CN110354926A - Electric osmose Micropump device - Google Patents
Electric osmose Micropump device Download PDFInfo
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- CN110354926A CN110354926A CN201910794995.6A CN201910794995A CN110354926A CN 110354926 A CN110354926 A CN 110354926A CN 201910794995 A CN201910794995 A CN 201910794995A CN 110354926 A CN110354926 A CN 110354926A
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- Prior art keywords
- fluid channel
- fluid
- electrode
- drive section
- electric osmose
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- 239000012530 fluid Substances 0.000 claims abstract description 330
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 27
- 239000012528 membrane Substances 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 7
- 229910000846 In alloy Inorganic materials 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- MPZNMEBSWMRGFG-UHFFFAOYSA-N bismuth indium Chemical compound [In].[Bi] MPZNMEBSWMRGFG-UHFFFAOYSA-N 0.000 claims description 6
- 210000000003 hoof Anatomy 0.000 claims description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052797 bismuth Inorganic materials 0.000 claims description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 3
- 239000002041 carbon nanotube Substances 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 229910021426 porous silicon Inorganic materials 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- -1 siloxanes Chemical class 0.000 claims description 2
- 230000010354 integration Effects 0.000 abstract description 5
- 238000005868 electrolysis reaction Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005370 electroosmosis Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 230000010412 perfusion Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229920005573 silicon-containing polymer Polymers 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 239000010839 body fluid Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000036647 reaction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
- B01L2400/0418—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic electro-osmotic flow [EOF]
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
- Reciprocating Pumps (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The present invention relates to microfluidic arts, provide electric osmose Micropump device, including porous media；First fluid fluid channel is formed with the first fluid channel drive section positioned at the first side of porous media, and in the end of first fluid fluid channel；Second fluid fluid channel is formed with the second fluid channel drive section positioned at second side of porous media, and in the end of second fluid fluid channel；Electrode fluid channel is arranged independently of first fluid fluid channel and second fluid fluid channel, forms potential difference between the first fluid channel drive section and the second fluid channel drive section.The electric osmose Micropump device increases the back pressure of electric osmose Micropump device by the way that porous media is arranged between first fluid fluid channel and second fluid fluid channel, expands its use scope, and flow stability is good, filling difficulty is small, small in size and easy of integration.And the generation that can avoid the electrolysis caused by contacting because of electrode and fluid, bubble and Joule heat, without considering that it is slow with flowing that flow velocity caused by bubble blocks runner reduces.
Description
Technical field
The present invention relates to microfluidic arts, provide a kind of electric osmose Micropump device.
Background technique
Micropump is a kind of driving device for accurately controlling fluid flowing, is widely used in the micro conveying of drug, life
During object chemical analysis, microreactor, fuel cell and microelectronics are cooling.Whether include moving component according to it, is divided into machinery
Decline pump and non-mechanical Micropump.Compared to mechanical Micropump, non-mechanical Micropump has that robustness is high, controllability is good, production is simple
Single, service life it is long and can uninterrupted pumping fluid the advantages that.
Electroosmotic pump in non-mechanical pump have production is simple, flow is continuous, flow velocity and direction are adjustable, movement-less part,
The features such as without mechanical wear.Therefore, electroosmotic pump is widely used in every field, especially biology, microelectronics and efficient liquid
In phase chromatography.The working principle of electroosmotic pump is electric osmose flow phenomenon.When fluid in fluid channel and flow path wall face contact, to keep micro-
Electroneutral in runner, runner wall surface will form electric double layer.In extra electric field, displacement occurs for the ion in electric double layer,
And drive solution in runner mobile, form electroosmotic flow.
Electroosmotic pump is divided into porous media filled type electroosmotic pump and fluid channel electroosmotic pump.Though porous media filled type electroosmotic pump has
Have the advantages that back pressure is high, flow velocity is big, but its flow stability is poor, filling difficulty is big, bulky and not easy of integration.Fluid channel electricity
Though seeping pump has many advantages, such as that production is simple, flow speed stability, process are easy, back pressure is low and the scope of application is small.
In addition, the electrode of traditional electroosmotic pump is directly contacted with by driving solution, cell reaction can occur for electrode, and generate
Bubble hinders liquid flowing.Therefore, for electrode frequently with noble metals such as platinum, iridium, silver, expensive and manufacture difficulty is big.Contact
The Joule heat that electrode generates in the solution can not only be increased by the temperature of driving liquid, can also destroy its characteristic.
Summary of the invention
The present invention is directed to solve at least one of the technical problems existing in the prior art or related technologies.
One of purpose of the invention is: providing a kind of electric osmose Micropump device, solves electric osmose existing in the prior art
Flow stability existing for pumping is poor, filling difficulty is big, bulky and not easy of integration, back pressure is low, the scope of application is small and electrode
Directly and by the problem of driving solution contact bring series.
In order to realize the purpose, the present invention provides a kind of electric osmose Micropump devices, comprising:
Porous media；
First fluid fluid channel, positioned at the first side of the porous media, and in the end of the first fluid fluid channel
It is formed with the first fluid channel drive section；
Second fluid fluid channel, positioned at second side of the porous media, and in the end of the second fluid fluid channel
It is formed with the second fluid channel drive section；
Electrode fluid channel is arranged independently of the first fluid fluid channel and second fluid fluid channel, micro- described first
Potential difference is formed between runner drive section and the second fluid channel drive section.
In one embodiment, the electrode fluid channel includes:
First electrode fluid channel, positioned at the first side of the porous media, and using the first fluid fluid channel as reference
It is symmetrical；
Second electrode fluid channel, positioned at second side of the porous media, and using the second fluid fluid channel as reference
It is symmetrical；
The first electrode fluid channel and second electrode fluid channel are each formed with liquid metal entrance and liquid metal outlet,
The liquid metal entrance and liquid metal outlet of the first electrode fluid channel are all connected with the high potential end of power supply, second electricity
The liquid metal entrance and liquid metal outlet of atomic runner are all connected with the low potential end of power supply.
In one embodiment, the first electrode fluid channel includes matching with the first fluid channel drive section shape
First electrode miniflow section, the first fluid channel drive section and the first electrode miniflow section are coaxially disposed；Second electricity
Atomic runner includes the second electrode miniflow section to match with the second fluid channel drive section shape, and second fluid channel is driven
Dynamic section and the second electrode miniflow section are coaxially disposed.
In one embodiment, the distance between the first fluid channel drive section and the first electrode miniflow section, with
And the distance between the second fluid channel drive section and the second electrode miniflow section are micron order or pass through micron order
Other hole connection.
In one embodiment, the first fluid channel drive section and the second fluid channel drive section are in rectangle, circle
Shape, the shape of a hoof, trapezoidal, diamond shape or abnormity.
In one embodiment, the porous media is perforated membrane.
In one embodiment, the material of the perforated membrane includes dimethyl silicone polymer, silica, silicon nitride, sun
In pole aluminium oxide, carbon nanotube, resin material and porous silicon any one or it is any a variety of.
In one embodiment, the thickness of the perforated membrane is between 1nm to 5mm.
In one embodiment, the first fluid fluid channel, second fluid fluid channel and electrode fluid channel are integrated in
On micro-fluidic chip.
In one embodiment, the liquid metal is that the mercury, gallium, gallium-indium alloy of liquid, gallium indium tin are closed under room temperature
Gold, bismuth, indium, tin, bismuth indium alloy or bismuth indium stannum alloy.
Technical solution of the present invention has the advantage that this kind of electric osmose Micropump device of the invention, first fluid fluid channel
The two sides of porous media are located at second fluid fluid channel, and then first fluid fluid channel and second fluid fluid channel are not
It is directly connected to, increases electric osmose Micropump dress by the way that porous media is arranged between first fluid fluid channel and second fluid fluid channel
The back pressure set expands its use scope.In addition, include this kind of electric osmose Micropump device of fluid fluid channel, it is more compared to tradition
Hole media filler formula electroosmotic pump, flow stability is good, filling difficulty is small, small in size and easy of integration.Also, due to electrode miniflow
It between fluid in road and fluid fluid channel and is not directly contacted with, and then can avoid the electricity caused by contacting because of electrode and fluid
The generation of solution, bubble and Joule heat, without considering that it is slow with flowing that flow velocity caused by bubble blocks runner reduces.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the schematic cross-sectional view of electric osmose Micropump device of the present invention；
Fig. 2 is the structural schematic diagram of electric osmose Micropump device in the embodiment of the present invention one；
Fig. 3 is the structural schematic diagram of electric osmose Micropump device in the embodiment of the present invention two；
Fig. 4 is the structural schematic diagram of electric osmose Micropump device in the embodiment of the present invention three；
In figure: 1, first fluid fluid channel；2, second fluid fluid channel；3, perforated membrane；4, first electrode fluid channel；5,
Two electrode fluid channels；6, liquid metal entrance；7, liquid metal outlet；8, fluid channel drive section；9, power supply；10, external wire.
Specific embodiment
Embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples.Following embodiment is used for
Illustrate the present invention, but cannot be used to limit the scope of the invention.
In the description of the present invention, it should be noted that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair
Limitation of the invention.In addition, term " first ", " second ", " third " are used for description purposes only, and it should not be understood as instruction or dark
Show relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " connected " " connects
Connect " it shall be understood in a broad sense, for example, it may be being fixedly connected, it may be a detachable connection, or be integrally connected；It can be machine
Tool connection, is also possible to be electrically connected；It can be directly connected, it can also be indirectly connected through an intermediary.For this field
For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Embodiment one
Referring to Figure 1, according to an embodiment of the invention, providing a kind of electric osmose Micropump device, including it is porous media, first-class
Body fluid channel 1, second fluid fluid channel 2 and electrode fluid channel.Wherein, first fluid fluid channel 1 is located at the first of porous media
Side, and the first fluid channel drive section is formed with (with reference to the fluid channel drive section in attached drawing in the end of first fluid fluid channel 1
8, wherein fluid channel drive section 8 includes the first fluid channel drive section and the second fluid channel drive section).Second fluid fluid channel 2
The second fluid channel drive section is formed in second side of porous media, and in the end of second fluid fluid channel 2.Electrode fluid channel
It is arranged independently of first fluid fluid channel 1 and second fluid fluid channel 2, is driven in the first fluid channel drive section and the second fluid channel
Potential difference is formed between section.
Wherein, what " electrode fluid channel is arranged independently of first fluid fluid channel 1 and second fluid fluid channel 2 " referred to is electricity
Atomic runner is not directly contacted with fluid fluid channel, and (in the case where no restriction, what is all referred to is first fluid fluid channel 1 and
Two fluid fluid channels 2) in fluid.
This kind of electric osmose Micropump device, first fluid fluid channel 1 and second fluid fluid channel 2 are located at the two of porous media
Side, and then first fluid fluid channel 1 and second fluid fluid channel 2 are not directly connected to, by first fluid fluid channel 1 and
Porous media is set between two fluid fluid channels 2 and increases the back pressure of electric osmose Micropump device, expands its use scope.In addition,
This kind of electric osmose Micropump device including fluid fluid channel, compared to conventional porous media filler formula electroosmotic pump, flow stability
Well, filling difficulty is small, small in size and easy of integration.Also, due between the fluid in electrode fluid channel and fluid fluid channel not
It directly contacts, and then can avoid the generation of the electrolysis caused by contacting because of electrode and fluid, bubble and Joule heat, without considering gas
Flow velocity caused by bubble blocks runner reduces slow with flowing.
Fluid fluid channel fills electrolyte solution, and the fluid channel inlet and outlet for connecting pumped fluid.Alternatively, fluid
Fluid channel is to pump a portion of the fluid channel of fluid.First fluid fluid channel 1 and second fluid fluid channel 2 are located at
Porous media two sides, also that is, porous media is between first fluid fluid channel 1 and second fluid fluid channel 2.
In one embodiment, electrode fluid channel includes first electrode fluid channel 4 and second electrode fluid channel 5.Wherein,
One electrode fluid channel 4 is located at the first side of porous media, and is referring to symmetrical with first fluid fluid channel 1.Second electrode
Fluid channel 5 is located at second side of porous media, and is referring to symmetrical with second fluid fluid channel 2.Combined with Figure 1 and Figure 2,
One electrode fluid channel 4 is located above, and second electrode fluid channel 5 is located below.First electrode fluid channel 4 and second electrode fluid channel
5 are each formed with liquid metal entrance 6 and liquid metal outlet 7, liquid metal entrance 6 and the liquid gold of first electrode fluid channel 4
Belong to the high potential end that outlet 7 is all connected with power supply 9, the liquid metal entrance 6 and liquid metal outlet 7 of second electrode fluid channel 5 are equal
Connect the low potential end of power supply 9.
Wherein, the liquid metal entrance 6 and liquid metal outlet 7 of first electrode fluid channel 4 and second electrode fluid channel 5,
It can be connected by external wire 10 with power supply 9, and power supply 9 preferably uses controllable electric power.
In first electrode fluid channel 4 and 5 inside filling liquid metal of second electrode fluid channel to form driving microelectrode.?
Potential difference is formed between first fluid fluid channel 1 and second fluid fluid channel 2, and then micro- in the first fluid channel drive section and second
Potential difference is formed between runner drive section.
In the case of this kind, first electrode fluid channel 4 and second electrode fluid channel 5 are separated by porous media, filling liquid gold
It is contactless between the driving microelectrode formed after category, and driving microelectrode and the fluid in fluid fluid channel formed is without directly connecing
Touching.
Certainly, potential difference is formed between the first fluid channel drive section and the second fluid channel drive section, first electrode is micro-
The distribution of runner 4 and second electrode fluid channel 5 is not limited by the example above, can be using disclosed in any prior art
Distribution form can also use any distribution form that can be derived by based on common sense known in the art, as long as can be
Potential difference is formed between first fluid channel drive section and the second fluid channel drive section.
In one embodiment, first electrode fluid channel 4 includes first to match with the first fluid channel drive section shape
Electrode miniflow section, the first fluid channel drive section and first electrode miniflow section are coaxially disposed；Second electrode fluid channel 5 includes and second
The second electrode miniflow section that fluid channel drive section shape matches, the second fluid channel drive section are coaxially set with second electrode miniflow section
It sets.
Fig. 2 is referred to, the first fluid channel drive section and the second fluid channel drive section are in rectangle, and the first fluid channel is driven
Dynamic section and the second fluid channel drive section are located at 2 end of first fluid fluid channel 1 and second fluid fluid channel.It is corresponding to it
, first electrode miniflow section shape and the first fluid channel drive section just as namely first electrode miniflow section shape and the first miniflow
Road drive section matches；Second electrode miniflow section shape and the second fluid channel drive section just as namely second electrode miniflow section shape
Shape matches with the second fluid channel drive section.
Also, since the first fluid channel drive section and first electrode miniflow section are coaxially disposed, and the second fluid channel drive section
It is coaxially disposed with second electrode miniflow section, thus the first fluid channel drive section is each parallel while each with first electrode miniflow section,
Second fluid channel drive section it is each parallel while each with second electrode miniflow section.
Design and production can be simplified by the way that the first fluid channel drive section and the second fluid channel drive section are designed to rectangle
Process flow.
Wherein, preferably the distance between the first fluid channel drive section and first electrode miniflow section and the second fluid channel are driven
The distance between dynamic section and second electrode miniflow section are micron order or are connect by the hole of micron level, liquid metal due to
Biggish surface tension can rest in electrode fluid channel.In the case of this kind, fluid channel drive section 8 (is limited not doing separately
In the case of, what fluid channel drive section 8 referred to is the first fluid channel drive section and the second fluid channel drive section) and electrode miniflow section
Between (in the case where not limiting separately, what electrode miniflow section referred to is first electrode miniflow section and second electrode miniflow section)
Apart from very little.
Be preferably placed at porous media two sides first electrode fluid channel 4 is parallel with second electrode fluid channel 5 namely liquid gold
Category forms parallel pole, can generate unidirectional parallel potential, in on-load voltage, between parallel pole to reach optimal electric osmose
Drive effect.
In one embodiment, porous media is perforated membrane 3.Wherein, the material of perforated membrane 3 can be polydimethylsiloxanes
In alkane, silica, silicon nitride, anodised aluminium, carbon nanotube, resin material and porous silicon etc. any one or it is any
It is a variety of.Certainly, the material of perforated membrane 3 is not limited by citing herein.In addition, perforated membrane 3 with a thickness of nanoscale to grade, example
If the thickness of perforated membrane 3 is between 1nm to 5mm.It is preferred that perforated membrane 3 with a thickness of one nanometer to several microns, and the thickness of perforated membrane 3
Degree is thinner, and one timing electric field strength of voltage is bigger, and the thickness for reducing perforated membrane 3 can reduce driving voltage.
In one embodiment, first fluid fluid channel 1, second fluid fluid channel 2 and electrode fluid channel are integrated in micro-
On fluidic chip.Certainly, meet electric osmose Micropump device in first fluid fluid channel 1, second fluid fluid channel 2 and electrode fluid channel
On the basis of basic functional principle, first fluid fluid channel 1, second fluid fluid channel 2 and electrode fluid channel can also use micro-
Other components except fluidic chip are as matrix.
Wherein, micro-fluidic chip body some materials include dimethyl silicone polymer, PMMA, quartz, glass and resinous wood
In material etc. any one or it is any a variety of.Wherein, what " micro-fluidic chip body part " referred to is driving microelectrode and more
Other parts except the medium of hole.
In one embodiment, the liquid metal in first electrode fluid channel 4 and second electrode fluid channel 5 is room temperature condition
Mercury, gallium, gallium-indium alloy, gallium-indium-tin alloy, bismuth, indium, tin, bismuth indium alloy or the bismuth indium stannum alloy of lower liquid.
Embodiment two
Fig. 3 is referred to, electric osmose Micropump device is the difference is that micro- in the electric osmose Micropump device and Fig. 2 of embodiment two
The shape of runner drive section 8 and electrode fluid channel.
In Fig. 3, the first fluid channel drive section and the second fluid channel drive section are rounded, corresponding, first electrode
Fluid channel 4 and second electrode fluid channel 5 are also rounded.
It is rounded by designing the first fluid channel drive section and the second fluid channel drive section, electrolyte solution can be made to exist
Perfusion is more easier and improves the case where solution runner corner is difficult to fill in fluid channel drive section 8.
Embodiment three
Refer to Fig. 4, electric osmose Micropump device in the electric osmose Micropump device and attached drawing 2 of embodiment three the difference is that
The shape of fluid channel drive section 8 and electrode fluid channel.
In Fig. 4, the first fluid channel drive section and the second fluid channel drive section are in the shape of a hoof, corresponding, the first electricity
Atomic runner 4 and second electrode fluid channel 5 are also in the shape of a hoof.
By being in the shape of a hoof by the first fluid channel drive section and the design of the second fluid channel drive section, electrolyte solution can be made
Perfusion is more easier and improves the case where solution runner corner is difficult to fill in fluid channel drive section 8.In addition to this, may be used also
So that field distribution when power-up is more uniform, compared to the electric osmose Micropump device in Fig. 2, the electric osmose Micropump device of the present embodiment
Driving force be improved.
In above-described embodiment, the first fluid channel drive section and the second fluid channel drive section preferably with completely just as shape
Shape.
Furthermore, it is desirable to which the shape of explanation, above-mentioned first fluid channel drive section and the second fluid channel drive section is not
It is restricted, such as the first fluid channel drive section and the second fluid channel drive section can be with trapezoidal, diamond shape or abnormity etc..
In above embodiments, when power supply 9 is opened, the wall surface of first fluid fluid channel 1 and the wall surface of second fluid fluid channel 2
On will form electric field perpendicular to porous media (such as perforated membrane 3) direction, the electric double layer of the microfluid on 3 wall surface of perforated membrane exists
Electroosmotic flow is formed under the vertical electric field, so that the fluid in fluid fluid channel be driven to flow.Change the positive and negative anodes and potential of power supply 9
The direction of motion and flow velocity size of fluid can be changed in size.
Electric osmose Micropump device in above embodiments, passes through reasonable Arrangement first fluid fluid channel 1, second fluid fluid channel
2, porous media, first electrode fluid channel 4 and second electrode fluid channel 5 are, it can be achieved that Multi-channel parallel connection Micropump.Multichannel herein
Parallel connection is through filling porous media between first fluid fluid channel 1 and second fluid fluid channel 2, and with big in porous media
Fine hole is measured to realize as corresponding fluid channel.Also, pass through the injection liquid metal formation liquid in electrode fluid channel
State metal microelectrode sputters to form microelectrode compared to traditional noble metal, have it is easy to operate, robustness is good, one-pass molding,
The advantages that at low cost.
The above embodiments are only used to illustrate the present invention, rather than limitation of the present invention.Although referring to embodiment to this hair
It is bright to be described in detail, those skilled in the art should understand that, to technical solution of the present invention carry out it is various combination,
Modification or equivalent replacement should all cover and want in right of the invention without departure from the spirit and scope of technical solution of the present invention
It asks in range.
Claims (10)
1. a kind of electric osmose Micropump device characterized by comprising
Porous media；
First fluid fluid channel is formed positioned at the first side of the porous media, and in the end of the first fluid fluid channel
There is the first fluid channel drive section；
Second fluid fluid channel is formed positioned at second side of the porous media, and in the end of the second fluid fluid channel
There is the second fluid channel drive section；
Electrode fluid channel is arranged, in first fluid channel independently of the first fluid fluid channel and second fluid fluid channel
Potential difference is formed between drive section and the second fluid channel drive section.
2. electric osmose Micropump device according to claim 1, which is characterized in that the electrode fluid channel includes:
First electrode fluid channel is referring to symmetrical positioned at the first side of the porous media, and with the first fluid fluid channel
Distribution；
Second electrode fluid channel is referring to symmetrical positioned at second side of the porous media, and with the second fluid fluid channel
Distribution；
The first electrode fluid channel and second electrode fluid channel are each formed with liquid metal entrance and liquid metal outlet, described
The liquid metal entrance and liquid metal outlet of first electrode fluid channel are all connected with the high potential end of power supply, and the second electrode is micro-
The liquid metal entrance and liquid metal outlet of runner are all connected with the low potential end of power supply.
3. electric osmose Micropump device according to claim 2, which is characterized in that the first electrode fluid channel include with it is described
The first electrode miniflow section that first fluid channel drive section shape matches, the first fluid channel drive section and the first electrode
The coaxial arrangement of miniflow section；The second electrode fluid channel includes the second electricity to match with the second fluid channel drive section shape
Atomic stream section, the second fluid channel drive section and the second electrode miniflow section are coaxially disposed.
4. electric osmose Micropump device according to claim 3, which is characterized in that the first fluid channel drive section and described the
The distance between one electrode miniflow section and the distance between the second fluid channel drive section and the second electrode miniflow section
It is micron order or is connected by the hole of micron level.
5. electric osmose Micropump device as claimed in any of claims 1 to 4, which is characterized in that first fluid channel
Drive section and the second fluid channel drive section are in rectangle, circle, the shape of a hoof, trapezoidal, diamond shape or abnormity.
6. electric osmose Micropump device as claimed in any of claims 1 to 4, which is characterized in that the porous media is
Perforated membrane.
7. electric osmose Micropump device according to claim 6, which is characterized in that the material of the perforated membrane includes poly dimethyl
In siloxanes, silica, silicon nitride, anodised aluminium, carbon nanotube, resin material and porous silicon any one or appoint
It anticipates a variety of.
8. electric osmose Micropump device according to claim 6, which is characterized in that the thickness of the perforated membrane 1nm to 5mm it
Between.
9. electric osmose Micropump device as claimed in any of claims 1 to 4, which is characterized in that the first fluid is micro-
Runner, second fluid fluid channel and electrode fluid channel are integrated on micro-fluidic chip.
10. electric osmose Micropump device as claimed in any of claims 2 to 4, which is characterized in that the liquid metal is
The mercury, gallium, gallium-indium alloy, gallium-indium-tin alloy, bismuth, indium, tin, bismuth indium alloy or bismuth indium stannum alloy of liquid under room temperature.
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| CN110354926B (en) | 2021-10-29 |
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