CN103939317A - Micropump based on ultra-magnetostriction thin film actuator - Google Patents
Micropump based on ultra-magnetostriction thin film actuator Download PDFInfo
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- CN103939317A CN103939317A CN201410129813.0A CN201410129813A CN103939317A CN 103939317 A CN103939317 A CN 103939317A CN 201410129813 A CN201410129813 A CN 201410129813A CN 103939317 A CN103939317 A CN 103939317A
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Abstract
The invention discloses a micropump based on an ultra-magnetostriction thin film actuator. The micropump comprises a pump body and a base sheet dividing the pump body into an upper pump body and a lower pump body, the lower pump body is provided with a liquid inlet and a liquid outlet, a valve cavity is formed in the lower pump body, and a planar spiral coil is arranged on the upper surface of the upper pump body and electrically connected with an external power source; a liquid cavity is formed by the base sheet and the lower pump body and communicated with the liquid inlet and the valve cavity, the valve cavity is communicated with the liquid outlet, the connecting position of the liquid cavity and the liquid inlet is provided with a one-way liquid inlet film, and the connecting position of the liquid cavity and the valve cavity is provided with a one-way liquid outlet film; the base sheet is provided with a joule magnetostrictive effect thin film on the upper surface and provided with a reverse magnetostrictive effect thin film on the lower surface. The micropump is made of ultra-magnetostriction materials and therefore has the advantages of being high in response speed, high in frequency response and the like; the micropump is driven by a magnetic field provided by the planar coil, small in size and simple in structure, working performance of the micropump is improved substantially, the micropump is driven by the planar spiral coil, so that the structure of the micropump is simplified, and the size of the micropump is reduced.
Description
Technical field
The present invention relates to a kind of micropump, be specifically related to a kind of Micropump based on giant magnetostrictive thin film driver.
Background technique
Along with the maturation of MEMS technology, the fabricating cost of microminiaturized device reduces gradually, and can be on same chip the components and parts of integrated several functions, thereby make microminiaturized device more and more be subject to user's welcome.Microfluidic device is widely used in the research fields such as analytical chemistry, medical diagnosis, medicament slow release, genomics, proteomics, has the advantages such as reagent dosage is few, pollutant emission is low, chemical reaction velocity is fast, accurately control reaction, portability.From 2005 to 2011, the market in microfluid field was worth the speed increment with annual 16%, ends 2011, and the market value of whole microfluidic device has reached 5,000,000,000 Euros.Microfluid system is a branch of MEMS (MEMS), the experiment that it is widely used in biochemistry aspect and food and drink detects, as micro-dispensing, micro-injection, micro-total analysis system (MicrioTotalAnalysisSystem, μ-TAS), chip lab (LabOnaChip) and pcr chip (PolymeraseChainReaction).Micropump, micro-valve and microflow sensor are the vitals that forms microfluid system, and Micropump and micro-valve are crucial power units, and microflow sensor is detector.Micropump is as the important component part of microfluidic device, and its effect is the quantitative transmission that realizes fluid, thereby makes to realize the functions such as the flowing of sample, mixing, separation, analyzing and testing on same chip.Along with the fast development in microfluidic device field, Micropump will occupy huge market value.
In microfluid system, Micropump is the part of core the most as final controlling element.Film type Micropump is as a kind of displacement pump in Micropump classification, and its working principle is to drive the volume of pump cavity to change by the bending deflection of film, thereby causes the difference of cavity external and internal pressure, and then completes suction and the conveying of liquid.Because its flow control is accurate, feature simple in structure, Micropump detects at genescreen, Pharmaceutical Analysis and conveying, body fluid, the field such as temperature control, Gas Molecular Density detection of integrated chip shows very broad application prospect.The research of Micropump starts from Wallmark and the Smit of the Stanford university early 1980s.Subsequently, people have launched a large amount of research work around Micropump.According to its structure, Micropump can be divided into mechanical type Micropump and the on-mechanical pump that declines, mechanical type Micropump transmits, controls fluid by movable part, but not mechanical type Micropump is to rely on physical-chemical reaction that power source is provided.In mechanical type Micropump, main research is reciprocal diaphragm type (vibration membrane type) Micropump, and it is to rely on driver to make diaphragm deformation, causes that pump chamber internal pressure changes, thereby carries directed fluid.By driving principle, diaphragm Micropump mainly contains driving type piezoelectric actuator, static drive-type, electromagnetic drive type, hot drive-type, marmem drive-type and film type super magnetostriction material drive-type etc.Driving type piezoelectric actuator Micropump driving voltage higher, difficult larger with the noise of IC circuit compatibility and piezoelectric pump.The volume stroke of static drive-type Micropump is smaller, and driving voltage is higher, is unfavorable for application.And hot drive-type Micropump is because heat is cooling slow, driver frequency is low cause its output flow and pressure smaller, power consumption is also larger simultaneously.The driver frequency that marmem drives is too low, and the flow of output is also smaller simultaneously.And the volume of above various drive-type Micropumps is all larger comparatively speaking, should not be with integrated.
In Chinese Patent Application No.: 201210536492, in open day 2013.4.3, a kind of piezoelectric micropump based on synthesizing jet-flow is disclosed, comprise pump inlet, pump discharge, upper pump casing, upper cavity, spout, lower pump body, lower chamber, vibrating diaphragm and piezoelectric actuator, pump inlet and pump discharge are positioned at the top of pump, upper pump casing bottom is upper cavity, pump inlet and pump discharge are connected with spout by upper cavity, lower pump body is positioned at the below of upper cavity, spout is by upper, lower chamber is communicated with, vibrating diaphragm is bonded in lower pump body lower surface, piezoelectric actuator is bonded in vibrating diaphragm lower surface central authorities by Bond (conductive epoxy resin).This technological scheme driving voltage is higher, and noise difficult and IC circuit compatibility and piezoelectric pump is larger and volume is larger.
In Chinese Patent Application No.: 201310597265, in open day 2014.2.12, disclose a kind of size less, can with the magneto fluid mechanics Micropump of portable integrated chip.This magneto fluid mechanics Micropump, comprise substrate, the lower surface of described substrate is provided with plane electromagnetic iron, the upper surface of described substrate is provided with matrix, the liquid storage tank that is etched with micro passage on described matrix and is communicated with micro passage, is provided with electrode in the both sides of micro passage, and described electrode sputters at the upper surface of matrix, also comprise for by the encapsulated layer of micro passage sealing, on described encapsulated layer, be provided with spout and electrode access hole.This technological scheme electromagnet directly contacts with substrate, has impact when work, produces noise and volume larger.
Summary of the invention
For the problems referred to above, the invention provides a kind of Micropump based on giant magnetostrictive thin film driver that improves micro-pump performance characteristic, simplifies its structure.
In order to address the above problem, technological scheme provided by the invention is:
A kind of Micropump based on giant magnetostrictive thin film driver, comprise the pump housing, this pump housing be divided into the substrate of the upper and lower pump housing, described lower pump body is provided with liquid entering hole, liquid outlet, in described lower pump body, be provided with valve chamber, the upper surface of described upper pump casing is provided with planar spiral winding, and this planar spiral winding is electrically connected with external power supply; Described substrate and described lower pump body form liquid container, this liquid container is communicated with described liquid entering hole, valve chamber, described valve chamber is communicated with described liquid outlet, the joint of described liquid container and described liquid entering hole is provided with unidirectional feed liquor film, described liquid container and described valve chamber joint be provided with unidirectional go out liquid film; The upper surface of described substrate is provided with direct magnetostriction effect film, and lower surface is provided with counter magnetostriction effect film.Pass into the Ac of certain frequency at planar spiral winding, planar spiral winding produces corresponding alternating magnetic field under the effect of electric current.Forward and inverse Magnetostrictive effect film deforms under the effect of externally-applied magnetic field, in the time that electric current increases, magnetic field is along with electric current increases and increases, have counter magnetostriction effect film shortens under additional magnetic fields, have direct magnetostriction effect film extends under additional magnetic fields, thereby drive substrate to be bent downwardly, compressed liquid chamber, the pressure of liquid container is increased, promote unidirectional go out liquid film one end open, produce certain gap, liquid flows into valve chamber, then provides micro fluid through liquid outlet to system.Unidirectional feed liquor film is close to input duct under the elastic acting force of self material and fluid pressure effect, stops liquid to flow out from influent stream pipeline, realizes the discharge opeing process of Micropump.In the time passing into the electric current of planar spiral winding and be reduced to zero from peak value, magnetic field reduces along with reducing of electric current, counter magnetostriction effect film and direct magnetostriction effect film recover former length gradually, thereby drive substrate to return to origin-location, the volume of liquid container increases, pressure reduces, one end that liquid is pushed unidirectional feed liquor film open under atmospheric effect enters liquid container, unidirectional go out liquid film under the active force of self elastic properties of materials, be close to fluid pipeline and stop liquid to flow out, thereby realize the oil-absorbing process of Micropump.
Preferably, described forward and inverse Magnetostrictive effect film all has 2, is distributed in described substrate two ends.
Preferably, one end of described unidirectional feed liquor film is bonded on described liquid container inwall and forms cantilever beam structure, described unidirectional go out liquid film one end be bonded on described valve chamber inwall and form cantilever beam structure.
Preferably, on described planar spiral winding, be coated with insulating protective layer; Planar spiral winding is protected.
Preferably, described planar spiral winding adopts photoetching or etching process to make.
Preferably, the material of described direct magnetostriction effect film is TbDyFe alloy, and the material of described counter magnetostriction effect film is SmFe alloy.
Preferably, described substrate is made up of silicon sheet; Silicon sheet has larger tension force.
Preferably, described unidirectionally made by rubber, plastic cement or silicon thin film into and out of liquid film; There is enough elasticity, toughness, corrosion-resistant.
Compared with prior art, beneficial effect of the present invention is:
1, the present invention adopts super magnetostriction material, has fast response time, frequency response high; And the field drives being provided by planar coil, volume is little, simple in structure, therefore can significantly improve the service behaviour of Micropump.
2, the present invention adopts planar spiral winding to drive, and has simplified micro-pump structure, has reduced the volume of Micropump, is convenient to realize and the micro-fluid chip system intergration.
3, the present invention is that field drives is contactless, and without impacting, noise is low.
Brief description of the drawings
Structural representation when Fig. 1 is the non-driving of Micropump of the present invention;
Fig. 2 is Micropump stereochemical structure decomposing schematic representation of the present invention.
In figure: 1, feed liquor rubber tube, 2, liquid entering hole, 3, unidirectional feed liquor film; 4, substrate, 5, upper pump casing, 6, insulating protective layer; 7, planar spiral winding, 8, counter magnetostriction effect film, 9, direct magnetostriction effect film; 10, liquid container, 11, unidirectional go out liquid film, 12, valve chamber; 13, liquid outlet, 14, fluid rubber tube, 15, lower pump body; 16 coil electrodes are to lead-in wire, 17, air cavity.
Embodiment
The present invention will be further described below:
In conjunction with Fig. 1, Fig. 2, a kind of Micropump based on giant magnetostrictive thin film driver, comprise the pump housing, this pump housing be divided into the substrate 4 of the upper and lower pump housing, lower pump body 15 is provided with liquid entering hole 2, liquid outlet 13, is provided with valve chamber 12 in lower pump body 15, and the upper surface of upper pump casing 5 is provided with planar spiral winding 7, the upper surface of substrate 4 is provided with direct magnetostriction effect film 9, lower surface is provided with counter magnetostriction effect film 8, and forward and inverse Magnetostrictive effect film all has 2, is distributed in substrate 4 two ends; Liquid entering hole 2 is provided with feed liquor rubber tube 1, and liquid outlet 13 is provided with fluid rubber tube 14.
Substrate 4 and lower pump body 15 form liquid container 10, and substrate 4 forms enclosed space with lower pump body 15, liquid container 10, under the tension force effect of substrate 4, open and close with runner interruption-forming, and substrate 4 forms air cavity 17 with upper pump casing 5; Liquid container 10 is communicated with liquid entering hole 2, valve chamber 12, and valve chamber 12 is communicated with liquid outlet 13, and liquid container 10 is provided with unidirectional feed liquor film 3 with the joint of liquid entering hole 2, liquid container 10 and valve chamber 12 joints be provided with unidirectional go out liquid film 11; One end of unidirectional feed liquor film 3 is bonded on liquid container 10 inwalls and forms cantilever beam structure, unidirectional go out liquid film 11 be bonded on valve chamber 12 inwalls and form cantilever beam structure by one end.
On planar spiral winding 7, be coated with insulating protective layer 6, planar spiral winding 7 is protected; And expose coil electrode and be electrically connected with external power supply 16.
Planar spiral winding 7 adopts photoetching or etching process to make.
The material of direct magnetostriction effect film 9 is TbDyFe alloy, and the material of counter magnetostriction effect film 8 is SmFe alloy.
Substrate 4 is made up of silicon sheet; Silicon sheet has larger tension force.
Unidirectionally made by rubber, plastic cement or silicon thin film into and out of liquid film; There is enough elasticity, toughness, corrosion-resistant.
Pass into the Ac of certain frequency at planar spiral winding 7, planar spiral winding 7 produces corresponding alternating magnetic field under the effect of electric current.Forward and inverse Magnetostrictive effect film deforms under the effect of externally-applied magnetic field, in the time that electric current increases, magnetic field is along with electric current increases and increases, counter magnetostriction effect film 8 shortens under additional magnetic fields, direct magnetostriction effect film 9 extends under additional magnetic fields, thereby drive substrate 4 to be bent downwardly, compressed liquid chamber 10, the pressure of liquid container 10 is increased, promote unidirectional go out liquid film 11 one end open, produce certain gap, liquid flows into valve chamber 12, then provides micro fluid through liquid outlet 13 to system.Unidirectional feed liquor film 3 is close to input duct under the elastic acting force of self material and fluid pressure effect, stops liquid to flow out from influent stream pipeline, realizes the discharge opeing process of Micropump.In the time passing into the electric current of planar spiral winding 7 and be reduced to zero from peak value, magnetic field reduces along with reducing of electric current, counter magnetostriction effect film 8 and direct magnetostriction effect film 9 recover former length gradually, thereby drive substrate 4 to return to origin-location, the volume of liquid container 10 increases, pressure reduces, one end that liquid is pushed unidirectional feed liquor film 3 open under atmospheric effect enters liquid container 19, unidirectional go out liquid film 11 under the active force of self elastic properties of materials, be close to fluid pipeline and stop liquid to flow out, thereby realize the oil-absorbing process of Micropump.The size of Micropump flow also can be by the size and the FREQUENCY CONTROL that pass into planar spiral winding 7 electric currents, and the low-intensity magnetic field that the planar coil drive-type Micropump based on giant magnetostrictive thin film driver is applicable to low pressure, high-frequency drive drives occasion.
More than show and described basic principle of the present invention, major character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that in above-described embodiment and specification, describes just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (8)
1. the Micropump based on giant magnetostrictive thin film driver, it is characterized in that: comprise the pump housing, this pump housing be divided into the substrate of the upper and lower pump housing, described lower pump body is provided with liquid entering hole, liquid outlet, in described lower pump body, be provided with valve chamber, the upper surface of described upper pump casing is provided with planar spiral winding, and this planar spiral winding is electrically connected with external power supply; Described substrate and described lower pump body form liquid container, this liquid container is communicated with described liquid entering hole, valve chamber, described valve chamber is communicated with described liquid outlet, the joint of described liquid container and described liquid entering hole is provided with unidirectional feed liquor film, described liquid container and described valve chamber joint be provided with unidirectional go out liquid film; The upper surface of described substrate is provided with direct magnetostriction effect film, and lower surface is provided with counter magnetostriction effect film.
2. the Micropump based on giant magnetostrictive thin film driver according to claim 1, is characterized in that: described forward and inverse Magnetostrictive effect film all has 2, is distributed in described substrate two ends.
3. the Micropump based on giant magnetostrictive thin film driver according to claim 1, it is characterized in that: one end of described unidirectional feed liquor film is bonded on described liquid container inwall and forms cantilever beam structure, described unidirectional go out one end of liquid film be bonded on described valve chamber inwall and form cantilever beam structure.
4. the Micropump based on giant magnetostrictive thin film driver according to claim 1, is characterized in that: on described planar spiral winding, be coated with insulating protective layer.
5. the Micropump based on giant magnetostrictive thin film driver according to claim 1, is characterized in that: described planar spiral winding adopts photoetching or etching process to make.
6. the Micropump based on giant magnetostrictive thin film driver according to claim 1, is characterized in that: the material of described direct magnetostriction effect film is TbDyFe alloy, and the material of described counter magnetostriction effect film is SmFe alloy.
7. the Micropump based on giant magnetostrictive thin film driver according to claim 1, is characterized in that: described substrate is made up of silicon sheet.
8. the Micropump based on giant magnetostrictive thin film driver according to claim 1, is characterized in that: described be unidirectionally made up of rubber, plastic cement or silicon thin film into and out of liquid film.
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Cited By (9)
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| CN104156020A (en) * | 2014-07-16 | 2014-11-19 | 北京控制工程研究所 | Micro-flow accuracy control device |
| CN104358674A (en) * | 2014-10-24 | 2015-02-18 | 安徽理工大学 | Biplane oil driven micropump based on giant magnetostrictive film driver |
| CN104612942A (en) * | 2015-01-19 | 2015-05-13 | 南昌工程学院 | Miniature flow pump based on rare earth super-magnetostrictive material |
| CN108102877A (en) * | 2018-01-12 | 2018-06-01 | 哈尔滨工业大学深圳研究生院 | A kind of integrated unicellular capture and the micro-fluidic chip and screening technique of screening function |
| CN108953123A (en) * | 2018-07-06 | 2018-12-07 | 西安交通大学 | A kind of micro-pump structure based on PVC-gel flexible drive |
| CN109540234A (en) * | 2019-01-15 | 2019-03-29 | 河北大学 | Novel gas-liquid two-phase annular flow liquid film mass flow meter and method |
| CN112588221A (en) * | 2020-12-22 | 2021-04-02 | 哈尔滨工业大学 | Modular micro-fluidic reaction system of diaphragm drive |
| CN113352758A (en) * | 2021-05-28 | 2021-09-07 | 杭州电子科技大学 | High-speed printer ink-jet head based on magnetostrictive effect and preparation method thereof |
| CN114728281A (en) * | 2019-10-18 | 2022-07-08 | 瞬知（广州）健康科技有限公司 | System and method for infusing fluid |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109540234B (en) * | 2019-01-15 | 2023-10-27 | 河北大学 | Novel gas-liquid two-phase annular flow liquid film mass flow measuring device and method |
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| CN114728281A (en) * | 2019-10-18 | 2022-07-08 | 瞬知（广州）健康科技有限公司 | System and method for infusing fluid |
| CN114728281B (en) * | 2019-10-18 | 2023-11-03 | 瞬知（广州）健康科技有限公司 | System and method for infusing fluid |
| US11976646B2 (en) | 2019-10-18 | 2024-05-07 | Healtell (Guangzhou) Medical Technology Co., Ltd | Microfluidic chip pumps and methods thereof |
| CN112588221B (en) * | 2020-12-22 | 2022-03-01 | 哈尔滨工业大学 | Modular micro-fluidic reaction system of diaphragm drive |
| CN112588221A (en) * | 2020-12-22 | 2021-04-02 | 哈尔滨工业大学 | Modular micro-fluidic reaction system of diaphragm drive |
| CN113352758A (en) * | 2021-05-28 | 2021-09-07 | 杭州电子科技大学 | High-speed printer ink-jet head based on magnetostrictive effect and preparation method thereof |
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