CN104481850B - A kind of optical drive micro-fluid pump - Google Patents
A kind of optical drive micro-fluid pump Download PDFInfo
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- CN104481850B CN104481850B CN201410641754.5A CN201410641754A CN104481850B CN 104481850 B CN104481850 B CN 104481850B CN 201410641754 A CN201410641754 A CN 201410641754A CN 104481850 B CN104481850 B CN 104481850B
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Abstract
The present invention relates to a kind of optical drive micro-fluid pump, change between luminous energy and mechanical energy, include gateway layer, pump chamber layer, micro-wire grid array driver element and substrate the most successively；Gateway layer is provided with entrance and exit；Pump chamber layer includes pump chamber and can the vibrating diaphragm of deformation；Micro-wire grid array driver element includes micro-wire grid array that the cycle is hundred nano-scale, and micro-wire grid array is made up of grid ridge and grid paddy and is shape-memory material diphenyl diimide liquid crystal elastic body.The present invention periodically changes irradiation light kind and light intensity, is accurately controlled micro-fluid pump pump chamber and periodically changes, thus produces the flowing of continuous print residual quantity.There is the advantages such as fast response time, operating frequency is high, energy consumption is little, drive volume is big；It is accurately controlled flow, it is possible to apply in fields such as cell separation, fluid micro dispensing, medicine micro-injection, microchemical analyses；Device manufacture can use MEMS processing technique, compatible with IC manufacturing process, is suitable for batch production.
Description
Technical field
The present invention relates to the micro-move device device that opto-mechanical tool can be changed, particularly to a kind of optical drive micro-fluid pump.
Background technology
Microfluid system includes micro-fluid pump, micro-valve, microsensor, micro-spray and microchannel etc., and wherein, micro-fluid pump is a key device in microfluid system.
According to the difference of type of drive, micro-fluid pump can be divided into the polytypes such as driving, the thermal drivers type of piezoelectric driven, electrostatic drive type, marmem.Above-mentioned type of drive respectively has different advantages, but also has respective deficiency.The such as driving voltage of piezoelectric driven Micropump is higher；The driving force of electrostatic drive type Micropump is less, and deformational displacement is less；The operating frequency of thermal drivers type Micropump is relatively low, limits its output flow and back pressure.
Summary of the invention
The technical problem to be solved in the present invention is: in order to overcome the deficiency of existing micro-fluid pump, the present invention provides a kind of optical drive micro-fluid pump, optical drive need not electrical energy drive, there is the advantages such as fast response time, operating frequency is high, energy consumption is little, drive volume is big, the perfect driving of micro-fluid pump can be become.
The technical solution adopted for the present invention to solve the technical problems is: a kind of optical drive micro-fluid pump, includes gateway layer, pump chamber layer, micro-wire grid array driver element and substrate the most successively；
Described gateway layer, is provided with entrance and exit, is used for transmitting liquid；
Described pump chamber layer, including pump chamber and can the vibrating diaphragm of deformation, pump chamber connects with the entrance and exit of gateway layer；
Described micro-wire grid array driver element includes micro-wire grid array that the cycle is hundred nano-scale, described micro-wire grid array is made up of grid ridge and grid paddy, and micro-wire grid array is shape-memory material diphenyl diimide liquid crystal elastic body, the liquid crystal unit orientation of micro-wire grid array is limited to micro-wire grid array structure and is perpendicular to the groove direction of micro-wire grid array；
Substrate is quartz glass, and quartz glass is as the substrate for micro-wire grid array, and the grid ridge longitudinal dilatation to micro-wire grid array simultaneously has deformed barrier effect.
Described gateway layer and pump chamber layer are monocrystalline silicon piece, and gateway layer is mutually aligned by Si-Si bonding process with pump chamber layer, is bonded.
Described gateway layer and pump chamber layer are the monocrystalline silicon piece through KOH corrosive liquid silicon anisotropic etching.
The vibrating diaphragm thickness of pump chamber layer is 5 μm.
The silicon wafer thickness of described gateway layer and pump chamber layer is 350 μm.
The deformation quantity of vibrating diaphragm is limited to the structural parameters of micro-wire grid array.Under equal conditions, little micro-wire grid array cycle and big grid ridge longitudinally height can make vibrating diaphragm obtain bigger deformation, so that pump chamber obtains bigger driving force.Due to the restriction of technique, the cycle of the most micro-wire grid array is that 200-500nm is interval, and grid ridge longitudinally height is that 50-100nm is interval.
Grid paddy is air, and micro-wire grid array area is less than vibrating diaphragm area.
The thickness of described substrate is 0.5mm.
Micro-wire grid array driver element is bonded together by the vibrating diaphragm of binding agent with pump chamber layer.
Described binding agent is the one in epoxy resin binding agent, polyacrylate binding agent.
As preferably, described binding agent is epoxy resin binding agent.
The operation principle of the present invention is, utilizes the photo-deformable effect of micro-wire grid array, the switching frequency alternately using ultraviolet light and visible ray that micro-wire grid array carries out vertical irradiation, ultraviolet light and visible ray to keep fixing；The grid ridge of micro-wire grid array will produce periodic reversible deformation, i.e. longitudinal dilatation and recovery；The vibrating diaphragm driving pump chamber moves back and forth, and i.e. bends and restores；Pump chamber cyclically-varying, thus drive whole pump work.
Micro-wire grid array is under ultraviolet light irradiates, grid ridge highly linear expands, promote the downward deformation of vibrating diaphragm, pump chamber inner volume reduces, fluid from inlet in pump chamber and outlet are flowed out outside pump chamber simultaneously, and now the conical pipe of entrance is collapsible tube, and the conical pipe of outlet is then anemostat, the flow of anemostat is more than the flow of collapsible tube, and micro-fluid pump is in the pattern of pumping out.
Continuation radiation of visible light, grid ridge height generation linear contraction, and returning to initial state, this process makes vibrating diaphragm upwards deformation, and pump chamber inner volume increases, outside fluid from inlet and outlet flow in pump chamber simultaneously, now the conical pipe of entrance is anemostat, and the conical pipe of outlet is then collapsible tube, owing to their pressure drop is different, the flow of anemostat is more than the flow of collapsible tube, and micro-fluid pump is in supply model.
Periodically change and irradiate light kind and light intensity, be accurately controlled micro-fluid pump pump chamber and periodically change, thus produce the flowing of continuous print residual quantity.
The invention has the beneficial effects as follows, a kind of optical drive micro-fluid pump of the present invention, change between luminous energy and mechanical energy, there is the advantages such as fast response time, operating frequency is high, energy consumption is little, drive volume is big；It is accurately controlled flow, it is possible to apply in fields such as cell separation, fluid micro dispensing, medicine micro-injection, microchemical analyses；Device manufacture can use MEMS processing technique, compatible with IC manufacturing process, is suitable for batch production.
Accompanying drawing explanation
The present invention is further described with embodiment below in conjunction with the accompanying drawings.
Fig. 1 is the structural representation of the optical drive micro-fluid pump embodiment of the present invention.
Fig. 2 be the present invention optical drive micro-fluid pump embodiment in the structural representation of micro-wire grid array driver element.
Fig. 3 be the present invention optical drive micro-fluid pump embodiment in micro-wire grid array ultraviolet light irradiate under structural representation.
Fig. 4 be the present invention optical drive micro-fluid pump embodiment in micro-wire grid array structural representation under visible light illumination.
In figure 1, gateway layer, 2, pump chamber layer, 3, micro-wire grid array driver element, 4, substrate, 5, entrance, 6, outlet, 7, pump chamber, 8, vibrating diaphragm, 9, micro-wire grid array, 91, grid ridge, 92, grid paddy, α, the angle on side and base of entrance.
Detailed description of the invention
In conjunction with the accompanying drawings, the present invention is further detailed explanation.These accompanying drawings are the schematic diagram of simplification, and the basic structure of the present invention is described the most in a schematic way, and therefore it only shows the composition relevant with the present invention.
As it is shown in figure 1, be the schematic diagram of optical drive micro-fluid pump embodiment of the present invention, the present invention includes gateway layer 1, pump chamber layer 2, micro-wire grid array driver element 3 and substrate 4 the most successively.
Gateway layer 1 provides entrance 5 and outlet 6, for transmitting liquid, entrance 5 is bell wide at the top and narrow at the bottom, outlet 6 then contrast, for up-narrow and down-wide bell, entrance 5 and the shape of outlet 6, size are identical, but turn upside down, below figure 1, and the angle α on the side of entrance 5 and base is 54.74 °；Gateway layer 1 uses N-type<100>crystal orientation monocrystalline square silicon pieces, carries out body silicon anisotropic etching and prepare in KOH corrosive liquid, and silicon wafer thickness is 350 μm, when vibrating diaphragm 8 moves, due to micro-diffusion, entrance 5 is different with the resistance of outlet 6, and entirety can behave as the one-way flow of fluid.
Pump chamber layer 2 include pump chamber 7 and can the vibrating diaphragm 8 of deformation, the entrance 5 of pump chamber 7 and gateway layer 1 and export 6 and connect.Pump chamber layer 2 uses N-type<100>crystal orientation monocrystalline silicon piece to carry out body silicon anisotropic etching in KOH corrosive liquid to prepare, and silicon wafer thickness is 350 μm, and vibrating diaphragm thickness is 5 μm.
Gateway layer 1 is mutually aligned by Si-Si bonding process with pump chamber layer 2, is bonded.
Micro-wire grid array driver element 3 includes micro-wire grid array 9 that the cycle is hundred nano-scale, the cycle of micro-wire grid array 9 of nano impression is 200nm-500nm, in the present embodiment, the cycle is 300nm, the size in cycle determines the liquid crystal unit degree of orientation in grid ridge 91, and then affects the expansion efficiency of grid ridge 91 photo-deformable effect.As in figure 2 it is shown, micro-wire grid array 9 is made up of grid ridge 91 and grid paddy 92, grid ridge 91 longitudinally height is 50nm-100nm, and in Fig. 2, x direction is axially, and y direction is longitudinally, and in the present embodiment, grid ridge 91 longitudinally height is 60nm；Grid paddy 92 is air.And micro-wire grid array 9 is shape-memory material diphenyl diimide liquid crystal elastic body, the liquid crystal unit orientation of micro-wire grid array 9 is limited to micro-wire grid array structure and is perpendicular to the groove direction of micro-wire grid array 9；The area of micro-wire grid array 9 is less than pump chamber vibrating diaphragm area.Micro-wire grid array structure of diphenyl diimide liquid crystal elastic body material ultraviolet light irradiate under, the conformation transition of azobenzene molecule, make orderly Azobenzene mesogen become unordered, thus cause longitudinal dilatation, grid ridge height increases, and in order to keep constancy of volume, grid ridge axially simultaneously shrinks.With radiation of visible light, cis-azobenzene returns to again transoid conformation, and the grid ridge height of micro-wire grid array returns to original state.
Substrate 4 uses quartz glass, and thickness is 0.5mm.
Binding agent is used to be bonded together with vibrating diaphragm 8 micro-wire grid array driver element 3.Binding agent selects the one in epoxy resin binding agent, polyacrylate binding agent, preferential selection epoxy resin binding agent, specifically selects epoxy adhesive in the present embodiment.
The light source that the present invention uses is ultraviolet light and visible ray alternately irradiation, and the concrete a length of 365nm of ultraviolet light wave in the present embodiment, light intensity is 1mw/cm2；The concrete a length of 633nm of visible light wave, light intensity is 100mw/cm2。
Micro-wire grid array that diphenyl diimide liquid crystal elastic body material is constituted, liquid crystal unit is oriented perpendicularly to the groove direction of micro-wire grid array, when alternately using ultraviolet light and radiation of visible light, the expansion of the grid ridge of micro-wire grid array longitudinally height meeting generating period and recovery, present invention utilizes this feature, as the driver element of micro-fluid pump, realize pumping out and supplying of microfluid.
The process pumping out and supplying of microfluid is realized below for the optical drive micro-fluid pump of the present invention:
As shown in Figure 3, micro-wire grid array 9 is under ultraviolet light irradiates, the longitudinal highly linear of grid ridge 91 expands, promoting the downward deformation of vibrating diaphragm 8, pump chamber 7 inner volume reduces, and fluid from inlet 5 and outlet 6 in pump chamber 7 are flowed out outside pump chamber 7 simultaneously, now the conical pipe of entrance 5 is collapsible tube, the conical pipe of outlet 6 is then anemostat, and the flow of anemostat is more than the flow of collapsible tube, and micro-fluid pump is in the pattern of pumping out.
As shown in Figure 4, continuation radiation of visible light, the longitudinal highly linear of grid ridge 91 is shunk, and is returned to state, this process makes vibrating diaphragm 8 upwards deformation, pump chamber 7 inner volume increases, and flows into when outside fluid from inlet 5 and outlet 6 in pump chamber 7, and now the conical pipe of entrance 5 is anemostat, the conical pipe of outlet 6 is then collapsible tube, owing to their pressure drop is different, the flow of anemostat is more than the flow of collapsible tube, and micro-fluid pump is in supply model.
In Fig. 3, Fig. 4, block arrow represents that flow is big, and thin arrow represents that flow is little, and total effect is shown as net inflow or outflow.
Periodically change and irradiate light kind and light intensity, be accurately controlled pump chamber 7 volume and periodically change, thus produce the flowing of continuous print residual quantity.
Pumping out and supplying of microfluid can be realized by above-mentioned process.
With the above-mentioned desirable embodiment according to the present invention for enlightenment, by above-mentioned description, relevant staff can carry out various change and amendment completely in the range of without departing from this invention technological thought.The content that the technical scope of this invention is not limited in description, it is necessary to determine its technical scope according to right.
Claims (10)
1. an optical drive micro-fluid pump, it is characterised in that: include gateway layer (1), pump chamber layer (2), micro-wire grid array driver element (3) and substrate (4) the most successively；
Described gateway layer (1), is provided with entrance (5) and outlet (6), is used for transmitting liquid；
Described pump chamber layer (2), including pump chamber (7) and can the vibrating diaphragm (8) of deformation, pump chamber (7) connects with entrance (5) and the outlet (6) of gateway layer (1)；
Described micro-wire grid array driver element (3) includes micro-wire grid array (9) that the cycle is hundred nano-scale, described micro-wire grid array (9) is made up of grid ridge (91) and grid paddy (92), and micro-wire grid array (9) is shape-memory material diphenyl diimide liquid crystal elastic body, the liquid crystal unit orientation of micro-wire grid array (9) is limited to micro-wire grid array structure and is perpendicular to the groove direction of micro-wire grid array (9)；
Substrate (4) is quartz glass.
2. optical drive micro-fluid pump as claimed in claim 1, it is characterized in that: described gateway layer (1) and pump chamber layer (2) are monocrystalline silicon piece, and gateway layer (1) is mutually aligned by Si-Si bonding process with pump chamber layer (2), is bonded.
3. optical drive micro-fluid pump as claimed in claim 2, it is characterised in that: described gateway layer (1) and pump chamber layer (2) they are the monocrystalline silicon piece through KOH corrosive liquid silicon anisotropic etching.
4. optical drive micro-fluid pump as claimed in claim 1, it is characterised in that: vibrating diaphragm (8) thickness of pump chamber layer (2) is 5 μm.
5. optical drive micro-fluid pump as claimed in claim 2, it is characterised in that: the silicon wafer thickness of described gateway layer (1) and pump chamber layer (2) is 350 μm.
6. optical drive micro-fluid pump as claimed in claim 1, it is characterized in that: the cycle of described micro-wire grid array (9) is 200nm-500nm, grid ridge (91) longitudinally height is 50nm-100nm, grid paddy (92) is air, and micro-wire grid array (9) area is less than the area of vibrating diaphragm (8).
7. optical drive micro-fluid pump as claimed in claim 1, it is characterised in that: the thickness of described substrate (4) is 0.5mm.
8. optical drive micro-fluid pump as claimed in claim 1, it is characterised in that: micro-wire grid array driver element (3) is bonded together by the vibrating diaphragm (8) of binding agent with pump chamber layer (2).
9. optical drive micro-fluid pump as claimed in claim 8, it is characterised in that: described binding agent is the one in epoxy resin binding agent, polyacrylate binding agent.
10. optical drive micro-fluid pump as claimed in claim 9, it is characterised in that: described binding agent is epoxy resin binding agent.
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| CN201410641754.5A CN104481850B (en) | 2014-11-13 | 2014-11-13 | A kind of optical drive micro-fluid pump |
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| CN201410641754.5A CN104481850B (en) | 2014-11-13 | 2014-11-13 | A kind of optical drive micro-fluid pump |
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| CN104481850B true CN104481850B (en) | 2016-08-03 |
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Families Citing this family (9)
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| CN105842018B (en) * | 2016-03-18 | 2018-12-07 | 西安交通大学 | A kind of optical drive flexibility air pump of real-time monitoring gas concentration |
| CN107676541B (en) * | 2016-08-02 | 2020-06-05 | 复旦大学 | Method for optically controlling movement of microfluid |
| JP2020526380A (en) * | 2017-07-07 | 2020-08-31 | ティコマット オサケ ユキチュア | Microfluidic device |
| CN107859613B (en) * | 2017-09-22 | 2019-05-28 | 宁波大学 | A kind of light-operated Micropump device |
| CN108704679B (en) * | 2018-05-24 | 2020-09-08 | 北京大学 | Optical micro-fluidic composite tube type channel |
| CN108517295A (en) * | 2018-06-01 | 2018-09-11 | 东莞东阳光科研发有限公司 | A kind of cell capture device |
| CN110206993B (en) * | 2019-05-28 | 2021-01-05 | 哈尔滨工业大学 | Bearing active micro-redundancy lubricating mechanism based on valveless piezoelectric micropump |
| ES2887874B2 (en) * | 2020-06-23 | 2022-11-18 | Consejo Superior Investigacion | MICROFLUIDIC VALVE, MANUFACTURING PROCEDURE AND ITS USES |
| CN113842270A (en) * | 2021-11-09 | 2021-12-28 | 清华大学 | Contraction hemostatic plaster based on liquid crystal elastomer reticular lattice structure and preparation method thereof |
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| JP2003276193A (en) * | 2002-03-22 | 2003-09-30 | Ricoh Co Ltd | Electrostatic actuator, liquid drop ejection head and ink jet recorder |
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| US4427350A (en) * | 1982-01-11 | 1984-01-24 | Hare Louis R O | Solar diaphragm pump |
| CN1822897A (en) * | 2003-07-11 | 2006-08-23 | 日本碍子株式会社 | Micro reactor |
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| CN101709695A (en) * | 2009-11-19 | 2010-05-19 | 复旦大学 | Driving micro pump of photoinduced bending film |
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