CN109185107B - A kind of the liquid metal driving control system and control method of integrated Micropump micro-valve - Google Patents
A kind of the liquid metal driving control system and control method of integrated Micropump micro-valve Download PDFInfo
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- CN109185107B CN109185107B CN201811301553.5A CN201811301553A CN109185107B CN 109185107 B CN109185107 B CN 109185107B CN 201811301553 A CN201811301553 A CN 201811301553A CN 109185107 B CN109185107 B CN 109185107B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
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- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Micromachines (AREA)
Abstract
The present invention relates to a kind of liquid metal driving control systems of integrated Micropump micro-valve, belong to liquid metal drive system technical field, in driving method to solve existing liquid metal, pressure-driven is difficult to realize volume miniaturization, liquid metal flows line size is larger in electromagnetic pump driving and the technical problems such as electricity blocking effect for cannot achieve liquid metal.The liquid metal driving control system includes liquid metal liquid storage tank, flexible microfluidic road, integrated Micropump and integrated micro-valve；Liquid metal liquid storage tank is successively connected to integrated Micropump, integrated micro-valve by flexible microfluidic road；Integrated Micropump is for driving liquid metal to flow in flexible microfluidic road；Integrated micro-valve is used to control electricity conducting and blocking of the liquid metal in flexible microfluidic road；The width and height in flexible microfluidic road are μm-mm grades.The system is separated for realizing high-precision flow driving control of the liquid metal in micro-channel structure with electrophysics, and then realizes the dynamic restructuring to microstructure form.
Description
Technical field
The present invention relates to liquid metal Drive Control Technique field more particularly to a kind of liquid metals of integrated Micropump micro-valve
Driving control system and control method.
Background technique
Recently as continually developing for liquid metal performance, it is molten to can be realized Different hypothermia using different material mixture ratios
Point, and integrated using the large deformation of liquid metal and mobility with micro-structure, realize the liquid gold in microchannel structure
The microfluidic of category becomes the uncharted field of a great development prospect.Liquid metal combines conventional rigid and flexible material
Excellent performance, there are mainly five types of the metals that fusing point is near or below room temperature at present: francium, rubidium, caesium, mercury and gallium.Wherein, francium has spoke
Penetrating property, caesium and rubidium after contacting with the air can vigorous reaction, mercury have toxicity and its surface tension it is big, be not easy to be patterned
Molding, these four materials are not suitable for preparing flexible electronic device, but gallium and its alloy are suitable for preparing various devices, main
It benefits from the fact that 1) fusing point is very low, is at room temperature liquid；2) viscosity is low, convenient in injection fluid channel；3) conductivity is higher,
Although lower than the conductivity of copper, it is significantly larger than other conducting liquids etc.；4) it is not easy to evaporate, performance is stablized, and when operation will not
Suck gas molecule；5) liquid metal does not have to heating fusing before injection, is easy to and organic, biomaterial is compatible；And it is infusing
Liquid is remained during entering, and without cooling procedure after the completion of injection, it is time-consuming to reduce technique.
While liquid metal has holding satisfactory electrical conductivity, there is mobility, large deformation and reconfigurability at normal temperature,
Therefore, the fields such as flexible electronic, flexible sensing and RF reconfigurable antenna be can be widely applied for, especially in RF reconfigurable
In the application of the dynamic restructurings structure such as antenna, need accurate control flow behavior of the drive control liquid metal in flow passage structure,
It is connected with the electricity of liquid metal liquid storage tank and physical blocking characteristic.By liquid metal can any mobility, especially
Liquid metal is subjected to microfluidization, the microfluidic control in radio-frequency antenna micro-channel structure is can be realized, is applied to
In the reconstruct of RF antenna structures parameter and structural form, have to the regulation of conventional RF antenna structure and antenna performance (frequency
Rate, polarization mode, directional diagram) re-configurability.
Currently, liquid metal drive control in micro-channel structure with conventional solenoid pump, pressure, voltage drive control is
Main, but the current volume of electromagnetic pump is larger, being generally used for liquid metal runner is in grade-Centimeter Level channel design, and
It cannot achieve the electricity blocking effect of flow passage structure liquid metal；Pressure-driven control mode needs the external biggish driving of volume
Pump, it is difficult to realize that volume minimizes, it can not be integrated with flow passage structure；Voltage drive control method is in dynamic restructuring liquid
Since voltage is applied directly in liquid metal and oxide layer removal solution in metal process, liquid metal electric property is influenced,
And the surface tension of liquid metal is big, it is difficult to be applied in the longer flow passage structure of length.
Summary of the invention
In view of above-mentioned analysis, the embodiment of the present invention is intended to provide a kind of liquid metal drive control of integrated Micropump micro-valve
System and control method, in the driving method to solve existing liquid, pressure-driven is difficult to realize volume miniaturization, electromagnetic pump
Liquid metal flows line size is larger in driving and the technical issues of cannot achieve the electricity blocking effect of liquid metal.
The present invention provides a kind of liquid metal driving control systems of integrated Micropump micro-valve, including liquid metal liquid storage
Pond, flexible microfluidic road, integrated Micropump and integrated micro-valve；Liquid metal liquid storage tank by flexible microfluidic road successively with integrate it is micro-
Pump, integrated micro-valve connection；Integrated Micropump is for driving liquid metal to flow in flexible microfluidic road；Integrated micro-valve is for controlling liquid
Electricity conducting and blocking of the state metal in flexible microfluidic road；The width and height in flexible microfluidic road are μm-mm grades.
Further, integrated Micropump includes Micropump and Micropump channel, and the driving method of Micropump is pressure-driven, magnetic drive
Or one of Piezoelectric Driving.
Further, Micropump is magnetic drive Micropump, and magnetic drive Micropump includes motor, magnet and steel ball；Magnet is set to
It rotates on motor and driven by the motor, steel ball is with magnet rotors and squeezes Micropump channel and makes its creeping deformation, and then pushes away
Liquid metal flows in dynamic flexible microfluidic road.
Further, integrated micro-valve is integrated by micro-valve driving structure, micro-valve door and micro-valve channel integral, integrates micro-
Valve is used for the physical isolation and electric isolation of micro-valve channel two sides liquid metal.
Further, micro-valve driving structure is driven using voltage, passes through control using the micro-valve driving structure that voltage drives
The reciprocating motion of micro-valve door squeezes liquid metal and realizes electricity conducting and physical blocking.
Further, micro-valve door and micro-valve channel are all made of insulation resistant material.
Further, Micropump channel and micro-valve channel are wherein one section of flexible microfluidic road, and by runner substrate with
Cover plate for sealing forms.
Further, the material of substrate is dimethyl silicone polymer (PDMS), polymethyl methacrylate or silica gel.
Further, the material of cover board is dimethyl silicone polymer (PDMS), polymethyl methacrylate or silica gel.
The present invention also provides a kind of liquid metal drive control method of integrated Micropump micro-valve, using it is above-mentioned integrate it is micro-
Pump the liquid metal driving control system of micro-valve, comprising the following steps:
S1. it prepares flexible microfluidic road and surface roughness processing is carried out to it；
S2. liquid metal liquid storage tank is connected to by flexible microfluidic road with integrated Micropump and integrated micro-valve；
S3. it is flowed in flexible microfluidic road using integrated Micropump driving liquid metal；Utilize integrated micro-valve control liquid gold
Belong to electricity conducting and physical blocking in flexible microfluidic road.
Compared with prior art, the invention has the benefit that
(1) present invention is using integrated Micropump mechanism and integrated micro-valve structure drive control liquid metal in radio-frequency antenna runner
Middle flowing, different flow locations correspond to different antenna frequencies, realize antenna frequencies in the process of continuous dynamic driving control
Control is continuously adjusted in broadband range.
(2) material of the substrate in flexible microfluidic road and cover board using dimethyl silicone polymer, polymethyl methacrylate and
Silica gel, and surface roughness processing is carried out, its micro force is reduced, the manipulation and mobility of liquid metal microlayer model are improved.
(3) width in flexible microfluidic road and height are μm-mm grades, and liquid metal can be moved and be moved in flexible microfluidic road
It moves, can be widely applied to the technical fields such as flexible electronic, flexible sensor and radio-frequency antenna.
It in the present invention, can also be combined with each other between above-mentioned each technical solution, to realize more preferred assembled schemes.This
Other feature and advantage of invention will illustrate in the following description, also, certain advantages can become from specification it is aobvious and
It is clear to, or understand through the implementation of the invention.The objectives and other advantages of the invention can by specification, claims with
And it is achieved and obtained in specifically noted content in attached drawing.
Detailed description of the invention
Attached drawing is only used for showing the purpose of specific embodiment, and is not to be construed as limiting the invention, in entire attached drawing
In, identical reference symbol indicates identical component.
Fig. 1 is liquid metal driving control system figure provided by the invention；
Fig. 2 is integrated micro-valve illustraton of model provided by the invention；
Fig. 3 is integrated Micropump illustraton of model provided by the invention.
Appended drawing reference:
1- liquid metal；2- flexible microfluidic road；3- liquid metal liquid storage tank；4- integrates Micropump；5- integrated micro-valve；6- micro-valve
Door；7- steel ball；8- magnet；9- micro-valve driving structure.
Specific embodiment
Specifically describing the preferred embodiment of the present invention with reference to the accompanying drawing, wherein attached drawing constitutes the application a part, and
Together with embodiments of the present invention for illustrating the principle of the present invention, it is not intended to limit the scope of the present invention.
On the one hand, the present invention provides a kind of 1 driving control systems of liquid metal of integrated Micropump micro-valve, as shown in Figure 1,
Including liquid metal liquid storage tank 3, flexible microfluidic road 2, integrated Micropump 4 and integrated micro-valve 5；Liquid metal liquid storage tank 3 passes through soft
Property fluid channel 2 is successively connected to integrated Micropump 4, integrated micro-valve 5；Integrated Micropump 4 is for driving liquid metal 1 in flexible microfluidic road
Flowing in 2；Integrated micro-valve 5 is used to control electricity conducting and physical blocking of the liquid metal 1 in flexible microfluidic road 2.
When implementation, Micropump and micro-valve are integrated into flexible microfluidic road 2, be respectively formed integrated Micropump 4 and integrated micro-valve 5 this
Two kinds of structures, by micro- injection technology (such as in the way of high-precision micro-syringe, syringe pump, peristaltic pump etc.) by 1 note of liquid metal
Enter into liquid metal liquid storage tank 3, the outlet end of liquid metal liquid storage tank 3 passes through the entrance in flexible microfluidic road 2 and integrated Micropump 4
The outlet end of end connection, integrated Micropump 4 is connected to by flexible microfluidic road 2 with integrated micro-valve 5, the outlet end connection of integrated micro-valve 5
1 driving control system of liquid metal for integrating 4 micro-valve of Micropump is placed in electronic device by flexible fluid channel 2, such as radio frequency
In the micro-channel structure of antenna, flexible electronic micro-channel structure and flexible sensing micro-channel structure.
While liquid metal 1 has satisfactory electrical conductivity, there is mobility, large deformation and reconfigurability at normal temperature, this
Invention by the way that integrated Micropump 4 and integrated micro-valve 5 are integrated on flexible microfluidic road 2, by 1 driving control system of liquid metal with it is soft
Property fluid channel 2 it is integrated, flowed in flexible microfluidic road 2 using integrated Micropump 4 driving liquid metal 1, and using integrated
Micro-valve 5 control liquid metal 1 in flexible microfluidic road 2 electricity conducting and physical barrier characteristic, and then realize over long distances or
The drive control to liquid metal 1 is realized in the flexible microfluidic road 2 of person's complicated water runner structure；Liquid may be implemented on structural form
State metal 1 fills the arbitrary shape of the flow passage structure of flexible electronic, flexible sensor and RF reconfigurable antenna etc.；In scale
In parameter, drive control of the liquid metal 1 in a μm-mm (grade to hundred micron orders) flow passage structure may be implemented, it is final real
Existing 1 flow channel structure miniaturized design of liquid metal.
It should be noted that the micro-fluidic property of the liquid metal 1 in the present invention refer to flexible electronic, flexible sensor and
In the microchannel structure of RF reconfigurable antenna etc., by applying active force (external force such as mechanical force, electric field force) to liquid metal 1
And then control flowing and the style characteristic of liquid metal 1.
High-precision flow driving control is carried out to liquid metal 1 in flexible microfluidic road 2 in order to realize, as shown in Fig. 2, collection
It include Micropump and Micropump channel (one section in flexible microfluidic road 2) at Micropump 4, Micropump is pressure-driven Micropump, magnetic drive is micro-
One of pump or Piezoelectric Driving Micropump；Since pressure-driven electric pump and Piezoelectric Driving Micropump are that conventional Micropump driving is set
Standby, detailed structure, working principle and the course of work repeat no more.
When using magnetic drive Micropump, magnetic drive Micropump includes motor, magnet and steel ball 8, and magnet is set on motor
And rotate driven by the motor, steel ball 8, which follows magnet rotors and squeezes Micropump channel, makes its creeping deformation, to push flexibility
Liquid metal 1 in fluid channel 2 flows.
Specifically, it being equipped with motor in the upper end of Micropump, motor is equipped with multiple magnetic patch, and motor lower end is equipped with multiple steel balls 8,
The wherein corresponding underface set on magnetic patch of steel ball 8, magnetic drive Micropump is by squeezing Micropump channel, magnetic by the sound-absorbing of magnetic patch
Block is fixed on motor and rotates under motor drive, and corresponding steel ball 8 follows magnetic patch to move in a circle, and multiple steel balls 8 are along Micropump
Pipe outlet direction successively squeezes Micropump channel, and then Micropump pipeline is made to generate creeping deformation, final to push in Micropump channel
Liquid metal 1 flows.
In driving principle, electromagnetic pump in the prior art is based on Lorentz force, benefit when driving liquid metal 1
With the conductive characteristic in magnetic field and liquid metal 1 in electromagnetic pump, so that liquid metal 1 flows in one direction, main function is
Liquid metal 1 is driven, but cannot achieve and two and physics partition are connected to the electricity of liquid metal 1；And the liquid gold in the present invention
Belonging to 1 driving is realized by integrating the mechanical system of Micropump 4, and turn of extruding force or steel ball 8 between magnet and steel ball 8 is utilized
It is dynamic, realize the control flowed to liquid metal 1, solenoid valve is then based on the law of electromagnetic induction in invention, for electricity conducting and object
Reason blocks liquid metal 1.
Magnetic drive Micropump has the advantages that compared with other driving Micropumps
Firstly, liquid metal 1 is flowed by flexible microfluidic road 2, do not need to contact with Micropump other structures, have good
Insulation and isolation, to avoid influence of the Micropump other structures to the pollution of liquid metal 1 or to pump housing other structures；Its
Secondary, magnetic force Micropump is small in size, with microminaturization and can carry out one with flexible microfluidic road (or other channel designs)
Change integrated；Again, magnetic drive Micropump can accurately control the flow behavior of micro liquid metal 1.
In order to control electricity on state characteristic and physical barrier characteristic of the liquid metal 1 in flexible microfluidic road 2, such as Fig. 3 institute
Show, integrated micro-valve 5 includes that (the micro-valve channel is in flexible microfluidic road for micro-valve driving structure 9, micro-valve door 6 and micro-valve channel
One section), by controlling integrated micro-valve 5, realize that the physical isolation of the liquid metal 1 of micro-valve channel two sides and electricity block.
Specifically, micro-valve channel belongs to a part in flexible microfluidic road 2, integrated micro-valve 5 by micro-valve driving structure 9 (such as
The micro-valves such as solenoid valve or micro- solenoid valve) and micro-valve door 6 is integrated forms to flexible microfluidic road 2, micro-valve channel two sides
It is that the driving micro-valve door 6 under voltage effect of micro-valve driving structure 9 moves that the physical isolation and electricity of liquid metal 1, which block process,
Micro-valve door 6 squeezes microchannel structure and changes.Since micro-valve channel is one section in flexible microfluidic road 2, in outer masterpiece
It can be changed with its lower sectional area, the liquid in channel design is achieved that when the two sides up and down in channel are in close contact completely
The electricity of state metal 1 is connected and physical isolation.Wherein, the physical isolation of integrated micro-valve 5 refers to that the liquid metal 1 at micro-valve both ends divides
It leaves；Electricity blocking refers to that the liquid metal 1 at micro-valve both ends is non-conductive.Since micro-valve driving structure 9 is for conventional micro- solenoid valve
Or solenoid valve, do not repeating its specific structure composition herein.
It should be noted that micro-valve door 6 is insulation resistant material；Micro-valve door 6 is using insulation resistant material: liquid gold
Belong in 1 flow process, contain liquid metal 1 and remove the acidity or alkaline solution of 1 surface oxide layer of liquid metal, using exhausted
Edge resistant material had not only been avoided that short circuit occurred in liquid metal 1 and valve body, but also was avoided that structure because the reasons such as corrosion are lost
Effect.In addition, micro-valve channel is also required to using isolated corrosion material.
Micro-valve driving structure 9 is divided into voltage driving micro-valve and pressure-driven micro-valve according to driving principle, and voltage drives micro-valve
By controlling the reciprocating motion of micro-valve door 6, squeezes liquid metal 1 and realize that isolation blocks.Micro-valve driving structure 9 is driven using voltage
When features simple structure, can be integrated with fluidal texture, realize Miniaturization Design.Since driving micro-valve structure is conventional structure,
Its operation principle and process is not elaborating.
In order to improve integrated Micropump micro-valve 1 driving control system of liquid metal structural compactness, the present invention in it is soft
Property fluid channel 2 is identical as Micropump channel and micro-valve channel design；And it is formed by runner substrate with cover plate for sealing.
Specifically, the outlet of the one end in flexible microfluidic road 2 and liquid metal liquid storage tank 3, the other end and Micropump channel
Entrance connection, the outlet in Micropump channel is connected to by flexible microfluidic road 2 with the entrance in the micro-valve channel of integrated micro-valve 5；It is flexible
2 parameter of fluid channel includes length, width and height, and Micropump channel and micro-valve channel parameters and 2 parameter of flexible microfluidic road are all the same.
Microcosmic resistance in order to reduce flexible microfluidic road 2, when liquid metal 1 flows in Micropump channel and micro-valve channel is made
With, improve 1 microlayer model of liquid metal manipulation and mobility, by liquid metal 1 inject flexible microfluidic road 2 before, need by
Flexible microfluidic road 2, Micropump channel and micro-valve channel carry out surface roughness processing；For example, utilizing Teflon to channel surface
Equal materials are coated, and surface roughness is reduced.
In order to realize the micromation of 1 runner of liquid metal, flexible microfluidic road 2 that the present invention uses, Micropump channel and micro-
The width and height of valve passage are μm-mm grades.It is grade or Centimeter Level, this hair relative to existing 1 runner of liquid metal
Bright 1 runner of liquid metal reduces one to two orders of magnitude fully, and 1 flexible microfluidic road of liquid metal is smaller, drive control liquid
The difficulty of metal 1 is bigger.The micromation of 1 runner of liquid metal also expands it in chip cooling, high frequency antenna, dynamic reconfigurable
The application in the fields such as Meta Materials.
In order to which reduce the flowing of liquid metal 1 surrounds and watches drag effect, the material of substrate and cover board is polydimethylsiloxanes
Alkane (PDMS), polymethyl methacrylate or silica gel.
On the other hand, the present invention also provides a kind of 1 drive control methods of liquid metal of integrated 4 micro-valve of Micropump, use
1 driving control system of liquid metal of above 4 micro-valve of integrated Micropump, comprising the following steps:
S1. it prepares flexible microfluidic road 2 and surface roughness processing is carried out to it；
In terms of liquid metal 1 selects: for gallium and its alloy, gallium and its alloy are applicable in the liquid metal 1 that the present invention uses
In preparing various devices, gallium and its alloy have fusing point very low, be at room temperature liquid, viscosity it is low, convenient for injection fluid channel
In；The conductivity of gallium and its alloy is higher；And be not easy to evaporate, performance is stablized, and when operation will not suck gas molecule；It is most important
, liquid metal 1 do not have to heating fusing before injection, is easy to and organic, biomaterial is compatible；And begin in injection process
Liquid is kept eventually, and without cooling procedure after the completion of injection, it is time-consuming to reduce technique.
In terms of the selection in flexible microfluidic road 2 and production: using the base material (packet of the readily flowed control of liquid metal 1
Include dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA), silica gel etc.) substrate in flexible microfluidic road 2 is prepared, it is right
Substrate carries out surface roughness processing, reduces its micro force, improves the manipulation and mobility of 1 microlayer model of liquid metal.It is soft
Property fluid channel 2 realized using overmolded technique or micro-nano technology technique, including processes such as photoetching, nano impression；Flexible microfluidic
Road 2 is encapsulated by substrate and cover board, and in packaging technology, cover board selects PDMS, PMMA, the materials such as silica gel, then by high temperature,
Plasma technique realizes the sealing of encapsulation cover plate and substrate, forms the flexible microfluidic road 2 of sealing.Realize encapsulation cover plate and substrate
Sealing two kinds of technologies of high temperature and plasma can be used realize.High temperature process: it is coated first between cover board and substrate
One layer of PDMS, PMMA, silica gel to match with them, is then solidified at a temperature of 90-100 DEG C.Plasma technique benefit
With oxygen plasma active processing is carried out to cover board and substrate respectively, increases the viscosity shown, realize cover board and base by squeezing
The sealing at bottom.
It is emphasized that liquid metal 1 is easy and air effect is formed on 1 surface of liquid metal in air environment
Layer of oxide layer, the oxide layer with a thickness of 3-5nm, alkalinity can be used or acid-soluble oil package liquid metal 1 is removed.Micro-
It injects before liquid metal 1 in channel design, is circulated with alkalinity or acid-soluble oil to channel design.
S2. liquid metal liquid storage tank 3 is attached by flexible microfluidic road 2 with integrated Micropump 4 and integrated micro-valve 5.
Specifically, a large amount of liquid metal 1 is stored in liquid metal liquid storage tank 3, by the outlet of liquid metal liquid storage tank 3
End is connected to by flexible microfluidic road 2 with integrated Micropump 4, and the arrival end of the outlet end of integrated Micropump 4 and integrated micro-valve 5 is connected
It is logical, the outlet end of integrated micro-valve 5 and it is connected with flexible microfluidic road 2, which can be located in radio-frequency antenna, that is, exist
The drive control that liquid metal 1 is carried out in radio-frequency antenna flow passage structure, by drive control liquid metal 1 in radio-frequency antenna runner
Different flow locations, realize the dynamic restructuring to antenna channels structure, with the frequency of dynamic regulation antenna, polarization side in structure
The performance parameters such as formula, directional diagram.
It should be noted that needing before the micro- injection flexible microfluidic road 2 of liquid metal 1 in dry vacuumizing environment
In, flexible microfluidic road 2 is vacuumized, guarantees that flexible microfluidic road 2 is in vacuum state；Under dry vacuum environment, pass through
Liquid metal 1 is injected into flexible microfluidic road 2 by micro- injection technology, and high-precision micro-syringe technology, injection can be used in micro- injection
The modes such as pump, peristaltic pump are realized.Wherein, high-precision micro-syringe technology is that the liquid metal 1 of fixed amount is extracted using syringe,
And liquid metal 1 is filled into flexible microfluidic road 2 using syringe using pressure mode.Syringe pump, wriggling pumping method refer to
Capillary is connected in the interface of pump, side connects microchannel, and the other side is connected with liquid metal 1, under the action of pump, by liquid
State metal 1 is injected into microchannel structure.
S3. liquid metal 1 is driven to flow in flexible microfluidic road 2 by integrated 4 mechanism of Micropump；
Specifically, it integrates the Micropump in Micropump 4 and uses magnetic drive Micropump, magnetic drive Micropump is squeezed by the attraction of magnet
Micropump runner is pressed, magnetic patch is fixed on motor and rotates driven by the motor, and corresponding steel ball 8 follows magnet to move in a circle,
Micropump channel creeping deformation is squeezed simultaneously, and the liquid metal 1 in Micropump channel is pushed to flow forward.It is emphasized that this hair
When the bright integrated Micropump 4 of use carries out flowing of the control liquid metal 1 in flexible microfluidic road 2, mL/ may be implemented on flow control
Min magnitude.And can be migrated and be flowed in flexible microfluidic road 2, the width in flexible microfluidic road 2, elevational dimension are μm-mm
Grade.Flow velocity of the liquid metal in flexible microfluidic road 2 it is smaller, it can be achieved that liquid metal 1 in flow passage structure position it is accurate
Control, while reducing effect of the flowing pressure to flexible microfluidic road.
S4. the electricity conducting and physical blocking of the liquid metal 1 of 5 two sides of integrated micro-valve are realized by integrated micro-valve 5；Specifically
Ground, integrated micro-valve 5 using voltage driving micro-valve structure by control micro-valve door 6 reciprocating motion, squeeze liquid metal 1 realize every
From blocking.
To sum up, the present invention realizes liquid metal 1 in flexible microfluidic road 2 respectively by integrated Micropump 4 and integrated micro-valve 5
Drive control and electricity conducting and physical blocking, and then realize the reconstruct to 1 form of liquid metal in flexible microfluidic road 2.This hair
1 driving control system of liquid metal and method of 4 micro-valve of integrated Micropump of bright offer can be applied to field of radio frequency, and lead to
It overdrives and controls the different flow locations in radio-frequency antenna flow passage structure of liquid metal 1, realize the dynamic to antenna channels structure
Reconstruct, with performance parameters such as the frequencies, polarization mode, directional diagram of dynamic regulation antenna.
It should be noted that the liquid metal 1 in the present invention is primarily referred to as the liquid condition of gallium and its alloy.
Embodiment one
A specific embodiment of the invention, by 1 drive control of liquid metal of integrated 4 micro-valve of Micropump provided by the invention
System is used for field of radio frequency, by taking a kind of frequency reconfigurable monopole antenna as an example, by the metal in traditional monopole sub-antenna
Copper replaces with liquid metal 1.
(1) substrate of radio-frequency antenna and the flow passage structure of liquid metal 1 are prepared using PDMS, flow passage structure cross section uses
Rectangular section.
(2) using plasma method seals PDMS cover board and underlying structure, forms the flexible microfluidic road 2 of radio-frequency antenna.
(3) Micropump, micro-valve are integrated with the flexible microfluidic road 2 of radio-frequency antenna respectively, forms integrated Micropump 4 and integrated micro-valve
5。
(4) using micro-syringe in 3 filling liquid metal 1 of liquid metal liquid storage tank.
(5) it is flowed in radio-frequency antenna runner using integrated 4 mechanism of Micropump and 5 drive control liquid metal 1 of integrated micro-valve,
Different flow locations correspond to different antenna frequencies, realize the adjusting control of antenna frequencies in the process of continuous dynamic driving control
System.
Radiation metal in conventional antenna structures is the materials such as copper, after radio-frequency antenna designs and has prepared, radio-frequency antenna
Structure is fixed, but after replacing metallic copper with liquid metal 1, and the flow regime by adjusting liquid metal 1, which can be adjusted, penetrates
The performance of frequency antenna.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of liquid metal driving control system of integrated Micropump micro-valve, which is characterized in that including liquid metal liquid storage tank, soft
Property fluid channel, integrated Micropump and integrated micro-valve；
The liquid metal liquid storage tank is successively connected to integrated Micropump, integrated micro-valve by flexible microfluidic road；
The integrated Micropump is for driving liquid metal to flow in flexible microfluidic road；
The integrated micro-valve is used to control electricity conducting and blocking of the liquid metal in flexible microfluidic road；
The width and height in the flexible microfluidic road are μm-mm grades.
2. the liquid metal driving control system of integrated Micropump micro-valve according to claim 1, which is characterized in that the collection
It include Micropump and Micropump channel at Micropump, the driving method of the Micropump is in pressure-driven, magnetic drive or Piezoelectric Driving
One kind.
3. the liquid metal driving control system of integrated Micropump micro-valve according to claim 2, which is characterized in that described micro-
Pump is magnetic drive Micropump, and the magnetic drive Micropump includes motor, magnet and steel ball；The magnet is set on motor and in electricity
It is rotated under the drive of machine, the steel ball is with magnet rotors and squeezes Micropump channel and makes its creeping deformation, and then pushes flexible micro-
Liquid metal flows in runner.
4. the liquid metal driving control system of integrated Micropump micro-valve according to claim 1 or 3, which is characterized in that institute
It is integrated by micro-valve driving structure, micro-valve door and micro-valve channel integral to state integrated micro-valve, the integrated micro-valve is used for micro-valve
The physical isolation and electric isolation of channel two sides liquid metal.
5. the liquid metal driving control system of integrated Micropump micro-valve according to claim 4, which is characterized in that described micro-
Valve driving structure is driven using voltage, the reciprocal fortune that the micro-valve driving structure using voltage driving passes through control micro-valve door
It is dynamic, it squeezes liquid metal and realizes electricity conducting and physical blocking.
6. the liquid metal driving control system of integrated Micropump micro-valve according to claim 5, which is characterized in that described micro-
Valve and micro-valve channel are all made of insulation resistant material.
7. the liquid metal driving control system of integrated Micropump micro-valve according to claim 5 or 6, which is characterized in that institute
It states Micropump channel and micro-valve channel is wherein one section of flexible microfluidic road, and formed by runner substrate with cover plate for sealing.
8. the liquid metal driving control system of integrated Micropump micro-valve according to claim 7, which is characterized in that the base
The material at bottom is dimethyl silicone polymer, polymethyl methacrylate or silica gel.
9. the liquid metal driving control system of integrated Micropump micro-valve according to claim 7, which is characterized in that the lid
The material of plate is dimethyl silicone polymer, polymethyl methacrylate or silica gel.
10. a kind of liquid metal drive control method of integrated Micropump micro-valve, which is characterized in that any using claim 1 to 9
The liquid metal driving control system of integrated Micropump micro-valve described in, comprising the following steps:
S1. it prepares flexible microfluidic road and surface roughness processing is carried out to it；
S2. liquid metal liquid storage tank is connected to by flexible microfluidic road with integrated Micropump and integrated micro-valve；
S3. it is flowed in flexible microfluidic road using integrated Micropump driving liquid metal, and controls liquid metal using integrated micro-valve
Electricity conducting and physical blocking in flexible microfluidic road.
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| CN110860319A (en) * | 2019-11-07 | 2020-03-06 | 深圳市科瑞达生物技术有限公司 | Circulating pump device applied to micro-fluidic chip |
| CN111135880B (en) * | 2019-12-09 | 2021-10-15 | 中国科学院微电子研究所 | Tractor, traction system and gravity measuring method thereof |
| CN111495454B (en) * | 2020-05-27 | 2022-07-05 | 北京机械设备研究所 | Liquid metal flow control structure and method based on electromagnetic drive |
| CN111549396A (en) * | 2020-05-29 | 2020-08-18 | 南京鼓楼医院 | Fiber wrapping liquid metal and preparation method thereof |
| CN111628284A (en) * | 2020-06-22 | 2020-09-04 | 杭州联芳科技有限公司 | Adjustable liquid metal antenna array based on magnetic control voltage transformation technology |
| CN112928471B (en) * | 2021-01-21 | 2024-02-27 | 维沃移动通信有限公司 | Electronic equipment and antenna switching method |
| CN112932650A (en) * | 2021-01-28 | 2021-06-11 | 云南科威液态金属谷研发有限公司 | Microwave and radio frequency combined tumor ablation equipment and tumor ablation method |
| CN115084836B (en) * | 2022-07-04 | 2023-05-26 | 北京航空航天大学 | Liquid metal driving injection method of micro-fluid antenna |
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| US3511580A (en) * | 1967-11-30 | 1970-05-12 | Hughes Aircraft Co | Liquid metal column interface position detector |
| NO175571C (en) * | 1992-10-23 | 1994-11-02 | Norsk Hydro As | Dosing pump for metal |
| US7539016B2 (en) * | 2005-12-30 | 2009-05-26 | Intel Corporation | Electromagnetically-actuated micropump for liquid metal alloy enclosed in cavity with flexible sidewalls |
| CN203090949U (en) * | 2013-02-26 | 2013-07-31 | 中国科学院理化技术研究所 | Multi-stage driving electroosmosis micropump device |
| CN204746344U (en) * | 2015-05-13 | 2015-11-11 | 中国科学院理化技术研究所 | Electroosmosis micropump device |
| CN105715865B (en) * | 2016-03-24 | 2018-04-27 | 中国科学院理化技术研究所 | Electromagnetic micro valve device |
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