CN108180135A - A kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger - Google Patents
A kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger Download PDFInfo
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- CN108180135A CN108180135A CN201810196210.0A CN201810196210A CN108180135A CN 108180135 A CN108180135 A CN 108180135A CN 201810196210 A CN201810196210 A CN 201810196210A CN 108180135 A CN108180135 A CN 108180135A
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- piezoelectric stack
- valve
- enlarger
- flat plate
- symmetrical expression
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- 230000003139 buffering effect Effects 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 7
- 239000005543 nano-size silicon particle Substances 0.000 claims description 10
- 229920000592 inorganic polymer Polymers 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000005260 corrosion Methods 0.000 claims description 3
- 238000005553 drilling Methods 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 11
- 230000007246 mechanism Effects 0.000 abstract description 6
- 230000008030 elimination Effects 0.000 abstract description 2
- 238000003379 elimination reaction Methods 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 3
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- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 3
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger, including unidirectional outlet valve, one-way inlet valve, valve deck, pump chamber, buffering cavity, elastic ball, sealing ring, vibration film, upper flat plate, enlarger, piezoelectric stack, piezoelectric stack electrode, stent and lower tablet；Upper flat plate immediately below vibration film is processed buffering cavity by the present invention, and in the elastic ball of several rubber quality built in buffering cavity, so that vibration film vibration, which makes pump chamber that can bear bigger pressure when compressing, further expands volume, have the buffered-display driver power of bigger during increase, reduce the burden of larger driving voltage required during the big variable quantity of pump housing volume；Again since micro displacement magnifying mechanism is using two level symmetrical expression flexure hinge mechanism, there is the advantages of enlarger power is higher, elimination Longitudinal data error.
Description
Technical field
It is specifically a kind of to be based on two level symmetrical expression flexible hinge enlarger the present invention relates to miniature piezoelectric pump technical field
Piezoelectric stack Micropump.
Background technology
One of in recent years, become the focus of people's research using piezoelectric stack making piezoelectric pump.Piezoelectric stack pump, Ke Yi great
The raising output pressure of range, accurately controls output flow.Infusion, fuel feeding, the processing that it will be widely used in industrial automation
Cleaning in equipment, the delicate metering of scientific research, laboratory, chemical industry preparation etc., instrument, the heat extraction of instrument, cooling system, pen
Remember the products such as the cooling system and household electrical appliance of this computer and computer CPU.
It finds by prior art documents, what is write from Jilin University Liu Wei generals《Integrated piezoelectric oscillator
The designment and experiment of piezoelectric pump》（In the Master's thesis that in May, 2016 delivers）.It mentions in paper and shaking using double piezoelectricity
Micropump of the son as driving source.The shortcomings that this pump is that the displacement generated due to piezoelectric effect is smaller, and the pressure of pump chamber is not right greatly enough
The blood conveyance drive force of toughness is inadequate, influences the performance of Micropump.Application publication number is CN104832404A, entitled " one
The patent application of piezoelectric micropump of the kind based on PDMS ", discloses a kind of piezoelectric micropump based on PDMS, structure is shaken including piezoelectricity
Son 1, the PDMS pump housings 2, PMMA washers 3, valve block 4, the groove 5 on washer, valve block positioning side 6, water outlet 7 and water inlet 8, to pressure
Electric tachometer indicator 1 input driving pumping signal, piezoelectric vibrator can periodically up and down bending vibration, so as to cause cavity volume and pressure
Cyclically-varying, and then under the mating reaction of the periodical open and close of check valve 4, realize draining and water suction.It is although this
Structure can pump the liquid of certain special natures, but be the required driving in the big variable quantity of realization pump housing volume there are problem
Voltage is larger.
Invention content
Required driving voltage is larger during it is an object of the invention to be directed to the big variable quantity of pump housing volume in the prior art, pressure
The problem of deflection that electricity stacks is relatively small proposes a kind of piezoelectric stack based on two level symmetrical expression flexible hinge enlarger
Micropump, by the output displacement and output stress of piezoelectric stack driving element after on enlarger, enlarger one end
The displacement of output causes vibration film to move so that the variation of the volume generating period of pump chamber, so as to fulfill the pumping of liquid,
So that micro displacement magnifying mechanism effectively amplifies the vertical tremor displacement of film.
A kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger of the present invention, including unidirectional
Outlet valve, one-way inlet valve, valve deck, pump chamber, sealing ring, vibration film, upper flat plate, enlarger, piezoelectric stack, piezoelectric stack
Electrode, stent and lower tablet；The piezoelectric stack be embedded in the lower tablet central part, the piezoelectric stack upper end with it is described
End in contact under enlarger, the piezoelectric stack electrode are passed through external power supply；The stent respectively with the upper flat plate and described
Lower tablet connection, the stent and the center line of the upper flat plate and the lower tablet are on the same axis；The enlarger
It is symmetrical at the internal stent center, and pass through bottom end two corners and connect with the stent pin, the enlarger
With the center line of the piezoelectric stack on the same axis, the enlarger top is in contact with the vibration film；It is described
Vibration film is located at the joining place of the valve deck and the upper flat plate, is fixed in the card slot of the valve deck, the vibration film
The pump chamber is formed between upper end and the valve deck；The upper flat plate immediately below the vibration film processes buffering cavity,
And in the elastic ball of several rubber quality built in the buffering cavity；The sealing ring is embedded with inside the valve deck lower end, it is ensured that
The valve deck is completely embedded with the upper flat plate；The valve deck surrounding on the upper flat plate, which is uniformly distributed, to be set there are four screw
Nail is equipped with the unidirectional outlet valve and described unidirectional for the valve deck to be fixed on the upper flat plate, above the valve deck
Inlet valve, the unidirectional outlet valve and the one-way inlet valve are symmetrically distributed in the central axis both sides of the valve deck, using wheel
Formula valve arrangement, the unidirectional outlet valve and the one-way inlet valve can connect plastic tube.
Further, packed height of the elastic ball in the buffering cavity is more than the height 1- of the buffering cavity
2mm。
Further, the unidirectional outlet valve and the one-way inlet valve use wheeled valve as shut-off valve, the vibration
Film uses nano-silicon inorganic polymer overlay film.
Further, the thickness of the nano-silicon inorganic polymer overlay film is 7-9 μm, in the nano-silicon inorganic polymer
Vibration drilling processes φ 0.1mm apertures on overlay film.
Further, the piezoelectric stack by several metaniobate series piezoelectric ceramic piece electrical parallels or is connected in series with system
Into.
Further, the piezoelectric ceramic piece includes piezoceramics crystal diaphragm, the piezoceramics crystal diaphragm one side
Binding metal substrate, another side are equipped with the anti-corrosion layer of 1-2mm.
Further, the blank face of the metal substrate and edge are equipped with insulating layer.
Compared with prior art, advantages of the present invention and generation good effect are：
The present invention is using piezoelectric stack structure, and after piezoelectric stack is passed through alternating current, periodically variation promotes enlarger to cause
There is periodically variation in pump chamber, pumps liquid.
The present invention selects shut-off valve of the wheeled valve as Micropump, selects nano-silicon inorganic polymer overlay film thin as vibrating
Film, the movement of valve block is translation during unlatching, and has many advantages, such as that aperture is big, area of passage is big, reversed cutoff performance is good.
The present invention enables to the volume of pump chamber to generate larger flexible, the pressure of liquid flowing due to use enlarger
When big, each there is any discrepancy mouth, can improve efficiency with simultaneous pumping liquid on the pump housing.
For the present invention using piezoelectric stack as driving source, piezoelectric stack makes the flexible hinge enlarger top based on lever principle
Larger displacement is generated, the variation of pump chamber is caused to promote the opening and closing of unidirectional stop valve.
Upper flat plate immediately below vibration film is processed buffering cavity by the present invention, and if in dry rubber substance built in buffering cavity
The elastic ball of quality so that vibration film vibration makes pump chamber that can bear bigger pressure when compressing further to expand volume, increases
Have the buffered-display driver power of bigger when big, reduce the burden of larger driving voltage required during the big variable quantity of pump housing volume.
The micro displacement magnifying mechanism of the present invention is using two level symmetrical expression flexure hinge mechanism, and during work, lower end generates displacement
Twice of displacement is generated by first order flexible amplification mechanism first, then will be after twice of first order displacement equations by second level enlarger
Vibration film is transmitted to, there is the advantages of enlarger power is higher, and amplification factor is 4 times, elimination Longitudinal data error.
Description of the drawings
Fig. 1 is the overall structure sectional view of the present invention；
Fig. 2 is the vertical view of unidirectional outlet valve of the present invention and one-way inlet valve；
Mark meaning is as follows in Fig. 1-2：1- unidirectional outlet valves, 2- one-way inlet valves, 3- valve decks, 4- pump chambers, 5- sealing rings, 6- shake
Dynamic film, 7- upper flat plates, 8- enlargers, 9- piezoelectric stacks, 10- piezoelectric stack electrodes, 11- stents, tablet under 12-, 13- delay
Rush cavity, 14- elastic balls.
Specific embodiment
Embodiments of the present invention are illustrated by specific specific example below in conjunction with the accompanying drawings, those skilled in the art can be by
Content disclosed by this specification knows other advantages and effect of the present invention easily.The present invention can also be by addition different
Specific embodiment be embodied or practiced, the various details in this specification may be based on different viewpoints with application, do not having
Have and carry out various modifications or alterations under the spirit of the present invention.
A kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger, as shown in Figs. 1-2, including unidirectional
Outlet valve 1, one-way inlet valve 2, valve deck 3, pump chamber 4, sealing ring 5, vibration film 6, upper flat plate 7, enlarger 8, piezoelectric stack
9th, piezoelectric stack electrode 10, stent 11 and lower tablet 12；The piezoelectric stack 9 is made of ceramic materials, and the piezoelectric stack 9 is embedding
In the central part of the lower tablet 12,9 upper end of piezoelectric stack and described 8 times end in contact of enlarger, the piezo stack
Heap electrode 10 is passed through external power supply；The stent 11 is connect respectively with the upper flat plate 7 and the lower tablet 12, the stent 11
With the center line of the upper flat plate 7 and the lower tablet 12 on the same axis；The enlarger 8 is located in the stent 11
It is symmetrical at portion center, and pass through bottom end two corners and connect with 11 pin of stent, the enlarger 8 and the piezo stack
On the same axis, 8 top of enlarger is in contact the center line of heap 9 with the vibration film 6；The vibration film 6
It positioned at the valve deck 3 and the joining place of the upper flat plate 7, is fixed in the card slot of the valve deck 3,6 upper end of vibration film
The pump chamber 4 is formed between the valve deck 3；The upper flat plate 7 immediately below the vibration film 6 processes buffering cavity
13, and it is described buffering cavity 13 built in several rubber quality elastic ball 14, further, the elastic ball 14 is in the buffering
Packed height in cavity 13 is more than the height 1-2mm of the buffering cavity 13 so that the vibration of vibration film 6 makes the pump
13 volume of chamber can bear bigger pressure when compressing and further expand volume, and when increase has the buffered-display driver power of bigger, reduces institute
State the burden of larger driving voltage required during the big variable quantity of 13 body volume of pump chamber；Embedded with described close inside 3 lower end of valve deck
Seal 5, it is ensured that the valve deck 3 is completely embedded with the upper flat plate 7；3 surrounding of the valve deck on the upper flat plate 7 is uniformly distributed
If there are four screw, for the valve deck 3 to be fixed on the upper flat plate 7, the valve deck 3 unidirectionally goes out above equipped with described
Mouth valve 1 and the one-way inlet valve 2, the unidirectional outlet valve 1 and the one-way inlet valve 2 are symmetrically distributed in the valve deck 3
Central axis both sides, using wheeled construction, the unidirectional outlet valve 1 and the one-way inlet valve 2 can connect plastic tube；It is described
Unidirectional outlet valve 1 and the one-way inlet valve 2 using wheeled valve as shut-off valve, the use nano-silicon of vibration film 6 without
Machine polymer overlay film, the thickness of the nano-silicon inorganic polymer overlay film is 7-9 μm, in the nano-silicon inorganic polymer overlay film
Upper vibration drilling processes φ 0.1mm apertures；The piezoelectric stack by several metaniobate series piezoelectric ceramic piece electrical parallels or
Person, which is connected in series with, to be made, and the piezoelectric ceramic piece includes piezoceramics crystal diaphragm, and the piezoceramics crystal diaphragm one side is viscous
Metal substrate is tied, another side is equipped with the anti-corrosion layer of 1-2mm, and the blank face and edge of the metal substrate are equipped with insulating layer.
The operation principle of the present invention is as follows：Piezoelectric stack 9 by several metaniobate series piezoelectric ceramic piece electrical parallels or
It is connected in series with and is made, it is advantageous to environmental protection without toxic lead；Piezoelectric ceramics has inverse piezoelectric effect, after being passed through electric field, pressure
Electricity, which stacks, can periodically extend shortening, the elongation of enlarger be pushed to shorten, connected vibration film is also on
Lower vibration, causes the variation of pump chamber, and then makes pump chamber is inside and outside to generate pressure differential, fluid then constantly inflow and outflow.
The present invention is single-chamber body piezoelectric pump, as starting point when making 4 volume of pump chamber be compressed to minimum the vibration of vibration film 6,
Its course of work can be divided into following two stages：
1. input phase：As starting point when the vibration of vibration film 6 makes 4 volume of pump chamber be compressed to minimum, when 4 volume of pump chamber gradually
After increase, pressure reduces in pump chamber 4, and since external atmosphere pressure is more than the air pressure in pump chamber 4, one-way inlet valve 2 is opened, unidirectionally gone out
Mouth valve 1 is closed, and liquid then flows into pump chamber 4.
2. export the stage：When the vibration of vibration film 6 makes 4 volume of pump chamber further increase, 4 internal volume of pump chamber increases to most
Greatly starting point, vibration film 6 start to move upwards, and 4 volume of pump chamber is then gradually reduced, and the pressure increase in pump chamber 4 forces unidirectional
Outlet valve 1 is opened, and one-way inlet valve 2 is closed, and liquid then gradually flows out pump chamber 4.
The course of work in two above stage forms a work period of piezoelectric stack Micropump of the present invention, realizes certain
The input and output of the fluid of amount are so formed the work of the continuous pump liquid of piezoelectric stack Micropump of the present invention in cycles.
Above-described embodiment is only the more excellent embodiment of the present invention, and every technical spirit according to the present invention to implementing above
Any simple modification, modification and the alternate variation that example is made, belong in the range of technical solution of the present invention.
Claims (7)
1. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger, it is characterised in that：Including unidirectionally going out
Mouth valve（1）, one-way inlet valve（2）, valve deck（3）, pump chamber（4）, sealing ring（5）, vibration film（6）, upper flat plate（7）, enlarger
Structure（8）, piezoelectric stack（9）, piezoelectric stack electrode（10）, stent（11）With lower tablet（12）；The piezoelectric stack（9）Embedded in institute
State lower tablet（12）Central part, the piezoelectric stack（9）Upper end and the enlarger（8）Lower end in contact, the piezoelectricity
Stack electrode（10）It is passed through external power supply；The stent（11）Respectively with the upper flat plate（7）With the lower tablet（12）Connection,
The stent（11）With the upper flat plate（7）With the lower tablet（12）Center line on the same axis；The enlarger
（8）Positioned at the stent（11）It is symmetrical inside center, and pass through bottom end two corners and the stent（11）Pin connects, institute
State enlarger（8）With the piezoelectric stack（9）Center line on the same axis, the enlarger（8）Top with it is described
Vibration film（6）It is in contact；The vibration film（6）Positioned at the valve deck（3）With the upper flat plate（7）Joining place, it is fixed
In the valve deck（3）Card slot in, the vibration film（6）Upper end and the valve deck（3）Between form the pump chamber（4）；Institute
State vibration film（6）The upper flat plate of underface（7）Process buffering cavity（13）, and in the buffering cavity（13）It is built-in
The elastic ball of several rubber quality（14）；The valve deck（3）The sealing ring is embedded with inside lower end（5）, the upper flat plate（7）On
The valve deck（3）Surrounding, which is uniformly distributed, to be set there are four screw, the valve deck（3）It is equipped with the unidirectional outlet valve above（1）
With the one-way inlet valve（2）, the unidirectional outlet valve（1）With the one-way inlet valve（2）It is symmetrically distributed in the valve deck（3）
Central axis both sides, using wheeled construction.
2. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger according to claim 1,
It is characterized in that：The elastic ball（14）In the buffering cavity（13）Interior packed height is more than the buffering cavity（13）Height
Spend 1-2mm.
3. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger according to claim 1,
It is characterized in that：The unidirectional outlet valve（1）With the one-way inlet valve（2）Using wheeled valve as shut-off valve, the vibration
Film（6）Using nano-silicon inorganic polymer overlay film.
4. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger according to claim 1,
It is characterized in that：The piezoelectric stack（9）It is made of several metaniobate series piezoelectric ceramic piece electrical parallels or be connected in series with.
5. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger according to claim 3,
It is characterized in that：The thickness of the nano-silicon inorganic polymer overlay film is 7-9 μm, is shaken on the nano-silicon inorganic polymer overlay film
Dynamic drilling processes φ 0.1mm apertures.
6. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger according to claim 4,
It is characterized in that：The piezoelectric ceramic piece includes piezoceramics crystal diaphragm, the one face binding metal of piezoceramics crystal diaphragm
Substrate, another side are equipped with the anti-corrosion layer of 1-2mm.
7. a kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger according to claim 6,
It is characterized in that：The blank face and edge of the metal substrate are equipped with insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810196210.0A CN108180135B (en) | 2018-03-09 | 2018-03-09 | Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810196210.0A CN108180135B (en) | 2018-03-09 | 2018-03-09 | Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108180135A true CN108180135A (en) | 2018-06-19 |
| CN108180135B CN108180135B (en) | 2023-09-26 |
Family
ID=62553422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810196210.0A Active CN108180135B (en) | 2018-03-09 | 2018-03-09 | Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism |
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| Country | Link |
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| CN (1) | CN108180135B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110762271A (en) * | 2018-07-26 | 2020-02-07 | 长春隆美科技发展有限公司 | Piezoelectric stack driving type normally closed microfluidic valve |
| CN113123946A (en) * | 2021-04-26 | 2021-07-16 | 长春工业大学 | A have valve resonance piezoelectric pump for agricultural sprinkling irrigation |
| CN113137363A (en) * | 2021-04-26 | 2021-07-20 | 长春工业大学 | Valveless double-cavity resonance piezoelectric drive type insulin pump |
| CN113565742A (en) * | 2020-12-07 | 2021-10-29 | 长春工业大学 | Magnetic spring piezoelectric stack resonance pump |
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| EP1331538A1 (en) * | 2002-01-26 | 2003-07-30 | Eppendorf Ag | Piezo-electrically controlled micro actuator for fluids |
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| CN113565742A (en) * | 2020-12-07 | 2021-10-29 | 长春工业大学 | Magnetic spring piezoelectric stack resonance pump |
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| CN113137363B (en) * | 2021-04-26 | 2022-03-29 | 长春工业大学 | Valveless double-cavity resonance piezoelectric drive type insulin pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108180135B (en) | 2023-09-26 |
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