CN2809266Y

CN2809266Y - Integrated micro-fluid pump

Info

Publication number: CN2809266Y
Application number: CN 200520097103
Authority: CN
Inventors: 吴健康
Original assignee: Huazhong University of Science and Technology
Current assignee: Huazhong University of Science and Technology
Priority date: 2005-07-07
Filing date: 2005-07-07
Publication date: 2006-08-23
Anticipated expiration: 2015-07-07

Abstract

The utility model relates to an integrated micro-fluid pump which belongs to micro-fluid components of biomedicine and integrates multiple functions of fluid driving, mixing and chemical reaction so as to simplify the structure of a micro-analytical system and reduce cost. The utility model comprises a silicon substrate and a bottom closing glass sheet which is bonded with the silicon substrate, wherein a pump cavity, two inlet diffusion tube channels and one outlet diffusion tube channel which are connected with the pump cavity are produced on the silicon substrate with a photolithography method; the surface of the silicon substrate is provided with a liquid inlet hole and a liquid outlet hole which are respectively connected with the ends of the two inlet diffusion tube channels and the outlet diffusion tube channel; a piezoelectric sheet is pasted at the position on the surface of the silicon substrate facing the pump cavity; an electric heating metal sheet is pasted at the position of the pump cavity of the bottom closing glass sheet. When the utility model makes the biological solutions and chemical reagent solutions flow through the micro-pump cavity, the mixing and the chemical reaction can be completed so as to omit the single mixing reaction cavity structure, to greatly simplify the micro-analytical system structure, to reduce the cost by 20% to 30% in expectation, and to have better operational reliability.

Description

Integrated micro-fluid pump

Technical field

The utility model belongs to biomedical microfluid components and parts, particularly micro-fluid pump.

Background technique

General bio-medical analysis comprises sample pretreatment, mixing reaction and separates and detect three basic steps, these three analytical procedures are integrated in the microfluidic analytical system, to replace traditional laboratory work, Here it is lab-on-a-chip (Lab-on-a-chip) or be micro-full analytical system (Micro Total Analytical System, μ TAS).This microfluid system is made up of microfluid components and parts such as micro-fluid pump, little valve, microcontroller, little mixing reactor, Capillary Electrophoresis and the microfluidic channel networking that connects them.Biochemical analysis is that fluid is finished in the continuous-flow process in micro-system, and micro-fluid pump provides the dynamical element of liquid continuous-flow.

Various ways such as the mechanical type Micropump has that piezoelectricity, static, heat drive, pneumatic, superconduction and memory alloy, wherein the piezoelectric micromotor fluid pump is most widely used, its piezo-electric sheet drives the silicon fiml periodic vibration under action of alternative electric field, and then the volume and the pressure of change pump chamber, under the guiding of control valve, driving fluid produces directed flow.The early stage valve micro-fluid pump that has is made complexity, and the life-span is short, the cost height.The valveless micro-fluid pump adopts little diffusing tube to replace closable control valve, it farthest reduces movable mechanical part, because the fluid energy Changing Pattern of two flow directions of little diffusing tube is different with flow resistance, the fluid flow of dispersal direction is greater than the flow of shrinkage direction, the mean flowrate of one-period is non-vanishing, and this makes the Valveless piezoelectric micro-fluid pump have the directional stream-guidance ability.Micropump is imported and exported and be need not pressure difference.Because its processing simple in structure, reliable, easy, advantage that cost is low, Valveless piezoelectric piezoelectric micromotor fluid pump are used in a large number, see that [1] thank to hypo in micro-analysis system, Chen Yuanling. the numerical simulation of micro valveless pump and parameter designing, fluid machinery, 2000,30 (1): 11-14; [2] thank to hypo, Chen Yuanling. the flow performance emulation and the experimental research of micro valveless pump, mechanical engineering journal, 2002,38 (7): 54-57; [3] Anders Olsson, G ran Stemme, Erik Stemme.Numerical and experimental studies of flat-walled diffuser elements forvalve-less micropumps[J] .Sensors and Actuators.A, 2000,84:165-175; [4] Jiang X.N, Zhou Z.Y.Micronozzle/diffuser flow and its applicationin valve-less pumps[J] .Sensors and Actuators.A, 1998,70:81-87; [5] Amos Ullmann, Ilan Fono and Yehuda Taitel.A Piezoelectric Valve-LessPump-Dynamic Model[J] .Journal of Fluids Engineering.2001,123:92-98; [6] Amos Ullmann and Ilan Fono.The Piezoelectric Valve-LessPump-Improved Dynamic Model[J] .Journal of MicroelectromechanicalSystem, 2002,11 (6): 655-664; [7] Amos Ullmann.The piezoelectricvalve-less pump performance enhancement analysis[J] .Sensors andActuators.A, 1998,69:97-100; [8] Anders Olsson, Goran Stemme andErik Stemme.A valve-less planar fluid pump with two pump chambers[J] .Sensors and Actuators A, 1995,47:549-556.9:34-44.

The mixing reaction of biological solution and chemical reagent is an important step of biochemical analysis.In microfluidic analytical system, liquid flow velocity is very low, generally belongs to the low reynolds number Laminar Flow.If the liquid mixing relies on molecule self to spread and finishes, efficient is very low.Realize that it is the key of biochemical analysis that high efficiency liquid mixes.In micro-system, liquid reactant mixture generally carries out in independent mixing reaction chamber.In order to improve the liquid mixing efficiency, can utilize machinery or electromagnetism periodic perturbation, improve the effect that liquid mixes in mixing chamber manufacturing " confusion " flowing state, see [9] Johnson T.J., Ross D, Locascio L.E., Rapid microfluidic mixing, Anal.Chem., 74:45～51,2002, [10] Rife J.C., Bell M.I., Kim W.J., et al., Miniaturevalveless ultrasonic pump and mixers, Sensors and Actuators, A:physical, 86:135～140,2000, [11] Yang Z., Goto H., Matsumoto M., et al., Activemicromixers for microfluidic systems using lead-zirconate (PZT)-generatedultrasonic vibration, Electrophoresis, 21:116～119,2000, [12] Liu H.R., Stremler M.A., Sharp K.V., Olsen M.G, Santiago J.G, Atrian R.Aref J., H., Beebe D.J., Passive mixing in a three-dimensional serpentinemicrochannel, J.MEMS, 9:190～197,2000; [13] Bertsch A., Heimgartner S., Conssean P., Renand P., Static micromixers based on larger-scale industrialmixer geometry, Lab.On a Chip, 1:56～60,2000; [14] Gobby D., AngeliP., Gavriilidis A., Mixing characteristics of T-type microfluidic mixers, J.Micromechanics, Microengineering, 11:126～132,2001.Its shortcoming is that additional dynamo-electric disturbance device must be provided, and increases micro-analysis system structural complexity and cost of production.

Micropump in the micro-analysis system only has the fluid drives simple function mostly at present, as 02,153,470 1 kinds of piezoelectric pumps of number of patent application with novel high-frequency valve, number of patent application 02117352 high frequency valve piezoelectric pump and pump chamber design method thereof, number of patent application 02275088 multiple-cavity piezoelectric film driven pump, number of patent application 02132855 multiple-cavity piezoelectric film driven pump, number of patent application 200410043699 valve free pumps and packaging method thereof, the Micropump of the one-way valve of the no moving member of number of patent application 03264486 band, the Micropump of the one-way valve of the no moving member of number of patent application 03137756 band, number of patent application 03116069 band hangs the unidirectional liquid Micropump of monolithic type of the little valve of T font valve film, unidirectional liquid Micropump of number of patent application 02150822 biplate type and manufacture method thereof, all are single fluid drives function Micropumps, do not relate to liquid and mix, the multi-functional problem of chemical reaction.

Summary of the invention

The utility model proposes a kind of integrated micro-fluid pump, collector drives, mixes, chemical reaction is multi-functional to be one, allow biological solution and chemical reagent solution in the Micropump pump chamber of flowing through, finish and mix and chemical reaction, i.e. many usefulness of a pump, thus save independent mixing reaction cavity configuration, so that the micro-analysis system structure is greatly simplified, reduce cost.

Integrated micro-fluid pump of the present utility model, comprise silicon chip and with the back cover glass sheet of its bonding, it is characterized in that two import diffusing tube passages, an exit cone passage of adopting photoetching method to prepare pump chamber and be communicated with on the described silicon chip with it; The surface of silicon chip has liquid influent hole and liquid osculum, and the end with two import diffusing tube passages and exit cone passage is communicated with respectively; The silicon chip surface is pasted with piezo-electric sheet over against the pump chamber position; Back cover glass sheet pump chamber position is pasted with the electric heating tinsel.

Described multifunctional all micro-fluid pump, it is further characterized in that: described two import diffusing tube passages evenly distribute with respect to the direction of exit cone passage; Shrink from the pump chamber to the inlet end face gradually the rectangular cross-section of two import diffusing tube passages; The rectangular cross-section of described exit cone passage enlarges from the pump chamber to the exit end face gradually.

The utility model, is finished and is mixed and chemical reaction when flowing through the Micropump pump chamber by biological solution and chemical reagent solution, and promptly a pump is used more.Thereby save independent mixing reaction cavity configuration, this makes the micro-analysis system structure greatly simplify, and reduces cost.Adopt the utility model, the cost of micro-analysis system is expected to reduce by 20%～30%, and has better functional reliability.

Adopt computation fluid dynamics CFD software FLUENT that the utility model is carried out numerical simulation, the result shows that pump chamber internal flow state is very chaotic, shows that this micro-fluid pump possesses very effective liquid driven and mixed function simultaneously.

Description of drawings

Fig. 1 is a front section view of the present utility model;

Fig. 2 is a plan view of the present utility model.

Embodiment

As depicted in figs. 1 and 2: adopt photoetching, engraving method prepares pump chamber 8, the first import diffusing tube passage 1, second import diffusing tube passage 2 and the exit cone passage 3 on silicon chip 11; Import and export at silicon chip bores liquid influent hole 4, liquid osculum 5; Use epoxy resin that piezo-electric sheet 6 is sticked on the silicon fiml 7; With epoxy resin electric heating tinsel 9 is sticked on the back cover glass sheet 10; Last silicon chip 11-back cover glass sheet 10 bondings; Back cover glass sheet 10 adopts medical glass Pyrex.

Working principle: the biological solution of micro-fluid pump liquid influent hole 4 and upstream, the chemical reagent solution storing cavity connects, circular piezoelectric sheet 6 upper and lower surfaces connect alternating source, under action of alternative electric field, excite circular silicon fiml periodic vibration about in the of 7, make the volume and the pressure cyclically-varying of pump chamber 8, drive liquid alternated discharge and suction, liquid is rolled up and down in pump chamber, naturally form the very flowing state of " confusion ", this helps liquid and fully mixes.Because the inhalation flow of import diffusing tube passage 1,2 is greater than discharge flow rate, the discharge flow rate of exit cone passage 3 is greater than inhalation flow, and this makes Micropump have the directional stream-guidance ability.Biological solution and chemical reagent solution enter pump chamber 8 by import diffusing tube passage 1,2 respectively simultaneously, realize fully mixing and carrying out chemical reaction under the flowing state of " confusion ".Electric heating tinsel 9 connects the power supply heating, and the temperature that chemical reaction requires is by 9 controls of electric heating tinsel.Last mixing reaction resultant solution is discharged by exit cone passage 3, and liquid osculum 5 downstreams connect separates detection part (as the capillary electrophoresis separation passage).Micropump flow size is controlled by the voltage and the frequency of extra electric field.Chemical reaction velocity is by flow size and the control of electric heating tinsel temperature.

Claims

1. integrated micro-fluid pump, comprise silicon chip and with the back cover glass sheet of its bonding, it is characterized in that two import diffusing tube passages, an exit cone passage of adopting photoetching method to prepare pump chamber and be communicated with on the described silicon chip with it; The surface of silicon chip has liquid influent hole and liquid osculum, and the end with two import diffusing tube passages and exit cone passage is communicated with respectively; The silicon chip surface is pasted with piezo-electric sheet over against the pump chamber position; Back cover glass sheet pump chamber position is pasted with the electric heating tinsel.

2. integrated micro-fluid pump as claimed in claim 1 is characterized in that: described two import diffusing tube passages evenly distribute with respect to the direction of exit cone passage; Shrink from the pump chamber to the inlet end face gradually the rectangular cross-section of two import diffusing tube passages; The rectangular cross-section of described exit cone passage enlarges from the pump chamber to the exit end face gradually.