CN107420291B - A kind of laminated film piezoelectric micropump based on variable elasticity modulus - Google Patents
A kind of laminated film piezoelectric micropump based on variable elasticity modulus Download PDFInfo
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- CN107420291B CN107420291B CN201710568562.XA CN201710568562A CN107420291B CN 107420291 B CN107420291 B CN 107420291B CN 201710568562 A CN201710568562 A CN 201710568562A CN 107420291 B CN107420291 B CN 107420291B
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- 238000005086 pumping Methods 0.000 claims abstract description 28
- 230000008676 import Effects 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 6
- 229920000431 shape-memory polymer Polymers 0.000 claims description 6
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 230000008602 contraction Effects 0.000 claims description 3
- 239000002041 carbon nanotube Substances 0.000 claims description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 2
- 230000002209 hydrophobic effect Effects 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000004044 response Effects 0.000 abstract description 5
- 239000012530 fluid Substances 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 80
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 4
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 4
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 108020004414 DNA Proteins 0.000 description 1
- 108091092878 Microsatellite Proteins 0.000 description 1
- 241001274658 Modulus modulus Species 0.000 description 1
- -1 Radical siloxane Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8561—Bismuth-based oxides
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention proposes a kind of laminated film piezoelectric micropump based on variable elasticity modulus, it is intended to improve Micropump pump output, driving voltage is reduced simultaneously, simplify micro-pump structure, improve the reliability of Micropump at work, including upper cover plate, inlet valve, upper frame, pumping diaphragm, lower frame, lower cover plate and outlet valve.Upper cover plate is fixed on frame upper surface, is provided with import valve port, and inlet valve is mounted on the lower end of the valve port, and lower cover plate is fixed on lower frame lower surface, is provided with outlet port, and outlet valve is mounted on the lower end of the valve port；The pumping diaphragm is combined by the first conductive layer, first medium layer, the second conductive layer, driving electrodes, third conductive layer and second dielectric layer, is fixed between frame and lower frame, and the pump chamber of variable volume is formed.The large deformation of pump chamber can be achieved in Micropump of the present invention under low driving voltage, and the response time is fast, while having environmentally protective characteristic, can be used in fluid micro conveyer system.
Description
Technical field
The invention belongs to field of micro electromechanical technology, are related to a kind of piezoelectric micropump, in particular to a kind of to be based on variable elastic mould
The laminated film piezoelectric micropump of amount, can be used in fluid micro conveyer system.
Background technique
Micropump is the core component of miniflow amount control system, is the dynamical element for realizing micrometeor supply.As a kind of heavy
The micro actuator wanted, Micropump is widely used in drug conveying at present, cell separates, DNA is synthesized, micro fluid supplies, accurate
Control, chip-cooling system and micro-satellite etc., become research hotspot in recent years.
According to driving method, Micropump can be divided into mems electrostatic pump, electromagnetism Micropump, piezoelectric micropump, Pneumatic Micropump, thermal actuation bubble
Micropump, hydrodynamic Micropump, thermal actuation bimetallic Micropump, marmem Micropump, electrochemistry Micropump and ion activate Micropump
Deng.Piezoelectric micropump is the piezoelectric effect generation driving force using piezo-electric crystal, and using it as the driving force of Micropump pumping diaphragm deformation
Source, have and have the advantages of simple structure and easy realization, the response time is short, and actuating power is big, and controllability is good, energy conversion efficiency is high etc.
Advantage, research is more active at present, but driving voltage needed for its realization large deformation is higher, and piezoelectric diaphragm is in high frequency periodic work
Fatigue rupture easily occurs when making, poor reliability limits its scope of application.The main goal in research of Micropump is all to make every effort at present
Reduce driving voltage, improve response speed, increase driving force, increase pump output, improve reliability etc..
Such as application publication number is CN104832404A, the patent Shen of entitled " a kind of piezoelectric micropump based on PDMS "
Please, a kind of piezoelectric micropump based on PDMS is disclosed, structure is as shown in Figure 1, include piezoelectric vibrator 1, the PDMS pump housing 2, PMMA
Washer 3, valve block 4, the groove 5 on washer, valve block positioning side 6, water outlet 7 and water inlet 8, swash the input driving of piezoelectric vibrator 1
Encourage signal, piezoelectric vibrator can periodically bending vibration up and down, so as to cause the cyclically-varying of cavity volume and pressure, in turn
Under the mating reaction of the periodical open and close of check valve 4, draining and water suction are realized.Although this structure can pump certain spies
The liquid of different property, has good transparency, but there are the following problems:
1) in the big variable quantity of realization pump housing volume, required driving voltage is larger；
2) it is driven using single layer piezoelectric oscillator, when high frequency period sex work, is easy to happen fatigue damage, poor reliability.
3) structure is complicated, and processing technology is at high cost.
Summary of the invention
It is an object of the invention to overcome the problems of the above-mentioned prior art, propose a kind of based on variable elasticity modulus
Laminated film piezoelectric micropump, it is intended to improve Micropump pump output, reduce driving voltage, and simplify micro-pump structure, while improving micro-
The reliability of pump at work.
To achieve the above object, the technical scheme adopted by the invention is as follows:
A kind of laminated film piezoelectric micropump based on variable elasticity modulus, including upper cover plate 1, inlet valve 2, upper frame 3, pump
Film 4, lower frame 5, outlet valve 6 and lower cover plate 7；The pumping diaphragm 4 is fixed between frame 3 and lower frame 5, forms variable volume
Pump chamber, the pumping diaphragm 4 use laminated film, by the first conductive layer 31, first medium layer 32, the second conductive layer 33, driving electrodes
34, third conductive layer 35 and second dielectric layer 36 are combined, for realizing the expansion and contraction of pump chamber, wherein first is situated between
Matter layer 32 uses memorizing material, and driving electrodes 34 use piezoelectric material；The upper cover plate 1 is fixed on 3 upper surface of frame,
On be provided with import valve port, pass through inlet valve 2 and control liquid and be pumped into；The lower cover plate 7 is fixed on 5 lower surface of lower frame,
On be provided with outlet port, pass through outlet valve 6 and control liquid and pump out；The second dielectric layer 36 is located at pump chamber side.
The above-mentioned laminated film piezoelectric micropump based on variable elasticity modulus, the upper cover plate 1, inlet valve 2, upper frame 3, under
Frame 5, outlet valve 6, lower cover plate 7 and second dielectric layer 36, are all made of hydrophobic material.
The above-mentioned laminated film piezoelectric micropump based on variable elasticity modulus, first conductive layer 31, the second conductive layer 33
With third conductive layer 35, it is all made of grapheme material.
The above-mentioned laminated film piezoelectric micropump based on variable elasticity modulus, the first medium layer 32, using doped with carbon
The shape-memory polymer of nanotube.
The above-mentioned laminated film piezoelectric micropump based on variable elasticity modulus, the second dielectric layer 36, using poly dimethyl
Silicone compositions.
The above-mentioned laminated film piezoelectric micropump based on variable elasticity modulus, the driving electrodes 34, using bismuth-sodium titanate base
Leadless piezoelectric ceramics.
Compared with prior art, the present invention having the advantage that
1) present invention since pumping diaphragm is using laminated film, make pottery by the bismuth sodium titanate base leadless piezoelectricity that driving electrodes therein use
The shape-memory polymer for the doped carbon nanometer pipe that porcelain can be changed with big electric field induced strain, first medium layer using elasticity modulus, and
It is adopted with super large deformability and good conductive capability and the first conductive layer, the second conductive layer and third conductive layer
Grapheme material has high carrier, high thermal conductivity characteristic and good flexibility, poly- diformazan used by second dielectric layer
Radical siloxane Young's modulus is low, and structure has high resiliency, so that the elasticity modulus of entire pumping diaphragm is variable, at lower drive voltage
Large deformation can be fast implemented, the Micropump response time is short, improves pump output, while reducing driving voltage.
2) the first conductive layer of the invention by pumping diaphragm, the second conductive layer and third conductive layer institute are had using graphene
Superior mechanical characteristic, and the shape-memory polymer of doped carbon nanometer pipe used by first medium layer, have good intensity,
Elasticity and fatigue resistance, it is ensured that Micropump has good mechanical performance, improves reliability.
3) micro-pump structure of the invention is simple, easy to process, and processing cost is low.
4) present invention has due to using bismuth-sodium titanate base lead-free piezoelectric ceramic and degradable shape-memory polymer
Environmentally protective characteristic.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of existing PDMS piezoelectric micropump；
Fig. 2 is the overall structure diagram of the specific embodiment of the invention；
Fig. 3 is the pumping diaphragm structural schematic diagram of the specific embodiment of the invention；
Fig. 4 is that each conductive layer applies voltage timing diagram in the specific embodiment of the invention course of work；
Fig. 5 is the structural schematic diagram that the specific embodiment of the invention is pumped into process；
Fig. 6 is the structural schematic diagram that the specific embodiment of the invention pumps out process.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Referring to Fig. 2, the laminated film piezoelectric micropump based on variable elasticity modulus, including upper cover plate 1, inlet valve 2, upper frame
3, pumping diaphragm 4, lower frame 5, outlet valve 6 and lower cover plate 7.
The upper cover plate 4 and lower cover plate 5 are the just the same rectangle cover board of shape size, and center passes through laser respectively
Lithography has rectangular inlet valve port and rectangular outlet valve port, and structure is simple, easy to process, material selection silicon.
The inlet valve 2 and outlet valve 6 are rectangle valve, and structure is simple, easy to process, select silicon materials, inlet valve 2
One end is adhered at the import valve port of upper cover plate 1 by Heat Ultrasonic Bonding, and outlet valve 6 is adhered to lower cover plate by Heat Ultrasonic Bonding
At 7 outlet port.
The upper frame 3 and lower frame 5 are rectangular frame, and material selects silicon, respectively by Heat Ultrasonic Bonding with it is upper
Cover board 4 and lower cover plate 5 are adhesively fixed.
The pumping diaphragm 4 forms the rectangle pump chamber of variable volume with upper cover plate 1, upper frame 3, lower frame 5, lower cover plate 7, and should
Four sides of pump chamber are rectangle pumping diaphragm 4.Its structure as shown in figure 3, the pumping diaphragm 4 be laminated film, by the first conductive layer 31,
First medium layer 32, the second conductive layer 33, driving electrodes 34, third conductive layer 35 and second dielectric layer 36 pass through excimer laser
Nano-imprint process coining is combined, for realizing the expansion and contraction of pump chamber.Wherein driving electrodes 34 use metatitanic acid
Bismuth sodium based leadless piezoelectric ceramics, this kind of material have big electric field induced strain, can generate proportional with the quadratic power of driving voltage
Strain facilitates pumping diaphragm 4 and realizes large deformation.First medium layer 32 selects the shape-memory polymer doped with carbon nanotube, makes
The dielectric layer elasticity modulus modulus can vary with temperature, have super large deformability, and show good electric conductivity, high-strength
Degree and good fatigue resistance greatly shorten the dielectric layer temperature change time, shorten response time when pumping diaphragm 4 deforms.The
One conductive layer 31, the second conductive layer 33 and third conductive layer are all made of grapheme material, because graphene is single layer of carbon atom layer, tool
There are high resiliency, high carrier, high thermal conductivity characteristic, after applying driving voltage, temperature can be risen rapidly, it is prone to deform, have
Help pumping diaphragm 4 and realizes large deformation.Wherein the first conductive layer 31 is used to transmit heat to first medium layer 32, and the second conductive layer 33 is used
In to first medium layer 32 transmit heat, while to driving electrodes 34 apply driving voltage, third conductive layer 35 be used for driving
Electrode 34 applies driving voltage.The second dielectric layer 36 uses polydimethyl siloxane material, with hydrophobicity and waterproof
Property, belong to inert substance, Young's modulus is low, structure high resiliency, facilitates pumping diaphragm 4 and realizes large deformation.
First conductive layer 31, the second conductive layer 33 and third conductive layer 35 apply voltage sequence difference at work,
As shown in figure 4, the first conductive layer 31 and the second conductive layer 33 are first applied with outside driving voltage V when " being pumped into "1And V2, to
After one dielectric layer 32 softens, third conductive layer 35 is applied with outside driving electricity V again3.When " pumping out ", the first conductive layer 31,
Two conductive layers 33 first power off, and after first medium layer 32 is hardened, the second conductive layer 33 and third conductive layer 35 apply inwardly respectively
Driving voltage V2' and V3'。
The working principle of the embodiment is as follows:
1) " it is pumped into " process
First conductive layer 31 and the second conductive layer 33 apply outside driving voltage V1And V2, 31 He of the first conductive layer at this time
Second conductive layer, 33 temperature can rise rapidly, and the first medium layer 32 that its own heat transfer is given, at this time first medium layer
32 temperature can rise rapidly.Then third conductive layer 35 applies outside driving voltage V3, i.e. this driving electrodes 34 inwardly driving
Voltage transformation is outside driving voltage, and inside retentivity becomes to outside force.When 32 temperature of first medium layer reaches vitreous
When temperature, elasticity modulus can fall sharply rapidly.Because the first conductive layer 31, the second conductive layer 33 and third conductive layer 35 have well
Flexibility, second dielectric layer 36 has high resiliency, and driving electrodes 34 have big electric field induced strain, apply very low driving voltage
Big deflection can be generated rapidly later, so the elasticity modulus of pumping diaphragm 4 can be sharp with the elasticity modulus of first medium layer 32
Subtract and reduces.Then in the case where driving electrodes 34 press outward electrical drive power effect, pumping diaphragm 4 is moved out rapidly, generates large deformation.Cause
The volume of pump chamber increases at this time, and structural schematic diagram is as shown in figure 5, pressure P in pump chamber at inlet valve 22Reduce, there is P at this time2
< P1, i.e., pressure difference is formed at import valve port, under the differential pressure action, inlet valve 2 generates downward deformation, and inlet valve 2 is opened, stream
Body has import to be pumped into.
2) process " is pumped out "
First conductive layer 31 and the second conductive layer 33 power off, at this time the rapid drop in temperature of the two, thus first medium layer
32 rapid drop in temperature, elasticity modulus increases severely when at a temperature below vitrification point, and the first conductive layer 31, second is conductive at this time
Layer 33 and first medium layer 32 generate the elastic restoring force to pump chamber direction.Then the second conductive layer 33 and third conductive layer 35
Apply respectively with inside driving voltage V2' and V3', i.e. the outside driving voltage of driving electrodes 34 is transformed to inside driving voltage, makes
Its outside retentivity becomes to inner drive.Temperature rises rapidly after second conductive layer 33 is powered, its own heat transfer is given
First medium layer 32 causes the temperature of first medium layer 32 to rise rapidly, and elasticity modulus falls sharply, i.e. the elasticity modulus of pumping diaphragm 4 is fast
Speed falls sharply, in the inside Piezoelectric Driving power of driving electrodes 34 and the first conductive layer 31, the second conductive layer 33 and first medium layer 32
Elastic restoring force effect under, the inwardly movement rapidly of pumping diaphragm 4, structural schematic diagram is as shown in Figure 6.The volume of pump chamber is caused to shrink
Reduce, pressure P at inlet valve 2 in pump chamber2With the pressure P at outlet valve 63Increase, there is P at this time2> P1, P3> P4.I.e. into
Pressure difference is respectively formed at mouth valve port and outlet port.In pressure differential deltap (P2-P1) under the action of, inlet valve restores shape before deforming, import
Valve 2 is closed.In pressure differential deltap (P3-P4) under the action of, outlet valve 6 occurs to deform downwards, and outlet valve 6 is opened, and fluid is by outlet port
It pumps out.
Pumping diaphragm 4 constantly expands outwardly, as described above to contract, constantly increases and reduces with realizing pump chamber, from
And it completes the Micropump and periodically " is pumped into " and " pumping out ".
Above description is only example of the present invention, does not constitute any limitation of the invention, it is clear that for this
It, all may be without departing substantially from the principle of the invention, structure after having understood the content of present invention and principle for the professional in field
In the case of, various modifications and variations in form and details are carried out, but these modifications and variations based on inventive concept are still
Within the scope of the claims of the present invention.
Claims (6)
1. a kind of laminated film piezoelectric micropump based on variable elasticity modulus, which is characterized in that including upper cover plate (1), inlet valve
(2), upper frame (3), pumping diaphragm (4), lower frame (5), outlet valve (6) and lower cover plate (7)；The pumping diaphragm (4) is fixed on frame
(3) between lower frame (5), form the pump chamber of variable volume, the pumping diaphragm (4) use laminated film, by the first conductive layer (31),
First medium layer (32), the second conductive layer (33), driving electrodes (34), third conductive layer (35) and second dielectric layer (36) are compound
It forms, for realizing the expansion and contraction of pump chamber, wherein first medium layer (32) uses memorizing material, driving electrodes
(34) piezoelectric material is used；The upper cover plate (1) is fixed on frame (3) upper surface, is provided with import valve port, by into
Mouth valve (2) controls being pumped into for liquid；The lower cover plate (7) is fixed on lower frame (5) lower surface, is provided with outlet port,
Pumping out for liquid is controlled by outlet valve (6)；The second dielectric layer (36) is located at pump chamber side.
2. the laminated film piezoelectric micropump based on variable elasticity modulus according to claim 1, which is characterized in that the upper cover
((6), lower cover plate (7) and second dielectric layer (36), are adopted for plate (1), inlet valve (2), upper frame (3), lower frame (5), outlet valve
Use hydrophobic material.
3. the laminated film piezoelectric micropump based on variable elasticity modulus according to claim 1, which is characterized in that described first
Conductive layer (31), the second conductive layer (33) and third conductive layer (35), are all made of grapheme material.
4. the laminated film piezoelectric micropump based on variable elasticity modulus according to claim 1, which is characterized in that described first
Dielectric layer (32), using the shape-memory polymer doped with carbon nanotube.
5. the laminated film piezoelectric micropump based on variable elasticity modulus according to claim 1, which is characterized in that described second
Dielectric layer (36), using polydimethyl siloxane material.
6. the laminated film piezoelectric micropump based on variable elasticity modulus according to claim 1, which is characterized in that the driving
Electrode (34), using bismuth-sodium titanate base lead-free piezoelectric ceramic.
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| CN108052137B (en) * | 2017-12-06 | 2020-04-03 | 浙江海洋大学 | Ultrasonic lead bonding ultrasonic frequency self-adjusting method |
| CN108953123B (en) * | 2018-07-06 | 2019-07-23 | 西安交通大学 | A kind of micro-pump structure based on PVC-gel flexible drive |
| CN112283082A (en) * | 2019-07-24 | 2021-01-29 | 上海新微技术研发中心有限公司 | One-way valve for micropump and preparation method thereof |
| CN110966167B (en) * | 2019-12-25 | 2022-05-31 | 重庆大学 | Piezoelectric micropump |
| CN111600564B (en) * | 2020-06-22 | 2022-06-10 | 西安电子科技大学 | Adjustable frequency nano electromechanical resonator based on gamma-graphite diyne |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007060026A1 (en) * | 2007-02-09 | 2008-08-14 | Cooler Master Co., Ltd., Chung-Ho | Membrane pump used in a fluid feed system or in a fluid circulating system comprises a chamber body with an inlet line and an outlet line, chambers arranged in the body, valves, a membrane and an activating element |
| CN102084133A (en) * | 2008-04-30 | 2011-06-01 | 丹佛斯强力聚合公司 | A pump powered by a polymer transducer |
| CN104238202A (en) * | 2014-09-30 | 2014-12-24 | 合肥京东方光电科技有限公司 | Coating device, coating system and coating method for frame sealing glue |
| CN104832404A (en) * | 2015-05-13 | 2015-08-12 | 长春工业大学 | Piezoelectric micropump based on PDMS (Polydimethylsiloxane) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009108715A (en) * | 2007-10-29 | 2009-05-21 | Alps Electric Co Ltd | Piezoelectric pump |
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2017
- 2017-07-13 CN CN201710568562.XA patent/CN107420291B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007060026A1 (en) * | 2007-02-09 | 2008-08-14 | Cooler Master Co., Ltd., Chung-Ho | Membrane pump used in a fluid feed system or in a fluid circulating system comprises a chamber body with an inlet line and an outlet line, chambers arranged in the body, valves, a membrane and an activating element |
| CN102084133A (en) * | 2008-04-30 | 2011-06-01 | 丹佛斯强力聚合公司 | A pump powered by a polymer transducer |
| CN104238202A (en) * | 2014-09-30 | 2014-12-24 | 合肥京东方光电科技有限公司 | Coating device, coating system and coating method for frame sealing glue |
| CN104832404A (en) * | 2015-05-13 | 2015-08-12 | 长春工业大学 | Piezoelectric micropump based on PDMS (Polydimethylsiloxane) |
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