CN102501227B - Flexible hinge positioning device based on differential motion lever principle - Google Patents
Flexible hinge positioning device based on differential motion lever principle Download PDFInfo
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- CN102501227B CN102501227B CN201110393208.0A CN201110393208A CN102501227B CN 102501227 B CN102501227 B CN 102501227B CN 201110393208 A CN201110393208 A CN 201110393208A CN 102501227 B CN102501227 B CN 102501227B
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Abstract
The invention discloses a flexible hinge positioning device based on a differential motion lever principle, which relates to a big-stroke high-resolution micro-driving positioning device so as to overcome the defect that the traditional flexible hinge positioning platform is difficult to achieve high resolution under the big stroke. A first lever, a second lever, a first input platform, a second input platform and an output platform are all arranged on a lever actuating cavity; the first lever and the inner wall of a lever shell are connected by a first flexible hinge; the first input platform and the first lever are connected by a second flexible hinge; the second lever and the first input platform are connected by a third flexible hinge; the second input platform and the second lever are connected by a fourth flexible hinge; the output platform and the second lever are connected by a fifth flexible hinge; the output platform and the inner wall of the lever shell are connected by a sixth flexible hinge and two seventh flexible hinges; a first actuator drives the first input platform; and a second actuator drives the second input platform. The flexible hinge positioning device is used for precisely positioning the submillimeter-grade moving stroke.
Description
Technical field
The present invention relates to the micro-driving positioner of a kind of large stroke high-resolution.
Background technology
Along with the fast development of micro-/ nano technology, in the high-tech sectors such as milli machine Assembly of the parts, MEMS (MEMS) assembling, cell manipulation, precision optics, in the urgent need to thering is the micro-driving positioner of large stroke high-resolution.The most series connection lever principles that adopt of this class positioner, by multi-grade lever mechanisms in series, amplify to reach output area requirement step by step to input displacement at present.Locating platform based on this principle, is coordinating to exist bottleneck problem aspect large stroke and high-resolution.Because series connection lever principle only has an input, by the amplification of this input is reached to required stroke range.When stroke and resolution ratio one timing of input actuator, after the amplification of series connection lever, its stroke and resolution value are exaggerated same multiple, that is to say that the quality of resolution ratio declines along with the increase of stroke.In addition, itself feature of series connection lever principle, also causes the volume of locating platform large, rigidity is low.
Summary of the invention
The object of the invention is to overcome current flexible hinge locating platform and have under large stroke that high-resolution is more difficult to be reached, and the shortcoming that volume is large, rigidity is low, a kind of flexible hinge positioner based on differential lever principle is provided.
The inventive system comprises lever, the first lever, the second lever, the first input platform, the second input platform, output stage, the first actuator, the second actuator, the first trip bolt and the second trip bolt, described lever is provided with penetrating lever chamber, front and back, the first lever is arranged on the lower left in lever chamber, and the lower surface of the first lever is connected by the first flexible hinge with the lever inwall corresponding with it, the first input platform is arranged on the top of the first lever, and the lower surface of the first input platform is connected by the second flexible hinge with the upper surface of the first lever corresponding with it, the second lever is arranged on the upper right side in lever chamber, and the upper surface of the lower surface of the second lever and first lever corresponding with it is connected by the 3rd flexible hinge, the second input platform is arranged on the lower left of the second lever, and the upper surface of the second input platform is connected by the 4th flexible hinge with the lower surface of the second lever corresponding with it, output stage is arranged on the lower right of the second lever, and the lower surface of the upper surface of output stage and second lever corresponding with it is connected by the 5th flexible hinge, the left end face of output stage is connected by the 6th flexible hinge with the lever inwall corresponding with it, the its right end face of output stage is connected by two the 7th flexible hinges with the lever inwall corresponding with it, the first actuator is arranged in lever chamber and is arranged on the upper surface of the first input platform, the end of thread end face of the first trip bolt withstands on the first actuator, the second actuator is arranged in lever chamber and is arranged on the place, lower surface of the second input platform, the end of thread end face of the second trip bolt withstands on the second actuator, the first trip bolt and the second trip bolt are all threaded with lever, the front/rear end of output stage is provided with two external loading connecting holes.
Advantage of the present invention is: due to flexible hinge can realize gapless, without frictional drive, and the first lever of the present invention is all connected by flexible hinge with lever with output stage and output stage 6 with the second input platform, the second lever with the first lever, the second lever with the first input platform, the second lever with lever, the first lever, therefore, apparatus of the present invention adopt flexible hinge as kinematic pair, utilize the first actuator and the second actuator double piezoelectric ceramic to drive, thereby realize differential lever drive.The present invention is through experiment test, and stroke reaches 250 μ m, and resolution ratio reaches 10nm.Therefore, the present invention possesses the advantages such as stroke is large, resolution ratio is high, rigidity is high, compact conformation.
Accompanying drawing explanation
Fig. 1 is the main cutaway view of the overall structure of apparatus of the present invention, and Fig. 2 is the structural representation of circular flexible hinge, and Fig. 3 is the structural representation of Performance of Right-Angle Flexure Hinge, and Fig. 4 is the overall structure stereogram (in figure, M is the rear end face of lever 1) of apparatus of the present invention.
The specific embodiment
The specific embodiment one: present embodiment is described in conjunction with Fig. 1～Fig. 4, present embodiment comprises lever 1, the first lever 2, the second lever 3, the first input platform 4, the second input platform 5, output stage 6, the first actuator 14, the second actuator 15, the first trip bolt 16 and the second trip bolt 17, lever 1 is provided with the penetrating lever chamber 1-1 in front and back, the first lever 2 is arranged on 1-1Nei lower left, lever chamber, and the lower surface of the first lever 2 is connected by the first flexible hinge 7 with lever 1 inwall corresponding with it, the first input platform 4 is arranged on the top of the first lever 2, and the lower surface of the first input platform 4 is connected by the second flexible hinge 8 with the upper surface of the first lever 2 corresponding with it, the second lever 3 is arranged on 1-1Nei upper right side, lever chamber, and the upper surface of the lower surface of the second lever 3 and first lever 2 corresponding with it is connected by the 3rd flexible hinge 9, the second input platform 5 is arranged on the lower left of the second lever 3, and the upper surface of the second input platform 5 is connected by the 4th flexible hinge 10 with the lower surface of the second lever 3 corresponding with it, output stage 6 is arranged on the lower right of the second lever 3, and the lower surface of the upper surface of output stage 6 and second lever 3 corresponding with it is connected by the 5th flexible hinge 11, the left end face of output stage 6 is connected by the 6th flexible hinge 12 with lever 1 inwall corresponding with it, the its right end face of output stage 6 is connected by two the 7th flexible hinges 13 with lever 1 inwall corresponding with it, the first actuator 14 is arranged in the 1-1 of lever chamber and is arranged on the upper surface of the first input platform 4, the end of thread end face of the first trip bolt 16 withstands on the first actuator 14, the second actuator 15 is arranged in the 1-1 of lever chamber and is arranged on the place, lower surface of the second input platform 5, the end of thread end face of the second trip bolt 17 withstands on the second actuator 15, the first trip bolt 16 and the second trip bolt 17 are all threaded with lever 1, the front/rear end of output stage 6 is provided with two external loading connecting hole 6-1.The first actuator 14 and the second actuator 15 all adopt the Pst150/10 * 10 type actuator of PI company, are Piezoelectric Ceramic.The appearance and size of lever 1 is 80mm * 60mm * 20mm (length * wide * height).
The specific embodiment two: present embodiment is described in conjunction with Fig. 2 and Fig. 3, the first flexible hinge 7, the second flexible hinge 8, the 3rd flexible hinge 9, the 4th flexible hinge 10 and the 5th flexible hinge 11 of present embodiment are circular flexible hinge, and the 6th flexible hinge 12 and the 7th flexible hinge 13 are Performance of Right-Angle Flexure Hinge.Input running part adopts circular flexible hinge in the present invention, and output running part adopts Performance of Right-Angle Flexure Hinge, can guarantee that like this running part has enough rigidity, and output has enough plastic deformation abilities.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment three: present embodiment is described in conjunction with Fig. 2 and Fig. 3, the radius R of the circular flexible hinge of present embodiment is 0.3mm～1.0mm, the thickness s of circular flexible hinge thinnest part is 0.2mm～1.5mm, the thickness h of described Performance of Right-Angle Flexure Hinge is 0.2mm～0.5mm, and each right angle length of side f of Performance of Right-Angle Flexure Hinge is 2.0mm～5.0mm.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment four: present embodiment is described in conjunction with Fig. 2 and Fig. 3, the radius R of the circular flexible hinge of present embodiment is 0.5mm, the thickness s of circular flexible hinge thinnest part is 0.5mm, the thickness h of described Performance of Right-Angle Flexure Hinge is 0.3, and each right angle length of side f of described Performance of Right-Angle Flexure Hinge is 3.0mm.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment five: in conjunction with Fig. 4, present embodiment is described, the thickness of the first lever 2 of present embodiment, the second lever 3, the first input platform 4 and the second input platform 5 all equates, the thickness of output stage 6 be the first lever 2 thickness 1/20～1/4.The thickness of output stage 6 is less than the thickness of the first lever 2 and the second lever 3, is designed to like this guarantee that the transmission stiffness of output stage 6 is less than the rigidity of the first lever 2 and the second lever 3 running parts.Other composition and annexation are identical with the specific embodiment one.
Operation principle of the present invention:
First the first actuator 14 is connected with power supply respectively with the second actuator 15, two external loading connecting hole 6-1 are connected with external loading respectively;
When only having the first actuator 14 to drive, its operation principle is: under power supply effect, the first actuator 14 extends, promoting the first input platform 4 moves downward, by the second flexible hinge 8, the first lever 2 is clockwise rotated around the first flexible hinge 7, by the 3rd flexible hinge 9, drive the second lever 3 to rotate counterclockwise around the 4th flexible hinge 10 simultaneously, when moving upward, the right-hand member of the second lever 3 drives upwards moving linearly of output stage 6 by the 5th flexible hinge 11, there is strain in the 6th flexible hinge 12 and the 7th flexible hinge 13 now, output stage 6 drives external loading motion, thereby realize load precision positioning.
When only having the second actuator 15 to drive, its operation principle is: under power supply effect, the second actuator 15 extends, promoting the second input platform 5 moves upward, by the 4th flexible hinge 10, the second lever 3 is rotated counterclockwise around the 3rd flexible hinge 9, when moving upward, the right-hand member of the second lever 3 drives upwards moving linearly of output stage 6 by the 5th flexible hinge 11, there is strain in the 6th flexible hinge 12 and the 7th flexible hinge 13 now, output stage 6 drives external loading motion, thereby realizes load precision positioning.
When the first actuator 14 and the second actuator 15 all drive, its operation principle is their the work independently stack of principle.
Claims (5)
1. the flexible hinge positioner based on differential lever principle, described device comprises lever (1), the first lever (2), the second lever (3), the first input platform (4), the second input platform (5), output stage (6), the first actuator (14), the second actuator (15), the first trip bolt (16) and the second trip bolt (17), it is characterized in that: described lever (1) is provided with penetrating lever chamber (1-1), front and back, the first lever (2) is arranged on the lower left in lever chamber (1-1), and the lower surface of the first lever (2) is connected by the first flexible hinge (7) with lever (1) inwall corresponding with it, the first input platform (4) is arranged on the top of the first lever (2), and the lower surface of the first input platform (4) is connected by the second flexible hinge (8) with the upper surface of the first lever (2) corresponding with it, the second lever (3) is arranged on the upper right side in lever chamber (1-1), and the upper surface of the lower surface of the second lever (3) and first lever (2) corresponding with it is connected by the 3rd flexible hinge (9), the second input platform (5) is arranged on the lower left of the second lever (3), and the upper surface of the second input platform (5) is connected by the 4th flexible hinge (10) with the lower surface of the second lever (3) corresponding with it, output stage (6) is arranged on the lower right of the second lever (3), and the lower surface of the upper surface of output stage (6) and second lever (3) corresponding with it is connected by the 5th flexible hinge (11), the left end face of output stage (6) is connected by the 6th flexible hinge (12) with lever (1) inwall corresponding with it, the its right end face of output stage (6) is connected by two the 7th flexible hinges (13) with lever (1) inwall corresponding with it, the first actuator (14) is arranged in lever chamber (1-1) and is arranged on the upper surface of the first input platform (4), the end of thread end face of the first trip bolt (16) withstands on the first actuator (14), the second actuator (15) is arranged in lever chamber (1-1) and is arranged on the place, lower surface of the second input platform (5), the end of thread end face of the second trip bolt (17) withstands on the second actuator (15), the first trip bolt (16) and the second trip bolt (17) are all threaded with lever (1), the front/rear end of output stage (6) is provided with two external loading connecting holes (6-1).
2. the flexible hinge positioner based on differential lever principle according to claim 1, it is characterized in that: described the first flexible hinge (7), the second flexible hinge (8), the 3rd flexible hinge (9), the 4th flexible hinge (10) and the 5th flexible hinge (11) are circular flexible hinge, described the 6th flexible hinge (12) and the 7th flexible hinge (13) are Performance of Right-Angle Flexure Hinge.
3. the flexible hinge positioner based on differential lever principle according to claim 2, it is characterized in that: the radius of described circular flexible hinge (R) is 0.3mm～1.0mm, the thickness (s) of circular flexible hinge thinnest part is 0.2mm～1.5mm, the thickness of described Performance of Right-Angle Flexure Hinge (h) is 0.2mm～0.5mm, and each right angle length of side (f) of described Performance of Right-Angle Flexure Hinge is 2.5mm～3.0mm.
4. the flexible hinge positioner based on differential lever principle according to claim 3, it is characterized in that: the radius of described circular flexible hinge (R) is 0.5mm, the thickness (s) of circular flexible hinge thinnest part is 0.5mm, the thickness of described Performance of Right-Angle Flexure Hinge (h) is 0.3, and each right angle length of side (f) of described Performance of Right-Angle Flexure Hinge is 3.0mm.
5. according to the flexible hinge positioner based on differential lever principle described in claim 1 or 2 or 3, it is characterized in that: the thickness of described the first lever (2), the second lever (3), the first input platform (4) and the second input platform (5) is all equal, the thickness of described output stage (6) be the first lever (2) thickness 1/20～1/4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110393208.0A CN102501227B (en) | 2011-12-01 | 2011-12-01 | Flexible hinge positioning device based on differential motion lever principle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110393208.0A CN102501227B (en) | 2011-12-01 | 2011-12-01 | Flexible hinge positioning device based on differential motion lever principle |
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| CN102501227A CN102501227A (en) | 2012-06-20 |
| CN102501227B true CN102501227B (en) | 2014-01-22 |
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| CN201110393208.0A Expired - Fee Related CN102501227B (en) | 2011-12-01 | 2011-12-01 | Flexible hinge positioning device based on differential motion lever principle |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104786206B (en) * | 2015-04-07 | 2016-10-26 | 广州番禺职业技术学院 | Compliant mechanism precisely locating platform |
| US10184607B2 (en) * | 2016-05-18 | 2019-01-22 | Aerotech, Inc. | Open frame, parallel, two axis flexure stage with yaw compensation |
| CN106812786B (en) * | 2017-03-01 | 2023-08-29 | 华侨大学 | single degree of freedom flexible hinge |
| CN106763142B (en) * | 2017-03-01 | 2023-06-20 | 华侨大学 | Single-degree-of-freedom flexible hinge with self-locking function |
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