CN2904210Y - Large travel high-precision 2-D working bench - Google Patents
Large travel high-precision 2-D working bench Download PDFInfo
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- CN2904210Y CN2904210Y CN 200620072502 CN200620072502U CN2904210Y CN 2904210 Y CN2904210 Y CN 2904210Y CN 200620072502 CN200620072502 CN 200620072502 CN 200620072502 U CN200620072502 U CN 200620072502U CN 2904210 Y CN2904210 Y CN 2904210Y
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Abstract
The long-range high-precision two-dimensional stage is characterized by the adoption of compound magnet-glide guideway, the superposed construction of the top guide face of the two-dimensional stage and the measuring surface of the measuring gratings and the secondary segregation of the driving area and the working area. The utility model can manage either high or low speed movement plus high acceleration, reduce the effects of abbe error, and effectively isolate the positive pressure produced by the poking-claw driver and the effects of the libration on the stage.
Description
Technical field:
The utility model relates to precision optical machinery, the two-dimentional work bench in the precision optical machinery that is applied in nano grade positioning precision of more specifically saying so.
Background technology:
In a lot of application scenarios, need have the two-dimentional work bench of tens of millimeters strokes, nano grade positioning precision.The two-dimentional work bench that satisfies large range high precision adopts sandwich construction and multistage driving mostly, at first is to carry out the elementary driving of the big stroke of motor with the not high step of bearing accuracy, by little driving of piezoelectric ceramics, realizes hi-Fix again.Structurally, often there are 2 layers to 4 layers, to satisfy the needs that different directions displacement and elementary, smart level drive.Such worktable all has bigger spacing between the guide pass and between guide pass and the work top, and Abbe error is not easy control, can't satisfy the requirement of micro-nano measurement and micro-nano processing.
The pull claw type piezoelectric actuator based on the bimodal vibratory drive that Israel produces has interchange, pulse, three kinds of drive patterns of direct current, stroke is very big, and change drive pattern and can realize little driving, can integrate just, essence drives, nearly 2 years Chinese scholars are with the traditional secondary drive pattern of its alternative large stroke and high precision worktable, to simplify the structure of worktable.But from the documents and materials that can find, know, its structure that adopts is that the driver pusher dog is directly acted on movable body is worktable, impose very big normal pressure, the sine wave by 39.6KHz makes the pusher dog head make forward and transverse vibration again, produces the friction force that the actuation movement body moves thus.Therefore adopt above-mentioned direct drive pattern, worktable is stressed very complicated dynamic perfromance, and it has increased the control difficulty of working table movement precision, and the pusher dog head can directly be passed to worktable with vibration, cause the dither of worktable, this is that precision measurement and Precision Machining institute are flagrant.
Summary of the invention:
The utility model is for avoiding above-mentioned existing in prior technology weak point, a kind of large stroke and high precision two-dimentional work bench being provided.In the hope of can simultaneous adaptation high low-speed motion, adapt to high acceleration, reduce the influence of Abbe error and can effectively isolate normal pressure that the pusher dog driver produces and vibration to the influence of worktable.
The technical scheme that the utility model technical solution problem is adopted is:
Design feature of the present utility model is:
A, employing combined-type magnetic float-rail plate, be between the carrying plane of the bottom end face of moving member and guide rail, the same sex is relatively installed bottom permanent magnet pair, keep with the secondary repulsion that forms of described bottom permanent magnet being in contactless state between the carrying plane of the bottom end face of moving member and guide rail, and between the top guide face of moving member and guide rail, form normal pressure; Sidepiece end face with described moving member and guide rail is the sidepiece spigot surface, on the other side end face relative with described sidepiece spigot surface, the same sex is relatively installed sidepiece permanent magnet pair, keep moving member and guide rail to be in contactless state with the secondary repulsion that forms of described sidepiece permanent magnet at this sidepiece end face, and on the sidepiece spigot surface, form normal pressure, measure grating and be fixedly installed on the moving member;
The version that b, the spigot surface that two-dimentional travelling table is set and measurement grating measuring face coincide, described two-dimentional travelling table, comprise the outer box that fixedly installs, box is the inner box that guide rail moves along the one dimension direction in addition, described moving member is to be guide rail with the inner box, and, measure grating and be fixedly installed on the described moving member along moving on its another one dimension direction; Top guide face between the measurement face of described measurement grating, moving member and the inner box, and the top guide face three between inner box and the outer box is on the same plane;
C, be provided with and drive the district and the workspace secondary is isolated, described secondary is isolated and is comprised and drive platform and two-dimentional travelling table is isolated mutually, be arranged on the pusher dog formula driver that drives on the platform and link, between described push rod and worktable, flexible hinge is set by push rod and two-dimentional travelling table.
Compared with the prior art, the beneficial effects of the utility model are embodied in:
1, rail plate guiding accuracy height, and reliable and stable, but because of the existence of force of sliding friction, the driving force of requirement is big, small step can occur creeping when driving at a slow speed; Magnetic suspension guide is to zerofriction force, and the driving force of requirement is little, easily realize small step at a slow speed apart from driving, but guiding accuracy is not high, does not satisfy the demand of high position precision.The utility model is provided with compound guide rail---the maglev type rail plate, still adopt the guided mode of rail plate " face guiding ", guarantee reliable and stable high precision guiding, pass through magnetic buoyancy simultaneously, make spigot surface be in critical contact condition, thereby force of sliding friction is reduced significantly, reduced driving force, also reduced the odds of creeping when driving at a slow speed.Simultaneously, realize magnetic levitation, avoided the influence of electromagnet heating system by permanent magnet.
2,, must make the influence of Abbe error reduce to minimum for satisfying the requirement of nano measurement precision.Because what adopt is the two-dimensional grating measuring system, it is parallel with work top and can not overlap that two-dimensional grating is measured face, and it is zero therefore can't making Abbe error.The utility model is provided with the version of two-dimensional guide face and grating measuring face coplane, and makes the spacing of two-dimensional grating measurement face and work top be minimum, thereby has realized " near Zero-Abbe error ".
3, in the routine techniques, the pull claw type driver is to adopt the mode that directly drives that worktable is driven, and promptly pusher dog directly acts on the movement parts of worktable.This structure produces very big normal pressure because of friction-driven to spigot surface on the one hand, makes guiding accuracy because of wearing and tearing loss fast; The dither of the 39.4KHz that produces when driving on the other hand (amplitude increase along with the gap and increase) can have a strong impact on the stability and the bearing accuracy of service behaviour.The utility model will drive the district and be separately fixed on the different bases with the workspace, drive to distinguish to the displacement transmission bar of workspace to have designed the flexible hinge isolation structure, can effectively reduce the influence of driver vibration to the workspace.
Description of drawings:
Fig. 1 is the utility model structural representation.
Fig. 2 is the low friction slip guide rail structure synoptic diagram of the utility model one-dimensional maglev type.
Number in the figure: 1 moving member, 2 guide rails, 3 top guide faces, 4 bottom permanent magnet pairs, 5 sidepiece spigot surfaces, 6 sidepiece permanent magnet pairs, 7 outer boxes, 8 inner boxs, 9 are measured grating, 10 and are driven platform, 11 pusher dog formula drivers, 12 push rods, 13 flexible hinges, 14 measurement faces.
Below the utility model is described in further detail by embodiment.
Embodiment:
Referring to Fig. 2, adopt combined-type magnetic to float-rail plate in the present embodiment, be between the carrying plane of the bottom end face of moving member 1 and guide rail 2, the same sex is relatively installed bottom permanent magnet pair 4, the repulsion that forms with bottom permanent magnet secondary 4 keeps being in contactless state between the carrying plane of the bottom end face of moving member 1 and guide rail 2, and forms normal pressure between the top guide face 3 of moving member 1 and guide rail 2; Sidepiece end face with moving member 1 and guide rail 2 is a sidepiece spigot surface 5, on the other side end face relative with described sidepiece spigot surface 5, the same sex is relatively installed sidepiece permanent magnet pair 6, the repulsion that forms with sidepiece permanent magnet secondary 6 keeps moving member 1 and guide rail 2 to be in contactless state at this sidepiece end face, and on sidepiece spigot surface 5, form normal pressure, measure grating and be fixedly installed on the moving member 1;
Referring to Fig. 1, Fig. 2, the top guide face of two-dimentional travelling table is set and measures the version that the grating measuring face coincides, wherein, the two dimension travelling table, comprise the outer box 7 that fixedly installs, the inner box 8 that moves along the one dimension direction for guide rail of box 7 in addition, moving member 1 is to be guide rail with inner box 8, and along moving on its another one dimension direction, measures grating 9 and be fixedly installed on the moving member 1; Top guide face between measurement face, moving member 1 and the inner box 8 of measurement grating 9, and the top guide face three between inner box 8 and the outer box 7 is on the same plane.
Referring to Fig. 1, be provided with and drive district and the isolation of workspace secondary, secondary is isolated and is comprised that driving platform 10 isolates mutually with two-dimentional travelling table, is arranged on the pusher dog formula driver 11 that drives on the platform 10 and passes through push rod 12 and two-dimentional travelling table interlock, and flexible hinge 13 is set between push rod 12 and worktable.In concrete the enforcement, the pusher dog formula driver 11 that is the bidimensional setting is respectively by push rod 12 and flexible hinge 13 and outer box 7 and inner box 8 interlocks.In this version, the normal pressure that pull claw type driver 11 produces does not exert an influence to the stress and the kinetic characteristic of two-dimentional work bench; And the holder of the dither major part that when work produces by pusher dog formula driver 11 passes away, and residual vibration is isolated by the flexible hinge of push rod end, thereby the vibration of pusher dog formula driver is reduced to minimum to the influence of system; Flexible hinge can also reduce the influence of non axial driving force to the transfer table motion state except the energy separating vibration.
Shown in Figure 2, in the present embodiment, in bottom permanent magnet pair 4, be in magnet strip in the moving member 1 for fixedly installing, the magnet strip that is in the guide rail 2 is adjustable on height and position, this version, the gap of permanent magnet pair 4 is adjusted, accurately adjusted the position of adjustable magnet, can make spigot surface be in critical contact condition, thereby reduce friction to the influence of movable body motion state creeping when overcoming low-speed motion greatly.
Also can find out by Fig. 2, on the two-dimentional work bench structure of present embodiment, guarantee that top guide face and the measurement face 14 of measuring grating 9 are coplane, reduce the influence of Abbe error thus measuring accuracy and worktable control accuracy.
Claims (1)
1, large stroke and high precision two-dimentional work bench is characterized in that:
A, employing combined-type magnetic float-rail plate, be between the carrying plane of the bottom end face of moving member (1) and guide rail (2), the same sex is relatively installed bottom permanent magnet pair (4), the repulsion that forms with described bottom permanent magnet pair (4) keeps being in contactless state between the carrying plane of the bottom end face of moving member (1) and guide rail (2), and forms normal pressure between the top guide face (3) of moving member (1) and guide rail (2); Sidepiece end face with described moving member (1) and guide rail (2) is sidepiece spigot surface (5), on the other side end face relative with described sidepiece spigot surface (5), the same sex is relatively installed sidepiece permanent magnet pair (6), the repulsion that forms with described sidepiece permanent magnet pair (6) keeps moving member (1) and guide rail (2) to be in contactless state at this sidepiece end face, and, measure grating and be fixedly installed on the moving member (1) in the last normal pressure that forms of sidepiece spigot surface (5);
The version that the measurement face (14) of b, the top guide face that two-dimentional travelling table is set and measurement grating (9) coincides, described two-dimentional travelling table, comprise the outer box (7) that fixedly installs, the inner box (8) that moves along the one dimension direction for guide rail of box (7) in addition, described moving member (1) is to be guide rail with inner box (8), and, measure grating (9) and be fixedly installed on the described moving member (1) along moving on its another one dimension direction; Top guide face between the measurement face (14) of described measurement grating (9), moving member (1) and the inner box (8), and the top guide face three between inner box (8) and the outer box (7) is on the same plane;
C, be provided with and drive the district and the workspace secondary is isolated, described secondary is isolated and is comprised that driving platform (10) isolates mutually with two-dimentional travelling table, be arranged on the pusher dog formula driver (11) that drives on the platform (10) and link, flexible hinge (13) is set between described push rod (12) and worktable by push rod (12) and two-dimentional travelling table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620072502 CN2904210Y (en) | 2006-04-12 | 2006-04-12 | Large travel high-precision 2-D working bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620072502 CN2904210Y (en) | 2006-04-12 | 2006-04-12 | Large travel high-precision 2-D working bench |
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| CN2904210Y true CN2904210Y (en) | 2007-05-23 |
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| CN 200620072502 Expired - Fee Related CN2904210Y (en) | 2006-04-12 | 2006-04-12 | Large travel high-precision 2-D working bench |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102501224A (en) * | 2011-09-30 | 2012-06-20 | 中南大学 | Planar maglev linear-motion platform |
| CN102501227A (en) * | 2011-12-01 | 2012-06-20 | 哈尔滨工业大学 | Flexible hinge positioning device based on differential motion lever principle |
| CN102615542A (en) * | 2012-04-10 | 2012-08-01 | 吉林大学 | Long-travel two-axis linear fast tool servo device |
| CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
| CN103617813A (en) * | 2013-11-22 | 2014-03-05 | 贵州航天南海科技有限责任公司 | Combined five-dimension adjuster |
| CN104022684A (en) * | 2014-06-25 | 2014-09-03 | 哈尔滨工业大学 | Cross-scale driving method of longitudinal-vibration composite-mode foot-type piezoelectric driving device |
| CN104440809A (en) * | 2014-10-29 | 2015-03-25 | 哈尔滨工业大学 | Restoring force constant type plane two-dimension adjusting device for assembling of aero-engine |
| CN106500587A (en) * | 2016-10-17 | 2017-03-15 | 广东工业大学 | A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method |
| CN106672855A (en) * | 2017-01-11 | 2017-05-17 | 合肥工业大学 | Post lift magnetic levitation synchronous guiding and state monitoring device and method |
-
2006
- 2006-04-12 CN CN 200620072502 patent/CN2904210Y/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102501224B (en) * | 2011-09-30 | 2016-01-27 | 中南大学 | A kind of planar maglev linear-motion platform |
| CN102501224A (en) * | 2011-09-30 | 2012-06-20 | 中南大学 | Planar maglev linear-motion platform |
| CN102501227A (en) * | 2011-12-01 | 2012-06-20 | 哈尔滨工业大学 | Flexible hinge positioning device based on differential motion lever principle |
| CN102501227B (en) * | 2011-12-01 | 2014-01-22 | 哈尔滨工业大学 | Flexible hinge positioning device based on differential motion lever principle |
| CN102615542A (en) * | 2012-04-10 | 2012-08-01 | 吉林大学 | Long-travel two-axis linear fast tool servo device |
| CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
| CN103252761B (en) * | 2013-04-28 | 2015-11-11 | 合肥工业大学 | There is the Long Distances two-dimensional nano work system of angle compensation function |
| CN103617813A (en) * | 2013-11-22 | 2014-03-05 | 贵州航天南海科技有限责任公司 | Combined five-dimension adjuster |
| CN104022684A (en) * | 2014-06-25 | 2014-09-03 | 哈尔滨工业大学 | Cross-scale driving method of longitudinal-vibration composite-mode foot-type piezoelectric driving device |
| CN104440809A (en) * | 2014-10-29 | 2015-03-25 | 哈尔滨工业大学 | Restoring force constant type plane two-dimension adjusting device for assembling of aero-engine |
| CN106500587A (en) * | 2016-10-17 | 2017-03-15 | 广东工业大学 | A kind of grand micro- precise focusing device of white light interferometer Z axis and its focus adjustment method |
| CN106672855A (en) * | 2017-01-11 | 2017-05-17 | 合肥工业大学 | Post lift magnetic levitation synchronous guiding and state monitoring device and method |
| CN106672855B (en) * | 2017-01-11 | 2019-04-09 | 合肥工业大学 | A kind of post lift magnetic suspension synchronization steering and state monitoring apparatus and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070523 Termination date: 20120412 |