CN106500587A - A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method - Google Patents
A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method Download PDFInfo
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- CN106500587A CN106500587A CN201610903674.1A CN201610903674A CN106500587A CN 106500587 A CN106500587 A CN 106500587A CN 201610903674 A CN201610903674 A CN 201610903674A CN 106500587 A CN106500587 A CN 106500587A
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- displacement
- flexible hinge
- axis
- focusing device
- white light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02035—Shaping the focal point, e.g. elongated focus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of grand micro- precise focusing device of white light interferometer Z axis, including line slideway, rigid frame, nucleus movement workbench, flexible hinge, sensor, linear actuator and grating scale；It is arranged such, the grand micro- precise focusing device of white light interferometer Z axis disclosed by the invention, which effectively can realize grand movement while ensureing precision feeding, and precision movement platform is obtained in the precise displacement reading after focusing by grand micro- duplex measurement；The invention also discloses a kind of focus adjustment method for the grand micro- precise focusing device of above-mentioned white light interferometer Z axis.
Description
Technical field
The present invention relates to accurate focus technique field, more particularly relates to a kind of grand micro- accurate focusing of white light interferometer Z axis
Device and its focus adjustment method.
Background technology
Optical system in the course of the work, the relative distance of imageable target and optical system always in change, by Gauss
Formula understands that the image distance of its optical system also will change therewith, in order that the imageable target of different distance can be on focal plane
Into clearly as, it is necessary to the change of target range adjust at any time the distance of camera lens and imaging focal plane with obtain clearly as,
The process of this adjustment is referred to as to focus.Focus control has quite varied application in fields such as microsurgical instruments.
Interferometer is to measure the difference of light path so as to determine the optical instrument about physical quantity using principle of interference, and which measures essence
Degree is decided by that the precision of measurement of optical path difference, interference fringe often move a fringe spacing, and optical path difference just changes a wavelength, so
Interferometer is that its certainty of measurement is high with optical wavelength as unit measurement of optical path difference.
Due to the contradiction of the accurate feed of the big stroke of focus adjusting mechanism and interferometer, accurate focusing on a large scale is difficult to realize, existing
How little stroke piezoelectric ceramics is added to terminate the problems referred to above using big stroke stacking piezoelectric ceramics and manual coarse adjustment, but structure is multiple in technology
Miscellaneous, expensive.
Therefore, how realizing grand movement while ensureing precision feeding, and after grand micrometering amount is focused
In the case of precise displacement reading, simplify apparatus structure, reduces cost becomes those skilled in the art's important skill to be solved
Art problem.
Content of the invention
In order to solve above-mentioned technical problem, the purpose of the present invention is to realize grand movement while ensureing precision feeding, and
In the case of the precise displacement reading after grand micrometering amount is focused, simplify apparatus structure, reduces cost, specifically,
The invention provides a kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method.
The grand micro- precise focusing device of white light interferometer Z axis that the present invention is provided, including line slideway, rigid frame, core
Motion workbench, flexible hinge, sensor, linear actuator and grating scale；Four guide rail is arranged symmetrically, and rigid frame is installed
On guide rail, on rigid frame, nucleus movement workbench is arranged on rigid frame by flexible hinge to absolute grating ruler
Inside frame, on flexible hinge, linear actuator is in the middle part of nucleus movement workbench for sensor.
Preferably, the linear actuator is voice coil motor.
Preferably, the flexible hinge is arranged symmetrically.
Preferably, the flexible hinge is made by the shell fragment of same thickness.
Present invention also offers a kind of focus adjustment method, step is as follows：
When S1, linear actuator do not drive, platform is in self-locking state；
S2, linear actuator drive nucleus movement workbench, nucleus movement workbench to drive flexible hinge to produce bullet
Property deformation；
When the stiction that driving force is produced with guide rail less than rigid platfor, step S3 is entered；
When driving force is more than rigid platfor and guide rail into holy stiction, step S4 is entered；
S3, nucleus movement workbench produce micro-displacement by the elastic deformation of flexible hinge, realize accurate Fine Feed,
Read the displacement of nucleus movement workbench；
S4, rigid platfor produce rigid body displacement, read the displacement of nucleus movement workbench.
Preferably, the sensor measurement in the S3 steps on nucleus movement workbench displacement flexible hinge.
Preferably, the concrete grammar for reading nucleus movement workbench displacement in the S4 steps is as follows：
S4-1, the absolute grating ruler on rigid platfor read rigid body displacement；
The micro-displacement that S4-2, the sensor measurement elastic deformation on flexible hinge are produced；
S4-3, the superposition that the actual displacement of nucleus movement workbench is rigid body displacement and elastic deformation displacement.The present invention
Beneficial effect：
1) the grand micro- precise focusing device of the white light interferometer Z axis of present invention offer, including line slideway, rigid frame, core
Heart motion workbench, flexible hinge, sensor, linear actuator and grating scale；Four guide rail is arranged symmetrically, and rigid frame is pacified
It is mounted on guide rail, on rigid frame, nucleus movement workbench is by flexible hinge installed in rigidity for absolute grating ruler
Lower portion, on flexible hinge, linear actuator is in the middle part of nucleus movement workbench for sensor.So set
Put, the grand micro- precise focusing device of the white light interferometer Z axis that the present invention is provided, four guide rails are arranged symmetrically elimination Abbe error, use
The superposition of rigid body displacement and elastic deformation is realizing high accuracy consecutive variations displacement, and is passed by grating scale and resistance strain gage
Measuring two kinds of displacements, certainty of measurement is guaranteed, and compact conformation easily realizes automatic measurement for sensor.
2), in the preferred version that the present invention is provided, the linear actuator is voice coil motor.It is arranged such, due to voice coil loudspeaker voice coil electricity
Machine does not have hesitation, and the linearity is good, and device can directly drive, fast response time.
3), in the preferred version that the present invention is provided, the flexible hinge is arranged symmetrically；The flexible hinge is by same thickness
Shell fragment be made.It is arranged such, the grand micro- precise focusing device of the white light interferometer Z axis that the present invention is provided, its flexible hinge
It is arranged symmetrically and is made by the shell fragment of same thickness, it is ensured that the elastic force that four sides is subject to when core work platform is moved is identical.
Description of the drawings
Fig. 1 is the grand micro- precise focusing device overall structure diagram of white light interferometer Z axis in the specific embodiment of the invention；
Fig. 2 is core motion platform and rigid frame connection diagram in the specific embodiment of the invention；
Fig. 3 is flexible hinge structure front schematic view in the specific embodiment of the invention；
Fig. 4 is flexible hinge structure schematic rear view in the specific embodiment of the invention；
Fig. 5 is a kind of focus adjustment method schematic flow sheet in the specific embodiment of the invention；
In Fig. 1-Fig. 3：
Line slideway 1, rigid frame 2, nucleus movement platform 3, flexible hinge 4, fixing device 41, spring
Piece 42, grating scale 5, displacement transducer 6.
Specific embodiment
The invention provides a kind of grand micro- precise focusing device of white light interferometer Z axis, its can realize grand movement with
When ensure precision feeding, and precision movement platform is obtained in the precise displacement reading after focusing by grand micro- duplex measurement.
Present invention also offers a kind of focus adjustment method using the grand micro- precise focusing device of above-mentioned white light interferometer Z axis.
Accompanying drawing in below in conjunction with the embodiment of the present invention, to the embodiment of the present invention in technical scheme carry out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiment.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1 to Fig. 4 is refer to, Fig. 1 is the grand micro- precise focusing device of white light interferometer Z axis in the specific embodiment of the invention
Overall structure diagram；Fig. 2 is core motion platform and rigid frame connection diagram in the specific embodiment of the invention；Fig. 3
For flexible hinge structure front schematic view in the specific embodiment of the invention, Fig. 4 is flexible hinge in the specific embodiment of the invention
Chain structure schematic rear view.
The grand micro- precise focusing device of white light interferometer Z axis provided in the present embodiment, including line slideway 1, just
Property framework 2, nucleus movement platform 3, flexible hinge 4, grating scale 5, displacement transducer 6 and voice coil motor composition.Wherein, rigid frame
Connected by flexible hinge 4 between frame 2 and nucleus movement platform 3, rigid frame 2 is connected with line slideway 1, voice coil motor and core
Heart motion platform 3 connects, and, on rigid frame 2, displacement transducer 6 is on flexible hinge 4 for grating scale 5.
It is arranged such, voice coil motor can apply driving force, the driving force to nucleus movement platform 3 under electromagnetic force
Can make flexible hinge 4 that elastic deformation occurs, and and then make the nucleus movement platform 3 produce the straight line along rail length direction
Displacement.The elastic deformation reaction force of flexible hinge 4 can be used for when overcoming the rigid frame 2 to be moved with line slideway 1
Frictional force, when the elastic deformation active force of flexible hinge 4 is more than resistances such as frictional force, rigid frame 2 is switched to by inactive state
Motion state.The displacement measurement of grating scale 05 and displacement transducer 6 can form closed loop as feedback element with linear actuator
Control system, realizes the high-precision motion positioning of rigid frame 2.
Fig. 5 is referred to, is a kind of focus adjustment method schematic flow sheet of the embodiment of the present invention, the side of the embodiment of the present invention
Method includes：
When S1, linear actuator do not drive, platform is in self-locking state；
S2, linear actuator drive nucleus movement workbench, nucleus movement workbench to drive flexible hinge to produce bullet
Property deformation；
When the stiction that driving force is produced with guide rail 1 less than rigid frame 2, step S3 is entered；
When the stiction that driving force is produced with guide rail 1 more than rigid frame 2, step S4 is entered；
S3, nucleus movement workbench 3 produce micro-displacement by the elastic deformation of flexible hinge 4, realize accurate micro- enter
Give, read the displacement of nucleus movement workbench 3, the micro-displacement that elastic deformation is produced is surveyed by the sensor on flexible hinge 06
Amount；
S4, rigid frame 2 produce rigid body displacement, read the displacement of nucleus movement workbench, the position that rigid frame 2 is produced
Move and rigid body displacement is read by the absolute grating ruler 5 on rigid platfor, the micro-displacement that elastic deformation is produced is by flexible hinge
Sensor 6 on chain 4 is measured, and the actual displacement of nucleus movement platform is the superposition of rigid body displacement and elastic deformation displacement.
Further, when the grand micro- precise focusing device of the white light interferometer Z axis causes in high acceleration moving state
Nucleus movement platform 3 relative to rigid frame 2 displacement beyond flexible hinge 4 deflection allowable when, nucleus movement platform 3 with
Rigid frame 2 forms integral rigidity structure and is moved, and the displacement of nucleus movement platform 3 is displacement and the flexibility of rigid frame 2
The superposition of 4 displacement of hinge.
In the embodiment of the present invention, the grand micro- precise focusing device of white light interferometer Z axis can rely on itself bullet using flexible hinge
Property deformation actively adapt to by frictional resistance mutation caused by the switching of friction in pairs state, alleviate frictional resistance mutation and core transported
The rigid shock of moving platform, realizes that continuous dislocation changes, evades friction and " creep " impact of the situation to motion positions precision.Can answer
For big stroke precision Fine Feed, precision higher than mechanical guide mode and micro-nano technology and the electronic manufacture such as lower-cost
Occasion, certainty of measurement are high, easily realize automatic measurement.
Above a kind of grand micro- precise focusing device of white light interferometer Z axis provided by the present invention is described in detail,
Specific case used herein is set forth to the principle of the present invention and embodiment, and the explanation of above example is simply used
The method of the present invention and its core concept is understood in help.It should be pointed out that for those skilled in the art,
Under the premise without departing from the principles of the invention, some improvement and modification can also be carried out to the present invention, these improve and modify
Fall in the protection domain of the claims in the present invention.
Claims (7)
1. the grand micro- precise focusing device of a kind of white light interferometer Z axis, it is characterised in that including line slideway, rigid frame, core
Motion workbench, flexible hinge, sensor, linear actuator and grating scale；Four guide rail is arranged symmetrically, and rigid frame is installed
On guide rail, on rigid frame, nucleus movement workbench is arranged on rigid frame by flexible hinge to absolute grating ruler
Inside frame, on flexible hinge, linear actuator is in the middle part of nucleus movement workbench for sensor.
2. the grand micro- precise focusing device of white light interferometer Z axis as claimed in claim 1, it is characterised in that the linear actuator
For voice coil motor.
3. the grand micro- precise focusing device of white light interferometer Z axis as claimed in claim 1, it is characterised in that the flexible hinge pair
Claim arrangement.
4. the grand micro- precise focusing device of white light interferometer Z axis as claimed in claim 1, it is characterised in that the flexible hinge by
The shell fragment of same thickness is made.
5. a kind of focus adjustment method, it is characterised in that the method is used for operating the claims 1-4 one of them described white lights
The grand micro- precise focusing device of interferometer Z axis, step are as follows：
When S1, linear actuator do not drive, platform is in self-locking state；
S2, linear actuator drive nucleus movement workbench, nucleus movement workbench to drive flexible hinge to produce elasticity change
Shape；
When the stiction that driving force is produced with guide rail less than rigid platfor, step S3 is entered；
When the stiction that driving force is produced with guide rail more than rigid platfor, step S4 is entered；
S3, nucleus movement workbench produce micro-displacement by the elastic deformation of flexible hinge, realize accurate Fine Feed, read
The displacement of nucleus movement workbench；
S4, rigid platfor produce rigid body displacement, read the displacement of nucleus movement workbench.
6. focus adjustment method as claimed in claim 5, it is characterised in that the displacement of nucleus movement workbench is with soft in the S3 steps
Property hinge on sensor measurement.
7. focus adjustment method as claimed in claim 5, it is characterised in that read nucleus movement workbench displacement in the S4 steps
Concrete grammar as follows：
S4-1, the absolute grating ruler on rigid platfor read rigid body displacement；
The micro-displacement that S4-2, the sensor measurement elastic deformation on flexible hinge are produced；
S4-3, the superposition that the actual displacement of nucleus movement workbench is rigid body displacement and elastic deformation displacement.
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| CN201610903674.1A CN106500587A (en) | 2016-10-17 | 2016-10-17 | A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method |
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| CN201610903674.1A CN106500587A (en) | 2016-10-17 | 2016-10-17 | A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465651A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Frictional rigidity switching device and Rigid-flexible Coupled Motion platform and method using it |
| CN109471233A (en) * | 2018-12-26 | 2019-03-15 | 广东工业大学 | A kind of single shaft macro/micromotion device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2904210Y (en) * | 2006-04-12 | 2007-05-23 | 合肥工业大学 | Large travel high-precision 2-D working bench |
| CN101197197A (en) * | 2007-12-26 | 2008-06-11 | 西安交通大学 | Large moving range macro-micro dual drive locating platform |
| CN102501245A (en) * | 2011-11-08 | 2012-06-20 | 湖南大学 | Intermediate branch chain of fully-flexible fine operation platform |
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN202556075U (en) * | 2012-03-05 | 2012-11-28 | 广东工业大学 | Perpendicular shaft macro and micro composite linear motion platform device |
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN106002312A (en) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | Single-driven rigid-flexible coupled precision motion platform as well as realizing method and application thereof |
-
2016
- 2016-10-17 CN CN201610903674.1A patent/CN106500587A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2904210Y (en) * | 2006-04-12 | 2007-05-23 | 合肥工业大学 | Large travel high-precision 2-D working bench |
| CN101197197A (en) * | 2007-12-26 | 2008-06-11 | 西安交通大学 | Large moving range macro-micro dual drive locating platform |
| CN102501245A (en) * | 2011-11-08 | 2012-06-20 | 湖南大学 | Intermediate branch chain of fully-flexible fine operation platform |
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN202556075U (en) * | 2012-03-05 | 2012-11-28 | 广东工业大学 | Perpendicular shaft macro and micro composite linear motion platform device |
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN106002312A (en) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | Single-driven rigid-flexible coupled precision motion platform as well as realizing method and application thereof |
Non-Patent Citations (1)
| Title |
|---|
| 于月民: "《压电式微动机构动力学与仿真分析》", 28 February 2015 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109465651A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Frictional rigidity switching device and Rigid-flexible Coupled Motion platform and method using it |
| CN109465651B (en) * | 2018-11-30 | 2023-11-28 | 广东工业大学 | Friction type rigidity switching device, rigid-flexible coupling motion platform using same and method |
| CN109471233A (en) * | 2018-12-26 | 2019-03-15 | 广东工业大学 | A kind of single shaft macro/micromotion device |
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Application publication date: 20170315 |