Y; Housing is set outside the transition frame again, is for X provides to straight-line displacement and the compound governor motion of angle and supplemental support the position to be set, and the same dual-support structure of realizing no cantilever is used to drive picture frame and makes X and rotate to low-angle to little stroke straight-line displacement and X.By as the transition frame and the housing that drive pedestal, drive the relative transition frame of picture frame and do straight line and angular movement, drive the relative housing of transition frame and do straight line and angular movement, all adjustment structures are dual-gripper, no cantilever.On as transition frame that drives pedestal and housing, pass through Bearing Installation one turning axle sliding sleeve respectively, one fastening worm gear is set on the outside cylinder of turning axle sliding sleeve simultaneously, the worm screw and the worm screw that match with worm gear are arranged on and drive with stepper motor on the fixing motor worm seat of pedestal, motor shaft is fastenedly connected by shaft coupling and worm screw, can realize angular movement; Turning axle sliding sleeve inner chamber is the cylindrical hole of tape guide groove, the axis of guide of interior dress tape guide key, the axis of guide be driven part and link to each other, there are internal thread and screw mandrel to match in the axis of guide, this screw mandrel is installed in step motor drive on the turning axle sliding sleeve by another, motor shaft is fastenedly connected by shaft coupling and screw mandrel, can produce displacement movement by the screw mandrel rotation.By the turning axle sliding sleeve pedestal and the displacement and the angular movement that are driven between the part are integrated on the same axis, and displacement and angular movement are not disturbed mutually, when being used for the stepper motor of displacement movement, locking can pin this motion, angular movement can not cause the variation that is driven linear position between part and pedestal, equally, can pin this motion when locking is used for the stepper motor of angular movement, displacement movement can not cause the variation that is driven angle position between part and pedestal.
The invention has the beneficial effects as follows: when improving five degree of freedom laser focusing lens adjustment rack stability, reduce its overall volume.Because of all supports are dual-support structure, the X of strong point scioptics, Y-axis line all have enough spans, each strong point only needs one section very short line segment can realize stable support, regulate simultaneously and compound governor motion has all been adopted in Y straight-line displacement and the adjusting of angle degree of freedom, can obviously reduce the volume of five degree of freedom laser focusing lens adjustment rack because of X straight-line displacement and angle degree of freedom.The present invention can realize the adjusting of five degree of freedom preferably, there is the big displacement of 10mm level to regulate in the Z direction, in X, Y direction straight-line displacement regulated quantity perpendicular to beam axis Z is the little displacement adjusting of mm level, and there is the angular adjustment amount to regulate in X, Y direction, more is applicable to the adjusting of vacuum chamber inner laser lens focus for the low-angle of degree level.
4. description of drawings
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the general structure synoptic diagram of five degree of freedom laser focusing lens adjustment rack of the present invention.
Fig. 2 is the feather key side direction gap-eliminating structure synoptic diagram of Y of the present invention to displacement for the partial sectional view A-A of five degree of freedom laser focusing lens adjustment rack of the present invention.
Fig. 3 is the partial enlarged drawing I of five degree of freedom laser focusing lens adjustment rack of the present invention, partial enlarged drawing I be Y of the present invention to displacement and the structural representation of the compound governor motion of angle.
Fig. 4 is the partial sectional view B-B of five degree of freedom laser focusing lens adjustment rack of the present invention, cut-open view B-B be Y of the present invention to displacement and the compound governor motion of angle in the worm structure synoptic diagram.
Fig. 5 is the partial sectional view C-C of five degree of freedom laser focusing lens adjustment rack of the present invention, cut-open view C-C be Y of the present invention to displacement and the compound governor motion of angle in the structural representation of worm and gear anti-backlash mechanism.
Fig. 6 is the partial sectional view D-D of five degree of freedom laser focusing lens adjustment rack of the present invention, cut-open view D-D for Y of the present invention to displacement and the structural representation of the compound governor motion bottom bracket of angle, the axis of guide.
Fig. 7 is the partial enlarged drawing II of five degree of freedom laser focusing lens adjustment rack of the present invention, partial enlarged drawing II for Y of the present invention to displacement and the structural representation of angular adjustment supplemental support.
Fig. 8 is the partial enlarged drawing III of five degree of freedom laser focusing lens adjustment rack of the present invention, and partial enlarged drawing III is the structural representation of X of the present invention to the backhaul anti-backlash mechanism of displacement.
1. picture frames, 2. transition frames, 3. housings, 4. line slideway auxiliaries, 5. pedestals, 6. feather key backlash springs, 8. spring bases, 12. screw mandrels, 13. worm gears, 14. turning axle sliding sleeves, 15. axis of guide rolling bearing (16a among the figure, 16b) 20. linings, 21. driving keys, 24. set nuts, 26. end rings, 28. worm screws, 31. motor worm seats, 33. worm and gear backlash springs, 35. holding screws, 39. sliding sleeves, 40. mandrel 42.X are to backhaul backlash spring bearing (22,27,37a, 37b) the locking screw piece (19,23,38,44) pin (7,34,41) feather key (18,43) bearing seat (17,36) attachment screw (9,32) shaft coupling (11,29) stepper motor (10,30)
5. embodiment
Among the figure, adjustment rack of the present invention contain X to straight-line displacement and the compound governor motion of angle, Y to straight-line displacement and the compound governor motion of angle, Z to the displacement governor motion.The center of adjustment rack is provided with rectangle picture frame 1, is provided with lens in rectangle picture frame 1, and rectangle picture frame 1 is outside equipped with rectangle transition frame 2, and transition frame 2 is outside equipped with rectangle housing 3, and the three is big clearance fit; Three frames are that central axis is symmetrical arranged with Y-axis and X-axis all; With the Y-axis is the axle center, is provided with Y to displacement and the compound governor motion of angle at rectangle picture frame 1 and transition frame 2 upper ends, is provided with Y to displacement and angular adjustment supplemental support mechanism in the corresponding lower end of Y-axis; In X-axis heart direction, transition frame 2 and housing 3 left ends be provided with X to displacement and the compound governor motion of angle, be provided with X displacement and angular adjustment supplemental support at the corresponding right-hand member of X-axis; In Z-direction, below rectangle housing 3, be provided with Z and regulate guide rail mechanism to displacement.
The Y-axis of five degree of freedom laser focusing lens adjustment rack of the present invention contains the feather key side direction gap-eliminating structure part of Y to displacement, worm structure part, turbine, worm screw gap-eliminating structure part, bearing seat and axis of guide structure division to displacement and the compound governor motion of angle.Y-axis includes spring base 8, attachment screw 9, feather key backlash spring 6 etc. to the feather key side direction gap-eliminating structure of displacement; Worm structure partly includes worm screw 28, turbine 13, bearing 27, end ring 26, shaft coupling 11 etc.; Turbine, worm screw gap-eliminating structure partly include turbine 13, pin 34, turbine and worm backlash spring 33 etc.; Bearing seat, axis of guide structure division include the axis of guide 15, bearing seat 17, turning axle sliding sleeve 14, screw mandrel 12, feather key 18, driving key 21, set nut 24, holding screw 35 etc.Y-axis to the annexation of the compound governor motion each several part of displacement and angle is: be connected transition frame 2 and picture frame 1 in the Y-axis upper end by spring base 8, spring base 8 usefulness attachment screws 9 are fixed on the transition frame 2, and spring base 8 also is connected with rectangle picture frame 1 by feather key backlash spring 6 usefulness pins 7.Be set with the axis of guide 15 on the axis of the Y of rectangle picture frame 1 direction, the axis of guide center of circle overlaps with the Y-axis heart, and the axis of guide 15 is connected with turning axle sliding sleeve 14 by feather key 18.And the cylindrical of turning axle sliding sleeve 14 is a step axle broad in the middle small in ends, and at interval back to two rolling bearing 16a, 16b are installed, two steps play the solid bearing inner ring at two step places.The outer ring of bearing 16a and 16b is fixed in the endoporus on the bearing seat 17, the endoporus of bearing seat 17 is a stepped hole, and rolling bearing 16b outer ring is supported on this step, is provided with threaded hole in the endoporus upper end of bearing seat 17, and locking screw piece 19, to pin the outer ring of rolling bearing 16a.The inner ring of rolling bearing 16a is fixed and clamped with the lower end of lining 20.The outer ring, lower end of bearing seat 17 and transition frame 2 is for interference fit and be fixedly connected on the transition frame 2.The axis of guide 15 that is arranged at Y-axis line upper end is quill shaft, be provided with the step threaded hole on axle top, be provided with screw mandrel 12 in the hole, screw mandrel 12 is arranged in the stepped hole of turning axle sliding sleeve 14 upper ends by bearing 22, the cooperation shaft part upper end that bearing 22 is set at screw mandrel 12 is provided with one section screw thread, and set nut 24 is locked on this section screw thread of screw mandrel 12 by set nut 24 at the inner ring of Y-axis to solid bearing 22; The outer ring of bearing 22 uses locking screw piece 23 in axial pinning, locking screw piece 23 is in the inner bolt hole of turning axle sliding sleeve 14 upper ends, top by screw mandrel 12 in the inner bolt hole is connected with shaft coupling 11 on the output shaft of stepper motor 10, and stepper motor 10 is fixed on rotary sleeve 14 top end faces.The centre position of the roundlet shell of column on the cylindrical of rotation sliding sleeve 14 is provided with one section guiding keyway, by the driving key 21 that is arranged in the guiding keyway worm gear 13 is installed, worm gear 13 is connected in motor worm seat 31 with worm screw 28, motor worm seat 31 is an inverted U-shaped frame, be arranged on the upper left side of housing 3, the both ends of the surface that housing 3 and transition frame 2 usefulness attachment screws 32 are fixedly connected on transition frame 2 are passed in the lower end of motor worm seat 31.The two ends of worm screw 28 are connected with the inverted U-shaped both sides of motor worm seat 31 respectively by bearing 27 and end ring 26, and the one end is connected with the stepper motor 30 on the one side that is fixedly mounted on motor worm seat 31 by shaft coupling 29.Between worm gear 13 and motor worm seat 31, fixedly install a worm and gear backlash spring 33 with pin 34.Y-axis to displacement and the compound governor motion of angle by its bearing seat 17 the lower end cylindrical and transition frame 2 for interference fit and be fixedly connected on the transition frame 2.
Y-axis contains to displacement and angular adjustment supplemental support mechanism: mandrel 40, sliding sleeve 39, locking screw piece 38, bearing (37a, 37b) and bearing seat 36, its annexation is: be provided with circular mandrel 40 below the rectangle picture frame 1 below the axis of Y direction, mandrel 40 overlaps with the Y-axis heart, have Y on the face of cylinder, upper end of mandrel 40 to the guiding keyway, be connected in the guiding keyway of picture frame 1 corresponding position by the feather key 43 that is arranged in the guiding keyway; At mandrel 40 cylindrical lower ends fixed installation sliding sleeve 39, on sliding sleeve 39 outside cylinder back to bearing (37a, 37b) is set, the outer ring of bearing 37a is locked in the internal thread hole of bearing seat 36 lower ends with the external thread of locking screw piece 38, inner ring is locked in the internal thread of locking screw piece 44 on the external thread of lower end of sliding sleeve 39, bearing 37b fixes by the step of sliding sleeve 39 and bearing seat 36 endoporus, and compresses inside and outside circle by deadweight.Bearing seat 36 is fixedly installed on the transition frame 2 by interference fit, and bearing seat 36 is big gap with housing 3.Y-axis to displacement and angular adjustment supplemental support mechanism be connected by feather key 43 in the guiding keyway of picture frame relevant position, rectangle picture frame 1 can move and not rotate when mobile making Y along feather key 43.
The axial straight-line displacement governor motion of Z is that band feed screw nut line slideway auxiliary 4 driven by stepper motors is set in the lower surface of housing 3, and line slideway auxiliary 4 is arranged on the pedestal 5, realize adjustment rack of the present invention Z to move significantly.
Five degree of freedom laser focusing lens adjustment rack of the present invention, by in X axis and Y-axis to axial line slideway auxiliary 4 structures of setting of the dual-support structure of the cantilever of forming by displacement and the compound governor motion of angle and corresponding displacement and angular adjustment supplemental support mechanism respectively that is provided with and Z, in the adjustings of X, Y, five degree of freedom of three axial realizations of Z.
Claims (1)
1. five degree of freedom laser focusing lens adjustment rack is characterized in that: described adjustment rack contain X to straight-line displacement and the compound governor motion of angle, Y to straight-line displacement and the compound governor motion of angle, Z to the displacement governor motion; The center of adjustment rack is provided with rectangle picture frame (1), is provided with lens in rectangle picture frame (1), and rectangle picture frame (1) is outside equipped with rectangle transition frame (2), and transition frame (2) is outside equipped with rectangle housing (3), and the three is big clearance fit; Three frames are that central axis is symmetrical arranged with Y-axis and X-axis all; With the Y-axis is the axle center, is provided with Y to displacement and the compound governor motion of angle at rectangle picture frame (1) and transition frame (2) upper end, is provided with Y to displacement and angular adjustment supplemental support mechanism in the corresponding lower end of Y-axis; In X-axis heart direction, transition frame (2) and housing (3) left end be provided with X to displacement and the compound governor motion of angle, be provided with X displacement and angular adjustment supplemental support at the corresponding right-hand member of X-axis; In Z-direction, be provided with Z in the below of rectangle housing (3) and regulate guide rail mechanism to displacement;
Described Y-axis contains the feather key side direction gap-eliminating structure part of Y to displacement, worm structure part, turbine, worm screw gap-eliminating structure part, bearing seat and axis of guide structure division to displacement and the compound governor motion of angle; Feather key side direction gap-eliminating structure contains spring base (8), attachment screw (9), feather key backlash spring (6); Worm structure partly contains worm screw (28), turbine (13), bearing (27), end ring (26), shaft coupling (11); Turbine, worm screw gap-eliminating structure partly contain turbine (13), pin (34), turbine and worm backlash spring (33); Bearing seat and axis of guide structure division contain the axis of guide (15), bearing seat (17), turning axle sliding sleeve (14), screw mandrel (12), feather key (18), driving key (21), set nut (24); Y-axis to the annexation of displacement and the compound governor motion each several part of angle is: the spring base (8) of feather key side direction gap-eliminating structure part is fixedly installed on the transition frame (2), and is connected with rectangle picture frame (1); The axis of guide (15) in bearing seat and the axis of guide structure division is fixedly installed on the Y-axis, the center of circle of the axis of guide (15) overlaps with the Y-axis heart, fixedly connected with rectangle picture frame (1) in the axis of guide (15) outside cylinder lower end, be provided with screw mandrel (12) in the threaded hole on the axis of guide (15) top, the top of screw mandrel (12) is connected with stepper motor (10); The axis of guide (15) cylindrical shell of column middle part splines, and is connected with the endoporus of turning axle sliding sleeve (14) by the feather key (18) that is arranged in the keyway; Bearing seat (17) is connected by bearing with turning axle sliding sleeve (14) cylindrical; The cylindrical lower end of bearing seat (17) is connected with transition frame (2); Turbine (13) in turbine and the worm screw gap-eliminating structure part is provided with hollow endoporus well and is connected by key with turning axle sliding sleeve (14) cylindrical in the axis of guide structure division, also is connected with worm structure worm screw (28) partly; Motor worm seat (31) in the worm structure part passes housing (3) fixedlys connected with the end face of transition frame (2); Y-axis to displacement and the compound governor motion of angle by its bearing seat (17) the lower end cylindrical and transition frame (2) for interference fit and be fixedly connected on the transition frame (2);
Y-axis contains to displacement and angular adjustment supplemental support mechanism: mandrel (40), feather key (43), sliding sleeve (39), locking screw piece (38), bearing (37a, 37b) and bearing seat (36), its annexation is: rectangle picture frame (1) below below the axis of Y direction is provided with circular mandrel (40), mandrel (40) overlaps with the Y-axis heart, the face of cylinder, upper end of mandrel (40) is provided with Y to the guiding keyway, is connected in the guiding keyway of picture frame (1) corresponding position by the feather key (43) that is arranged in the guiding keyway; At mandrel (40) cylindrical lower end fixed installation sliding sleeve (39), on sliding sleeve (39) outside cylinder back to two bearings (37a, 37b) are set, the outer ring of bearing (37a) is locked in the internal thread hole of bearing seat (36) lower end with the external thread of locking screw piece (38), inner ring is locked in the internal thread of locking screw piece (44) on the external thread of lower end of sliding sleeve (39), bearing (37b) is fixed by the step of sliding sleeve (39) and bearing seat (36) endoporus, and compresses inside and outside circle by deadweight; Bearing seat (36) is fixedly installed on the transition frame (2) by interference fit, and bearing seat (36) is big gap with housing (3); Y-axis to displacement and angular adjustment supplemental support mechanism be connected in the guiding keyway of rectangle picture frame (1) relevant position by feather key (43);
Transition frame (2) and housing (3) be provided with Y-axis to the displacement and the compound governor motion of angle of the displacement X axis identical with the structure of the compound adjusting of angle, also be provided with Y-axis to the displacement and the angular adjustment supplemental support mechanism of the displacement X axis identical with the structure of angular adjustment supplemental support;
At the X axis right-hand member, be that the axle center is symmetrically arranged with X to backhaul backlash spring (42) with the displacement of X axis and the mandrel (40) of angular adjustment supplemental support mechanism, and be separately fixed on transition frame (2) and the housing (3) by pin (41);
Z is that band feed screw nut's line slideway auxiliary driven by stepper motors (4) is set in the lower surface of housing (3) to the straight-line displacement governor motion, and line slideway auxiliary (4) is arranged on the pedestal (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200410040193.XA CN1275063C (en) | 2004-07-09 | 2004-07-09 | Regulating rack for five free degrees laser focusing lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200410040193.XA CN1275063C (en) | 2004-07-09 | 2004-07-09 | Regulating rack for five free degrees laser focusing lens |
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| CN1595218A CN1595218A (en) | 2005-03-16 |
| CN1275063C true CN1275063C (en) | 2006-09-13 |
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| CN200410040193.XA Expired - Fee Related CN1275063C (en) | 2004-07-09 | 2004-07-09 | Regulating rack for five free degrees laser focusing lens |
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| CN113835181B (en) * | 2021-08-19 | 2024-03-05 | 北京华卓精科科技股份有限公司 | Multi-degree-of-freedom-adjustable spectacle frame |
| CN114295005A (en) * | 2021-11-30 | 2022-04-08 | 航天科工微电子系统研究院有限公司 | Reference mirror adjusting device |
-
2004
- 2004-07-09 CN CN200410040193.XA patent/CN1275063C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105425824A (en) * | 2015-12-15 | 2016-03-23 | 中国科学院西安光学精密机械研究所 | Precision five-dimensional turntable |
| CN105425824B (en) * | 2015-12-15 | 2017-12-05 | 中国科学院西安光学精密机械研究所 | A kind of precision five ties up turntable |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1595218A (en) | 2005-03-16 |
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