CN108961419B - Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system - Google Patents
Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system Download PDFInfo
- Publication number
- CN108961419B CN108961419B CN201810620474.4A CN201810620474A CN108961419B CN 108961419 B CN108961419 B CN 108961419B CN 201810620474 A CN201810620474 A CN 201810620474A CN 108961419 B CN108961419 B CN 108961419B
- Authority
- CN
- China
- Prior art keywords
- axis
- microscopic
- space
- field
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T19/00—Manipulating 3D models or images for computer graphics
- G06T19/003—Navigation within 3D models or images
Abstract
A microscopic visual field space digitizing method of a microscopic visual system of a micro assembly system comprises the steps of controlling the microscopic visual system to perform microscopic visual field space tomography through a precise positioning system by utilizing a computer microscopic visual tomography technology and obtaining a tomographic image; reconstructing a three-dimensional space of the tomographic image by combining the tomographic image with a motion step length of a corresponding precise positioning system; acquiring digital information of a three-dimensional fault view field space through a gridding and grid digitizing technology, and acquiring digital information of a microscopic view field space of a monocular microscopic vision system in each direction; finally, the digital microscopic field space is obtained by calculating the digital information of the intersecting field space in each direction. The method successfully expresses microscopic view field space information of the microscopic vision system of the micro-assembly system in the form of digital information, provides necessary conditions for three-dimensional visualization, path optimization, pose detection and the like of the micro-assembly system, and effectively reduces the difficulty of operation problems of the micro-assembly system.
Description
Technical Field
The invention belongs to the field of intelligent manufacturing and scientific research, and particularly relates to the field of micro-assembly and micro-operation, in particular to the application of a space digitizing technology under a microscopic field of view space and the realization of operations such as part reconstruction, assembly, positioning, pose detection, path planning and the like by using the digitizing technology.
Background
In the micro-assembly system, the micro-vision system plays a crucial role, and most of micro-assembly systems adopt the micro-vision system, and the three-dimensional reconstruction technology of parts of the micro-vision system is the main research content of all micro-assembly systems with vision systems and the content which must be processed. The three-dimensional reconstruction of parts of a visual part in a Marr visual computing theory frame can be divided into two major categories, one category is to reconstruct a two-dimensional image acquired by an object through a visual system, and the reconstruction theory is mainly to reconstruct the object by utilizing the relationship between points, lines and planes of the object in a three-dimensional space and the points and lines of the object in the two-dimensional image. Another is to acquire a sequence of images of a cross section of the object by means of tomography, and reconstruct the object from the sequence of images at intervals.
The high resolution and high magnification of the microscopic vision system provides great convenience for the observation of the tiny parts, but the problems of small depth of field and small field of view are brought. The small field of view is the full view of the part to be assembled cannot be obtained in breadth, and the small field of view is the full view of the part cannot be obtained in depth. Thus, the spatial reconstruction of the parts cannot be performed in a point, line or plane mode, and the reconstruction of the parts is inconvenient in a micro-assembly system by adopting CT, MRI and other technologies to perform tomography. Therefore, the space information general view cannot be reconstructed during the assembly or operation of the micro parts in the microscopic field space, and the optimization of the assembly or operation path cannot be performed, so that the technical problems of low assembly or operation precision, low efficiency, high assembly difficulty and the like are solved. Based on the above problems, a microscopic field space digitizing method of a micro-assembly system is provided.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a microscopic view field space digitizing method and system of a microscopic vision system of a micro assembly system, which are used for carrying out three-dimensional display, pose detection and optimizing assembly or operation paths of micro parts under the digitized microscopic view field space, providing necessary conditions for three-dimensional visualization, path optimization, assembly, positioning, pose detection and the like of the micro assembly or micro operation system, effectively reducing the difficulty of the micro assembly problem and improving the assembly or operation efficiency of the whole system.
The technical scheme adopted for solving the technical problems is as follows:
a microscopic visual field space digitizing method of a microscopic visual system of a micro-assembly system mainly adopts a computer microscopic visual fault scanning technology, and a precise positioning system is utilized to control the microscopic visual system to scan the microscopic visual field space of the microscopic visual system of the micro-assembly system along the directions of an X axis and a Z axis, or the X axis and a Y axis and a Z axis, or the X axis and the Y axis and the Z axis and any axis of a defined coordinate system, so as to obtain a fault scanning image sequence along the directions of the X axis and the Z axis, or the X axis and the Y axis and any axis of the defined coordinate system; and then calculating the digital information of the intersecting view field space of each monocular microscopic vision system by a three-dimensional microscopic view field space digital reconstruction technology based on the tomographic image, thereby obtaining the digital microscopic view field space of the microscopic vision system of the micro assembly system.
The microscopic view field space digitizing method of the micro assembly system includes the following steps:
(1) Acquiring a tomographic image sequence in X-axis and Z-axis, X-axis and Y-axis and Z-axis, or X-axis and Y-axis and Z-axis and any axis (R-axis) directions and a displacement sequence of a precise positioning system by adopting a computer microscopic vision tomographic scanning technology;
(2) Reconstructing three-dimensional fault view field spaces corresponding to the fault scanning images in the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions according to the obtained fault scanning image sequences and step length sequences of the precise positioning system, calculating digital information of the three-dimensional fault view field spaces, obtaining digital microscopic view field spaces expanding in all directions, and calculating digital microscopic view field spaces of a microscopic vision system of the micro assembly system; the step (2) specifically comprises:
(2.1) acquiring corresponding three-dimensional fault field space sequence vectors by using a fault scanning image sequence in X-axis and Z-axis, or X-axis and Y-axis and Z-axis and any (R-axis) directions and a precision positioning system step sequence;
(2.2) removing information outside the three-dimensional fault view field space;
(2.3) rasterizing and raster digitizing three-dimensional tomographic field of view space along X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions to obtain digitized information of each three-dimensional tomographic field of view space;
(2.4) respectively calculating the expanded digital microscopic field space of the monocular microscopic vision system of the micro-assembly system in the corresponding direction according to the three-dimensional tomographic field space digital information of the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions;
(2.5) three-dimensional spatial relationship matching of the extended digitized microscopic field space of the monocular microscopic vision system in the X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions;
(2.6) calculating an intersecting field of view space of a microscopic vision system of the microassembly system.
In the step (1), a tomographic image of a microscopic field space is obtained, wherein a computer microscopic visual tomographic technique is used for controlling a microscopic visual system to perform tomographic scanning on the microscopic visual space along the optical axis direction of each monocular microscopic visual system by using a precise positioning system, and a two-dimensional tomographic image of a local tomographic space of the microscopic visual space along the X-axis, Y-axis and Z-axis directions of a defined coordinate system is obtained, and the specific contents are as follows:
(1.1) determining the vertical distance from the origin of the defined coordinate system, to the monocular microscopic vision system objective lens in the X-axis and Z-axis, or X-axis and Y-axis and Z-axis, or R-axis directions, the step length, the moving direction, the moving mode, the moving speed, the initial position, and the monocular microscopic vision system objective lens in the X-axis and Z-axis, or X-axis and Y-axis and Z-axis directions in the initial position of the defined coordinate system 
And->
And->
And->
And->
And (3) with
And->
Determining the position of the principal point of the image of the optical axis of the microscopic vision system I (2) passing through the focal plane as +.>
The principal point of the image of the optical axis of the microscopic vision system II (7) passing through the focal plane is positioned as +.>
The principal point of the image of the optical axis of the microscopic vision system III (14) passing through the focal plane is positioned +.>
Determining the position of an image principal point of an optical axis of a microscopic vision system IV (17) passing through a focal plane; determining the field resolution, depth of field, pixel size and magnification of a corresponding microscopic vision system, and setting proper light source light intensity;
(1.2) for the X-axis and Z-axis or X-axis and Y-axis and Z-axis and R-axis directions, the precision positioning system controls the monocular microscopy vision system in each direction to acquire a tomographic image sequence along the X-axis and Z-axis or X-axis and Y-axis and Z-axis and R-axis directions and a precision positioning system displacement sequence;
the precise positioning system controls the monocular microscopic vision system to respectively move along the X, Y, Z axis direction by a movement step delta x 、Δ y 、Δ z Tomographic scanning was performed to obtain a two-dimensional tomographic image sequence in the X, Y, Z axial direction, and recorded as follows:
recording a corresponding displacement sequence of the precise positioning system as follows:
Wherein Img x 、Img y 、Img x Vectors respectively formed along X-axis, Y-axis and Z-axis direction tomographic image sequences defining a coordinate system are obtained for computer microscopic vision tomographic scanning; d (D) x 、D y 、D z Displacement vectors of a precise positioning system corresponding to a tomographic image sequence obtained during computer microscopic vision tomographic scanning along X-axis, Y-axis and Z-axis directions of a defined coordinate system; x is x N 、y N 、z N The times of computer microscopic visual tomography in the three-dimensional orthogonal direction are respectively;
displacement of accurate positioning system for fault scanning along X-axis, Y-axis and Z-axis directions of defined coordinate system
With respective step of movement delta x 、Δ y 、Δ z The relationship of (2) is as follows:
fault scan step delta for precision positioning system x 、Δ y 、Δ z The requirements are satisfied:
Δ x ≤DOF x
Δ y ≤DOF y
Δ z ≤DOF z
wherein DOF x 、DOF y 、DOF z Depth of field of a microscopic vision system for tomographic scanning along X-axis, Y-axis, and Z-axis directions, respectively, defining a coordinate system.
Aiming at the micro-assembly system of the X-axis and Y-axis and Z-axis and R-axis multi-view microscopic vision system, the precise positioning system (18) is added to control the monocular microscopic vision system IV (17) to acquire the image vector Img constructed by the tomographic image sequence on the basis of acquiring tomographic images in the X-axis, Y-axis and Z-axis directions R Recording displacement D of a tomographic precise positioning system (18) R The method comprises the steps of carrying out a first treatment on the surface of the Wherein the motion step delta of the precision positioning system R And the depth of field of the microscopic vision system IV (17) is smaller than or equal to the depth of field.
Further, in step 2, (2.1) obtaining a corresponding three-dimensional tomographic field of view space sequence vector by using tomographic image sequences of the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis, and a corresponding precision positioning system step length; the three-dimensional tomographic field space method for respectively constructing three directions of an X axis, a Y axis and a Z axis for tomographic image sequences along the three directions of the X axis, the Y axis and the Z axis of a defined coordinate system is as follows:
the visual field heights of microscopic vision systems II, III, I (7, 14, 2) for setting X-axis, Y-axis and Z-axis directions to perform fault scanning are respectively H x 、H y 、H z The field of view is respectively W x 、W y 、W z The movement step delta of the corresponding precision positioning systems II, III, I (6, 15, 1) x 、Δ y 、Δ z The corresponding three-dimensional tomographic field of view space sizes of tomographic images along the X-axis, Y-axis and Z-axis directions are respectively: h x ×W x ×Δ x 、H y ×W y ×Δ y 、H z ×W z ×Δ z The method comprises the steps of carrying out a first treatment on the surface of the Vectors formed by tomographic image sequences along X-axis, Y-axis and Z-axis directionsImg x 、Img y 、Img z The reconstructed corresponding three-dimensional tomographic field of view space sequence vectors are:
in the middle of
The method comprises the following steps:
wherein:
respectively representing three-dimensional tomographic field of view space->
In the directions of X axis, Y axis and Z axis of a defined coordinate system; />
Respectively representing three-dimensional tomographic field of view space- >
In the directions of X axis, Y axis and Z axis of a defined coordinate system; />
Respectively representing three-dimensional tomographic field of view space->
In the directions of X axis, Y axis and Z axis of a defined coordinate system; d, d 7 、d 14 、d 2 Object distances corresponding to the image distances of the microscopic vision systems II, III, I (7, 14, 2), respectively.
Obtaining a tomographic image sequence aiming at a microscopic vision system in the R-axis direction of a defined coordinate system, constructing each three-dimensional tomographic view field space in the R-axis direction according to the view field size of the microscopic vision system IV (17) and the motion step length of a precise positioning system (18), and constructing a three-dimensional tomographic view field space sequence vector S R 。
(2.2) the specific method for removing the information outside the three-dimensional fault view field space is as follows:
three-dimensional tomographic field of view space along X-axis, Y-axis, Z-axis directions
The displacement amounts of the corresponding precise positioning systems II, III and I (6, 15 and 1) scanned along the X-axis, Y-axis and Z-axis directions are respectively +.>
The vertical distance +.about.about.the vertical distance of the objective lens of the corresponding monocular microscopic vision system II, III, I (7, 14, 2) from the origin of the defined coordinate system when the system (6, 15, 1) is precisely positioned along the X-axis, Y-axis and Z-axis>
Object distance d corresponding to the image distance of the microscopic vision systems II, III, I (7, 14, 2) 7 、d 14 、d 2 Microscopic visual System II (7) at XThe interval in the axial direction is
In the Y-axis direction, the interval is +.>
In the Z-axis direction, the interval is->
The information in the range of (a) is three-dimensional tomographic field space +.>
Removing signals other than the range; microscopic Vision System III (14) in the X-axis direction +.>
The interval along the Y-axis direction is
The interval in the Z axis direction is +.>
The information in the range is three-dimensional tomographic field space +.>
Removing signals other than the range; microscopic visual System I (2) in the X-axis direction +.>
The interval along the Y-axis direction is +.>
Depth in Z-axis direction of
The information in the range is three-dimensional tomographic space +.>
Is removed from the signal in the range.
Three-dimensional tomographic field of view space vector S in the R-axis direction R And determining the spatial range of each three-dimensional fault view field space acquired in the R axis direction according to the image principal point position at the initial position of the microscopic vision system IV (17) and the motion displacement of the precise positioning system.
(2.3) rasterizing and raster digitizing three-dimensional tomographic field spaces along the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions to obtain three-dimensional tomographic field space digitized information in each direction; the three-dimensional fault view field space digitizing process along X axis, Y axis, Z axis and R axis is as follows:
Three-dimensional tomographic field of view space for X-axis direction
The size of the catalyst is H x ×W x ×Δ x Setting an n x ×n x ×n x Grid cube of individual pixels, using +.>
Three-dimensional tomographic field of view space of a grid cube pair>
Discretizing, and constructing a three-dimensional digitizing matrix according to the grid cube position and the function value of the grid cube>
Setting the number N of pixel points in each grid cube to be 1 X Setting a grid cube assignment threshold TH X If N X ≥TH X The grid cube is assigned a value of 1, otherwise, the grid cube is assigned a value of 0; three-dimensional tomographic field of view space->
Middle (p) i ，q i ，r i ) The assignment function of the grid cube of the position is +.>
Namely: />
Wherein the method comprises the steps of
p i ∈[1 2…p x ]，q i ∈[1 2…q x ]，r i ∈[1 2…r x ]，N X (p i ，q i ，r i ) Space +.>
Middle (p) i ，q i ，r i ) The number of pixel points in the grid cube of the position is 1;
similarly, three-dimensional fault view field space for Y-axis and Z-axis directions
Respectively set the size of n y ×n y ×n y Is of size n z ×n z ×n z Is +.>
Discretizing and according to the space of the three-dimensional fault field of view>
The grid cube position and the function value of the grid cube in the three-dimensional fault view field are respectively obtainedSpace->
Digitized matrix->
The method comprises the following steps: />
Wherein the method comprises the steps of
N Y (p j ，q j ，r j ) Space +.>
Middle (p) j ，q j ，r j ) The number of pixel points in the grid cube of the position is 1, N z (p k ，q k ，r k ) Space +.>
Middle (p) k ，q k ，r k ) The number of pixel points in the grid cube of the position is 1, p j ∈[1 2…p y ]，q j ∈[1 2…q y ]，r j ∈[1 2…r y ]，p k ∈[1 2…p z ]，q k ∈[1 2…q z ]，r k ∈[1 2…r z ]。
Three-dimensional tomographic field of view space S in the R-axis direction R Then set the size to n R ×n R ×n R Discretizing it according to the grid cube in three-dimensional tomographic field space S R The grid cube position and the function value of the grid cube to obtain a three-dimensional fault view field space S R Is a digitized matrix of (a)
(2.4) calculating the extended digital microscopic field space of the monocular microscopic vision system of the micro-assembly system in the directions of the X axis and the Z axis, the X axis and the Y axis and the Z axis, or the X axis and the Y axis and the Z axis and the R axis according to the three-dimensional tomographic field space digital information of the directions of the X axis and the Z axis, the X axis and the Y axis and the Z axis, or the X axis and the Y axis and the Z axis and the R axis respectively. The specific method for the extended digital microscopic visual field space of the monocular microscopic visual system in the directions of X axis, Y axis, Z axis and R axis is as follows:
(1) acquiring a three-dimensional tomographic field space S for a monocular microscopic vision system in the X-axis direction x Using two adjacent three-dimensional fault spaces therein
And->
Digitized matrix of combinable computations>
Definition of the precision positioning System II (6) the microscopic Vision System II (7) is controlled to perform a tomographic scan (Flag) along the positive X-axis direction x =1) according to two adjacent three-dimensional tomographic spaces ∈1>
And->
Digitized matrix->
Then:
when the precise positioning system II (6) controls the microscopic vision system II (7) to perform fault scan (Flag) along the X-axis negative direction x = -1) time:
(2) computing extended microscopic field of view space for microscopic Vision System II (7)
Digital information of->
The method comprises the following steps:
wherein [ among others ]]' represent matrix transpose, flag x For recording the direction of scanning along the X-axis defining the coordinate system, digitizing the information
The described extended microscopic field space in the X-axis direction +.>
The size is H x ×W x ×D x ，D x ＝x N ×Δ x ；
Similarly, a three-dimensional fault view field space S is acquired for a monocular microscopic vision system in the directions of a Y axis and a Z axis y 、S z Calculating an extended microscopic field of view space
The precise positioning systems III, I (15, 1) respectively control the Flag during the forward scanning of the microscopic vision systems III, I (14, 2) along the Y axis and the Z axis y ＝1、Flag z =1, flag at negative scan y ＝-1、Flag z = -1, then microscopic visual field space of the microscopic visual systems III, I (14, 2) extended by tomography +.>
Digital information of->
The method comprises the following steps:
wherein the method comprises the steps of
Description->
The size is H y ×W y ×D y ，D y ＝y N ×Δ y ；/>
Description->
The size is H z ×W z ×D z ，D z ＝z N ×Δ z 。
Similarly, for monocular display in the R-axis directionThree-dimensional fault view field space S acquired by micro vision system IV (17) R Calculating an extended microscopic field of view space
Taking into account the scanning direction of the precision positioning system (18) to calculate a digitised matrix G for stitching calculation for different scanning directions R Thereby obtaining an extended microscopic field space +.>
Digitized matrix->
(2.5) providing a standard matching template in the assembly space of the micro-assembly system, the extended digitized microscopic field space of each monocular microscopic vision system in the directions of the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis
And->
And->
And->
And->
And->
And->
Respectively acquiring digital information of a standard matching template, wherein the specific matching process is as follows:
(1) expanded digitized microscopic field spatial size and digitized grid cube size match for each monocular microscopic vision system along X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions: selecting a feature point in the standard matching template, and acquiring the extended digital microscopic field space of the feature in each monocular microscopic vision system along the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions
And->
Or->
And->
And->
Or->
And->
And->
And->
The corresponding digital information position in the microscope is matched with the microscope field space +.f by utilizing the principle that the same characteristic point of the standard matching template is in the same position of different digital microscope vision spaces >
And->
Or->
And->
And->
Or->
And->
And->
And->
Is determined in the microscopic field of view according to the position of the digitized information>
And->
Or->
And->
And->
Or->
And->
And->
And->
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system XY plane +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
A range in a Z-axis direction of a defined coordinate system; the characteristic digital information is in microscopic field space +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system XZ plane +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
A range in a Y-axis direction of a defined coordinate system; the characteristic digital information is in microscopic field space +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system YZ plane +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
In defining the range of the coordinate system in the X-axis direction, thereby completing the microscopic field space +.>
And->
Or->
And (3) with
And->
Or->
And->
And->
And->
Matching the sizes; selecting standard matching template at ∈ >
And->
Or->
And->
And (3) with
Or->
And->
And->
And->
Digitized distance features, namely ++metric in equidistant principle of the same distance features of standard matching templates in different digitized microscopic vision spaces>
And->
Or->
And->
And->
Or->
And->
And->
And->
The digital grid cube size is matched, and the expanded digital microscopic field space of each monocular microscopic vision system along the X axis and the Z axis, or the X axis and the Y axis and the Z axis and the R axis after the digital microscopic field space size is matched is%>
And->
Or->
And->
And->
Or->
And->
And->
And->
(2) Extended digitized microscopic field of view space for each monocular microscopic vision system along the X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions
And->
Or->
And->
And->
Or->
And->
And->
And->
Spatial position matching: extended digitized microscopic field of view nulls from respective monocular microscopic vision systems along X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directionsMeta->
And->
Or->
And->
And->
Or alternatively
And->
And->
And->
The digital microscopic visual field space coordinate system is kept consistent with the definition coordinate system (11) by utilizing space translation and rotation transformation, so that the extended digital microscopic visual field space of each monocular microscopic visual system along the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions is improved >
And->
Or->
And->
And->
Or alternatively
And->
And->
And->
The microscopic field space after space translation and rotation transformation is +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
The digitized information after three-dimensional space position matching is as follows: />
And->
Or alternatively
And->
And->
Or->
And->
And->
And->
(2.6) a specific method of calculating the intersecting field of view space of the microscopic vision system of the microassembly system is as follows:
the micro assembly system of the binocular orthogonal microscopic vision system comprises a microscopic field space G of the microscopic vision system, which is as follows:
the micro assembly system of the three-eye orthogonal micro vision system comprises the following micro vision system:
the micro assembly system of the multi-purpose micro vision system comprises a micro vision system with a micro field space G as follows:
where ∈ represents the intersection calculation of microscopic field space.
The microscopic vision system is suitable for microscopic visual field space digitization of a microscopic vision system of a micro-assembly system of which the binocular and trinocular are orthogonal and have other non-orthogonal microscopic vision systems, so that digital information of the microscopic visual field space is obtained.
The micro visual field space digitizing system of the micro visual system of the micro assembly system can operate micro parts in the digital micro visual field space of the micro visual system of the micro assembly system obtained by adopting the micro visual field space digitizing method of the micro visual system of the micro assembly system in a computer. The system is also applicable to micro-operating systems and cell operating systems.
The invention has the following advantages:
(1) The invention expresses microscopic view field space information of a microscopic vision system of the micro-assembly system in a digital information form, visually and intuitively represents three-dimensional information of an object in the microscopic view field space, and provides necessary conditions for three-dimensional visualization, path optimization, pose detection and the like of the micro-assembly system;
(2) The depth range of the microscopic visual field space is expanded through the computer microscopic visual tomography technology, namely, the microscopic visual field space of the microscopic visual system is expanded under the condition of keeping the high resolution of the microscopic visual system, and the problem that the information of an operation object cannot be acquired due to the limitation of the depth of field is avoided;
(3) Compared with the existing method for improving the intersecting microscopic view field space of the monocular microscopic vision system in all directions by adjusting the internal and external parameters and the topological structure of the microscopic vision system, the method avoids errors caused by adjusting the internal and external parameters and the topological structure of the microscopic vision system;
(4) The problem of low precision caused by missing depth information in the existing three-dimensional space reconstructed by two-dimensional images is avoided by utilizing a digital three-dimensional microscopic field space.
Drawings
FIG. 1 is a schematic view of a microfabricated system of microfabricated vision systems in a three-view orthogonal microfabrication system;
FIG. 2 is a schematic view of a microfabricated system microscopic vision spatial tomographic image of a binocular orthogonal microscopic vision system of a particular embodiment;
FIG. 3 is a schematic view of a microfabricated system of microscopic fields of view spatial tomography with a rotatable motion stage implementing a multi-angle tomography system in a specific embodiment;
FIG. 4 is a schematic view of a microassembly system tomoscan of a three-eye orthogonal and monocular non-orthogonal microscopic vision system according to an exemplary embodiment;
FIG. 5 is a block diagram of a microfabricated system of a three-dimensional orthogonal microscopic vision system with a precision positioning system for displacement sensor systems in a specific embodiment;
FIG. 6 is a block diagram of a microfabrication system of a three-dimensional orthogonal microscopic vision system of a conventional precision positioning system of a particular embodiment;
FIG. 7 is a block diagram of a microfabricated system of a binocular orthogonal microscopic vision system with a precision positioning system for displacement sensor systems in a particular embodiment;
FIG. 8 is a schematic view of depth of field size versus scan for a precision positioning system step microscopy vision system.
In the figure: 1. the precise positioning system I,2, the microscopic vision system I,3, the microscopic vision system I has wide view field, 4, the microscopic vision system I has high view field, 5, the space of the intersecting view field, 6, the precise positioning system II, 7, the microscopic vision system II, 8, the step length of the precise positioning system II, 9, the definition coordinate system, 10, the workbench, 11, the step length of the precise positioning system III, 12, the microscopic vision system I depth of field, 13, the step length of the precise positioning system I, 14, the microscopic vision system III, 15, the precise positioning system III, 16, the multi-degree-of-freedom rotary workbench, 17, the microscopic vision system IV, 18, the precise positioning system IV, 19, the host computer, 20, the image acquisition card, 21, the light source controller, 22, the precise positioning system controller, 23, the displacement sensor controller, 24 micro clamp controller, 25, the microscopic vision system I coaxial light source, 26, a micro vision system II coaxial light source, 27, a precision positioning system I displacement sensor, 28, a precision positioning system II displacement sensor, 29, a precision positioning system III displacement sensor, 30, a micro clamp system, 31, a micro vision system III coaxial light source, 32, a part, 33, a step length equal to the step length of a depth of field, 34, a step length greater than the step length of the depth of field, 35, a kth scanning step length smaller than the step length of the depth of field, 36, a kth+1th scanning step length smaller than the step length of the depth of field, 37, a kth+2th scanning step length smaller than the step length of the depth of field, 8, a step length equal to the depth of field, 39, a step length greater than the depth of field of the depth of field, 40, a non-scanning area with a step length greater than the depth of field, 41, a kth scanning step length smaller than the depth of field, 42, a kth+1th scanning step length smaller than the depth of field, 43, the k+2th scan step is less than the depth of field.
Detailed Description
The invention provides a microscopic visual field space digitizing method of a microscopic visual system of a micro-assembly system, namely, a three-dimensional microscopic visual field space digitizing reconstruction technology of a computer microscopic visual fault scanning technology and a fault scanning image based on the computer microscopic visual fault scanning is adopted to calculate microscopic visual field space digitizing information of the microscopic visual system of the micro-assembly system so as to realize microscopic visual field space digitizing of the microscopic visual system of the micro-assembly system.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The preferred embodiments are merely for the purpose of illustrating the invention and are not intended to limit the scope of the invention.
Example 1: microscopic visual field space digitizing system of microscopic visual system of micro-assembly system of three-eye orthogonal microscopic visual system
As shown in FIG. 1, the system has a rotating stage for multi-angle tomography, three-eye orthogonal microscopy vision systemThe fault scanning schematic diagram of the micro-assembly system is shown in fig. 3, and the micro-view field space digitizing system of the micro-vision system of the micro-assembly system is also characterized in that the micro-vision systems I, II, III (1, 6, 15) with different angles are controlled by the precise positioning systems I, II, III (2, 7, 14) to move along the optical axis direction of each micro-vision system, the micro-view field space of the micro-vision system of the whole micro-assembly system is completely scanned, and the fault scanning image sequences with different angles and the corresponding position information sequences are recorded. Specifically, according to the schematic view of microscopic field space scanning of the computerized microscopic visual tomographic scanning technique shown in fig. 1, the microscopic visual systems II, III, I (7, 14, 2) perform tomographic scanning on the microscopic field space of the microscopic visual system of the microassembly system under the control of the precise positioning systems II, III, I (6, 15, 1) respectively to acquire tomographic images along the X, Y, Z axis direction of the defined coordinate system (9). Schematic structural diagrams of the microfabrication to construct a trinocular orthogonal microscopic vision system are shown in fig. 5 and 6. According to the schematic diagram of the relation between the motion step length and the depth of field of the fault scanning of the precise positioning system shown in fig. 8, the precise positioning system (1, 6, 15) respectively controls the microscopic vision system (2, 7, 14) to perform the fault scanning to obtain the fault image sequence, and then the step length delta of the precise positioning system (1, 6, 15) z 、Δ x 、Δ y DOF smaller than the microscopic vision system (2, 7, 14) is required z 、DOF x 、DOF y . The process of digitizing the microcomputing system microscopic vision space of the trinocular orthogonal microscopic vision system was consistent with the method described in example 4.
In general, a microscopic field spatial digitizing system of a microscopic vision system of a microassembly system includes a microscopic vision system, a precision positioning system, and a host computer.
The microscopic vision system comprises: (1) a microscopic amplifying part, namely, amplifying an imaging object in a microscopic field space by an optical microscope or an electron microscope; (2) the imaging part is used for imaging objects in the microscopic field space through a CCD or CMOS camera.
The precision positioning system comprises: (1) a movement device for realizing one-dimensional precise movement; (2) and a high-precision positioning motion driving device and a controller for realizing the matching of positioning precision and depth of field of a microscopic vision system.
The host computer is used for performing control calculation on the precise positioning systems I, II, III (1, 6, 15) and the microscopic vision systems I, II, III (2, 7, 14) and performing digital microscopic field space result display.
In addition, fig. 5 is also provided with a displacement standard quantity system for controlling the slice position and recording the obtained slice position information; the device comprises a displacement sensor which is arranged on a motion mechanism of a precise positioning system and used for realizing displacement sensing, a precise positioning system controller which is used for performing guide rail control motion feedback control, and a displacement sensor controller.
Example 2: the micro-assembly space of the micro-assembly system of the binocular orthogonal microscopic vision system is digitized.
A schematic of a tomography of a binocular orthogonal microscopic vision system is shown in fig. 2, and a schematic of a structure of a micro assembly of the binocular orthogonal microscopic vision system is shown in fig. 7. According to the microscopic visual field space digitizing process shown in fig. 2, the microscopic visual systems I, II (2, 7) respectively perform tomographic scanning on the microscopic visual field space of the microscopic visual systems of the micro assembly system under the control of the precise positioning systems I, II (1, 6) to obtain tomographic images along the Z, X axis direction of the defined coordinate system (9), and three-dimensional tomographic field space reconstruction in the Z axis and X axis directions is realized by combining the step sizes of the precise positioning systems I, II (1, 6). According to the schematic diagram of the relation between the motion step length and the depth of field of the fault scan of the precise positioning system shown in fig. 8, the precise positioning system I, II (1, 6) respectively controls the microscopic vision systems I, II (2, 7) to perform the fault scan to obtain the fault image sequence, and the step length delta of the precise positioning system I, II (1, 6) z 、Δ x 、Δ y DOF that is smaller than the microscopic vision system (2, 7) is required z 、DOF x . The process of digitizing the microfabricated microscopic vision space of the binocular orthogonal microscopic vision system was consistent with the method described in example 5.
Example 3: microcomputerized system microscopic vision space digitalization of three-eye orthogonal and non-orthogonal microscopic vision system
Three-eye healthy qiA schematic of a microassembly system tomographic representation of an intersection with a non-orthogonal microscopic vision system is shown in fig. 4. According to the microscopic view space digitizing process shown in fig. 4, the microscopic vision system I, II, III, IV (2, 7, 14, 17) performs tomographic scanning on the microscopic view space of the microscopic vision system of the micro assembly system under the control of the precision positioning system I, II, III, IV (1, 6, 15, 18) to obtain tomographic images along the Z, X, Y axis and the R axis direction of the defined coordinate system (9), and realizes three-dimensional tomographic view space reconstruction on the Z, X, Y axis and the R axis direction in combination with the step length of the precision positioning system I, II, III, IV (1, 6, 15, 18). According to the schematic diagram of the relation between the motion step length and the depth of field of the fault scan of the precision positioning system shown in fig. 8, the precision positioning system I, II, III, IV (1, 6, 15, 18) respectively controls the microscopic vision system I, II, III, IV (2, 7, 14, 17) to perform the fault scan to obtain the fault image sequence, and then the step length delta of the precision positioning system I, II, III, IV (1, 6, 15, 18) z 、Δ x 、Δ y 、Δ R DOF that is smaller than the microscopic vision system (2, 7) is required z 、DOF x 、DOF y 、DOF R . Microcomputing system microscopic vision spatial digitization of a trinocular orthogonal and non-orthogonal microscopic vision system was consistent with the method described in example 6.
Example 4 microscopic field space digitizing method for micro-vision system of micro-assembly system of three-eye orthogonal micro-vision system
The micro-assembly system adopting the three-eye orthogonal micro-vision system shown in fig. 1 and 3 realizes the micro-visual field space digitizing process of the micro-vision system of the micro-assembly system according to the following steps:
step 1.1 determining the step length, the movement direction, the movement mode, the movement speed, the initial position and the directions along the X axis, the Y axis and the Z axis of a precise positioning system for microscopic vision tomography along the directions of the X axis, the Y axis and the Z axis of a defined coordinate systemPerpendicular distance of monocular microscopic vision system objective lens from origin of defined coordinate system
And determining the field resolution, depth of field, pixel size and magnification of a corresponding microscopic vision system, and setting proper light source light intensity.
Step 1.2 according to the defined coordinate system, the precise positioning system controls the three monocular microscopic vision systems to respectively move along the X, Y, Z axis direction by a step delta x 、Δ y 、Δ z Tomographic scanning was performed to obtain a two-dimensional tomographic image sequence in the X, Y, Z axial direction, and recorded as follows:
recording a corresponding displacement sequence of the precise positioning system as follows:
wherein Img x 、Img y 、Img z Along defined coordinate systems obtained for computerized microscopic visual tomographyVectors formed by the X-axis, Y-axis and Z-axis direction tomographic image sequences; d (D) x 、D y 、D z Displacement vectors of a precise positioning system corresponding to a tomographic image sequence obtained during computer microscopic vision tomographic scanning along X-axis, Y-axis and Z-axis directions of a defined coordinate system; n (N) i 、N j 、N k The times of computer microscopic visual tomography in the three-dimensional orthogonal direction are respectively;
displacement of accurate positioning system for fault scanning along X-axis, Y-axis and Z-axis directions of defined coordinate system
With respective step of movement delta x 、Δ y 、Δ z The relationship of (2) is as follows:
in this step, it is necessary to set the step length Δ of the precision positioning system for tomographic scanning in the X-axis, Y-axis, and Z-axis directions x 、Δ y 、Δ z . According to the steps of the computer microscopic visual tomography technique, according to the schematic diagram of the relationship between the step length of the precise positioning system and the depth of field of the microscopic visual system shown in fig. 8, the depth of the three-dimensional tomographic space of the microscopic visual system for performing tomography along the Z axis at this time is DOF, and the three-dimensional space at this time is h×w×dof, as shown by reference numeral 33; if Δ < DOF as indicated by reference numerals 35, 36, 37, the three-dimensional tomographic field of view space is: h×w×Δ; if delta > DOF, as indicated by reference numeral 34 The three-dimensional tomographic field of view space at this time is shown as: h×w×Δ; however, the area is larger than the maximum space area that can be imaged clearly, i.e. a depth of field area, and there is no clear imaging space in the tomographic field space at this time, as indicated by reference numeral 40, so that the tomographic scan cannot fully acquire microscopic field space information, thereby generating data loss. For this purpose, the step size of the precision positioning system may not exceed the depth of field of the microscopic vision system, i.e
Δ x ≤DOF x
Δ y ≤DOF y
Δ z ≤DOF z 。
step 2.1, acquiring corresponding three-dimensional fault view field space sequence vectors by using a fault scanning image sequence in X-axis, Y-axis and Z-axis directions and a step sequence of a precision positioning system:
setting the field heights (Height) of the microscopic vision systems II, III, I (7, 14, 2) for performing fault scanning along the X-axis, Y-axis and Z-axis of a defined coordinate system to be H respectively x 、H y 、H z The field widths (Width) are W respectively x 、W y 、W z . The movement step delta of the corresponding precision positioning systems II, III, I (6, 15, 1) x 、Δ y 、Δ z . The corresponding three-dimensional tomographic field of view space sizes of tomographic images along the X-axis, Y-axis and Z-axis directions are respectively: h x ×W x ×Δ x 、H y ×W y ×Δ y 、H z ×W z ×Δ z . Vector Img composed of tomographic image sequences in the X-axis, Y-axis, and Z-axis directions x 、Img y 、Img z The reconstructed corresponding three-dimensional tomographic field of view space sequence vectors are:
step 2.2, removing information outside the space of each three-dimensional fault view field;
three-dimensional tomographic field of view space along X-axis, Y-axis, Z-axis directions
The displacements of the corresponding precise positioning systems II, III and I (6, 15 and 1) scanned along the X-axis, Y-axis and Z-axis directions are +.>
The vertical distance between the objective lens of the corresponding monocular microscopic vision system II, III, I (7, 14, 2) and the origin of the defined coordinate system when the system II, III, I (6, 15, 1) is precisely positioned along the X-axis, Y-axis and Z-axis directions at the initial position>
Object distance d corresponding to the image distance of the microscopic vision system (7, 14, 2) 7 、d 14 、d 2 The section of the microscopic vision system II (7) in the X-axis direction is
In the Y-axis direction, the interval is +.>
In the Z-axis direction, the interval is->
The information in the range of (a) is three-dimensional tomographic field space +.>
Removing signals other than the range; microscopic Vision System III (14) in the X-axis direction +. >
The interval along the Y-axis direction is
The interval in the Z axis direction is +.>
The information in the range is three-dimensional tomographic field space +.>
Removing signals other than the range; microscopic visual System I (2) in the X-axis direction +.>
The interval along the Y-axis direction is +.>
Depth in Z-axis direction of
The information in the range is three-dimensional tomographic space +.>
Is removed from the signal in the range.
And 2.3, rasterizing and raster digitizing three-dimensional fault view field spaces along the X-axis, the Y-axis and the Z-axis directions to obtain digitalized information of each three-dimensional fault view field space. And (3) performing discretization on the three-dimensional fault view field space of the grid cube by adopting the three-dimensional fault view field space of the grid cube, and assigning a value to the grid cube, for example, assigning a value of 1, according to the position of the grid cube and the occupation condition of parts in the space on the grid cube. The specific process is as follows:
three-dimensional tomographic field of view space along X-axis, Y-axis, Z-axis directions
Digitized matrix->
The method comprises the following steps:
wherein the method comprises the steps of
N X (p i ，q i ，r i ) Space +.>
Middle (p) i ，q i ，r i ) The number of pixel points in the grid cube of the position is 1, N Y (p j ，q j ，r j ) Space +.>
Middle (p) j ，q j ，r j ) The number of pixel points in the grid cube of the position is 1, N z (p k ，q k ，r k ) Space +. >
Middle (p) k ，q k ，r k ) The number of pixel points in the grid cube of the position is 1, p j ∈[1 2…p y ]，q j ∈[1 2…q y ]，r j ∈[1 2…r y ]，p k ∈[1 2…p z ]，q k ∈[1 2…q z ]，r k ∈[1 2…r z ]。
And 2.4, aiming at the digital three-dimensional fault view field space, calculating the extended digital microscopic view field space of a monocular microscopic vision system for performing fault scanning along the X-axis, Y-axis and Z-axis directions in the micro-assembly system.
Respectively calculating the expanded digital microscopic field space of the monocular microscopic vision system of the micro-assembly system in the corresponding direction according to the three-dimensional fault field space digital information of the X-axis, Y-axis and Z-axis directions
Digitized matrix->
Definition of the precision positioning System II (6) the microscopic Vision System II (7) is controlled to perform a tomographic scan (Flag) along the positive X-axis direction x =1) according to two adjacent three-dimensional tomographic spaces ∈1>
And->
Is +.>
Then:
when the precise positioning system II (6) controls the microscopic vision system II (7) to perform fault scan (Flag) along the X-axis negative direction x = -1) time:
the same principle can be obtained:
in-plane digitizing matrix
The described extended microscopic field space in the X-axis direction +.>
The size is H x ×W x ×D x ，D x ＝x N ×Δ x ；/>
Description->
The size is H y ×W y ×D y ，D y ＝y N ×Δ y ；/>
Description->
The size is H z ×W z ×D z ，D z ＝z N ×Δ z 。Flag y ＝1、Flag x =1 is the scan along the positive direction of the Y-axis and the Z-axis, flag y ＝-1、Flag z = -1 is scanning in negative direction along Y-axis, Z-axis.
And 2.5, matching the space size and the grid cube size of an extended digital microscopic view field space of a monocular microscopic vision system for performing fault scanning along the X-axis, Y-axis and Z-axis directions, and aligning a coordinate system of the extended digital microscopic view field space with a defined coordinate system by utilizing translation and rotation of the space coordinate system. The specific matching process is as follows:
(1) The extended digitized microscopic field of view space size and the digitized grid cube size of each monocular microscopic vision system along the X-axis, Y-axis, and Z-axis directions match. Selecting a feature point in the standard matching template, and acquiring the extended digital microscopic field space of the feature in each monocular microscopic vision system along the X-axis, Y-axis and Z-axis directions
The location of the corresponding digitized information in the database. Different digitization using same feature point of standard matching templateThe same principle of the position of the microscopic vision space is matched with the microscopic vision space +.>
Is a space size of (a) a (b). Determining the characteristic digitized information in the microscopic field space according to the position of the digitized information>
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system XY plane +.>
A range in a Z-axis direction of a defined coordinate system; the characteristic digital information is in microscopic field space +.>
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system XZ plane +.>
A range in a Y-axis direction of a defined coordinate system; the characteristic digital information is in microscopic field space +.>
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system YZ plane +. >
In defining the range of the coordinate system in the X-axis direction, thereby completing the microscopic field space +.>
Size matching. Selecting standard matching template at ∈>
Digitized distance features, namely ++metric in equidistant principle of the same distance features of standard matching templates in different digitized microscopic vision spaces>
Matching the digitized grid cube size of (c). The expanded digital microscopic field space of each monocular microscopic vision system along the X-axis, Y-axis and Z-axis directions after the digital microscopic field space size and the digital grid cube size are matched is +.>
(2) The extended digital microscopic visual field space of each monocular microscopic vision system along the X-axis, Y-axis and Z-axis directions is
The spatial coordinate system is matched. Obtain microscopic field space->
The microscopic field space after space translation and rotation transformation is +.>
The digitized information after three-dimensional space relation matching is as follows: />
And 2.6, calculating digital information of intersecting field space of the extended digital microscopic field space of the monocular microscopic vision system for performing fault scanning along the X-axis, Y-axis and Z-axis directions.
The microscopic visual field space of the microscopic visual system of the micro-assembly system of the three-eye orthogonal microscopic visual system is the microscopic visual field space of each microscopic visual system The intersecting field space between the two is then the microscopic field space G of the microscopic vision system of the microassembly system is:
where ∈ represents the intersection calculation of microscopic field space.
Example 5: a microscopic visual field space digitizing method for micro assembly system of binocular orthogonal microscopic visual system.
Step 1: acquiring a tomographic image sequence in X-axis and Z-axis directions by adopting a computer microscopic vision tomographic technique, and a displacement sequence of a precise positioning system; namely, the operation content of the X-axis and Z-axis microscopic vision system is only completed on the basis of the digitizing method of the embodiment 4;
step 2: reconstructing three-dimensional fault view field spaces corresponding to the fault scanning images in the X-axis and Z-axis directions according to the obtained fault scanning image sequences and step length sequences of the precise positioning system, calculating digital information of the three-dimensional fault view field spaces, obtaining digital microscopic view field spaces expanded in all directions, and calculating digital microscopic view field spaces of a microscopic vision system of the micro assembly system; the step (2) specifically comprises:
(2.1) acquiring corresponding three-dimensional tomographic field space sequence vectors by using tomographic image sequences in the X-axis and Z-axis directions and a step sequence of a precise positioning system, wherein the specific operation is consistent with the method for acquiring the three-dimensional tomographic field space by using the tomographic image sequences in the X-axis and Z-axis directions in the step (2.1) in the embodiment 4;
(2.2) removing information outside the three-dimensional fault view field space; the specific operation is consistent with the method for acquiring the three-dimensional tomographic field space by the tomographic image sequences in the X-axis and Z-axis directions described in the step (2.2) in the embodiment 4;
(2.3) rasterizing and raster digitizing three-dimensional tomographic field of view space along X-axis and Z-axis directions to obtain digitized information of each three-dimensional tomographic field of view space; the specific operation is consistent with the method for obtaining the digital information of the three-dimensional fault view field space in the X-axis and Z-axis directions and the grid digitization of the three-dimensional fault view field space in the step (2.3) in the embodiment 4;
(2.4) respectively calculating the expanded digital microscopic field space of the monocular microscopic vision system of the micro-assembly system in the corresponding direction according to the three-dimensional tomographic field space digital information in the X-axis direction and the Z-axis direction; specific operation and calculation of X-axis and Z-axis directions in step (2.4) in example 4 the extended digital microscopic field space of the monocular microscopic vision system of the microfabrication system;
(2.5) three-dimensional spatial relationship matching of the extended digitized microscopic field space of each monocular microscopic vision system along the X-axis and Z-axis directions; selecting a feature point in the standard matching template, and acquiring the extended digital microscopic field space of the feature in each monocular microscopic vision system along the X-axis and Z-axis directions 
And->
Matching microscopic field space by using the principle that the same feature point of the standard matching template is positioned in different digital microscopic vision spaces>
And->
Is a space size of (2); the procedure is analogous to step (2.5) of example 4; selecting standard matching template at ∈>
And->
The digital distance characteristic of (a) is compared with the standard matching template by utilizing the equidistant principle of the same distance characteristic in different digital microscopic vision spaces>
And->
The digital grid cube size is matched, and the digital microscopic field space of the extension of each monocular microscopic vision system along the X-axis and Z-axis direction after the digital microscopic field space size and the digital grid cube size are matched is ∈>
And->
Extended digitized microscopic field of view space for each monocular microscopic vision system along the X-axis and Z-axis directions
And->
Spatial position matching: digitized microscopic field space according to the expansion of the monocular microscopic vision systems in the X-axis and Z-axis directions>
And->
The digital microscopic visual field space coordinate system is kept consistent with the definition coordinate system (9) by utilizing space translation and rotation transformation, so that the expanded digital microscopic visual field space of each monocular microscopic visual system in the X-axis and Z-axis directions is- >
And (3) with
The microscopic field space after space translation and rotation transformation is +.>
And->
The digitized information after three-dimensional space position matching is as follows: />
And->
(2.6) calculating an intersecting field space of a microscopic vision system of the micro-assembly system, wherein the microscopic field space G of the microscopic vision system is:
example 6: a microscopic visual field space digitizing method for the micro-assembly system of a multi-eye microscopic visual system.
Step 1: acquiring a tomographic image sequence in X-axis, Y-axis, Z-axis and any axis (R-axis) directions and a displacement sequence of a precise positioning system by adopting a computer microscopic vision tomographic scanning technology; namely, the operation content of the R-axis direction microscopic vision system is increased on the basis of the digitizing method of the embodiment 4;
step 2: reconstructing three-dimensional fault view field spaces corresponding to the fault scanning images in the X-axis and Z-axis directions according to the obtained fault scanning image sequences and step length sequences of the precise positioning system, calculating digital information of the three-dimensional fault view field spaces, obtaining digital microscopic view field spaces expanded in all directions, and calculating digital microscopic view field spaces of a microscopic vision system of the micro assembly system; the step (2) specifically comprises:
(2.1) acquiring corresponding three-dimensional tomographic field space sequence vectors by using tomographic image sequences in X-axis and Y-axis directions and Z-axis and R-axis directions and a precision positioning system step sequence, and reconstructing corresponding unit tomographic field space sequence vectors by adding tomographic images in the R-axis direction on the basis of the step (2.1) in the embodiment 4;
(2.2) removing information outside the three-dimensional fault view field space; specific operation is to increase the information processing of the three-dimensional tomographic field space in the R-axis direction in step (2.2) in example 4;
(2.3) rasterizing and raster digitizing three-dimensional tomographic field of view space along X-axis and Y-axis and Z-axis and R-axis directions to obtain digitized information of each three-dimensional tomographic field of view space; the specific operation is that the rasterization and the numerical value of the three-dimensional fault view field space in the R axis direction are increased on the basis of the step (2.3) in the embodiment 4, and the digital information of the three-dimensional fault view field space is obtained;
(2.4) respectively calculating the expanded digital microscopic field space of the monocular microscopic vision system of the micro-assembly system in the corresponding direction according to the three-dimensional tomographic field space digital information of the X-axis and Y-axis and Z-axis and R-axis directions; specific operation the extended digital microscopic field space of the microscopic vision system obtained in the R-axis direction was increased on the basis of step (2.4) in example 4;
(2.5) three-dimensional spatial relationship matching of the extended digitized microscopic field space of each monocular microscopic vision system along the X-axis and Y-axis and Z-axis and R-axis directions; specific operation on the basis of step (2.5) in example 4, the size matching of the digital microscope field space expanded in the directions of the X axis, the Y axis, the Z axis and the R axis and the matching of the grid cube size are increased, and the obtained digital expanded microscope field space is
Extended digitized microscopic field of view space for each monocular microscopic vision system along X-axis and Y-axis and Z-axis and R-axis directions
And->
And->
And->
Spatial position matching: digitized microscopic field space according to the expansion of the monocular microscopic vision systems in the directions of the X-axis and Y-axis and Z-axis and R-axis>
And->
And->
And->
The space translation and rotation transformation are used to make the space coordinate system of the digital microscopic view field consistent with the defined coordinate system (9), so that the extended digital microscopic view field space of each monocular microscopic vision system in X-axis and Y-axis and Z-axis and R-axis directions is->
And->
And->
And->
The microscopic field space after space translation and rotation transformation is +.>
And->
And->
And->
The digitized information after three-dimensional space position matching is +.>
And->
And->
And- >
(2.6) calculating an intersecting field space of a microscopic vision system of the micro-assembly system, wherein the microscopic field space G of the microscopic vision system is:
the above description is only of the preferred embodiments of the present invention and is not intended to limit the invention, and it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (9)
1. The microscopic visual field space digitizing method of the microscopic visual system of the micro assembly system is characterized in that the method adopts a computer microscopic visual fault scanning technology and a three-dimensional microscopic visual field space digitizing reconstruction technology based on a fault scanning image obtained by the computer microscopic visual fault scanning to obtain microscopic visual field space digitizing information of the microscopic visual system of the micro assembly system, and the method comprises the following steps:
(1) Acquiring a tomographic image sequence in X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions and a displacement sequence of a precise positioning system by adopting a computer microscopic vision tomographic scanning technology;
The step (1) comprises:
(1.1) determining the vertical distance from the origin of the defined coordinate system, to the monocular microscopic vision system objective lens in the X-axis and Z-axis, or X-axis and Y-axis and Z-axis, or R-axis directions, the step length, the moving direction, the moving mode, the moving speed, the initial position, and the monocular microscopic vision system objective lens in the X-axis and Z-axis, or X-axis and Y-axis and Z-axis directions in the initial position of the defined coordinate system
And->
And->
And->
Or->
And->
And->
And (3) with
Determining the position of the principal point of the image of the optical axis of the microscopic vision system I (2) passing through the focal plane as +.>
The principal point of the image of the optical axis of the microscopic vision system II (7) passing through the focal plane is positioned as +.>
The principal point of the image of the optical axis of the microscopic vision system III (14) passing through the focal plane is positioned +.>
Determining the position of an image principal point of an optical axis of a microscopic vision system IV (17) passing through a focal plane; determining the field resolution, depth of field, pixel size and magnification of a corresponding microscopic vision system, and setting proper light source light intensity;
(1.2) for the X-axis and Z-axis or X-axis and Y-axis and Z-axis and R-axis directions, the precision positioning system controls the monocular microscopy vision system in each direction to acquire a tomographic image sequence along the X-axis and Z-axis or X-axis and Y-axis and Z-axis and R-axis directions and a precision positioning system displacement sequence;
The precise positioning system controls the monocular microscopic vision system to respectively move along the X, Y, Z axis direction by a movement step delta x 、Δ y 、Δ z Tomographic scanning was performed to obtain a two-dimensional tomographic image sequence in the X, Y, Z axial direction, and recorded as follows:
recording a corresponding displacement sequence of the precise positioning system as follows:
wherein Img x 、Img y 、Img z Vectors respectively formed along X-axis, Y-axis and Z-axis direction tomographic image sequences defining a coordinate system are obtained for computer microscopic vision tomographic scanning; d (D) x 、D y 、D z Displacement vectors of a precise positioning system corresponding to a tomographic image sequence obtained during computer microscopic vision tomographic scanning along X-axis, Y-axis and Z-axis directions of a defined coordinate system; x is x N 、y N 、z N The times of computer microscopic visual tomography in the three-dimensional orthogonal direction are respectively;
displacement of accurate positioning system for fault scanning along X-axis, Y-axis and Z-axis directions of defined coordinate system
With respective step of movement delta x 、Δ y 、Δ z The relationship of (2) is as follows:
fault scan step delta for precision positioning system x 、Δ y 、Δ z The requirements are satisfied:
wherein DOF x 、DOF y 、DOF z Depth of field of a microscopic vision system for performing tomographic scanning along X-axis, Y-axis and Z-axis directions of a defined coordinate system;
aiming at the R-axis direction computer microscopic vision tomography, a precise positioning system (18) is used for controlling a monocular microscopic vision system IV (17) to acquire an image vector Img constructed by a tomography image sequence R Recording displacement D of a tomographic precise positioning system (18) R The method comprises the steps of carrying out a first treatment on the surface of the Wherein the motion step delta of the precision positioning system R A depth of field of less than or equal to the microscopic vision system IV (17);
(2) Reconstructing three-dimensional fault view field spaces corresponding to the fault scanning images in the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions according to the obtained fault scanning image sequences and step length sequences of the precise positioning system, calculating digital information of the three-dimensional fault view field spaces, obtaining digital microscopic view field spaces expanding in all directions, and calculating digital microscopic view field spaces of a microscopic vision system of the micro assembly system; the step (2) specifically comprises:
(2.1) acquiring corresponding three-dimensional fault field space sequence vectors by using a fault scanning image sequence in X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions and a precision positioning system step sequence;
(2.2) removing information outside the three-dimensional fault view field space;
(2.3) rasterizing and raster digitizing three-dimensional tomographic field of view space along X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions to obtain digitized information of each three-dimensional tomographic field of view space;
(2.4) respectively calculating the expanded digital microscopic field space of the monocular microscopic vision system of the micro-assembly system in the corresponding direction according to the three-dimensional tomographic field space digital information of the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions;
(2.5) three-dimensional spatial relationship matching of the expanded digitized microscopic field space of the monocular microscopic vision systems along the X-axis and Z-axis, or the X-axis and Y-axis and Z-axis and R-axis directions;
(2.6) calculating an intersecting field of view space of a microscopic vision system of the microassembly system;
the microscopic visual field space of the microscopic visual system of the micro-assembly system is the intersecting visual field space of the binocular and multi-view orthogonal microscopic visual system of the micro-assembly system.
2. The method according to claim 1, wherein the step (2.1) obtains the corresponding three-dimensional tomographic field space sequence vector by using tomographic image sequences of X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis, and the corresponding precision positioning system step length; the three-dimensional tomographic field space method for respectively constructing three directions of an X axis, a Y axis and a Z axis for tomographic image sequences along the three directions of the X axis, the Y axis and the Z axis of a defined coordinate system is as follows: the visual field heights of microscopic vision systems II, III, I (7, 14, 2) for setting X-axis, Y-axis and Z-axis directions to perform fault scanning are respectively H x 、H y 、H z The field of view is respectively W x 、W y 、W z The movement step delta of the corresponding precision positioning systems II, III, I (6, 15, 1) x 、Δ y 、Δ z Tomographic images along X-axis, Y-axis and Z-axis directions correspond to each otherThe three-dimensional tomographic field of view space of (a) is: h x ×W x ×Δ x 、H y ×W y ×Δ y 、H z ×W z ×Δ z The method comprises the steps of carrying out a first treatment on the surface of the Vector Img formed by tomographic image sequences along X-axis, Y-axis and Z-axis directions x 、Img y 、Img z The reconstructed corresponding three-dimensional tomographic field of view space sequence vectors are:
in the middle of
The method comprises the following steps:
wherein:
respectively representing three-dimensional tomographic field of view space->
Spatial ranges in X-axis, Y-axis and Z-axis directions of a defined coordinate system; />
Respectively representing three-dimensional tomographic field of view space->
Spatial ranges in X-axis, Y-axis and Z-axis directions of a defined coordinate system; />
Respectively representing three-dimensional tomographic field of view space->
In the definition of the X-axis of the coordinate system,
Spatial ranges in the directions of the Y axis and the Z axis; d, d 7 、d 14 、d 2 Object distances corresponding to the image distances of the microscopic vision systems II, III, I (7, 14, 2) respectively;
obtaining a tomographic image sequence aiming at a microscopic vision system in the R-axis direction of a defined coordinate system, constructing each three-dimensional tomographic view field space in the R-axis direction according to the view field size of the microscopic vision system IV (17) and the motion step length of a precise positioning system (18), and constructing a three-dimensional tomographic view field space sequence vector S R 。
3. The method of digitizing a microscopic field of view space according to claim 1, wherein the specific method of removing the information outside the three-dimensional tomographic field of view space in the step (2.2) is as follows:
three-dimensional tomographic field of view space along X-axis, Y-axis, Z-axis directions
The displacement amounts of the corresponding precise positioning systems II, III and I (6, 15 and 1) scanned along the X-axis, Y-axis and Z-axis directions are respectively +.>
The vertical distance between the objective lens of the corresponding monocular microscopic vision system II, III, I (7, 14, 2) and the origin of the defined coordinate system when the system II, III, I (6, 15, 1) is precisely positioned along the X-axis, Y-axis and Z-axis directions at the initial position>
Object distance d corresponding to the image distance of the microscopic vision systems II, III, I (7, 14, 2) 7 、d 14 、d 2 The section of the microscopic vision system II (7) in the X-axis direction is
In the Y-axis direction, the interval is +.>
In the Z-axis direction, the interval is->
The information in the range of (a) is three-dimensional tomographic field space +.>
Removing signals other than the range; microscopic Vision System III (14) in the X-axis direction +.>
The interval along the Y-axis direction is
The interval in the Z axis direction is +.>
The information in the range is three-dimensional tomographic field space +.>
Removing signals other than the range; microscopic visual System I (2) in the X-axis direction +. >
The interval along the Y-axis direction is +.>
Depth in Z-axis direction of
The information in the range is three-dimensional tomographic space +.>
Removing signals other than the range;
three-dimensional tomographic field of view space vector S in the R-axis direction R Determining the spatial range of each three-dimensional fault view field space acquired in the R-axis direction according to the image principal point position at the initial position of the microscopic vision system IV (17) and the motion displacement of the precise positioning system;
for the micro-assembly system of the binocular, trinocular and multi-ocular micro-vision system of X-axis and Z-axis, X-axis and Y-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis, the signals outside the three-dimensional fault view field space in each direction are removed according to the three-dimensional fault view field space in the X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions.
4. The microscopic field of view space digitizing method according to claim 1, wherein the step (2.3) obtains three-dimensional tomographic field of view space digitizing information in each direction along the grid of three-dimensional tomographic field of view space in the directions of X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis; the three-dimensional fault view field space digitizing process along X axis, Y axis, Z axis and R axis is as follows:
Three-dimensional tomographic field of view space for X-axis direction
The size of the catalyst is H x ×W x ×Δ x Setting an n x ×n x ×n x Grid cube of individual pixels, using +.>
Three-dimensional tomographic field of view space of a grid cube pair>
Discretizing, and constructing a three-dimensional digitizing matrix according to the grid cube position and the function value of the grid cube>
Setting the number N of pixel points in each grid cube to be 1 X Setting a grid cube assignment threshold TH X If N X ≥TH X The grid cube is assigned a value of 1, otherwise, the grid cube is assigned a value of 0; three-dimensional tomographic field of view space->
Middle (p) i ,q i ,r i ) The assignment function of the grid cube of the position is
Namely: />
Wherein the method comprises the steps of
p i ∈[12vp x ]，q i ∈[12…q x ]，r i ∈[12vr x ]，N X (p i ,q i ,r i ) Is three-dimensional fault view field space S xi Middle (p) i ,q i ,r i ) The number of pixel points in the grid cube of the position is 1;
similarly, three-dimensional fault view field space for Y-axis and Z-axis directions
Respectively set the size of n y ×n y ×n y Is of size n z ×n z ×n z Is +.>
Discretizing and according to the space of the three-dimensional fault field of view>
The grid cube position and the function value of the grid cube in the three-dimensional tomographic field of view space are obtained respectively>
Digitized matrix->
The method comprises the following steps: />
Wherein the method comprises the steps of
N Y (p j ,q j ,r j ) Is three-dimensional fault view field space S yi Middle (p) j ,q j ,r j ) The number of pixel points in the grid cube of the position is 1, N Z (p k ,q k ,r k ) Is three-dimensional fault view field space S zi Middle (p) k ,q k ,r k ) The number of pixel points in the grid cube of the position is 1, p j ∈[12…p y ]，q j ∈[12…q y ]，r j ∈[12…r y ]，p k ∈[12…p z ]，q k ∈[12…q z ]，r k ∈[1 2 … r z ]；
Three-dimensional tomographic field of view space S in the R-axis direction R Then set the size to n R ×n R ×n R Discretizing it according to the grid cube in three-dimensional tomographic field space S R The grid cube position and the function value of the grid cube to obtain a three-dimensional fault view field space S R Is a digitized matrix of (a)
5. The method according to claim 1, wherein the step (2.4) is specific to the extended digital microscopic field space method of the monocular microscopic vision system in the X-axis, Y-axis, Z-axis, R-axis directions as follows:
(1) monocular microscopic vision system acquisition for X-axis directionTaking three-dimensional tomographic field of view space S x Using two adjacent three-dimensional fault spaces therein
And->
Digitized matrix of combinable computations>
Definition of the precision positioning System II (6) the microscopic Vision System II (7) is controlled to perform tomographic scanning along the positive X-axis direction, flag x =1, according to two adjacent three-dimensional fault spaces +.>
And->
Digitized matrix->
Then:
when the precise positioning system II (6) controls the microscopic vision system II (7) to perform fault scanning along the X-axis negative direction, flag x When= -1:
(2) Computing extended microscopic field of view space for microscopic Vision System II (7)
Digital information of->
The method comprises the following steps:
wherein [ among others ]]' represent matrix transpose, flag x For recording the direction of scanning along the X-axis defining the coordinate system, digitizing the information
The described extended microscopic field space in the X-axis direction +.>
The size is H x ×W x ×D x ，D x ＝x N ×Δ x ；
Similarly, a three-dimensional fault view field space S is acquired for a monocular microscopic vision system in the directions of a Y axis and a Z axis y 、S z Calculating an extended microscopic field of view space
The precise positioning systems III, I (15, 1) respectively control the Flag during the forward scanning of the microscopic vision systems III, I (14, 2) along the Y axis and the Z axis y ＝1、Flag z =1, flag at negative scan y ＝-1、Flag z = -1, then microscopic visual field space of the microscopic visual systems III, I (14, 2) extended by tomography +.>
Digital information of->
The method comprises the following steps:
wherein the method comprises the steps of
Description->
The size is H y ×W y ×D y ，D y ＝y N ×Δ y ；/>
Description->
The size is H z ×W z ×D z ，D z ＝z N ×Δ z ；
Similarly, a three-dimensional fault view field space S is acquired aiming at a monocular microscopic vision system IV (17) in the R-axis direction R Calculating an extended microscopic field of view space
Taking into account the scanning direction of the precision positioning system (18) to calculate a digitised matrix G for stitching calculation for different scanning directions R Thereby obtaining an extended microscopic field space +.>
Digitized matrix- >
/>
6. The method of digitizing a microscopic field space according to claim 1, wherein the step (2.5) is to set a standard matching template in an assembly space of the micro-assembly system, and to expand the digitized microscopic field space of each monocular microscopic vision system in directions along the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis
And (3) with
And->
And->
And->
And->
And->
The method comprises the following steps of respectively obtaining the digitalized information of the standard matching template:
(1) expanded digitized microscopic field spatial size and digitized grid cube size match for each monocular microscopic vision system along X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions: selecting a feature point in the standard matching template, and acquiring the extended digital microscopic field space of the feature in each monocular microscopic vision system along the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions
And->
Or->
And->
And->
Or->
And->
And->
And->
The corresponding digital information position in the microscope is matched with the microscope field space +.f by utilizing the principle that the same characteristic point of the standard matching template is in the same position of different digital microscope vision spaces >
And->
Or->
And->
And->
Or->
And->
And->
And->
Is used for determining the space of the characteristic digital information in the microscopic field space according to the position of the digital information
And->
Or->
And->
And->
Or->
And->
And->
And->
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system XY plane +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
A range in a Z-axis direction of a defined coordinate system; the characteristic digital information is in microscopic field space +.>
And->
Or->
And->
And->
Or->
And->
And (3) with
And->
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system XZ plane +.>
And->
Or alternatively
And->
And->
Or->
And->
And->
And->
A range in a Y-axis direction of a defined coordinate system; the characteristic digital information is in microscopic field space +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
Respectively with corresponding distance values of two boundary planes parallel to the defined coordinate system YZ plane +.>
And->
Or->
And->
And->
Or->
And->
And->
And->
In defining the range of the coordinate system in the X-axis direction, thereby completing the microscopic field space +.>
And->
Or->
And->
And->
Or->
And->
And (3) with
And->
Matching the sizes; selecting standard matching template at ∈ >
And->
Or->
And->
And->
Or->
And->
And->
And->
Digitized distance features, namely ++metric in equidistant principle of the same distance features of standard matching templates in different digitized microscopic vision spaces>
And->
Or->
And->
And->
Or->
And->
And->
And->
The digital grid cube size is matched, and the expanded digital microscopic field space of each monocular microscopic vision system along the X axis and the Z axis, or the X axis and the Y axis and the Z axis and the R axis after the digital microscopic field space size is matched is%>
And->
Or->
And->
And->
Or->
And->
And->
And->
(2) Extended digitized microscopic field of view space for each monocular microscopic vision system along the X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions
And->
Or->
And->
And->
Or->
And->
And->
And->
Spatial position matching: extended digitized microscopic field space according to respective monocular microscopic vision systems in X-axis and Z-axis, or X-axis and Y-axis and Z-axis and R-axis directions ≡>
And->
Or->
And->
And->
Or->
And (3) with
And->
And->
The digital microscopic visual field space coordinate system is kept consistent with the definition coordinate system (9) by utilizing space translation and rotation transformation, so that the extended digital microscopic visual field space of each monocular microscopic visual system along the X-axis and the Z-axis, or the X-axis and the Y-axis and the Z-axis and the R-axis directions is improved >
And->
Or->
And->
And->
Or->
And->
And->
And->
The microscopic field space after space translation and rotation transformation is/>
And->
Or->
And->
And->
Or->
And->
And->
And->
The digitized information after three-dimensional space position matching is as follows: />
And->
Or->
And->
And->
Or->
And->
And->
And->
7. The method of digitizing a microscopic field space according to claim 1, wherein the specific method of calculating the intersecting field space of the microscopic vision system of the micro-assembly system in step (2.6) is as follows:
the micro assembly system of the binocular orthogonal microscopic vision system comprises a microscopic field space G of the microscopic vision system, which is as follows:
the micro assembly system of the three-eye orthogonal micro vision system comprises the following micro vision system:
the micro assembly system of the multi-purpose micro vision system comprises a micro vision system with a micro field space G as follows:
where ∈ represents the intersection calculation of microscopic field space.
8. A microscopic field space digitizing system of a microscopic vision system for implementing the method of any of claims 1 to 7, comprising a precision positioning system, a microscopic vision system and a host computer, characterized in that,
The precise positioning system is used for driving the microscopic vision system to move along the optical axis direction of the microscopic vision system and performing precise positioning; the device comprises a motion device for realizing one-dimensional precise motion, a high-precision positioning motion driving actuator for realizing matching of positioning precision and depth of field of a microscopic vision system and a controller;
the microscopic vision system is used for performing image tomography to obtain a tomographic image sequence; the device comprises a microscopic amplifying unit, wherein the microscopic amplifying unit is used for amplifying an imaging object in a microscopic view field space through an optical microscope or an electron microscope, and the imaging unit is used for imaging the object in the microscopic view field space through a CCD (charge coupled device) or a CMOS (complementary metal oxide semiconductor) camera;
the host computer is used for performing control calculation on the precise positioning system (1, 6) and the microscopic vision system I, II (2, 7), or performing control calculation on the precise positioning system (1, 6, 15) and the microscopic vision system I, II, III (2, 7, 14), or performing control calculation on the precise positioning system (1, 6, 15, 18) and the microscopic vision system I, II (2, 7, 14, 17), and performing digital microscopic field space result display; the method is used for converting the position relation of the binocular, the trinocular microscopic vision system or the trinocular orthogonal and other non-orthogonal microscopic vision systems.
9. The system according to claim 8, further configured with a displacement standard quantity system, which controls slice positions and records the obtained slice position information; the device comprises a displacement sensor which is arranged on a motion mechanism of a precise positioning system and used for realizing displacement sensing, a precise positioning system controller which is used for performing guide rail control motion feedback control, and a displacement sensor controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810620474.4A CN108961419B (en) | 2018-06-15 | 2018-06-15 | Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810620474.4A CN108961419B (en) | 2018-06-15 | 2018-06-15 | Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108961419A CN108961419A (en) | 2018-12-07 |
| CN108961419B true CN108961419B (en) | 2023-06-06 |
Family
ID=64490240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810620474.4A Active CN108961419B (en) | 2018-06-15 | 2018-06-15 | Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108961419B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3748414A1 (en) * | 2019-06-07 | 2020-12-09 | Koninklijke Philips N.V. | A simple and efficient biopsy scanner with improved z-axis resolution |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102501247A (en) * | 2011-11-08 | 2012-06-20 | 湖南大学 | Fully flexible six-degree-of-freedom fine operating platform |
| CN103170823A (en) * | 2013-03-29 | 2013-06-26 | 中国科学院自动化研究所 | Control device and method of inserting micro-pipe into micro-hole through monocular microscopy visual guidance |
| CN103247053A (en) * | 2013-05-16 | 2013-08-14 | 大连理工大学 | Accurate part positioning method based on binocular microscopy stereo vision |
| CN106595528A (en) * | 2016-11-10 | 2017-04-26 | 华中科技大学 | Digital speckle-based telecentric microscopic binocular stereoscopic vision measurement method |
| CN107644827A (en) * | 2017-10-20 | 2018-01-30 | 常州工学院 | A kind of microfluid encourages micro element self-assembly device and method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08160305A (en) * | 1994-12-08 | 1996-06-21 | Nikon Corp | Laser scanning microscope |
| EP1428169B1 (en) * | 2002-02-22 | 2017-01-18 | Olympus America Inc. | Focusable virtual microscopy apparatus and method |
| US7813591B2 (en) * | 2006-01-20 | 2010-10-12 | 3M Innovative Properties Company | Visual feedback of 3D scan parameters |
| JP2010532681A (en) * | 2007-06-29 | 2010-10-14 | スリーエム イノベイティブ プロパティズ カンパニー | Video auxiliary boundary marking for dental models |
| JP5561027B2 (en) * | 2009-11-30 | 2014-07-30 | ソニー株式会社 | Information processing apparatus, information processing method, and program thereof |
| JP5555653B2 (en) * | 2011-03-29 | 2014-07-23 | 日本電子株式会社 | Electron microscope and three-dimensional image construction method |
| DE102011086018A1 (en) * | 2011-11-09 | 2013-05-16 | Carl Zeiss Ag | Method and arrangement for autofocusing a microscope |
| JP2014071207A (en) * | 2012-09-28 | 2014-04-21 | Canon Inc | Image processing apparatus, imaging system, and image processing system |
| US20140160264A1 (en) * | 2012-12-10 | 2014-06-12 | The Johns Hopkins University | Augmented field of view imaging system |
| CN104331699B (en) * | 2014-11-19 | 2017-11-14 | 重庆大学 | A kind of method that three-dimensional point cloud planarization fast search compares |
-
2018
- 2018-06-15 CN CN201810620474.4A patent/CN108961419B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102501247A (en) * | 2011-11-08 | 2012-06-20 | 湖南大学 | Fully flexible six-degree-of-freedom fine operating platform |
| CN103170823A (en) * | 2013-03-29 | 2013-06-26 | 中国科学院自动化研究所 | Control device and method of inserting micro-pipe into micro-hole through monocular microscopy visual guidance |
| CN103247053A (en) * | 2013-05-16 | 2013-08-14 | 大连理工大学 | Accurate part positioning method based on binocular microscopy stereo vision |
| CN106595528A (en) * | 2016-11-10 | 2017-04-26 | 华中科技大学 | Digital speckle-based telecentric microscopic binocular stereoscopic vision measurement method |
| CN107644827A (en) * | 2017-10-20 | 2018-01-30 | 常州工学院 | A kind of microfluid encourages micro element self-assembly device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108961419A (en) | 2018-12-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5850469A (en) | Real time tracking of camera pose | |
| Farahani et al. | Three-dimensional imaging and scanning: current and future applications for pathology | |
| JP5430456B2 (en) | Geometric feature extraction device, geometric feature extraction method, program, three-dimensional measurement device, object recognition device | |
| EP2648206B1 (en) | Transmission electron microscope for reconstructing a three-dimensional structure and transmission electron microscope image reconstruction method | |
| CN108961419B (en) | Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system | |
| CN114413788B (en) | Part surface pattern detection method based on binocular vision and reverse model reconstruction | |
| CN108983702B (en) | Computer microscopic visual slice scanning technology-based microscopic visual field digital extension method and system for microscopic visual system | |
| CN108955562B (en) | Digital extension method and system for microscopic depth of field of microscopic vision system | |
| US20100309304A1 (en) | Method and Device for the Reconstruction of the Shape of an Object from a Sequence of Sectional Images of Said Object | |
| CN108876838B (en) | Method and system for digitizing micro-operation space of micro-operation system | |
| CN108734763B (en) | Method and system for digitizing micro-assembly space of micro-assembly system | |
| Deng et al. | Active 3-D thermography based on feature-free registration of thermogram sequence and 3-D shape via a single thermal camera | |
| He et al. | The research of an automatic object reconstruction method based on limit visible region of the laser-scanning vision system | |
| JPH11248431A (en) | Three-dimensional model forming apparatus and computer readable medium recorded with three-dimensional model generating program | |
| Qin et al. | An improved 3D reconstruction method for weak texture objects combined with calibration and ICP registration | |
| KR100947406B1 (en) | Simultaneous registration method of 3-dimensional scan data | |
| CN108897279B (en) | Digital extension method and system for field and depth of field of microscopic vision system of micro-assembly system | |
| JPH024028B2 (en) | ||
| Usuki et al. | Digital shape reconstruction of a micro-sized machining tool using light-field microscopy | |
| Liu et al. | A framework to calibrate the scanning electron microscope under variational magnifications | |
| Mery | Exploiting multiple view geometry in X-ray testing: Part I, theory | |
| Savii | Camera calibration using compound genetic-simplex algorithm | |
| WO1994014029A1 (en) | Measuring system suitable for strain analysis of three-dimensional components | |
| Law et al. | 3-D visualization of AGR fuel channel bricks using Structure-from-Motion | |
| Peng et al. | Algorithms for on-line monitoring of components in an optical tweezers-based assembly cell |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |