CN108180135B - Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism - Google Patents
Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism Download PDFInfo
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- CN108180135B CN108180135B CN201810196210.0A CN201810196210A CN108180135B CN 108180135 B CN108180135 B CN 108180135B CN 201810196210 A CN201810196210 A CN 201810196210A CN 108180135 B CN108180135 B CN 108180135B
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- flat plate
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- 230000007246 mechanism Effects 0.000 title claims abstract description 42
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- 239000004205 dimethyl polysiloxane Substances 0.000 description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 3
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a piezoelectric stack micropump based on a two-stage symmetrical flexible hinge amplifying mechanism, which comprises a one-way outlet valve, a one-way inlet valve, a valve cover, a pump cavity, a buffer cavity channel, an elastic ball, a sealing ring, a vibrating membrane, an upper flat plate, an amplifying mechanism, a piezoelectric stack electrode, a bracket and a lower flat plate; according to the invention, the upper flat plate right below the vibrating membrane is processed into the buffer cavity, and a plurality of elastic balls with rubber texture are arranged in the buffer cavity, so that the vibrating membrane can bear larger pressure to further expand the volume when the volume of the pump cavity is compressed by vibrating, and has larger buffer driving force when the volume is increased, so that the load of larger driving voltage required by large change of the volume of the pump cavity is reduced; and because the micro-displacement amplifying mechanism adopts a two-stage symmetrical flexible hinge mechanism, the micro-displacement amplifying mechanism has the advantages of higher power of the amplifying mechanism and elimination of longitudinal coupling errors.
Description
Technical Field
The invention relates to the technical field of micro piezoelectric pumps, in particular to a piezoelectric stack micro pump based on a two-stage symmetrical flexible hinge amplifying mechanism.
Background
In recent years, the use of piezoelectric stacks to fabricate piezoelectric pumps has become one of the hot spots of research. The piezoelectric stack pump can improve the output pressure in a large range and accurately control the output flow. The device can be widely applied to products such as industrial automatic infusion, oil supply, cleaning in processing equipment, precision metering in scientific research, laboratory, chemical preparations and the like, heat removal and cooling systems of instruments and meters, cooling systems of notebook computers and computer CPUs, household appliances and the like.
The search of the prior art document found in "design and experiment study of an integrated piezoelectric vibrator piezoelectric pump" written by Jilin university Liu Weishuai (published in the paper of the year 2016, 5). Micropumps using bimorphs as driving sources are mentioned in the paper. The pump has the defects that the displacement generated by the piezoelectric effect is small, the pressure of the pump cavity is not enough, the driving force for transporting viscous blood is not enough, and the performance of the micro pump is affected. The application publication number is CN104832404A, the name is a "piezoelectric micropump based on PDMS", a piezoelectric micropump based on PDMS is disclosed, its structure includes piezoelectric vibrator 1, PDMS pump body 2, PMMA packing ring 3, valve block 4, recess 5 on the packing ring, valve block locating limit 6, delivery port 7 and water inlet 8, to piezoelectric vibrator 1 input drive excitation signal, piezoelectric vibrator can periodical bending vibration from top to bottom, thereby arouse the periodic variation of cavity volume and pressure, and then under the cooperation effect of check valve 4 periodic opening and closing, realize drainage and water absorption. While this configuration is capable of pumping certain special properties of liquid, there is a problem in that the required driving voltage is large when a large variation in the volume of the pump chamber is achieved.
Disclosure of Invention
The invention aims to solve the problems that in the prior art, when the volume of a pump cavity is changed greatly, the required driving voltage is large, and the deformation of a piezoelectric stack is relatively small, and provides a piezoelectric stack micropump based on a two-stage symmetrical flexible hinge amplifying mechanism.
The invention relates to a piezoelectric stack micropump based on a two-stage symmetrical flexible hinge amplifying mechanism, which comprises a one-way outlet valve, a one-way inlet valve, a valve cover, a pump cavity, a sealing ring, a vibrating film, an upper flat plate, an amplifying mechanism, a piezoelectric stack electrode, a bracket and a lower flat plate; the piezoelectric stack is embedded in the central part of the lower flat plate, the upper end of the piezoelectric stack is in contact with the lower end of the amplifying mechanism, and the piezoelectric stack electrode is connected with an external power supply; the support is respectively connected with the upper flat plate and the lower flat plate, and the support and the central lines of the upper flat plate and the lower flat plate are on the same axis; the amplifying mechanisms are symmetrically distributed at the center of the inside of the support and are connected with the support through two corners of the bottom end of the amplifying mechanisms in pin connection, the amplifying mechanisms and the central line of the piezoelectric stack are positioned on the same axis, and the top end of each amplifying mechanism is in contact with the vibrating film; the vibrating membrane is positioned at the joint of the valve cover and the upper plate and is fixed in the clamping groove of the valve cover, and the pump cavity is formed between the upper end of the vibrating membrane and the valve cover; a buffer cavity is processed on the upper flat plate right below the vibrating membrane, and a plurality of elastic balls with rubber texture are arranged in the buffer cavity; the sealing ring is embedded in the lower end of the valve cover, so that the valve cover is tightly connected with the upper flat plate; four screws are uniformly distributed around the valve cover on the upper plate and used for fixing the valve cover on the upper plate, the unidirectional outlet valve and the unidirectional inlet valve are arranged on the valve cover, the unidirectional outlet valve and the unidirectional inlet valve are symmetrically distributed on two sides of the central axis of the valve cover, a wheel type valve structure is adopted, and the unidirectional outlet valve and the unidirectional inlet valve can be connected with a plastic pipe.
Further, the filling height of the elastic ball in the buffer cavity is 1-2mm greater than the height of the buffer cavity.
Further, the one-way outlet valve and the one-way inlet valve are both wheel-type valves as stop valves, and the vibration film is a nano-silicon inorganic polymer film.
Furthermore, the thickness of the nano-silicon inorganic polymer coating is 7-9 mu m, and small holes with phi of 0.1mm are drilled on the nano-silicon inorganic polymer coating in a vibrating and drilling mode.
Further, the piezoelectric stack is made of a plurality of metaniobate piezoelectric ceramic plates which are electrically connected in parallel or in series.
Furthermore, the piezoelectric ceramic sheet comprises a piezoelectric ceramic crystal membrane, one surface of the piezoelectric ceramic crystal membrane is bonded with a metal substrate, and the other surface of the piezoelectric ceramic crystal membrane is provided with a corrosion-resistant layer with the thickness of 1-2mm.
Further, the blank surface and the edges of the metal substrate are provided with insulating layers.
Compared with the prior art, the invention has the advantages that:
the invention adopts a piezoelectric stack structure, and after alternating current is supplied to the piezoelectric stack, the periodic change promotes the amplifying mechanism to enable the pump cavity to periodically change, so that liquid is pumped.
The invention selects the wheel valve as the stop valve of the micropump, selects the nano silicon inorganic polymer coating film as the vibrating film, and the valve plate moves horizontally when being opened, and has the advantages of large opening, large overflow area, good reverse stop performance and the like.
The invention can make the volume of the pump cavity to be larger and expand due to the adoption of the amplifying mechanism, and when the pressure of the liquid flowing is large, the pump body is respectively provided with an inlet and an outlet, so that the liquid can be pumped at the same time, and the efficiency is improved.
The invention takes the piezoelectric stack as a driving source, the piezoelectric stack enables the top end of the flexible hinge amplifying mechanism based on the lever principle to generate larger displacement, and the change of the pump cavity is caused to drive the one-way stop valve to be opened and closed.
According to the invention, the upper flat plate right below the vibrating membrane is processed into the buffer cavity, and the buffer cavity is internally provided with a plurality of elastic balls with rubber texture, so that the vibrating membrane can bear larger pressure to further expand the volume when the volume of the pump cavity is compressed by vibrating, and has larger buffer driving force when the volume is increased, so that the load of larger driving voltage required by large change of the volume of the pump cavity is reduced.
The micro-displacement amplifying mechanism adopts the two-stage symmetrical flexible hinge mechanism, when the micro-displacement amplifying mechanism works, the displacement generated at the lower end is twice that generated by the first-stage flexible amplifying mechanism, and then the second-stage amplifying mechanism amplifies the first-stage displacement twice and transmits the amplified first-stage displacement to the vibrating film, so that the micro-displacement amplifying mechanism has the advantages of higher power of the amplifying mechanism, 4 times of amplification factor and capability of eliminating longitudinal coupling errors.
Drawings
FIG. 1 is a cross-sectional view of the general structure of the present invention;
FIG. 2 is a top view of the one-way outlet valve and one-way inlet valve of the present invention;
the labeling meanings in fig. 1-2 are as follows: 1-one-way outlet valve, 2-one-way inlet valve, 3-valve cover, 4-pump cavity, 5-sealing ring, 6-vibrating film, 7-upper plate, 8-amplifying mechanism, 9-piezoelectric stack, 10-piezoelectric stack electrode, 11-bracket, 12-lower plate, 13-buffer cavity and 14-elastic ball.
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which is to be read in light of the accompanying drawings. The invention may be practiced or carried out in other embodiments that depart from the specific details disclosed herein and that may be modified or varied from the spirit and scope of the present invention.
The piezoelectric stack micropump based on the two-stage symmetrical flexible hinge amplifying mechanism comprises a one-way outlet valve 1, a one-way inlet valve 2, a valve cover 3, a pump cavity 4, a sealing ring 5, a vibrating film 6, an upper flat plate 7, an amplifying mechanism 8, a piezoelectric stack 9, piezoelectric stack electrodes 10, a bracket 11 and a lower flat plate 12, as shown in fig. 1-2; the piezoelectric stack 9 is made of ceramic materials, the piezoelectric stack 9 is embedded in the center part of the lower flat plate 12, the upper end of the piezoelectric stack 9 is in contact with the lower end of the amplifying mechanism 8, and the piezoelectric stack electrode 10 is connected with an external power supply; the bracket 11 is respectively connected with the upper flat plate 7 and the lower flat plate 12, and the bracket 11 and the central lines of the upper flat plate 7 and the lower flat plate 12 are on the same axis; the amplifying mechanisms 8 are symmetrically distributed at the center of the inside of the bracket 11 and are connected with the bracket 11 through two corners at the bottom end in a pin manner, the amplifying mechanisms 8 and the central line of the piezoelectric stack 9 are positioned on the same axis, and the top end of each amplifying mechanism 8 is contacted with the vibrating membrane 6; the vibrating membrane 6 is positioned at the joint of the valve cover 3 and the upper flat plate 7 and is fixed in a clamping groove of the valve cover 3, and the pump cavity 4 is formed between the upper end of the vibrating membrane 6 and the valve cover 3; the upper plate 7 right below the vibrating membrane 6 is provided with a buffer cavity channel 13, a plurality of elastic balls 14 with rubber texture are arranged in the buffer cavity channel 13, and the filling height of the elastic balls 14 in the buffer cavity channel 13 is 1-2mm greater than the height of the buffer cavity channel 13, so that the vibrating membrane 6 can bear larger pressure to further expand the volume when the volume of the pump cavity 13 is compressed by vibrating, and has larger buffer driving force when the volume is increased, and the burden of larger driving voltage required by large volume change of the pump cavity 13 is reduced; the sealing ring 5 is embedded in the lower end of the valve cover 3, so that the valve cover 3 is tightly connected with the upper flat plate 7; four screws are uniformly distributed around the valve cover 3 on the upper flat plate 7 and used for fixing the valve cover 3 on the upper flat plate 7, the unidirectional outlet valve 1 and the unidirectional inlet valve 2 are arranged on the valve cover 3, the unidirectional outlet valve 1 and the unidirectional inlet valve 2 are symmetrically distributed on two sides of the central axis of the valve cover 3, and the unidirectional outlet valve 1 and the unidirectional inlet valve 2 can be connected with a plastic pipe by adopting a wheel type structure; the one-way outlet valve 1 and the one-way inlet valve 2 are both wheel valves as stop valves, the vibration film 6 is a nano silicon inorganic polymer film, the thickness of the nano silicon inorganic polymer film is 7-9 mu m, and small holes with phi of 0.1mm are formed in the nano silicon inorganic polymer film by vibration drilling; the piezoelectric stack is made by electrically connecting a plurality of metaniobate piezoelectric ceramic plates in parallel or in series, the piezoelectric ceramic plates comprise piezoelectric ceramic crystal diaphragms, one surface of each piezoelectric ceramic crystal diaphragm is bonded with a metal substrate, the other surface of each piezoelectric ceramic crystal diaphragm is provided with a corrosion-resistant layer of 1-2mm, and the blank surfaces and edges of the metal substrates are provided with insulating layers.
The working principle of the invention is as follows: the piezoelectric stack 9 is made of a plurality of metaniobate piezoelectric ceramic plates which are electrically connected in parallel or in series, does not contain toxic lead, and is beneficial to environmental protection; the piezoelectric ceramic has a reverse piezoelectric effect, after an electric field is introduced, the piezoelectric stack can be periodically stretched and shortened, the stretching and shortening of the amplifying mechanism are pushed, the vibrating film connected with the piezoelectric stack also vibrates up and down along with the stretching and shortening of the amplifying mechanism, the change of the pump cavity is caused, and then the pressure difference is generated between the inside and the outside of the pump cavity, and fluid continuously flows in and out.
The invention relates to a single-cavity piezoelectric pump, which takes the vibration of a vibrating membrane 6 as a starting point when the volume of a pump cavity 4 is compressed to the minimum, and the working process of the pump can be divided into the following two stages:
(1) an input stage: when the vibration of the vibration film 6 makes the volume compression of the pump cavity 4 minimum, when the volume of the pump cavity 4 is gradually increased, the pressure in the pump cavity 4 is reduced, the one-way inlet valve 2 is opened, the one-way outlet valve 1 is in a closed state, and liquid flows into the pump cavity 4 because the external atmospheric pressure is larger than the air pressure in the pump cavity 4.
(2) Output stage: when the vibration of the vibration film 6 further increases the volume of the pump cavity 4, the volume in the pump cavity 4 is increased to the maximum starting point, the vibration film 6 starts to move upwards, the volume of the pump cavity 4 is gradually reduced, the pressure in the pump cavity 4 is increased, the one-way outlet valve 1 is forced to be opened, the one-way inlet valve 2 is closed, and the liquid gradually flows out of the pump cavity 4.
The working processes of the two stages form a working period of the piezoelectric stack micropump, and a certain amount of fluid is input and output, so that the piezoelectric stack micropump continuous pump liquid works repeatedly.
The above embodiments are merely preferred embodiments of the present invention, and any simple modification, modification and substitution changes made to the above embodiments according to the technical substance of the present invention are all within the scope of the technical solution of the present invention.
Claims (1)
1. A piezoelectric stack micropump based on a two-stage symmetrical flexible hinge amplifying mechanism is characterized in that: the device comprises a one-way outlet valve (1), a one-way inlet valve (2), a valve cover (3), a pump cavity (4), a sealing ring (5), a vibrating membrane (6), an upper flat plate (7), an amplifying mechanism (8), a piezoelectric stack (9), a piezoelectric stack electrode (10), a bracket (11) and a lower flat plate (12); the piezoelectric stack (9) is embedded in the central part of the lower flat plate (12), the upper end of the piezoelectric stack (9) is in contact with the lower end of the amplifying mechanism (8), and the piezoelectric stack electrode (10) is connected with an external power supply; the bracket (11) is respectively connected with the upper flat plate (7) and the lower flat plate (12), and the bracket (11) and the central lines of the upper flat plate (7) and the lower flat plate (12) are on the same axis; the amplifying mechanisms (8) are symmetrically distributed at the center of the inside of the bracket (11) and are connected with the bracket (11) through two corners at the bottom end in a pin mode, the amplifying mechanisms (8) and the center line of the piezoelectric stack (9) are positioned on the same axis, and the top end of each amplifying mechanism (8) is in contact with the vibrating film (6); the vibrating membrane (6) is positioned at the joint of the valve cover (3) and the upper flat plate (7), and is fixed in the clamping groove of the valve cover (3), and the pump cavity (4) is formed between the upper end of the vibrating membrane (6) and the valve cover (3); a buffer cavity (13) is processed on the upper plate (7) right below the vibrating membrane (6), and a plurality of elastic balls (14) with rubber texture are arranged in the buffer cavity (13); the sealing ring (5) is embedded in the lower end of the valve cover (3), four screws are uniformly distributed around the valve cover (3) on the upper flat plate (7), the unidirectional outlet valve (1) and the unidirectional inlet valve (2) are arranged on the valve cover (3), the unidirectional outlet valve (1) and the unidirectional inlet valve (2) are symmetrically distributed on two sides of the central axis of the valve cover (3) and adopt a wheel type structure,
the filling height of the elastic ball (14) in the buffer cavity (13) is 1-2mm greater than the height of the buffer cavity (13),
the one-way outlet valve (1) and the one-way inlet valve (2) are both wheel type valves as stop valves, the vibration film (6) is a nano silicon inorganic polymer film,
the piezoelectric stack (9) is made of a plurality of metaniobate piezoelectric ceramic plates which are electrically connected in parallel or in series,
the thickness of the nano-silicon inorganic polymer coating is 7-9 mu m, small holes with phi of 0.1mm are formed on the nano-silicon inorganic polymer coating by vibration drilling,
the piezoelectric ceramic sheet comprises a piezoelectric ceramic crystal membrane, one surface of the piezoelectric ceramic crystal membrane is bonded with a metal substrate, the other surface is provided with a corrosion-resistant layer of 1-2mm,
the blank surface and the edge of the metal substrate are provided with insulating layers.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810196210.0A CN108180135B (en) | 2018-03-09 | 2018-03-09 | Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810196210.0A CN108180135B (en) | 2018-03-09 | 2018-03-09 | Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism |
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| CN108180135A CN108180135A (en) | 2018-06-19 |
| CN108180135B true CN108180135B (en) | 2023-09-26 |
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| CN113565742A (en) * | 2020-12-07 | 2021-10-29 | 长春工业大学 | Magnetic spring piezoelectric stack resonance pump |
| CN113123946A (en) * | 2021-04-26 | 2021-07-16 | 长春工业大学 | A have valve resonance piezoelectric pump for agricultural sprinkling irrigation |
| CN113137363B (en) * | 2021-04-26 | 2022-03-29 | 长春工业大学 | Valveless double-cavity resonance piezoelectric drive type insulin pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1331538A1 (en) * | 2002-01-26 | 2003-07-30 | Eppendorf Ag | Piezo-electrically controlled micro actuator for fluids |
| CN101216027A (en) * | 2008-01-11 | 2008-07-09 | 吉林大学 | Piezoelectric stack pump |
| CN103032296A (en) * | 2012-12-06 | 2013-04-10 | 浙江师范大学 | Piezoelectric stack pump based on disk type sensor valve |
| CN103899518A (en) * | 2014-03-25 | 2014-07-02 | 浙江大学 | Piezoelectric ceramic driving based digital hydraulic pump |
| CN205243798U (en) * | 2015-12-22 | 2016-05-18 | 吉林大学 | Hydraulic pressure enlargies formula piezoelectric stack pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7284966B2 (en) * | 2003-10-01 | 2007-10-23 | Agency For Science, Technology & Research | Micro-pump |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1331538A1 (en) * | 2002-01-26 | 2003-07-30 | Eppendorf Ag | Piezo-electrically controlled micro actuator for fluids |
| CN101216027A (en) * | 2008-01-11 | 2008-07-09 | 吉林大学 | Piezoelectric stack pump |
| CN103032296A (en) * | 2012-12-06 | 2013-04-10 | 浙江师范大学 | Piezoelectric stack pump based on disk type sensor valve |
| CN103899518A (en) * | 2014-03-25 | 2014-07-02 | 浙江大学 | Piezoelectric ceramic driving based digital hydraulic pump |
| CN205243798U (en) * | 2015-12-22 | 2016-05-18 | 吉林大学 | Hydraulic pressure enlargies formula piezoelectric stack pump |
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