CN102501247B - Fully flexible six-degree-of-freedom fine operating platform - Google Patents

Fully flexible six-degree-of-freedom fine operating platform Download PDF

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Publication number
CN102501247B
CN102501247B CN201110350403.5A CN201110350403A CN102501247B CN 102501247 B CN102501247 B CN 102501247B CN 201110350403 A CN201110350403 A CN 201110350403A CN 102501247 B CN102501247 B CN 102501247B
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degree
flexible
hinge
platform
connecting ring
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CN102501247A (en
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梁桥康
王耀南
陈洁平
张辉
何丽云
凌志刚
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Hunan University
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Hunan University
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Abstract

The invention discloses a fully flexible six-degree-of-freedom fine operating platform, which comprises a mobile platform, a fixed platform, a group of middle branched chain and at least three groups of same side branched chains, wherein the middle branched chain is vertically arranged; the upper end of the middle branched chain is connected with a geometric center of the mobile platform; the lower end of the middle branched chain is connected with a geometric center of the fixed platform; the side branched chains are vertically arranged and are uniformly arranged between the mobile platform and the fixed platform in a circumferential direction relative to the middle branched chain; the middle of the middle branched chains is provided with a four-degree-of-freedom flexible hinge; the four-degree-of-freedom flexible hinge comprises an upper coupling ring, a lower coupling ring and a middle column; and the middles of the side branched chains are provided with flexible mobile hinges. The fully flexible six-degree-of-freedom fine operating platform has a plurality of fully flexible joints and can avoid rigid collision and damage.

Description

Full flexible six-degree-of-freedom fine operating platform
Technical field
The present invention relates to a kind of full flexible six-degree-of-freedom fine operating platform.
Background technology
Trickle operating technology is that precision instrument and precision optical machinery reach one of high-precision key technology, has been widely used at present the multidisciplinary fields such as micro-operation, microfabrication, fiber alignment, MEMS assembling.Operand when fine operating platform is used for carrying trickle operation, so that trickle operational tip actuator carries out specifically operating to complete appointed task to operand thereon.
Existing trickle operation is all controlled based on open loop, also having some scholars to design multiple flexible parallel connection robot both at home and abroad carries out the even nano level multiple degrees of freedom of micron and moves and rotate, and multinomial Patents technology arranged, for example: a kind of three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism (Chinese patent: CN200610151113.7), the six degree of freedom macro/micro drives nanoscale to locate large stroke flexible parallel connection robot (Chinese patent: CN 200410013627.7), Six-degree-of-freedom Large Stroke, High Precision Flexible Parallel Connection Robot's (Chinese patent: CN200410013628.1), but the subject matter that these prior aries exist is complex structure, the feedback that there is no power/moment relevant information, and limit by the microscopy apparatus precision, therefore be difficult to guarantee accuracy and the reliability requirement of fine operation.In addition, traditional trickle operational tip actuator owing to usually there is no the Real-time Feedback link, is easy to occur rigid collision in operating process, and operand and system are caused a devastating effect.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of full flexible six-degree-of-freedom fine operating platform, and this full flexible six-degree-of-freedom fine operating platform has a plurality of full flexible joints, can avoid rigid collision and destruction.
The technical solution of invention is as follows:
A kind of full flexible six-degree-of-freedom fine operating platform, comprise mobile platform, fixed platform, one group of sidepiece side chain that middle pole is identical with at least three groups;
Middle pole is vertical setting, and the upper end of middle pole connects the geometric center of mobile platform; The lower end of middle pole is connected and fixed the geometric center of platform;
The sidepiece side chain is vertical setting, and the relative middle pole of sidepiece side chain circumferentially is evenly arranged between mobile platform and fixed platform;
The middle part of middle pole is provided with four by the degree flexible hinge, and described four comprise upper coupling ring, second line of a couplet T-Ring and center pillar by the degree flexible hinge;
Be provided with the Y type plate of three branches in upper coupling ring, three branches of Y type plate all are arranged on same level, and the first branch is along x axle layout, and the second branch is along y axle layout, and the 3rd branch arranges along the direction that becomes 135 degree with the x axle;
Be provided with distribute along even circumferential three radially sheet beams in second line of a couplet T-Ring; Three radially the sheet beam be installed in the center pillar lower end, the bottom surface of the upper termination Y type plate of center pillar.
The two ends of each sidepiece side chain respectively are provided with a flexible ball hinge, and the middle part of the sidepiece side chain of each is provided with a mobile hinge of flexibility;
The mobile hinge of described flexibility is formed with the lower support docking for being connected flexible mobile hinge lower end by top joint pin, bottom joint pin, the upper support that moves hinge top for supporting flexible, upper support and lower support all consist of 2 horse nail type beams that are mutually 90 degree, and the joint of upper support and lower support forms the dagger of a hollow; (form in 4 single armeds of this dagger, two adjacent single armeds form a whole and become the part of upper support, and two other single armed forms a whole becomes the part of lower support.) upper support is connected with the bottom joint pin with the top joint pin respectively with lower support.
Described flexible ball hinge comprises top connecting ring and bottom connecting ring, and top connecting ring and bottom connecting ring lay respectively at the top and bottom of flexible ball hinge; The top connecting ring is connected by three axial rib with the bottom connecting ring, and the top connecting ring is provided with 2 the axial shuttle type of x grooves, and the bottom connecting ring is provided with 2 the axial shuttle type of y grooves.
Be equipped with conical inner screw thread at described top connecting ring and connecting ring outer end, bottom; Be provided with the circular cone external screw thread at top joint pin and bottom joint pin; Described conical inner screw thread and circular cone external screw thread are suitable.
Be provided with 3 foil gauges in the plate of described Y type, be provided with 2 foil gauges on each dagger, every a slice radially sheet beam is provided with 1 foil gauge.
Two ends of middle pole are equipped with tapered tread.
Described sidepiece side chain is three groups.
Foil gauge on dagger in the mobile hinge of flexibility in three sidepiece side chains is used for respectively detecting the suffered pressure of side chain [F1, F2, F3], calculate mobile platform along x according to pressure [F1, F2, F3] and the power Jacobian matrix J of gained, the torque M x of y and z axle, My and Mz:
Mx My Mz = J F 1 F 2 F 3 = J 11 J 12 J 13 J 21 J 22 J 23 J 31 J 32 J 33 F 1 F 2 F 3
Wherein power Jacobian matrix J calculates according to the robotics principle according to structure and the physical dimension of full flexible six-degree-of-freedom fine operating platform.
J T = AB = A J s I 3 × 3 = A 11 A 12 A 13 A 14 A 15 A 16 A 21 A 22 A 23 A 24 A 25 A 26 A 31 A 32 A 33 A 34 A 35 A 36 B 11 B 12 B 13 B 21 B 22 B 23 B 31 B 32 B 33 1 0 0 0 1 0 0 0 1 = J 11 J 12 J 13 J 21 J 22 J 23 J 31 J 32 J 33
Wherein, A is the matrix of 3 row 6 row, it is the speed Jacobian matrix of full flexible six-degree-of-freedom fine operating platform when not considering middle pole, B is comprised of the unit matrix of Js and 3 row 3 row, and wherein Js is the speed Jacobian matrix of full flexible six-degree-of-freedom fine operating platform while not considering outside side chain.
Pressure [F1 according to gained, F2, F3] and power Jacobian matrix J calculate mobile platform along x, the torque M x of y and z axle, My and Mz are prior art, referring to list of references: Authors of Science Articles: Joshi, S., Lung-Wen Tsai. thesis topic: A comparison study of two 3-DOF parallelmanipulators:one with three and the other with four supporting legs periodical: IEEE Transactions on Robotics and Automation, Volume:19 Issue:2, publication time: Apr 2003.
Beneficial effect:
For the defect that relevant existing technologies exists both at home and abroad, the present invention proposes a kind of full flexible six-degree-of-freedom fine operating platform, in the carrying operand, full flexible six-degree-of-freedom fine operating platform can provide according to suffered three-dimensional force and three-dimensional moment information the suitable strain of corresponding six degree of freedom simultaneously, avoid end effector produce rigid collision and operand and system are caused a devastating effect in the process of operation, with this, realize flexible operation mechanically.Full flexible six-degree-of-freedom fine operating platform can also detect in real time end effector and be applied to three-dimensional force and the three-dimensional moment information on operand, precisely control for operating system realizable force/position the requisite Real-time Feedback information that provides, from controlling, realize flexible operation.
Platform structure is simple, operation accuracy and good reliability, obtain power/the moment information precision is high, sensitivity good, dynamic property is good.
During concrete application, operand is supported on mobile platform, when operator carries out trickle operation to operand, operating physical force can act on mobile platform through being operated workpiece, and mobile platform is delivered to operating physical force on fixed platform through middle pole and sidepiece side chain.Corresponding mobile and rotation strain occurs according to suffered power or moment in the flexible hinge on middle pole and sidepiece side chain, it is certain along three axial resilient movement with around the elastic rotation of three change in coordinate axis direction that strain on each hinge causes that the relative fixed platform of mobile platform produces, avoid being operated between object or operate between picture and operator, rigid collision occurring, realizing the flexible assembly of mechanical aspects.
Simultaneously, corresponding strain can occur in the force sensing element surface on each flexible hinge, the foil gauge sticked on flexible member also can produce the resistance change corresponding with strain facies, the variation of this resistance value can obtain being applied to the force and moment on mobile platform after amplification, demarcation and decoupling zero, specific as follows:
Foil gauge in the first branch of Y type plate is used for detecting the suffered power Fx in the x-direction of moving platform, foil gauge in the second branch is used for detecting the suffered power Fy in the y-direction of moving platform, and the foil gauge in the 3rd branch is used for detecting the suffered power Fz in the z-direction of moving platform;
In second line of a couplet T-Ring three foil gauges on the sheet beam radially, be used for detecting moving platform suffered along the axial torque M z of z; Foil gauge on dagger in the mobile hinge of flexibility in three sidepiece side chains is used for respectively detecting the suffered pressure [F1 of side chain, F2, F3], pressure [F1 according to gained, F2, F3] and power Jacobian matrix J can calculate moving platform be subject to along x, the torque M x of y and z axle, My and Mz:
Mx My Mz = J F 1 F 2 F 3
Wherein power Jacobian matrix J calculates according to the robotics principle according to structure and the physical dimension of full flexible six-degree-of-freedom fine operating platform.The Mz calculated and the strain measurement Mz out on sheet beam radially form redundancy, the reliability that the increase system detects, reach the function of real-time detection, for Real-time Feedback and the control of operating system are submitted necessary information, to realize the flexible assembly of control aspect.
After operation completes, owing to not having operating physical force to act on mobile platform and each flexible hinge, each flexible hinge recovers original shape.
The flexible ball hinge has the rotational freedom around three change in coordinate axis direction, and flexible mobile hinge has one-movement-freedom-degree in axial direction, and the four-degree-of-freedom flexible hinge has around the rotation freedom of three change in coordinate axis direction with along z axle one-movement-freedom-degree;
Adopt fine operating platform of the present invention,, altogether can measure three along the power of three change in coordinate axis direction with around the moment of three change in coordinate axis direction, mobile platform has along the one-movement-freedom-degree of three change in coordinate axis direction and three rotational freedoms around reference axis.
Generally speaking, the present invention can prevent destruction and the rigid collision that misoperation is brought, for control system provides quantitative power and moment information, for FEEDBACK CONTROL provides Data support.Because the present invention can realize machinery and the flexible operation of control aspect simultaneously, can make trickle operation reach high precision (precision can reach micron order) and high reliability.
The accompanying drawing explanation
Fig. 1 is fine operating platform structural representation of the present invention.
Fig. 2 is the flexible ball hinge schematic diagram that fine operating platform sidepiece side chain is used.
Fig. 3 is the mobile hinge schematic diagram of flexibility that fine operating platform sidepiece side chain is used.
Fig. 4 be fine operating platform middle part side chain use four by degree flexible hinge schematic diagram.
Label declaration: the 1-fixed platform, the flexible ball hinge of 2-sidepiece side chain, the flexible mobile hinge of 3-, in the middle part of 4-, four of the side chain use by the degree flexible hinge, 5-middle part side chain; The 6-mobile platform, 7-sidepiece side chain;
The specific embodiment
Below with reference to the drawings and specific embodiments, the present invention is described in further details:
Embodiment 1:
Referring to Fig. 1, mobile platform is used for supporting the object that is operated of trickle operation, the trickle hand of operating machines is to operating as fiber alignment operand, MEMS assembling etc., the middle part side chain that mobile platform mediates with one group by three groups of identical sidepiece side chains is connected with fixed platform, three groups of identical sidepiece side chains are connected to form by the taper thread pair by the flexible ball hinge at the mobile hinge of the flexibility at middle part and two ends, the middle part side chain is comprised of the four-degree-of-freedom flexible hinge in the middle of it and its two ends externally threaded cylinder of band circular cone, and with the conical inner screw thread on fixed platform, be connected with mobile platform by the circular cone external screw thread at two ends.
In Fig. 2,2-1 is that the flexible ball hinge (is actually the shuttle type groove along the cambered surface bending along axial two the shuttle type grooves of x, the concrete processing mode of this shuttle type groove is: 1) on vertical cylindrical wall, partial application from top to bottom forms the first secant, 2) again on vertical cylindrical wall from lower to upper partial application form the second secant, article two, secant left and right aligned in position, form a shuttle type groove, between the left and right sides of two secants, [being the two ends, left and right of shuttle type groove] has and seamlessly transits.), 2-2 is three axial rib that the flexible ball hinge distributes along even circumferential, 2-3 is the top connecting ring of flexible ball knuckle-joint band conical inner screw thread, 2-4 be the flexible ball hinge along axial two the shuttle type grooves of y, 2-5 is the bottom connecting ring of flexible ball knuckle-joint band conical inner screw thread.
Adopting the target of shuttle type groove structure is in order to allow structure can have and only have a rotational freedom.
2-1 can make the flexible ball hinge rotate around the x axle, and 2-2 can make the flexible ball hinge rotate around the z axle, and 2-3 is used for being connected with mobile platform or fixed platform with 2-5, and 2-4 can make flexible ball hinge 2 rotate around the y axle.
In Fig. 3,3-1 is the band mobile hinge of the externally threaded flexibility of circular cone bottom joint pin, 3-2 is two lower supports that are mutually horse nail type (i.e. half square frame-shaped) the beam formation of 90 degree, 3-3 is that [also can be understood as is that two parallel cross sheets are formed by connecting, and has certain interval between two parallel cross sheets for the dagger of hollow.] form a parallel mechanism, for making mechanism there is an one-movement-freedom-degree, be pasted with foil gauge simultaneously on dagger, be used for detecting the suffered pressure of flexible mobile hinge, 3-4 is the first foil gauge sticked on dagger, and 3-5 is two upper supports that are mutually the horse nail type beam formation of 90 degree.3-6 is the band mobile hinge of the externally threaded flexibility of circular cone top joint pin.
Dagger can make the flexible mobile hinge can be along axially the relatively moving of mechanism, lower support be connected with the top joint pin with the bottom joint pin respectively with upper support (the first foil gauge can detect the pulling force vertically of flexible mobile hinge when deforming or the size of pressure).
In Fig. 4,4-1 is distribute at even circumferential three radially sheet beams, 4-2 is three Y of branch type plates, its first branch is along x axle layout, and the second branch is along y axle layout, and the 3rd axle is arranged along the direction that becomes 135 degree with the x axle, 4-3 is the second foil gauge sticked on 4-2,4-4 is band circular cone externally threaded upper coupling ring, and 4-5 is the externally threaded second line of a couplet T-Ring of band circular cone, and 4-6 is the 3rd foil gauge sticked on sheet beam radially.
Middle pole consists of three parts in fact, it is mainly wherein the four-degree-of-freedom flexible hinge at middle part, also comprise in addition each end band conical inner screw thread and the externally threaded cylinder of an end band circular cone up and down, the cylinder conical inner screw thread is connected with the four-degree-of-freedom flexible hinge, and cylinder circular cone external screw thread is connected with the conical inner screw thread at fixed platform center with moving platform.
Three radially the sheet beam can make four by the degree flexible hinge around the z axle, rotate, the plate of Y type can make four by the degree flexible hinge, along the z axle, to be moved, rotate around x axle and y axle, the second foil gauge can detect four by the power along z axle of degree flexible hinge when deforming with around the torque of x axle and y axle, four are connected with middle pole with second line of a couplet T-Ring by upper coupling ring by the degree flexible hinge, three radially the 3rd foil gauge on the sheet beam four torques of being rotated around the z axle by the degree flexible hinge can be detected.
Application examples 1: for guaranteeing the assembly precision of miniature electronic components and parts, support pcb board with proposed full flexible six-degree-of-freedom fine operating platform, trickle manipulator clamps miniature electronic devices and components and is assembled, for a plurality of contact pins by the miniature electronic components and parts accurately insert in the corresponding jack of pcb board, trickle manipulator clamps miniature electronic devices and components and moves to the target location that the digitized measurement system provides, at first setting operating physical force allowable is [Fx, Fy, Fz, Mx, My, Mz]=[0, 0, 1N, 0, 0, 0], only allow operating physical force in the z-direction, in operating process, the impact caused due to various errors, the position of contact pin and jack may have deviation, for example in certainly will causing assembling process, the error of x direction produces the assembly force of x direction and along the assembling moment of y axle, at this moment full flexible six-degree-of-freedom fine operating platform is done in the x-direction suitable movement and is done suitable rotation to prevent the deformed damaged of contact pin and jack along the y axle in generation, and assembly force Fx detected and assembling moment My has surpassed setting value simultaneously, after deviation according to the direction of assembly force and the orientation determination x direction of assembling moment, control system is carried out the corresponding mobile target that reaches compensate according to this deviation feedback control manipulation hand in the x direction, finally realize the automation of trickle assembling, precision and intellectuality.
Application examples 2: for double-screw bolt and the nut assembly manipulation that completes 0.1 mm dia size, full flexible six-degree-of-freedom fine operating platform back nut fixture with design, fixture is fixed on nut to be assembled on the mobile platform of full flexible six-degree-of-freedom fine operating platform, and double-screw bolt to be assembled is screwed operation by the clamp clamping.Setting assembly force allowable is [Fx, Fy, Fz, Mx, My, Mz]=[0, 0,-0.5N, 0, 0, 0.2Nmm], only allow the moment that screws around the z direction, the nut location collected according to the CCD with micro-eyepiece and attitude information, the clamp clamping stud moves to installation site, after carrying out the axis alignment function, clamp is rotated around the z direction, owing to displacement in the z-direction being arranged and around the rotation of z axle in the Screw assembly process simultaneously, so clamp completes the action while that drives the double-screw bolt rotation, can drive nut and produce the axial power along z on mobile platform, because full flexible six-degree-of-freedom fine operating platform has flexibility, its mobile platform can produce certain displacement in the z direction, prevent that excessive assembly force from producing.Because there are mismachining tolerance in double-screw bolt and nut, and pose calculates may produce certain error of calculation, double-screw bolt and nut there will be and screw interference in screwing process, can not assemble smoothly, screw the interference meeting and produce the larger moment of the interference around the z axle simultaneously, on the one hand full flexible six-degree-of-freedom fine operating platform can produce corresponding rotation and prevent system damage, on the other hand, full flexible six-degree-of-freedom fine operating platform detects the real-time moment that screws, control system surpasses according to testing result the allowable value judgement of setting and screws failure, after exiting, readjusts.Assurance screws the reliability of assembling.

Claims (6)

1. a full flexible six-degree-of-freedom fine operating platform, is characterized in that, comprises mobile platform, fixed platform, one group of sidepiece side chain that middle pole is identical with at least three groups;
Middle pole is vertical setting, and the upper end of middle pole connects the geometric center of mobile platform; The lower end of middle pole is connected and fixed the geometric center of platform;
The sidepiece side chain is vertical setting, and the relative middle pole of sidepiece side chain circumferentially is evenly arranged between mobile platform and fixed platform;
The middle part of middle pole is provided with four by the degree flexible hinge, and described four comprise upper coupling ring, second line of a couplet T-Ring and center pillar by the degree flexible hinge;
Be provided with the Y type plate of three branches in upper coupling ring, three branches of Y type plate all are arranged on same level, and the first branch is along x axle layout, and the second branch is along y axle layout, and the 3rd branch arranges along the direction that becomes 135 degree with the x axle;
Be provided with distribute along even circumferential three radially sheet beams in second line of a couplet T-Ring; Three radially the sheet beam be installed in the center pillar lower end, the bottom surface of the upper termination Y type plate of center pillar;
The two ends of each sidepiece side chain respectively are provided with a flexible ball hinge, and the middle part of the sidepiece side chain of each is provided with a mobile hinge of flexibility;
The mobile hinge of described flexibility is formed with the lower support docking for being connected flexible mobile hinge lower end by top joint pin, bottom joint pin, the upper support that moves hinge top for supporting flexible, upper support and lower support all consist of 2 horse nail type beams that are mutually 90 degree, and the joint of upper support and lower support forms the dagger of a hollow; Upper support is connected with the bottom joint pin with the top joint pin respectively with lower support.
2. full flexible six-degree-of-freedom fine operating platform according to claim 1, is characterized in that, described flexible ball hinge comprises top connecting ring and bottom connecting ring, and top connecting ring and bottom connecting ring lay respectively at the top and bottom of flexible ball hinge; The top connecting ring is connected by three axial rib with the bottom connecting ring, and the top connecting ring is provided with 2 the axial shuttle type of x grooves, and the bottom connecting ring is provided with 2 the axial shuttle type of y grooves.
3. full flexible six-degree-of-freedom fine operating platform according to claim 2, is characterized in that, at described top connecting ring and connecting ring outer end, bottom, is equipped with conical inner screw thread; Be provided with the circular cone external screw thread at top joint pin and bottom joint pin; Described conical inner screw thread and circular cone external screw thread are suitable.
4. full flexible six-degree-of-freedom fine operating platform according to claim 3, is characterized in that, is provided with 3 foil gauges in the plate of described Y type, is provided with 2 foil gauges on each dagger, and every a slice radially sheet beam is provided with 1 foil gauge.
5. according to the described full flexible six-degree-of-freedom fine operating platform of claim 1-4 any one, it is characterized in that, two ends of middle pole are equipped with tapered tread.
6. full flexible six-degree-of-freedom fine operating platform according to claim 5, is characterized in that, described sidepiece side chain is three groups.
CN201110350403.5A 2011-11-08 2011-11-08 Fully flexible six-degree-of-freedom fine operating platform Expired - Fee Related CN102501247B (en)

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CN103085060B (en) * 2012-12-31 2015-04-22 中国科学院自动化研究所 Butt joint / separating device and method based on force sense and visual sense mixture detection
CN106239495B (en) * 2016-08-30 2018-08-07 上海大学 A kind of micro-nano operation parallel pose adjustment platform and method
CN106826722A (en) * 2017-03-06 2017-06-13 天津大学 A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit
CN107263528A (en) * 2017-07-21 2017-10-20 清华大学 The flexible joint structure of flexible arm
CN108961419B (en) * 2018-06-15 2023-06-06 重庆大学 Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system
CN110161643B (en) * 2019-04-26 2020-06-12 中国科学院长春光学精密机械与物理研究所 Optical platform device based on kinematics support

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