CN102671572A - Piezoelectrically actuated micro-mixer, manufacturing method and control method of piezoelectrically actuated micro-mixer - Google Patents
Piezoelectrically actuated micro-mixer, manufacturing method and control method of piezoelectrically actuated micro-mixer Download PDFInfo
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Abstract
The invention discloses a piezoelectrically actuated micro-mixer, a manufacturing method and a control method of the piezoelectrically actuated micro-mixer, belonging to the technical field of a micro-mixer. With the adoption of the micro-mixer, a micro-fluid drive unit (namely a piezoelectric pump) and a micro-mixing unit (namely a mixing runner) are integrated into a whole via an overall PDMS (polydimethylsiloxan) substrate; a single chip piezoelectric vibrator and a one-way valve block are encapsulated together with the PDMS substrate to form the piezoelectric pump; a glass base plate is encapsulated together with the PDMS substrate to form the mixing runner; and the piezoelectric vibrator is stimulated by adopting different voltages, frequencies, different waveforms and phase staggered drive electric signals so as to achieve high-frequency pulsating displacement mixing of the micro-fluid in a micro-mixing runner. With the adoption of the piezoelectrically actuated micro-mixer, the defects of low mixing efficiency, long time and the like caused by that the micro-fluid is mixed by laminar diffusion under a micro-scale are effectively overcome, so that efficient turbulent mixing is realized. The piezoelectrically actuated micro-mixer disclosed by the invention has the advantages of being simple in manufacturing method, low in cost, high in mixing efficiency, short in time, small in volume and easy in integration, and capability of widely applying to the fields such as analytical chemistry, micro-chemical system, environment monitoring, life science and the like.
Description
Technical field
The invention belongs to the Microfluidic Mixing technical field, be specifically related to a kind of Piezoelectric Driving micro-mixer and preparation method thereof and control method.
Background technology
Micro-mixer is used to realize the abundant mixing of differential responses thing under the minute yardstick condition as the vitals of microfluidic system, uses more and more widely in fields such as microanalytical chemistry, little chemical system, life sciences, is showing good prospects for application.
Realize under the minute yardstick that effectively mixing fast of microfluid is difficult; Because the characteristic size of microfluidic system belongs to micron order, Reynolds number less (Re=0.1～100), fluid keeps laminar condition; Mix the molecular diffusion effect that places one's entire reliance upon, need very long distance just can mix with the time.When processing comprises macromolecular reagent, realize mixing fully to become more difficult especially.
Many researchers upset the flow field through changing flow passage structure or applying measure such as external disturbance, increase the turbulent flow ratio in the fluid, improve little mixing efficiency.At present according to whether the needs external energy brings out mixing, micro-mixer is divided into initiatively two kinds of micro-mixers and passive micro-mixer usually.Passive micro-mixer adopts the passage with complex geometry to form chaotic flow usually, strengthens molecular diffusion and convection current between microfluid, thereby increases its effective contact area, improves the mixing efficiency of fluid.Shortcoming: difficulty of processing is big, and mixing efficiency is low, mixes poor controllability; Initiatively micro-mixer needs external energy to bring out to mix, comprising: little stirring, pressure disturbance, sound wave disturbance, electrohydrodynamic and magneto hydrodynamic driving etc.Though initiatively little hybrid mode has mixing efficiency height, short, the mixing controllability advantages of higher of incorporation time; But in numerous active mixer based on different mixing mechanisms, still exist as: operating voltage is high, mixing material is had heating, structure and complex manufacturing technology in dielectricity or polarizable requirement, the work, is difficult for problems such as integrated.
Literature search through to prior art is found: U.S. Patent number is: US007942568B1; Proprietary term: based on the active micro-mixer (ACTIVE MICROMIXER USING SURFACE ACOUSTIC WAVE STREAMIGN) of surface acoustic wave; This patent discloses a kind of active micro-mixer that utilizes surface acoustic wave; The effect sound wave is a R wave; Through applying RF excited and take place, cause fluid channel inner fluid acoustic streaming to produce thereby on piezoelectric substrate, propagate to being positioned at interdigital transducer on the piezoelectric substrate.This micro-mixer can mix the laminar flow fluid of inactive liquid or low Re number.But still have following shortcoming: complicated integral structure except the surface acoustic wave generating means, still needs syringe pump to drive; Volume is bigger, is not easy to integrated and microminaturization; Cost of manufacture is higher; There is work noise etc.U.S. Patent number is: US20060219307A1, proprietary term: micro mixing device and mixed method (MICROMIXER APPARATUS AND METHOD THEREFOR) disclose a kind of active micro-mixer that is used for microfluid system.This micro-mixer combines reciprocating pump and fluid device to may be done to the mixing of few two kinds of fluids.When reciprocating pump was in forward stroke, micro-mixer utilized the influence of two group pulses stream to mix.And when reciprocating pump was in backward stroke, micro-mixer utilized eddy current to mix, and two groups of fluids also can utilize mass diffusion to mix through the class flake structure simultaneously.But there is following shortcoming: responsive to the output back pressure; Micropump does not have by property; At the mixing initial stage, need debugging operations such as pump priming; Mixing capacity and mixed mode are limited; It is not high to mix degree of controllability.Therefore, the fluid under the minute yardstick mixes still has a large amount of problems to need to solve.
Summary of the invention
The objective of the invention is to overcome the deficiency that present active micro-mixer exists; A kind of Piezoelectric Driving micro-mixer and preparation method thereof and control method are proposed; To improve the mixed effect and the speed of fluid under the minute yardstick; Give full play to advantages such as active micro-mixer mixed high-efficient, controllable process, have simultaneously that structure and preparation method are simple, cost is low, volume is little, be easy to advantages such as integrated.
Piezoelectric Driving micro-mixer of the present invention; Comprise PDMS substrate, glass film plates, single-chip piezoelectric vibrator and check valve sheet; It is characterized in that: microfluid driver element (that is: piezoelectric pump) and little mixed cell (that is: mixing runner) are integrated in one by a whole PDMS substrate; Single-chip piezoelectric vibrator and check valve sheet constitute piezoelectric pump with the PDMS substrate package, and glass film plates constitutes the mixing runner with the PDMS substrate package; Piezoelectric vibrator adopts different voltages, frequency, different wave and phase cross-over formula to drive the signal of telecommunication and encourages, and realizes that microfluid dither dislocation type in little mixing runner mixes.
Piezoelectric Driving micro-mixer according to the invention is arranged in the micro-mixer input by the above piezoelectric pump of at least two groups, can realize the abundant mixing of two or more at least fluids.
Blender substrate according to the invention adopts the PDMS material, and when structural design and making, the blender substrate simultaneously is provided with reagent import cushion chamber, and cushion chamber length slightly is longer than piezoelectric pump outlet length, leaves demoulding space during for the PDMS die casting.
Piezoelectric pump according to the invention can adopt single cavity list piezoelectric vibrator, the two piezoelectric vibrators of single cavity, at least two structures such as multi-cavity body connection in series-parallel that piezoelectric vibrator forms.
Piezoelectric pump according to the invention adopts to become design of rigidity valve block and layout, is aided with parabolic cavity body structure, increases substantially piezoelectric pump output pressure and flow.It is characterized in that: inlet valve rigidity is minimum, and intermediate valve rigidity is the highest, and outlet valve rigidity is placed in the middle.
Check valve sheet according to the invention adopts the beam type structure, and the valve block likeness in form is " 8 " word, and the centering location reduces the dead angle volume in the cavity volume change procedure simultaneously when being convenient to assemble.
Check valve sheet according to the invention, it becomes rigidity Design is to realize through changing throttle slice thickness or jib-length.
Little mixing runner according to the invention, its characteristic size is 100 μ m～1mm, can adopt the traditional C NC processing except that bulk silicon process to combine little die casting process to complete, and reduces cost of manufacture.
Piezoelectric Driving micro-mixer preparation method according to the invention is characterized in that may further comprise the steps:
A. select PMMA for use, use accurate engraving machine to adopt the male mold of CNC fabrication techniques micro-mixer substrate.
B. adopt little die casting process, liquid PDMS is cast in the cavity of male mold structure, vacuum outgas recovered normal pressure after 30 minutes, and be heated to 100 ℃ again and solidified 60 minutes, normal temperature cooling 10 minutes, the demoulding can get the micro-mixer substrate.
C. select ganoine thin film for use, adopt laser cutting parameter to make check valve sheet.
D. the piezoelectric vibrator contact conductor is handled.
E. piezoelectric vibrator is handled with liquid contact surface insulation pad pasting.
F. with piezoelectric vibrator, check valve sheet with PDMS micro-mixer substrate package, be made into piezoelectric pump.
G. with glass film plates with PDMS micro-mixer substrate package, be made into little mixing runner.
Piezoelectric Driving micro-mixer control method according to the invention is characterized in that comprising following operator scheme:
A. under other controlled condition one stable condition, change is respectively organized the piezoelectric pump operating voltage and can be realized becoming the cubical content Microfluidic Mixing respectively.
B. under piezoelectric pump flow one stable condition, the piezoelectric pump operating frequency is respectively organized in change simultaneously can provide the mixed mode of the active with different mixed effects.
C. under other controlled condition one stable condition, micro-mixer is respectively organized piezoelectric pump and is adopted the phase cross-over formula signal of telecommunication to encourage, and realizes that microfluid dither dislocation type mixes.
D. Piezoelectric Driving micro-mixer electric signal waveform can be selected sine wave or square wave for use.
E. with piezoelectric pump output flow, pulsation hybrid frequency, to drive electrical signal phase poor, three control Rational Parameters couplings can realize that microfluid high-efficiency turbulent flow formula in fluid channel mixes.
Piezoelectric Driving micro-mixer operation principle according to the invention is: piezoelectric vibrator produces flexural vibrations under the effect of alternate electrical signal, cause the variation of cavity volume and pressure, under the mating reaction of check valve sheet, realizes the unidirectional pumping of fluid.Two or more mixed solution is pumped into through piezoelectric pump and mixes in the runner; Through the various control pattern (as: changing voltage, frequency, waveform and phase place) of implementing micro-mixer, thereby realize comprising multiple mixed modes such as homophase mixing, out-phase mixing, low frequency pulsating mixing, dither mixing, equal proportion mixing, inequality proportion.Become the design of rigidity check valve sheet and arrange that be aided with parabolic cavity body structure, piezoelectric pump according to the invention has high frequency, high performance work characteristics, thereby has guaranteed that Piezoelectric Driving micro-mixer according to the invention has the following advantages because of adopting:
1. on the basis that possesses extremely fast mixed, mixed effect and incorporation time controlled range are big.Mixed mode according to the invention can realize that turbulent flow is mixed under the thousands of inferior minute yardsticks of per second, and mixing efficiency is high, and incorporation time gets into nanosecond.In addition, through regulating hybrid frequency, can realize the controlled mixing of mixed effect and incorporation time on a large scale.
2. mix runner characteristic size highly compatible.Because of the high frequency that piezoelectric pump had, high performance output characteristics, the micro-mixer characteristic size is required can be wideer, characteristic size greater than 100 microns fluid channel in, can realize that still the high-efficiency turbulent flow formula mixes.
3. the micro-mixer material of main part is selected PDMS and glass for use, and manufacture craft adopts traditional C NC processing to combine little die casting process, and structure and manufacture craft are simple, and cost is low, applicable to disposable use occasion.
4. adopt the dither mixed mode, incorporation time is short with the mixing distance, and the PDMS substrate is integrated in one microfluid driver element and little mixed cell in addition, and Piezoelectric Driving micro-mixer machine volume according to the invention is little, is easy to integrated.
Description of drawings
Fig. 1 falls " 8 " font beam type combination valve structural representation for the present invention
Fig. 2 is the micro-mixer structural representation of first embodiment of the invention
Fig. 3 is the micro-mixer fundamental diagram of first embodiment of the invention
Fig. 4 is the micro-mixer three-dimensional exploded view of first embodiment of the invention
Fig. 5 is the micro-mixer structural representation of second embodiment of the invention
Fig. 6 is the micro-mixer fundamental diagram of second embodiment of the invention
Fig. 7 is the micro-mixer three-dimensional exploded view of second embodiment of the invention
Fig. 8 is signal waveform input phase control sketch map of the present invention
The specific embodiment
Micro-mixer under embodiment 1 single cavity simple oscialltor piezoelectric pump drives
With reference to Fig. 1, cantilever beam structures check valve 3 is compound on the same substrate 1 with middle access hole 2, constitutes " 8 " font check valve sheet, can realize controlling the non-return valve function that two different directions effluent behind two positive and negative closed assemblies of same structure valve block.The change rigidity Design of beam type check valve sheet adopts the thickness of the whole valve block of change or the jib-length of valve to realize, with the high frequency response characteristic that improves check valve and the efficient of effluenting.Wherein, inlet valve rigidity is lower than outlet valve rigidity.
With reference to Fig. 2, PDMS substrate 9 is integrated in one piezoelectric pump 6 and 7 with little mixing runner 8, wherein, comprises two inlet 4,5 and mixed exports 10, and substrate 9 forms with glass film plates 11 encapsulation backs and mixes runner 8.
With reference to Fig. 3, every group of piezoelectric pump and micro-mixer operation principle are among the embodiment 1: piezoelectric vibrator 13 is realized upwards and downward once reciprocating flexural vibrations in a complete alternating impulse signal (sine or square-wave signal) effect down.Piezoelectric vibrator 13 constitutes cavity 14 with substrate 17, and when piezoelectric vibrator upwards vibrated, cavity 14 volumes increased; Pressure reduces, and when the pressure reduction in inlet 12 and the cavity 14 increased to a certain degree, inlet one-way valve 15 was opened; At this moment, outlet valve 16 cuts out, and piezoelectric pump is in the suction state; And when piezoelectric vibrator 13 downwarpings were vibrated, cavity 14 internal volumes reduced, and pressure increases, and inlet valve 15 cuts out, and when the pressure reduction in outlet plenum 24 and the cavity 14 increased to a certain degree, outlet check valve 16 was opened, and this moment, piezoelectric pump was in hull-borne.Wherein,, can realize that two kinds of solution carry out wrong phase type pulsation and mix in mixing runner 21, mix back solution through exporting cushion chamber 19 from mixed export 18 outputs through the phase difference of two groups of piezoelectric pump input electrical signal waveforms is controlled.For not interfering outlet valve block 16 normally to open and effluent smooth and easyly, outlet leaves cavity 24 under the valve block, and the length outline of outlet 23 is shorter than the length of reagent import cushion chamber 22, to guarantee adopting little die casting technology to make PDMS substrate 17.The square tube road 21 and the glass film plates 20 encapsulation backs that are positioned at below the PDMS substrate form little runner that mixes.
With reference to Fig. 4, the micro-mixer three-dimensional exploded view of embodiment 1 has been represented the assembly relation of each parts respectively from both direction.PDMS substrate 34 is integrated in one pump chamber, inlet 26 and 27, outlet 36, little mixing runner 35; Cantilever beam valve rigidity will be a little less than outlet check valve sheet 28 and 33 in the inlet one- way valve sheet 29 and 32; Realize the function of inlet and outlet check valve behind two groups of positive and negative closed assemblies of valve block, thereby piezoelectric vibrator 30 and 31 assembles with PDMS substrate 34 and to constitute complete single cavity simple oscialltor piezoelectric pump.Glass film plates 25 is encapsulated the final Piezoelectric Driving micro-mixer that forms with complete function with the one side that PDMS substrate 34 is manufactured with little mixing runner 35.
Micro-mixer under the two oscillator series voltage pumps of embodiment 2 dual chamber drive
With reference to Fig. 5, PDMS substrate 42 is integrated in one two groups of piezoelectric pumps 39 and 40 with little mixing runner 41, wherein, comprises two inlet 37,38 and mixed exports 43, and substrate 42 forms with glass film plates 44 encapsulation backs and mixes runner 41.Wherein, every group of piezoelectric pump all adopts the two oscillator cascaded structures of dual chamber.
With reference to Fig. 6, every group of piezoelectric pump and micro-mixer operation principle are among the embodiment 2: piezoelectric vibrator 58 constitutes inlet cavitys 61 with PDMS substrate 50, and piezoelectric vibrator 46 constitutes series connection cavitys 47, two cavitys with PDMS substrate 50 and is cascaded through intervalve 59.Check valve sheet 60 is assemblied in separately and constitutes inlet beam type check valve on the PDMS substrate, check valve and outlet check valve in the middle of constituting behind middle valve block 48 and the outlet valve block 49 positive and negative closed assemblies.Two piezoelectric vibrators 58 and 46 adopt the circuit mode that is connected in series.During work, when piezoelectric vibrator 58 when PDMS substrate 50 outside curve are vibrated, piezoelectric vibrator 46 vibrates to PDMS substrate 50 inside bend; This moment, entrance cavity 61 cavity pressures reduced, and inlet valve 60 is opened, and fluid 45 is inhaled into cavity from entering the mouth; And series connection cavity 47 cavity pressures increase; Intermediate valve 48 cuts out, and outlet valve 49 is opened, and fluid is pumped out through outlet plenum 57; When piezoelectric vibrator 58 when PDMS substrate 50 inside bend are vibrated; Piezoelectric vibrator 46 vibrates to PDMS substrate 50 outside curve; This moment, entrance cavity 61 cavity pressures increased, and series connection cavity 47 cavity pressures reduce, and inlet valve 60 cuts out; Outlet valve 49 cuts out, and fluid is also opened intermediate valve 48 under pressure through intervalve 59 and got in the series connection cavity 47.Comprehensive top two kinds of duties, every group of piezoelectric pump accomplished once suction and drainage procedure respectively under a complete alternating impulse signal (sine or square-wave signal) effect.Through the phase difference of two groups of piezoelectric pump input electrical signal waveforms is controlled, can realize that two kinds of mixed solutions carry out wrong phase type pulsation and mix in mixing runner 54, mix back solution through exporting cushion chamber 52 from mixed export 51 outputs.To guarantee in the design that the length of outlet 56 slightly is shorter than the length of reagent import cushion chamber 55, to realize the making of PDMS substrate 50.Be positioned at PDMS substrate 50 following square tube road 54 and glass film plates 53 encapsulation backs and form little runner that mixes.
With reference to Fig. 7, the micro-mixer three-dimensional exploded view of embodiment 2 has been represented the assembly relation of each parts respectively from both direction.PDMS substrate 72 is integrated in one pump chamber, inlet 64 and 65, outlet 77, little mixing runner 76; Inlet one- way valve sheet 63 and 74, middle check valve sheet 67 and 70, outlet check valve sheet 66 and 71 adopt and become the design of rigidity cantilever beam valve; Inlet valve rigidity is minimum; Intermediate valve rigidity is the highest, and outlet valve rigidity is placed in the middle.Realize non-return valve function with the applying of the pump housing bottom surface when inlet one- way valve sheet 63 and 74 assemblings; Middle check valve sheet 67 and 70 functions with check valve in the middle of realizing behind outlet check valve sheet 66 and the positive and negative closed assembly of 71 difference and outlet check valve, thus piezoelectric vibrator 62,75,68,69 constitutes two groups of complete dual chamber pair piezoelectric vibrator series voltage pumps with 72 assemblings of PDMS substrate.Glass film plates 73 is encapsulated the final Piezoelectric Driving micro-mixer that forms with complete function with the one side that PDMS substrate 72 is manufactured with little mixing runner 76.
The control of Piezoelectric Driving micro-mixer in the present embodiment, implement by following method:
(1) under other controlled condition one stable condition, change is respectively organized the piezoelectric pump operating voltage and can be realized becoming the cubical content Microfluidic Mixing respectively.
(2) under piezoelectric pump flow one stable condition, the piezoelectric pump operating frequency is respectively organized in change simultaneously provides the mixed mode of the active with different mixed effects.
(3) with reference to Fig. 8; Under other controlled condition one stable condition; The micro-mixer piezoelectric pump adopts the phase cross-over formula signal of telecommunication encourage, can realize that two kinds of mixed solutions carry out homophase (phase angle [alpha]=0 °) little mixing of pulsing (be generally laminar flow and mix, mixing efficiency is low), out-phase (phase angle [alpha]=180 °) little mixing of pulsing and (can realize chaos convection current mixing; Even turbulent flow mixes, and mixing efficiency is high), the dislocation type pulsation mixes under the α of arbitrary phase angle.
(4) Piezoelectric Driving micro-mixer electric signal waveform can be selected sine wave or square wave for use.
(5) with piezoelectric pump output flow, pulsation hybrid frequency, to drive electrical signal phase poor, three control Rational Parameters couplings can realize that microfluid high-efficiency turbulent flow formula in fluid channel mixes.
Piezoelectric Driving micro-mixer preparation method in the present embodiment may further comprise the steps:
(1) selects PMMA for use, use accurate engraving machine to adopt the male mold of CNC fabrication techniques micro-mixer substrate.
(2) adopt little die casting process, liquid PDMS is cast in the cavity of male mold structure, vacuum outgas recovered normal pressure after 30 minutes, and be heated to 100 ℃ again and solidified 60 minutes, normal temperature cooling 10 minutes, the demoulding can get the micro-mixer substrate.
(3) select ganoine thin film for use, adopt laser cutting parameter to make check valve sheet.
(4) the piezoelectric vibrator contact conductor is handled.
(5) piezoelectric vibrator is handled with liquid contact surface insulation pad pasting.
(6) with piezoelectric vibrator, check valve sheet with PDMS micro-mixer substrate package, be made into piezoelectric pump.
(7) with glass film plates with PDMS micro-mixer substrate package, be made into little mixing runner.
Piezoelectric Driving micro-mixer among the embodiment according to different mixed effects and rate requirement, can realize that pulsation mixes in 10Hz～1600Hz scope.Specifically be characterised in that: single cavity simple oscialltor piezoelectric pump drives operating frequency (the I section: 10Hz～400Hz of micro-mixer down; II section: 1200Hz～1600Hz), the two oscillator series voltage pumps of dual chamber drive down the operating frequency of micro-mixer (50Hz～1600Hz).
Claims (9)
1. Piezoelectric Driving micro-mixer; It is characterized in that: microfluid driver element (that is: piezoelectric pump) and little mixed cell (that is: mixing runner) are integrated in one by a whole PDMS substrate; Single-chip piezoelectric vibrator and check valve sheet constitute piezoelectric pump with the PDMS substrate package, and glass film plates constitutes the mixing runner with the PDMS substrate package; Piezoelectric vibrator adopts different voltages, frequency, different wave and phase cross-over formula to drive the signal of telecommunication and encourages, and realizes that microfluid dither dislocation type in little mixing runner mixes.
2. Piezoelectric Driving micro-mixer according to claim 1 is characterized in that: the blender substrate is the PDMS material.
3. Piezoelectric Driving micro-mixer according to claim 1 is characterized in that: the blender substrate has reagent import cushion chamber, and import cushion chamber length is longer than piezoelectric pump outlet length.
4. Piezoelectric Driving micro-mixer according to claim 1 is characterized in that: two groups or more piezoelectric pump is arranged in parallel in the micro-mixer input.
5. Piezoelectric Driving micro-mixer according to claim 4 is characterized in that: piezoelectric pump can adopt single cavity list piezoelectric vibrator, the two piezoelectric vibrators of single cavity, at least two structures such as multi-cavity body connection in series-parallel that piezoelectric vibrator forms.
6. Piezoelectric Driving micro-mixer according to claim 5 is characterized in that: adopt the beam type check valve, the valve structure likeness in form is " 8 " word.
7. Piezoelectric Driving micro-mixer according to claim 6 is characterized in that: check valve adopts and becomes the rigidity layout, and inlet valve rigidity is minimum, and intermediate valve rigidity is the highest, and outlet valve rigidity is placed in the middle.
8. method of making the described Piezoelectric Driving micro-mixer of claim 1 is characterized in that may further comprise the steps:
A. select PMMA for use, use accurate engraving machine to adopt the male mold of CNC fabrication techniques micro-mixer substrate.
B. adopt little die casting process, liquid PDMS is cast in the cavity of male mold structure, vacuum outgas recovered normal pressure after 30 minutes, and be heated to 100 ℃ again and solidified 60 minutes, normal temperature cooling 10 minutes, the demoulding can get the micro-mixer substrate.
C. select ganoine thin film for use, adopt laser cutting parameter to make check valve sheet.
D. the piezoelectric vibrator contact conductor is handled.
E. piezoelectric vibrator is handled with liquid contact surface insulation pad pasting.
F. with piezoelectric vibrator, check valve sheet with PDMS micro-mixer substrate package, be made into piezoelectric pump.
G. with sheet glass with PDMS micro-mixer substrate package, be made into little mixing runner.
9. method of controlling the described Piezoelectric Driving micro-mixer of claim 1 is characterized in that comprising following operator scheme:
A. under other controlled condition one stable condition, change is respectively organized the piezoelectric pump operating voltage and can be realized becoming the cubical content Microfluidic Mixing respectively.
B. under piezoelectric pump flow one stable condition, the piezoelectric pump operating frequency is respectively organized in change simultaneously can provide the mixed mode of the active with different mixed effects.
C. under other controlled condition one stable condition, micro-mixer is respectively organized piezoelectric pump and is adopted the phase cross-over formula signal of telecommunication to encourage, and realizes that microfluid dither dislocation type mixes.
D. Piezoelectric Driving micro-mixer electric signal waveform can be selected sine wave or square wave for use.
E. with piezoelectric pump output flow, pulsation hybrid frequency, to drive electrical signal phase poor, three control Rational Parameters couplings can realize that microfluid high-efficiency turbulent flow formula in fluid channel mixes.
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| CN103768985A (en) * | 2013-12-25 | 2014-05-07 | 浙江师范大学 | Novel piezoelectric driving microfluid mixer and preparation technology thereof |
| CN104832404A (en) * | 2015-05-13 | 2015-08-12 | 长春工业大学 | Piezoelectric micropump based on PDMS (Polydimethylsiloxane) |
| CN105521750A (en) * | 2016-01-27 | 2016-04-27 | 吉林大学 | Piezoelectric driven microfluid reaction chip based on FSAW (focusing surface acoustic wave) |
| CN106238114A (en) * | 2016-09-30 | 2016-12-21 | 吉林大学 | A kind of embedded three-dimensional runner based on PMMA material declines fluidic chip and manufacture method |
| CN106334488A (en) * | 2016-11-01 | 2017-01-18 | 海南大学 | Efficient and initiative micro-fluid mixer and mixing method |
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| CN103768985A (en) * | 2013-12-25 | 2014-05-07 | 浙江师范大学 | Novel piezoelectric driving microfluid mixer and preparation technology thereof |
| CN104832404A (en) * | 2015-05-13 | 2015-08-12 | 长春工业大学 | Piezoelectric micropump based on PDMS (Polydimethylsiloxane) |
| CN105521750A (en) * | 2016-01-27 | 2016-04-27 | 吉林大学 | Piezoelectric driven microfluid reaction chip based on FSAW (focusing surface acoustic wave) |
| CN106238114A (en) * | 2016-09-30 | 2016-12-21 | 吉林大学 | A kind of embedded three-dimensional runner based on PMMA material declines fluidic chip and manufacture method |
| CN106334488A (en) * | 2016-11-01 | 2017-01-18 | 海南大学 | Efficient and initiative micro-fluid mixer and mixing method |
| CN108148757A (en) * | 2016-12-05 | 2018-06-12 | 中国科学院大连化学物理研究所 | A kind of integrated ITO and piezoelectric pump micro-fluidic chip |
| CN107608113A (en) * | 2017-09-22 | 2018-01-19 | 京东方科技集团股份有限公司 | A kind of display panel, its preparation method and display device |
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| CN108298497A (en) * | 2018-01-30 | 2018-07-20 | 中国电子科技集团公司第三十八研究所 | A kind of microfluid packaging method of silicon based photon biologic sensor chip |
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