CN116116474A - Micropump array device and method of manufacturing the same - Google Patents
Micropump array device and method of manufacturing the same Download PDFInfo
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
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- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
- B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
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Abstract
The present disclosure provides a micropump array device and a method of manufacturing the same. The micropump array device includes: a plurality of micropumps having a variable volume pump chamber with an inlet and an outlet, the pump chamber being defined by opposed first and second lateral portions, and a sidewall, the micropump array means being operable to cause fluid flow in a first direction by controlling at least one of: the positions of the inlet and the outlet; and a shape of a first flow passage and a shape of a second flow passage, wherein the first flow passage and the second flow passage are located on a side of a lateral portion remote from the pump chamber. The micro pump array device can realize the directional flow of fluid by utilizing fluid mechanics through setting parameters such as an outlet, an inlet, a flow channel and the like of the pump cavity, thereby omitting a switch valve body structure of the micro pump and being beneficial to the miniaturization of the micro pump array device.
Description
Technical Field
The disclosure relates to the field of display technology, and in particular relates to a micropump array device and a preparation method thereof.
Background
The micropump is used as a core control element in a microfluidic system, and has wide application prospects in the fields of drug delivery, micro-fluid supply, precise control and the like. At present, most of micro pumps are made of piezoelectric materials and mainly comprise different devices such as piezoelectric vibrators, pump valves and pump bodies. The piezoelectric vibrator is bent and deformed by applying alternating current to both ends of the piezoelectric vibrator. When the piezoelectric vibrator is bent forwards, the volume of the pump cavity is increased, the pressure of fluid in the cavity is reduced, the pump valve is opened, and the fluid enters the pump cavity; when the piezoelectric vibrator bends reversely, the volume of the pump cavity is reduced, the pressure of fluid in the cavity is increased, the pump valve is closed, and the fluid is discharged. However, the structure of the micropump is still relatively complex, and particularly when the fluid to be transported is gas, a valve body needs to be designed to control the direction of the gas flow. Therefore, the structure is not beneficial to be integrated in small electronic devices such as mobile phones, virtual reality display devices and the like.
However, current micropump array devices and methods of making the same remain to be improved.
Disclosure of Invention
In one aspect of the disclosure, the disclosure provides a micropump array device. The micropump array device includes: a plurality of micropumps arranged in an array, said micropump having a variable volume pump chamber, said pump chamber having an inlet and an outlet, said pump chamber being defined by opposed first and second cross sections, and a sidewall between said first and second cross sections, said micropump array means being operable to cause fluid flow in a first direction from said inlet into said pump chamber and out through said outlet by controlling at least one of: the positions of the inlet and the outlet; the shape of the first runner and the shape of the second runner are positioned on one side of the transverse part far away from the pump cavity, one end of the first runner is provided with a runner inlet, and the other end of the first runner is connected with the inlet; one end of the second flow channel is provided with a flow channel outlet, and the other end of the second flow channel is connected with the outlet. The micro pump array device can realize the directional flow of fluid by utilizing fluid mechanics through setting parameters such as an outlet, an inlet, a flow channel and the like of the pump cavity, thereby omitting a switch valve body structure of the micro pump and being beneficial to the miniaturization of the micro pump array device.
Further, the surface of the first transverse part, which is far away from the side of the second transverse part, is provided with a piezoelectric component, the piezoelectric component comprises a first electrode, a second electrode and a piezoelectric layer positioned between the first electrode and the second electrode, and the first transverse part is configured to reciprocate relative to the inner side of the pump cavity under the driving of the piezoelectric component.
Further, the pump cavity is provided with two inlets and one outlet, the inlets and the outlets are positioned on one side of the second transverse part, and the outlet is positioned between the two inlets; the first flow passage and the second flow passage are both positioned at one side of the second transverse part far away from the pump cavity.
Further, the diameter of the pump cavity is 500-20000 μm, the depth of the pump cavity is 50-500 μm, the diameter of the second flow channel is 300-1500 μm, the diameter of the first flow channel is larger than the diameter of the second flow channel, the diameter of the second flow channel is 100-4000 μm, and the ratio of the length of the first flow channel to the diameter of the pump cavity is 0.3-0.6.
Further, the micro pump arrays are arranged on a first plane, the first flow channel and the second flow channel are arranged on two sides of the first plane, the shape of the first flow channel is configured to enable the pressure of the fluid at the inlet of the flow channel to be larger than the pressure at the inlet, and the shape of the second flow channel is configured to enable the pressure of the fluid at the outlet to be larger than the pressure at the outlet of the flow channel.
Further, the inner diameter of the first flow passage and the inner diameter of the second flow passage both increase in the first direction.
Further, the diameter of the pump cavity is 500-20000 μm, the depth of the pump cavity is 50-500 μm, the first flow passage and the second flow passage have expansion sections in the direction of the fluid flow, the expansion angle of the expansion sections is 10-30 °, the length of the expansion sections is 1-5mm, and the minimum diameter of the flow passages is 50-500 μm.
Further, the pump chamber has two inlets and one outlet, and the inlets, the outlets are all located at one side of the second lateral portion, the outlets are located between the two inlets, the first flow passage and the second flow passage are all located at one side of the second lateral portion away from the pump chamber, and the first flow passage and the second flow passage have expansion sections in the direction of fluid flow.
Further, the micro pump array device further comprises a scent material layer located at least one of the following positions: the pump cavity is internally provided with a pump cavity; one side of the flow channel inlet, which is far away from the pump cavity, is provided with a flow channel; and the side of the flow channel outlet, which is far away from the pump cavity.
In another aspect of the present disclosure, the present disclosure provides a method of making the micropump array device described previously. The method comprises the following steps: forming a plurality of first lateral parts, a plurality of second lateral parts, inlets and outlets of a plurality of pump chambers by using a patterning process, and forming pump chambers of a plurality of micro pumps by using side walls between the first lateral parts and the second lateral parts; and forming a plurality of first flow passages and second flow passages, and connecting the first flow passages and the second flow passages with the pump cavity.
Drawings
In the drawings, the same reference numerals refer to the same or similar parts or elements throughout the several views unless otherwise specified. The figures are not necessarily drawn to scale. It is appreciated that these drawings depict only some embodiments according to the disclosure and are not to be considered limiting of its scope.
FIG. 1 is a schematic diagram of a micropump array device according to one embodiment of the present disclosure;
FIG. 2 is a schematic view of a portion of a micropump array device according to another embodiment of the present disclosure;
FIG. 3 is a schematic view of a portion of a micropump array device according to another embodiment of the present disclosure;
FIG. 4 is a schematic view of a portion of a micropump array device according to another embodiment of the present disclosure;
FIG. 5 is a schematic view of a portion of a micropump array device according to another embodiment of the present disclosure;
FIG. 6 is a schematic view of a portion of a micropump array device according to another embodiment of the present disclosure;
FIG. 7 is a schematic illustration of a partial flow diagram for preparing a micropump array device in accordance with one embodiment of the present disclosure;
FIG. 8 is a schematic illustration of a partial flow diagram for preparing a micropump array device in accordance with one embodiment of the present disclosure;
fig. 9 is a schematic flow diagram of a process for fabricating a micropump array device in accordance with another embodiment of the present disclosure;
fig. 10 is a schematic flow diagram of a process for fabricating a micropump array device in accordance with another embodiment of the present disclosure;
FIG. 11 is a flow chart of a method for achieving scent reproduction using a micropump array device according to one embodiment of the present disclosure;
FIG. 12 is a schematic view of a portion of a micropump array according to one embodiment of the present disclosure;
FIG. 13 is a schematic view of a portion of a micropump array according to another embodiment of the present disclosure;
FIG. 14 is a schematic diagram of a micropump array according to one embodiment of the present disclosure;
fig. 15 is a schematic diagram of a micro pump array according to one embodiment of the present disclosure.
Detailed Description
Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in various different ways, and the different embodiments may be combined arbitrarily without conflict, without departing from the spirit or scope of the present disclosure. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.
In a first aspect of the present disclosure, embodiments of the present disclosure provide a micropump array device. Referring to fig. 1, and 2-6, the micropump array device includes a plurality of micropumps (only 1 is shown) arranged in an array, the micropump having a variable volume pump chamber 100, the pump chamber 100 having an inlet 110 and an outlet 120, the pump chamber 100 being formed by oppositely disposed first and second lateral portions 130, 140 and a side 150, the side wall 150 being located between the first and second lateral portions 130, 140. The micropump array device may direct fluid flow within the device in a first direction that may pass through the pump chamber 100 from the inlet 110 and toward the outlet 120. Specifically, the above-described function can be achieved by controlling the positions of the inlet and the outlet, and at least one of the shape of the first flow passage and the shape of the second flow passage.
It is specifically noted herein that, in this disclosure, the terms "directional flow", "fluid flow in a first direction", and the like are to be construed broadly. I.e., the power provided by the micropump array device is sufficient to cause a substantial portion of the fluid to flow in a specified direction (first direction). A small portion of the fluid may flow back in the direction opposite to the first direction, but the flow rate of the fluid flowing back is much smaller than the flow rate of the fluid flowing in the direction. For example, the flow rate of the returned fluid is 50% or less of the flow rate of the directionally-flowing fluid.
Referring to fig. 2-5, fig. 2-5 show top views of the first flow channel 300 and the second flow channel 400 and pump chamber 100. Wherein the first flow channel 300 and the second flow channel 400 are positioned at one side of the transverse part far away from the pump cavity, one end of the first flow channel 300 is provided with a flow channel inlet 310, and the other end is connected with the inlet 110; one end of the second flow path 400 has a flow path outlet 410 and the other end is connected to the outlet 120. The direction of fluid flow within the micropump array device is shown by the arrows in fig. 2-5.
Specifically, the micro pump array device can realize the directional flow of fluid by using fluid mechanics through setting parameters such as an outlet, an inlet, a flow channel and the like of a pump cavity, thereby omitting a switch valve body structure of a micro pump and being beneficial to miniaturization of the micro pump array device.
The specific structure of the micropump array is described in detail below according to specific embodiments of the present disclosure:
referring to fig. 1, the surface of the first lateral part 130 on the side remote from the second lateral part 140 has a piezoelectric element 200. The piezoelectric assembly 200 includes a first electrode 210, a second electrode 220, and a piezoelectric layer 230 therebetween, with the first lateral portion configured to reciprocate relative to the inside of the pump chamber under the drive of the piezoelectric assembly 200. That is, under the action of the first and second motors, the piezoelectric layer 230 vibrates up and down in the depth direction of the pump cavity 100, so as to drive the first transverse portion 130 to vibrate up and down, thereby realizing the volume change of the wall 100. The volume change is matched with the designs of the inlet and the outlet, the first flow channel and the second flow channel, so that fluids such as air flow and the like can flow directionally. Thus, the micropump array device can realize unidirectional flow of fluid in the device without arranging a micropump valve body. Particularly when the fluid is gas, the structure can better control the direction of the gas flow, so that the whole thickness of the micropump array device can be thinned, the structure is simplified, and meanwhile, the effective control of the flow direction of the gas flow is realized.
In one embodiment of the present disclosure, referring to fig. 6, the pump chamber 100 may have two inlets (110A and 110B as shown in the figures) and one outlet 120, with both the inlets and the outlets being located on the second lateral side and the outlets being located between the two inlets. Fluid enters the pump chamber 100 and exits through the outlet 120 in the direction indicated by the arrows in fig. 6. Referring to fig. 5, the first flow channels (300A and 300B) and the second flow channel 400 are both on the same side of the pump chamber 100, e.g., on the side of the second lateral portion remote from the pump chamber (not shown). Referring to fig. 5, in this embodiment, the inner diameters of the first flow channels 300A and 300B are larger than the inner diameter of the second flow channel 400. More specifically, the inlet and the outlet may be located on the same side of the pump chamber, the two inlets may be located on the same straight line, and the two first flow passages are connected in a straight line, and the inner diameters of the two first flow passages are consistent, so that a mixing space with a relatively large width is formed. The second flow path 400 may be perpendicular to the first flow path. This location distribution may create a vortex of air flow as the volume of the pump chamber 100 changes, thereby ensuring that air flow enters from both sides and exits from the middle.
Specifically, in this embodiment, the diameter of the pump chamber may be 500-20000 μm and the depth of the pump chamber 50-500 μm. The diameter of the second flow channel is 300-1500 mu m, and the diameter of the first flow channel is larger than that of the second flow channel. The diameter of the second flow passage is 100-4000 μm, and the ratio of the length of the first flow passage to the diameter of the pump chamber is 0.3-0.6. For example, the sum of the lengths of the two second flow channels may coincide with the diameter of the pump chamber, i.e. the length of the second flow channels may be about the radius of the pump chamber. Thus, the control capability of the micropump array device to the fluid flow direction can be further improved. The inventors have found that when the parameters of the pump chamber and the flow channel meet the above requirements, sufficient power can be provided to the fluid to achieve directional flow and to ensure that the fluid in which directional flow occurs has a certain flow rate and velocity. When the flow rate or flow velocity of the fluid flow is too small, the micro pump array device may be difficult to meet the fluid delivery requirements.
In some embodiments, the plurality of micropump arrays may be arranged in a first plane. The first flow path and the second flow path are arranged on both sides of the first plane, and the inlet and the outlet of the pump chamber are located on the first lateral side and the second lateral side, respectively, as shown in fig. 1. In this embodiment, the shapes of the first flow channel and the second flow channel can be configured to control the pressure intensity received by the fluid in the direction from the inlet of the flow channel to the inlet of the pump cavity, so as to further form the power for controlling the fluid flow, and realize the directional movement of the fluid without a valve body. Specifically, the shape of the first flow channel may be controlled such that the pressure experienced by the fluid at the inlet of the flow channel is greater than the pressure experienced at the inlet, and the shape of the second flow channel may be controlled such that the pressure experienced by the fluid at the outlet is greater than the pressure experienced at the outlet of the flow channel.
More specifically, referring to fig. 2 to 4, the inner diameter of the first flow passage 300 and the inner diameter of the second flow passage 400 both increase in the first direction. Thereby, a directional flow of fluid in a first direction may occur. Specifically, when the pressure difference between the inlet and the outlet of the pump cavity is the same, the pressure loss coefficient is smaller when the fluid enters the pump cavity from the first flow passage side during the process of pumping the fluid into the pump cavity, and the fluid flow speed is faster, so the flow rate is larger. And when one side of the second flow channel enters the pump cavity, the flow speed is slower and the flow is smaller due to backflow. So that a major part of the fluid can now enter the pump chamber from the side of the first flow channel. Similarly, during the pumping of fluid from the pumping chamber, the flow rate of fluid from the pumping chamber into the first flow path side is small and the flow rate from the pumping chamber into the second flow path side is large, so that a substantial portion of the fluid is transferred from the pumping chamber to the second flow path. Thus, the fluid can be conveyed from the first flow passage to the second flow passage through the pump cavity in a directional manner.
It should be specifically noted here that, in the present disclosure, the first direction is the direction in which the fluid is intended to flow, that is: enters the first flow channel through the flow channel inlet 310, sequentially passes through the inlet of the pump chamber 100 and the outlet 120 of the pump chamber 100, enters the second flow channel 400, and finally flows out from the flow channel outlet 410 of the second flow channel 400. When the first flow path 300 and the second flow path 400 are located at both sides of the first plane, respectively, the first direction (direction shown by an arrow in the drawing) shown in fig. 2 to 4 may deviate to some extent with respect to the first plane.
In this embodiment, the shape of the first and second flow channels 300, 400 can be designed to control the pressure to which the fluid is subjected at different locations within the flow channels, i.e., to control the pressure to which the fluid is subjected, thereby powering the flow of the fluid. For example, as shown in fig. 2, the inner diameter of the first flow channel 300 and the inner diameter of the second flow channel 400 may each increase linearly along the first direction. Alternatively, referring to fig. 3, both the inner diameter of the first flow channel 300 and the second flow channel 400 may have a plurality of expanded sections, i.e., in the direction along which the flow channel extends, the flow channel may have a plurality of sections with increasing inner diameters, and the inner diameter of the flow channel at the initial position of each section may be smaller than the inner diameter of the flow channel at the end position of the previous section, but in each section, the inner diameter of the flow channel should have a tendency to increase along the first direction. Thus, a plurality of points of pressure change may be provided for the fluid within both the first flow path 300 and the second flow path 400, corresponding to providing a plurality of "pumps" within the flow paths to power the fluid. Similarly, referring to fig. 4, the side walls of the flow channel may also be formed of curves. The first flow path 300 and the second flow path 400 may each be formed by overlapping a plurality of circles having sequentially increasing radii. Alternatively, it may be formed by overlapping a plurality of ellipses (not shown in the drawings) so long as the aforementioned power for directional movement of the fluid by controlling the pressure is satisfied.
The flow channel shapes shown in fig. 2-4 may also be combined with each other in some embodiments. For example, the first flow channel may be selected to be of the shape shown in fig. 2, and the second flow channel may not be of the shape shown in fig. 3 or fig. 4. As long as the fluid can be made to flow in the first direction, various combinations are not listed here.
In this case, the diameter of the pump chamber 100 may be 500-20000 μm and the depth of the pump chamber 100 may be 50-500 μm according to an embodiment of the present disclosure. The first flow channel and the second flow channel are provided with expansion sections in the direction of fluid flow, the expansion angle of the expansion sections is 10-30 degrees, the length of the expansion sections is 1-5mm, and the minimum diameter of the flow channels is 50-500 mu m. Thus, the control capability of the micropump array device to the fluid flow direction can be further improved. Similarly, when the parameters associated with the pump chamber and the flow channel meet the above requirements, sufficient power can be provided for the directional flow of the fluid.
It should be specifically noted that, in the present disclosure, the term "divergence angle" means an angle formed by extending directions of two opposite sidewalls of a flow channel. When the side wall of the flow channel is arc-shaped, the angle of the expansion angle at different positions of the flow channel is different. The expansion angle can be an included angle formed by the directions of the arc tangent lines of the two side walls.
In some embodiments, the pump chamber may further have two inlets and one outlet, the inlets and the outlet being located on a side of the second lateral portion, the outlet being located between the two inlets, the first flow passage and the second flow passage being located on a side of the second lateral portion remote from the pump chamber, the first flow passage and the second flow passage having diverging sections in a direction of fluid flow. That is, the positions of the inlet and the outlet and the shape of the flow passage can be utilized to form the power for controlling the fluid circulation. That is, the inlet and outlet of the micro pump array device may have the positions shown in fig. 6, while the flow channels may have the shapes shown in fig. 2 to 4.
In some embodiments, the fluid controlled by the micropump array device may be a gas. In this embodiment, the micropump array device further includes a layer of scent material. The layer of scented material may be located within the pumping chamber, on a side of the flow channel inlet remote from the pumping chamber, or on a side of the flow channel outlet remote from the pumping chamber. In some embodiments, the odor material layer may be disposed in one, two, or three of the above-described locations. For example, each of the plurality of micropumps may correspond to a layer of scent material. Thus, when the gas flows through the odor material layer, the gas having a specific odor can be brought out, thereby realizing the reproduction of the odor.
In particular, referring to fig. 11, the micropump array device may be used for VR, AR display or reproduction of odors during an audio-video playback multidimensional experience. For example, the micro pump array device can be mainly used for timing, quantifying and directionally supplying different odors when digital odors are played. Specific odors, such as floral odor, bouquet, automobile exhaust, smell in the air after rain and the like, which appear in audio and video can be sensed and analyzed by an odor sensor in advance, enter a processor to carry out digital coding, and the composite odors are coded into the mixture of the odors corresponding to different odor material layers. The processor then reproduces the odors by digitally encoding the different odors. The reproduced device emits through the odor diffusion device, thereby completing the space-time transfer of the odor from one place to another. For example, when the audio/video is played for a specific period of time, one or more micropumps in the micropump array device are controlled to operate, so that the gas in the specific flow channel flows in a predetermined direction, and the odor of the specific odor material layer is brought out. After mixing the various odors, the specific odor can be reproduced. The piezoelectric assembly of a particular micropump may be controlled to operate by the collocation of the stored layers of scent material and the amount of air flow. And the flow rate of air flow emitted by different odor material layers can be controlled by controlling the vibration amplitude of the piezoelectric assembly, so that the reproduction of the compound odor is realized.
Specifically, referring to fig. 12, in one embodiment, a layer of solid odor material may be placed behind the micropump, i.e., downstream of the output flow channel. The air flow from the micropump pump can thus be passed through the cartridge of the scented material and then released. Each scent material layer may correspond to a micro-pump. Each scent material layer may have a separate scent output channel, with multiple scent output channels eventually converging into one channel to effect release of the mixed scent. In this embodiment the release of the scented material may be controlled by controlling the switching of the different micropumps. The micropump is assembled with the material box in a separated mode, and the material box is replaced at any time as a consumable.
Alternatively, referring to fig. 13, a solid layer of odor material may be placed behind the micropump, each of which may share the same outlet. Each scent material layer also corresponds to a micro-pump to control the release of the scent from each scent material layer. It is thereby advantageous to produce as much different odors as possible while minimizing the odor release means.
Still alternatively, referring to fig. 14 and 15, a layer of scent material may be placed within the pump cavity 100 of the micro-pump. In the preparation of the micropump, a step of coating a solid odor material may be added, and a layer of the odor material may be formed in the pump chamber and/or the input flow channel or the output flow channel (the latter two are not shown in the figure), so that the air flow automatically takes out the odor when the micropump is started. This design is advantageous for further reducing the volume of the odour release device.
In the micro pump array device provided by the disclosure, the pump cavity size of the micro pump array device can be within hundreds of micrometers, and the inner diameter of the flow channel can be tens of micrometers. And thus may be integrated into small electronic devices including, but not limited to, cell phones or VR and AR wearable devices.
In another aspect of the present disclosure, the present disclosure provides a method of making the foregoing micropump array device. The method comprises the following steps: forming a plurality of first lateral parts, a plurality of second lateral parts, inlets and outlets of a plurality of pump chambers by using a patterning process, and forming pump chambers of a plurality of micro pumps by using sidewalls between the first lateral parts and the second lateral parts; and forming a plurality of first flow passages and second flow passages, and connecting the first flow passages and the second flow passages with the pump cavity.
The specific structure of the micropump array device has been described in detail above, and will not be described in detail here. It should be noted that the first and second cross portions of the pump chamber, the inlet and outlet of the pump chamber, and the side wall may be integrally formed, or may be prepared in a plurality of sub-steps. For example, a portion of the plurality of first cross-members, the side walls, and the inlet may be prepared simultaneously by a one-step process, and a portion of the plurality of second cross-members, the outlet, and the other portion of the side walls may be prepared simultaneously by a one-step process. The aforementioned micro pump array device can be formed by assembling the portion with the first cross portion and the portion with the second cross portion. Wherein providing a portion with a first lateral portion or a portion with a second lateral portion may further comprise the step of forming a piezoelectric assembly. In some embodiments, the micropump array device may be formed by a MEMS process. MEMS technology, i.e. microelectromechanical systems (Micro-Electro-Mechanical System), also known as microelectromechanical systems, microsystems, micromechanical etc., is the manufacture of systems with dimensions of a few millimeters or even smaller. The internal structure of the micro-electromechanical system is generally in the micrometer or nanometer level, and the micro-electromechanical system is suitable for manufacturing array devices with smaller volumes.
In particular, referring to fig. 7 and 8, in one embodiment, photoresist 10 may be first formed on a cleaned substrate 1100 by means including, but not limited to, spin coating, and the like. The substrate 1100 may be a silicon substrate. The photoresist 10 is then patterned to form a template for etching the pump chamber 100. Then, silicon is etched, and the flow channel (such as the first flow channel or the second flow channel) and the pump chamber 100 can be etched simultaneously. The flow channel and pump chamber 100 is filled with photoresist 10 for space occupation, and then a bottom electrode layer 210' is formed by sputtering on the photoresist 10 and the remaining substrate 1100 to form electrodes in the piezoelectric assembly. Subsequently, photoresist 10 may be spin coated over metal layer 210' and the layer of photoresist patterned to form a template for preparing the piezoelectric layer. The piezoelectric material layer 230 'and the top electrode layer 220' may be formed by a sputtering process, and then the excess piezoelectric material and top electrode material and photoresist may be removed by a process of stripping the photoresist 10, thereby forming the relevant structures in the piezoelectric assembly. Finally, the substrate is perforated to form an inlet 110 and an outlet 120 of the pump chamber 100, and photoresist in the pump chamber is released, thereby forming a complete micro pump.
Alternatively still, referring to fig. 9, the micro pump array device described above may be formed using an etched silicon bonding process. Specifically, the photoresist 10 may be first formed on the cleaned substrate 1100 by means including, but not limited to, spin coating, or the like. The substrate 1100 may be a silicon substrate. Subsequently, the bottom electrode layer 210' is sputter formed to form the electrodes in the piezoelectric assembly and the photoresist 10 is formed, and the photoresist 10 is patterned to form a template for etching the piezoelectric assembly. The piezoelectric material layer 230 'and the top electrode layer 220' may be formed over the photoresist 10 by a sputtering process, and then the piezoelectric layer 230 and the second electrode 220 of the piezoelectric element may be formed by lift-off of the photoresist 10. An inlet 110 may then be formed into the pump chamber 100. Subsequently, spin coating of the photoresist 10 and formation of the pump chamber template are performed on another substrate, i.e., the second substrate 1200 (e.g., a silicon substrate as well), and the second substrate 1200 is etched to form the pump chamber and the outlet 120. The formation of the flow channel may be synchronized with the pump chamber, and then the excess photoresist 10 is removed, and finally the substrate 1100 and the substrate 1200 formed with the related structures are combined by a bonding technique, thereby obtaining the micro pump array device.
In some embodiments, the micropump array device may also be formed by a polymer molding process. In this embodiment, the portion of the material forming the pump chamber may be a polymer, such as PDMS, or other formable thermoplastic polymer material, such as may be formed in one step by a process including, but not limited to, hot pressing, extrusion, etc., as well as the outlet, inlet and/or flow channels. Alternatively, the pump chamber may be formed by splicing two substrates in a manner similar to that shown in fig. 9. In this embodiment, the two substrates may be made of polymer materials, and the relevant flow channels, the first and second lateral portions, and the outlet and inlet may be formed by hot pressing, extrusion, or the like. Then, the two substrates are bonded by thermoplastic technology between the polymer materials.
Alternatively, referring to fig. 10, a bottom electrode layer 210' and a photoresist 10 may be first formed on a cleaned substrate 1100 (which may be a silicon substrate), and the photoresist 10 may be patterned. The piezoelectric material layer 230 'and the top electrode layer 220' may then be sputter formed, and excess piezoelectric material and top electrode material, as well as the photoresist 10, may be removed by a lift-off process. The photoresist 10 may then be spin coated onto a new substrate, i.e., the second substrate 1200 (which may be a silicon substrate), where the photoresist 10 occupies the pump cavity and thus may be thicker. The mold may then be filled with PDMS material to form the third substrate 1300, and the mold may be peeled off to simultaneously form the flow channels, the outlet 120, and portions of the pump cavity on the third substrate 1300. Finally, the substrate 1100 with the related structure and the third substrate 1300 are bonded to form a complete micro pump.
The micro pump array device with smaller flow channel size can be formed by using the MEMS, the size of the device is miniaturized, the pump cavity size of the micro pump array device obtained by the method can be within hundreds of micrometers, and the inner diameter of the flow channel can be tens of micrometers. And thus may be integrated into small electronic devices including, but not limited to, cell phones or VR and AR wearable devices.
In the description of the present specification, it should be understood that the terms "center," "thickness," "upper," "lower," "front," "rear," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like indicate an orientation or a positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present disclosure.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present disclosure, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present disclosure, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.
In this disclosure, unless expressly stated or limited otherwise, a first feature being "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.
The above disclosure provides many different embodiments or examples for implementing different structures of the disclosure. The components and arrangements of specific examples are described above in order to simplify the present disclosure. Of course, they are merely examples and are not intended to limit the present disclosure. Furthermore, the present disclosure may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed.
The above is merely a specific embodiment of the disclosure, but the protection scope of the disclosure is not limited thereto, and any person skilled in the art can easily think of various changes or substitutions within the technical scope of the disclosure, which should be covered in the protection scope of the disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (10)
1. A micropump array device, comprising:
a plurality of micropumps arranged in an array, the micropump having a variable volume pump chamber with an inlet and an outlet, the pump chamber being formed around a first lateral portion, a second lateral portion, and a sidewall between the first and second lateral portions, disposed opposite each other,
the micropump array device may be configured to cause fluid flow in a first direction from the inlet into the pump cavity and out through the outlet by controlling at least one of:
the positions of the inlet and the outlet; and
the shape of the first flow channel and the shape of the second flow channel, wherein,
the first flow passage and the second flow passage are positioned at one side of the transverse part far away from the pump cavity, one end of the first flow passage is provided with a flow passage inlet, and the other end of the first flow passage is connected with the inlet; one end of the second flow channel is provided with a flow channel outlet, and the other end of the second flow channel is connected with the outlet.
2. The micro pump array device of claim 1, wherein the surface of the first lateral portion on the side away from the second lateral portion has a piezoelectric element,
the piezoelectric assembly includes a first electrode, a second electrode, and a piezoelectric layer therebetween,
the first transverse part is configured to reciprocate relative to the inner side of the pump cavity under the drive of the piezoelectric component.
3. The micropump array device of claim 2, wherein the pump cavity has two of the inlets and one of the outlets, and wherein the inlet and the outlet are both located on the second lateral side, and the outlet is located between the two inlets;
the first flow passage and the second flow passage are both positioned at one side of the second transverse part far away from the pump cavity.
4. A micro pump array device according to claim 3, wherein the diameter of the pump cavity is 500-20000 μm, the depth of the pump cavity is 50-500 μm, the diameter of the second flow channel is 300-1500 μm, the diameter of the first flow channel is larger than the diameter of the second flow channel, the diameter of the second flow channel is 100-4000 μm, and the ratio of the length of the first flow channel and the diameter of the pump cavity is 0.3-0.6.
5. The micro pump array device of claim 2, wherein a plurality of the micro pump arrays are arranged on a first plane, the first flow channels and the second flow channels are arranged on both sides of the first plane,
the first flow passage is shaped such that the fluid is subjected to a pressure at the inlet of the flow passage that is greater than the pressure at the inlet,
and the second flow passage is shaped such that the fluid is subjected to a pressure at the outlet that is greater than the pressure at the outlet of the flow passage.
6. The micropump array device of claim 5, wherein the inner diameter of the first flow passage and the inner diameter of the second flow passage both increase in the first direction.
7. The micro pump array device of claim 5, wherein the diameter of the pump cavity is 500-20000 μm, the depth of the pump cavity is 50-500 μm, the first flow channel and the second flow channel have a diverging section in the direction of the fluid flow, the diverging angle of the diverging section is 10-30 °, the length of the diverging section is 1-5mm, and the minimum diameter of the flow channel is 50-500 μm.
8. The micropump array device of claim 2, wherein the pump cavity has two of the inlets and one of the outlets, and wherein the inlets and the outlets are each located on a side of the second lateral portion, the outlets are located between the two inlets, and wherein the first flow passage and the second flow passage are each located on a side of the second lateral portion remote from the pump cavity, the first flow passage and the second flow passage having an expansion section in a direction in which the fluid flows.
9. The micropump array device of any of claims 1-8, further comprising a layer of scent material located at least one of:
the pump cavity is internally provided with a pump cavity;
one side of the flow channel inlet, which is far away from the pump cavity, is provided with a flow channel;
and the side of the flow channel outlet, which is far away from the pump cavity.
10. A method of making the micropump array device of any one of claims 1-9, comprising:
forming a plurality of first lateral parts, a plurality of second lateral parts, inlets and outlets of a plurality of pump chambers by using a patterning process, and forming pump chambers of a plurality of micro pumps by using side walls between the first lateral parts and the second lateral parts;
and forming a plurality of first flow passages and second flow passages, and connecting the first flow passages and the second flow passages with the pump cavity.
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