CN107644827A - A kind of microfluid encourages micro element self-assembly device and method - Google Patents
A kind of microfluid encourages micro element self-assembly device and method Download PDFInfo
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- CN107644827A CN107644827A CN201710985539.0A CN201710985539A CN107644827A CN 107644827 A CN107644827 A CN 107644827A CN 201710985539 A CN201710985539 A CN 201710985539A CN 107644827 A CN107644827 A CN 107644827A
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- substrate
- microcomponent
- pit
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- dividing plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/951—Supplying the plurality of semiconductor or solid-state bodies
- H01L2224/95101—Supplying the plurality of semiconductor or solid-state bodies in a liquid medium
Abstract
The invention discloses a kind of microfluid to encourage microcomponent self-assembly device and method.The device includes substrate and dividing plate, there is the pit array etched on substrate, the profile of each pit and microcomponent matches, microcomponent is carried by carrier solution, dividing plate forms assembly cavity with substrate, the micro- spray array corresponding with the pit on substrate is provided with dividing plate, two flexure type piezoelectric vibrators are attached on elastic film respectively, check valve forms closed cavity with dividing plate and elastic film, solution is flowed into from check valve and sprayed from micro- spray array, and two flexure type piezoelectric vibrators are controlled by driving power and computer.The present invention, to not having the microcomponent being completely fitted with substrate to carry out fluid excitation on substrate, the energy trapping formed when preventing it to obtain energy overage microcomponent from being completely fitted with substrate, realizes that microcomponent is completely fitted with substrate using piezoelectric vibration；Fluid excitation uses Piezoelectric Driving, and regulation can be digitized on frequency, excitation density, improves assembly yield.
Description
Technical field
The present invention relates to a kind of assembling device and method of microcomponent, more particularly to a kind of automatic assembling apparatus of microcomponent
And method.
Background technology
Driver and display unit, LED chip in FPD (FPD) equipment carry out high density contraposition and assemble, be miniature
Control system, photoelectron dexterity sensor array and electronic tag etc. are required for the accurate assembling of the repeatability of high-volume microcomponent,
In fluidic self-assembly technology form fit formula contraposition have to high-volume microcomponent on three dimensions concurrently, it is accurately right
The ability of hyte dress, the microcomponent in carrier solution is in self gravitation, the capillary force of liquid binding material and surface tension etc.
In the presence of when can fall into the pit to match on substrate at random, conventional hydraulic pump valve drives the at the uniform velocity flowing of solution, works as infinitesimal
Part close to substrate in batch decorate when, its move inertia force can weaken the self gravitation of microcomponent and the capillary of liquid binding material
Power and surface tension, have part microcomponent and the state that can not be completely fitted with substrate is presented, be absorbed in energy trapping, cause to assemble
Efficiency is low.
The content of the invention
For the above-mentioned problems in the prior art, the present invention provides a kind of microfluid excitation micro element self-assembly device
And method.
Technical scheme is as follows：
The present invention provides a kind of microfluid excitation micro element self-assembly device, including substrate and dividing plate, has on the substrate
There is a pit array etched, the profile of each pit and the microcomponent fabricated out from silicon chip in the pit array
Match, the microcomponent is carried by carrier solution, and the dividing plate and substrate form assembly cavity, is provided with the dividing plate and substrate
On the corresponding micro- spray array of pit, two flexure type piezoelectric vibrators are attached on elastic film respectively, check valve and dividing plate and
Elastic film forms closed cavity, and solution is flowed into from check valve and sprayed from micro- spray array, and two flexure type piezoelectric vibrators are by driving
Dynamic power supply and computer control.
Further, the distance between described substrate and dividing plate are fine-tuning, and the fine setting scope is the 1.8-2 of microcomponent size
Times.
The present invention also provides a kind of microfluid excitation micro element self-chambering method of completing the square, excessive microcomponent is scattered be suspended in it is selected
Carrier solution in, flowed through under the driving of pressure from substrate and dividing plate, the carrier solution in dividing plate and elastic film is free of
Microcomponent, computer control flexure type piezoelectric vibrator to vibrate by programming by driving power, because flexure type piezoelectric vibrator replaces
Flexural vibrations, make metallic elastic film cyclic bending, due to the effect of check valve and micro- spray array, the fluid without microcomponent is handed over
Flowed into for from check valve, sprayed from micro- spray array, shaking for flexure type piezoelectric vibrator is controlled by driving power after computer programming
Width and frequency, so as to adjust frequency and the flow that micro- spray array sprays.
Further, on micro- spray array and substrate on pit array correspond, when carrier solution left floating it is excessive micro-
When element flows through the pit array on substrate, the fluid of injection encourage microcomponent close on substrate on pit array, it is now micro-
Element falls into the pit to match on substrate at random in the presence of the capillary force including liquid binding material and surface tension,
Part microcomponent is completely fitted with substrate pit immediately, for the microcomponent that remaining is not completely fitted with the pit of substrate, is continued
Excitation it is obtained the energy trapping formed when energy surmounts completely not chimeric, gradually the pit with substrate is completely fitted,
The element for the pit for having no chance to enter will be rushed out substrate surface.
Beneficial effects of the present invention are as follows：
Microfluid of the present invention encourages microcomponent self-assembly device and method, using piezoelectric vibration to not having on substrate and base
The microcomponent that plate is completely fitted carries out fluid excitation, when preventing its acquisition energy overage microcomponent from being completely fitted with substrate
The energy trapping of formation, realize that microcomponent is completely fitted with substrate, it is micro- under van der Waals interaction after carrier solution removes
The lower surface of element and the bottom surface of pit link together.Fluid excitation uses Piezoelectric Driving, can be on frequency, excitation density
Regulation is digitized, the micro assemby requirement for adapting to different scale and profile can be by controlling the exciting force of microfluid
Degree and the excitation frequency, improve assembly yield.Efficiently solve in the prior art because the positioning of part microcomponent can not be complete with substrate
The problem of being fitted together to entirely and causing efficiency of assembling low.
Brief description of the drawings
Fig. 1 is the structural representation of microfluid excitation micro element self-assembly device of the present invention.
In figure：1st, substrate；2nd, microcomponent；3rd, carrier solution；4th, dividing plate；5th, micro- spray array；6th, electric tachometer indicator is pushed；7th, upper pressure
Electric tachometer indicator；8th, elastic film；9th, check valve；10th, driving power；11st, computer.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
Embodiment one
The present embodiment provides a kind of microfluid excitation micro element self-assembly device, and structure is as shown in Figure 1：
There is the pit array of the respective shapes etched, each pit from silicon chip with adding on the substrate such as silicon or glass 1
The microcomponent 2 that work produces given configuration matches, and microcomponent 2 is carried by carrier solution 3, is provided with dividing plate 4 and the fovea superior of substrate 1
Corresponding micro- spray array 5 is cheated, two flexure type piezoelectric vibrators (including pushing electric tachometer indicator 6 and upper piezoelectric vibrator 7) are attached to respectively
On metallic elastic film 8, check valve 9 forms closed cavity with dividing plate 4 and elastic film 8, and fluid 3 can flow into from check valve 9
And sprayed from micro- spray array 5.Two flexure type piezoelectric vibrators are controlled by driving power 10 and computer 11.
Distance is fine-tuning between substrate 1 and dividing plate 4, and distance is 1.8-2 times of microcomponent size.
Embodiment two
The present embodiment provides a kind of self-chambering method of completing the square based on self-assembly device described in embodiment one.
Excessive microcomponent 2 is scattered to be suspended in selected carrier solution 3, can under the driving of pressure from substrate 1 and every
Flowed through in plate 4, the carrier solution in dividing plate 4 and metallic elastic film 8 is free of microcomponent 2, and computer 11 passes through driving by programming
Power supply 10 controls the vibration of flexure type piezoelectric vibrator, because the alternating bending of flexure type piezoelectric vibrator is vibrated, makes metallic elastic film 8 past
Multiple bending, when metallic elastic film is bent about 8, due to the effect of check valve 9 and micro- spray array 5, the stream without microcomponent 2
Body can replace to be flowed into from check valve 9, is sprayed from micro- spray array 5, and computer 11 is curved by the control of driving power 10 two after programming
The amplitude and frequency of curved piezoelectric vibrator, frequency and flow that micro- spray array 5 sprays can be adjusted.
Micro- spray array 5 corresponds with pit array on substrate 1, is flowed through when carrier solution 3 left floating excessive microcomponent 2
On substrate 1 during pit array, the fluid of injection makes excitation microcomponent 2 close to pit array on substrate 1, now microcomponent, liquid
The pit to match on substrate, part microcomponent can be fallen into the presence of the capillary force of binding material and surface tension etc. at random
It can be completely fitted immediately with the pit of substrate 1, for the microcomponent that remaining is not completely fitted with the pit of substrate 1, lasting excitation
It can be made to obtain the energy trapping formed when energy surmounts completely not chimeric, gradually the pit with substrate 1 is completely fitted.By
The fluid excitation of a period of time, it is ensured that the pit of most of microcomponent 2 and substrate 1 is completely fitted, and has no chance to enter
The element of pit will be rushed out substrate surface.Through over cleaning, into assembling next time.Microcomponent is right on substrate in batch is decorateeed
It is behind position, solution removal is clean, the assembling of product is completed by pin interconnection.
Computer 11 changes driving power 10 by program parameterization and applies drive signal to two flexure type piezoelectric vibrators,
The amplitude and frequency of two flexure type piezoelectric vibrators are controlled, the dynamics and the frequency of the fluid of injection can be adjusted, to adapt to difference
The requirement of the micro assemby of shape and yardstick.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention.All essences in the present invention
All any modification, equivalent and improvement made within refreshing and principle etc., should be included in the scope of the protection.
Claims (4)
1. a kind of microfluid encourages micro element self-assembly device, it is characterised in that：Including substrate (1) and dividing plate (4), the substrate
(1) there is the pit array that etches, each pit in the pit array and the infinitesimal fabricated out from silicon chip on
The profile of part (2) matches, and the microcomponent (2) is carried by carrier solution (3), and the dividing plate (4) forms with substrate (1) and assembled
Chamber, the micro- spray array (5) corresponding with the pit on substrate (1), two flexure type piezoelectric vibrators point are provided with the dividing plate (4)
It is not attached on elastic film (8), check valve (9) and dividing plate (4) and elastic film (8) form closed cavity, and solution (3) is from unidirectional
Valve (9) is flowed into and sprayed from micro- spray array (5), and two flexure type piezoelectric vibrators are controlled by driving power (10) and computer (11)
System.
2. microfluid according to claim 1 encourages micro element self-assembly device, it is characterised in that：The substrate (1) and
The distance between dividing plate (4) is fine-tuning, and the fine setting scope is 1.8-2 times of microcomponent size.
3. the self-chambering method of completing the square of the described device of claim 1 or 2, it is characterised in that：Excessive microcomponent (2) is scattered to be suspended in choosing
In fixed carrier solution (3), flowed through under the driving of pressure from substrate (1) and dividing plate (4), dividing plate (4) and elastic film (8)
In carrier solution be free of microcomponent (2), computer (11) controls flexure type piezoelectric vibrator by programming by driving power (10)
Vibration, because the alternating bending of flexure type piezoelectric vibrator is vibrated, make metallic elastic film (8) cyclic bending, due to check valve (9) and
The effect of micro- spray array (5), the fluid without microcomponent (2) alternately flow into from check valve (9), are sprayed from micro- spray array (5), meter
The amplitude and frequency of flexure type piezoelectric vibrator are controlled after calculation machine (11) programming by driving power (10), so as to adjust micro- spray array
(5) frequency and flow sprayed.
4. according to the method for claim 3, it is characterised in that：Micro- spray array (5) and the pit array one on (1) on substrate
One correspondence, when carrier solution (3), which left floating excessive microcomponent (2), flows through the pit array on substrate (1), the fluid of injection
Pit array of the microcomponent (2) close on substrate on (1) is encouraged, now microcomponent is including the capillary force of liquid binding material
With the pit that matches on substrate is fallen into the presence of surface tension at random, part microcomponent is complete with substrate (1) pit immediately
Chimeric, for the microcomponent (2) that remaining is not completely fitted with the pit of substrate (1), lasting excitation surmounts its acquisition energy
The energy trapping formed when completely not chimeric, gradually the pit with substrate (1) be completely fitted, the pit for having no chance to enter
Element will be rushed out substrate surface.
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| CN108961419A (en) * | 2018-06-15 | 2018-12-07 | 重庆大学 | The microscopic field of view spatial digitalized method and system of the micro-vision system of microassembly system |
| CN109755199A (en) * | 2019-02-20 | 2019-05-14 | 合肥工业大学 | A kind of minim channel jet stream radiator |
| CN110112075A (en) * | 2018-02-01 | 2019-08-09 | 上海瑞章物联网技术有限公司 | The packaging method of chip |
| KR20190118100A (en) * | 2018-04-09 | 2019-10-17 | 중앙대학교 산학협력단 | Micro device array substrate and manufacturing method thereof |
| CN110349866A (en) * | 2018-04-04 | 2019-10-18 | 上海瑞章物联网技术有限公司 | The flush mounting and its embedding grammar of microchip |
| CN114870916A (en) * | 2022-05-06 | 2022-08-09 | 中新国际联合研究院 | Microfluid liquid drop moving, stripping and separating stripping structure and method |
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| CN110112075A (en) * | 2018-02-01 | 2019-08-09 | 上海瑞章物联网技术有限公司 | The packaging method of chip |
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| KR102158976B1 (en) | 2018-04-09 | 2020-09-24 | 중앙대학교 산학협력단 | Micro device array substrate and manufacturing method thereof |
| KR102158975B1 (en) | 2018-04-09 | 2020-09-24 | 중앙대학교 산학협력단 | Micro device array substrate and manufacturing method thereof |
| CN108961419A (en) * | 2018-06-15 | 2018-12-07 | 重庆大学 | The microscopic field of view spatial digitalized method and system of the micro-vision system of microassembly system |
| CN108961419B (en) * | 2018-06-15 | 2023-06-06 | 重庆大学 | Microscopic visual field space digitizing method and system for microscopic visual system of micro assembly system |
| CN109755199A (en) * | 2019-02-20 | 2019-05-14 | 合肥工业大学 | A kind of minim channel jet stream radiator |
| CN114870916A (en) * | 2022-05-06 | 2022-08-09 | 中新国际联合研究院 | Microfluid liquid drop moving, stripping and separating stripping structure and method |
| CN114870916B (en) * | 2022-05-06 | 2023-12-05 | 中新国际联合研究院 | Micro-fluid droplet moving, stripping and separating stripping structure and method |
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| CN107644827B (en) | 2019-09-10 |
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Effective date of registration: 20201123 Address after: 213000 Jiangsu city of Changzhou province Hehai West New District No. 195 Patentee after: Changzhou Guyu power supply Co.,Ltd. Address before: 213032 No. 666 Liaohe Road, Xinbei District, Jiangsu, Changzhou Patentee before: CHANGZHOU INSTITUTE OF TECHNOLOGY |
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Effective date of registration: 20230706 Address after: 213000 No. 666, Daluo Road, Yaoguan Town, Changzhou Economic Development Zone, Jiangsu Province Patentee after: Mattel (Changzhou) Control System Co.,Ltd. Address before: 213000 No. 195 Hehai West Road, Xinbei District, Changzhou City, Jiangsu Province Patentee before: Changzhou Guyu power supply Co.,Ltd. |
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