CN102501245A - Intermediate branch chain of fully-flexible fine operation platform - Google Patents

Abstract

The invention discloses a middle branch chain of a fully flexible micro-operation platform. The middle part of the middle branch chain is provided with a four-degree-of-freedom flexible hinge, and the four-degree-of-freedom flexible hinge includes an upper connecting ring, a lower connecting ring and a central column; There is a three-branched Y-shaped connecting piece in the connecting ring. The three branches of the Y-shaped connecting piece are all arranged on the same horizontal plane. The first branch is arranged along the x-axis, the second branch is arranged along the y-axis, and the third branch is arranged along the x-axis. Arranged in a direction of 135 degrees; the lower coupling ring is equipped with three radial sheet beams evenly distributed along the circumference; the three radial sheet beams are all installed at the lower end of the center column, and the upper end of the center column is connected to the Y-shaped coupling piece. bottom surface. The middle branch chain of the fully flexible micro-operation platform has a fully-flexible joint with 4 degrees of freedom, which can avoid rigid collision and damage of the fully-flexible micro-operation platform.

Description

The middle branch of the fully flexible micro-operating platform

technical field

The invention relates to an intermediate branch chain of a fully flexible micro-operation platform.

Background technique

Micromanipulation technology is one of the key technologies for precision instruments and precision machinery to achieve high precision. It has been widely used in multidisciplinary fields such as microsurgery, micromachining, optical fiber docking, and microelectromechanical system assembly. The micromanipulation platform is used to carry the operation object during micromanipulation, so that the micromanipulation end effector can perform specific operations on the operation object on it to complete the specified task.

The existing micro-operations are all based on open-loop control. Some scholars at home and abroad have designed a variety of flexible parallel robots to perform multi-degree-of-freedom movements and rotations at the micron or even nanometer level, and have a number of related patented technologies, such as: a three-dimensional Branched six-degree-of-freedom parallel flexible hinge micro-motion mechanism (Chinese patent: CN200610151113.7), six-degree-of-freedom macro/micro dual-drive nanoscale positioning and large-stroke flexible parallel robot (Chinese patent: CN 200410013627.7), six-degree-of-freedom large-stroke, High-precision flexible parallel robot (Chinese patent: CN200410013628.1), but the main problems of these existing technologies are complex structure, no feedback of force/torque related information, and limited by the precision of microscopic equipment, so it is difficult to ensure microscopic Operational accuracy and reliability requirements. In addition, the traditional micro-manipulation end effector usually has no real-time feedback link during the operation process, so it is prone to rigid collisions, causing destructive effects on the operated object and the system.

The middle branch chain is the core support component of the fully flexible micro-manipulation platform, so it is necessary to design a new middle branch chain with fully flexible joints.

Contents of the invention

The technical problem to be solved by the present invention is to provide a middle branch chain of a fully flexible micro-operation platform. The middle branch chain of the fully-flexible micro-operation platform has fully flexible joints, which can avoid rigid collision and damage of the fully-flexible micro-operation platform.

The technical solution of the invention is as follows:

A middle branch chain of a fully flexible micro-operation platform, the middle part of the middle branch chain is provided with a four-degree-of-freedom flexible hinge, and the four-degree-of-freedom flexible hinge includes an upper connecting ring, a lower connecting ring and a central column;

There is a Y-shaped connecting piece with three branches in the upper connecting ring. The three branches of the Y-shaped connecting piece are all arranged on the same horizontal plane. The first branch is arranged along the x-axis, the second branch is arranged along the y-axis, and the third branch is arranged along the x-axis. The axis is arranged in a direction of 135 degrees;

The lower coupling ring is provided with three radial sheet beams evenly distributed along the circumference; the three radial sheet beams are installed at the lower end of the central column, and the upper end of the central column is connected to the bottom surface of the Y-shaped coupling piece.

Three strain gauges are arranged on the Y-shaped connecting piece, and one strain gauge is arranged on each radial sheet beam.

Both ends of the middle branch are provided with conical threads.

The fully flexible micro-operating platform includes a mobile platform, a fixed platform, a group of middle branch chains and at least three groups of identical side branch chains;

The middle branch chain is arranged vertically, and the upper end of the middle branch chain is connected to the geometric center of the mobile platform; the lower end of the middle branch chain is connected to the geometric center of the fixed platform.

Beneficial effect:

Aiming at the defects of related existing technologies at home and abroad, the present invention proposes a middle branch chain of a fully flexible micro-operation platform. While the fully flexible micro-operation platform carries the operation object, the middle branch chain can provide appropriate elastic deformation of the corresponding four degrees of freedom. , to avoid the rigid collision of the end effector in the process of operation and cause destructive effects on the operating object and system, so as to achieve mechanical flexible operation.

The intermediate branch chain of the present invention has simple structure, good operation accuracy and reliability, and excellent dynamic performance.

In specific applications, the operating object is supported on the mobile platform. When the operator performs fine manipulations on the operating object, the surface of the force-sensitive element on each flexible hinge in the middle branch will undergo a corresponding strain, and the strain on the elastic element will The sheet will also produce a change in resistance value corresponding to the strain. This change in resistance value can be amplified, calibrated and decoupled to obtain the force and moment applied to the mobile platform, as follows:

The strain gauge on the first branch of the Y-shaped connecting piece is used to detect the force Fx on the moving platform along the x direction, and the strain gauge on the second branch is used to detect the force Fy on the moving platform along the y direction. The strain gauges on the three branches are used to detect the force Fz along the z direction on the moving platform;

The strain gauges on the three radial sheet beam members in the lower coupling ring are used to detect the torque Mz along the z-axis direction on the moving platform, and provide necessary information for the real-time feedback and control of the operating system to achieve Flexible assembly in terms of control.

After the operation is completed, since there is no operating force acting on the mobile platform and each flexible hinge, each flexible hinge returns to its original shape.

In general, the intermediate branch chain of the present invention, as the key support branch chain of the fully flexible micro-operation platform, can effectively prevent damage and rigid collision caused by improper operation, provide quantitative force and torque information for the control system, and provide feedback Control provides data support. Because the present invention can simultaneously realize the flexible operation of the mechanical and control aspects, it can make the fine operation achieve extremely high precision (the precision can reach the micron level) and extremely high reliability.

Description of drawings

Fig. 1 is a schematic structural diagram of the micro-operation platform of the present invention.

Fig. 2 is a schematic diagram of the flexible ball hinge used in the side branch chain of the micro operation platform.

Fig. 3 is a schematic diagram of the flexible movable hinge used in the side branch chain of the micro operation platform.

Fig. 4 is a schematic diagram of a four-degree-of-freedom flexible hinge used in the middle branch of the micro-operation platform.

Explanation of symbols: 1-fixed platform, 2-flexible ball hinge of side branch chain, 3-flexible movable hinge, 4-four degrees of freedom flexible hinge used in middle branch chain, 5-middle branch chain; 6-mobile platform, 7 - Side branches;

Detailed ways

The present invention will be described in further detail below in conjunction with accompanying drawing and specific embodiment:

Example 1:

As shown in Figure 1 and Figure 4, the middle part of the middle branch is provided with a four-degree-of-freedom flexible hinge, and the four-degree-of-freedom flexible hinge includes an upper coupling ring, a lower coupling ring and a central column;

There is a Y-shaped connecting piece with three branches in the upper connecting ring. The three branches of the Y-shaped connecting piece are all arranged on the same horizontal plane. The first branch is arranged along the x-axis, the second branch is arranged along the y-axis, and the third branch is arranged along the x-axis. The axis is arranged in a direction of 135 degrees;

The lower coupling ring is provided with three radial sheet beams evenly distributed along the circumference; the three radial sheet beams are installed at the lower end of the central column, and the upper end of the central column is connected to the bottom surface of the Y-shaped coupling piece.

Both ends of the middle branch are provided with conical threads.

As shown in Figure 1-4, a fully flexible six-degree-of-freedom micro-manipulation platform based on the middle branch chain, including a mobile platform, a fixed platform, a set of the aforementioned middle branch chains and at least three sets of the same side branch chains;

The side branch chains are vertically arranged, and the side branch chains are evenly arranged between the mobile platform and the fixed platform in the circumferential direction relative to the middle branch chain;

The middle branch chain is arranged vertically, the upper end of the middle branch chain is connected to the geometric center of the mobile platform; the lower end of the middle branch chain is connected to the geometric center of the fixed platform;

Each side branch is provided with a flexible ball hinge at both ends, and the middle of each side branch is provided with a flexible movable hinge;

The flexible movable hinge is composed of an upper connecting column, a lower connecting column, an upper support for supporting the upper part of the flexible movable hinge and a lower support for connecting the lower end of the flexible movable hinge. It is composed of horse-nail beams at 90 degrees, and a hollow cross-shaped member is formed at the joint of the upper support and the lower support; (among the four single arms that constitute the cross-shaped member, the adjacent two single arms form a whole A part of the upper support, and the other two single arms form a whole to become a part of the lower support.) The upper support and the lower support are respectively connected with the upper connecting column and the lower connecting column.

The flexible ball hinge includes an upper connecting ring and a lower connecting ring, the upper connecting ring and the lower connecting ring are respectively located at the upper end and the lower end of the flexible ball hinge; the upper connecting ring and the lower connecting ring are connected by three axial ribs, and the upper connecting ring There are two shuttle-shaped through grooves in the direction of the x-axis on the upper part, and two shuttle-shaped through-grooves in the direction of the y-axis are arranged on the lower connecting ring.

The outer ends of the upper connecting ring and the lower connecting ring are provided with conical internal threads; the upper connecting column and the lower connecting column are provided with conical external threads; the conical internal threads are compatible with the conical external threads.

Three strain gauges are arranged on the Y-shaped connecting piece, two strain gauges are arranged on each cross-shaped member, and one strain gauge is arranged on each radial sheet beam.

There are three groups of side branches.

The strain gauges on the cross-shaped members of the flexible moving hinges in the three side branch chains are used to detect the tensile pressure [F1, F2, F3] on the branch chain respectively. According to the obtained tensile pressure [F1, F2, F3 ] and the force Jacobian matrix J to calculate the moments Mx, My and Mz of the mobile platform along the x, y and z axes:

$\left[\begin{array}{c}\mathrm{<span\; class="notranslate">\; Mx</span>}\\ \mathrm{<span\; class="notranslate">\; My</span>}\\ \mathrm{<span\; class="notranslate">\; Mz</span>}\end{array}\right]<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; J</span>}\left[\begin{array}{c}{\mathrm{<span\; class="notranslate">\; f</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}\\ {\mathrm{<span\; class="notranslate">\; f</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}\\ {\mathrm{<span\; class="notranslate">\; <figure-callout\; id="3"\; label="f"\; filenames="HDA0000106538150000011.png"\; state="\{\{state\}\}">f</figure-callout></span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}\end{array}\right]<span\; class="notranslate">\; =</span>\left[\begin{array}{ccc}{\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 12</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 13</span>}}\\ {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; one</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; two</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; three</span>}}\\ {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 31</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 32</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 33</span>}}\end{array}\right]\left[\begin{array}{c}{\mathrm{<span\; class="notranslate">\; f</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}\\ {\mathrm{<span\; class="notranslate">\; f</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}\\ {\mathrm{<span\; class="notranslate">\; <figure-callout\; id="3"\; label="f"\; filenames="HDA0000106538150000011.png"\; state="\{\{state\}\}">f</figure-callout></span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}\end{array}\right]$

Among them, the force Jacobian matrix J is calculated based on the structure and geometric dimensions of the fully flexible six-degree-of-freedom micro-manipulation platform according to the principles of robotics.

${\mathrm{<span\; class="notranslate">\; J</span>}}^{\mathrm{<span\; class="notranslate">\; T</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; AB</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; A</span>}\left[\begin{array}{c}{\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; the\; s</span>}}\\ {\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; \&times;</span>\mathrm{<span\; class="notranslate">\; 3</span>}}\end{array}\right]<span\; class="notranslate">\; =</span>\left[\begin{array}{cccccc}{\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 12</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 13</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 14</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 15</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 16</span>}}\\ {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; one</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; two</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; three</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; four</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 25</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 26</span>}}\\ {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 31</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 32</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 33</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 34</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 35</span>}}& {\mathrm{<span\; class="notranslate">\; A</span>}}_{\mathrm{<span\; class="notranslate">\; 36</span>}}\end{array}\right]\left[\begin{array}{ccc}{\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}& {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; 12</span>}}& {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; 13</span>}}\\ {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; one</span>}}& {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; two</span>}}& {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; three</span>}}\\ {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; 31</span>}}& {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; 32</span>}}& {\mathrm{<span\; class="notranslate">\; B</span>}}_{\mathrm{<span\; class="notranslate">\; 33</span>}}\\ \mathrm{<span\; class="notranslate">\; 1</span>}& \mathrm{<span\; class="notranslate">\; 0</span>}& \mathrm{<span\; class="notranslate">\; 0</span>}\\ \mathrm{<span\; class="notranslate">\; 0</span>}& \mathrm{<span\; class="notranslate">\; 1</span>}& \mathrm{<span\; class="notranslate">\; 0</span>}\\ \mathrm{<span\; class="notranslate">\; 0</span>}& \mathrm{<span\; class="notranslate">\; 0</span>}& \mathrm{<span\; class="notranslate">\; 1</span>}\end{array}\right]<span\; class="notranslate">\; =</span>\left[\begin{array}{ccc}{\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 12</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 13</span>}}\\ {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; one</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; two</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; twenty\; three</span>}}\\ {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 31</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 32</span>}}& {\mathrm{<span\; class="notranslate">\; J</span>}}_{\mathrm{<span\; class="notranslate">\; 33</span>}}\end{array}\right]$

Among them, A is a matrix of 3 rows and 6 columns, which is the velocity Jacobian matrix of the fully flexible six-degree-of-freedom micro-manipulation platform when the intermediate branch is not considered, and B is composed of Js and an identity matrix of 3 rows and 3 columns, where Js is the velocity Jacobian matrix of the fully flexible six-degree-of-freedom micro-manipulation platform without considering the external branch chain.

Calculate the torque Mx, My and Mz of the mobile platform along the x, y and z axes according to the obtained tension force [F1, F2, F3] and the force Jacobian matrix J. This is the prior art, see References: The author of the paper: Joshi , S., Lung-Wen Tsai. Title of the paper: A comparison study of two 3-DOF parallel manipulators: one with three and the other with four supporting legs Journal: IEEE Transactions on Robotics and Automation, Volume: 19 Issue: 2, Publication time: April 2003.

Referring to Figure 1, the mobile platform is used to support the manipulated object for micro-manipulation, and the micro-manipulation robot arm operates on the manipulated object, such as optical fiber docking, micro-electro-mechanical system assembly, etc. The middle branch chain in the middle position is connected with the fixed platform, and the three groups of the same side branch chains are composed of a flexible moving hinge in the middle and a flexible ball hinge at both ends connected by a taper thread pair, and the middle branch chain is composed of four degrees of freedom in the middle. The flexible hinge is composed of a cylinder with conical external threads at both ends, and is connected with the conical internal threads on the mobile platform and the fixed platform through the conical external threads at both ends.

In Figure 2, 2-1 is the two shuttle-shaped slots of the flexible ball hinge along the x-axis direction (actually, it is a shuttle-shaped slot curved along the arc surface, and the specific processing method of the shuttle-shaped slot is: 1) Cut from top to bottom on the vertical cylinder wall to form the first secant line, 2) then cut from bottom to top on the vertical cylinder wall to form the second secant line, the two secant lines are aligned left and right, A shuttle-shaped channel is formed, and there is a smooth transition between the left and right sides of the two secant lines [that is, the left and right ends of the shuttle-shaped channel]. ), 2-2 is the three axial ribs evenly distributed along the circumference of the flexible ball hinge, 2-3 is the upper connecting ring of the flexible ball hinge with conical internal thread, 2-4 is the two ribs of the flexible ball hinge along the y-axis direction Shuttle type through groove, 2-5 is the lower connecting ring of flexible ball hinge band conical internal thread.

The goal of adopting the shuttle-shaped channel structure is to allow the structure to have one and only one rotational degree of freedom.

2-1 can make the flexible ball hinge rotate around the x-axis, 2-2 can make the flexible ball hinge rotate around the z-axis, 2-3 and 2-5 are used to connect with the mobile platform or fixed platform, 2-4 can make the flexible The ball hinge 2 rotates around the y-axis.

In Fig. 3, 3-1 is the flexible moving hinge lower connecting column with conical external thread, and 3-2 is the lower support that two horse nail type (i.e. semi-square frame) beams forming 90 degrees each other, 3- 3 is a hollow cross-shaped member [it can also be understood as two parallel cross-shaped pieces connected, and there is a certain gap between the two parallel cross-shaped pieces. 】Constitute a parallel mechanism, which is used to make the mechanism have a degree of freedom of movement. At the same time, strain gauges are pasted on the cross-shaped member to detect the tensile pressure on the flexible moving hinge. 3-4 are pasted on the cross-shaped member. The first strain gauge, 3-5 is the upper support that two horse nail beams forming 90 degrees each other. 3-6 is the upper connection column of the flexible mobile hinge with conical external thread.

The cross-shaped member can enable the flexible movable hinge to move relative to the axial direction of the mechanism, and the lower support and the upper support are connected with the lower connecting column and the upper connecting column respectively (the first strain gauge can detect the movement of the flexible movable hinge when it deforms. Axial tension or compression).

In Fig. 4, 4-1 is three radial sheet beams evenly distributed on the circumference, 4-2 is a three-branch Y-shaped connecting piece, the first branch of which is arranged along the x-axis, and the second branch is arranged along the y-axis, The third axis is arranged along the direction of 135 degrees to the x-axis, 4-3 is the second strain gauge pasted on 4-2, 4-4 is the upper coupling ring with conical external thread, 4-5 is the upper coupling ring with conical external thread The lower connecting ring of the thread, 4-6 is the third strain gauge pasted on the radial sheet beam.

The middle branch chain is actually composed of three parts, the main one is the four-degree-of-freedom flexible hinge in the middle, and it also includes a cylinder with a conical internal thread at one end and a conical external thread at one end. The degrees of freedom are connected with flexible hinges, and the cylindrical conical external thread is connected with the conical internal thread at the center of the moving platform and the fixed platform.

Three pieces of radial sheet beams can make the four degrees of freedom flexible hinge rotate around the z-axis, Y-shaped joints can make the four-degrees of freedom flexible hinge move along the z-axis, rotate around the x-axis and y-axis, and the second strain gauge can detect The force along the z-axis and the torque around the x-axis and y-axis of the four-degree-of-degree flexible hinge when deformation occurs. The four-degree-of-degree flexible hinge is connected to the middle branch chain through the upper connecting ring and the lower connecting ring. The three-piece diameter A third strain gauge on the sheet beam member can sense the moment of rotation of the four degrees of freedom flexible hinge about the z-axis.

Application example 1: In order to ensure the assembly accuracy of microelectronic components, the proposed fully flexible six-degree-of-freedom micro-manipulation platform is used to support the PCB board, and the micro-manipulator clamps the micro-electronic components for assembly. The multiple pins of the PCB are accurately inserted into the corresponding jacks of the PCB board, and the micro-manipulator grips the tiny electronic components and moves them to the target position provided by the digital measurement system. First, set the allowable operating force as [Fx, Fy, Fz , Mx, My, Mz]=[0, 0, 1N, 0, 0, 0], that is, only the operating force along the z direction is allowed. During the operation, due to the influence of various errors, the pin and The position of the socket may be deviated. For example, the error in the x direction will inevitably cause the assembly force in the x direction and the assembly moment along the y axis during the assembly process. Appropriate movement and appropriate rotation along the y-axis to prevent deformation and damage of pins and sockets, and at the same time detect that the assembly force Fx and assembly moment My exceed the set value, which is determined according to the direction of the assembly force and assembly moment After the deviation in the x direction, the control system controls the operator to move correspondingly in the x direction according to the deviation feedback to achieve the goal of compensating the deviation, and finally realize the automation, precision and intelligence of fine assembly.

Application example 2: In order to complete the assembly operation of studs and nuts with a diameter of 0.1 mm, a fully flexible six-degree-of-freedom micro-manipulation platform is used to support the nut fixture, and the fixture fixes the nut to be assembled on the movement of the fully-flexible six-degree-of-freedom micro-manipulation platform On the platform, the studs to be assembled are clamped by clamps for screwing operation. Set the allowable assembly force as [Fx, Fy, Fz, Mx, My, Mz] = [0, 0, -0.5N, 0, 0, 0.2N mm], that is, only rotation around the z direction is allowed The resulting moment, according to the nut position and attitude information collected by the CCD with a microscope eyepiece, the clamp clamps the stud and moves to the installation position. After the axis alignment operation, the clamp rotates around the z direction. Due to the thread assembly process At the same time, there is a displacement along the z direction and a rotation around the z axis, so when the clamp completes the action of driving the stud to rotate, it will also drive the nut to generate a force along the z axis on the mobile platform, due to the fully flexible six degrees of freedom fine operation The platform is flexible, and its mobile platform can produce a certain displacement in the z direction to prevent excessive assembly force. Due to the processing error of the stud and the nut, and the calculation of the pose may produce certain calculation errors, there will be screwing interference during the screwing process of the stud and the nut, that is, they cannot be assembled smoothly, and the screwing interference will simultaneously produce a large winding Z-axis interference torque, on the one hand, the fully flexible six-degree-of-freedom micro-operation platform will generate corresponding rotations to prevent system damage; If the detection result exceeds the set allowable value, it will be judged that the screwing has failed, and it will be re-adjusted after exiting. Ensure the reliability of screw-in assembly.

Claims (4)

1. A middle branch chain of a fully flexible micro-operation platform is characterized in that the middle part of the middle branch chain is provided with a four-degree-of-freedom flexible hinge, and the four-degree-of-freedom flexible hinge includes an upper connecting ring, a lower connecting ring and a central column ; There is a Y-shaped connecting piece with three branches in the upper connecting ring. The three branches of the Y-shaped connecting piece are all arranged on the same horizontal plane. The first branch is arranged along the x-axis, the second branch is arranged along the y-axis, and the third branch is arranged along the x-axis. The axis is arranged in a direction of 135 degrees; The lower coupling ring is provided with three radial sheet beams evenly distributed along the circumference; the three radial sheet beams are installed at the lower end of the central column, and the upper end of the central column is connected to the bottom surface of the Y-shaped coupling piece. 2. The intermediate branch chain of the fully flexible micro-operation platform according to claim 1, characterized in that 3 strain gauges are provided on the Y-shaped connecting piece, and 1 piece of strain gauge is provided on each radial sheet beam Strain gauges. 3. The intermediate branch chain of the fully flexible micro-operation platform according to claim 1, wherein both ends of the intermediate branch chain are provided with conical threads. 4. The intermediate branch chain of the fully flexible micro-operation platform according to any one of claims 1-3, wherein the fully flexible micro-operation platform includes a mobile platform, a fixed platform, a group of intermediate branch chains and at least Three sets of identical side branches; The middle branch chain is arranged vertically, and the upper end of the middle branch chain is connected to the geometric center of the mobile platform; the lower end of the middle branch chain is connected to the geometric center of the fixed platform.

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