CN102501247A - Fully flexible six-degree-of-freedom fine operating platform - Google Patents

Fully flexible six-degree-of-freedom fine operating platform Download PDF

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Publication number
CN102501247A
CN102501247A CN2011103504035A CN201110350403A CN102501247A CN 102501247 A CN102501247 A CN 102501247A CN 2011103504035 A CN2011103504035 A CN 2011103504035A CN 201110350403 A CN201110350403 A CN 201110350403A CN 102501247 A CN102501247 A CN 102501247A
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degree
flexible
side chain
freedom
hinge
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CN102501247B (en
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梁桥康
王耀南
陈洁平
张辉
何丽云
凌志刚
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Hunan University
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Hunan University
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Abstract

The invention discloses a fully flexible six-degree-of-freedom fine operating platform, which comprises a mobile platform, a fixed platform, a group of middle branched chain and at least three groups of same side branched chains, wherein the middle branched chain is vertically arranged; the upper end of the middle branched chain is connected with a geometric center of the mobile platform; the lower end of the middle branched chain is connected with a geometric center of the fixed platform; the side branched chains are vertically arranged and are uniformly arranged between the mobile platform and the fixed platform in a circumferential direction relative to the middle branched chain; the middle of the middle branched chains is provided with a four-degree-of-freedom flexible hinge; the four-degree-of-freedom flexible hinge comprises an upper coupling ring, a lower coupling ring and a middle column; and the middles of the side branched chains are provided with flexible mobile hinges. The fully flexible six-degree-of-freedom fine operating platform has a plurality of fully flexible joints and can avoid rigid collision and damage.

Description

The trickle operating platform of complete flexible six degree of freedom
Technical field
The present invention relates to the trickle operating platform of a kind of complete flexible six degree of freedom.
Background technology
Trickle operating technology is that precision instrument and precision optical machinery reach one of high-precision key technology, has been widely used in multidisciplinary fields such as little operation, microfabrication, fiber alignment, MEMS assembling at present.Operand when trickle operating platform is used for carrying trickle the operation is so that trickle operational tip actuator carries out specific operation to accomplish appointed task to operand above that.
Existing trickle operation is all controlled based on open loop; Also there are some scholars to design that multiple flexible parallel connection robot carries out micron even nano level multiple degrees of freedom moves and rotates both at home and abroad; And there is multinomial related patent U.S. Patent No. technological; For example: a kind of three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism (Chinese patent: CN200610151113.7); The six degree of freedom macro/micro drives nanoscale and locatees big stroke flexible parallel connection robot (Chinese patent: CN 200410013627.7), and (Chinese patent: CN200410013628.1), but the subject matter that these prior aries exist is complex structure, does not have a feedback of power/moment relevant information for Six-degree-of-freedom Large Stroke, High Precision Flexible Parallel Connection Robot; And limit by the microscopy apparatus precision, therefore be difficult to guarantee the accuracy and the reliability requirement of fine operation.In addition, traditional trickle operational tip actuator owing to do not have real-time feedback element usually, is easy to take place rigid collision in operating process, operand and system are caused a devastating effect.
Summary of the invention
Technical problem to be solved by this invention provides the trickle operating platform of a kind of complete flexible six degree of freedom, and the trickle operating platform of this complete flexible six degree of freedom has a plurality of full flexible joints, can avoid rigid collision and destruction.
The technical solution of invention is following:
The trickle operating platform of a kind of complete flexible six degree of freedom comprises mobile platform, fixed platform, one group of middle side chain sidepiece side chain identical with at least three groups;
Middle side chain is vertical setting, and the upper end of middle side chain connects the geometric center of mobile platform; The lower end of middle side chain connects the geometric center of fixed platform;
The sidepiece side chain is vertical setting, and the middle relatively side chain of sidepiece side chain circumferentially is evenly arranged between mobile platform and the fixed platform;
The middle part of middle side chain is provided with four by the degree flexible hinge, and described four comprise coupling ring, second line of a couplet T-Ring and center pillar by the degree flexible hinge;
Be provided with the Y type plate of three branches in the last coupling ring, three branches of Y type plate all are arranged on the same horizontal plane, and first branch arranges that along the x axle second branch arranges that along the y axle the 3rd branch edge becomes the direction of 135 degree to arrange with the x axle;
Be provided with in the second line of a couplet T-Ring along the equally distributed three sheet beams radially of circumference; Three radially the sheet beam be installed in the center pillar lower end, the bottom surface of the last termination Y type plate of center pillar.
The two ends of each sidepiece side chain respectively are provided with a flexible ball hinge, and the middle part of the sidepiece side chain of each is provided with a flexibility and moves hinge;
Described flexibility move hinge by top joint pin, bottom joint pin, be used for upper support that supporting flexible moves hinge top and be used to be connected flexible lower support butt joint of moving the hinge lower end and form; Upper support and lower support all are made up of 2 horse nail type beams that are mutually 90 degree, and the joint of upper support and lower support forms the dagger of a hollow; (constitute in 4 single armeds of this dagger, two adjacent single armeds form a whole and become the part of upper support, and two other single armed forms a whole becomes the part of lower support.) upper support is connected with the bottom joint pin with the top joint pin respectively with lower support.
Described flexible ball hinge comprises top connecting ring and bottom connecting ring, and top connecting ring and bottom connecting ring lay respectively at the top and bottom of flexible ball hinge; The top connecting ring is connected through three axial rib with the bottom connecting ring, and the top connecting ring is provided with 2 the axial shuttle type of x grooves, and the bottom connecting ring is provided with 2 the axial shuttle type of y grooves.
Be equipped with the circular cone internal thread at described top connecting ring and connecting ring outer end, bottom; Joint pin and bottom joint pin are provided with the circular cone external screw thread on top; Described circular cone internal thread and circular cone external screw thread are suitable.
In the plate of described Y type, be provided with 3 foil gauges, on each dagger, be provided with 2 foil gauges, each sheet radially sheet beam is provided with 1 foil gauge.
Two ends of middle side chain are equipped with tapered tread.
Described sidepiece side chain is three groups.
The foil gauge that flexibility in three sidepiece side chains moves on the dagger in the hinge is used for detecting the suffered pressure of side chain [F1, F2, F3] respectively; Pressure [F1, F2, F3] and power Jacobian matrix J according to gained calculate mobile platform along x; The torque M x of y and z axle, My and Mz:
Mx My Mz = J F 1 F 2 F 3 = J 11 J 12 J 13 J 21 J 22 J 23 J 31 J 32 J 33 F 1 F 2 F 3
Wherein power Jacobian matrix J calculates according to the robotics principle according to the structure and the physical dimension of the trickle operating platform of complete flexible six degree of freedom.
J T = AB = A J s I 3 × 3 = A 11 A 12 A 13 A 14 A 15 A 16 A 21 A 22 A 23 A 24 A 25 A 26 A 31 A 32 A 33 A 34 A 35 A 36 B 11 B 12 B 13 B 21 B 22 B 23 B 31 B 32 B 33 1 0 0 0 1 0 0 0 1 = J 11 J 12 J 13 J 21 J 22 J 23 J 31 J 32 J 33
Wherein, A is the matrix of one 3 row 6 row; It is the speed Jacobian matrix of the trickle operating platform of complete flexible six degree of freedom when not considering the centre side chain; B is made up of the unit matrix of Js and one 3 row, 3 row, and wherein Js is the speed Jacobian matrix of the trickle operating platform of complete flexible six degree of freedom when not considering outside side chain.
Pressure [F1 according to gained; F2, F3] and power Jacobian matrix J calculate mobile platform along x, the torque M x of y and z axle; My and Mz are prior art; Referring to list of references: paper author: Joshi, S., Lung-Wen Tsai. thesis topic: A comparison study of two 3-DOF parallelmanipulators:one with three and the other with four supporting legs periodical: IEEE Transactions on Robotics and Automation; Volume:19 Issue:2, publication time: Apr 2003.
Beneficial effect:
Defective to the existing technologies existence of being correlated with both at home and abroad; The present invention proposes the trickle operating platform of a kind of complete flexible six degree of freedom; When carrying operand; The trickle operating platform of complete flexible six degree of freedom can provide the suitable strain of corresponding six degree of freedom simultaneously according to suffered three-dimensional force and three-dimensional moment information, avoids end effector to produce rigid collision and operand and system are caused a devastating effect in the process of operation, realizes flexible operation mechanically with this.The trickle operating platform of complete flexible six degree of freedom can also detect end effector in real time and be applied to three-dimensional force and three-dimensional moment information on the operand; For the accurate control in operating system realizable force/position provides requisite real-time feedback information, realize flexible operation from controlling.
Platform structure is simple, operation accuracy and good reliability, power/moment information precision of obtaining is high, sensitivity is good, dynamic property is good.
During concrete the application; Operand is supported on the mobile platform; When operator carried out trickle operation to operand, operating physical force can pass through by the operation workpiece and act on the mobile platform, and mobile platform is delivered to operating physical force on the fixed platform through middle side chain and sidepiece side chain.Flexible hinge on middle side chain and the sidepiece side chain is according to suffered power or moment generation corresponding mobile and rotation strain; Strain on each hinge causes that mobile platform relative fixed platform produces certain three axial resilient movement in edge and rotates around the elasticity of three change in coordinate axis direction; Avoid by between the operand or operation between picture and the operator rigid collision takes place, realize the flexible assembly of mechanical aspects.
Simultaneously; Corresponding strain can take place in the force sensing element surface on each flexible hinge; The foil gauge that sticks on the flexible member also can produce and the corresponding resistance change of strain; The variation of this resistance value can obtain being applied to power and the moment on the mobile platform after amplification, demarcation and decoupling zero, and is specific as follows:
Foil gauge in first branch of Y type plate is used for detecting the suffered power Fx along the x direction of moving platform; Foil gauge in second branch is used for detecting the suffered power Fy along the y direction of moving platform, and the foil gauge in the 3rd branch is used for detecting the suffered power Fz along the z direction of moving platform;
In the second line of a couplet T-Ring three foil gauges on the sheet beam radially, be used for detecting moving platform suffered along the axial torque M z of z; The foil gauge that flexibility in three sidepiece side chains moves on the dagger in the hinge is used for detecting the suffered pressure [F1 of side chain respectively; F2, F3], according to the pressure [F1 of gained; F2; F3] and power Jacobian matrix J can calculate moving platform receive along x, the torque M x of y and z axle, My and Mz:
Mx My Mz = J F 1 F 2 F 3
Wherein power Jacobian matrix J calculates according to the robotics principle according to the structure and the physical dimension of the trickle operating platform of complete flexible six degree of freedom.Mz that calculates and the Mz that foil gauge on the sheet beam radially detects constitute redundant; The reliability that the increase system detects; Reach the function of real-time detection, for the real-time feedback and the control of operating system are submitted necessary information, to realize the flexible assembly of control aspect.
After operation was accomplished, owing to there is not operating physical force to act on mobile platform and each flexible hinge, each flexible hinge recovered original shape.
The flexible ball hinge has the rotational freedom around three change in coordinate axis direction, and the flexible hinge that moves has one-movement-freedom-degree in axial direction, and the four-degree-of-freedom flexible hinge has around the rotation freedom of three change in coordinate axis direction with along z axle one-movement-freedom-degree;
Adopt trickle operating platform of the present invention,, can measure the power of three change in coordinate axis direction in three edges altogether and around the moment of three change in coordinate axis direction, mobile platform has one-movement-freedom-degree and three rotational freedoms around reference axis along three change in coordinate axis direction.
Generally speaking, the present invention can prevent destruction and the rigid collision that misoperation is brought, for the control system provides quantitative power and moment information, for FEEDBACK CONTROL provides the data support.Because the present invention can realize the flexible operation of machinery and control aspect simultaneously, can make trickle operation reach high precision (precision can reach micron order) and high reliability.
Description of drawings
Fig. 1 is a trickle operating platform structural representation of the present invention.
Fig. 2 is the flexible ball hinge sketch map that trickle operating platform sidepiece side chain uses.
Fig. 3 moves the hinge sketch map for the flexibility that trickle operating platform sidepiece side chain uses.
Fig. 4 be trickle operating platform middle part side chain use four by degree flexible hinge sketch map.
Label declaration: the 1-fixed platform, the flexible ball hinge of 2-sidepiece side chain, the flexible hinge that moves of 3-, four of the side chain use by the degree flexible hinge in the middle part of the 4-, 5-middle part side chain; The 6-mobile platform, 7-sidepiece side chain;
The specific embodiment
Below will combine accompanying drawing and specific embodiment that the present invention is explained further details:
Embodiment 1:
Referring to Fig. 1; Mobile platform be used for supporting trickle operation by operand; The trickle hand of operating machines is to operating operand like fiber alignment, MEMS assembling etc.; Mobile platform is connected with fixed platform with one group of middle part side chain that mediates through three groups of identical sidepiece side chains; Three groups of identical sidepiece side chains are connected to form through the taper thread pair by the flexible ball hinge that the flexibility at middle part moves hinge and two ends, and the middle part side chain is made up of with its two ends externally threaded cylinder of band circular cone the four-degree-of-freedom flexible hinge wherein, and the circular cone external screw thread through two ends and mobile platform are connected with circular cone internal thread on the fixed platform.
In Fig. 2; 2-1 is that the flexible ball hinge (is actually along the crooked shuttle type groove of cambered surface along axial two the shuttle type grooves of x; The concrete processing mode of this shuttle type groove is: 1) partial application from top to bottom forms first secant, 2 on vertical cylindrical wall) again on vertical cylindrical wall from lower to upper partial application form second secant, two secant left and right sides aligned in position; Form a shuttle type groove, [being the right ends of shuttle type groove] has and seamlessly transits between the left and right sides of two secants.); 2-2 is that the flexible ball hinge is along equally distributed three axial rib of circumference; 2-3 is the top connecting ring of flexible ball hinge band circular cone internal thread, 2-4 be the flexible ball hinge along axial two the shuttle type grooves of y, 2-5 is the bottom connecting ring of flexible ball hinge band circular cone internal thread.
Adopting the target of shuttle type groove structure is in order to let structure can have and have only a rotational freedom.
2-1 can make the flexible ball hinge rotate around the x axle, and 2-2 can make the flexible ball hinge rotate around the z axle, and 2-3 is used for being connected with mobile platform or fixed platform with 2-5, and 2-4 can make flexible ball hinge 2 rotate around the y axle.
In Fig. 3; 3-1 is that the externally threaded flexibility of band circular cone moves hinge bottom joint pin; 3-2 is two lower supports that are mutually horse nail type (being the en shaped as frame) the beam formation of 90 degree; 3-3 is that the dagger of hollow [also is appreciated that to being that two parallel cross sheets are formed by connecting, and has certain interval between two parallel cross sheets.] parallel mechanism of formation; Be used to make mechanism to have an one-movement-freedom-degree; On dagger, be pasted with simultaneously foil gauge; Be used for detecting the flexible suffered pressure of hinge that moves, 3-4 is first foil gauge that sticks on the dagger, and 3-5 is two upper supports that are mutually the horse nail type beam formation of 90 degree.3-6 is that the externally threaded flexibility of band circular cone moves hinge top joint pin.
Dagger can make the flexible hinge that moves can be along axially the relatively moving of mechanism, lower support be connected with the top joint pin with the bottom joint pin respectively with upper support (first foil gauge can detect vertically pulling force or the size of pressure of the mobile hinge of flexibility when deforming).
In Fig. 4,4-1 is that 4-2 is three Y of branch type plates at the equally distributed three sheet beams radially of circumference; Its first branch arranges that along the x axle second branch arranges that along the y axle the 3rd edge becomes the direction of 135 degree to arrange with the x axle; 4-3 is second foil gauge that sticks on the 4-2; 4-4 is the externally threaded second line of a couplet T-Ring of band circular cone for the externally threaded coupling ring of going up of band circular cone, 4-5, and 4-6 is the 3rd foil gauge that sticks on the sheet beam radially.
Middle side chain is made up of three parts in fact; It wherein mainly is the four-degree-of-freedom flexible hinge at middle part; Also comprise each one one end band circular cone internal thread and the externally threaded cylinder of an end band circular cone up and down in addition; The cylinder and cone internal thread links to each other with the four-degree-of-freedom flexible hinge, and the cylinder and cone external screw thread links to each other with the circular cone internal thread at moving platform and fixed platform center.
Three radially the sheet beam can make four by the degree flexible hinge rotate around the z axle; The plate of Y type can make four by the degree flexible hinge along the z axle move, around the rotation of x axle and y axle; Second foil gauge can detect four by the degree flexible hinge when deforming along the power of z axle with around the torque of x axle and y axle; Four are connected with middle side chain with second line of a couplet T-Ring through last coupling ring by the degree flexible hinge, three radially the 3rd foil gauge on the sheet beam can detect four by spending the torque that flexible hinge rotates around the z axle.
Application examples 1: for guaranteeing the assembly precision of miniature electronic components and parts, use the trickle operating platform of complete flexible six degree of freedom that is proposed to support pcb board, the miniature electronic devices and components of trickle manipulator's clamping assemble; For a plurality of contact pins with the miniature electronic components and parts accurately insert in the corresponding jack of pcb board, the miniature electronic devices and components of trickle manipulator's clamping move to the target location that the digitized measurement system provides, and at first setting operating physical force allowable is [Fx; Fy, Fz, Mx; My, Mz]=[0,0; 1N, 0,0; 0], promptly only allows along the operating physical force of z direction, in operating process; Because influence that various error caused, the position of contact pin and jack possibly have deviation, for example certainly will cause the assembly force of generation x direction in the assembling process and along the assembling moment of y axle in the error of x direction; At this moment the trickle operating platform of complete flexible six degree of freedom suitable move and does suitable rotation preventing the deformed damaged of contact pin and jack along the y axle producing to do along the x direction, and detects assembly force Fx simultaneously and surpassed setting value with assembling moment My, confirm the deviation of x direction according to the direction and the direction of assembling moment of assembly force after; The control system carries out the target that corresponding mobile reaches compensate according to this deviation feedback control manipulation hand in the x direction, finally realizes automation, precision and the intellectuality of trickle assembling.
Application examples 2: in order to accomplish the double-screw bolt and the nut assembly manipulation of 0.1 mm dia size; The trickle operating platform back nut of complete flexible six degree of freedom anchor clamps with design; Anchor clamps are fixed on nut to be assembled on the mobile platform of the trickle operating platform of complete flexible six degree of freedom, and double-screw bolt to be assembled screws operation by the clamp clamping.Setting assembly force allowable is [Fx, Fy, Fz, Mx; My, Mz]=[0,0 ,-0.5N; 0,0,0.2Nmm], promptly only allow the moment that screws around the z direction; According to nut location and the attitude information that the CCD with micro-eyepiece collects, clamp clamping double-screw bolt moves to the installation site, carry out axis alignment operation after, clamp is rotated around the z direction; Owing to have simultaneously in the screw thread assembling process along the displacement of z direction with around the rotation of z axle, thus clamp accomplish drive the double-screw bolt rotation action simultaneously, can drive nut and on mobile platform, produce axial power along z; Because the trickle operating platform of complete flexible six degree of freedom has flexibility, its mobile platform can produce certain displacement in the z direction, prevents that excessive assembly force from producing.Because there are mismachining tolerance in double-screw bolt and nut; And pose calculates possibly produce certain error of calculation, and interference can appear screwing in double-screw bolt and nut in the process of screwing, promptly can not assemble smoothly; Screw the interference meeting and produce bigger interference moment simultaneously around the z axle; The trickle operating platform of complete flexible six degree of freedom can produce corresponding rotation and prevent system damage on the one hand, and on the other hand, the trickle operating platform of complete flexible six degree of freedom detects the real-time moment that screws; The control system surpasses the allowable value judgement of setting according to testing result and screws failure, readjusts after will withdrawing from.Assurance screws the reliability of assembling.

Claims (7)

1. the trickle operating platform of complete flexible six degree of freedom is characterized in that, comprises mobile platform, fixed platform, one group of middle side chain sidepiece side chain identical with at least three groups;
Middle side chain is vertical setting, and the upper end of middle side chain connects the geometric center of mobile platform; The lower end of middle side chain connects the geometric center of fixed platform;
The sidepiece side chain is vertical setting, and the middle relatively side chain of sidepiece side chain circumferentially is evenly arranged between mobile platform and the fixed platform;
The middle part of middle side chain is provided with four by the degree flexible hinge, and described four comprise coupling ring, second line of a couplet T-Ring and center pillar by the degree flexible hinge;
Be provided with the Y type plate of three branches in the last coupling ring, three branches of Y type plate all are arranged on the same horizontal plane, and first branch arranges that along the x axle second branch arranges that along the y axle the 3rd branch edge becomes the direction of 135 degree to arrange with the x axle;
Be provided with in the second line of a couplet T-Ring along the equally distributed three sheet beams radially of circumference; Three radially the sheet beam be installed in the center pillar lower end, the bottom surface of the last termination Y type plate of center pillar.
2. the trickle operating platform of complete flexible six degree of freedom according to claim 1 is characterized in that the two ends of each sidepiece side chain respectively are provided with a flexible ball hinge, and the middle part of the sidepiece side chain of each is provided with a flexibility and moves hinge;
Described flexibility move hinge by top joint pin, bottom joint pin, be used for upper support that supporting flexible moves hinge top and be used to be connected flexible lower support butt joint of moving the hinge lower end and form; Upper support and lower support all are made up of 2 horse nail type beams that are mutually 90 degree, and the joint of upper support and lower support forms the dagger of a hollow; Upper support is connected with the bottom joint pin with the top joint pin respectively with lower support.
3. the trickle operating platform of complete flexible six degree of freedom according to claim 2 is characterized in that described flexible ball hinge comprises top connecting ring and bottom connecting ring, and top connecting ring and bottom connecting ring lay respectively at the top and bottom of flexible ball hinge; The top connecting ring is connected through three axial rib with the bottom connecting ring, and the top connecting ring is provided with 2 the axial shuttle type of x grooves, and the bottom connecting ring is provided with 2 the axial shuttle type of y grooves.
4. the trickle operating platform of complete flexible six degree of freedom according to claim 3 is characterized in that, is equipped with the circular cone internal thread at described top connecting ring and connecting ring outer end, bottom; Joint pin and bottom joint pin are provided with the circular cone external screw thread on top; Described circular cone internal thread and circular cone external screw thread are suitable.
5. the trickle operating platform of complete flexible six degree of freedom according to claim 4 is characterized in that, in the plate of described Y type, is provided with 3 foil gauges, on each dagger, is provided with 2 foil gauges, and each sheet radially sheet beam is provided with 1 foil gauge.
6. according to the trickle operating platform of each described complete flexible six degree of freedom of claim 1-5, it is characterized in that two ends of middle side chain are equipped with tapered tread.
7. according to the trickle operating platform of each described complete flexible six degree of freedom of claim 6, it is characterized in that described sidepiece side chain is three groups.
CN201110350403.5A 2011-11-08 2011-11-08 Fully flexible six-degree-of-freedom fine operating platform Active CN102501247B (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103085060A (en) * 2012-12-31 2013-05-08 中国科学院自动化研究所 Butt joint / separating device and method based on force sense and visual sense mixture detection
CN106239495A (en) * 2016-08-30 2016-12-21 上海大学 A kind of micro-nano operation adjusts platform and method with parallel pose
CN106826722A (en) * 2017-03-06 2017-06-13 天津大学 A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit
CN107263528A (en) * 2017-07-21 2017-10-20 清华大学 The flexible joint structure of flexible arm
CN108961419A (en) * 2018-06-15 2018-12-07 重庆大学 The microscopic field of view spatial digitalized method and system of the micro-vision system of microassembly system
CN110161643A (en) * 2019-04-26 2019-08-23 中国科学院长春光学精密机械与物理研究所 A kind of optical platform device based on kinematics support

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US4577513A (en) * 1982-11-09 1986-03-25 Emi Limited Strain sensing arrangement
US20090173170A1 (en) * 2006-05-22 2009-07-09 Politecnico Di Milano Elastic joint with a translating spherical hinge and force and moment sensor improved by means of the said joint
CN102095534A (en) * 2010-12-08 2011-06-15 上海交通大学 Double rood beam high-sensitivity six-dimensional moment sensor
CN102166751A (en) * 2011-05-20 2011-08-31 汕头大学 Branched chain-less and six-freedom degree parallel manipulator

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US4577513A (en) * 1982-11-09 1986-03-25 Emi Limited Strain sensing arrangement
US20090173170A1 (en) * 2006-05-22 2009-07-09 Politecnico Di Milano Elastic joint with a translating spherical hinge and force and moment sensor improved by means of the said joint
CN102095534A (en) * 2010-12-08 2011-06-15 上海交通大学 Double rood beam high-sensitivity six-dimensional moment sensor
CN102166751A (en) * 2011-05-20 2011-08-31 汕头大学 Branched chain-less and six-freedom degree parallel manipulator

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103085060A (en) * 2012-12-31 2013-05-08 中国科学院自动化研究所 Butt joint / separating device and method based on force sense and visual sense mixture detection
CN103085060B (en) * 2012-12-31 2015-04-22 中国科学院自动化研究所 Butt joint / separating device and method based on force sense and visual sense mixture detection
CN106239495A (en) * 2016-08-30 2016-12-21 上海大学 A kind of micro-nano operation adjusts platform and method with parallel pose
CN106239495B (en) * 2016-08-30 2018-08-07 上海大学 A kind of micro-nano operation parallel pose adjustment platform and method
CN106826722A (en) * 2017-03-06 2017-06-13 天津大学 A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit
CN107263528A (en) * 2017-07-21 2017-10-20 清华大学 The flexible joint structure of flexible arm
CN108961419A (en) * 2018-06-15 2018-12-07 重庆大学 The microscopic field of view spatial digitalized method and system of the micro-vision system of microassembly system
CN108961419B (en) * 2018-06-15 2023-06-06 重庆大学 Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system
CN110161643A (en) * 2019-04-26 2019-08-23 中国科学院长春光学精密机械与物理研究所 A kind of optical platform device based on kinematics support
CN110161643B (en) * 2019-04-26 2020-06-12 中国科学院长春光学精密机械与物理研究所 Optical platform device based on kinematics support

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