CN203090949U - Multistage drive electric osmosis micro-pump device - Google Patents
Multistage drive electric osmosis micro-pump device Download PDFInfo
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Abstract
The utility model discloses a multistage drive electric osmosis micro-pump device which comprises a fluid micro-channel and an electrode micro-channel which are integrated on a micro-fluidic chip, wherein the fluid micro-channel is connected with a micro-channel inlet or outlet of the pumped fluid or is a part of the micro-channel; the electrode micro-channel is symmetrically distributed at two sides of the fluid micro-channel, and liquid metal is filled in the electrode micro-channel so as to form a microelectrode; the electrode micro-channel comprises a liquid metal injection inlet and an outlet; the inlet and the outlet are respectively connected with a controllable power module, so that a high potential and a low potential are respectively formed at two ends of a pump area micro-channel driving section of the fluid micro-channel; the fluid micro-channel comprises one or two flow channels which are arranged in parallel; one flow channel is formed by connecting multiple pump area micro-channel driving sections in series; and two flow channels are communicated with multiple pump area micro-channel driving sections which are parallel to each other and are connected in parallel. The device is simple in electrode structure, high in controllability, high in stability and high in interference resistance and is in low-voltage drive; and moreover, the driving sections are increased, and a high-flow micro-pump can be realized.
Description
Technical field
The utility model relates to microflow control technique, particularly relates to a kind of multistage driving electric osmose Micropump device.
Background technology
Micropump is to realize in the microfluidic system that microfluid accurately drives indispensable core components and parts, is the trace even the specific implementation form of small size microfluid actuation techniques more.Fields such as Micropump transports at biochemical analysis, microfluid (buffer solution, medicine etc.), microelectronic chip cooling have widely uses, and its development has become the important symbol of weighing the microfluidic system development level.
Micropump can be divided into mechanical type Micropump and the on-mechanical pump that declines according to its operation principle, and both main distinctions are that movement-less part is arranged in the pump.The mechanical type Micropump almost can drive any kind microfluid under external force, but owing to exist moving component, this type of Micropump to have short, shortcomings such as operational reliability is relatively poor, it is discontinuous to flow, complex structure in service life; Mechanical type Micropump common form has Pneumatic Micropump, the moving Micropump of hot gas, Electromagnetic Drive Micropump, Piezoelectric Driving Micropump, static to drive Micropump, marmem drives Micropump, electrochemistry driving Micropump, ultrasonic excitation Micropump etc.But not mechanical type Micropump power way of realization is mainly by means of physics, the chemical property of driving microfluid itself, movement-less part in the pump often, this type of Micropump drives microfluid and is limited in scope, but it can realize the uninterrupted pumping of microfluid, and reliability height, controllability are good, processing and fabricating is comparatively simple and be easy to integrated; The on-mechanical pump common form that declines has barometric gradient Micropump (surface tension driving that wetting, the Marangoni effect of electricity, geometric effect etc. cause), magnetic field gradient Micropump (ferrofluid power drive), concentration gradient Micropump (the infiltration diffusion-driven that semipermeable membrane, surfactant etc. cause), electric potential gradient Micropump (drivings such as EOF, dielectrophoresis, electrohydrodynamic), physical chemistry Micropump (drivings such as phase transformation, gel, cell reaction, optics) etc.
The drive fluid scope is wide, high-voltage performance good, continuous pulse free reliability height, movement-less part long service life, the accurate control that can realize rate of flow of fluid and the characteristics such as bidirectional modulation of the flow direction flow owing to have, the electric osmose Micropump has obtained more concerns, is a kind of Micropump that is most widely used at present.The power source of electric osmose Micropump is an EOF, when contacting with the fluid channel solid wall surface, microfluid will form one deck electric double layer at solid-liquid interface, along fluid channel direction loading parallel electric field the time, produce the electric osmose driving force in the fluid channel wall electric double layer, this driving force directly acts on microfluid, drive it and flow, form EOF.
Electric osmose Micropump common form can be classified as two classes, and a class is a porous dielectric filled type electric osmose Micropump, and a class is open fluid channel electric osmose Micropump.The former fills a large amount of particulate dielectric materials in runner, under the applied voltage effect, the microfluid of particle surface forms EOF under the effect of electric osmose driving force; This type of Micropump can be realized high output pressure, but its complex manufacturing technology, not easy of integration, flow velocity is inhomogeneous, and filler particles and fluid channel are difficult to coupling.The latter directly utilizes fluid channel to produce EOF; Do not have filler particles in this type of Micropump, flow stability, uniformity are better, and processing and fabricating is simple, are easy to integratedly, but its output pressure is lower.
Because common electroosmotic pump often electrode directly contacts with solution, hydrolysis easily takes place under voltage produce bubble, therefore in the electric osmose Micropump the microelectrode material generally adopt metal platinum, the platinum physicochemical properties are stable, be suitable for doing the microelectrode material, but the produced by micro processing technology of platinum electrode is comparatively complicated, cost is higher.Platinum electrode often adopts membrane structure, and film is integrated on the base material of fluid channel bottom by methods such as deposition or sputters; Directly platinum filament being inserted the fluid channel reservoir in addition also is a kind of comparatively simple platinum electrode form.The platinum electrode of these two kinds of forms all is to be immersed in the microfluid, directly contacts with microfluid.And this driving voltage makes microfluid generation electric current Joule heat, the temperature environment of change microfluid easily through the type of drive that the contact microelectrode directly loads on this type of microfluid or electrolyte solution.
The utility model content
(1) technical problem that will solve
The purpose of this utility model is to propose a kind of novel electric osmose Micropump device, to simplify electrode structure and produced by micro processing technology thereof, realizes that processing and fabricating is simple, flow velocity is uniform and stable, controllability good, it is integrated to be easy to, antijamming capability is strong, low voltage drive.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of multistage driving electric osmose Micropump device, it comprises: be integrated on the micro-fluidic chip and non-touching fluid fluid channel and electrode fluid channel, described fluid fluid channel is used to connect the fluid channel import or export of institute's pumping fluid, or is the part of the fluid channel of pumping fluid; Described electrode fluid channel is symmetrically distributed in the both sides of described fluid fluid channel, its inner filling liquid metal, form microelectrode, described electrode fluid channel has liquid metal injection inlet and liquid metal injection outlet, described liquid metal injection inlet is connected the controllable electric power module respectively with liquid metal injection outlet, forms high potential and low potential respectively with the two ends that drive section in the pump district of described fluid fluid channel fluid channel; Described fluid fluid channel comprises one or two runners that be arranged in parallel, and when it comprised a runner, this runner drove section by multi stage pump district fluid channel and is composed in series; When it comprises two runners, be communicated with the pump district fluid channel driving section that multistage is parallel to each other and is arranged in parallel between two runners.
Wherein, described liquid metal is to be liquid mercury or gallium or gallium alloy under the room temperature condition.
Wherein, room temperature condition is gallium indium alloy or gallium-indium-tin alloy for liquid gallium alloy down.
Wherein, when a described runner was composed in series by multi stage pump district fluid channel driving section, the electrode fluid channel was arranged symmetrically in pump district fluid channel and drives section both sides.
Wherein, described electrode fluid channel is arranged in pump district fluid channel and drives the section two ends, and pump district fluid channel driving section is connected in series and locates shared pair of electrodes fluid channel.
Wherein, in described two runners, an end of first runner is used to connect the fluid channel import or export of institute's pumping fluid, and the other end connects pump district fluid channel and drives section; One end of second runner is used to connect the fluid channel import or export of institute's pumping fluid, and the other end connects pump district fluid channel and drives section.
Wherein, the two ends of every section pump district fluid channel driving section prolong respectively, and extension is near the electrode fluid channel of described fluid fluid channel both sides.
Wherein, described electrode fluid channel is a bending structure, forms adjacent in turn ∪ shape and ∩ shape fold, and the extended end that described pump district fluid channel drives section slips into respectively in the ∪ shape and ∩ shape groove of its end.
Wherein, the material of described micro-fluidic chip is dimethyl silicone polymer or glass or quartz.
(3) beneficial effect
The technique scheme utilization has the room temperature liquid metal of superior electrical conductivity energy as electric osmose Micropump microelectrode, fluid fluid channel and electrode fluid channel keep noncontact, during the Micropump operation, do not have between microelectrode and the microfluid and influence each other, can avoid the generation of microfluid at the hydrolysis and the electric current Joule heat on microelectrode surface, and then improve the microelectrode antijamming capability, strengthen stability, reliability and service life that Micropump moves.Thereby electric osmose Micropump of the present utility model has that electrode structure is simple, processing and fabricating convenient, with low cost, plurality of advantages such as controllability good, stability is high, it is integrated to be easy to, antijamming capability strong, low voltage drive; And driving section increases, and can realize the high flow capacity Micropump.
Description of drawings
The electric osmose Micropump principle of device schematic diagram of the multistage driving that Fig. 1 provides for present embodiment one;
The electric osmose Micropump principle of device schematic diagram of the multistage driving that Fig. 2 provides for present embodiment two.
Wherein: 1. fluid fluid channel; 2. electrode fluid channel; 3. controllable electric power module; 4. liquid metal injection inlet; 5. liquid metal injection outlet; 6. plain conductor; 7. pump district fluid channel drives section; 8. pump district fluid channel extension.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is described in further detail.Following examples are used to illustrate the utility model, but are not used for limiting scope of the present utility model.
Embodiment one
As shown in Figure 1, present embodiment provides a kind of electric osmose Micropump device, it comprises: be integrated on the micro-fluidic chip and non-touching fluid fluid channel 1 and electrode fluid channel 2, described fluid fluid channel 1 is used to connect the fluid channel import or export of institute's pumping fluid, or is the part of the fluid channel of pumping fluid; Described electrode fluid channel 2 is symmetrically distributed in the both sides of described fluid fluid channel 1, its inner filling liquid metal, form microelectrode, described electrode fluid channel 2 has liquid metal injection inlet 4 and liquid metal injection outlet 5, described liquid metal injection inlet 4 is connected controllable electric power module 3 respectively with liquid metal injection outlet 5, forms high potential and low potential respectively with the two ends that drive section 7 in the pump district of described fluid fluid channel 1 fluid channel; Described fluid fluid channel 1 comprises two runners that be arranged in parallel, is communicated with the pump district fluid channel driving section 7 that multistage is parallel to each other and is arranged in parallel between these two runners.
In order to realize the high flow capacity Micropump, present embodiment has increased the quantity that drives section, at first described fluid fluid channel 1 all is set to linear pattern in the horizontal and vertical directions, be in two included runners of described fluid fluid channel 1, one end of first runner is used to connect the fluid channel import or export of institute's pumping fluid, and the other end connects pump district fluid channel and drives section 7; One end of second runner is used to connect the fluid channel import or export of institute's pumping fluid, the other end connects pump district fluid channel and drives section 7, thereby drive section 7 by many fluid channel that are arranged in parallel and realize that the two ends of described fluid fluid channel 1 drive the high potential and low potential one side of section 7 respectively near pump district fluid channel, the two ends of every section pump district fluid channel driving section 7 prolong respectively, form pump district fluid channel extension 8, pump district fluid channel extension 8 is near the electrode fluid channel 2 of described fluid fluid channel 1 both sides, described electrode fluid channel 2 is a bending structure, form adjacent in turn ∪ shape and ∩ shape fold, described pump district fluid channel extension 8 slips into respectively in the ∪ shape and ∩ shape groove of its end, realize electrode fluid channel 2 that pump district fluid channel drives section 7 every ends be distributed in pump district fluid channel extension 8 around, to form high potential and low potential respectively at the pump district of described fluid fluid channel 1 fluid channel extension 8, the two ends that the pump district fluid channel of promptly described fluid fluid channel 1 drives section 7 form high potential and low potential respectively.
The liquid metal injection inlet 4 that is positioned at first electrode fluid channel 2 of fluid fluid channel 1 one sides all is connected with the high potential end of described controllable electric power module 3 with liquid metal injection outlet 5; The liquid metal injection inlet 4 that is positioned at second electrode fluid channel 2 of fluid fluid channel 1 opposite side all is connected with the low potential end of described controllable electric power module 3 with liquid metal injection outlet 5.For the high potential microelectrode, the identical high potential of pump district fluid channel extension 8 same maintenances therebetween, low potential is also together.Will have the electric field that is parallel to the fluid channel direction on the internal face of pump district fluid channel driving section 7 thus, the electric double layer of the microfluid of fluid channel near wall forms EOF under electric field action, drives microfluidic flow.The electromotive force size and Orientation that loads on microelectrode by change can be realized the variation of microfluid flow velocity and the flow direction in the Micropump.
Particularly, described liquid metal is to be liquid mercury or gallium or gallium alloy under the room temperature condition, and preferably adopting under the room temperature condition is that liquid gallium alloy is gallium indium alloy or gallium-indium-tin alloy.
The liquid metal injection inlet 4 of first electrode fluid channel 2 and second electrode fluid channel 2 all is connected with the high and low electromotive force end of described controllable electric power module 3 by plain conductor 6 with liquid metal injection outlet 5.
In this electric osmose Micropump device, fluid fluid channel 1 and electrode fluid channel 2 can adopt produced by micro processing technology to make synchronously, be integrated on the micro-fluidic chip.Described micro-fluidic chip material can be selected the PDMS(dimethyl silicone polymer), glass, quartz etc.
Preferentially, the soft lithographic technique of described produced by micro processing process choice routine is by 2 contour, coplane of the fluid fluid channel 1 produced of etching and electrode fluid channel and the noncontact simultaneously of same mask.Described fluid fluid channel 1 and the 2 produced by micro processing technological operations of electrode fluid channel are simple, with low cost.The micro-fluidic chip that described soft lithographic technique is produced is preferentially selected glass-based PDMS chip.
At grade, the thin layer that exists between fluid fluid channel 1 and the electrode fluid channel 2 makes both keep noncontact, and thin layer adopts the same material synchronous forming in the little process of chip, need not additional processing method and process.Thickness of thin layer is identical and should be enough little, drives the length of section 7 much smaller than pump district fluid channel between the electrode, thereby does not influence or that fluid channel in the pump is driven the Potential Distributing influence that section goes up on the streamwise is less.The length of pump district fluid channel extension 8 should be greater than the length of its end horizontal direction electrode, obtains more even and the electric potential field of high electrical potential gradient more thereby drive section 7 in pump district fluid channel.The electrode that liquid metal forms adopts the linear pattern electrode in level and vertical direction, when on-load voltage, can produce unidirectional parallel electric potential field between the parallel pole, the potential gradient direction of electric potential field should parallelly with driving runner section in the pump drive effect to reach best electric osmose.
Present embodiment utilizes the flowability of liquid metal, and from liquid metal injection inlet 4 injecting electrode fluid channel 2, unnecessary liquid metal overflows from liquid metal injection outlet 5 the employing injecting method in the injection process with liquid metal.After liquid metal injection inlet 4 and liquid metal injection inlet 5 were drawn plain conductor 6, the junction of liquid metal electrode and plain conductor 6 encapsulated with glue.Preferentially, glue adopts PDMS silicone oil or transparent electric insulation silica gel.The liquid metal process of described injection is simple to operate, good reproducibility, one-shot forming, the microelectrode Stability Analysis of Structures of formation.Preferentially, the liquid metal injection device adopts common micro syringe.
The electric osmose Micropump device that present embodiment provided except that changing driving voltage, by increasing the progression that pump district fluid channel drives section 7 and pump district fluid channel extension 8, also can be realized the high flow capacity Micropump.
Embodiment two
As shown in Figure 2, present embodiment provides a kind of electric osmose Micropump device, it comprises: be integrated on the micro-fluidic chip and non-touching fluid fluid channel 1 and electrode fluid channel 2, described fluid fluid channel 1 is used to connect the fluid channel import or export of institute's pumping fluid, or is the part of the fluid channel of pumping fluid; Described electrode fluid channel 2 is symmetrically distributed in the both sides of described fluid fluid channel 1, its inner filling liquid metal, form microelectrode, described electrode fluid channel 2 has liquid metal injection inlet 4 and liquid metal injection outlet 5, described liquid metal injection inlet 4 is connected controllable electric power module 3 respectively with liquid metal injection outlet 5, forms high potential and low potential respectively with the two ends that drive section 7 in the pump district of described fluid fluid channel 1 fluid channel; Described fluid fluid channel 1 is a runner, comprises that the pump district fluid channel that the multistage series connection is provided with drives section 7.
In order to realize the high flow capacity Micropump, present embodiment has increased the quantity that drives section, and described fluid fluid channel 1 is set to linear pattern in the horizontal direction.Every pair of electrode fluid channel 2 is arranged symmetrically in pump district fluid channel and drives section 7 both sides, somely electrode fluid channel 2 is distributed in pump district fluid channel successively along fluid fluid channel 1 drives section 7 both sides, pump district fluid channel driving section 7 is connected in series and locates shared pair of electrodes fluid channel 2, drives section 7 two ends with every section pump district fluid channel in described fluid fluid channel 1 and forms high potential and low potential respectively.
The liquid metal injection inlet 4 of every pair of electrode fluid channel 2 that longshore current body fluid channel 1 direction is arranged all is connected with described controllable electric power module 3 with liquid metal injection outlet 5, so that every pair of electrode that longshore current body fluid channel 1 direction is arranged obtains the electromotive force that gradient increases or reduces.Will have the electric field that is parallel to the fluid channel direction on the internal face of pump district fluid channel driving section 7 thus, the electric double layer of the microfluid of fluid channel near wall forms EOF under electric field action, drives microfluidic flow.The electromotive force size and Orientation that loads on microelectrode by change can be realized the variation of microfluid flow velocity and the flow direction in the Micropump.
Particularly, described liquid metal is to be liquid mercury or gallium or gallium alloy under the room temperature condition, and preferably adopting under the room temperature condition is that liquid gallium alloy is gallium indium alloy or gallium-indium-tin alloy.
The liquid metal injection inlet 4 of electrode fluid channel 2 all is connected with described controllable electric power module 3 by plain conductor 6 with liquid metal injection outlet 5.
In this electric osmose Micropump device, fluid fluid channel 1 and electrode fluid channel 2 can adopt produced by micro processing technology to make synchronously, be integrated on the micro-fluidic chip.Described micro-fluidic chip material can be selected the PDMS(dimethyl silicone polymer), glass, quartz etc.
Preferentially, the soft lithographic technique of described produced by micro processing process choice routine is by 2 contour, coplane of the fluid fluid channel 1 produced of etching and electrode fluid channel and the noncontact simultaneously of same mask.Described fluid fluid channel 1 and the 2 produced by micro processing technological operations of electrode fluid channel are simple, with low cost.The micro-fluidic chip that described soft lithographic technique is produced is preferentially selected glass-based PDMS chip.
At grade, the thin layer that exists between fluid fluid channel 1 and the electrode fluid channel 2 makes both keep noncontact, and thin layer adopts the same material synchronous forming in the little process of chip, need not additional processing method and process.Thickness of thin layer is identical and should be enough little, much smaller than electrode length, thereby does not influence or that fluid channel in the pump is driven the Potential Distributing influence that section goes up on the streamwise is less.The electrode that liquid metal forms adopts the linear pattern electrode in level and vertical direction, when on-load voltage, can produce unidirectional parallel electric potential field between the parallel pole, the potential gradient direction of electric potential field should parallelly with driving runner section in the pump drive effect to reach best electric osmose.
Present embodiment utilizes the flowability of liquid metal, and from liquid metal injection inlet 4 injecting electrode fluid channel 2, unnecessary liquid metal overflows from liquid metal injection outlet 5 the employing injecting method in the injection process with liquid metal.After liquid metal injection inlet 4 and liquid metal injection inlet 5 were drawn plain conductor 6, the junction of liquid metal electrode and plain conductor 6 encapsulated with glue.Preferentially, glue adopts PDMS silicone oil or transparent electric insulation silica gel.The liquid metal process of described injection is simple to operate, good reproducibility, one-shot forming, the microelectrode Stability Analysis of Structures of formation.Preferentially, the liquid metal injection device adopts common micro syringe.
The electric osmose Micropump device that present embodiment provided except that changing driving voltage, by increasing the progression that pump district fluid channel drives section 7, also can be realized the high flow capacity Micropump.
The above only is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection domain of the present utility model.
Claims (9)
1. multistage driving electric osmose Micropump device, it is characterized in that, comprise: be integrated on the micro-fluidic chip and non-touching fluid fluid channel (1) and electrode fluid channel (2), described fluid fluid channel (1) is used to connect the fluid channel import or export of institute's pumping fluid, or is the part of the fluid channel of pumping fluid; Described electrode fluid channel (2) is symmetrically distributed in the both sides of described fluid fluid channel (1), its inner filling liquid metal, form microelectrode, described electrode fluid channel (2) has liquid metal injection inlet (4) and liquid metal injection outlet (5), described liquid metal injection inlet (4) is connected controllable electric power module (3) respectively with liquid metal injection outlet (5), forms high potential and low potential respectively with the two ends that drive section (7) in the pump district of described fluid fluid channel (1) fluid channel; Described fluid fluid channel (1) comprises one or two runners that be arranged in parallel, and when it comprised a runner, this runner drove section (7) by multi stage pump district fluid channel and is composed in series; When it comprises two runners, be communicated with the pump district fluid channel driving section (7) that multistage is parallel to each other and is arranged in parallel between two runners.
2. multistage driving electric osmose Micropump device as claimed in claim 1 is characterized in that, described liquid metal is to be liquid mercury or gallium or gallium alloy under the room temperature condition.
3. multistage driving electric osmose Micropump device as claimed in claim 2 is characterized in that, room temperature condition is gallium indium alloy or gallium-indium-tin alloy for liquid gallium alloy down.
4. multistage driving electric osmose Micropump device as claimed in claim 1 is characterized in that, a described runner drives section (7) when being composed in series by multi stage pump district fluid channel, and electrode fluid channel (2) is arranged symmetrically in pump district fluid channel and drives section (7) both sides.
5. multistage driving electric osmose Micropump device as claimed in claim 4 is characterized in that, described electrode fluid channel (2) is arranged in pump district fluid channel and drives section (7) two ends, and pump district fluid channel driving section (7) is connected in series and locates shared pair of electrodes fluid channel (2).
6. multistage driving electric osmose Micropump device as claimed in claim 1 is characterized in that in described two runners, an end of first runner is used to connect the fluid channel import or export of institute's pumping fluid, and the other end connects pump district fluid channel and drives section (7); One end of second runner is used to connect the fluid channel import or export of institute's pumping fluid, and the other end connects pump district fluid channel and drives section (7).
7. multistage driving electric osmose Micropump device as claimed in claim 1 is characterized in that, the two ends of every section pump district fluid channel driving section (7) prolong respectively, and extension is near the electrode fluid channel (2) of described fluid fluid channel (1) both sides.
8. multistage driving electric osmose Micropump device as claimed in claim 7, it is characterized in that, described electrode fluid channel (2) is a bending structure, forms adjacent in turn ∪ shape and ∩ shape fold, and the extended end that described pump district fluid channel drives section (7) slips into respectively in the ∪ shape and ∩ shape groove of its end.
9. multistage driving electric osmose Micropump device as claimed in claim 1 is characterized in that the material of described micro-fluidic chip is dimethyl silicone polymer or glass or quartz.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320086065 CN203090949U (en) | 2013-02-26 | 2013-02-26 | Multistage drive electric osmosis micro-pump device |
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| CN 201320086065 CN203090949U (en) | 2013-02-26 | 2013-02-26 | Multistage drive electric osmosis micro-pump device |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103566987A (en) * | 2013-11-18 | 2014-02-12 | 镇江四联机电科技有限公司 | Electroosmotic flow pump and design process for pump body thereof |
| CN103953532A (en) * | 2014-04-30 | 2014-07-30 | 中国计量学院 | Flow control method for micro fluid induction electro-osmotic metering pump |
| CN104949789A (en) * | 2014-03-26 | 2015-09-30 | 中国科学院理化技术研究所 | Microchannel pressure sensor |
| CN106399091A (en) * | 2016-09-13 | 2017-02-15 | 哈尔滨工业大学 | Cell capturing chip based on inductive charge electro-osmosis induced by rotating electric field |
| CN106593831A (en) * | 2015-10-19 | 2017-04-26 | 中国科学院理化技术研究所 | Non-contact electromagnetic micro pump device |
| CN109185107A (en) * | 2018-11-02 | 2019-01-11 | 北京机械设备研究所 | A kind of the liquid metal driving control system and control method of integrated Micropump micro-valve |
| CN109952011A (en) * | 2019-02-25 | 2019-06-28 | 中国科学院理化技术研究所 | Production method, electromagnetic shielding system and the chip detecting equipment of electromagnetic shielding system |
| CN111760599A (en) * | 2020-06-08 | 2020-10-13 | 广州大学 | Modular spliced microfluid transportation device |
| WO2021047529A1 (en) * | 2019-09-11 | 2021-03-18 | 杭州未名信科科技有限公司 | Electroosmotic micropump apparatus and electroosmotic micropump apparatus group |
| CN113996357A (en) * | 2021-10-29 | 2022-02-01 | 北京理工大学 | Device for controlling liquid to flow directionally under internal heating condition of micro-fluidic chip pipeline |
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2013
- 2013-02-26 CN CN 201320086065 patent/CN203090949U/en not_active Expired - Lifetime
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103566987B (en) * | 2013-11-18 | 2015-08-19 | 江苏大学 | A kind of electroosmotic pump and pump body design technological process thereof |
| CN103566987A (en) * | 2013-11-18 | 2014-02-12 | 镇江四联机电科技有限公司 | Electroosmotic flow pump and design process for pump body thereof |
| CN104949789B (en) * | 2014-03-26 | 2017-10-31 | 中国科学院理化技术研究所 | A kind of fluid channel pressure sensor |
| CN104949789A (en) * | 2014-03-26 | 2015-09-30 | 中国科学院理化技术研究所 | Microchannel pressure sensor |
| CN103953532A (en) * | 2014-04-30 | 2014-07-30 | 中国计量学院 | Flow control method for micro fluid induction electro-osmotic metering pump |
| CN103953532B (en) * | 2014-04-30 | 2016-06-01 | 中国计量学院 | The flow control method of microfluid induction electric osmose volume pump |
| CN106593831A (en) * | 2015-10-19 | 2017-04-26 | 中国科学院理化技术研究所 | Non-contact electromagnetic micro pump device |
| CN106399091B (en) * | 2016-09-13 | 2019-01-08 | 哈尔滨工业大学 | The Cell capture chip of charge inducing electric osmose based on rotating electric field induction |
| CN106399091A (en) * | 2016-09-13 | 2017-02-15 | 哈尔滨工业大学 | Cell capturing chip based on inductive charge electro-osmosis induced by rotating electric field |
| CN109185107A (en) * | 2018-11-02 | 2019-01-11 | 北京机械设备研究所 | A kind of the liquid metal driving control system and control method of integrated Micropump micro-valve |
| CN109952011A (en) * | 2019-02-25 | 2019-06-28 | 中国科学院理化技术研究所 | Production method, electromagnetic shielding system and the chip detecting equipment of electromagnetic shielding system |
| CN109952011B (en) * | 2019-02-25 | 2020-07-14 | 中国科学院理化技术研究所 | Manufacturing method of electromagnetic shielding system, electromagnetic shielding system and chip detection equipment |
| WO2021047529A1 (en) * | 2019-09-11 | 2021-03-18 | 杭州未名信科科技有限公司 | Electroosmotic micropump apparatus and electroosmotic micropump apparatus group |
| CN111760599A (en) * | 2020-06-08 | 2020-10-13 | 广州大学 | Modular spliced microfluid transportation device |
| CN111760599B (en) * | 2020-06-08 | 2022-03-18 | 广州大学 | Modular spliced microfluid transportation device |
| CN113996357A (en) * | 2021-10-29 | 2022-02-01 | 北京理工大学 | Device for controlling liquid to flow directionally under internal heating condition of micro-fluidic chip pipeline |
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